CN117915077A - Focusing lens clamp testing device for EBAPS device testing - Google Patents

Abstract

The application discloses a focusing lens clamp testing device for testing an EBAPS device, which comprises: the device comprises an interface, a tabletting, a movement module, a lens, a processor and a resolution target plate; the interface comprises: a frame and a focusing barrel; the EBAPS device to be tested is accommodated and arranged in the frame body; a focusing cylinder is arranged on the other end face of the frame body; the lens is in threaded connection with the focusing cylinder; during focusing, the lens rotates to extend or retract; the pressing sheet is provided with a through hole and is covered and abutted on the EBAPS device; the pressing sheet is detachably connected with the end face of the interface. The testing device has the advantages of convenience in installation and disassembly, accuracy in focusing and simplicity in wiring.

Description

Focusing lens clamp testing device for EBAPS device testing

Technical Field

The application relates to the technical field of digital micro-optics devices, in particular to a focusing lens clamp testing device for testing an EBAPS device.

Background

The electron-bombarded active pixel sensor (electron bombarded active pixel sensor, EBAPS) has the advantages of high gain, fast response, low power consumption and low cost. The existing EBAPS chip mainly depends on import, and in order to accelerate the wide development of related research of domestic EBAPS devices, the existing EBAPS chip needs to be tested after production is completed to determine the performance of the EBAPS chip, and data feedback is obtained for subsequent further research and use.

However, when the existing EBAPS device is tested, after the EBAPS device is inserted into the core module, the lens for imaging can only be fixed through the gasket, once imaging is unclear and focusing is needed in the test process, the lens cannot be accurately or slightly moved, so that a cleaned test image cannot be obtained, normal running of the test is seriously affected, meanwhile, in the test process, the lens cannot be fixedly connected with the EBAPS device, and once focusing is needed, the lens rolls to cause damage, and related test cannot be carried out on the device.

Other detection clamps which are applicable to imaging chip devices can not clamp the EBAPS device on one hand, and on the other hand, focusing imaging can not be carried out according to detection needs, so that detection can not be carried out.

The information disclosed in the background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art.

Disclosure of Invention

Aiming at the technical problems, the application provides a focusing lens clamp testing device for testing an EBAPS device, which realizes focusing connection of the EBAPS device and a lens by comprehensively considering a mechanical structure and a clamp with optical transmission characteristics, can accurately adjust the focal length in a certain range while stably connecting the lens and the device, and improves the accuracy of a testing result. The testing device has the advantages of convenience in installation and disassembly, accuracy in focusing and simplicity in wiring.

The application provides a focusing lens clamp testing device for testing an EBAPS device, which comprises: the device comprises an interface, a tabletting, a movement module, a lens, a processor and a resolution target plate;

The interface comprises: a frame and a focusing barrel; the EBAPS device to be tested is accommodated and arranged in the frame body; a focusing cylinder is arranged on the other end face of the frame body; the lens is in threaded connection with the focusing cylinder; during focusing, the lens rotates to extend or retract;

the pressing sheet is provided with a through hole and is covered and abutted on the EBAPS device; the pressing sheet is detachably connected with the end face of the interface;

the contact pin on the end face of the EBAPS device penetrates through the through hole and is spliced with the core module; the processor is electrically connected with the movement module; the lens is arranged opposite to the resolution target plate in an imaging way.

Preferably, it comprises: a rubber gasket; the rubber gasket is sandwiched between the interface and the cathode lens end face of the EBAPS device.

Preferably, the height of the focusing barrel 11 is 5-35 mm; the lens movement distance is + -3 mm.

Preferably, the in-cavity dimension is generally larger than the response dimension of the EBAPS device

0.05mm～0.5mm。

Preferably, the thickness of the rubber gasket is 0.02 mm-5 mm; the whole size of the rubber gasket is 0.1 mm-2 mm smaller than the inner cavity of the interface cavity; the rubber hardness of the rubber gasket is between 70 and 90 Shore.

Preferably, the tabletting comprises: a sheet body and an abutting edge; the sheet body is provided with a through hole; the contact pin of the EBAPS device extends out of the sheet body through hole; the abutting edge is arranged on one side surface of the sheet body and surrounds the through hole; the abutment edge abuts the EBAPS device.

Preferably, the height of the abutting edge is less than or equal to 5mm; the size of the sheet body is the same as the ring surface of the frame body.

Preferably, it comprises: a bracket and a clamping part; the top of the bracket is provided with a clamping part; the EBAPS device is arranged in the clamp and then arranged on the clamping part.

The application also provides a test method of the EBAPS device, which adopts the fixture to fix the EBAPS device and comprises the following steps:

Step S1: placing a rubber gasket into a cavity of the connector, placing the EBAPS device, covering a pressing sheet, abutting the abutting edge of the pressing sheet on the end face of the EBAPS device, and disassembling and connecting the pressing sheet and the connector through bolts;

Step S2: the method comprises the steps of connecting a lens on a focusing barrel of a connector in a threaded manner to obtain an assembled clamp, inserting a contact pin of an EBAPS device into a core module circuit board, electrically connecting a core module with a processor, placing the assembled clamp into a clamping part for clamping, adjusting the height of the bracket, performing optical imaging debugging, and performing electron bombardment testing;

Step S3: when the electron bombardment test is carried out, the lens is rotationally adjusted according to the imaging definition on the resolution target plate until the definition imaging is obtained on the resolution target plate, and then the definition imaging is obtained and stored by the processor.

The application has the beneficial effects that:

1) According to the device for testing the focusing lens clamp for testing the EBAPS device, the clamp can effectively clamp the EBAPS device, and effective focusing is realized according to the definition degree of an image in the testing process, and the focusing precision can reach 0.05mm. The method effectively realizes accurate measurement of the performance of the EBAPS device and improves the accuracy of the measurement result.

2) The device for testing the focusing lens clamp for testing the EBAPS device can stably fix the device under test, can accurately adjust the focal length, obtains clear images required by the test, and effectively improves the accuracy of test results.

Drawings

FIG. 1 is an exploded front view schematic illustration of a mounting fixture provided by the present application; a) Is a main view; b) Is three-dimensional;

FIG. 2 is a schematic view of the assembled clamp according to the present application in front view and in perspective; a) Is a main view; b) Is a side view; c) Is three-dimensional;

FIG. 3 is a schematic diagram of a front view of a test unit according to the present application;

FIG. 4 is a schematic diagram of a front view and a three-dimensional structure of an interface according to the present application; a) Is a main view; b) Is three-dimensional;

Fig. 5 is a schematic view of a front view and a three-dimensional structure of a tablet according to the present application; a) Is a main view; b) Is three-dimensional;

FIG. 6 is a schematic view of the front view and the three-dimensional structure of the rubber sheet provided by the application; a) Is a main view; b) Is three-dimensional;

Fig. 7 is a schematic diagram of a connection state of a focusing lens holder test device for testing an EBAPS device according to the present application;

FIG. 8 is a schematic flow chart of a testing method according to the present application;

FIG. 9 is an image of the test results provided in examples and comparative examples of the present application; a) The images obtained in the examples; b) Is the image obtained in the comparative example;

FIG. 10 is a photograph of a test fixture of an embodiment of the present application and a comparative example; a) Are examples; b) Is a comparative example;

FIG. 11 is a schematic diagram of a test fixture provided in an embodiment of the present application; a) Splitting the drawing for each component; b) Is assembled;

Legend description:

the lens holder 1, the focusing barrel 11, the frame 12, the mounting plate 121, the interface 15, the pressing sheet 2, the sheet body 21, the abutting edge 22, the rubber gasket 3, the through hole 31, the movement module 4, the lens 5, the processor 511, the bracket 512, the clamping part 513, and the resolution target 514.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.

The technical means which are not described in detail and are not used for solving the technical problems of the application are all arranged according to common general knowledge in the field, and various common general knowledge arrangement modes can be realized.

Referring to fig. 1 to 8, the device for testing the focusing lens clamp for testing the EBAPS device provided by the application comprises: interface 15, tabletting 2, rubber gasket 3, movement module 4, lens 5, processor 511, resolution target 514; the EBAPS device is accommodated in the interface 15. The interface 15 includes: a focusing cylinder 11, a frame 12 and a mounting plate 121, wherein a cavity is arranged in the frame; the EBAPS device is accommodated in a cavity provided in the frame 12; a mounting plate 121 is arranged in one side of the frame 12, a through hole is formed in the mounting plate 121, and the focusing barrel 11 is mounted on the through hole of the mounting plate 121. A rubber gasket 3 is accommodated and arranged in a cavity of the frame body 12, the rubber gasket 3 is abutted against the mounting plate 121, and an EBAPS device is overlapped on the rubber gasket 3 to obtain buffer protection, so that the upper surface of a cathode lens is prevented from being directly in rigid contact with the inner cavity surface of the interface 15 when the device is installed; the EBAPS device upper cover is provided with the pressing sheet 2, and the pressing sheet 2 is detachably connected with the interface 15 through bolts. The pin of the EBAPS device with a through hole formed in the center of the pressing sheet 2 extends out of the pressing sheet 2 and is electrically connected with the movement module 4; the interface 15, the pressing sheet 2 and the rubber gasket 3 are provided with through holes, and the central axes of the through holes are coincident. The lens 5 is inserted into the focusing cylinder 11 at the other end of the interface 15. The focusing barrel 11 is provided with an internal thread and is in threaded connection with the lens 5, so that the lens 5 is subjected to focusing operation according to requirements in the testing process. The focusing length of the structure can be realized by setting the length of the focusing barrel 11 according to the requirement and selecting the lens 5 corresponding to the focusing length, and is preferably adjusted to +/-3 mm front and back, so that a clear imaging effect can be obtained, and the reliable focusing can be realized.

In a specific embodiment, the cavity is rectangular and has rounded corners with dimensions larger than the response dimensions of the EBAPS device

0.05mm～0.5mm。

In a specific embodiment, the width of the annular surface of the frame body 12 is more than or equal to 2mm, and a plurality of mounting holes through which the screws pass are arranged on the annular surface of the frame body 12, wherein the diameters of the mounting holes are 1-10 mm larger than those of the screws. The height of the focusing cylinder 11 can be designed according to the focal length adjustment requirement of the selected lens, and is 5-35 mm. To avoid problems such as discharge shorting during device testing, the interface 15 is made of an insulator material.

During testing, the movement module 4 is electrically connected with the processor 511 through a signal wire, the EBAPS device is arranged opposite to the resolution target plate 514 through the lens 5, a test image is conveniently obtained through the resolution target plate 514, clear imaging is obtained during testing through focusing of the lens 5, and the distance between the lens 5 and the resolution target plate 514 can be adjusted according to requirements.

In a specific embodiment, the thickness of the rubber gasket 3 is 0.02 mm-5 mm, the whole size of the rubber gasket 3 is 0.1 mm-2 mm smaller than the inner cavity of the interface cavity, and the rubber hardness of the used rubber gasket 3 is 70-90 Shore. According to the arrangement, the device can be effectively protected during testing, and damage to the device is avoided.

In a specific embodiment, the tablet 2 comprises: a sheet 21 and an abutment edge 22; the sheet body 21 is provided with a through hole; the contact pin of the EBAPS device extends out of the through hole of the sheet body 21; the abutting edge 22 is arranged on one side surface of the sheet 21 and surrounds the through hole, and the abutting edge 22 abuts against the end surface of the EBAPS device after assembly. The dimensions of the sheet 21 are the same as the torus of the frame 12. The abutment edge 22 has a height of 5mm or less for catching the back of the device and improving the positional stability of the EBAPS device during testing.

In one embodiment, the method comprises the following steps: a bracket 512, a clamp 513; a clamping part 513 is arranged at the top of the bracket 512; the EBAPS device is accommodated in the jig 1 and then mounted on the holding portion 513. The height of the EBAPS device under test is conveniently adjusted by brackets 512.

In one embodiment, the cartridge module 4 used is NV-97-M-R-GH; lens 5 is an FM1618MP5 optical lens.

The testing method comprises the following steps:

Step S1: placing a rubber gasket 3 in a cavity of the joint 15, placing an EBAPS device, covering the pressing sheet 2, and pressing the pressing sheet 2 and the joint 15 through a bolt connection after the abutting edge 22 of the pressing sheet 2 abuts against the end face of the EBAPS device;

Step S2: the lens 5 is connected with the focusing barrel of the joint 15 in a threaded manner to obtain an assembled clamp, a contact pin of the EBAPS device is inserted into a circuit board of the core module 4, the core module 4 is electrically connected with the processor 511, the assembled clamp is placed into the clamping part 513 for clamping, the height of the bracket 512 is adjusted, and then the electronic bombardment test is carried out after the photo imaging debugging;

Step S3: when the electron bombardment test is performed, the adjusting lens 5 is rotated according to the imaging definition on the resolution target plate 514 until the definition imaging is obtained on the resolution target plate 514, and then the definition imaging is obtained and stored by the processor 511.

Firstly, mounting an EBAPS device into a special lens interface fixture, mounting a lens at the front end of the fixture, turning a core module on a device pin at the rear end, and then assembling the whole assembly into a clamping opening of a bracket. After the installation is completed, the special computer is connected with the rear end of the movement module by a signal wire, and the resolution target plate is respectively placed and adjusted at a distance of a plurality of meters from the front end of the lens. And the whole test system is built.

The problems that an EBAPS device cannot be directly connected and fixed with a lens during testing and the device and a movement module are inconvenient to install and detach are solved; in addition, the lens interface clamp comprehensively considers the characteristics of mechanical structure and optical transmission, so that the focal length can be accurately adjusted within a certain range while the lens is fixedly connected. The testing method has the advantages of convenience in installation and disassembly, accuracy in focusing, simplicity in wiring and the like.

Examples

By adopting the method and the device, the device is shown in fig. 11, and the EBAPS device is tested, and the test result is shown in fig. 9 a.

Comparative example 1

The conventional pad fixing method is adopted for testing, because focusing cannot be performed, a clear image cannot be obtained, as shown in fig. 10b, and performance testing is performed on the device, and the obtained result is shown in fig. 9 b.

As can be seen from a comparison of fig. 9a and b, the test images obtained using the apparatus and method provided by the present application are clear and can be used to accurately evaluate the performance of the device. The test image obtained by the conventional fixing device of the comparative example is blurred, and performance evaluation cannot be performed.

From the comparison of the results obtained in the above examples and comparative examples, it is clear that clear images could not be obtained at the time of testing, nor could device performance be evaluated by the conventional methods. By adopting the method provided by the application, clear images can be obtained, so that the accurate evaluation of the device performance is realized.

Although the present invention has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present invention.

Claims (9)

1. The utility model provides a focusing lens anchor clamps testing arrangement for EBAPS device test which characterized in that includes: the device comprises an interface, a tabletting, a movement module, a lens, a processor and a resolution target plate;

The interface comprises: a frame and a focusing barrel; the EBAPS device to be tested is accommodated and arranged in the frame body; a focusing cylinder is arranged on the other end face of the frame body; the lens is in threaded connection with the focusing cylinder; during focusing, the lens rotates to extend or retract;

the pressing sheet is provided with a through hole and is covered and abutted on the EBAPS device; the pressing sheet is detachably connected with the end face of the interface;

the contact pin on the end face of the EBAPS device penetrates through the through hole and is spliced with the core module; the processor is electrically connected with the movement module; the lens is arranged opposite to the resolution target plate in an imaging way.

2. The apparatus for testing a focus lens holder for EBAPS device according to claim 1, comprising: a rubber gasket; the rubber gasket is sandwiched between the interface and the cathode lens end face of the EBAPS device.

3. The apparatus for testing a focus lens holder for EBAPS device according to claim 1, wherein the height of the focus barrel 11 is 5 to 35mm; the lens movement distance is + -3 mm.

4. The apparatus according to claim 1, wherein the internal cavity size is 0.05mm to 0.5mm larger than the entire response size of the EBAPS device.

5. The apparatus for testing a focus lens holder for EBAPS device according to claim 2, wherein the rubber spacer has a thickness of 0.02mm to 5mm; the whole size of the rubber gasket is 0.1 mm-2 mm smaller than the inner cavity of the interface cavity; the rubber hardness of the rubber gasket is between 70 and 90 Shore.

6. The apparatus for testing a focus lens holder for EBAPS device according to claim 1, wherein said pressing sheet comprises: a sheet body and an abutting edge; the sheet body is provided with a through hole; the contact pin of the EBAPS device extends out of the sheet body through hole; the abutting edge is arranged on one side surface of the sheet body and surrounds the through hole; the abutment edge abuts the EBAPS device.

7. The apparatus for testing a focus lens holder for EBAPS device according to claim 6, wherein the height of the abutment edge is 5mm or less; the size of the sheet body is the same as the ring surface of the frame body.

8. The apparatus for testing a focus lens holder for EBAPS device according to claim 1, comprising: a bracket and a clamping part; the top of the bracket is provided with a clamping part; the EBAPS device is arranged in the clamp and then arranged on the clamping part.

9. A method of testing an EBAPS device, wherein the EBAPS device is secured using a jig as claimed in any one of claims 1 to 8, comprising the steps of:

Step S1: placing a rubber gasket into a cavity of the connector, placing the EBAPS device, covering a pressing sheet, abutting the abutting edge of the pressing sheet on the end face of the EBAPS device, and disassembling and connecting the pressing sheet and the connector through bolts;

Step S2: the method comprises the steps of connecting a lens on a focusing barrel of a connector in a threaded manner to obtain an assembled clamp, inserting a contact pin of an EBAPS device into a core module circuit board, electrically connecting a core module with a processor, placing the assembled clamp into a clamping part for clamping, adjusting the height of the bracket, performing optical imaging debugging, and performing electron bombardment testing;

Step S3: when the electron bombardment test is carried out, the lens is rotationally adjusted according to the imaging definition on the resolution target plate until the definition imaging is obtained on the resolution target plate, and then the definition imaging is obtained and stored by the processor.