CN118033805A - Fiber-in structure based on whispering gallery microcavity, sensor and manufacturing method - Google Patents
Fiber-in structure based on whispering gallery microcavity, sensor and manufacturing method Download PDFInfo
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- CN118033805A CN118033805A CN202410441622.1A CN202410441622A CN118033805A CN 118033805 A CN118033805 A CN 118033805A CN 202410441622 A CN202410441622 A CN 202410441622A CN 118033805 A CN118033805 A CN 118033805A
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- 239000000835 fiber Substances 0.000 claims abstract description 80
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- 238000005520 cutting process Methods 0.000 claims description 17
- 239000004005 microsphere Substances 0.000 claims description 12
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 11
- 229910002113 barium titanate Inorganic materials 0.000 claims description 11
- 238000012544 monitoring process Methods 0.000 claims description 11
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Abstract
The invention provides an in-fiber structure based on a whispering gallery microcavity, a sensor and a manufacturing method thereof, and belongs to the field of micro-nano photonics. An in-fiber structure based on whispering gallery microcavities comprises a first waveguide, a second waveguide, a third waveguide and three whispering gallery microcavities; the first end of the first waveguide is an input end/output end, the second end of the first waveguide is in dislocation welding with the first end of the second waveguide, the second end of the second waveguide is in dislocation welding with the first end of the third waveguide, the offset directions are the same, and the offset amounts are the same; the three whispering gallery microcavities are embedded in the second waveguide, and between two ends of the second waveguide, the second end of the third waveguide is an input end/output end. The invention utilizes the whispering gallery microcavity to manufacture the fiber structure, realizes the quality factor to be increased to 10 5, and the slope of the Fano resonance peak reaches more than 100dB/nm, so that the sensing resolution is higher, the measuring accuracy can be improved, the temperature, the stress and other changes are more sensitive, and the invention is better applied to the field of sensors.
Description
Technical Field
The invention belongs to the technical field of micro-nano photonics, and particularly relates to an in-fiber structure based on a whispering gallery microcavity, a sensor and a manufacturing method.
Background
Because the whispering gallery microcavity optical sensor has the characteristics of high quality factor and narrow linewidth, the light waves in the microcavity can generate remarkable response to tiny environmental changes, so that the whispering gallery microcavity sensor is very sensitive in detecting and measuring trace substances. And the light wave in the microcavity can interact with substances in the environment in real time, the whispering gallery microcavity sensor can be used for monitoring changes of environmental parameters such as temperature, stress, chemical components and the like in real time. The stress regulation mode is to apply external force to the whispering gallery microcavity to deform the whispering gallery microcavity, and the refractive index of the microcavity is changed due to the influence of the elasto-optical effect, so that the resonance wavelength is changed. The magnitude of the stress can be obtained by analyzing the change of the resonance wavelength value. Currently, a non-chip integrated whispering gallery microcavity optical sensor mainly adopts a tapered coupling mode to excite the whispering gallery mode, however, the tapered fiber waist diameter must be smaller than 2 μm to effectively excite the whispering gallery mode, which makes the whole structure very fragile. When the tapered optical fiber is used for exciting the whispering gallery mode, the conditions of unstable structure, material abrasion and the like occur in the coupling process, so that a more stable and reliable method is required to be adopted for exciting the whispering gallery mode, and the stability and repeatability in practical application are improved. At present, in order to realize simple and stable coupling, a fiber-type optical fiber coupling method is developed, namely, a microsphere is fixed in a wedge-shaped cavity at the end part of an optical fiber or in a micropore structure in the optical fiber, and the structure has the advantages of compact structure, high stability, self alignment and the like. However, the quality factor of the existing fiber whispering gallery microcavity structure is low, usually lower than 10 4, and the slope of the Fano resonance peak is small, usually lower than 100 dB/nm.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides an in-fiber structure based on an echo wall microcavity, a sensor and a manufacturing method thereof, so as to solve the problems of low quality factor, low Fano resonance peak slope and the like of the in-fiber echo wall microcavity.
According to a first aspect of the embodiments of the present application, an in-fiber structure based on whispering gallery microcavities is provided, including a first waveguide, a second waveguide, a third waveguide, and three whispering gallery microcavities;
the first end of the first waveguide is an input end/output end, the second end of the first waveguide is in dislocation welding with the first end of the second waveguide, the second end of the second waveguide is in dislocation welding with the first end of the third waveguide, the dislocation directions are the same, and the dislocation amounts are the same; the three whispering gallery microcavities are embedded in the second waveguide, and between two ends of the second waveguide, the second end of the third waveguide is an input end/output end.
The three whispering gallery microcavities are tightly attached to each other and are tightly attached to the second waveguide.
The whispering gallery microcavity is a barium titanate microsphere.
The first waveguide and the third waveguide are single-mode optical fibers; the second waveguide is a double-core single-side hole optical fiber, the cladding of the double-core single-side hole optical fiber comprises a first fiber core arranged on an axis and a second fiber core arranged on the axis side, an air through hole is arranged around the first fiber core, and the air through hole penetrates through the second waveguide.
According to a second aspect of embodiments of the present application, there is provided a sensor comprising the whispering gallery microcavity-based on-fiber structure of the first aspect, a light source and a monitoring module; the light source is connected with a first end jumper wire of the first waveguide, and a second end of the third waveguide is connected with a monitoring module jumper wire.
The light source is a laser; the monitoring module is a spectrometer.
According to a third aspect of the embodiments of the present application, a method for manufacturing an in-fiber structure based on whispering gallery microcavities is provided, including the following steps:
S1, stripping a first end coating layer and a second end coating layer of a first waveguide by using a fiber stripper, stripping the first end coating layer and the second end coating layer of a second waveguide by using the fiber stripper, wiping the stripped coating position of the optical fiber by using mirror wiping paper, cutting the end surfaces of the first end and the second end of the first waveguide to be flat by using a cutting knife, and cutting the end surfaces of the first end and the second end of the second waveguide to be flat by using the cutting knife;
s2, the second end of the first waveguide and the first end of the second waveguide are in staggered welding, so that the fiber core at the axis of the second waveguide is transversely offset by 3-7 mu m relative to the fiber core of the first waveguide, and the length of the second waveguide is 1.6-2.1 cm;
s3, another section of single-mode fiber is taken, a section of coating layer in the middle is stripped, and the quartz fiber exposed after the coating layer is stripped is discharged and stretched by a fusion splicer to prepare a conical fiber probe;
S4, fixing a second waveguide on a glass slide, placing under a microscope, and fixing the conical optical fiber probe manufactured in the step S3 on a three-dimensional displacement platform;
s5, operating the three-dimensional displacement platform, so that the tip end of the conical optical fiber probe fixed on the three-dimensional displacement platform sends the whispering gallery microcavity into the air through hole of the second waveguide from the second end of the second waveguide, and repeating the ball filling operation twice, so that the three whispering gallery microcavities are mutually clung, and the three whispering gallery microcavities are filled into the air through hole;
S6, taking the second waveguide off the glass slide, placing the glass slide in a fusion splicer, stripping the first end coating layer and the second end coating layer of the third waveguide by using a fiber stripper, wiping the fiber stripping coating position by using mirror wiping paper, and cutting the end faces of the first end and the second end of the third waveguide to be flat by using a cutting knife; and then the second end of the second waveguide and the first end of the third waveguide are welded in a staggered way, so that the fiber core at the axis of the second waveguide is shifted by 3-7 mu m transversely relative to the fiber core of the third waveguide, and the shift direction and shift amount of the fiber core at the axis of the second waveguide relative to the fiber core of the third waveguide and the first waveguide are the same, thereby forming a final structure.
Further, the core at the second waveguide axis is laterally offset from the first waveguide core by 5 μm; the core at the second waveguide axis is laterally offset by 5 μm relative to the core of the third waveguide, and the length of the second waveguide is 1.8cm.
Furthermore, the whispering gallery microcavities are all barium titanate microspheres.
The beneficial effects of the invention are as follows: compared with the prior art, the on-fiber structure, the sensor and the manufacturing method based on the whispering gallery microcavity realize that the quality factor is improved to 10 5, and the gradient of the Fano resonance peak reaches more than 100dB/nm, so that the sensing resolution is higher, the measuring accuracy can be improved, the sensor is more sensitive to temperature, stress and other changes, and the sensor is better applied to the field of sensors; meanwhile, the structural coupling coefficient change is in a linear relation with the formant position change, the coupling coefficient change can be obtained through the formant position change, the pressure applied to the second waveguide by the outside can be reversely pushed, and the strain can be measured; in addition, the present invention utilizes an integrated structure for measurement that is easy to move and can be measured at different locations such as under water, in air, in salt solutions, etc. The structure is simple and effective, the spectrometer is utilized for analysis, the assembly and adjustment are simple, the packaged in-fiber whispering gallery microcavity sensing parameter performance is good, the packaging cost is low, the steps are simple, the sensing performance is improved, the process is easy to solidify, the mass production is facilitated, and the method is beneficial to the future development direction of the miniaturized and integrated packaging process.
Drawings
Fig. 1 is a schematic diagram of an in-fiber structure based on whispering gallery microcavities according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a second waveguide end structure according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of a sensor according to an embodiment of the invention.
Fig. 4 is a schematic diagram of a manufacturing method according to an embodiment of the invention.
FIG. 5 is a schematic diagram of a high resolution spectrum collected transmission spectrum according to an embodiment of the present invention.
FIG. 6 is an enlarged schematic diagram of a set of formants of a transmission spectrum collected by a high-resolution spectrum according to an embodiment of the present invention.
FIG. 7 is a diagram of a transmission spectrum collected by a low resolution spectrum according to an embodiment of the invention.
FIG. 8 is an enlarged schematic diagram of the Fano resonance peaks in the transmission spectrum collected by the low-resolution spectrum according to an embodiment of the present invention.
FIG. 9 is a graph showing transmission spectra at different coupling coefficients according to an embodiment of the present invention.
FIG. 10 is a diagram showing the relationship between the coupling coefficient variation and the wavelength variation according to the present embodiment of the invention.
1, A first waveguide; 2. a second waveguide; 3. a third waveguide; 4. a whispering gallery microcavity; 5. a light source; 6. a monitoring module; 21. a first core; 22 a second core; 23 air through holes.
Detailed Description
The technical scheme in the invention is clearly and completely described below with reference to the attached drawings and specific embodiments. It should be noted that the described embodiments of the present invention are only used for further explanation and illustration, and are not intended to limit the scope of application thereof. All other embodiments, which can be obtained by a person skilled in the art without making any inventive effort, are within the scope of protection of the present patent.
As shown in fig. 1 to fig. 2, a first aspect of the embodiment of the present application provides an in-fiber structure based on a whispering gallery microcavity 4, which includes a first waveguide 1, a second waveguide 2, a third waveguide 3, and three barium titanate microspheres; the first end of the first waveguide 1 is an input/output end, the second end of the first waveguide 1 is welded to the first end of the second waveguide 2, the second end of the second waveguide 2 is welded to the first end of the third waveguide 3, three barium titanate microspheres are embedded in the second waveguide 2, and the second end of the third waveguide 3 is an output/input end between two ends of the second waveguide 2.
The barium titanate microspheres are tightly attached to each other and the second waveguide 2.
The first waveguide 1 and the third waveguide 3 are single mode optical fibers; the second waveguide 2 is a twin-core single-side hole optical fiber. The cladding of the dual-core single-side hole optical fiber comprises a first fiber core 21 arranged on the axis and a second fiber core 22 arranged on the axis side, and an air through hole 23 is arranged around the first fiber core 21, and the air through hole 23 penetrates through the second waveguide 2.
As shown in fig. 3, in a second aspect of the embodiment of the present application, a sensor is provided, which includes the fiber-in-fiber structure based on the whispering gallery microcavity 4, a light source 5 and a monitoring module 6 according to the embodiment of the first aspect. The light source 5 is in jumper connection with the first end of the first waveguide 1, and the second end of the third waveguide 3 is in jumper connection with the monitoring module 6. In this embodiment, the light source 5 is a laser, and the monitoring module 6 is a spectrometer.
As shown in fig. 4, in a third aspect of the embodiment of the present application, a method for manufacturing an in-fiber structure based on a whispering gallery microcavity 4 according to the first aspect is provided, which includes the following steps:
S1, stripping a first end coating layer and a second end coating layer of a first waveguide by using a fiber stripper, stripping the first end coating layer and the second end coating layer of a second waveguide by using the fiber stripper, wiping the stripped coating position of the optical fiber by using mirror wiping paper, cutting the end surfaces of the first end and the second end of the first waveguide to be flat by using a cutting knife, and cutting the end surfaces of the first end and the second end of the second waveguide to be flat by using the cutting knife;
s2, the second end of the first waveguide 1 and the first end of the second waveguide 2 are in staggered welding, so that the fiber core at the axis of the second waveguide 2 is shifted by 3-7 μm transversely relative to the fiber core of the first waveguide 1, and the length of the second waveguide 2 is 1.6cm-2.1cm;
s3, another section of single-mode fiber is taken, a section of coating layer in the middle is stripped for 5cm, and the quartz fiber exposed out after the coating layer is stripped is discharged and stretched by a fusion splicer to prepare a conical fiber probe;
S4, fixing the second waveguide 2 on a glass slide, placing under a microscope, and fixing the conical optical fiber probe manufactured in the step S3 on a three-dimensional displacement platform;
S5, operating the three-dimensional displacement platform, so that the tip of the conical optical fiber probe fixed on the three-dimensional displacement platform sends barium titanate microspheres into the air through hole 23 of the second waveguide 2 from the second end of the second waveguide 2, and repeating the ball filling operation twice, so that the three barium titanate microspheres are mutually clung, and the three barium titanate microspheres are filled into the air through hole 23;
S6, the second waveguide 2 is taken down from a glass slide, placed in a fusion splicer, stripped by using a fiber stripper, the first end and the second end coating layer of the third waveguide 3 are stripped, the stripped coating position of the optical fiber is wiped by using mirror wiping paper, and then the end faces of the first end and the second end of the third waveguide 3 are cut to be flat by using a cutting knife; and then the second end of the second waveguide 2 and the first end of the third waveguide 3 are welded in a staggered way, so that the fiber core at the axis of the second waveguide 2 is transversely offset by 3-7 mu m relative to the fiber core of the third waveguide 3, and the offset direction and the offset amount of the fiber core at the axis of the second waveguide 2 relative to the fiber core of the third waveguide 3 and the first waveguide 1 are the same, thereby forming a final structure.
In this embodiment, the core at the axis of the second waveguide 2 is offset by 5 μm laterally with respect to the core of the first waveguide 1; the core at the axis of the second waveguide 2 is laterally offset 5 μm from the core of the third waveguide 3, and the length of the second waveguide 2 is 1.8cm.
In this example, the diameter of the barium titanate microsphere is 27 μm to 35 μm, and the refractive index is 1.92. The first waveguide 1 and the third waveguide 3 are single mode optical fibers; the second waveguide 2 is a twin-core single-side hole optical fiber. The cladding refractive index of the dual-core single-side hole optical fiber is 1.4575, the refractive index of the first fiber core 21 and the second fiber core 22 are 1.4625, the diameters of the two fiber cores are 10 μm, the diameter of the air through hole 23 is 40 μm, and the refractive index difference between the fiber cores and the cladding is 0.005. The first waveguide 1 and the second waveguide 2 are welded and the second waveguide 2 and the third waveguide 3 are welded in a staggered manner by using a staggered welding machine, and the offset directions are the same; the offset is the same. The dislocation fusion splicer has the ability to look over the end face, and the position of the fiber core is determined by looking over the end face, thereby controlling the offset.
An in-fiber structure based on whispering gallery microcavity 4 manufactured by the embodiment of the third aspect of the present application is tested by adopting two spectrometers: welding the first end of the first waveguide 1 with one end of a jumper, wherein the other end of the jumper is connected with a laser, and the wave band of a light source emitted by the laser is 1527nm-1610nm; welding the second end of the third waveguide 3 with one end of another jumper, and connecting the other end of the jumper with two types of spectrometers with low resolution and high resolution in sequence respectively; the resolution of the low-resolution spectrometer is set to be 20pm, and the number of sampling points is set to be 50000 points; the resolution of the high-resolution spectrometer is set to 40fm, and the number of sampling points is set to 50000 points. Fig. 5 to 8 show the data measured in detail in this example. FIG. 5 is a graph showing the spectral information collected by the high resolution spectrometer, namely the transmission intensity values after the light in the 1527nm-1610nm band passes through the structure, and the waveforms in the graph represent the resonance line shape; FIG. 6 is an enlarged view showing the change in the transmission intensity values of a set of formants around the 1555nm wavelength in FIG. 5. By selecting one of the formants to calculate the quality factor according to fig. 6, the quality factor of the echo wall micro-cavity 4 can be calculated to be 10 5 orders of magnitude higher than that of the existing in-fiber echo wall micro-cavity 4 in the field. FIG. 7 is a graph showing the spectral information collected by the low resolution spectrometer, i.e. the transmission intensity values after passing through the structure in the wavelength band 1527nm-1610nm, the waveforms in the graph representing the resonance line shape; FIG. 8 is an enlarged view showing the change in the transmission intensity values of a set of formants around the 1590nm wavelength in FIG. 7. FIG. 8 shows a pronounced Fano resonance line, which can be calculated to give a Fano resonance peak slope of 119dB/nm. Compared with the fiber-type whispering gallery microcavity 4 in the field, the two parameters are obviously improved, and the improvement of the resolution of the sensor is facilitated. Fig. 9-10 are graphs of data versus pressure measurements for an in-fiber structure based on whispering gallery microcavities 4. The coupling coefficient can be changed by applying pressure on the outer side of the second waveguide 2, the position of a formant in the transmission spectrum can be influenced by the change of the coupling coefficient, the distance of the position change of the formant is substituted into an optical formula for calculation, and the pressure applied by the outside on the second waveguide 2 can be obtained, so that the pressure can be measured. Fig. 9 is a specific illustration of the coupling coefficient variation of the present embodiment for the spectrum influence, and fig. 10 is a relation between the coupling coefficient variation and the formant position variation of the present embodiment, and the determination coefficient is 0.9995, so that the relation is linear, and the relation can be used for measuring the pressure.
Claims (9)
1. An on-fiber structure based on whispering gallery microcavity, which is characterized in that: the device comprises a first waveguide, a second waveguide, a third waveguide and three whispering gallery microcavities; the first end of the first waveguide is an input end/output end, the second end of the first waveguide is in dislocation welding with the first end of the second waveguide, the second end of the second waveguide is in dislocation welding with the first end of the third waveguide, the dislocation directions are the same, and the dislocation amounts are the same; the three whispering gallery microcavities are embedded in the second waveguide, and between two ends of the second waveguide, the second end of the third waveguide is an input end/output end.
2. The whispering gallery microcavity-based on-fiber structure of claim 1, wherein: the three whispering gallery microcavities are tightly attached to each other and are tightly attached to the second waveguide.
3. The whispering gallery microcavity-based on-fiber structure of claim 1, wherein: the whispering gallery microcavities are barium titanate microspheres.
4. The whispering gallery microcavity-based on-fiber structure of claim 1, wherein: the first waveguide and the third waveguide are single-mode optical fibers; the second waveguide is a double-core single-side hole optical fiber, the cladding of the double-core single-side hole optical fiber comprises a first fiber core arranged on an axis and a second fiber core arranged on the axis side, an air through hole is arranged around the first fiber core, and the air through hole penetrates through the second waveguide.
5. A sensor, characterized in that: the sensor comprises an in-fiber structure based on a whispering gallery microcavity as claimed in any one of claims 1-4, and further comprises a light source and a monitoring module; the light source is connected with a first end jumper wire of the first waveguide, and a second end of the third waveguide is connected with a monitoring module jumper wire.
6. A sensor according to claim 5, wherein: the light source is a laser; the monitoring module is a spectrometer.
7. A manufacturing method of an in-fiber structure based on a whispering gallery microcavity comprises the following steps:
S1, stripping a first end coating layer and a second end coating layer of a first waveguide by using a fiber stripper, stripping the first end coating layer and the second end coating layer of a second waveguide by using the fiber stripper, wiping the stripped coating position of the optical fiber by using mirror wiping paper, cutting the end surfaces of the first end and the second end of the first waveguide to be flat by using a cutting knife, and cutting the end surfaces of the first end and the second end of the second waveguide to be flat by using the cutting knife;
s2, the second end of the first waveguide and the first end of the second waveguide are in staggered welding, so that the fiber core at the axis of the second waveguide is transversely offset by 3-7 mu m relative to the fiber core of the first waveguide, and the length of the second waveguide is 1.6-2.1 cm;
s3, another section of single-mode fiber is taken, a section of coating layer in the middle is stripped, and the quartz fiber exposed after the coating layer is stripped is discharged and stretched by a fusion splicer to prepare a conical fiber probe;
S4, fixing a second waveguide on a glass slide, placing under a microscope, and fixing the conical optical fiber probe manufactured in the step S3 on a three-dimensional displacement platform;
s5, operating the three-dimensional displacement platform, so that the tip end of the conical optical fiber probe fixed on the three-dimensional displacement platform sends the whispering gallery microcavity into the air through hole of the second waveguide from the second end of the second waveguide, and repeating the ball filling operation twice, so that the three whispering gallery microcavities are mutually clung, and the three whispering gallery microcavities are filled into the air through hole;
S6, taking the second waveguide off the glass slide, placing the glass slide in a fusion splicer, stripping the first end coating layer and the second end coating layer of the third waveguide by using a fiber stripper, wiping the fiber stripping coating position by using mirror wiping paper, and cutting the end faces of the first end and the second end of the third waveguide to be flat by using a cutting knife; and then the second end of the second waveguide and the first end of the third waveguide are welded in a staggered way, so that the fiber core at the axis of the second waveguide is shifted by 3-7 mu m transversely relative to the fiber core of the third waveguide, and the shift direction and shift amount of the fiber core at the axis of the second waveguide relative to the fiber core of the third waveguide and the first waveguide are the same, thereby forming a final structure.
8. The method for manufacturing the in-fiber structure based on the whispering gallery microcavity according to claim 7, wherein the method comprises the following steps: the core at the second waveguide axis is laterally offset from the first waveguide core by 5 μm; the core at the second waveguide axis is laterally offset by 5 μm relative to the core of the third waveguide, and the length of the second waveguide is 1.8cm.
9. The method for manufacturing the in-fiber structure based on the whispering gallery microcavity according to claim 8, wherein the method is characterized by comprising the following steps: the whispering gallery microcavities are barium titanate microspheres.
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