CN117888063A - Manufacturing method of vacuum aluminized film - Google Patents

Manufacturing method of vacuum aluminized film Download PDF

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Publication number
CN117888063A
CN117888063A CN202311859046.4A CN202311859046A CN117888063A CN 117888063 A CN117888063 A CN 117888063A CN 202311859046 A CN202311859046 A CN 202311859046A CN 117888063 A CN117888063 A CN 117888063A
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Prior art keywords
guide
main body
roller
vacuum
aluminum
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CN202311859046.4A
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CN117888063B (en
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程建华
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Shaoxing Dexin Packaging Material Co ltd
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Shaoxing Dexin Packaging Material Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a manufacturing method of a vacuum aluminized film, which comprises the following steps: step one, placing a coiled substrate on a substrate travelling device in a vacuum aluminizing machine; step two, vacuumizing to enable the vacuum degree in the vacuum aluminizing machine to reach 4X10 ‑4 Above mbar; heating the evaporation device to enable the aluminum wires to melt and evaporate into gaseous aluminum at the temperature of 1300-1400 ℃; driving the substrate travelling device to enable the substrate to move; and fifthly, when the moving speed of the base material is 10m/s-14.5m/s, opening the opening to enable the gaseous aluminum particles to form a metal aluminum layer on the moving base material. The second arc-shaped surface can enable the gaseous aluminum to converge towards the middle of the opening, and the diffusion of the gaseous aluminum to the periphery is reduced, so that the main chamber is prevented from being polluted by the diffused gaseous aluminum. The rotation of the flow guiding piece can drive the air flow to move, so that the gaseous aluminum diffused into the diffusion gap enters the flow guiding groove under the drive of the air flow, flows back into the evaporation chamber through the flow guiding groove, and is prevented from flowing into the evaporation chamberAnd (5) diffusion.

Description

Manufacturing method of vacuum aluminized film
Technical Field
The invention belongs to the technical field of aluminizer production, and particularly relates to a manufacturing method of a vacuum aluminizer.
Background
In vacuum aluminizing a film, a gap is formed between the aluminizing roller and the opening of the evaporation chamber in order to pass the film. During aluminizing, gaseous aluminum overflows from gaps to diffuse, so that the base material is polluted, and the aluminizing efficiency of the base material is affected.
Disclosure of Invention
The invention aims to solve the technical problems and provide a method for manufacturing a vacuum aluminized film capable of preventing gaseous aluminum from diffusing.
The purpose of the invention is realized in the following way: the manufacturing method of the vacuum aluminized film comprises the following steps:
step one, placing a coiled substrate on a substrate travelling device in a vacuum aluminizing machine;
step two, vacuumizing to enable the vacuum degree in the vacuum aluminizing machine to reach 4X10 -4 Above mbar;
heating the evaporation device to enable the aluminum wires to melt and evaporate into gaseous aluminum at the temperature of 1300-1400 ;
driving the substrate travelling device to enable the substrate to move;
and fifthly, when the moving speed of the base material is 10m/s-14.5m/s, opening the opening to enable the gaseous aluminum particles to deposit on the surface of the moving base material, and forming a continuous and bright metal aluminum layer through cold cutting.
In the invention, the vacuum aluminum plating machine comprises a main chamber, a partition plate is arranged in the main chamber, the partition plate and the side wall of the main chamber are connected in the main chamber to form an evaporation chamber, a substrate advancing device is arranged in the main chamber, the substrate advancing device comprises an aluminum plating roller, an opening is arranged on the partition plate, part of the aluminum plating roller penetrates through the opening to enter the evaporation chamber, and the evaporation chamber is provided with an evaporation device facing the opening.
In the invention, two protruding parts are arranged at the opening, a first arc-shaped surface and a second arc-shaped surface are arranged on the two protruding parts, the two first arc-shaped surfaces are arranged along the edge of the aluminum plating roller, the distance between the two second arc-shaped surfaces is gradually reduced in the direction of the evaporation device towards the aluminum plating roller, a mounting groove is arranged on the first arc-shaped surface, a diversion groove is arranged on the protruding part, two ends of the diversion groove are respectively communicated with the mounting groove and the evaporation chamber, a rotatable diversion piece is arranged in the mounting groove, a diffusion gap is formed between the first arc-shaped surface and the aluminum plating roller, and air flow in the diversion piece rotation diversion diffusion gap flows into the diversion groove.
In the invention, the guide piece comprises a rotatable annular main body, a plurality of annular guide plates are arranged on the main body at equal intervals, the guide plates are in sliding connection with the main body so that the guide plates can move along the radial direction of the main body, a guide column eccentrically arranged with the main body is arranged at the center of the main body, the guide plates comprise a first end and a second end, the first end faces the aluminizing roller, the second end faces the guide column, the first end of the guide plates can extend out of the main body, and the length of the guide plate body extending out of the main body is inversely proportional to the width of a gap between the guide column and the main body.
In the invention, a plurality of telescopic grooves corresponding to the number of the guide plates are arranged on the main body, each telescopic groove comprises a first telescopic section and a second telescopic section which are communicated with each other, the diameter of the first telescopic section is larger than that of the second telescopic section, the first telescopic section is close to the aluminizing roller, the second telescopic section is close to the guide post, the guide plates comprise a first plate body arranged in the first telescopic section and a second plate body arranged in the second telescopic section, the first end is an end face of the first plate body facing the aluminizing roller, and the second end is an end face of the second plate body facing the guide post.
In the invention, a guide groove is formed in the side wall of the first telescopic section, a guide block is arranged on one surface of the first plate body, facing the side wall of the first telescopic section, and the guide block is embedded into the guide groove and can move along the guide groove.
In the invention, a support plate extending towards the guide post is arranged at the second end, a rotatable support shaft is arranged on the support plate, the support shaft is jointed with the guide post and can move along the surface of the guide post,
in the invention, a yielding groove is formed on the side wall of the first plate body facing the first telescopic section, a limiting plate extending into the yielding groove is arranged on the side wall of the first telescopic section, and an elastic piece contacted with the limiting plate is arranged in the yielding groove so as to keep the supporting shaft and the guide post to be attached.
In the invention, the guide post is eccentrically arranged with the main body in the direction of the center of the aluminizing roller, and the main body rotates to enable the length of the part of the guide plate extending out of the main body to be maximum when the guide plate is aligned with the direction of the center of the aluminizing roller.
In the invention, two guide pieces are arranged, the distance between the two guide pieces and the center of the aluminizing roller is equal, and the distance between the two guide pieces is smaller than the sum of the lengths of the parts of the guide plates of the two guide pieces, which extend out of the main body.
The beneficial effects of the invention are as follows: the improvement of the first arc-shaped surface and the second arc-shaped surface can enable gaseous aluminum to converge towards the middle of the opening, and reduce the diffusion of the gaseous aluminum to the periphery, so that the main chamber is prevented from being polluted by the diffused gaseous aluminum. The rotation of the flow guide piece can drive the air flow to move, so that the gaseous aluminum diffused into the diffusion gap enters the flow guide groove under the drive of the air flow, flows back into the evaporation chamber through the flow guide groove, and is prevented from being diffused.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is an enlarged view at A in FIG. 1;
FIG. 3 is a schematic view of the structure of the baffle;
fig. 4 is an enlarged view at B in fig. 3;
fig. 5 is an enlarged view at C in fig. 3;
wherein the reference numerals are as follows: a main chamber 100; an unreeling roller 101; a wind-up roll 102; a guide roller 103; an aluminizing roller 104; a partition plate 110; an opening 111; an evaporation chamber 120; an evaporation device 121; a projection 130; a first arcuate surface 131; a second arcuate surface 132; a mounting groove 133; a diversion trench 134; diffusion slit 135; a flow guide 200; a main body 210; a deflector 220; a first end 2201; a second end 2202; a first plate 221; a guide block 2211; a yielding groove 2212; a second plate 222; a support plate 2221; a support shaft 2222; a telescopic slot 230; a first telescoping section 231; guide groove 2311; limit plate 2312; an elastic member 2313; a second telescoping section 232; and a guide post 240.
Detailed Description
Technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some of the embodiments of the present application, but not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application are within the scope of the protection of the present application.
Referring to fig. 1 to 5, a method for manufacturing a vacuum aluminum plating film includes the steps of:
step one, placing a coiled substrate on a substrate travelling device in a vacuum aluminizing machine;
step two, vacuumizing to enable the vacuum degree in the vacuum aluminizing machine to reach more than 4X10-4 mbar;
heating the evaporation device 121 to melt and evaporate the aluminum wire into gaseous aluminum at the temperature of 1300-1400 ;
driving the substrate travelling device to enable the substrate to move;
and fifthly, when the moving speed of the substrate is 10m/s-14.5m/s, opening the opening 111 to enable the gaseous aluminum particles to deposit on the moving substrate surface, and forming a continuous and bright metal aluminum layer through cold cutting.
The vacuum aluminum plating machine in the foregoing steps includes a main chamber 100, a partition plate 110 is disposed in the main chamber 100, the partition plate 110 and a side wall of the main chamber 100 are connected to form an evaporation chamber 120 in the main chamber 100, a substrate travelling device is disposed in the main chamber 100, and the substrate travelling device includes an unreeling roller 101, a reeling roller 102, an aluminum plating roller 104, and a plurality of guide rollers 103 disposed between the three. The partition plate 110 is provided with an opening 111, the aluminizing roller 104 partially penetrates through the opening 111 and enters the evaporation chamber 120, an evaporation device 121 facing the opening 111 is arranged in the evaporation chamber 120, the evaporation device 121 enables aluminum wires to melt and evaporate into gaseous aluminum at the temperature of 1300-1400 , and the gaseous aluminum is deposited into an aluminized layer on the surface of a substrate through the opening 111.
Two protruding parts 130 are arranged at the opening 111, a first arc-shaped surface 131 and a second arc-shaped surface 132 are arranged on the two protruding parts 130, and the two first arc-shaped surfaces 131 are arranged along the edge of the aluminizing roller 104. The space between the first arcuate surface 131 and the aluminizing roller 104 forms a diffusion gap 135, and the first arcuate surface 131 is as close to the aluminizing roller 104 as possible without affecting the passage of the substrate, thereby minimizing the size of the diffusion gap 135 and reducing the diffusion of gaseous aluminum from the diffusion gap 135 to the main chamber 100. The distance between the two second arc-shaped surfaces 132 gradually decreases in the direction of the evaporation device 121 toward the aluminizing roller 104, and the second arc-shaped surfaces 132 have a guiding effect, so that gaseous aluminum can be converged toward the middle of the opening 111, and the diffusion of the gaseous aluminum to the periphery is reduced, thereby preventing the main chamber 100 from being contaminated by the diffused gaseous aluminum.
The first arc-shaped surface 131 is provided with a mounting groove 133, the bulge 130 is provided with a diversion groove 134, two ends of the diversion groove 134 are respectively communicated with the mounting groove 133 and the evaporation chamber 120, a rotatable diversion piece 200 is arranged in the mounting groove 133, a diffusion gap 135 is formed between the first arc-shaped surface 131 and the aluminizing roller 104, and the diversion piece 200 rotates to diversion airflow in the diffusion gap 135 so that the airflow flows into the diversion groove 134. The rotation of the guide member 200 can drive the air flow to move, so that the gaseous aluminum diffused into the diffusion gap 135 enters the guide groove 134 under the drive of the air flow, and flows back into the evaporation chamber 120 through the guide groove 134, thereby preventing the diffusion of the gaseous aluminum.
Specifically, the deflector 200 includes a rotatable annular main body 210, a plurality of annular deflector plates 220 are disposed on the main body 210, the deflector plates 220 are slidably connected with the main body 210 to enable the deflector plates 220 to move along a radial direction of the main body 210, a guide post 240 is disposed at a center of the main body 210 and eccentrically disposed with the main body 210, the deflector plates 220 include a first end 2201 and a second end 2201, the first end 2201 faces the aluminizing roller 104, the second end 2201 faces the guide post 240, the first end 2201 of the deflector plates 220 can extend out of the main body 210, a length of the deflector plates 220 extending out of the main body 210 is inversely proportional to a width of a gap between the guide post 240 and the main body 210, and a length of a portion of the deflector plates 220 extending out of the main body 210 at a corresponding position is longer as a gap between an inner wall of a center of the main body 210 and the guide post 240 is smaller.
When the main body 210 rotates, a portion of the deflector 220 extending out of the main body 210 can drive the airflow to flow, thereby guiding the airflow. The length of the portion of each baffle 220 protruding out of the main body 210 varies as the main body 210 rotates. The guide post 240 is eccentrically disposed with respect to the main body 210 in a direction toward the center of the aluminizing roller 104, and the main body 210 rotates such that the length of the guide plate 220 extending out of the main body 210 is maximized when the guide plate 220 is aligned with the direction toward the center of the aluminizing roller 104, and the guide plate 220 is then grown out of the mounting groove 133 and is close to the substrate, thereby enabling the guide plate 220 to be closer to the aluminizing roller 104 to block more gaseous aluminum from diffusing from the diffusion slit 135 into the main chamber 100. Meanwhile, when the main body 210 rotates to enable the deflector 220 to be screwed into the installation groove 133, the length of the portion, extending out of the main body 210, of the deflector 220 is reduced, so that the installation groove 133 can accommodate the deflector 200 without opening an opening, collision between the deflector 220 and the installation groove 133 is not required, the installation groove 133 is enabled to be more closed, meanwhile, the first arc-shaped surface 131 is more complete, the sealing performance of the protruding portion 130 can be improved, and diffusion of gaseous aluminum is further prevented.
The main body 210 is provided with a plurality of expansion grooves 230 corresponding to the number of the guide plates 220, each expansion groove 230 comprises a first expansion section 231 and a second expansion section 232 which are communicated with each other, the diameter of the first expansion section 231 is larger than that of the second expansion section 232, the first expansion section 231 is close to the aluminizing roller 104, the second expansion section 232 is close to the guide post 240, the guide plates 220 comprise a first plate 221 arranged in the first expansion section 231 and a second plate 222 arranged in the second expansion section 232, the first end 2201 is an end face of the first plate 221 facing the aluminizing roller 104, and the second end 2201 is an end face of the second plate 222 facing the guide post 240. The side wall of the first telescopic section 231 is provided with a guide groove 2311, one surface of the first plate 221 facing the side wall of the first telescopic section 231 is provided with a guide block 2211, and the guide block 2211 is embedded into the guide groove 2311 and can move along the guide groove 2311. The second end 2201 is provided with a supporting plate 2221 extending towards the guide column 240, the supporting plate 2221 is provided with a rotatable supporting shaft 2222, the supporting shaft 2222 is attached to the guide column 240 and can move along the surface of the guide column 240, a plate body is provided with a yielding groove 2212 towards the side wall of the first telescopic section 231, the side wall of the first telescopic section 231 is provided with a limiting plate 2312 stretching into the yielding groove 2212, and an elastic piece 2313 contacting with the limiting plate 2312 is arranged in the yielding groove 2212 so as to keep the supporting shaft 2222 attached to the guide column 240. The support shaft 2222 is engaged with the surface of the guide post 240 by the elastic member 2313, and the elastic member 2313 is pressed or released when the width of the gap between the guide post 240 and the main body 210 is changed so that the deflector 220 moves in the telescopic slot 230.
The two guide members 200 are arranged, the distance between the two guide members 200 and the center of the aluminized roller 104 is equal, and the distance between the two guide members 200 is smaller than the sum of the lengths of the parts of the guide plates 220 of the two guide members 200 extending out of the main body 210, so that the two guide members 200 form a structure similar to gear engagement. The rotation directions of the two guide members 200 are opposite, and the guide plates 220 of the two guide members 200 are staggered with each other without collision when meeting, so that the distance between the two guide members can be shortened, thereby making the structure in the installation groove 133 more compact. Meanwhile, the guide plates 220 of the two guide pieces 200 which are mutually staggered form a labyrinth structure at the meeting position, so that gaseous aluminum in the evaporation chamber 120 can be prevented from flowing back to the diffusion gap 135 through the gap between the guide groove 134 and the two guide pieces 200, the possibility of gaseous aluminum diffusion is further reduced, and the clean environment of the main chamber 100 is ensured.
The embodiments of the present application and the features of the embodiments may be combined without conflict, and the present application is not limited to the specific embodiments described above, which are merely illustrative, not restrictive, and many forms may be made by those of ordinary skill in the art, without departing from the spirit of the present application and the scope of the claims, which are also within the protection of the present application.

Claims (9)

1. The manufacturing method of the vacuum aluminized film is characterized by comprising the following steps of:
step one, placing a coiled substrate on a substrate travelling device in a vacuum aluminizing machine;
step two, vacuumizing to enable the vacuum degree in the vacuum aluminizing machine to reach more than 4X10-4 mbar;
heating the evaporation device (121) to enable the aluminum wires to melt and evaporate into gaseous aluminum at the temperature of 1300-1400 ;
driving the substrate travelling device to enable the substrate to move;
and fifthly, when the moving speed of the substrate is 10m/s-14.5m/s, opening the opening (111) to enable the gaseous aluminum particles to deposit on the moving substrate surface, and performing cold cutting to form a continuous and bright metal aluminum layer.
The vacuum aluminizing machine comprises a main chamber (100), a partition plate (110) is arranged in the main chamber (100), the partition plate (110) is connected with the side wall of the main chamber (100) to form an evaporation chamber (120) in the main chamber (100), a substrate advancing device is arranged in the main chamber (100), the substrate advancing device comprises an aluminizing roller (104), an opening (111) is formed in the partition plate (110), the aluminizing roller (104) partially penetrates through the opening (111) to enter the evaporation chamber (120), an evaporation device (121) facing the opening (111) is arranged in the evaporation chamber (120), and a guide piece (200) for limiting diffusion of gaseous aluminum is arranged at the opening (111).
2. The method for manufacturing a vacuum aluminum plating film according to claim 1, wherein two protruding portions (130) are disposed at the opening (111), a first arc surface (131) and a second arc surface (132) are disposed on each of the two protruding portions (130), the two first arc surfaces (131) are disposed along edges of the aluminum plating roller (104), a distance between the two second arc surfaces (132) is gradually reduced in a direction of the evaporation device (121) toward the aluminum plating roller (104), a mounting groove (133) is disposed on each of the first arc surfaces (131), a diversion groove (134) is disposed on each of the protruding portions (130), two ends of each of the diversion grooves (134) are respectively communicated with the mounting groove (133) and the evaporation chamber (120), the diversion piece (200) is disposed in the mounting groove (133), a space between the first arc surface (131) and the aluminum plating roller (104) forms a diffusion gap (135), and the diversion piece (200) rotates to divert the air flow (134) flowing into the diversion groove (135).
3. A method of producing a vacuum aluminized film according to claim 2, wherein the guide member (200) comprises a rotatable annular main body (210), a plurality of guide plates (220) are arranged on the main body (210) at equal intervals in an annular shape, the guide plates (220) are slidably connected with the main body (210) so that the guide plates (220) can move along the radial direction of the main body (210), a guide post (240) eccentrically arranged with respect to the main body (210) is arranged at the center of the main body (210), the guide plates (220) comprise a first end (2201) and a second end (2201), the first end (2201) faces the aluminized roller (104), the second end (2201) faces the guide post (240), and the length of the guide plates (220) extending out of the main body (210) and the width of a gap between the guide post (240) and the main body (210) are inversely proportional.
4. A method for manufacturing a vacuum aluminized film according to claim 3, wherein a plurality of expansion grooves (230) corresponding to the number of guide plates (220) are formed in the main body (210), the expansion grooves (230) comprise a first expansion section (231) and a second expansion section (232) which are communicated with each other, the diameter of the first expansion section (231) is larger than that of the second expansion section (232), the first expansion section (231) is close to the aluminized roller (104), the second expansion section (232) is close to the guide post (240), the guide plates (220) comprise a first plate body (221) arranged in the first expansion section (231) and a second plate body (222) arranged in the second expansion section (232), the first end (2201) is an end face of the first plate body (221) facing the aluminized roller (104), and the second end (2201) is an end face of the second plate body (222) facing the guide post (240).
5. The method according to claim 4, wherein a guide groove (2311) is provided on a side wall of the first expansion section (231), a guide block (2211) is provided on a side of the first plate body (221) facing the side wall of the first expansion section (231), and the guide block (2211) is embedded in the guide groove (2311) and can move along the guide groove (2311).
6. A method of producing a vacuum aluminized film according to claim 4, characterized in that a support plate (2221) extending towards the guide post (240) is provided on the second end (2201), a rotatable support shaft (2222) is provided on the support plate (2221), and the support shaft (2222) is attached to the guide post (240) and is movable along the surface of the guide post (240).
7. The method according to claim 4, wherein a relief groove (2212) is formed in a side wall of the first plate body (221) facing the first telescopic section (231), a limit plate (2312) extending into the relief groove (2212) is formed in the side wall of the first telescopic section (231), and an elastic member (2313) contacting with the limit plate (2312) is arranged in the relief groove (2212) to keep the supporting shaft (2222) and the guide column (240) in contact with each other.
8. A method of producing a vacuum aluminized film according to claim 3, wherein the guide post (240) is disposed eccentrically to the main body (210) in a direction toward the center of the aluminizing roller (104), and the main body (210) is rotated such that the length of the guide plate (220) protruding to the outer portion of the main body (210) is maximized when the guide plate (220) is aligned in the direction toward the center of the aluminizing roller (104).
9. A method of producing a vacuum aluminized film according to claim 3, characterized in that the number of guide members (200) is two, the distance between the two guide members (200) and the center of the aluminizing roller (104) being equal, the distance between the two guide members (200) being smaller than the sum of the lengths of the portions of the guide plates (220) of the two guide members (200) protruding from the main body (210).
CN202311859046.4A 2023-12-30 2023-12-30 Manufacturing method of vacuum aluminized film Active CN117888063B (en)

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CN117888063B CN117888063B (en) 2024-07-05

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JP2003301260A (en) * 2002-04-12 2003-10-24 Toppan Printing Co Ltd Winding type electron beam vacuum vapor deposition device
JP2009235545A (en) * 2008-03-28 2009-10-15 Toray Ind Inc Metal oxide thin film formation device, and method for producing sheet with metal oxide thin film
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CN111962037A (en) * 2020-09-07 2020-11-20 温岭市华航电子科技有限公司 Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof
CN112368413A (en) * 2019-03-12 2021-02-12 株式会社爱发科 Vacuum evaporation device
CN112708855A (en) * 2019-10-25 2021-04-27 宝山钢铁股份有限公司 Vacuum coating device with diversion type vacuum coating nozzle
CN112877670A (en) * 2021-02-06 2021-06-01 合肥市辉耀真空材料有限责任公司 Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process
CN116445863A (en) * 2023-04-28 2023-07-18 普诺逊真空科技(苏州)有限公司 Evaporation point source material recycling box

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003301260A (en) * 2002-04-12 2003-10-24 Toppan Printing Co Ltd Winding type electron beam vacuum vapor deposition device
JP2009235545A (en) * 2008-03-28 2009-10-15 Toray Ind Inc Metal oxide thin film formation device, and method for producing sheet with metal oxide thin film
CN107177830A (en) * 2017-07-13 2017-09-19 安徽省宁国市海伟电子有限公司 Full aluminium profiles metallized film and its vacuum coater
CN112368413A (en) * 2019-03-12 2021-02-12 株式会社爱发科 Vacuum evaporation device
CN112708855A (en) * 2019-10-25 2021-04-27 宝山钢铁股份有限公司 Vacuum coating device with diversion type vacuum coating nozzle
CN111962037A (en) * 2020-09-07 2020-11-20 温岭市华航电子科技有限公司 Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof
CN112877670A (en) * 2021-02-06 2021-06-01 合肥市辉耀真空材料有限责任公司 Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process
CN116445863A (en) * 2023-04-28 2023-07-18 普诺逊真空科技(苏州)有限公司 Evaporation point source material recycling box

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