CN117930495A

CN117930495A - Micro mirror device

Info

Publication number: CN117930495A
Application number: CN202211253765.7A
Authority: CN
Inventors: 虞涛
Original assignee: Individual
Current assignee: Individual
Priority date: 2022-10-13
Filing date: 2022-10-13
Publication date: 2024-04-26

Abstract

The invention discloses a micro-mirror device, which comprises a reflecting mirror, a support column, a driving assembly and a base member, wherein the upper surface of the reflecting mirror is a reflecting surface, the lower surface of the reflecting mirror is connected with the support column, the support column is connected to the driving assembly arranged on the base member in a supporting way, the driving assembly comprises a piezoelectric driving element and an actuating mechanism, the support column is connected with the actuating mechanism of the driving assembly, and the mechanical deformation of the piezoelectric driving element in the height direction of the support column drives the actuating mechanism to act so as to drive the reflecting mirror to deflect. The invention adopts a piezoelectric driving mode to drive the reflecting mirror to deflect, has simple structure, good compactness, effectively reduces the control difficulty, and has convenient control and good stability.

Description

Micro mirror device

Technical Field

The present invention relates to the field of microelectromechanical systems, and in particular, to a micromirror device.

Background

A digital micromirror device (Digtial Micromirror Devices, DMD), which is a micro-electro-mechanical-MECHANICAL SYSTEM (MEMS) system with electronic input and optical output, is a core device of a DLP projection system, and is generally composed of hundreds of thousands to millions of micro-mirrors distributed in a matrix, each micro-mirror corresponds to a pixel, and the imaging pattern and its characteristics are determined by controlling the rotation and time domain response (determining the reflection angle and dead time of light) of the micro-mirror, which is a novel, all-digital device, and the micro-mirror array and CMOS SRAM are integrated on the same chip by using the MEMS technology. Each micromirror unit in the digital micromirror device is an independent unit, and can be turned over by different angles independently to reflect light to the illumination light path or the absorption light path, the main structure of the micromirror unit of the existing digital micromirror device comprises four layers, the first layer is a micromirror in a floating state, made of aluminum alloy, the second layer is a torsion beam-hinge connecting the micromirror, and the addressing electrode of the micromirror, the third layer is a metal layer, including the addressing electrode of the torsion beam, the bias/reset electrode, and the landing platform of the micromirror (limiting mirror deflection by ±12° or ±10°), the fourth layer is a static memory (RAM) using a standard CMOS process of a large scale integrated circuit, the micromirror is connected to the torsion beam, and the torsion beam is suspended on two hinge support posts by hinges, which are connected to the bias/reset electrode, which provides a bias voltage for each micromirror unit, there are two conductive channels for each micromirror unit, and the addressing electrode of the arm beam and the static memory of the digital micromirror are connected to the bottom layer of the torsion beam. In operation of the digital micromirror device, deflection (positive and negative) of the micromirror is individually controlled by changing binary states of the underlying CMOS control circuit and the lens reset signal, specifically, applying a bias voltage, wherein +5v (digital 1) is applied to one of the addressing electrodes and the other addressing electrode is grounded (digital 0), so that an electrostatic field is formed between the micromirror and the addressing electrode of the micromirror, the torsion beam and the addressing electrode of the torsion beam, thereby generating an electrostatic moment, causing the micromirror to rotate about the torsion beam until contacting the landing platform, and the micromirror unit will be locked in that position until the reset signal occurs. The existing digital micromirror device adopts an electrostatic control structure, and has low driving efficiency, high control difficulty and high complexity.

Disclosure of Invention

The invention aims to solve the technical problems and the technical task provided by the invention are to improve the prior art, provide a micro-mirror device and solve the problems of high control difficulty and high complexity of an electrostatic control structure adopted by a digital micro-mirror device in the prior art.

In order to solve the technical problems, the technical scheme of the invention is as follows:

The utility model provides a micromirror device, includes speculum, pillar, drive assembly and basic component, the upper surface of speculum is the reflecting surface, the lower surface of speculum is connected with the pillar, the pillar support connect in on the drive assembly of setting up on the basic component, drive assembly includes piezoelectricity actuating element and actuating mechanism, the pillar is connected with drive assembly's actuating mechanism, the mechanical deformation of piezoelectricity actuating element in pillar direction of height is driven actuating mechanism acts in order to drive the speculum deflects. The micro-mirror device adopts a piezoelectric driving mode, has the advantages of simple structure, good compactness, small driving loss, easy manufacture, effective reduction of control difficulty, and can lead the piezoelectric driving element to generate mechanical deformation by applying voltage to the piezoelectric driving element, and the single micro-mirror device only needs a simple circuit for driving without a complex driving circuit, thereby simplifying the complexity in the development of subsequent digital micro-mirror devices and reducing the cost

Further, a plurality of driving components are arranged along the circumferential direction of the support column, and the actuating mechanism of each driving component is driven by a piezoelectric driving element to generate height variation so as to drive the reflecting mirror to deflect. The support column is supported by the actuating mechanisms of the plurality of driving assemblies distributed along the circumferential direction, when the supporting height of the support column is increased or decreased by the actuating mechanism in a certain direction, the support column deflects and inclines, so that the deflection of the driving reflector is realized, and the control is convenient and the stability is good.

Further, the actuating mechanism is a lever mechanism assembly, the lever mechanism assembly can form a stroke amplifying mechanism, and the mechanical deformation generated by the piezoelectric driving element can be used as power for driving the lever mechanism assembly to act.

Further, the driving assembly comprises a fulcrum portion and an actuating member, the actuating member is connected to the base member through the fulcrum portion to form a lever mechanism, the strut support is connected to the actuating member, the piezoelectric driving element is arranged between the actuating member and the base member, and the piezoelectric driving element mechanically deforms to drive the actuating member to move around the fulcrum portion to drive the reflecting mirror to deflect when voltage is applied. The mechanical deformation generated by the piezoelectric driving element enables the actuating element to rotate around the fulcrum part, so that the supporting height of the actuating element to the support column can be adjusted and changed, and the deflection of the driving reflecting mirror is realized.

Further, the ratio of the length of the arm of force of the piezoelectric driving element acting on the actuating element to the length of the arm of force of the strut acting on the actuating element is 1:2-1:10. According to the principle of the lever, the lever structure is a laborious lever structure with a power arm shorter than a resistance arm, and the piezoelectric driving element can generate a large-amplitude variation in the supporting height of the actuating element to the support post by small-amplitude mechanical deformation, namely, the variation in the supporting height of the actuating element to the support post is several times of the deformation of the piezoelectric driving element in the height direction, in other words, the piezoelectric driving element can generate a sufficient variation in the supporting height of the actuating element to the support post by small-amplitude mechanical deformation to enable the deflection angle of the reflecting mirror to meet the requirement, so that the driving voltage applied to the piezoelectric driving element can be reduced, the driving power consumption is reduced, the size of a device is reduced, and the structural compactness is improved.

Further, the position of the acting point of the piezoelectric driving element on the actuating element is located between the connecting position of the support column on the actuating element and the fulcrum portion, namely, the power point is located between the fulcrum and the resistance point, the power arm is shorter than the resistance arm, the structure is compact and easy to arrange, or the fulcrum portion is located between the position of the acting point of the piezoelectric driving element on the actuating element and the connecting position of the support column on the actuating element.

Further, the single driving component comprises a plurality of actuating pieces, all actuating pieces of the single driving component are driven by the same piezoelectric driving element, so that the structural stability can be improved, and the single piezoelectric driving element can simultaneously drive the plurality of actuating pieces to synchronously act, so that the support column can deflect and tilt more stably.

Further, a supporting piece is arranged between the piezoelectric driving element and each actuating piece, and because a plurality of actuating pieces are required to be driven by a single piezoelectric driving element, the piezoelectric driving element is large in size, and the actuating pieces are in direct contact with the piezoelectric driving element to generate a surface contact condition, so that the length of a power arm is difficult to accurately control, and further the actuating pieces are difficult to accurately drive to rotate around a fulcrum part, point contact between the piezoelectric driving element and each actuating piece is realized by using the supporting piece, the length of the power arm is convenient to accurately control, and accurate action of each actuating piece is ensured when the piezoelectric driving element is mechanically deformed.

Further, the actuating elements are uniformly distributed along the circumferential direction of the support column, so that deflection and inclination of the reflecting mirror according to the required direction can be accurately controlled.

Furthermore, the actuating element is fan-shaped, the structural stability is good, the cross section size of the actuating element is gradually reduced from outside to inside along the radial direction, so that the actuating element has good rigidity to stably support the support column and the reflecting mirror on the support column, and the size of one end of the actuating element, which is close to the support column, is small, and therefore all the actuating elements distributed along the circumferential direction of the support column can be stably connected with the support column.

Further, the angular radian of the actuating elements is 30-90 degrees, the adjacent actuating elements are spaced by 0.1-0.8 mu m, and the angular radian of the actuating elements in a fan shape is as small as possible, so that a larger number of actuating elements can be arranged in the whole circumferential direction, the rigidity of the actuating elements is kept to provide stable support, and the accuracy of controlling the deflection of the reflecting mirror can be improved.

Further, the fulcrum portions are spaced apart along the circumferential direction of the strut; or the fulcrum part is an annular part along the circumferential direction of the support column, all actuating parts of all driving assemblies are supported and connected on the annular part, the structure is simple, the compactness is good, the implementation and the manufacturing are easy, and all actuating parts can be in a consistent initial state.

Further, the piezoelectric driving element comprises a first electrode layer, a piezoelectric material layer and a second electrode layer which are arranged in a stacked mode, the structure is simple, the piezoelectric material layer can be deformed in a stretching mode along the transverse direction by applying voltage to the first electrode layer and the second electrode layer, the stretching, shortening and deformation of the piezoelectric material layer can be controlled by regulating voltage polarity and voltage, and finally the deflection inclination direction and the angle of the reflecting mirror can be controlled.

Further, the drive assembly is located directly below the lower surface of the mirror and the drive assembly does not extend beyond the projected area when the mirror is undeflected. Compact structure, small occupied space, the size of the whole micro-mirror device is equivalent to that of the reflecting mirror, the integration level can be improved, high resolution is realized on a small-size DMD chip, the details of the image are clearly and accurately displayed, and the distortion generated by the image in the imaging process is reduced

Compared with the prior art, the invention has the advantages that:

the micro-mirror device adopts a piezoelectric driving mode, utilizes the lever principle to drive the reflecting mirror to deflect, has the advantages of simple structure, good compactness, small driving loss, easy manufacture, effective reduction of control difficulty, convenient control and good stability, and only needs a simple circuit for driving, does not need a complex driving circuit, simplifies the complexity in the development of subsequent digital micro-mirror devices, and reduces the cost.

Drawings

FIG. 1 is a schematic diagram of the principle structure of a micromirror device according to the present invention;

FIG. 2 is a schematic diagram of another principle structure of a micromirror device according to the present invention

FIG. 3 is a schematic view of a structure with four drive assemblies disposed in the axial direction of the strut;

FIG. 4 is a schematic view of another structure of the micromirror device of the present invention;

FIG. 5 is a schematic diagram of the overall structure of a second embodiment of a micromirror device according to the present invention;

FIG. 6 is a schematic diagram illustrating an internal structure of a hidden fulcrum portion according to a second embodiment of the micromirror device of the present invention;

FIG. 7 is a schematic cross-sectional view of a micromirror device according to a second embodiment of the invention.

In the figure:

the mirror 1, the support 11, the driving unit 2, the base member 3, the fulcrum portion 21, the piezoelectric driving element 22, the actuator 23, the support 24, the first electrode layer 221, the piezoelectric material layer 222, and the second electrode layer 223.

Detailed Description

The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The embodiment of the invention discloses a micromirror device which has the advantages of simple structure, good compactness, easy manufacture, convenient and simple control and high driving efficiency.

Example 1

As shown in fig. 1, a micromirror device mainly comprises a reflecting mirror 1, a support 11, a driving component 2 and a base member 3, wherein the upper surface of the reflecting mirror 1 is a reflecting surface, the lower surface of the reflecting mirror 1 is connected with the support 11, at least two driving components 2 are arranged along the circumference of the support 11, the driving component comprises a supporting point part 21, a piezoelectric driving element 22 and an actuating element 23, the actuating element 23 is supported and connected on the base member 3 through the supporting point part 21 to form a lever mechanism, the support 11 is supported and connected on the actuating element 23, the piezoelectric driving element 22 is arranged between the actuating element 23 and the base member 3, the piezoelectric driving element 22 mechanically deforms when voltage is applied to drive the actuating element 23 to rotate around the supporting point part 21 so as to drive the reflecting mirror 1 to deflect, in particular, the base member 3 is a plane basal layer, the piezoelectric driving element 22 and the fulcrum part 21 are arranged on the upper surface of the base member 3, the actuating element 23 is mounted and connected on the fulcrum part 21 and the top part of the piezoelectric driving element 22, the reflecting mirror 1 and the support column 11 are positioned above the top surface of the actuating element 23, the connection part of the actuating element 23 and the fulcrum part 21 is the fulcrum of the lever mechanism, the position of the piezoelectric driving element 22 acting on the actuating element 23 is the power point of the lever mechanism, the connection part of the support column 11 and the actuating element 23 is the resistance point of the lever mechanism, when the power point generates the movement amount (the piezoelectric driving element 22 generates the mechanical deformation amount), the lever rotates around the fulcrum (the actuating element 23 rotates around the fulcrum part 21) based on the lever principle, the corresponding movement amount is generated by the resistance point (the movement amount is generated at the connection part of the support column 11 and the actuating element 23), and the amount of movement generated by the power point is proportional to the amount of movement generated by the resistance point, in particular, the relation between the power arm (the distance from the action line of the power generated by the piezoelectric driving element 22 at the power point to the fulcrum) and the resistance arm (the distance from the action line of the resistance generated by the strut 11 at the position of the resistance point to the fulcrum), in this embodiment, the fulcrum, the power point and the resistance point are in a straight line direction and are located in the radial direction of the strut 11, the rotation plane of the actuator 23 is a vertical plane, so that the height of the joint between the strut 11 and the actuator 23 can be changed when the actuator 23 rotates, the strut 11 is supported by the actuators 23 of the plurality of driving assemblies 2 distributed along the circumferential direction, and the deflection inclination of the strut 11 occurs when the support height of the actuator 23 on the strut 11 in a certain direction is raised or lowered, that is, the deflection tilting of the driving mirror 1 is realized, the present embodiment mainly uses the mechanical deformation amount of the piezoelectric driving element 22 in the height direction to drive the actuator 23 to rotate, when the driving voltage is applied to the piezoelectric driving element 22, the piezoelectric driving element 22 generates the mechanical deformation in the height direction based on the inverse piezoelectric effect, since the piezoelectric driving element 22 is supportedly connected between the actuator 23 and the base member 3, the power point (the position where the piezoelectric driving element 22 acts on the actuator 23) generates the height variation amount, and further the actuator 23 rotates around the fulcrum portion 21 in the vertical plane, further the corresponding height variation amount is generated at the resistance point, that is, the supporting height of the actuator 23 to the supporting post 11 is changed, ultimately, deflection of the driving mirror 1 is achieved.

As shown in fig. 2, the driving unit 2 may be provided with only one, that is, the support column 11 is supported by only a single actuator 23, the driving unit 2 is a lever mechanism, and when the piezoelectric driving element 22 is mechanically deformed in the vertical direction, the actuator 23 is driven to rotate around the fulcrum portion 21, in other words, the actuator 23 is driven to perform a deflection tilting motion, so that when the piezoelectric driving element 22 drives the actuator 23 to perform an operation, not only a height variation is generated at a resistance point (a height variation is generated at a connection point of the support column 11 and the actuator 23), but also the support column 11 supported by the single actuator 23 is deflected and tilted, that is, the deflection tilting of the driving mirror 1 is realized.

The micro mirror device is a micro-scale microstructure, the base member 3 comprises a basal layer, an insulating layer and a top layer which are sequentially deposited from bottom to top, the basal layer is a silicon layer, the insulating layer can be made of insulating materials such as silicon dioxide, silicon nitride, aluminum oxide and the like, the top layer can be made of a silicon layer, the supporting point part 21 and the piezoelectric driving element 22 are deposited on the upper surface of the base member 3, then an actuating piece 23 is deposited on the upper surfaces of the supporting point part 21 and the piezoelectric driving element 22, and finally a support column 11 and a reflecting mirror 1 are deposited on the actuating piece 23. The piezoelectric driving element 22 is mechanically deformed by an inverse piezoelectric effect, that is, when a voltage is applied in the polarization direction of the piezoelectric material, the piezoelectric material is deformed, and after the voltage is removed, the deformation of the piezoelectric material is eliminated. Specifically, as shown in fig. 1, the piezoelectric driving element 22 is a composite layer structure, and includes a first electrode layer 221, a piezoelectric material layer 222 and a second electrode layer 223 formed by sequentially depositing from bottom to top on the surface of the base member 3, where the three layers of materials are stacked and connected together by a deposition processing manner, the first electrode layer 221 and the second electrode layer 223 are made of conductive materials, specifically, materials such as platinum and molybdenum, and the piezoelectric material layer 222 is made of materials such as barium titanate BT, lead zirconate titanate PZT, modified lead zirconate titanate, lead metaniobate, lead barium lithium niobate PBLN, modified lead titanate PT, lead magnesium niobate PMN, aluminum nitride AlN, scandium-doped aluminum nitride ScAlN, and the like, which is not specifically limited. When a driving voltage is applied to the piezoelectric driving element 22, specifically, the first electrode layer 2211 is grounded, the second electrode layer 223 is connected to a positive voltage, the piezoelectric material layer 222 is mechanically deformed to extend in the height direction, if the first electrode layer 221 is grounded, the second electrode layer 223 is connected to a negative voltage, the piezoelectric material layer 222 is mechanically deformed to extend in the height direction, the mechanical deformation amount of the piezoelectric material layer 222 is related to the material characteristics of the piezoelectric material layer 222 and the magnitude and polarity of the voltage applied to the piezoelectric driving element 22, so that the magnitude of the deflection angle of the mirror 1 is related to the magnitude of the voltage applied to the piezoelectric driving element 22, the larger the mechanical deformation amount of the piezoelectric driving element 22 is, the larger the rotation angle of the actuator 23 is, and the larger the support height variation amount of the actuator 23 to the support post 11 is, and finally the deflection angle of the mirror 1 is controlled by controlling the magnitude of the voltage applied to the piezoelectric driving element 22.

The driving components 2 are at least arranged in two, the two driving components 2 are distributed on two opposite sides of the circumferential direction of the supporting column 11, when the driving component 2 on one side deflects the reflecting mirror 1 under the action of the piezoelectric driving element 22 when the supporting height of the actuating element 23 to the supporting column 11 changes, specifically, as illustrated in fig. 1, driving voltage is only applied to the piezoelectric driving element 22 in the driving component 2 on the left side to enable the supporting height of the actuating element 23 on the side to rise or fall, and the piezoelectric driving element 22 in the driving component 2 on the right side does not apply voltage to keep the supporting height of the actuating element 23 on the side to the supporting column 11 unchanged, so that the reflecting mirror 1 deflects in a positive direction, and the axis of deflection of the reflecting mirror 1 is perpendicular to the connecting line direction of the two driving components 2; only the piezoelectric driving element 22 in the right driving unit 2 is applied with a driving voltage to raise or lower the support height of the actuator 23 on the side to the support 11, while the piezoelectric driving element 22 in the left driving unit 2 is not applied with a voltage to keep the support height of the actuator 23 on the side to the support 11 unchanged, so that the mirror 1 is reversely deflected and tilted; when no driving voltage is applied to the piezoelectric driving elements 22 of the driving units 2 on the left and right sides, the supporting heights of the actuators 23 on the both sides to the support posts 11 are the same, and the mirror 1 is in an undeflected intermediate state. The driving control mode can be adopted to realize the switching of the reflecting mirror 1 between three states of positive deflection angle, 0 degree and negative deflection angle, the deflection angle of the reflecting mirror 1 is related to the voltage applied to the piezoelectric driving element 22, the larger the applied voltage is, the larger the deformation of the piezoelectric driving element 22 is, the larger the supporting height of the supporting column 11 by the actuating piece 23 is changed, and the larger the deflection angle of the reflecting mirror 1 is, so that the deflection angle of the reflecting mirror 1 can be controlled by controlling the voltage value applied to the piezoelectric driving element 22. It is needless to say that the driving voltages are applied to the piezoelectric driving elements 22 in the driving units 2 on the left and right sides, respectively, so that the supporting height of the driving unit 2 on one side with respect to the support post 11 is increased, and the supporting height of the driving unit 2 on the other side with respect to the support post 11 is decreased, and the deflection and inclination of the driving mirror 1 can be realized. In addition, the driving assemblies 2 may be further disposed in the circumferential direction of the pillar 11, and driving voltages may be applied to the piezoelectric driving elements 22 of each driving assembly 2, so that the driving mirror 1 may be more flexibly deflected and tilted in more predetermined directions, for example, four driving assemblies 2 may be disposed, as shown in fig. 3 (the mirrors and the base members are not shown in the drawing), and the four driving assemblies 2 may be uniformly distributed in the circumferential direction of the pillar 11, where the connecting line direction of two driving assemblies 2 disposed opposite to each other is the X-axis direction, and the connecting line direction of the other two driving assemblies 2 disposed opposite to each other is the Y-axis direction, so that the driving mirror may be deflected and tilted by using the Y-axis as the rotation axis, or the driving assemblies 2 in one X-axis direction and the driving assemblies 2 in one Y-axis direction may be simultaneously operated so that the rotation axis of the mirror is tilted with respect to the X-axis, and the greater number of driving assemblies 2 disposed in the circumferential direction of the pillar 11 may be achieved, so that the control accuracy is higher.

Based on the lever principle, a lever structure with a power arm longer than a resistance arm is needed for saving labor; if the distance is required to be saved, a lever structure with a power arm shorter than a resistance arm is needed, so that the use of the lever can save labor and the distance, but the distance must be moved more for saving labor; the movement distance is required to be small, so that the labor is required to be large, and the movement distance is required to be small, so that the labor is saved, and the realization is impossible. The mechanical deformation of the piezoelectric driving element 22 and the applied driving voltage are effective, and the deflection angle of the reflecting mirror 1 is required, so that in order to reduce the power consumption, reduce the size and improve the structural compactness, the embodiment adopts a laborious lever structure, namely a lever structure with a power arm shorter than a resistance arm, specifically, the ratio of the length of the force arm of the piezoelectric driving element 22 acting on the actuating element 23 to the length of the force arm of the supporting column 11 acting on the actuating element 23 is 1:2-1:10, and the small-amplitude mechanical deformation of the piezoelectric driving element can enable the actuating element to generate a large-amplitude variation on the supporting height of the supporting column, thereby meeting the requirement of the deflection angle of the reflecting mirror 1, reducing the size of the piezoelectric driving element 22, reducing the driving voltage applied on the piezoelectric driving element, improving the structural compactness, meeting the development requirement of high integration and reducing the driving power consumption.

Further, the lever structure with the power point between the fulcrum and the resistance point is adopted in this embodiment, so that the power arm is shorter than the resistance arm, that is, as shown in fig. 1, the position of the action point of the piezoelectric driving element 22 on the actuator 23 is located between the joint of the support 11 on the actuator 23 and the fulcrum portion 21, the structure is compact, the layout is easy, specifically, the actuator 23 is a component extending along the radial direction of the support 11, the proximal end of the actuator 23 near the radial inner side is connected with the support 11, the distal end of the actuator 23 near the radial outer side is connected with the fulcrum portion 21 to form the fulcrum, and the position of the piezoelectric driving element 22 acting on the actuator 23 is located between the proximal end and the distal end of the actuator 23 and near the distal end, so that the distance from the position of the piezoelectric driving element 22 acting on the actuator 23 to the distal end of the actuator 23 is 1/10-1/2 of the length of the actuator 23 in the radial direction, that is 1:2-1:2 of the ratio of the power arm to the resistance arm, so that the piezoelectric driving element 22 acts on the actuator 23 to generate a high-demand deflection to the high-speed mirror with a small deflection angle, and a small enough deflection of the actuator is generated in the direction of the actuator 23. As shown in fig. 4, the lever structure with the fulcrum between the power point and the resistance point, that is, the fulcrum portion 21 is located between the position of the point of action of the piezoelectric driving element 22 on the actuator 23 and the connection position of the support 11 on the actuator 23, when the piezoelectric driving element 22 is mechanically deformed, the actuator 23 can be driven to rotate around the fulcrum portion 21, so that the supporting height of the actuator 23 on the support 11 is changed to finally realize deflection and inclination of the driving mirror 1, and compared with the structure shown in fig. 4, the structure shown in fig. 1 is more compact, can make full use of the arm length of the actuator 23, and is beneficial to improving the integration level.

Example two

As shown in fig. 5 to 7, the micromirror device is specifically provided with two driving assemblies in the circumferential direction of the pillar 11, the two driving assemblies are symmetrically disposed at both sides of the pillar 11, and a single driving assembly 2 includes a plurality of actuators 23, all the actuators 23 of the single driving assembly 2 are driven by the same piezoelectric driving element 22, and a supporting member 24 is disposed between the piezoelectric driving element 22 and each actuator 23, specifically, the supporting member 24 is disposed on the top surface of the piezoelectric driving element 22 to be supported on the bottom surface of the actuator 23, the supporting member 24 is used for realizing point contact, the single piezoelectric driving element 22 needs to simultaneously drive a plurality of actuators 23, so that the structural size of the piezoelectric driving element 22 is larger, and the structural size of the supporting member 24 can be smaller, so that the mechanical deformation of the piezoelectric driving element 22 can precisely act at the required power point position, that is, the arm length is precisely controlled, the ratio of the arm to the resistance arm is precisely controlled, and thus the moving amount of the resistance point (the supporting member 23 is precisely controllable for the height of the supporting member 11) of the pillar is ensured.

In this embodiment, since the actuators 23 in the single driving unit 2 are uniformly distributed along the circumferential direction of the pillar 11, and since the actuators 23 are members extending radially along the pillar 11, the actuators 23 in the single driving unit 2 are uniformly distributed in a sector area, and this embodiment specifically includes two driving units 2, and thus the distribution area of the actuators 23 in the single driving unit 2 is less than or equal to 180 ° sector area, it is preferable that the actuators 23 in the single driving unit 2 be uniformly distributed in 180 ° sector area (i.e., semicircular area), and that all the actuators 23 in the two driving units 2 be combined to cover the entire circumferential area of the pillar 11, in this way, structural stability can be improved, so that the pillar 11 is stably and uniformly supported in the entire circumferential direction, and it can be ensured that the mirror 1 can be stably and precisely in an intermediate state of non-deflection in a state where no driving voltage is applied to all the driving units 2. In this embodiment, the piezoelectric driving element 22 has a semicircular shape, and covers the area where all the actuators 23 in the single driving assembly 2 are located, so as to ensure that the mechanical deformation of the piezoelectric driving element 22 can be applied to each actuator 23 sufficiently, so that each actuator 23 can rotate under the driving of the piezoelectric driving element 22 to drive the reflecting mirror 1 to deflect and tilt.

In this embodiment, the actuator 23 is in a fan shape, so that the cross-sectional dimension of the actuator 23 gradually decreases from the outside to the inside along the radial direction, the proximal end of the actuator 23 near the inside along the radial direction is small, the strut 11 is ensured to be simultaneously and reliably connected with a plurality of actuators 23, the actuator 23 itself is ensured to have better rigidity, so as to stably support the strut 11 and the reflector 1 on the strut 11, the actuator 23 itself has better rigidity, so that the actuator 23 can stably and accurately play the role of a lever, the support 24 is particularly an arc section along the circumferential direction of the strut 11, the support 24 can accurately conduct the mechanical deformation of the piezoelectric driving element 22 to the required power point position on the actuator 23, so that the actuator 23 can accurately rotate around the pivot, the angular radian of the actuator 23 is preferably 30-90 °, the adjacent actuating elements 23 are spaced by 0.1-0.8 μm, so that the actuating elements 23 have better rigidity and the actuating elements 23 are more approximate to be rod-shaped, the leverage effect can be better realized, the smaller the angular radian of the actuating elements is, the more actuating elements 23 are contained in a single driving component 2, namely the more actuating elements 23 are simultaneously driven by the same piezoelectric driving element 22, although all actuating elements 23 in the single driving component 2 are simultaneously driven by the same piezoelectric driving element 22, each actuating element 23 is relatively independent to perform the rotation motion of the lever, so that even if one actuating element 23 breaks and other actuating elements 23 have faults, the other actuating elements 23 can normally function to ensure that the reflecting mirror 1 can be driven to tilt, and the more actuating elements 23 are in a unit area, the higher the control accuracy, the more the specific position of the supporting member 24 (the distance from the supporting member 24 to the fulcrum portion 21) that is matched with each actuating member 23 can be adjusted, so that each actuating member 23 has a different ratio of power arm to resistance arm, and the mechanical deformation amount of the piezoelectric driving element 22 that drives each actuating member 23 to act is the same, but the movement amount of the resistance point on each actuating member 23 (the change amount of the supporting height of the actuating member 23 to the supporting post 11) can be different, so that the deflection tilting of the driving mirror 1 can be realized more accurately and stably.

Further, the fulcrum portions 21 may be spaced apart along the circumferential direction of the strut 11, i.e., each actuator 23 is supported by a separate fulcrum portion 21; or the fulcrum part 21 is an annular part along the circumferential direction of the supporting column 11, all the actuating parts 23 of all the driving assemblies 2 are supported and connected on the annular part, the piezoelectric driving element 22 is positioned in the surrounding inner area of the annular part, the structure is simple and compact, the implementation and the manufacturing are easy, the fulcrum part 21 is in a circular ring shape, the structural stability is good, the actuating parts 23 can be stably supported, the fulcrum required by a lever structure can be reliably formed, and the actuating parts 23 can accurately perform lever rotation to drive the reflecting mirror 1 to deflect and incline.

The driving component 2 is located under the lower surface of the reflecting mirror 1, and the driving component 2 does not exceed the projection area range of the reflecting mirror 1 when not deflecting, specifically, the pillar 11 is connected at the center of the lower surface of the reflecting mirror 1, the cross section size of the pillar 11 is smaller than the surface size of the reflecting mirror 1, the reflecting mirror 1is connected at the top side of the pillar 11, all the proximal ends of the actuating components 23 near the radial inner side are connected with the pillar 11, the distal ends of the actuating components 23 near the radial outer side are connected with the fulcrum parts 21 to form fulcrums, the distal ends of the actuating components 23 near the radial outer side are the peripheral edge of the driving component 2, so that the length of the actuating components 23 in the radial direction can be controlled to be smaller than half the outer diameter size of the reflecting mirror 1, the driving component 2 can not exceed the projection area range of the reflecting mirror 1 when not deflecting, the reflecting mirror 1 can be rectangular, the actuating components 23 near the radial outer side can be square, the distal ends of the actuating components near the radial outer side are far from the fulcrum parts, the distal ends of the actuating components near the radial outer side are small enough, and the diameter of the driving components can be small enough to realize the small-sized diameter of the reflecting mirror 1, and the small-scale of a micro-diameter of a micro-mirror system can be realized, and the small-scale of a micro-diameter device can be realized, and the small-scale of a system can be realized, such as one-meter can realize, and the small-scale of a system is small in the size of a small-scale of a system, and can realize.

The foregoing is merely a preferred embodiment of the present invention, and it should be noted that the above-mentioned preferred embodiment should not be construed as limiting the invention, and the scope of the invention should be defined by the appended claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.

Claims

1. The utility model provides a micromirror device, its characterized in that includes speculum (1), pillar (11), drive assembly (2) and foundation member (3), the upper surface of speculum (1) is the reflecting surface, the lower surface of speculum (1) is connected with pillar (11), pillar (11) support connect on set up in on foundation member (3) drive assembly (2), drive assembly (2) include piezoelectricity drive element (22) and actuating mechanism, pillar (11) are connected with the actuating mechanism of drive assembly (2), piezoelectricity drive element (22) are in the ascending mechanical deformation drive of pillar (11) direction of height actuating mechanism moves in order to drive speculum (1) deflection.

2. Micromirror device according to claim 1, characterized in that several of the drive assemblies (2) are arranged along the circumference of the support column (11), the actuation mechanism of each drive assembly (2) being driven by a piezo-electric drive element (22) to produce a height variation for deflecting the mirror (1).

3. The micromirror device according to claim 1, wherein the actuating mechanism is a lever mechanism assembly.

4. A micromirror device according to claim 3, characterized in that the actuating mechanism comprises a fulcrum portion (21) and an actuating member (23), the actuating member (23) being supportively connected to the base member (3) via the fulcrum portion (21) to form a lever mechanism, the post (11) being supportively connected to the actuating member (23), the piezo-electric driving element (22) being arranged between the actuating member (23) and the base member (3), the piezo-electric driving element (22) mechanically deforming upon application of a voltage to drive the actuating member (23) to move about the fulcrum portion (21) to deflect the mirror (1).

5. Micromirror device according to claim 4, characterized in that the ratio of the length of the moment arm of the piezo-electric drive element (22) acting on the actuator (23) to the length of the moment arm of the support (11) acting on the actuator (23) is 1:2-1:10.

6. Micromirror device according to claim 4, characterized in that the point of action of the piezo-electric drive element (22) on the actuator (23) is located between the connection of the support (11) on the actuator (23) and the fulcrum (21) or the fulcrum (21) is located between the point of action of the piezo-electric drive element (22) on the actuator (23) and the connection of the support (11) on the actuator (23).

7. Micromirror device according to claim 4, characterized in that a single said driving assembly (2) comprises several actuators (23), all actuators (23) of a single said driving assembly (2) being driven by one and the same piezoelectric driving element (22).

8. Micromirror device according to claim 7, characterized in that a support (24) is provided between the piezo-electric driving element (22) and each actuator (23).

9. Micromirror device according to claim 7, characterized in that the actuators (23) are evenly distributed along the circumference of the posts (11).

10. Micromirror device according to claim 9, characterized in that the actuator (23) is sector-shaped.

11. Micromirror device according to claim 10, characterized in that the angular arc of the actuators (23) is 30-90 °, adjacent actuators (23) being spaced apart by 0.1-0.8 μm.

12. Micromirror device according to claim 9, wherein the fulcrum portions (21) are spaced apart along the circumference of the posts (11); or the fulcrum part (21) is in the shape of a ring along the circumferential direction of the strut (11), and all the actuating members (23) of all the driving assemblies (2) are supported and connected on the ring.

13. Micromirror device according to any one of claims 1 to 12, characterized in that the piezoelectric driving element (22) comprises a first electrode layer (221), a piezoelectric material layer (222) and a second electrode layer (223) arranged in a stack.

14. Micromirror device according to any of claims 1 to 12, characterized in that the driving assembly (2) is located directly below the lower surface of the mirror (1) and the driving assembly (2) does not exceed the projection area range of the mirror (1) when it is undeflected.