CN117969935A - Current measurement method, device and test equipment under ATE leakage current scene - Google Patents
Current measurement method, device and test equipment under ATE leakage current scene Download PDFInfo
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Abstract
The invention discloses a current measurement method, a device and test equipment under an ATE leakage current scene, which relate to the technical field of semiconductor test, in particular to the technical field of ATE measurement, and the method comprises the steps of determining a compensation model related to current, voltage and temperature in the process of testing equipment to test equipment to be tested; obtaining a measured value of a device to be tested, wherein the measured value comprises a current measured value, a voltage measured value and a temperature measured value of a test environment; and carrying out compensation calculation on the measured value of the equipment to be measured based on the compensation model to obtain the actual current value of the equipment to be measured. The invention builds a compensation model based on current, voltage and temperature, and compensates the obtained measured value of the current by the compensation model, thereby obtaining the actual value of the current; the method fully considers the relation between the leakage current and the current, the relation between the voltage and the temperature under the condition of larger leakage current; the data obtained by measurement based on the compensation method has higher precision and can restore the actual value of the data better.
Description
Technical Field
The invention belongs to the technical field of semiconductor testing, and particularly relates to a current measurement method, a device and test equipment under an ATE leakage current scene.
Background
Leakage current generally exists in components and circuits, and when automatic test equipment (ATE, automatic Test Equipment) is used for measuring the current of equipment to be tested, the measurement result of the test equipment is influenced due to the existence of the leakage current; in the prior art, a compensation scheme is made for leakage current, so that measurement data can be restored to a certain extent; in the case of very small leakage currents and small temperature variations in the test system, the leakage currents can be considered to be essentially linear, and existing compensation schemes compensate the measured value of the current for the case of very small leakage currents. However, the leakage current is not only related to the current magnitude, but also to the voltage and temperature; when the leakage current of the test system is relatively large, the nonlinear phenomenon of the leakage current is serious, and the influence of temperature and voltage on the leakage current is not considered in the existing compensation scheme, so that the measured data deviation is relatively large and serious distortion is caused.
Disclosure of Invention
The invention provides a current measurement method, a device and test equipment under an ATE leakage current scene, and aims to provide measurement of leakage current so as to solve the problems that the existing measurement method cannot effectively compensate the leakage current under the condition of larger leakage current, so that measured data deviation is larger and serious distortion is caused.
In order to solve the above technical problems, in a first aspect, the present invention provides a current measurement method under a leakage current scenario of a test device, including
During the process of testing the device to be tested by the test device, determining a compensation model related to current, voltage and temperature;
Obtaining a measured value of the equipment to be tested, wherein the measured value comprises a current measured value, a voltage measured value and a temperature measured value of a test environment;
and carrying out compensation calculation on the measured value of the equipment to be detected based on the compensation model to obtain the actual current value of the equipment to be detected.
In a second aspect, the present invention provides a current measurement apparatus in an ATE leakage current scenario, which includes a determining unit configured to determine a compensation model related to a current, a voltage, and a temperature;
The acquisition unit is used for acquiring the measured value of the equipment to be tested, wherein the measured value comprises a current measured value, a voltage measured value and a temperature measured value of a test environment;
And the calculation unit is used for carrying out compensation calculation on the measured value of the equipment to be measured based on the compensation model to obtain the actual value of the current of the equipment to be measured.
In a third aspect, the present invention provides a test apparatus comprising
The main control module is used for generating a digital signal and transmitting the digital signal to the measurement module; the measuring module is connected with the main control module and used for converting the digital signal into an analog signal and transmitting the analog signal to equipment to be measured so as to provide voltage or current for the equipment to be measured; the system is also used for collecting measured values of the equipment to be tested, wherein the measured values comprise a current measured value, a voltage measured value and a temperature measured value of a test environment;
the main control module is also used for calculating the actual current value of the equipment to be tested based on the measured value of the equipment to be tested by the method.
Compared with the prior art, the invention builds a compensation model based on the current, the voltage and the temperature, and compensates the obtained measured value of the current through the compensation model, thereby obtaining the actual value of the current; the method fully considers the relation between the leakage current and the current, the relation between the voltage and the temperature under the condition of larger leakage current; the data obtained by measurement based on the compensation method has higher precision and can restore the actual value of the data better.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic flow chart of a current measurement method in an ATE leakage current scenario according to an embodiment of the present invention;
FIG. 2 is a schematic view of a sub-process of the embodiment shown in FIG. 1;
FIG. 3 is a schematic view of a sub-process of the embodiment shown in FIG. 2;
FIG. 4 is a schematic block diagram of a current measurement device in an ATE leakage current scenario according to an embodiment of the present invention;
fig. 5 is a schematic block diagram of a test apparatus according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be understood that the terms "comprises" and "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention will be described in further detail with reference to the accompanying drawings.
Referring to fig. 1 to 3, fig. 1 is a current measurement method in an ATE leakage current scenario according to an embodiment of the present invention, the method includes the following steps:
S100, determining a compensation model related to current, voltage and temperature in the process of testing the device to be tested by the testing device.
The test equipment is used for measuring the current of the equipment to be tested, when the test equipment is used for measuring the current of the equipment to be tested, the test equipment usually has the leakage current condition, and the compensation model is used for compensating the leakage current scene.
In some embodiments, the test equipment may refer to automatic test equipment ATE.
S200, obtaining measured values of the device to be tested, wherein the measured values comprise a current measured value, a voltage measured value and a temperature measured value of a test environment.
The current measured value is a value obtained by the test equipment, the voltage measured value is a voltage value sent by the test equipment, and the temperature measured value is a temperature value of the test equipment.
And S300, performing compensation calculation on the measured value of the equipment to be measured based on the compensation model to obtain the actual current value of the equipment to be measured.
The current measured value has a certain relation with the current actual value and the leakage current value, and the leakage current value is compensated through the compensation model to obtain the current actual value.
The existing compensation method is based on the current measurement value to directly compensate the current, and under the scene of larger leakage current, the influence of the current itself is considered, and the influence of temperature and voltage on the leakage current is considered.
In a specific embodiment, as shown in fig. 2, before step S100, that is, before the test device tests the device under test, the method further includes the following steps S10-S30, which are specifically as follows:
S10, determining a test scene and compensation parameters under the test scene in the process of calibrating the test equipment. The test scene is used for indicating the test type of the sample equipment connected with the test equipment in the calibration process of the test equipment.
A compensation model is required to be built before the compensation model is determined; firstly, a formula of a compensation model related to current, voltage and temperature is to be established, wherein the formula of the compensation model comprises compensation parameters according to different test scenes, and different compensation parameters can be selected according to different test scenes. The test scenes are related to the types of the devices to be tested, namely, the different types of the devices to be tested have different current values, and the corresponding test scenes are different.
S20, calculating adjustment coefficients of the current measured value, the voltage measured value and the temperature measured value according to the measured value and the current actual value obtained from the sample equipment.
The compensation model also comprises adjustment coefficients which are respectively used for compensating the current measurement value, the voltage measurement value and the temperature measurement value; and acquiring corresponding adjustment coefficients in the process of calibrating the compensation model formulas under different test scenes based on the acquired compensation parameters, measured value data acquired from a large number of other test devices and data of current actual values.
S30, constructing a compensation model corresponding to the test scene based on the compensation parameters and the adjustment coefficients in the test scene.
And finally, constructing complete compensation models under different scenes based on the acquired compensation parameters and the adjustment coefficients.
In an alternative embodiment, as shown in fig. 3, step S10: determining the test scene and the compensation parameters under the test scene comprises the following steps of S11-S13:
S11, determining a measurement gear of the test equipment according to the current of the equipment to be tested, wherein the measurement gear is used for indicating the measurement range of the current.
According to the current magnitude of the device to be tested, a measurement gear of the test device needs to be selected, and the test device generally comprises a plurality of measurement gears, and each measurement gear is used for corresponding to a different current measurement range.
In a specific embodiment, the test device is divided into a first gear, a second gear, a third gear and a fourth gear, where the first gear is used for measuring devices to be tested for current within 20 μa, the second gear is used for measuring devices to be tested for current within 200 μa, the third gear is used for measuring devices to be tested for current within 20mA, the fourth gear is used for measuring devices to be tested for current within 800mA, different types of devices to be tested should select the correct measurement gear, otherwise, the measurement gear is improperly selected, which may affect the accuracy of the measurement result.
S12, determining a test scene based on the leakage current under the measurement gear.
The leakage current existing in the test equipment is related to the selected gear of the test equipment, when the gear of the test equipment is higher, the influence of the leakage current on the measurement precision of the test equipment is smaller, so that different measurement gears correspond to test scenes with different leakage current sizes.
In a specific embodiment, if the ratio of the leakage current in the measurement gear to the measurement range of the current is less than 1%, determining that the test scene is a small leakage current scene, otherwise determining that the test scene is a large leakage current test scene.
S13, acquiring compensation parameters corresponding to the test scene according to the test scene.
And through simulation design, carrying out simulation analysis on the leakage current of different test equipment to obtain compensation parameters under different test scenes. It can be known that the influence of the leakage current on the measurement result is different due to the difference of the leakage current under different test scenes; for example: under a large-current test scene, the leakage current of the test equipment is smaller than the current of the equipment to be tested, so that the influence caused by the leakage current is also smaller, and consideration factors for alignment compensation are also smaller in the scene, so that the value of the compensation parameter is also smaller; on the contrary, in the scene of small leakage current, the value of the compensation parameter should be larger.
Different test scenes are divided based on the size of leakage current, and different compensation parameters are selected according to the different test scenes, so that the leakage current is compensated to different degrees.
In this embodiment, the formula of the compensation model is shown in the following formula (1):
Wherein I comp is the actual value of the current, I is the measured value of the current, U is the measured voltage value of the current, and T is the measured value of the temperature; m1, M2 and M3 are compensation parameters, M1 is equal to or greater than 1, M2 is equal to or greater than 0, and M3 is equal to or greater than 0; a. b and c are respectively the adjustment coefficients of the current measurement value, the voltage measurement value and the temperature measurement value.
The method comprises the steps of testing a device to be tested for measuring current within 20 mu A, testing a device to be tested for measuring current within 200 mu A, testing a device to be tested for measuring current within 20mA, testing a device to be tested for measuring current within 800mA, and selecting M1=1, M2=1 and M3=1 when the device to be tested is the first gear or the second gear; when the test equipment is in the third gear, m1=1, m2=0 and m3=1 are selected; when the test equipment is in the fourth gear, m1=1, m2=0 and m3=0 are selected; it can be appreciated that when the test device is in the fourth gear, the corresponding scenario is a small leakage current scenario, so that the influence of voltage and temperature on the current measurement value can be eliminated.
The compensation formula fully considers the influence of different factors on leakage current under different scenes, so that the obtained current actual value data is more accurate.
Fig. 4 is a schematic block diagram of a current measurement device in an ATE leakage current scenario according to an embodiment of the present invention. As shown in fig. 4, for the above current measurement method, the present invention also provides a current measurement apparatus 200 in the ATE leakage current scenario, which includes a unit for performing the above current measurement method. Specifically, the method includes a determining unit 210, an acquiring unit 220 and a calculating unit 230, wherein the determining unit 210 is used for determining a compensation model related to current, voltage and temperature; the obtaining unit 220 is configured to obtain measurement values of a device under test, where the measurement values include a current measurement value, a voltage measurement value, and a temperature measurement value of a test environment; the calculating unit 230 is configured to perform compensation calculation on the measured value of the device under test based on the compensation model, so as to obtain an actual current value of the device under test.
In an alternative embodiment, the determining unit 210 further comprises a calibration unit, an adjustment unit and a construction unit. The calibration unit is used for determining compensation parameters in a test scene; the test scene is used for indicating the type of the device to be tested which is tested by the test device; the adjusting unit is used for calculating adjustment coefficients of the current measured value, the voltage measured value and the temperature measured value according to the measured value and the current actual value which are obtained from other equipment to be measured; the construction unit is used for constructing a compensation model corresponding to the test scene based on the compensation parameters and the adjustment coefficients under the test scene.
In an alternative embodiment, the scene determining unit includes a gear determining unit, a scene determining unit, and a parameter acquiring unit. The scene determining unit is used for determining a measurement gear of the test equipment according to the current of the equipment to be tested; the scene determining unit is used for determining a test scene based on the leakage current under the measurement gear; the parameter acquisition unit is used for acquiring compensation parameters of the corresponding test scene according to the test scene.
As shown in fig. 5, the embodiment of the present invention further provides a test device 100, where the test device specifically includes a main control module 101, a measurement module 102, and a circuit protection module 103, and the main control module 101 is configured to generate a digital signal and transmit the digital signal to the measurement module 102; the measurement module 102 is connected with the processor, and is used for converting the digital signal into an analog signal and transmitting the analog signal to the device to be measured so as to provide voltage or current for the device to be measured; the main control module 101 is further configured to calculate an actual current value of the device under test according to the method. ; the circuit protection module 103 is connected between the measurement module and the device under test to protect the circuits in the test device.
In an alternative embodiment, measurement module 102 includes a digital-to-analog conversion unit, a measurement unit, and feedback circuit 1024. The digital-to-analog conversion unit is connected with the main control module 101 and is used for receiving the digital signal generated by the main control module 101 and converting the digital signal into an analog signal; a measuring unit for measuring a voltage and/or a current flowing through the device under test; the temperature measuring device is also used for measuring the temperature of the test environment where the device to be tested is located; and the feedback circuit 1023 is used for collecting the voltages at two ends of the measuring unit and converting the voltages to obtain the measured value of the equipment to be measured. Specifically, the measurement module includes a digital-to-analog converter 1021, an operational amplifier 1022, a measurement resistor 1023 and a temperature sensor 1025, the main control module 101 is connected to the digital-to-analog converter 1021, the positive terminal of the operational amplifier 1022 is connected to the digital-to-analog converter 1021, the negative terminal thereof is connected to a feedback circuit 1024, the output terminal thereof is connected to the measurement resistor 1023, the feedback circuit 1024 is connected to two ends of the measurement resistor 1023, and the feedback circuit 1024 is further connected between the main control module 101 and the device under test, the temperature sensor 1025 is connected to the main control module 101, wherein the main control module 101 may be a central processing unit CPU or other controllers, in a specific embodiment, the circuit protection module 103 includes a resistor R1, a resistor R2 and a resistor R3, the resistor R1 is connected in series with the sensing resistor, and the resistor R2 and the resistor R3 are connected to two ends of the resistor R1 in parallel and grounded; the temperature sensor 104 is connected to the processor 101.
It should be appreciated that in embodiments of the present invention, the Processor may be a central processing unit (Central Processing Unit, CPU), which may also be other general purpose processors, digital signal processors (DIGITAL SIGNAL processors, DSPs), application SPECIFIC INTEGRATED Circuits (ASICs), off-the-shelf Programmable gate arrays (Field-Programmable GATE ARRAY, FPGA) or other Programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or the like. Wherein the general purpose processor may be a microprocessor or the processor may be any conventional processor or the like.
Those skilled in the art will appreciate that all or part of the flow in a method embodying the above described embodiments may be accomplished by computer programs instructing the relevant hardware. The computer program may be stored in a storage medium that is a computer readable storage medium. The computer program is executed by at least one processor in the computer system to implement the flow steps of the embodiments of the method described above.
It will be understood that the invention has been described in terms of several embodiments, and that various changes and equivalents may be made to these features and embodiments by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (10)
1. A method for measuring current in an ATE leakage current scenario, comprising:
determining a compensation model related to current, voltage and temperature in the process of testing the device to be tested by the testing device;
Obtaining a measured value of the equipment to be tested, wherein the measured value comprises a current measured value, a voltage measured value and a temperature measured value of a test environment;
and carrying out compensation calculation on the measured value of the equipment to be detected based on the compensation model to obtain the actual current value of the equipment to be detected.
2. The method of claim 1, wherein prior to said determining the compensation model related to current, voltage and temperature, the method further comprises:
Determining a test scene and compensation parameters under the test scene in the process of calibrating the test equipment; the test scene is used for indicating the test type of the sample equipment connected with the test equipment in the calibration process of the test equipment;
Calculating adjustment coefficients of the current measurement value, the voltage measurement value and the temperature measurement value according to the measurement value and the current actual value acquired from the sample equipment;
and constructing a compensation model corresponding to the test scene based on the compensation parameters and the adjustment coefficients in the test scene.
3. The method of claim 2, wherein determining a test scenario and compensation parameters under the test scenario comprises:
Determining a measurement gear of the test equipment according to the current of the equipment to be tested, wherein the measurement gear is used for indicating the measurement range of the current;
determining the test scene based on the leakage current under the measurement gear;
And acquiring the compensation parameters corresponding to the test scene according to the test scene.
4.A method according to claim 3, wherein determining the test scenario based on the magnitude of leakage current in the measurement range comprises:
And if the ratio of the leakage current to the current measuring range in the measuring gear is smaller than a set threshold value, determining that the test scene is a small leakage current scene.
5. A method according to claim 3, wherein the measured gear comprises a first gear, a second gear, a third gear and a fourth gear, the current measurement range of the first gear being minimal, the fourth gear corresponding to the small leakage current scenario.
6. The method according to any one of claims 2 to 5, wherein the formula of the compensation model is as follows:
Wherein I comp is the actual value of the current, I is the measured value of the current, U is the measured value of the voltage,
T is the temperature measurement; m1, M2 and M3 are the compensation parameters, M1 is equal to or larger than 1, M2 is equal to or larger than 0, and M3 is equal to or larger than 0; a. b and c are respectively the adjustment coefficients of the current measurement value, the voltage measurement value and the temperature measurement value.
7. A current measurement device in the context of ATE leakage current, the device comprising:
a determining unit for determining a compensation model related to current, voltage and temperature;
the device comprises an acquisition unit, a control unit and a control unit, wherein the acquisition unit is used for acquiring measured values of equipment to be tested, and the measured values comprise a current measured value, a voltage measured value and a temperature measured value of a test environment;
And the calculation unit is used for carrying out compensation calculation on the measured value of the equipment to be measured based on the compensation model to obtain the actual value of the current of the equipment to be measured.
8. A test apparatus, the test apparatus comprising: the main control module and the measurement module; wherein,
The main control module is used for generating a digital signal and transmitting the digital signal to the measurement module; the measuring module is connected with the main control module and used for converting the digital signal into an analog signal and transmitting the analog signal to equipment to be measured so as to provide voltage or current for the equipment to be measured; the system is also used for collecting measured values of the equipment to be tested, wherein the measured values comprise a current measured value, a voltage measured value and a temperature measured value of a test environment;
the main control module is further configured to calculate an actual current value of the device under test based on the measured value of the device under test according to the method of any one of claims 1 to 7.
9. The test apparatus of claim 8, wherein the measurement module comprises: the device comprises a digital-to-analog conversion unit, a measuring unit and a feedback circuit; wherein,
The digital-to-analog conversion unit is connected with the main control module and is used for receiving the digital signal generated by the main control module and converting the digital signal into the analog signal;
The measuring unit is used for measuring the voltage and/or current flowing through the device to be measured; the temperature measuring device is also used for measuring the temperature of the test environment where the equipment to be tested is located;
And the feedback circuit is used for collecting the voltages at two ends of the measuring unit and converting the voltages to obtain the measured value of the equipment to be measured.
10. The test device of claim 8, further comprising a circuit protection module connected between the measurement module and the device under test to protect circuitry in the test device.
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