CN117890105A - Ultra-precise spindle measurement method based on fusion three-point method error separation technology - Google Patents
Ultra-precise spindle measurement method based on fusion three-point method error separation technology Download PDFInfo
- Publication number
- CN117890105A CN117890105A CN202311805347.9A CN202311805347A CN117890105A CN 117890105 A CN117890105 A CN 117890105A CN 202311805347 A CN202311805347 A CN 202311805347A CN 117890105 A CN117890105 A CN 117890105A
- Authority
- CN
- China
- Prior art keywords
- axial
- error signal
- radial
- error
- theta
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004927 fusion Effects 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000000926 separation method Methods 0.000 title claims abstract description 29
- 238000005516 engineering process Methods 0.000 title claims abstract description 20
- 238000000691 measurement method Methods 0.000 title claims abstract description 11
- 238000006073 displacement reaction Methods 0.000 claims abstract description 58
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 230000001360 synchronised effect Effects 0.000 claims description 24
- 238000012360 testing method Methods 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 4
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- 241000282320 Panthera leo Species 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses an ultra-precise spindle measurement method based on a fusion three-point method error separation technology, which comprises the following steps of: s1, installing a check rod so that the axis of the check rod is coaxial with the rotation axis of the main shaft; s2, checking the roundness profile of the check rod by adopting a fusion three-point method error separation technology; s3, installing three displacement sensors along three directions of XYZ, and measuring radial runout signals and axial runout signals of the main shaft; s4, subtracting the checked roundness profile signal of the rod from the radial runout signal of the main shaft to eliminate the influence of the roundness profile of the rod on the measurement result of the main shaft, thereby more accurately evaluating the radial rotation error of the main shaft; s5, calculating the axial rotation error of the main shaft based on the axial runout signal detected in the step S3. The frequency domain fusion algorithm provided by the invention can greatly reduce the measurement uncertainty of the traditional three-point method error separation technology, thereby improving the checking accuracy of the roundness profile of the dipstick and ensuring the reliability of the main shaft measurement result.
Description
Technical Field
The invention relates to a measurement technology, in particular to an ultra-precise spindle measurement method based on a fusion three-point method error separation technology.
Background
Spindle is one of the most critical core features of a machine tool, and is found in almost all types of machine tools, with accuracy decisive for the machining accuracy of the machine tool. In a lathe, the topography errors of the machined part are mapped directly from the spindle errors. Single point diamond lathe X was developed by PRECITECK company in the united states, and configured with spindle errors of less than 15 nanometers.
In other electromechanical systems, spindle accuracy often has a decisive influence on system performance as well. For example, the storage density of a hard disk is calculated by the track width, but in order to ensure the read/write accuracy of the hard disk, the spindle error of the hard disk needs to be an order of magnitude lower than the track width; in 2006, a typical magnetic ring width was about 200 nm, which means that the hard disk spindle error was below 20 nm. The measurement accuracy of the roundness measuring instrument mainly depends on the rotation accuracy of the turntable; currently, the spindle error of the most accurate roundness measuring equipment, talyrond H, is only 10 nanometers. In the manufacturing industry, major axes with 10 nanometer precision have been commercialized and are advancing to nanometer scale.
In 2006, the international standards for spindle measurements were first published by the international committee for standardization, ISO/TC 39/SC 2: ISO 230-7,Geometric accuracy of axes of rotation; in 2016, ISO 230-7:2006 was translated and national standard GB/T17421.7-2016 was established. According to ISO 230-7, currently, there are only two brands of spindle gauges on the market: lionPrecision (lion) and API, both from the United states. In order to ensure the measurement precision, on one hand, the male lion spindle measuring instrument is provided with a high-precision check rod, and the roundness of the check rod is less than 50 nanometers; on the other hand, a high-precision capacitive sensor is configured, and the resolution thereof can reach the nanometer level. However, the male lion spindle measuring instrument is expensive, which restricts the popularization of the precise spindle measuring instrument in domestic machine tools and spindle enterprises to a great extent.
Currently, most machine tools and spindle enterprises still adopt dial indicators to measure spindle accuracy based on cost consideration: when the spindle rotates, the dial indicator is aligned with the cylindrical dipstick surface, and the peak-to-peak value of the reading is defined as the runout value, which is used to assess spindle accuracy. The evaluation method is simple to operate and the measuring instrument is inexpensive, however, it should be pointed out that this method is in principle erroneous. When the spindle is measured, the reading of the dial indicator actually comprises components of spindle errors and first harmonic components introduced by eccentric installation of the check rod. Also, typically, the magnitude of the installation eccentricity is much greater than the magnitude of the spindle error. Therefore, the academia generally considers that the jump value index is not the main shaft error of evaluation, but the installation eccentricity of the test rod is evaluated. In addition, the spindle measurement method based on the dial indicator has the following problems: the dial indicator has low resolution, and dynamic measurement cannot be performed.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides an ultraprecise main shaft measuring method based on a fusion three-point method error separation technology. The ultra-precise spindle measurement method based on the fusion three-point method has the advantages of high accuracy of measurement results and low cost.
The aim of the invention is achieved by the following technical scheme: the ultra-precise spindle measurement method based on the fusion three-point method error separation technology comprises the following steps:
S1, mounting a test rod at the tail end of a main shaft, so that the axis of the test rod is coaxial with the axis of the main shaft;
s2, checking the roundness profile of the check rod by adopting a fusion three-point method:
s21, installing 3 displacement sensors around the rod in the radial direction, wherein the first displacement sensor is installed along the X direction, the included angle between the second displacement sensor and the first displacement sensor is phi, and the included angle between the third displacement sensor and the first displacement sensor is phi
S22, driving the spindle to rotate, acquiring displacement signals in real time by 3 displacement sensors, wherein the displacement signals acquired by the 3 displacement sensors are respectively recorded as m 1(θ)、m2 (theta) and m 3 (theta), and the displacement signals are respectively recorded as m 1(θ)、m2 (theta):
m 1 (θ) =r (θ) +x (θ), which is formula (1);
m 2 (θ) =r (θ - Φ) +x (θ) cos Φ+y (θ) sin Φ, which is formula (2);
This is formula (3);
wherein r (theta) represents a roundness profile of the test rod, X (theta) represents a radial dynamic rotation error of the spindle in the X direction, and Y (theta) represents a radial dynamic rotation error of the spindle in the Y direction;
S23, carrying out weighted summation on m 1(θ)、m2 (theta) and m 3 (theta) to construct a weight function m (theta), wherein the construction principle is as follows:
This is formula (4), wherein a and b are weight coefficients;
s24, carrying out Laplacian transformation on the weight function to obtain:
This is formula (5), wherein s represents a Laplacian;
s25, calculating a Laplacian equation of the roundness profile of the dipstick according to the formula (5):
This is formula (6), wherein,/>
S26, substituting s=jk into (6), the fourier coefficient R (jk) of the rod roundness profile can be obtained:
This is equation (7), where s represents a Laplacian operator, j represents an imaginary operator, and k represents a Fourier order;
s27, evaluating measurement uncertainty of a bar roundness profile Fourier coefficient R (jk):
The harmonic variances (squares of harmonic uncertainties) introduced by the three displacement sensor uncertainties are assumed to be: And/> degrees phi and uncertainty introduced harmonic variances of angle/> are respectively: the resulting harmonic variances of the fourier coefficients, p r,c (k), for p r/φ (k) and/> are as follows:
This is formula (8);
S28, adjusting the installation angles phi and of the sensors, and repeating the steps S22 to S27 to obtain a second set of estimated values of Fourier coefficients of the roundness profile and harmonic variances thereof. The estimated values of the two sets of fourier coefficients are noted: r 1 (jk) and R 2 (jk); the harmonic variance of the two measurements is noted as: p r,c,1 (k) and p r,c,2 (k);
S29, carrying out frequency domain fusion on the Fourier coefficients R 1 (jk) and R 2 (jk) to estimate a fusion Fourier coefficient R fusion (jk), wherein the fusion rule is as follows:
This is formula (9);
S210, performing inverse Fourier transform on the fusion Fourier coefficient R fusion (jk), and estimating a roundness profile R measured (theta) of the rod as follows:
This is of formula (10);
S3, installing three displacement sensors along three directions of XYZ, wherein the X direction and the Y direction are along the radial direction of a main shaft, and the Z direction is the axial direction of the main shaft; the spindle rotates, three displacement sensors collect a plurality of circles of displacement signals at the same time at equal angles, and the three groups of displacement signals obtained by collection are respectively recorded as m x(θ)、my (theta) and m z (theta);
S4, calculating a spindle radial error signal and amplitude thereof according to the roundness profile r measured (theta) estimated in the step S2 and the radial sensor signals m x (theta) and m y (theta) measured in the step S3;
S5, calculating an axial error signal of the spindle and an amplitude of the axial error signal by the axial displacement signal m z (theta) measured in the step S3.
Preferably, step S4 comprises the following specific steps:
S4-1: the first harmonic and the direct current component in the radial displacement signals m x (theta) and m y (theta) are filtered to obtain residual signals and/>
S4-2: subtracting the dipstick roundness profile component r measured (θ) from the residual signals and/> to calculate a spindle radial total error signal: the peak-to-peak value of the total radial error signal/> and/> is the total radial error value: x total and Y total;
S4-3: calculating an average curve of the radial total error signal to obtain a radial synchronous error signal: x syn (θ) and y syn (θ); the peak-to-peak value of the radial synchronization error signal is the radial synchronization error value: x syn and Y syn;
S4-4: subtracting the radial synchronous error signal from the radial total error signal to obtain a radial asynchronous error signal: x asyn (θ) and y asyn (θ); the radial asynchronous error signal has a maximum width at a certain angle, and the maximum width value is the radial asynchronous error value: x asyn and Y asyn.
Preferably, step S5 comprises the following specific steps:
S5-1: the axial displacement signal m z (θ) is the total error signal of the spindle axis: z total (θ); the peak-to-peak value of the axial total error signal is the axial total error value: z total;
S5-2: calculating an average curve of the axial total error signal to obtain an axial synchronous error signal: z syn (θ); the peak-to-peak value of the axial synchronization error signal is the axial synchronization error value: z syn;
S5-3: subtracting the axial synchronous error signal from the axial total error signal to obtain an axial asynchronous error signal: z asyn (θ); the axial asynchronous error signal has a maximum width under a certain angle, and the maximum width value is the axial asynchronous error value Z asyn;
s5-4: in the axial synchronous error signal, the first harmonic component is the axial basic error motion signal: z fund (θ); the peak-to-peak value of the axial basic error motion signal is the axial basic error value: z fund;
S5-5: filtering out the first harmonic wave in the axial synchronous error signal to obtain an axial residual synchronous error signal: z residual (θ); the peak-to-peak value of the axis residual synchronization error signal is the axis residual synchronization error value: z residual.
Compared with the prior art, the invention has the following advantages:
1. According to the invention, a capacitive sensor is adopted to replace a traditional dial indicator to measure the rotation error of the main shaft, and the measurement accuracy of the sensor is improved from a micron level to a nano level; in addition, compared with a dial indicator, the frequency response of the capacitance sensor is greatly improved, so that the dynamic rotation error measurement at the working rotation speed can be realized.
2. Through subsequent filtering treatment, the method provided by the invention can remove the first harmonic component introduced by eccentric installation of the test rod.
3. The main shaft measuring instrument based on the error separation technology firstly checks the roundness profile of the detecting rod, further thoroughly eliminates the influence of the roundness of the detecting rod on the main shaft test result, can theoretically realize zero system deviation measurement, exceeds the precision limit of the existing instrument, and provides an ideal means for the measurement of the ultra-precise main shaft. The measurement pairs based on the error separation technique and the measurement pairs that have not conventionally employed the error separation technique are shown in table 1. In addition, the spindle measuring instrument based on the error separation technology does not depend on an ultra-precise test rod any more, so that the problem that the ten-nanometer-level precision test rod is not processed in China can be solved; moreover, the cost of the instrument can be reduced.
Table 1 measurement results of spindle radial error amplitude
4. The frequency domain fusion algorithm provided by the invention can greatly reduce the measurement uncertainty of the traditional three-point method error separation technology, thereby ensuring the checking accuracy of the roundness profile of the dipstick. In the embodiment, the uncertainty of the roundness profile of the checked rod is 26.7nm under the angle of [0 degree, 90 degree and 201 degree ] by adopting the traditional three-point method error separation technology; the uncertainty of the roundness profile of the checking rod checked by adopting the fusion three-point method error separation technology under the angle is 15.5nm.
5. The measuring method and the instrument provided by the invention can not only check the roundness profile of the inspection rod, but also measure the dynamic rotation error of the spindle in the three directions of XYZ, and can also measure the average rotation axis drift in the three directions of XYZ, such as the axial drift caused by heat and the axis drift caused by rotation speed variation.
Drawings
Fig. 1 is a schematic diagram of the measurement principle of the three-point method.
Fig. 2 is a schematic diagram of a measurement fused three-point method.
FIG. 3 is a bar roundness profile checked using a fusion three-point method.
Fig. 4a is a graph of radial error measurement results in the X direction of the main axis before error separation.
Fig. 4b is a graph of radial error measurement results in the Y direction of the spindle before error separation.
Fig. 5a is a graph of radial error measurement results in the X direction of the spindle after error separation.
Fig. 5b is a graph of radial error measurement results in the Y direction of the spindle after error separation.
Fig. 6 is a graph of spindle axial error measurements.
Fig. 7 is a graph of spindle axial residual synchronization error measurements.
Detailed Description
The invention is further described below with reference to the drawings and examples.
The ultra-precise spindle measurement method based on the fusion three-point method error separation technology comprises the following steps of:
S1, mounting a test rod at the tail end of a main shaft, so that the axis of the test rod is coaxial with the axis of the main shaft;
s2, checking the roundness profile of the check rod by adopting a fusion three-point method:
S21, as shown in fig. 1, 3 displacement sensors are radially arranged around the rod, wherein a first displacement sensor is arranged along the X direction, an included angle between a second displacement sensor and the first displacement sensor is phi 1 =90 DEG, and an included angle between a third displacement sensor and the first displacement sensor is
S22, driving the spindle to rotate, acquiring displacement signals in real time by 3 displacement sensors, wherein the displacement signals acquired by the 3 displacement sensors are respectively recorded as m 1(θ)、m2 (theta) and m 3 (theta), and the displacement signals are respectively recorded as m 1(θ)、m2 (theta):
m 1 (θ) =r (θ) +x (θ), which is formula (1);
m 2 (θ) =r (θ - Φ) +x (θ) cos Φ+y (θ) sin Φ, which is formula (2);
This is formula (3);
wherein r (theta) represents a roundness profile of the test rod, X (theta) represents a radial dynamic rotation error of the spindle in the X direction, and Y (theta) represents a radial dynamic rotation error of the spindle in the Y direction;
S23, carrying out weighted summation on m 1(θ)、m2 (theta) and m 3 (theta) to construct a weight function m (theta), wherein the construction principle is as follows:
This is formula (4), wherein a and b are weight coefficients;
s24, carrying out Laplacian transformation on the weight function to obtain:
This is formula (5), wherein s represents a Laplacian;
s25, calculating a Laplacian equation of the roundness profile of the dipstick according to the formula (5):
This is formula (6), wherein,/>
S26, substituting s=jk into (6), the fourier coefficient R (jk) of the rod roundness profile can be obtained:
This is equation (7), where s represents a Laplacian operator, j represents an imaginary operator, and k represents a Fourier order;
s27, evaluating measurement uncertainty of a bar roundness profile Fourier coefficient R (jk):
the harmonic variances (squares of harmonic uncertainties) introduced by the three displacement sensor uncertainties are assumed to be: And/> degrees phi and uncertainty introduced harmonic variances of angle/> are respectively: the resulting harmonic variances of the fourier coefficients, p r,c (k), for p r/φ (k) and/> are as follows:
This is formula (8);
And S28, adjusting the sensor installation angle to phi 2 =90 DEG and , and repeating the steps S22 to S27 to obtain a second set of estimated values of Fourier coefficients of the roundness profile and harmonic variances thereof. The estimated values of the two sets of fourier coefficients are noted: r 1 (jk) and R 2 (jk); the harmonic variance of the two measurements is noted as: p r,c,1 (k) and p r,c,2 (k);
S29, as shown in FIG. 2, the Fourier coefficients R 1 (jk) and R 2 (jk) are subjected to frequency domain fusion to estimate a fusion Fourier coefficient R fusion (jk), and the fusion rule is as follows:
S210, as shown in fig. 3, the inverse fourier transform is performed on the fusion fourier coefficient R fusion (jk), and the roundness profile R measured (θ) of the dips is estimated as follows:
This is of formula (10); the uncertainty of the roundness profile of the checking rod is checked to be 26.7nm under the angle of 0 degree, 90 degree and 201 degree by adopting the traditional three-point error separation technology; and under the condition of an angle/> , the uncertainty of the measurement of the roundness profile of the checking rod is 15.5nm by adopting a fusion three-point method error separation technology.
S3, installing three displacement sensors along three directions of XYZ, wherein the X direction and the Y direction are along the radial direction of a main shaft, and the Z direction is the axial direction of the main shaft; the spindle rotates, three displacement sensors collect a plurality of circles of displacement signals at the same time at equal angles, and the three groups of displacement signals obtained by collection are respectively recorded as m x(θ)、my (theta) and m z (theta);
S4, calculating a spindle radial error signal and amplitude thereof according to the roundness profile r measured (theta) estimated in the step S2 and the radial sensor signals m x (theta) and m y (theta) measured in the step S3; the measurement results of the spindle radial error before error separation are shown in fig. 4a and 4 b. The measurement results of the spindle radial error after the error separation are shown in fig. 5a and 5 b. As can be seen from fig. 4a, 4b, 5a, 5b and table 1, after error separation, the radial errors of the spindle are significantly reduced, which means that the error separation technique can effectively eliminate the influence of the roundness of the test rod on the measurement result of the spindle error, and improve the accuracy of the measurement system.
Step S4 comprises the following specific steps:
S4-1: the first harmonic and the direct current component in the radial displacement signals m x (theta) and m y (theta) are filtered to obtain residual signals and/>
S4-2: subtracting the dipstick roundness profile component r measured (θ) from the residual signals and/> to calculate a spindle radial total error signal: the peak-to-peak value of the total radial error signal/> and/> is the total radial error value: x total and Y total;
S4-3: calculating an average curve of the radial total error signal to obtain a radial synchronous error signal: x syn (θ) and y syn (θ); the peak-to-peak value of the radial synchronization error signal is the radial synchronization error value: x syn and Y syn;
S4-4: subtracting the radial synchronous error signal from the radial total error signal to obtain a radial asynchronous error signal: x asyn (θ) and y asyn (θ); the radial asynchronous error signal has a maximum width at a certain angle, and the maximum width value is the radial asynchronous error value: x asyn and Y asyn.
S5, calculating an axial error signal of the spindle and an amplitude of the axial error signal by the axial displacement signal m z (theta) measured in the step S3.
Step S5 comprises the following specific steps:
S5-1: the axial displacement signal m z (θ) is the total error signal of the spindle axis: z total (θ); the peak-to-peak value of the axial total error signal is the axial total error value: z total;
S5-2: calculating an average curve of the axial total error signal to obtain an axial synchronous error signal: z syn (θ); the peak-to-peak value of the axial synchronization error signal is the axial synchronization error value: z syn;
S5-3: subtracting the axial synchronous error signal from the axial total error signal to obtain an axial asynchronous error signal: z asyn (θ); the axial asynchronous error signal has a maximum width under a certain angle, and the maximum width value is the axial asynchronous error value Z asyn;
S5-4: in the axial synchronous error signal, the first harmonic component is the axial basic error motion signal: z fund (θ); the peak-to-peak value of the axial basic error motion signal is the axial basic error value: z fund; as shown in fig. 6. As can be seen from fig. 6, the result obtained by using the spindle error amplitude estimation method based on frequency domain analysis is that the peak-to-peak value of the original axial sensor signal represents the total axial error of the spindle, the average curve peak-to-peak value of the total axial error signal represents the axial synchronous error of the spindle, the first harmonic peak-to-peak value of the axial synchronous error signal represents the basic axial error of the spindle, and the maximum width of the axial synchronous error subtracted from the total axial error signal represents the axial asynchronous error of the spindle. Compared with the method based on the least square method, the method is not influenced by the radius of the reference circle, and various error amplitudes of the obtained spindle are more visual and accurate.
S5-5: filtering out the first harmonic wave in the axial synchronous error signal to obtain an axial residual synchronous error signal: z residual (θ); the peak-to-peak value of the axis residual synchronization error signal is the axis residual synchronization error value: z residual, as shown in FIG. 7. As can be seen from fig. 7, the result obtained by using the spindle error amplitude estimation method based on frequency domain analysis is that the first harmonic peak is filtered out by the spindle synchronization error signal to represent the spindle axial residual synchronization error.
The above embodiments are preferred examples of the present invention, and the present invention is not limited thereto, and any other modifications or equivalent substitutions made without departing from the technical aspects of the present invention are included in the scope of the present invention.
Claims (3)
1. The ultra-precise spindle measurement method based on the fusion three-point method error separation technology is characterized by comprising the following steps of:
S1, mounting a test rod at the tail end of a main shaft, so that the axis of the test rod is coaxial with the axis of the main shaft;
s2, checking the roundness profile of the check rod by adopting a fusion three-point method:
S21, installing 3 displacement sensors around the rod in the radial direction, wherein the first displacement sensor is installed along the X direction, the included angle between the second displacement sensor and the first displacement sensor is phi, and the included angle between the third displacement sensor and the first displacement sensor is phi
S22, driving the spindle to rotate, acquiring displacement signals in real time by 3 displacement sensors, wherein the displacement signals acquired by the 3 displacement sensors are respectively recorded as m 1(θ)、m2 (theta) and m 3 (theta), and the displacement signals are respectively recorded as m 1(θ)、m2 (theta):
m 1 (θ) =r (θ) +x (θ), which is formula (1);
m 2 (θ) =r (θ - Φ) +x (θ) cos Φ+y (θ) sin Φ, which is formula (2);
This is formula (3);
wherein r (theta) represents a roundness profile of the test rod, X (theta) represents a radial dynamic rotation error of the spindle in the X direction, and Y (theta) represents a radial dynamic rotation error of the spindle in the Y direction;
S23, carrying out weighted summation on m 1(θ)、m2 (theta) and m 3 (theta) to construct a weight function m (theta), wherein the construction principle is as follows:
This is formula (4), wherein a and b are weight coefficients;
s24, carrying out Laplacian transformation on the weight function to obtain:
This is formula (5), wherein s represents a Laplacian;
s25, calculating a Laplacian equation of the roundness profile of the dipstick according to the formula (5):
This is formula (6), wherein,/>
S26, substituting s=jk into (6), the fourier coefficient R (jk) of the rod roundness profile can be obtained:
This is equation (7), where s represents a Laplacian operator, j represents an imaginary operator, and k represents a Fourier order;
s27, evaluating measurement uncertainty of a bar roundness profile Fourier coefficient R (jk):
The harmonic variances (squares of harmonic uncertainties) introduced by the three displacement sensor uncertainties are assumed to be: And/> degrees phi and uncertainty introduced harmonic variances of angle/> are respectively: the resulting harmonic variances of the fourier coefficients, p r,c (k), for p r/φ (k) and/> are as follows:
This is formula (8);
S28, adjusting the installation angles phi and of the sensors, and repeating the steps S22 to S27 to obtain a second set of estimated values of Fourier coefficients of the roundness profile and harmonic variances thereof. The estimated values of the two sets of fourier coefficients are noted: r 1 (jk) and R 2 (jk); the harmonic variance of the two measurements is noted as: p r,c,1 (k) and p r,c,2 (k);
S29, carrying out frequency domain fusion on the Fourier coefficients R 1 (jk) and R 2 (jk) to estimate a fusion Fourier coefficient R fusion (jk), wherein the fusion rule is as follows:
This is formula (9);
S210, performing inverse Fourier transform on the fusion Fourier coefficient R fusion (jk), and estimating a roundness profile R measured (theta) of the rod as follows:
This is of formula (10);
S3, installing three displacement sensors along three directions of XYZ, wherein the X direction and the Y direction are along the radial direction of a main shaft, and the Z direction is the axial direction of the main shaft; the spindle rotates, three displacement sensors collect a plurality of circles of displacement signals at the same time at equal angles, and the three groups of displacement signals obtained by collection are respectively recorded as m x(θ)、my (theta) and m z (theta);
S4, calculating a spindle radial error signal and amplitude thereof according to the roundness profile r measured (theta) estimated in the step S2 and the radial sensor signals m x (theta) and m y (theta) measured in the step S3;
S5, calculating an axial error signal of the spindle and an amplitude of the axial error signal by the axial displacement signal m z (theta) measured in the step S3.
2. The ultra-precise spindle measurement method based on the fusion three-point method error separation technology according to claim 1, wherein the method is characterized in that: step S4 comprises the following specific steps:
S4-1: the first harmonic and the direct current component in the radial displacement signals m x (theta) and m y (theta) are filtered to obtain residual signals and/>
S4-2: subtracting the dipstick roundness profile component r measured (θ) from the residual signals and/> to calculate a spindle radial total error signal: the peak-to-peak value of the total radial error signal/> and/> is the total radial error value: x total and Y total;
S4-3: calculating an average curve of the radial total error signal to obtain a radial synchronous error signal: x syn (θ) and y syn (θ); the peak-to-peak value of the radial synchronization error signal is the radial synchronization error value: x syn and Y syn;
S4-4: subtracting the radial synchronous error signal from the radial total error signal to obtain a radial asynchronous error signal: x asyn (θ) and y asyn (θ); the radial asynchronous error signal has a maximum width at a certain angle, and the maximum width value is the radial asynchronous error value: x asyn and Y asyn.
3. The ultra-precise spindle measurement method based on the fusion three-point method error separation technology according to claim 1, wherein the method is characterized in that: step S5 comprises the following specific steps:
S5-1: the axial displacement signal m z (θ) is the total error signal of the spindle axis: z total (θ); the peak-to-peak value of the axial total error signal is the axial total error value: z total;
S5-2: calculating an average curve of the axial total error signal to obtain an axial synchronous error signal: z syn (θ); the peak-to-peak value of the axial synchronization error signal is the axial synchronization error value: z syn;
S5-3: subtracting the axial synchronous error signal from the axial total error signal to obtain an axial asynchronous error signal: z asyn (θ); the axial asynchronous error signal has a maximum width under a certain angle, and the maximum width value is the axial asynchronous error value Z asyn;
s5-4: in the axial synchronous error signal, the first harmonic component is the axial basic error motion signal: z fund (θ); the peak-to-peak value of the axial basic error motion signal is the axial basic error value: z fund;
S5-5: filtering out the first harmonic wave in the axial synchronous error signal to obtain an axial residual synchronous error signal: z residual (θ); the peak-to-peak value of the axis residual synchronization error signal is the axis residual synchronization error value: z residual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311805347.9A CN117890105A (en) | 2023-12-26 | 2023-12-26 | Ultra-precise spindle measurement method based on fusion three-point method error separation technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311805347.9A CN117890105A (en) | 2023-12-26 | 2023-12-26 | Ultra-precise spindle measurement method based on fusion three-point method error separation technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117890105A true CN117890105A (en) | 2024-04-16 |
Family
ID=90644940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311805347.9A Pending CN117890105A (en) | 2023-12-26 | 2023-12-26 | Ultra-precise spindle measurement method based on fusion three-point method error separation technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117890105A (en) |
-
2023
- 2023-12-26 CN CN202311805347.9A patent/CN117890105A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Marsh | Precision spindle metrology | |
| CN1024086C (en) | Circular degree detecting method and instrument | |
| CN108020409B (en) | A kind of 4 points of dynamic measurements of spindle rotation error and separation method | |
| Ashok et al. | Modeling, measurement, and evaluation of spindle radial errors in a miniaturized machine tool | |
| JP4667186B2 (en) | Rotational accuracy measurement method | |
| CN102359759B (en) | Measuring system for electrical runout amount of revolving body | |
| CN112432625B (en) | Roundness measuring method based on two sensors | |
| Lu et al. | A new method for characterizing axis of rotation radial error motion: Part 2. Experimental results | |
| US6741074B2 (en) | Method and apparatus for separating electrical runout from mechanical runout | |
| Noguchi et al. | Evaluation method to determine radial accuracy of high-precision rotating spindle units | |
| Kong et al. | Roundness error separation based on singularity detection and exact-stop of spindle in on-machine measurement of spindle rotation error | |
| CN203908522U (en) | Spindle revolution error measuring device capable of separating mounting eccentricity | |
| CN117890105A (en) | Ultra-precise spindle measurement method based on fusion three-point method error separation technology | |
| CN117705446A (en) | Ultra-precise spindle measurement method based on hybrid three-point method error separation technology | |
| Orton et al. | Automatic self-calibration of an incremental motion encoder | |
| CN209868137U (en) | Roll diameter and taper on-site measuring device based on roll grinder | |
| CN114812468B (en) | H-shaped six-point method-based precise rotation shafting rotation error in-situ separation method | |
| CN117848722A (en) | Ultra-precise spindle measurement method and measurement support based on three-point method error separation technology | |
| CN212665596U (en) | Rotation precision detection device of precision machine tool spindle | |
| CN111102913A (en) | Online detection system for motor stator and rotor spacing change | |
| CN110370077B (en) | Numerical control lathe continuous fault propagation probability analysis method | |
| CN114838650A (en) | Displacement sensor calibration device and method based on rotary table | |
| JPS5853843B2 (en) | How to measure rotational accuracy of rotating shaft | |
| CN115962938B (en) | Non-contact testing method for air film rigidity of H-shaped dynamic pressure bearing gyro motor of gyroscope | |
| CN215999763U (en) | Workpiece rigidity online measuring device in excircle plunge grinding |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |