CN117915639A - High-voltage power supply of full water-cooling microwave generator - Google Patents
High-voltage power supply of full water-cooling microwave generator Download PDFInfo
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- CN117915639A CN117915639A CN202410315717.9A CN202410315717A CN117915639A CN 117915639 A CN117915639 A CN 117915639A CN 202410315717 A CN202410315717 A CN 202410315717A CN 117915639 A CN117915639 A CN 117915639A
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- power supply
- transformer
- oil tank
- filament
- microwave generator
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- 238000001816 cooling Methods 0.000 title claims abstract description 13
- 239000000498 cooling water Substances 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000002828 fuel tank Substances 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 210000002381 plasma Anatomy 0.000 description 4
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The invention discloses a high-voltage power supply of a full water-cooling microwave generator, which relates to the field of microwave plasma application, wherein the high-voltage power supply of the full water-cooling microwave generator comprises an IGBT inverter circuit, the output end of the IGBT inverter circuit is connected with the input end of an anode transformer through a wire, and the output end of the anode transformer is connected with the input end of a high-voltage rectifying circuit through a wire, and the high-voltage power supply has the beneficial effects that: the invention installs the main heating element of the high voltage power supply of the microwave generator in the oil tank and on the surface, fills up transformer oil in the oil tank, can transmit the heat produced by the anode transformer, high voltage rectification, filament transformer, filament power supply secondary in the oil tank to the outer surface of the oil tank through the oil, and then take away the heat through the cooling water; the heat exchange teeth are arranged on the inner wall of the oil tank, so that the contact area between the inner wall of the oil tank and oil is increased, and the speed of heat transfer to the outer surface of the oil tank is increased; the fan is arranged in the oil tank to accelerate the flow of the transformer oil and the heat taking speed.
Description
Technical Field
The invention relates to the field of microwave plasma application, in particular to a high-voltage power supply of an all-water-cooling microwave generator.
Background
The traditional high-voltage power supply of the microwave generator adopts an air cooling mode, the loss of the power supply is discharged into the use environment through air convection, and the power supply with 10KW power discharges about 1KW of loss power, thus being easy to cause the rapid ambient temperature. The power supply adopts a semi-air cooling and semi-water cooling mode, the inverter power tube is placed on the water cooling plate, about half of the loss is taken away by cooling water, and the transformer and the high-voltage rectifier can only dissipate heat through an air cooling mode due to irregular shapes and high-voltage characteristics, and about half of the loss is discharged to the environment.
Therefore, in the application fields of microwave plasmas such as integrated circuit cleaning, etching, MPVCD and the like, the microwave generator is adopted to generate plasmas, the power supply power is large, and the plasmas are mostly applied in a large scale, the loss of the power supply is discharged into the use environment, so that the environment temperature is rapidly increased, the adverse effect is caused on the environment and other equipment in the environment, the large-scale industrialized application cannot be realized, and the improvement is needed.
Disclosure of Invention
The invention aims to provide a high-voltage power supply of an all-water-cooling microwave generator so as to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The output end of the IGBT inverter circuit is connected with the input end of an anode transformer through a wire, the output end of the anode transformer is connected with the input end of a high-voltage rectifying circuit through a wire, the output end of the high-voltage rectifying circuit is connected with the first power supply end of a filament power supply secondary through a wire, the second power supply end of the filament power supply secondary is connected with the output end of the filament transformer through a wire, the input end of the filament transformer is connected with the output end of a filament power supply primary through a wire, the input end of the filament power supply primary and the input end of the IGBT inverter circuit are connected with voltage through wires, the anode transformer, the high-voltage rectifying circuit, the filament transformer and the filament power supply secondary are arranged in an inner cavity of an oil tank, transformer oil is filled in the oil tank, and heat generated by the anode transformer, the high-voltage rectifying circuit, the filament transformer circuit and the filament power supply secondary in the oil tank is transferred to the outer surface of the oil tank; the outside of the oil tank is provided with a water channel, and cooling water flows through the water channel to take away the heat of the outer surface of the oil tank.
As still further aspects of the invention: the filament transformer and the filament power supply are arranged in the inner cavity of the oil tank in a secondary laminating way.
As still further aspects of the invention: the anode transformer, the high-voltage rectifying circuit and the filament transformer are not contacted with each other, and the anode transformer, the high-voltage rectifying circuit and the secondary of the filament power supply are not contacted with each other.
As still further aspects of the invention: the high-voltage rectifying circuit is far away from the inner wall of the oil tank.
As still further aspects of the invention: the inner cavity of the oil tank is provided with a fan.
As still further aspects of the invention: the inner wall of the oil tank is provided with heat exchange teeth.
As still further aspects of the invention: the oil tank is an aluminum oil tank.
As still further aspects of the invention: at least one water channel is arranged on the outer side of the oil tank.
Compared with the prior art, the invention has the beneficial effects that: the invention installs the main heating element of the high voltage power supply of the microwave generator in the oil tank and on the surface, fills up transformer oil in the oil tank, can transmit the heat produced by the anode transformer, high voltage rectification, filament transformer, filament power supply secondary in the oil tank to the outer surface of the oil tank through the oil, and then take away the heat through the cooling water; the heat exchange teeth are arranged on the inner wall of the oil tank, so that the contact area between the inner wall of the oil tank and oil is increased, and the speed of heat transfer to the outer surface of the oil tank is increased; the fan is arranged in the oil tank to accelerate the flow of the transformer oil and the heat taking speed.
Drawings
Fig. 1 is a schematic diagram of a high voltage power supply for a microwave generator.
Fig. 2 is a schematic layout diagram of a high voltage power supply of an all water-cooled microwave generator.
Fig. 3 is a schematic diagram of a filament transformer, filament power supply secondary.
Fig. 4 is a schematic diagram of a high voltage rectifying circuit and a secondary of a filament power supply.
Fig. 5 is a schematic diagram of a blower.
Fig. 6 is a schematic diagram of an anode transformer.
In the figure: the device comprises a 1-oil tank, a 2-IGBT inverter circuit, a 3-anode transformer, a 4-high voltage rectifying circuit, a 5-filament power primary, a 6-filament power secondary, a 7-filament transformer, an 8-fan, a 9-water channel and 10-heat exchange teeth.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments, and all other embodiments obtained by those skilled in the art without making creative efforts based on the embodiments of the present invention are included in the protection scope of the present invention.
Referring to fig. 1,2 and 6, an all-water-cooled microwave generator high-voltage power supply comprises an IGBT inverter circuit 2, wherein an output end of the IGBT inverter circuit 2 is connected with an input end of an anode transformer 3 through a wire, an output end of the anode transformer 3 is connected with an input end of a high-voltage rectifying circuit 4 through a wire, an output end of the high-voltage rectifying circuit 4 is connected with a first power supply end of a filament power supply secondary 6 through a wire, a second power supply end of the filament power supply secondary 6 is connected with an output end of a filament transformer 7 through a wire, an input end of the filament transformer 7 is connected with an output end of a filament power supply primary 5 through a wire, a voltage is introduced between the input end of the filament power supply primary 5 and the input end of the IGBT inverter circuit 2 through a wire, the anode transformer 3, the high-voltage rectifying circuit 4, the filament transformer 7 and the filament power supply secondary 6 are arranged in an inner cavity of the oil tank 1, the IGBT inverter circuit 2 and the filament power supply primary 5 are arranged on a side wall of the outer surface of the oil tank 1, transformer oil is filled inside the oil tank 1, and heat generated by the anode transformer 3, the high-voltage rectifying circuit 4, the filament transformer 7 and the filament power supply secondary 6 inside the oil is transferred to the outer surface of the oil tank 1; the outside of the oil tank 1 is provided with a water channel 9, and cooling water flows through the water channel 9 to take away the heat of the outer surface of the oil tank 1.
In a specific embodiment, referring to fig. 1 and 2, based on voltage to be introduced, the IGBT inverter 2 and the primary 5 of the filament power supply are disposed on the side wall of the outer surface of the oil tank 1, the IGBT inverter 2 is an inverter circuit formed by IGBT tubes, the voltage introduced by the primary 5 of the filament power supply is output to the secondary 6 of the filament power supply through the filament transformer 7, the IGBT inverter converts direct current into alternating current, the alternating current is amplified by the voltage of the anode transformer 3 and then output to the high-voltage rectifier 4, and the high-voltage direct current is converted to be output to the secondary 6 of the filament power supply for power supply. The high-voltage power supply of the microwave generator is mainly installed inside and on the surface of the oil tank 1, the IGBT inverter circuit 2 and the primary filament power supply 5 which are arranged on the outer surface of the oil tank 1 directly transmit heat to the outer surface of the oil tank 1, transformer oil is filled in the oil tank 1, and heat generated by the anode transformer 3, the high-voltage rectifier, the filament transformer 7 and the secondary filament power supply 6 in the oil tank 1 can be transmitted to the outer surface of the oil tank 1 through oil, and then the heat is taken away through cooling water, so that cooling treatment is realized.
In this embodiment: referring to fig. 3, a filament transformer 7 and a filament power supply secondary 6 are attached to an inner cavity of the oil tank 1.
The secondary coil of the filament transformer 7 and the secondary 6 of the filament power supply are of floating high-voltage potential, and the length of a high-voltage wire can be reduced by attaching and placing, so that high-voltage insulation is facilitated.
In this embodiment: referring to fig. 2, the anode transformer 3, the high-voltage rectifying circuit 4, and the filament transformer 7 are not in contact with each other, and the anode transformer 3, the high-voltage rectifying circuit 4, and the filament power supply secondary 6 are not in contact with each other.
The components are not contacted with each other to avoid electric signal influence.
In this embodiment: referring to fig. 2 and 4, the high-voltage rectifying circuit 4 is far from the inner wall of the oil tank 1.
The input voltage of the high-voltage rectifying circuit 4 is amplified by the power supply of the anode transformer 3, so that the direct-current voltage generated by the rectifying output of the high-voltage rectifying circuit 4 is larger and is far away from the inner wall of the oil tank 1, and the risk of accidents under the conditions of fault, electric leakage and the like is reduced.
In this embodiment: referring to fig. 2 and 5, a fan 8 is installed in the inner cavity of the oil tank 1.
The fan 8 is arranged in the oil tank 1 to accelerate the flow of the transformer oil and the heat taking speed. The blower 8 and other components are not in contact.
In this embodiment: referring to fig. 2, the inner wall of the oil tank 1 is provided with heat exchanging teeth 10.
The inner wall of the oil tank 1 is provided with heat exchange teeth 10, so that the contact area between the inner wall of the oil tank 1 and oil is increased, the heat exchange area is increased, and the speed of heat transfer to the outer surface of the oil tank 1 is accelerated.
In this embodiment: referring to fig. 2, the oil tank 1 is an aluminum material oil tank 1.
The aluminum material has good heat conducting property and low price.
In this embodiment: referring to fig. 2, at least one water channel 9 is provided on the outside of the fuel tank 1.
As shown in fig. 2, two water passages 9 are provided, and the number of water passages 9 can be increased or decreased appropriately according to the actual use condition.
The working principle of the invention is as follows: the invention installs the main heating element of the high voltage power supply of the microwave generator in the oil tank 1 and on the surface, fills up transformer oil in the oil tank 1, can transmit the heat that the anode transformer 3, high voltage rectification, filament transformer 7, filament power supply secondary 6 produce in the oil tank 1 to the external surface of the oil tank 1 through the oil, then take away the heat through the cooling water; the heat exchange teeth 10 are arranged on the inner wall of the oil tank 1, so that the contact area between the inner wall of the oil tank 1 and oil is increased, and the speed of heat transfer to the outer surface of the oil tank 1 is increased; the fan 8 is arranged in the oil tank 1 to accelerate the flow of the transformer oil and the heat taking speed.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (8)
1. The high-voltage power supply of the full water-cooling microwave generator comprises an IGBT inverter circuit, wherein the output end of the IGBT inverter circuit is connected with the input end of an anode transformer through a wire, the output end of the anode transformer is connected with the input end of a high-voltage rectifying circuit through a wire, the output end of the high-voltage rectifying circuit is connected with the first power supply end of a filament power supply secondary through a wire, the second power supply end of the filament power supply secondary is connected with the output end of the filament transformer through a wire, the input end of the filament transformer is connected with the primary output end of the filament power supply through a wire, and the input ends of the filament power supply primary and the IGBT inverter circuit are used for introducing voltage through wires;
The fuel tank is characterized in that an anode transformer, a high-voltage rectifying circuit, a filament transformer and a filament power supply secondary are arranged in an inner cavity of the fuel tank, an IGBT inverter circuit and a filament power supply primary are arranged on the side wall of the outer surface of the fuel tank, transformer oil is filled in the fuel tank, and heat generated by the anode transformer, the high-voltage rectifying circuit, the filament transformer circuit and the filament power supply secondary in the fuel tank is transferred to the outer surface of the fuel tank; the outside of the oil tank is provided with a water channel, and cooling water flows through the water channel to take away the heat of the outer surface of the oil tank.
2. The high voltage power supply of the full water-cooled microwave generator of claim 1, wherein the filament transformer and the filament power supply are arranged in the inner cavity of the oil tank in a secondary fitting manner.
3. The high voltage power supply of an all water cooled microwave generator of claim 1 wherein the anode transformer, the high voltage rectifying circuit, and the filament transformer are not in contact with each other and the anode transformer, the high voltage rectifying circuit, and the filament power supply secondary are not in contact with each other.
4. The high voltage power supply of an all water cooled microwave generator of claim 1 wherein the high voltage rectifying circuit is remote from the interior wall of the tank.
5. The high voltage power supply of an all water cooled microwave generator of claim 1 wherein the tank cavity houses a blower.
6. The high-voltage power supply of an all-water-cooled microwave generator according to claim 1 or 5, wherein the inner wall of the oil tank is provided with heat exchanging teeth.
7. The high voltage power supply of an all water cooled microwave generator of claim 1, wherein the oil tank is an aluminum material oil tank.
8. The high voltage power supply of an all water cooled microwave generator of claim 1 wherein at least one of the outside channels of the tank is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410315717.9A CN117915639B (en) | 2024-03-20 | High-voltage power supply of full water-cooling microwave generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410315717.9A CN117915639B (en) | 2024-03-20 | High-voltage power supply of full water-cooling microwave generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117915639A true CN117915639A (en) | 2024-04-19 |
| CN117915639B CN117915639B (en) | 2024-07-12 |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB769245A (en) * | 1954-06-10 | 1957-03-06 | David Chandler Prince | Current transformer |
| CN104021916A (en) * | 2014-06-06 | 2014-09-03 | 合肥雷科电子科技有限公司 | High-power floating high-voltage reconstructive combined type high-frequency and high-voltage rectifier transformer |
| CN107482883A (en) * | 2016-03-22 | 2017-12-15 | 国网山东省电力公司龙口市供电公司 | Power inverter with circuit protection device |
| CN207321755U (en) * | 2017-09-27 | 2018-05-04 | 东莞市米町源电子科技有限公司 | A kind of industrial microwave power supply |
| CN207425559U (en) * | 2017-11-27 | 2018-05-29 | 昊诚集团有限公司 | Oil-immersed type transformer |
| CN208608887U (en) * | 2018-07-26 | 2019-03-15 | 厦门翰普电子有限公司 | A kind of immersion oil water-cooled microwave power supply structure |
| CN208850121U (en) * | 2018-07-26 | 2019-05-10 | 厦门翰普电子有限公司 | A kind of immersion oil water-cooled cooling structure |
| CN210518900U (en) * | 2019-08-29 | 2020-05-12 | 合肥博雷电气有限公司 | High-power microwave power supply with adjustable duty ratio |
| CN212812484U (en) * | 2020-08-27 | 2021-03-26 | 厦门翰普电子有限公司 | Microwave power liquid cooling structure |
| CN115172014A (en) * | 2022-07-12 | 2022-10-11 | 安徽明辨电子科技有限公司 | Oil cooling heat dissipation method and device for high-voltage transformer |
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB769245A (en) * | 1954-06-10 | 1957-03-06 | David Chandler Prince | Current transformer |
| CN104021916A (en) * | 2014-06-06 | 2014-09-03 | 合肥雷科电子科技有限公司 | High-power floating high-voltage reconstructive combined type high-frequency and high-voltage rectifier transformer |
| CN107482883A (en) * | 2016-03-22 | 2017-12-15 | 国网山东省电力公司龙口市供电公司 | Power inverter with circuit protection device |
| CN207321755U (en) * | 2017-09-27 | 2018-05-04 | 东莞市米町源电子科技有限公司 | A kind of industrial microwave power supply |
| CN207425559U (en) * | 2017-11-27 | 2018-05-29 | 昊诚集团有限公司 | Oil-immersed type transformer |
| CN208608887U (en) * | 2018-07-26 | 2019-03-15 | 厦门翰普电子有限公司 | A kind of immersion oil water-cooled microwave power supply structure |
| CN208850121U (en) * | 2018-07-26 | 2019-05-10 | 厦门翰普电子有限公司 | A kind of immersion oil water-cooled cooling structure |
| CN210518900U (en) * | 2019-08-29 | 2020-05-12 | 合肥博雷电气有限公司 | High-power microwave power supply with adjustable duty ratio |
| CN212812484U (en) * | 2020-08-27 | 2021-03-26 | 厦门翰普电子有限公司 | Microwave power liquid cooling structure |
| CN115172014A (en) * | 2022-07-12 | 2022-10-11 | 安徽明辨电子科技有限公司 | Oil cooling heat dissipation method and device for high-voltage transformer |
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