CN117877956A

CN117877956A - Water cooling system of vacuum coating ion source

Info

Publication number: CN117877956A
Application number: CN202310005169.5A
Authority: CN
Inventors: 秦新家; 纪春霞; 陈飞; 邱峰
Original assignee: Jiangsu Micro Plating New Energy Technology Co ltd
Current assignee: Jiangsu Micro Plating New Energy Technology Co ltd
Priority date: 2023-01-04
Filing date: 2023-01-04
Publication date: 2024-04-12

Abstract

The invention discloses a water cooling system of a vacuum coating ion source, which has the structure that: the invention improves the cooling efficiency of the anode plate and the magnets.

Description

Water cooling system of vacuum coating ion source

Technical Field

The invention relates to the technical field of production of vacuum coating equipment, in particular to a water cooling system of a vacuum coating ion source.

Background

Before vacuum coating or during vacuum coating, the surface of a workpiece substrate needs to be cleaned, polished or compacted, and the microstructure of the nano coating is compacted in the following specific working mode: in a clean high vacuum environment, high voltage and low current are applied to an ion source, process gases (such as argon, acetylene and the like) are introduced, and the process ions of each gas are generated by utilizing the magnetic field of the ion source to bind electrons and ionize the process gases by the electrons. For example, argon ions bombard the surface of the substrate at a high speed, and the microscopic impurities on the surface of the substrate are polished and cleaned, so that the microstructure on the surface of the product is cleaner, or the microstructure of the nano coating is tamped during vacuum coating, thereby improving the nano hardness of the coating and ensuring that the bonding force between the product and the coating is firmer. When the diamond-like carbon coating is deposited, the ion source is utilized to ionize acetylene gas, carbon ions are formed, and then the carbon ions are deposited on the surface of the substrate to form the diamond-like carbon self-lubricating coating with extremely low friction coefficient (0.15) and extremely high hardness (HV 2500). When vacuum coating, the workpiece is required to be in a high temperature state (150-550 degrees), and heat of the workpiece and the ion source component can radiate to the ion source component in a vacuum environment, so that a magnet of the ion source is demagnetized due to the high temperature. The cathode of the ion source is continuously impacted by electrons and process gas ions at high speed, so that the temperature of the ion source is also increased, the temperature of an anode plate and a magnet which are structures in the ion source are also increased rapidly, and the ion source is required to be cooled in order that the magnet is not demagnetized at high temperature.

At present, the cooling system of ion source generally welds the water pipe in the outside of ion source, indirect cooling, because vacuum environment hardly conducts heat, can only each connecting piece of ion source, the contact surface just conducts heat, carry out cold and hot exchange, with the anode plate, the temperature decline of magnet, need have the welding point just can conduct heat between each connecting piece moreover, the heat exchange efficiency of whole process is extremely low, each connecting piece of ion source passes through welded mode and connects moreover, the high temperature of welding point can lead to the condition that each connecting piece of ion source appears deformation, whole structure is not only heat exchange efficiency is low, and the leakproofness of ion source has been influenced moreover.

Disclosure of Invention

In order to overcome the defects in the prior art, the embodiment of the invention provides a water cooling system of a vacuum coating ion source.

In order to achieve the above object, the innovation points of the present invention are as follows: the structure comprises: two first water pipes, a first U type water pipe, a second U type water pipe and hollow anode plate, be equipped with the water inlet of first water pipe on the anode plate respectively, the delivery port, the central point of anode plate puts the fretwork and has the oval groove, the bottom of anode plate is fixed with the magnetic seat, the surface of magnetic seat is equipped with the lower fixed slot that blocks the horizontal limit of second U type water pipe, lower fixed slot is located the inside of oval groove, be equipped with a plurality of magnets on the magnetic seat, a plurality of magnets evenly are located the inside of oval groove and cover on lower fixed slot, the top of magnetic seat is fixed with the magnetic cover, the magnetic cover covers in the top of oval groove, the bottom of magnetic cover is equipped with the last fixed slot that blocks the horizontal limit of first U type water pipe, the magnet is located between the horizontal limit of first U type water pipe and the horizontal limit of second U type water pipe, the bottom of magnetic seat is equipped with first pipeline entry respectively, the second pipeline entry, the third pipeline entry, first pipeline export, second pipeline export and third pipeline export, one of them first water pipe is linked together along first pipeline entry and water inlet, another first pipeline export is linked together along two first pipeline export and two vertical pipeline entry respectively along the first pipeline export, two vertical pipeline export respectively.

Further, the first water pipe is a straight pipe, and when the magnetic seat is fixed at the bottom of the anode plate, the inlet of the first pipe is vertically positioned right below the water inlet or the water outlet.

Further, the caliber of the vertical edge of the first U-shaped water pipe is smaller than that of the inlet or the outlet of the second pipeline, the caliber of the vertical edge of the second U-shaped water pipe is smaller than that of the inlet or the outlet of the third pipeline, the transverse edge of the first U-shaped water pipe is clamped in the upper fixing groove in an interference manner, and the transverse edge of the second U-shaped water pipe is clamped in the lower fixing groove in an interference manner.

Further, the length of the transverse edge of the first U-shaped water pipe is greater than that of the transverse edge of the second U-shaped water pipe, and the transverse edge of the first U-shaped water pipe is positioned right above the transverse edge of the second U-shaped water pipe in parallel.

Further, the end part of the anode plate is provided with a threaded hole, and the magnetic seat is provided with a fastening bolt which is in threaded connection with the threaded hole, so that the magnetic seat is fixed at the bottom of the anode plate.

The invention has the technical effects and advantages that:

1. the invention provides a water cooling system of a vacuum coating ion source, which is characterized in that cooling water directly enters the inside of an anode plate to cool the anode plate, and the transverse edges of a first U-shaped water pipe and the transverse edges of a second U-shaped water pipe directly lean against a magnet to cool the magnet, wherein the cooling is carried out in a direct contact mode, so that the cooling efficiency of the anode plate and the magnet is improved.

2. The invention provides a water cooling system of a vacuum coating ion source, which is characterized in that a first U-shaped water pipe and a second U-shaped water pipe are not required to be connected with a magnetic seat and a magnetic cover through welding, so that the deformation phenomenon of an anode plate and the magnetic seat caused by high welding temperature is reduced, and the integral tightness of the ion source is ensured.

Drawings

Fig. 1 is an isometric view of the present invention.

Fig. 2 is a structural diagram of the inside of the present invention.

FIG. 3 is a cross-sectional view of the surface of a magnet holder according to the present invention.

Figure 4 is a cross-sectional view of the surface of an anode plate of the present invention.

Fig. 5 is a bottom structural view of the magnetic cover of the present invention.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Fig. 1 to 2 show an embodiment of the present invention, which has the following structure: the two first water pipes 1, the first U-shaped water pipe 11, the second U-shaped water pipe 12 and the hollow anode plate 2, the water inlet 21 and the water outlet 22 of the first water pipe 1 are respectively arranged on the anode plate 2, the oval groove 23 is hollowed out in the center position of the anode plate 2, the magnetic seat 3 is fixed at the bottom of the anode plate 2, the lower fixing groove 31 for clamping the horizontal edge of the second U-shaped water pipe 12 is arranged on the surface of the magnetic seat 3, the lower fixing groove 31 is arranged in the oval groove 23, a plurality of magnets 32 are uniformly arranged in the oval groove 23 and cover the lower fixing groove 31, the top of the magnetic seat 3 is fixedly provided with the magnetic cover 4, the magnetic cover 4 is covered above the oval groove 23, the bottom of the magnetic cover 4 is provided with the upper fixing groove 41 for clamping the horizontal edge of the first U-shaped water pipe 11, the magnetic seat 3 is respectively provided with the first pipeline inlet 13, the second pipeline inlet 14, the third pipeline inlet 15, the third pipeline outlet 16, the first pipeline outlet 17, the third pipeline 17 and the third pipeline 17 are respectively connected with the first pipeline 18 and the second pipeline 18 along the first pipeline 12, and the second pipeline 18 are respectively connected with the first pipeline 1 and the second pipeline 18 along the two sides of the first pipeline 1 and the second pipeline 12, and the second pipeline 18 are respectively connected along the two sides of the first pipeline 13 and the two pipeline 1 and the two sides of the two pipeline 1.

In the present invention, the principle of cooling the ion source anode, magnet 32 is as follows: the cooling water is led into the anode plate 2 from one of the first water pipes 1, the cooling water cools the anode plate 2, then the cooling water is led out from the other first water pipe 1, the cooling water circulates in the anode plate 2 in the whole process, the purpose of continuously cooling the anode plate 2 is achieved, the cooling water is respectively led in from the vertical sides of the first U-shaped water pipe 11, the cooling water is led in from the vertical sides of the second U-shaped water pipe 12, the cooling water circulates from the inside of the first U-shaped water pipe 11, the inside of the second U-shaped water pipe 12 circulates, the magnet 32 on the cooling water magnetic seat 3 is cooled, then the cooling water is led out from the other vertical side of the first U-shaped water pipe 11, the other vertical side of the second U-shaped water pipe 12, and the cooling water flows in the internal circulation of the first U-shaped water pipe 11 and the second U-shaped water pipe 12 respectively in the whole process, so that the purpose of continuously cooling the magnet 32 is achieved.

In the invention, cooling water directly enters the anode plate 2 to cool the anode plate 2, and the transverse edges of the first U-shaped water pipe 11 and the second U-shaped water pipe 12 directly lean against the magnet 32 to cool the magnet 32, and the cooling water is cooled in a direct contact mode, so that the cooling efficiency of the anode plate 2 and the magnet 32 is improved.

In the present invention, preferably, the first water pipe 1 is a straight pipe, and the first pipe inlet 13 is located vertically under the water inlet 21 or the water outlet 22 when the magnetic base 3 is fixed at the bottom of the anode plate 2.

In the invention, the first water pipe is a straight pipe, so that cooling water can enter or be led out of the anode plate 2 rapidly, and the cooling efficiency of the anode plate 2 is improved.

In the present invention, as a preferable scheme, the caliber of the vertical side of the first U-shaped water pipe 11 is smaller than that of the second pipe inlet 14 or the second pipe outlet 17, the caliber of the vertical side of the second U-shaped water pipe 12 is smaller than that of the third pipe inlet 15 or the third pipe outlet 18, the transverse side of the first U-shaped water pipe 11 is in interference fit with the inside of the upper fixing groove 41, and the transverse side of the second U-shaped water pipe 12 is in interference fit with the inside of the lower fixing groove 31.

In the invention, the arrangement of the caliber of the second pipeline inlet 14 or the caliber of the second pipeline outlet 17 is convenient for adjusting the position of the vertical edge of the first U-shaped water pipe 11, the upper fixing groove 41 is in interference fit with the transverse edge of the first U-shaped water pipe 11, the position of the first U-shaped water pipe 11 on the magnetic cover 4 can be ensured to be stable, the arrangement of the caliber of the third pipeline inlet 15 or the caliber of the third pipeline outlet 18 is convenient for adjusting the position of the vertical edge of the second U-shaped water pipe 12, the lower fixing groove 31 is in interference fit with the transverse edge of the second U-shaped water pipe 12, the position of the first U-shaped water pipe 11 on the magnetic seat 3 can be ensured to be stable, the whole process is convenient for installing the first U-shaped water pipe 11 and the second U-shaped water pipe 12 on the magnetic cover 4 and the magnetic seat 3, and the magnetic cover 4 are not required to be connected by welding, the phenomenon that the anode plate 2 and the magnetic seat 3 deform due to high temperature welding is reduced, and the whole tightness of the ion source is ensured.

In the present invention, preferably, the length of the lateral edge of the first U-shaped water pipe 11 is longer than the length of the lateral edge of the second U-shaped water pipe 12, and the lateral edge of the first U-shaped water pipe 11 is located directly above the lateral edge of the second U-shaped water pipe 12 in parallel.

In the invention, the cooling water on the lateral side of the first U-shaped water pipe 11 cools the upper part of the magnet 32, the cooling water on the lateral side of the second U-shaped water pipe 12 cools the lower part of the magnet 32, and the lateral sides of the first U-shaped water pipe 11 and the lateral sides of the second U-shaped water pipe 12 are parallel to each other, so that the upper and lower cooling positions of the magnet 32 are symmetrical to each other, and the symmetry ensures that the heat of the magnet 32 can be uniformly exchanged with the lateral sides of the first U-shaped water pipe 11 and the lateral sides of the second U-shaped water pipe 12, thereby ensuring that the overall heat dissipation of the magnet 32 is more uniform.

In the present invention, as a preferable scheme, the end of the anode plate 2 is provided with a threaded hole 5, the magnetic seat 3 is provided with a fastening bolt 51, and the fastening bolt 51 is screwed on the threaded hole 5, so that the magnetic seat 3 is fixed at the bottom of the anode plate 2.

In the invention, the anode plate 2 and the magnetic seat 3 are connected through the fastening bolt 51 and the threads instead of welding, so that the disassembly and the assembly between the anode plate 2 and the magnetic seat 3 are convenient, the deformation phenomenon of the anode plate 2 and the magnetic seat 3 caused by high welding temperature is reduced, and the integral tightness of the ion source is ensured.

The last points to be described are: first, in the description of the present application, it should be noted that, unless otherwise specified and defined, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be mechanical or electrical, or may be a direct connection between two elements, and "upper," "lower," "left," "right," etc. are merely used to indicate relative positional relationships, which may be changed when the absolute position of the object being described is changed;

secondly: in the drawings of the disclosed embodiments, only the structures related to the embodiments of the present disclosure are referred to, and other structures can refer to the common design, so that the same embodiment and different embodiments of the present disclosure can be combined with each other under the condition of no conflict;

finally: the foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims

1. A water cooling system of a vacuum coating ion source is characterized in that: the structure comprises: two first water pipes (1), a first U-shaped water pipe (11), a second U-shaped water pipe (12) and hollow anode plate (2), be equipped with on anode plate (2) respectively water inlet (21), delivery port (22) of first water pipe (1), the central point of anode plate (2) puts fretwork and has oval groove (23), the bottom of anode plate (2) is fixed with magnetic base (3), the surface of magnetic base (3) is equipped with and blocks lower fixed slot (31) on the horizontal limit of second U-shaped water pipe (12), lower fixed slot (31) are located the inside of oval groove (23), be equipped with a plurality of magnet (32) on magnetic base (3), a plurality of magnet (32) evenly are located the inside of oval groove (23) and cover down on fixed slot (31), the top of magnetic base (3) is fixed with magnetic cover (4), magnetic cover (4) cover is in the top of oval groove (23), the surface of magnetic base (3) is equipped with blocks lower fixed slot (31) on the inside of oval groove (23), a plurality of magnet (32) evenly be located in the inside of oval groove (23), the horizontal limit of magnetic base (3) is equipped with one side (41) on the horizontal limit of U-shaped water pipe (13) Second pipeline entry (14), third pipeline entry (15), first pipeline export (16), second pipeline export (17) and third pipeline export (18), one of them first water pipe (1) are followed first pipeline entry (13) with water inlet (21) are linked together, another first water pipe (1) are followed first pipeline export (16) with delivery port (22) are linked together, two perpendicular limits of first U type water pipe (11) are followed respectively second pipeline entry (14) second pipeline export (17) are connected, two perpendicular limits of second U type water pipe (12) are followed respectively third pipeline entry (15) third pipeline export (18) are connected.

2. The water cooling system of claim 1, wherein: the first water pipe (1) is a straight pipe, and when the magnetic seat (3) is fixed at the bottom of the anode plate (2), the first pipe inlet (13) is vertically positioned under the water inlet (21) or the water outlet (22).

3. The water cooling system of claim 1, wherein: the caliber of the vertical edge of the first U-shaped water pipe (11) is smaller than that of the second pipeline inlet (14) or the second pipeline outlet (17), the caliber of the vertical edge of the second U-shaped water pipe (12) is smaller than that of the third pipeline inlet (15) or the third pipeline outlet (18), the transverse edge of the first U-shaped water pipe (11) is clamped in the upper fixing groove (41) in an interference manner, and the transverse edge of the second U-shaped water pipe (12) is clamped in the lower fixing groove (31) in an interference manner.

4. A water cooling system for a vacuum coating ion source according to claim 3, wherein: the length of the transverse edge of the first U-shaped water pipe (11) is larger than that of the transverse edge of the second U-shaped water pipe (12), and the transverse edge of the first U-shaped water pipe (11) is positioned right above the transverse edge of the second U-shaped water pipe (12) in parallel.

5. The water cooling system of claim 1, wherein: the end of the anode plate (2) is provided with a threaded hole (5), the magnetic seat (3) is provided with a fastening bolt (51), and the fastening bolt (51) is in threaded connection with the threaded hole (5), so that the magnetic seat (3) is fixed at the bottom of the anode plate (2).