CN117886279A - Electronic grade sulfuric acid production facility - Google Patents
Electronic grade sulfuric acid production facility Download PDFInfo
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- CN117886279A CN117886279A CN202410085882.XA CN202410085882A CN117886279A CN 117886279 A CN117886279 A CN 117886279A CN 202410085882 A CN202410085882 A CN 202410085882A CN 117886279 A CN117886279 A CN 117886279A
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000002156 mixing Methods 0.000 claims abstract description 100
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 claims abstract description 100
- 230000007246 mechanism Effects 0.000 claims abstract description 63
- 229910021642 ultra pure water Inorganic materials 0.000 claims abstract description 60
- 239000012498 ultrapure water Substances 0.000 claims abstract description 60
- 238000010521 absorption reaction Methods 0.000 claims abstract description 37
- 238000007789 sealing Methods 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 claims description 25
- 238000003756 stirring Methods 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 13
- 238000009434 installation Methods 0.000 claims description 4
- 230000010354 integration Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 58
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 230000004927 fusion Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Abstract
The invention relates to the technical field of sulfuric acid production equipment, in particular to electronic grade sulfuric acid production equipment, which comprises the following components: the secondary absorption mechanism comprises a circulating barrel body and a first circulating air pump connected with the circulating barrel body, the discharge mechanism comprises a discharge pipe and a sealing plate arranged in the discharge pipe, and the mixed flow mechanism comprises a second air outlet pipe arranged in the mixing barrel body and a flow dispersing cover arranged at the end part of the second air outlet pipe; through making the sulfur trioxide gas circulation, the top of second cavity is got into to the sulfur trioxide gas after the circulation, promotes the inside ultrapure water of second cavity to remove to the inside of first cavity, and under the counter force of ultrapure water, the inside atmospheric pressure of second cavity increases to the inside ultrapure water of second cavity has increased the pressure of the integration of sulfur trioxide gas.
Description
Technical Field
The invention relates to the technical field of sulfuric acid production equipment, in particular to electronic grade sulfuric acid production equipment.
Background
The electronic grade sulfuric acid is also called high-purity sulfuric acid and ultra-purity sulfuric acid, belongs to ultra-clean high-purity reagents, is an indispensable key basic chemical reagent in the development process of microelectronic technology, and mainly comprises a rectification method and a gas absorption method;
the method for absorbing the gas comprises the steps of introducing sulfur trioxide gas into ultrapure water to enable the ultrapure water to absorb the sulfur trioxide gas to form high-purity sulfuric acid liquid, introducing the sulfur trioxide gas into a mixing tank filled with the ultrapure water under normal pressure when the ultrapure water absorbs the sulfur trioxide gas at present, and then enabling the sulfur trioxide gas to be fused with the ultrapure water through stirring and atomization;
but under normal pressure, the fusion of the sulfur trioxide gas and the ultrapure water is slower, so that the production efficiency of the high-purity sulfuric acid is lower, and the absorption of the ultrapure water to the sulfur trioxide gas is slower, so that the discharged waste gas contains more sulfur trioxide, further, the workload of the waste gas treatment mechanism is larger, and the waste of resources is caused.
Disclosure of Invention
The invention aims to provide electronic grade sulfuric acid production equipment so as to solve the problems of the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
an electronic grade sulfuric acid production facility comprising:
the device comprises a primary absorption mechanism, a secondary absorption mechanism, a discharge mechanism and a mixed flow mechanism;
the primary absorption mechanism is used for mixing sulfur trioxide gas and ultrapure water, and comprises a mixing barrel body, an axial flow cover and axial flow fan blades, wherein the axial flow cover and the axial flow fan blades are arranged in the mixing barrel body;
the secondary absorption mechanism is arranged on one side of the mixing barrel body and is used for absorbing sulfur trioxide gas in the mixing barrel body again, and the secondary absorption mechanism comprises a circulating barrel body and a first circulating air pump connected with the circulating barrel body;
the discharging mechanism is arranged at the top end of the mixing barrel body and is used for discharging gas in the mixing barrel body and controlling air pressure in the mixing barrel body at the same time, the discharging mechanism comprises a discharging pipe and a sealing plate arranged in the discharging pipe, a mounting support is fixedly arranged in the discharging pipe, and the mounting support is arranged below the sealing plate;
the mixed flow mechanism is arranged in the mixing barrel body, the mixed flow mechanism is used for conveying gas in the secondary absorption mechanism back to the mixing barrel body, meanwhile, the gas in the secondary absorption mechanism and ultrapure water in the mixing barrel body are mixed, the mixed flow mechanism comprises a second air outlet pipe arranged in the mixing barrel body and a diffusion cover arranged at the end part of the second air outlet pipe, a spiral pipe is fixedly connected with the surface of the second air outlet pipe and used for guiding the ultrapure water in the mixing barrel body to enter the second air outlet pipe, and diffusion blades are arranged in the diffusion cover in a rotating mode and used for diffusing water flow and air flow discharged by the second air outlet pipe.
Preferably, an air inlet is arranged on one side of the mixing barrel body, the position of the air inlet is higher than the bottom end of the partition plate, a filling port for filling ultrapure water is arranged on the surface of the mixing barrel body, a first driving motor is fixedly arranged at the bottom of the mixing barrel body, an output shaft of the first driving motor extends to the inside of the mixing barrel body through the bottom of the mixing barrel body, and the end part of the output shaft of the first driving motor is correspondingly arranged with the partition plate.
Preferably, the axial flow cover corresponds to the end part of the output shaft of the first driving motor, the axial flow cover is arranged on the outer side of the output shaft of the first driving motor, an axial flow cover bracket is fixedly connected to the bottom of the mixing mechanism, and the axial flow cover is fixedly connected with the bottom of the mixing barrel body through the axial flow cover bracket.
Preferably, the axial flow fan blade is fixedly sleeved at the end part of the output shaft of the first driving motor;
the first driving motor drives the axial flow fan blades to rotate in the axial flow cover through an output shaft of the first driving motor, and ultrapure water in the mixing barrel body is conveyed to the lower parts of the axial flow fan blades from the upper parts of the axial flow fan blades.
Preferably, the inside rotation of circulation staving is provided with the (mixing) shaft, the tip fixed second driving motor that is provided with of circulation staving, the (mixing) shaft with the output shaft fixed connection of second driving motor, the surface of (mixing) shaft is provided with multiunit stirring leaf.
Preferably, one end of the first circulating air pump is connected with a first air inlet pipe, one end of the first air inlet pipe away from the first circulating air pump is fixedly connected with the top of the mixing barrel body, the first air inlet pipe is communicated with the first cavity inside the mixing barrel body, the other end of the first circulating air pump is connected with a first air outlet pipe, and one end of the first air outlet pipe away from the first circulating air pump is communicated with the bottom of the circulating barrel body.
Preferably, the discharge pipe is fixedly connected with the top of the mixing tub, and the discharge pipe is communicated with the second chamber inside the mixing tub.
Preferably, a baffle ring is arranged above the mounting support, a connecting rod is fixedly connected between the baffle ring and the mounting support, a sealing plate is arranged between the mounting support and the baffle ring, a telescopic rod is fixedly connected to the surface of the sealing plate and penetrates through the inside of the baffle ring in a sliding mode, a jacking spring is sleeved on the surface of the telescopic rod, the jacking spring is arranged between the baffle ring and the sealing plate, and a sealing gasket is fixedly arranged on one side, close to the mounting support, of the sealing plate.
Preferably, one end of the second air outlet pipe extends to the outside of the mixing barrel body and then is fixedly connected with a second circulating air pump, one end of the second circulating air pump is connected with a second air inlet pipe, the second air inlet pipe is communicated with the top end of the circulating barrel body, one end of the second air outlet pipe, which is far away from the second circulating air pump, is arranged in the second chamber, the second air outlet pipe is arranged at one end of the second chamber and is in a vertical state, an outlet of the second air outlet pipe is arranged below, a spiral pipe is arranged at the vertical end of the second air outlet pipe, the spiral pipe is communicated with the inside of the second air outlet pipe, and the position of one end, which is connected with the second air outlet pipe, of the spiral pipe is lower than the position of the spiral pipe, which is far away from one end of the second air outlet pipe.
Preferably, the diffuser is communicated with the outlet of the second air outlet pipe, the position where the diffuser is connected with the second air outlet pipe is located at a non-central position of the diffuser, an installation shaft is fixedly installed in the middle of the diffuser, and the diffuser blades are rotatably installed on the surface of the installation shaft.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the sulfur trioxide gas is introduced into the ultrapure water in the first chamber through the air inlet, then the sulfur trioxide gas enters the second chamber after being circulated in the circulating barrel body through the first circulating air pump and the second circulating air pump, and the sulfur trioxide gas moves upwards from the bottom of the ultrapure water in the circulating process, so that the fusion efficiency of the sulfur trioxide gas and the ultrapure water is increased under the action of water pressure, and the absorption rate of the ultrapure water to the sulfur trioxide gas is improved.
2. The circulating sulfur trioxide gas enters the top end of the second chamber, the ultrapure water in the second chamber is pushed to move towards the inside of the first chamber, and the air pressure in the second chamber is increased under the reaction force of the ultrapure water, so that the fusion pressure of the ultrapure water in the second chamber and the sulfur trioxide gas is increased, and the absorption rate of the ultrapure water to the sulfur trioxide gas is further increased;
by arranging the discharge mechanism, when the air pressure in the second chamber is too high, the sealing plate is lifted, so that the air in the second chamber is discharged through the discharge pipe, and when the air pressure in the second chamber is reduced, the sealing plate is reset, so that the air pressure in the second chamber is constant.
3. After the ultrapure water is used for carrying out multistage efficient absorption on the sulfur trioxide gas, the content of sulfur trioxide in the sulfur trioxide gas is low, so that the content of sulfur trioxide in discharged waste gas is low, the work load of a waste gas treatment mechanism is reduced, and the waste of resources is reduced.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention;
FIG. 3 is an enlarged schematic view of the invention at A in FIG. 1;
FIG. 4 is an enlarged schematic view of the invention at B in FIG. 1;
FIG. 5 is a schematic diagram of a mixed flow mechanism according to the present invention;
fig. 6 is a schematic view of the structure of the discharging mechanism of the present invention.
In the figure:
the primary absorption mechanism 1, the mixing barrel 11, the air inlet 12, the partition 13, the first chamber 131, the second chamber 132, the axial flow cover 14, the axial flow cover bracket 15, the axial flow fan blades 16 and the first driving motor 17;
the secondary absorption mechanism 2, the circulating barrel body 21, the second driving motor 22, the stirring shaft 23, the stirring blade 24, the first circulating air pump 25, the first air inlet pipe 26 and the first air outlet pipe 27;
the device comprises a discharging mechanism 3, a discharging pipe 31, a mounting support 32, a baffle ring 33, a connecting rod 34, a sealing plate 35, a telescopic rod 36, a supporting spring 37 and a sealing gasket 38;
the mixing mechanism 4, the second circulating air pump 41, the second air inlet pipe 42, the second air outlet pipe 43, the spiral pipe 44, the dispersing cover 45, the mounting shaft 46 and the dispersing blade 47.
Detailed Description
In order to more clearly illustrate the general inventive concept, reference will be made in the following detailed description, by way of example, to the accompanying drawings.
It should be noted that in the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than as described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
In addition, in the description of the present invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. However, it is noted that direct connection indicates that the two bodies connected together do not form a connection relationship through a transition structure, but are connected together to form a whole through a connection structure. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Referring to fig. 1 to 6, the present invention provides an electronic grade sulfuric acid production apparatus, comprising:
a primary absorption mechanism 1, a secondary absorption mechanism 2, a discharge mechanism 3 and a mixed flow mechanism 4;
the primary absorption mechanism 1 is used for mixing sulfur trioxide gas and ultrapure water, the primary absorption mechanism 1 comprises a mixing barrel 11, an axial flow cover 14 and axial flow blades 16, wherein the axial flow cover 14 and the axial flow blades 16 are arranged in the mixing barrel 11, a partition plate 13 is fixedly arranged in the mixing barrel 11, the interior of the mixing barrel 11 is divided into a first cavity 131 and a second cavity 132 by the partition plate 13, an air inlet 12 is arranged on one side of the mixing barrel 11, the position of the air inlet 12 is higher than the bottom end of the partition plate 13, the surface of the mixing barrel 11 is provided with a filling port for filling the ultrapure water, the bottom of the mixing barrel 11 is fixedly provided with a first driving motor 17, the output shaft of the first driving motor 17 extends to the interior of the mixing barrel 11 through the bottom of the mixing barrel 11, the end part of the first driving motor 17 is arranged corresponding to the partition plate 13, the axial flow cover 14 is arranged below the partition plate 13, two sides of the axial flow cover 14 are respectively corresponding to the first cavity 131 and the second cavity 132, the axial flow cover 14 is arranged corresponding to the first cavity 131, the axial flow motor is fixedly connected with the axial flow blades 14 through the bottom of the axial flow cover 17, the axial flow cover is fixedly arranged at the bottom of the mixing barrel 11, the axial flow cover 17 is fixedly connected with the axial flow blades 17 through the axial flow cover 17, the axial flow cover is fixedly connected with the axial flow cover 17, the axial flow blades are fixedly arranged at the bottom of the output shaft of the mixing barrel 17, the axial flow cover is connected with the axial flow cover 17, the axial flow cover is connected with the output shaft through the axial flow blades 15, and the axial flow device through the support 15, delivering ultrapure water inside the mixing tub 11 from above the axial flow fan blades 16 to below the axial flow fan blades 16;
the secondary absorption mechanism 2 is arranged on one side of the mixing barrel 11, the secondary absorption mechanism 2 is used for absorbing sulfur trioxide gas in the mixing barrel 11 again, the secondary absorption mechanism 2 comprises a circulating barrel 21 and a first circulating air pump 25 connected with the circulating barrel 21, a stirring shaft 23 is rotatably arranged in the circulating barrel 21, a second driving motor 22 is fixedly arranged at the end part of the circulating barrel 21, the stirring shaft 23 is fixedly connected with an output shaft of the second driving motor 22, a plurality of groups of stirring blades 24 are arranged on the surface of the stirring shaft 23, one end of the first circulating air pump 25 is connected with a first air inlet pipe 26, one end of the first air inlet pipe 26, which is far away from the first circulating air pump 25, is fixedly connected with the top of the mixing barrel 11, the first air inlet pipe 26 is communicated with a first cavity 131 in the mixing barrel 11, the other end of the first circulating air pump 25 is connected with a first air outlet pipe 27, and one end of the first air outlet pipe 27, which is far away from the first circulating air pump 25, is communicated with the bottom of the circulating barrel 21;
the discharging mechanism 3 is arranged at the top end of the mixing drum 11, the discharging mechanism 3 is used for discharging gas in the mixing drum 11 and controlling the gas pressure in the mixing drum 11, the discharging mechanism 3 comprises a discharging pipe 31 and a sealing plate 35 arranged in the discharging pipe 31, the discharging pipe 31 is fixedly connected with the top of the mixing drum 11, the discharging pipe 31 is communicated with the second cavity 132 in the mixing drum 11, a mounting support 32 is fixedly arranged in the discharging pipe 31, the mounting support 32 is arranged below the sealing plate 35, a baffle ring 33 is arranged above the mounting support 32, a connecting rod 34 is fixedly connected between the baffle ring 33 and the mounting support 32, the sealing plate 35 is arranged between the mounting support 32 and the baffle ring 33, a telescopic rod 36 is fixedly connected to the surface of the sealing plate 35, the telescopic rod 36 slides through the inside of the baffle ring 33, a supporting spring 37 is sleeved on the surface of the telescopic rod 36, and the supporting spring 37 is arranged between the supporting spring 37 and the sealing plate 35 and the sealing plate 38, and one side of the sealing plate 35 is fixedly arranged near the sealing plate 38;
the mixing mechanism 4 is arranged in the mixing barrel 11, the mixing mechanism 4 is used for conveying the gas in the secondary absorption mechanism 2 back to the inside of the mixing barrel 11, meanwhile, mixing the gas in the secondary absorption mechanism 2 with the ultrapure water in the mixing barrel 11, the mixing mechanism 4 comprises a second air outlet pipe 43 arranged in the mixing barrel 11 and a dispersing cover 45 arranged at the end part of the second air outlet pipe 43, a spiral pipe 44 is fixedly connected to the surface of the second air outlet pipe 43, a second circulating air pump 41 is fixedly connected after one end of the second air outlet pipe 43 extends to the outside of the mixing barrel 11, one end of the second circulating air pump 41 is connected with a second air inlet pipe 42, the second air inlet pipe 42 is communicated with the top end of the circulating barrel 21, one end of the second air outlet pipe 43, which is far away from the second circulating air pump 41, is arranged in the inside of the second chamber 132, the second air outlet pipe 43 is arranged at one end inside the second chamber 132 in a vertical state, the outlet of the second air outlet pipe 43 is arranged below, the spiral pipe 44 is arranged at the vertical end of the second air outlet pipe 43, the spiral pipe 44 is communicated with the inside of the second air outlet pipe 43, the position of one end, connected with the second air outlet pipe 43, of the spiral pipe 44 is lower than the position of one end, far away from the second air outlet pipe 43, of the spiral pipe 44, the spiral pipe 44 is used for guiding ultrapure water inside the mixing drum 11 to enter the inside of the second air outlet pipe 43, the inside of the air dispersing cover 45 is rotatably provided with air dispersing blades 47, the air dispersing blades 47 are used for dispersing water flow and air flow discharged by the second air outlet pipe 43, the air dispersing cover 45 is communicated with the outlet of the second air outlet pipe 43, and the position where the diffuser 45 is connected with the second air outlet pipe 43 is located at a non-central position of the diffuser 45, a mounting shaft 46 is fixedly mounted in the middle of the diffuser 45, and the diffuser blades 47 are rotatably mounted on the surface of the mounting shaft 46.
Embodiment one:
injecting the ultra-pure water into the mixing tub 11 so that the ultra-pure water is distributed to the inside of the first chamber 131 and the second chamber 132 and the height of the ultra-pure water is not higher than the uppermost end of the second outlet pipe 43, then introducing the sulfur trioxide gas into the ultra-pure water in the inside of the first chamber 131 through the gas inlet 12, and rising the ultra-pure water to be fused with each other in the rising process when the sulfur trioxide gas is introduced into the ultra-pure water;
the sulfur trioxide gas is directly introduced into the ultrapure water, so that under the interaction of water pressure and air pressure, the pressure of fusion of the sulfur trioxide gas and the ultrapure water is increased, and the fusion efficiency of the ultrapure water and the sulfur trioxide gas is accelerated;
after the sulfur trioxide gas rises to the top of the first chamber 131, the first circulating air pump 25 pumps out the sulfur trioxide gas rising to the top of the first chamber 131 through the first air inlet pipe 26 and pumps the sulfur trioxide gas to the bottom of the circulating barrel 21 through the first air outlet pipe 27, so that the ultrapure water in the circulating barrel 21 absorbs the sulfur trioxide gas again, and meanwhile, the stirring shaft 23 and the stirring blades 24 are driven by the second driving motor 22 to stir the ultrapure water in the circulating barrel 21, so that the absorption efficiency of the ultrapure water to the sulfur trioxide gas is further accelerated.
Embodiment two:
after the sulfur trioxide gas rises from the bottom of the circulation barrel 21 to the top of the circulation barrel 21, the second circulation air pump 41 pumps the sulfur trioxide gas at the top of the circulation barrel 21 out through the second air inlet pipe 42 and pumps the sulfur trioxide gas into the second chamber 132 through the second air outlet pipe 43, the sulfur trioxide gas is sprayed out from the outlet of the second air outlet pipe 43, the ultrapure water in the second chamber 132 rises and is mixed with the ultrapure water in the mixing barrel 11 again, the sulfur trioxide gas in the second chamber 132 rises to the top of the second chamber 132 and pushes the ultrapure water in the second chamber 132 to move into the first chamber 131, and under the reaction of water pressure, the air pressure at the top of the second chamber 132 is increased, so that the fusion pressure of the ultrapure water in the second chamber 132 and the sulfur trioxide gas is increased, and the absorption rate of the ultrapure water to the sulfur trioxide gas is further improved;
when the air pressure above the second chamber 132 reaches a certain height, the sealing plate 35 moves upwards under the pushing of the air pressure, so that the air in the second chamber 132 is discharged outwards through the discharge pipe 31, and the air discharged through the discharge pipe 31 is absorbed by ultrapure water for many times, so that the content of sulfur trioxide in the air is extremely low, and the work load of the waste gas treatment mechanism is reduced.
Embodiment III:
in the process that the gas at the top of the circulating barrel 21 is pumped into the second chamber 132 through the second gas outlet pipe 43, when the gas rapidly flows through the spiral pipe 44, negative pressure is formed between the inside of the second gas outlet pipe 43 and the inside of the spiral pipe 44, so that ultrapure water in the spiral pipe 44 flows into the inside of the second gas outlet pipe 43 in an accelerating way, and flows with the gas flowing through the inside of the second gas outlet pipe 43 in a mixing way, so that the ultrapure water and sulfur trioxide gas collide and mix with each other in the high-speed movement, and the absorption rate of the ultrapure water to the sulfur trioxide gas is accelerated;
the spiral pipe 44 is arranged in a spiral shape, so that circumferential force is generated when water flow in the spiral pipe 44 enters the second air outlet pipe 43, and air flow in the second air outlet pipe 43 moves axially, so that water flow entering the second air outlet pipe 43 through the spiral pipe 44 collides with air flow in the second air outlet pipe 43, and the fusion rate of air and ultrapure water is improved.
Embodiment four:
on the basis of the third embodiment, after the water flow entering the second air outlet pipe 43 through the spiral pipe 44 mixes with the air flow inside the second air outlet pipe 43, the discharged air flow and water flow are discharged through the outlet of the second air outlet pipe 43, the discharged air flow and water flow push the dispersing blades 47 to rotate, and the water flow and air flow discharged by the second air outlet pipe 43 are dispersed in the rotating process of the dispersing blades 47, so that the water flow and air flow are fully contacted with the ultrapure water in the second chamber 132, and the absorption rate of the ultrapure water to sulfur trioxide gas is further improved.
Fifth embodiment:
through setting up axial fan cover 14 and axial fan blade 16, drive axial fan blade 16 through first driving motor 17 and rotate in the inside of axial fan cover 14, make the ultrapure water of first cavity 131 and second cavity 132 bottom flow to the bottom of axial fan blade 16 through axial fan blade 16, then flow to the side of mixing drum 11 from the bottom of axial fan blade 16 to make the inside ultrapure water of first cavity 131 and second cavity 132 mix each other and roll from top to bottom, thereby make the inside sulfuric acid concentration that forms of first cavity 131 and second cavity 132 unanimous.
Those of ordinary skill in the art will appreciate that: the discussion of any of the embodiments above is merely exemplary and is not intended to suggest that the scope of the invention (including the claims) is limited to these examples; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the invention, the steps may be implemented in any order and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The present invention is intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omission, modification, equivalent replacement, improvement, etc. of the present invention should be included in the scope of the present invention.
Claims (10)
1. An electronic grade sulfuric acid production facility, characterized by comprising:
a primary absorption mechanism (1), a secondary absorption mechanism (2), a discharge mechanism (3) and a mixed flow mechanism (4);
the primary absorption mechanism (1) is used for mixing sulfur trioxide gas and ultrapure water, the primary absorption mechanism (1) comprises a mixing barrel body (11) and an axial flow cover (14) and axial flow fan blades (16) which are arranged in the mixing barrel body (11), a partition plate (13) is fixedly arranged in the mixing barrel body (11), the interior of the mixing barrel body (11) is divided into a first cavity (131) and a second cavity (132) by the partition plate (13), the axial flow cover (14) is arranged below the partition plate (13), two sides of the axial flow cover (14) correspond to the first cavity (131) and the second cavity (132) respectively, and the axial flow fan blades (16) are rotatably arranged in the axial flow cover (14);
the secondary absorption mechanism (2) is arranged on one side of the mixing barrel body (11), the secondary absorption mechanism (2) is used for reabsorbing sulfur trioxide gas in the mixing barrel body (11), and the secondary absorption mechanism (2) comprises a circulating barrel body (21) and a first circulating air pump (25) connected with the circulating barrel body (21);
the discharging mechanism (3) is arranged at the top end of the mixing barrel body (11), the discharging mechanism (3) is used for discharging gas in the mixing barrel body (11) and controlling air pressure in the mixing barrel body (11), the discharging mechanism (3) comprises a discharging pipe (31) and a sealing plate (35) arranged in the discharging pipe (31), an installation support (32) is fixedly arranged in the discharging pipe (31), and the installation support (32) is arranged below the sealing plate (35);
the utility model provides a mixing mechanism (4) set up in the inside of mixing drum body (11), mixing mechanism (4) are used for with the inside gas of secondary absorption mechanism (2) is carried back the inside of mixing drum body (11), will simultaneously the inside gas of secondary absorption mechanism (2) with the inside ultrapure water mixed flow of mixing drum body (11), mixing mechanism (4) including set up in the inside second outlet duct (43) of mixing drum body (11) and set up in the scattered cover (45) of second outlet duct (43) tip, the fixed surface of second outlet duct (43) is connected with spiral pipe (44), spiral pipe (44) are used for guiding the inside ultrapure water of mixing drum body (11) gets into the inside of second outlet duct (43), the inside rotation of scattered cover (45) is provided with scattered flow vane (47), scattered flow vane (47) are used for with second outlet duct (43) exhaust rivers and air current are broken up.
2. The electronic grade sulfuric acid production apparatus according to claim 1, wherein an air inlet (12) is installed at one side of the mixing tub body (11), the position of the air inlet (12) is higher than the bottom end of the partition plate (13), and the surface of the mixing tub body (11) is provided with a filling port for filling ultrapure water, a first driving motor (17) is fixedly installed at the bottom of the mixing tub body (11), an output shaft of the first driving motor (17) extends to the inside of the mixing tub body (11) through the bottom of the mixing tub body (11), and an output shaft end of the first driving motor (17) is correspondingly arranged with the partition plate (13).
3. The electronic grade sulfuric acid production apparatus according to claim 2, characterized in that the axial flow cover (14) corresponds to an output shaft end portion of the first driving motor (17), and the axial flow cover (14) is disposed on an outer side of an output shaft of the first driving motor (17), an axial flow cover bracket (15) is fixedly connected to a bottom of the mixing mechanism (4), and the axial flow cover (14) is fixedly connected to a bottom of the mixing tub body (11) through the axial flow cover bracket (15).
4. An electronic grade sulfuric acid production apparatus according to claim 3, characterized in that the axial flow fan blades (16) are fixedly sleeved at the end part of the output shaft of the first driving motor (17);
the first driving motor (17) drives the axial flow fan blades (16) to rotate in the axial flow cover (14) through an output shaft of the first driving motor (17), and ultrapure water in the mixing barrel body (11) is conveyed to the lower part of the axial flow fan blades (16) from the upper part of the axial flow fan blades (16).
5. The electronic grade sulfuric acid production device according to claim 1, wherein a stirring shaft (23) is rotatably arranged in the circulating barrel body (21), a second driving motor (22) is fixedly arranged at the end part of the circulating barrel body (21), the stirring shaft (23) is fixedly connected with an output shaft of the second driving motor (22), and a plurality of groups of stirring blades (24) are arranged on the surface of the stirring shaft (23).
6. The electronic grade sulfuric acid production device according to claim 1, wherein one end of the first circulating air pump (25) is connected with a first air inlet pipe (26), one end of the first air inlet pipe (26) away from the first circulating air pump (25) is fixedly connected with the top of the mixing barrel body (11), the first air inlet pipe (26) is communicated with the first chamber (131) inside the mixing barrel body (11), the other end of the first circulating air pump (25) is connected with a first air outlet pipe (27), and one end of the first air outlet pipe (27) away from the first circulating air pump (25) is communicated with the bottom of the circulating barrel body (21).
7. The electronic grade sulfuric acid production apparatus according to claim 1, characterized in that the discharge pipe (31) is fixedly connected with the top of the mixing tub (11), and the discharge pipe (31) is communicated with the second chamber (132) inside the mixing tub (11).
8. The electronic grade sulfuric acid production equipment according to claim 1, characterized in that a baffle ring (33) is arranged above the mounting support (32), a connecting rod (34) is fixedly connected between the baffle ring (33) and the mounting support (32), a sealing plate (35) is arranged between the mounting support (32) and the baffle ring (33), a telescopic rod (36) is fixedly connected to the surface of the sealing plate (35), the telescopic rod (36) slides through the inside of the baffle ring (33), a jacking spring (37) is sleeved on the surface of the telescopic rod (36), the jacking spring (37) is arranged between the baffle ring (33) and the sealing plate (35), and a sealing gasket (38) is fixedly arranged on one side, close to the mounting support (32), of the sealing plate (35).
9. The electronic grade sulfuric acid production apparatus according to claim 1, wherein one end of the second air outlet pipe (43) extends to the outside of the mixing tub body (11) and is fixedly connected with a second circulating air pump (41), one end of the second circulating air pump (41) is connected with a second air inlet pipe (42), the second air inlet pipe (42) is communicated with the top end of the circulating tub body (21), one end of the second air outlet pipe (43), which is far away from the second circulating air pump (41), is arranged in the inside of the second chamber (132), the second air outlet pipe (43) is arranged in a vertical state, an outlet of the second air outlet pipe (43) is arranged below, the spiral pipe (44) is arranged at the vertical end of the second air outlet pipe (43), the position of one end, which is connected with the second air outlet pipe (43), is lower than the position of the spiral pipe (44), which is far away from the second air outlet pipe (43).
10. The electronic grade sulfuric acid production apparatus according to claim 9, wherein the diffuser cap (45) is communicated with the outlet of the second air outlet pipe (43), and the position where the diffuser cap (45) is connected with the second air outlet pipe (43) is located at a non-center position of the diffuser cap (45), a mounting shaft (46) is fixedly mounted in the middle of the diffuser cap (45), and the diffuser blades (47) are rotatably mounted on the surface of the mounting shaft (46).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410085882.XA CN117886279A (en) | 2024-01-22 | 2024-01-22 | Electronic grade sulfuric acid production facility |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410085882.XA CN117886279A (en) | 2024-01-22 | 2024-01-22 | Electronic grade sulfuric acid production facility |
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