CN117906486A - Strain sensor based on reconfigurable metamaterial array - Google Patents
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention provides a strain sensor based on a reconfigurable metamaterial array, which comprises a plurality of independent reconfigurable partitioned medium substrates, wherein each medium substrate is provided with a metal strong resonance structure; when the strain object to be measured generates tangential strain, structural gap difference is generated through tangential strain difference between the medium substrate and the strain object to be measured, so that resonance frequency change of a metal strong resonance structure is affected, and then detection of resonance frequency and strain can be realized by detecting position change of reflection coefficient zero point on a frequency spectrum. The sensor has resonance and radiation characteristics, and can realize wireless passive detection of tangential strain on the surface of an object to be detected by combining a wireless electromagnetic detection system.
Description
Technical Field
The invention belongs to the technical field of sensors.
Background
In recent years, along with the development of artificial intelligence blowout, the development speed of global technology is faster and faster, and the industrial field needs to not only pursue high speed and high efficiency, but also realize more functions and have higher performance. The sensor is used as important industrial equipment, has wide application in the industrial field and is used for detecting physical quantities such as temperature, pressure, strain and the like in industrial production. On the other hand, with the development and application of the internet of things technology, sensors are used as important components of the internet of things, and are already seen everywhere in our life, for example, a plurality of sensors are needed in wearable equipment to realize heart rate monitoring, step frequency detection and the like. Therefore, there is a high demand for sensors in both industrial and civil fields, and in future development, there is also a high demand for sensor technology, for example, microwave sensors are further improved in terms of quality factor, sensitivity, accuracy, size, and the like.
The strain sensor is a sensor for measuring the strain of an object, and converts tiny deformation generated after the object is stressed into an electric signal or other signals to be output, so that the strength of the strain of the object to be measured is perceived. The strain sensor is widely applied to the fields of material mechanics, structural engineering, mechanical manufacturing and the like, and is used for measuring and controlling the strain states of various machines, structures and equipment so as to ensure the safe and reliable operation of the strain sensor. Common strain sensors include resistive strain gages, piezoresistive strain sensors, piezoelectric strain sensors, and the like. Due to the demands of the fields of military, aerospace and the like, the conventional sensor is difficult to cope with extreme environments such as high temperature, high pressure, strong oxidation/corrosion and the like of an engine, and the wired structure not only can increase the complexity of wiring, but also can reduce the reliability of the wiring, so that huge potential safety hazards are generated in equipment. Therefore, there is a need to develop a new sensing technology to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to: in order to solve the problems in the prior art, the invention provides a strain sensor based on a reconfigurable metamaterial array.
The technical scheme is as follows: the invention provides a strain sensor based on a reconfigurable metamaterial array, which comprises a plurality of independent reconfigurable partitioned medium substrates, wherein each medium substrate is provided with a metal strong resonance structure;
When the strain object to be measured generates tangential strain, structural gap difference is generated through tangential strain difference between the medium substrate and the strain object to be measured, so that resonance frequency change of a metal strong resonance structure is affected, and then detection of resonance frequency and strain can be realized by detecting position change of reflection coefficient zero point on a frequency spectrum.
Further, the several media substrates can be reconfigured into differently shaped cell structures.
Further, the media substrate is any rigid or flexible media material that is capable of being cut.
Further, the material of the metal strong resonance structure is copper, aluminum, gold, platinum, silver, zinc, iron or metal alloy.
Further, the metal strong resonance structure is a symmetrical or asymmetrical metal structure.
Furthermore, the medium substrate is tightly attached to the surface of the strain object to be tested through strong glue or high-temperature resistant glue.
The beneficial effects are that: the sensor provided by the invention generates electromagnetic resonance on a specific frequency when receiving electromagnetic radiation, the change of the cell gap can effectively influence the resonance frequency of the metamaterial strong resonance structure after the strain occurs, and the sensor has very high sensitivity. The invention can realize high-sensitivity sensing from the change of resonant frequency to the tangential strain amount and radiate electromagnetic information at the same time, thereby integrating sensing and radiating functions. The sensor has low profile and small volume, is favorable for reducing the problems of difficult assembly, unstable structure, poor electromagnetic compatibility and the like caused by high profile, and enhances the sensing accuracy. The tangential strain sensing device can be tightly attached to the surfaces of different objects to be detected such as a medium (such as ceramic), metal and the like, and can accurately realize the tangential strain sensing detection of the surfaces of the objects to be detected. Meanwhile, the sensor has resonance and radiation characteristics, and can realize wireless passive detection of tangential strain of the surface of an object to be detected by combining a wireless electromagnetic detection system, thereby being beneficial to surface strain testing in a complex environment. The strain sensor has wide application prospect in the fields of traditional industrial measurement, wearable electronic equipment, extreme environment sensing and the like.
Drawings
Fig. 1 is a schematic two-dimensional structure of a first embodiment of the present invention.
Fig. 2 is a schematic diagram of geometric parameters according to a second embodiment of the present invention.
Fig. 3 is an S11 parameter curve after CST simulation of the second embodiment.
Fig. 4 is a strain and resonant frequency sensing curve for the second embodiment.
FIG. 5 shows the electric field mode values in the tangential direction of wave incidence at resonance in the second embodiment.
FIG. 6 is a graph showing the relationship between the measured strain and resonant frequency in a 500℃high temperature environment according to the second embodiment.
Fig. 7 is a schematic diagram of the geometric parameters of the third embodiment.
FIG. 8 is a plot of x-direction strain and resonant frequency sensing under x-polarized wave excitation for example III.
FIG. 9 is a graph showing y-direction strain and resonant frequency sensing under y-polarized wave excitation for example III.
Reference numerals illustrate: 1, a dielectric substrate; 2, a metal strong resonance structure.
Detailed Description
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
The metamaterial is an artificial material with special electromagnetic properties, can control electromagnetic waves by designing a microstructure unit, and can regulate and control the characteristics of vibration amplitude, propagation direction, polarization direction, frequency and the like of the electromagnetic waves. The metamaterial microwave millimeter wave sensor has been developed and applied gradually in the aspects of dielectric constant measurement, pressure measurement, temperature measurement, displacement measurement and the like by virtue of the advantages of simple structure, convenience in processing and the like. The metamaterial strong resonance structure has the advantage of high quality factor, is easy to excite by radio electromagnetic waves, and can meet the requirement of high sensitivity indexes through special strict design.
Based on the technical requirement, the embodiment provides a strain sensor based on a reconfigurable metamaterial array. According to the sensor, through a one-dimensional or two-dimensional reconfigurable metamaterial strong resonance structure, the tangential strain value of a strain object to be measured is effectively represented by the resonance frequency value, so that the strain detection under wireless passive condition is realized, the sensor also has higher sensitivity, and the strain detection under extreme environment is realized. The strain sensor has wide application prospect in the fields of traditional industrial measurement, wearable electronic equipment, extreme environment detection and the like.
The strain sensor based on the reconfigurable metamaterial array comprises a plurality of independent reconfigurable partitioned medium substrates 1, wherein each medium substrate is provided with a metal strong resonance structure 2; the plurality of dielectric substrates of the embodiment can be reconfigured into unit structures with different shapes, and the shapes and the intervals of the dielectric substrates in each unit structure can be different, and the dielectric substrates are any hard or flexible dielectric material which can be cut, such as: plastic, ceramic, quartz, epoxy resin composite materials and the like, which can be of a single-layer or multi-layer structure with any thickness, and can be a high-temperature-resistant and corrosion-resistant material and the like; the material of the metal strong resonance structure is copper, aluminum, gold, platinum, silver, zinc, iron and other metals or metal alloys, and the metal strong resonance structure is a symmetrical or asymmetrical metal structure, such as: the metal strong resonance structures on each medium substrate can be different, and the metal strong resonance structures are periodically or non-periodically arranged on the medium substrate. The medium substrate is cut into a one-dimensional or multidimensional array according to the unit size of the metal strong resonance structure, and the medium substrate is tightly attached to the strain object to be tested, and can be assisted by common strong glue, high temperature resistant glue and other glue.
In an embodiment of the present invention, as shown in fig. 1, the dielectric substrates are square, periodically arranged at equal intervals, and each metal strong resonant structure is the same and is disposed on the corresponding dielectric substrate.
After the sensor is tightly attached to the surface of the strain object to be tested, when tangential strain occurs to the strain object to be tested, one-dimensional or multi-dimensional structural gap difference is generated through tangential strain difference between the medium substrate 1 and the strain object to be tested, the resonance frequency change of the metal structure 2 is affected, under the test of the wireless electromagnetic resonance detection system, the zero point of the reflection coefficient can shift, and the high-sensitivity sensing function of the resonance frequency and the strain can be realized by detecting the position change of the zero point of the reflection coefficient on the frequency spectrum. The sensor is applicable to all frequency bands.
Embodiment II of the invention
The design principle of the second embodiment of the present invention is the same as that of fig. 1, the specific geometric parameter schematic diagram is as shown in fig. 2, the period of the unit structure is 3.5mm, and the rest structural parameters are respectively: r=1 mm, r=0.35 mm, l=1.1 mm. In this embodiment, electromagnetic simulation is performed for different strain values (ε), and the reflection coefficient (S11) of the y-polarized wave when it is incident is shown in FIG. 3. It can be seen that when the strain value is changed, since the y-direction reconfigurable cell gap is increased, the resonance frequency generated upon incidence of the y-polarized wave is increased, and a high-sensitivity strain sensing function can be realized.
The dielectric substrate used in this example was alumina ceramic having a thickness of 0.2mm, a dielectric constant of 9.4, and a loss tangent of 0.0004, and a poisson ratio of 0.18; the metal resonance structure adopts a local artificial surface plasmon structure, the material is silver, the thickness is 0.018mm, and the Poisson ratio is 0.31.
The relationship between strain and resonant frequency of the first embodiment is shown in fig. 4, and the result shows that the linearity is good under the condition, the R-square value of the fitted curve is as high as 0.999, and the slope is 7.896, namely: the sensitivity of the sensor reaches 7.896 GHz/epsilon, and the unit of converted micro strain is 7.896 kHz/mu epsilon.
In fig. 5, the tangential electric field value normalized by the 2×2 cell array at the time of incidence of the y polarized wave is higher in the center and the edge of the structure, so that when the y-direction reconfigurable metamaterial sensor is excited by the y polarized wave, energy is mainly dispersed along the y direction at resonance. As the dielectric substrate is cut into strips, the change of the unit spacing along the y direction caused by strain is obviously increased, so that the rising speed of the resonant frequency can be effectively improved, and the sensitivity of the strain sensor is increased.
In a high temperature environment of 500 ℃, according to actual material characteristics, the dielectric substrate of the second embodiment adopts alumina ceramics with the thickness of 0.6 mm. The test results fit a strain-frequency sensing performance curve of the strain sensor as shown in fig. 6. The method shows good linear characteristics, and according to test data, the method is subjected to linear fitting, and finally, the equation of a fitting curve is obtained:
Wherein f s is the resonant frequency of the strain sensor, S is the strain, and the average sensitivity is 53.15 kHz/. Mu.epsilon. This example demonstrates that the sensor can achieve high sensitivity strain sensing capability in high temperature environments, and is suitable for strain sensing in heavy industry, particularly in the aerospace field.
Example III
The third embodiment is electromagnetic simulation verification of a two-dimensional reconfigurable metamaterial structure, and adopts a high-frequency glass fiber epoxy resin material FR4 medium substrate and an I-shaped metal resonance structure. The specific structure is shown in fig. 7, and is different from the second embodiment in that the third embodiment is reconfigurable in x and y directions, the size of the independent reconfigurable unit is 2mm×4mm, and the rest of the structural parameters are as follows: h=3.5 mm, w=1.5 mm, t=0.2 mm. The third embodiment can realize independent sensing in the x direction and the y direction, and the sensor performance is independently controlled by the x polarized wave and the y polarized wave respectively due to the different geometric structures of the x direction and the y direction.
The relation between the strain in the x direction and the frequency change under the excitation of the x polarized wave solved by adopting a time domain solver is as good as the linearity under the condition shown in figure 8, the R square value of a fitted curve is 0.995, the slope is 29.614, the strain sensing sensitivity reaches 29.614 GHz/epsilon, and the unit of the strain is 29.614 kHz/mu epsilon; the R-direction after the y-direction strain and frequency fitting is 0.999 as shown in FIG. 9, the slope is 6.343, and the sensitivity reaches 6.343 kHz/. Mu.epsilon. Different unit equivalent capacitances can lead to different sensitivities, strain sensors which are independently controlled in different directions, different sensitivities and different accuracies can be realized through different structural designs, a plurality of sensing functions can be realized in a limited structure, and the strain sensors can be integrated with other sensors such as temperature, pressure and the like and decoupled under different polarization.
In addition, the specific features described in the above embodiments may be combined in any suitable manner without contradiction. The various possible combinations of the invention are not described in detail in order to avoid unnecessary repetition.
Claims (6)
1. The strain sensor based on the reconfigurable metamaterial array is characterized by comprising a plurality of independent reconfigurable partitioned medium substrates, wherein each medium substrate is provided with a metal strong resonance structure;
When the strain object to be measured generates tangential strain, structural gap difference is generated through tangential strain difference between the medium substrate and the strain object to be measured, so that resonance frequency change of a metal strong resonance structure is affected, and then resonance frequency and strain can be realized by detecting position change of reflection coefficient zero point on a frequency spectrum.
2. The reconfigurable metamaterial array-based strain sensor of claim 1, wherein the number of media substrates can be reconfigured into differently shaped cell structures.
3. The reconfigurable metamaterial array based strain sensor of claim 1, wherein the media substrate is any rigid or flexible media material that can be cut.
4. The reconfigurable metamaterial array based strain sensor of claim 1, wherein the metallic strong resonant structure is of copper, aluminum, gold, platinum, silver, zinc, iron or a metal alloy.
5. The reconfigurable metamaterial array based strain sensor of claim 1, wherein the metallic strong resonant structure is a symmetrical or asymmetrical metallic structure.
6. The strain sensor based on the reconfigurable metamaterial array according to claim 1, wherein the medium substrate is tightly attached to the surface of the strain object to be measured through strong glue or high-temperature resistant glue.
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