CN117873211A - Processing liquid temperature control device and method for production line - Google Patents

Abstract

The invention discloses a processing liquid temperature control device and a temperature control method for a production line, wherein the temperature control device comprises a first cavity for pre-storing processing liquid, a second cavity arranged in the first cavity, a first heat exchanger arranged in the first cavity, a bi-directional pump, a first control valve connected between a second port of the bi-directional pump and a pipeline inlet of the first heat exchanger, a second control valve connected between the second port of the bi-directional pump and the first cavity, a temperature difference detection device for detecting the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity, a control device and a circulating device, wherein the circulating device is used for introducing the processing liquid in the processing cavity into the second cavity, regulating the temperature, guiding the regulated processing liquid back into the processing cavity from the second cavity, sucking the fluid from the first port of the bi-directional pump and discharging the fluid from the second port of the bi-directional pump, and controlling the bi-directional pump to suck the fluid from the second port of the bi-directional pump and discharging the fluid from the first port of the bi-directional pump in a reverse rotation mode, and the control device is configured to control the switching between the forward rotation mode and the reverse rotation mode when the bi-directional pump works.

Description

Processing liquid temperature control device and method for production line

Technical Field

The invention relates to the field of processing liquid circulation temperature control, in particular to a processing liquid temperature control device and a temperature control method for a production line.

Background

In some production processes of the production line, the processing liquid needs to be kept in a proper temperature range, so that the temperature of the processing liquid needs to be controlled, the processing liquid needs to be heated when the processing liquid is lower than the proper temperature range, and the processing liquid needs to be cooled when the processing liquid is higher than the proper temperature range. For example, in an electrolyte plasma polishing line, it is necessary to maintain the polishing liquid in a proper temperature range. The electrolyte plasma technology is a green and efficient processing technology, and adopts low-concentration salt solution as polishing solution (namely processing solution) to process a workpiece, adopts electric energy as power, and removes materials at the raised position of the metal surface by utilizing the characteristic that plasma discharge is preferentially generated at the raised position of the tip, thereby realizing precise polishing of the surface of the metal part. In the processing process, the temperature of the polishing solution is critical, and the proper process temperature range is small. During the processing process, a large amount of heat is emitted by the workpiece to raise the temperature of the polishing solution beyond the process temperature, so that the polishing quality of the workpiece is lowered. If the polishing solution is simply cooled, excessive temperature drop and uneven temperature of the polishing solution can be caused, so that the polishing quality of a workpiece is reduced, and even the workpiece is damaged by arc discharge. Therefore, during the processing process, the temperature of the polishing solution is closely monitored, and the polishing solution is cooled and kept in time, so that the temperature of the polishing solution is ensured to be kept in a proper process temperature range, and the processing continuity and reliability of the production line are ensured.

Disclosure of Invention

The invention aims to provide a processing liquid temperature control device and a temperature control method for a production line, which can conveniently and effectively regulate the temperature of processing liquid of the production line.

The first aspect of the invention discloses a processing liquid temperature control device for a production line, which comprises a first cavity for pre-storing processing liquid, a second cavity arranged in the first cavity, a first heat exchanger arranged in the first cavity, a first port and a second port of which are respectively connected with the second cavity and a pipeline inlet of the first heat exchanger, a two-way pump connected between the second port of the two-way pump and the pipeline inlet of the first heat exchanger and used for controlling whether the second port of the two-way pump is communicated with the pipeline inlet of the first heat exchanger, a first control valve connected between the second port of the two-way pump and the first cavity and used for controlling whether the second port of the two-way pump is communicated with the first cavity, a second control valve connected between the second port of the two-way pump and the first cavity, a temperature difference detection device used for detecting the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity, a first control valve and a second control valve connected with a production line connected with a second control device for circulating device and the production line, the circulating device is used for guiding the processing liquid in the processing cavity into the second cavity for temperature regulation and guiding the temperature-regulated processing liquid from the second cavity back into the processing cavity, the bidirectional pump has a forward rotation mode and a reverse rotation mode, in the forward rotation mode, the bidirectional pump sucks fluid from a first port and discharges the fluid from a second port, in the reverse rotation mode, the bidirectional pump sucks fluid from the second port and discharges the fluid from the first port, the control device is configured to control the opening and closing of the first control valve and the second control valve and to control the switching between the forward rotation mode and the reverse rotation mode when the bi-directional pump is operated according to the detection result of the temperature difference detection device.

In some embodiments, the temperature difference detection device comprises a first temperature sensor arranged in the first cavity and connected with the control device in a signal way, and a second temperature sensor arranged in the second cavity and connected with the control device in a signal way, the processing liquid temperature control device for the production line further comprises a second heat exchanger, a first pump connected with the control device in a signal way and an external temperature adjustment device, the second heat exchanger comprises a first heat exchange tube, an inlet and an outlet of the first heat exchange tube are respectively connected with the first cavity, the first pump is arranged between the inlet of the first heat exchange tube and the first cavity, the first pump sucks processing liquid in the first cavity when in operation and pumps the processing liquid into the first heat exchange tube through the inlet of the first heat exchange tube, the external temperature adjustment device is used for conveying temperature adjustment fluid to the second heat exchanger so as to adjust the temperature of the fluid flowing through the first heat exchange tube, and the control device is configured to control whether the first pump works according to the detection result of the first temperature sensor and the second temperature sensor.

In some embodiments, the second heat exchanger further comprises a second heat exchange tube for exchanging heat with the first heat exchange tube, the external temperature regulating device comprises a cooling tower connected with an inlet thereof and an outlet of the second heat exchange tube for storing and cooling the temperature regulating fluid, a second pump connected between the outlet of the cooling tower and the inlet of the second heat exchange tube in signal connection with the control device, the control device being configured to control whether the second pump works.

In some embodiments, the control device further comprises two electric heating rods arranged in the first cavity and connected with the control device in a signal way, and three electric heating rods arranged in the second cavity and connected with the control device in a signal way, wherein the control device is configured to control zero or more electric heating rods in the two electric heating rods in the first cavity to work and control zero or more electric heating rods in the three electric heating rods in the second cavity to work.

In some embodiments, the apparatus further comprises a liquid level sensor provided in the second chamber in signal connection with the control device for detecting a liquid level of the processing liquid in the second chamber.

In some embodiments, a first stirring device disposed in the first cavity and a second stirring device disposed in the second cavity are also included.

In some embodiments, the device comprises a temperature regulating tank and a processing liquid tank arranged in the temperature regulating tank, wherein the temperature regulating tank forms the first cavity, the processing liquid tank forms the second cavity, and the tank wall of the processing liquid tank comprises an annular heat insulation layer and an annular heat storage layer which are arranged along the radial direction.

In some embodiments, the annular thermal storage layer is provided with a phase change energy storage material.

In some embodiments, an overflow port is arranged on the wall of the processing liquid tank, and the overflow port is used for outputting the processing liquid in the processing liquid tank to the temperature regulating tank when the liquid level of the processing liquid in the processing liquid tank exceeds the design height.

In some embodiments, the process fluid temperature control device for the production line is a temperature control device for controlling the temperature of the electrolyte plasma polishing production line.

The second aspect of the invention discloses a temperature control method using any one of the processing liquid temperature control devices for production lines, comprising the following steps:

when the temperature difference detection device detects that the temperature difference between the machining liquid in the first cavity and the machining liquid in the second cavity is larger than a first threshold value, the first control valve is controlled to be opened, the second control valve is controlled to be closed, and the bidirectional pump is controlled to work in a forward rotation mode;

when the temperature difference detection device detects that the temperature difference between the machining liquid in the first cavity and the machining liquid in the second cavity is smaller than a first threshold value, the first control valve is controlled to be closed, the second control valve is controlled to be opened, and the bidirectional pump is controlled to work in a reverse mode.

According to the processing liquid temperature control device for the production line, when the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity is larger than the first threshold value, the first control valve is controlled to be opened, the second control valve is controlled to be closed, and the bidirectional pump is controlled to work in a forward rotation mode, so that the processing liquid in the second cavity can enter the first heat exchanger and exchange heat with the processing liquid in the first cavity through the first heat exchanger, and the processing liquid in the first cavity is utilized to effectively regulate the temperature of the processing liquid in the second cavity. When the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity is smaller than a first threshold value, the first control valve is controlled to be closed, the second control valve is controlled to be opened, and the bidirectional pump is controlled to work in a reverse mode, so that the processing liquid in the first cavity directly enters the second cavity to regulate the temperature of the processing liquid in the second cavity. The processing liquid temperature control device for the production line can carry out different and effective temperature adjustment modes according to different temperature differences of the processing liquid in the first cavity and the processing liquid in the second cavity by utilizing the two-way pump and the control valve.

Other features of the present invention and its advantages will become apparent from the following detailed description of exemplary embodiments of the invention, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:

FIG. 1 is a schematic view of a part of a temperature control device for processing liquid for a production line according to some embodiments of the present invention;

FIG. 2 is a schematic view of a part of a temperature control device for processing liquid for a production line according to some embodiments of the present invention;

FIG. 3 is a schematic view of a partial cross-sectional structure of the structure of FIG. 2;

fig. 4 is a schematic view of a part of a temperature control device for a processing fluid for a production line according to some embodiments of the present invention.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.

In the description of the present invention, it should be understood that the terms "first," "second," and the like are used for defining the components, and are merely for convenience in distinguishing the corresponding components, and the terms are not meant to have any special meaning unless otherwise indicated, so that the scope of the present invention is not to be construed as being limited.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

As shown in fig. 1 to 4, the working fluid temperature control device for a production line of the present embodiment includes a first chamber 11 for pre-storing a working fluid, a second chamber 14 provided in the first chamber 11, a first heat exchanger 12 provided in the first chamber 11 and having a pipe outlet connected to the second chamber 14, a bi-directional pump 19 having a first port and a second port connected to the second chamber 14 and a pipe inlet of the first heat exchanger 12, respectively, a first control valve 20 connected between the second port of the bi-directional pump 19 and the pipe inlet of the first heat exchanger 12 for controlling whether the second port of the bi-directional pump 19 and the pipe inlet of the first heat exchanger 12 are in communication, a second control valve 21 connected between the second port of the bi-directional pump 19 and the first chamber 11 for controlling whether the second port of the bi-directional pump 19 and the first chamber 11 are in communication, a temperature difference detecting device for detecting a temperature difference between the working fluid in the first chamber 11 and the working fluid in the second chamber 14, a control device connected to the first control valve 20 and the second control valve 21 signal, and a control device for connecting the second control device for controlling a temperature difference between the second port of the bi-directional pump 19 and the first control valve 21 and the second chamber 14 and a circulation device for connecting the working line of the second chamber 14, the circulation means is for introducing the working fluid in the working chamber into the second chamber 14 to regulate the temperature and for introducing the regulated working fluid from the second chamber 14 back into the working chamber, the bi-directional pump 19 has a forward rotation mode in which the bi-directional pump 19 sucks in the fluid from its first port and discharges from its second port, and a reverse rotation mode in which the bi-directional pump 19 sucks in the fluid from its second port and discharges from its first port, and the control means is configured to control the opening and closing of the first control valve 20 and the second control valve 21 and to control the switching between the forward rotation mode and the reverse rotation mode when the bi-directional pump 19 operates, based on the detection result of the temperature difference detection means.

When the production line is used for production and processing, the first cavity 11 stores processing liquid, the second cavity 14 is used for adjusting the temperature of the processing liquid in the processing cavity of the production line, the processing cavity refers to a cavity of the production line used for storing the processing liquid working in real time, for example, in an electrolyte plasma polishing production line, and the processing cavity refers to a cavity used for storing polishing liquid and polishing a workpiece, for example, is arranged in a polishing liquid groove. The second chamber 14 is located inside the first chamber 11, meaning that the second chamber is at least partially surrounded by the first chamber, and that the parts are not necessarily completely surrounded by the first chamber, in the embodiment shown in fig. 2 the second chamber is surrounded by the first chamber 11, into which the processing liquid overflowed from the second chamber flows.

As shown in fig. 2 and 4, the first heat exchanger 12 is disposed in the first chamber, the pipe outlet of the first heat exchanger 12 is connected to the second chamber 14, and the first port and the second port of the bi-directional pump are connected to the second chamber and the pipe inlet of the first heat exchanger 12, respectively, so that when the first port of the bi-directional pump inputs the working fluid to the pipe inlet of the first heat exchanger 12, the working fluid exchanges heat with the working fluid in the first chamber 11 located outside the first heat exchanger 12 in the first heat exchanger 12 and is then fed back to the second chamber 14 from the pipe outlet of the first heat exchanger 12. The bidirectional pump includes a bidirectional gear pump, a bidirectional hydraulic pump, a bidirectional screw pump, etc. that can be operated in forward and reverse directions. The second port of the bi-directional pump 19 is also connected to the first chamber via a second control valve 21, and in the embodiment shown, the first port of the bi-directional pump 19 is also connected to the second chamber via a third control valve 22.

According to the embodiment, the temperature of the processing liquid in the second cavity is regulated by utilizing the processing liquid in the first cavity, heat is generated by the processing liquid used for production work in a production line under most conditions, the processing liquid temperature control device for the production line needs to circularly cool and regulate the processing liquid, at the moment, the temperature of the pre-stored processing liquid in the first cavity is lower, when the processing liquid in the processing cavity of the production line generates higher temperature in the production process, the processing liquid enters the second cavity, at the moment, the processing liquid in the first cavity is utilized for cooling the high-temperature processing liquid in the second cavity, and the cooled processing liquid is returned to the production line for production work. In some few cases, the processing liquid in the production line needs to be heated after processing, and then the processing liquid with higher temperature can be stored in the first cavity, and the heating adjustment can be performed on the processing liquid entering the second cavity from the processing cavity of the production line. In the process of adjusting the temperature of the processing liquid in the production line, when the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity is greater than the first threshold, the bidirectional pump 19 is in a forward rotation mode, the first control valve 20 and the third control valve 22 are opened, the second control valve 21 is closed, the first port of the bidirectional pump 19 sucks the processing liquid from the second cavity 14 and conveys the processing liquid into the first heat exchanger, the processing liquid is conveyed back into the second cavity after exchanging heat with the processing liquid in the first cavity in the first heat exchanger, and then the processing liquid is continuously pumped into the first heat exchanger by the bidirectional pump for exchanging heat, and after the temperature of the processing liquid in the second cavity is adjusted to be within a proper temperature range, the processing liquid in the second cavity is conveyed into the production line for production. When the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity is large, the first heat exchanger is utilized for heat exchange, so that the temperature regulation of the processing liquid in the second cavity is stable and effective, the large fluctuation of the temperature is avoided, the excessive temperature regulation and the energy waste caused by the large fluctuation are avoided, and the temperature regulation is more continuous and effective. When the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity is smaller than the first threshold value, the processing liquid in the first cavity and the processing liquid in the second cavity are difficult to exchange heat through the first heat exchanger, a good temperature regulating effect is difficult to generate, the bidirectional pump 19 is in a reversing mode, the second control valve 21 and the third control valve 22 are opened, the first control valve 20 is closed, the processing liquid is sucked into the second cavity 11 from the second port of the bidirectional pump 19, and the second port is conveyed into the second cavity to be directly mixed with the processing liquid in the second cavity for regulating temperature, and the processing liquid in the second cavity flows back into the first cavity when overflows due to the fact that the second cavity is arranged in the first cavity, continues to be sucked into the second cavity by the bidirectional pump for circulating temperature regulating, so that a good temperature regulating effect is generated. The first threshold may be set according to engineering experience or thermodynamic theory deduction.

When the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity 11 and the processing liquid in the second cavity 14 is greater than the first threshold, the processing liquid temperature control device controls the first control valve 20 to be opened, controls the second control valve 21 to be closed and controls the bidirectional pump 19 to work in the forward rotation mode, so that the processing liquid in the second cavity 14 can enter the first heat exchanger 12 and exchange heat with the processing liquid in the first cavity 11 through the first heat exchanger 12, and the processing liquid in the first cavity 11 is utilized to effectively regulate the temperature of the processing liquid in the second cavity 14. When the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity 11 and the processing liquid in the second cavity 14 is smaller than the first threshold value, the first control valve 20 is controlled to be closed, the second control valve 21 is controlled to be opened, and the bidirectional pump 19 is controlled to work in the reverse mode, so that the processing liquid in the first cavity 11 can directly enter the second cavity 14 to regulate the temperature of the processing liquid in the second cavity 14. The processing liquid temperature control device for the production line can select a proper and effective temperature adjustment mode according to different temperature differences of the processing liquid in the first cavity 11 and the second cavity 14 by utilizing the two-way pump 19 and the control valve.

In some embodiments, as shown in fig. 1, 2 and 4, the temperature difference detecting device includes a first temperature sensor 27 disposed in the first chamber 11 and connected to the control device in a signal manner, and a second temperature sensor 23 disposed in the second chamber 14 and connected to the control device in a signal manner, the process fluid temperature control device for a production line further includes a second heat exchanger 8, a first pump 2 connected to the control device in a signal manner, and an external temperature control device, the second heat exchanger 8 including a first heat exchange tube, an inlet and an outlet of the first heat exchange tube being connected to the first chamber 11, respectively, the first pump 2 being disposed between the inlet of the first heat exchange tube and the first chamber 11, the first pump 2 being operative to pump the process fluid in the first chamber 11 and pump the process fluid into the first heat exchange tube through the inlet of the first heat exchange tube, the external temperature control device being configured to regulate the temperature of the fluid flowing through the first heat exchange tube, the control device being configured to control whether the first pump 2 is operative or not based on the detection results of the first temperature sensor 27, the second temperature sensor 23. When the temperature of the processing liquid of the production line is regulated, for example, when the temperature of the polishing liquid needs to be reduced in the electrolyte plasma polishing production line, the temperature of the pre-stored polishing liquid (namely the processing liquid) in the first cavity is lower, at the moment, the temperature difference detection device detects that the temperature difference between the first cavity and the second cavity is larger than a first threshold value, and at the moment, the bidirectional pump is in a forward rotation mode, and the first heat exchanger is utilized for heat exchange. When the temperature difference between the first cavity and the second cavity is smaller than a first threshold value and the temperature sensor 27 detects that the temperature of the polishing liquid in the first cavity is still smaller than the lower limit temperature of a proper temperature interval of the polishing liquid in the production line during operation, the control device controls the bidirectional pump to switch to a reversing mode, the polishing liquid in the first cavity is directly sent into the second cavity for mixed heat exchange, when the temperature of the polishing liquid in the first cavity is increased to be within the proper temperature interval of the polishing liquid along with the continuous mixed heat exchange, the polishing liquid in the first cavity can not be used for regulating the temperature of the polishing liquid in the second cavity, the first pump 2 is started at the moment, the polishing liquid in the first cavity is conveyed into the first heat exchange pipe of the second heat exchanger, the polishing liquid in the first heat exchange pipe is conveyed back to the first cavity after being cooled by the external temperature regulating device, and the polishing liquid in the first cavity can be continuously cooled for the polishing liquid in the second cavity at the moment. In the embodiment in which the working fluid in the first chamber is warmed up to the working fluid in the second chamber, when the temperature of the working fluid in the first chamber falls within the appropriate temperature range of the working fluid in the production line, the working fluid in the first heat exchange tube is warmed up by the external temperature adjusting device and then returned to the first chamber through the ninth control valve 31. In the embodiment shown in the figures, a fourth control valve 3 is arranged between the first pump 2 and the first heat exchange tube, and an eighth control valve 28 is arranged between the first pump 2 and the first chamber.

In some embodiments, as shown in fig. 1, the second heat exchanger 8 further comprises a second heat exchange tube for exchanging heat with the first heat exchange tube, the external temperature regulating device comprises a cooling tower 10 connected with an inlet thereof and an outlet of the second heat exchange tube for storing and cooling the temperature regulating fluid, a second pump 9 connected between the outlet of the cooling tower 10 and the inlet of the second heat exchange tube in signal connection with a control device configured to control whether the second pump 9 is operated. In the embodiment shown in the figure, a fourth control valve 7 is further arranged between the second pump 9 and the second heat exchange tube, the cooling temperature-adjusting fluid is cooling water, and the cooling water is cooled by the processing liquid in the first heat exchange tube after entering the second heat exchange tube, then enters the cooling tower for cooling, and then continuously enters the second heat exchange tube for heat exchange.

In some embodiments, the process fluid temperature control device for a production line further comprises two electric heating rods disposed within the first chamber 11 in signal connection with the control device and three electric heating rods disposed within the second chamber 14 in signal connection with the control device, the control device being configured to control operation of zero or more of the two electric heating rods in the first chamber 11 and to control operation of zero or more of the three electric heating rods in the second chamber 14. In the embodiment shown in the figures, the two electric heating rods comprise two first electric heating rods 18 arranged in a first cavity, and the three electric heating rods in a second cavity 14 comprise three second electric heating rods 17. In this embodiment, since the electric heating rod is provided, the processing liquid in the first chamber and the second chamber can be independently controlled to be heated. In this embodiment, when the working fluid in the production line needs to reach a suitable temperature to start working, the working fluid may be pre-stored in the second chamber, then the working fluid is heated by the second electric heating rod 17, and after being heated to a suitable temperature, the working fluid is sent into the working chamber to perform production. For example, when the working fluid production work starts, the temperature needs to be reached to be T0, the working fluid is first added into both the first chamber and the second chamber, and then the working fluid in the second chamber is heated by the second electric heating rod 17, and the working fluid in the first chamber is not heated to remain for the subsequent cooling and temperature adjustment. When the processing liquid in the second cavity is heated, firstly, all three electric heating rods 17 are turned on to heat, when the processing liquid in the second cavity is heated to the temperature of T1 which is close to T0, one second electric heating rod is turned off, when the processing liquid in the second cavity is continuously heated to the temperature of T2 which is closer to T0, one second electric heating rod is turned off, when the processing liquid in the second cavity is continuously heated to T0, all the second electric heating rods are turned off, and then the processing liquid is conveyed into the processing cavity to perform production work.

In some embodiments, the circulation device comprises a third pump 30 for pumping the temperature-regulated process fluid in the second chamber into the process chamber, and a fifth control valve 29 connected between the third pump 30 and the second chamber and a sixth control valve 26 connected between the process chamber and the second chamber, the process fluid in the process chamber entering the second chamber through the sixth control valve 26.

In some embodiments, the process fluid temperature control device for a production line further comprises a fluid level sensor disposed in the second chamber 14 in signal communication with the control device for detecting a fluid level of the process fluid in the second chamber 14. The liquid level sensor is arranged in the second cavity and can be arranged at the position 20mm above the second electric heating rod for prompting the liquid level height and preventing the heating rod from being damaged due to dry burning. In some embodiments, a liquid level sensor is also provided in the first chamber.

In some embodiments, the process fluid temperature control device for a production line further comprises a first stirring device 25 provided in the first chamber 11 and a second stirring device 24 provided in the second chamber 14. The first stirring device 25 and the second stirring device 24 include a stirrer for stirring the processing liquid, and can make the temperature of the processing liquid in the first chamber and the second chamber more uniform.

In some embodiments, the processing liquid temperature control device for the production line comprises a temperature control device 1, the temperature control device 1 comprises a temperature regulating tank and a processing liquid tank arranged in the temperature regulating tank, the temperature regulating tank forms a first cavity 11, the processing liquid tank forms a second cavity 14, and the tank wall of the processing liquid tank comprises an annular heat insulation layer 15 and an annular heat storage layer 16 which are arranged along the radial direction. In the embodiment shown in fig. 3, the annular thermal barrier 15 is located radially inward of the annular thermal reservoir 16. In some embodiments, annular thermal storage layer 16 is provided with a phase change energy storage material. In the embodiment shown in the figures, the annular heat insulating layer 15 is filled with heat insulating cotton, and the annular heat storage layer 16 is filled with phase change energy storage materials, such as Na2SO4.10H2O and MgCl2.6H2O. When the temperature of the phase change energy storage material reaches the phase change point, the phase change energy storage material can absorb or release heat continuously, and the temperature is kept unchanged at the phase change point. The phase change energy storage material can utilize heat absorption or heat release during phase change to realize heat storage and utilization. In the temperature control process, the annular heat insulation layer 15 and the annular heat storage layer 16 can block direct heat exchange between the temperature control tank and the processing liquid tank. Meanwhile, as the temperature in the temperature regulating tank rises, the phase change point of the phase change heat storage material in the heat storage layer is reached, the heat storage material continuously absorbs heat, the temperature is kept unchanged for a period of time, and the purposes of storing heat and slowing down the temperature rise speed of the temperature regulating tank are achieved. When the processing of the production line is finished, the temperature regulating tank is naturally cooled, the temperature of the processing liquid tank is reduced more slowly due to the annular heat insulating layer 15 and the annular heat storage layer 16, the heat preservation effect is better, the heating can be completed more quickly when the next shift begins to be heated, the equipment use efficiency is improved, and the electric heating power is saved.

In some embodiments, an overflow port 13 is provided on the wall of the processing liquid tank, and the overflow port 13 is used for outputting the processing liquid in the processing liquid tank to the temperature regulating tank when the liquid level of the processing liquid in the processing liquid tank exceeds the design height.

In some embodiments, the process fluid temperature control device for the production line is a temperature control device for controlling the temperature of the electrolyte plasma polishing production line.

In some embodiments, the control device includes a PLC controller 5 and a frequency converter 6, where the bidirectional pump 19, the first pump 2 and/or the second pump 9 are all variable frequency pumps, and the PLC controller 5 controls the working power of the bidirectional pump 19, the first pump 2 and/or the second pump 9 through the frequency converter 6.

In some embodiments, each control valve, for example, the first control valve, the second control valve, etc. includes an on-off valve, for example, an electromagnetic on-off valve, and the control device signals control the on-off valve to open or close.

In some embodiments, a temperature control method using any one of the above processing liquid temperature control devices for a production line is also disclosed, where the temperature control method includes:

when the temperature difference detection device detects that the temperature difference between the processing liquid in the first cavity 11 and the processing liquid in the second cavity 14 is larger than a first threshold value, the first control valve 20 is controlled to be opened, the second control valve 21 is controlled to be closed, and the bidirectional pump 19 is controlled to work in a forward rotation mode;

when the temperature difference detecting means detects that the temperature difference between the working fluid in the first chamber 11 and the working fluid in the second chamber 14 is smaller than the first threshold value, the first control valve 20 is controlled to be closed, the second control valve 21 is controlled to be opened, and the bi-directional pump 19 is controlled to operate in the reverse mode.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same; while the invention has been described in detail with reference to the preferred embodiments, those skilled in the art will appreciate that: modifications may be made to the specific embodiments of the present invention or equivalents may be substituted for part of the technical features thereof; without departing from the spirit of the invention, it is intended to cover the scope of the invention as claimed.

Claims (11)

1. The processing liquid temperature control device for the production line is characterized by comprising a first cavity for pre-storing processing liquid, a second cavity arranged in the first cavity, a first heat exchanger arranged in the first cavity and connected with the second cavity, a two-way pump, a first control valve, a second control valve and a production line, wherein the first cavity is used for pre-storing the processing liquid, the second cavity is arranged in the first cavity, the first heat exchanger is arranged in the first cavity, the pipeline outlet of the first heat exchanger is connected with the second cavity, the two-way pump is respectively connected with the pipeline inlet of the second cavity and the first heat exchanger, the first control valve is connected between the second port of the two-way pump and the pipeline inlet of the first heat exchanger and used for controlling whether the second port of the two-way pump is communicated with the first cavity, the second control valve is connected between the second port of the two-way pump and the first cavity, the temperature difference detection device is used for detecting the temperature difference between the processing liquid in the first cavity and the processing liquid in the second cavity, the temperature difference detection device is connected with the first control valve and the second control valve through signals, and the production line is connected between the two control device and the second control valve and the second control device is used for circulating the processing line, the circulating device is used for guiding the processing liquid in the processing cavity into the second cavity for temperature regulation and guiding the temperature-regulated processing liquid from the second cavity back into the processing cavity, the bidirectional pump has a forward rotation mode and a reverse rotation mode, in the forward rotation mode, the bidirectional pump sucks fluid from a first port and discharges the fluid from a second port, in the reverse rotation mode, the bidirectional pump sucks fluid from the second port and discharges the fluid from the first port, the control device is configured to control the opening and closing of the first control valve and the second control valve and to control the switching between the forward rotation mode and the reverse rotation mode when the bi-directional pump is operated according to the detection result of the temperature difference detection device.

2. The process fluid temperature control device for a production line according to claim 1, wherein the temperature difference detecting means includes a first temperature sensor provided in the first chamber in signal connection with the control means and a second temperature sensor provided in the second chamber in signal connection with the control means, the process fluid temperature control device for a production line further including a second heat exchanger including a first heat exchange tube, an inlet and an outlet of which are connected to the first chamber, respectively, and a first pump provided between the inlet and the first chamber of the first heat exchange tube, the first pump being operative to pump the process fluid in the first chamber and to pump the process fluid into the first heat exchange tube through the inlet of the first heat exchange tube, the external device being operative to deliver a temperature adjusting fluid to the second heat exchanger to perform a fluid flowing through the first heat exchange tube, the control device being configured to detect whether the first heat exchange tube is operative to control the temperature sensor based on the result of the first pump.

3. The process fluid temperature control device for a production line according to claim 2, wherein the second heat exchanger further comprises a second heat exchange tube for exchanging heat with the first heat exchange tube, the external temperature adjusting device comprises a cooling tower for storing and cooling the temperature adjusting fluid connected to an inlet thereof and an outlet thereof, a second pump connected between the outlet of the cooling tower and the inlet thereof in signal connection with the control device, and the control device is configured to control whether the second pump operates.

4. The process fluid temperature control device for a production line according to claim 1, further comprising two electric heating rods provided in the first chamber in signal connection with the control device and three electric heating rods provided in the second chamber in signal connection with the control device, wherein the control device is configured to control the operation of zero or more of the two electric heating rods in the first chamber and to control the operation of zero or more of the three electric heating rods in the second chamber.

5. The process fluid temperature control device for a production line of claim 4, further comprising a fluid level sensor disposed in said second chamber in signal communication with said control device for detecting a fluid level of the process fluid in said second chamber.

6. The process fluid temperature control device for a production line of claim 4, further comprising a first stirring device disposed in the first chamber and a second stirring device disposed in the second chamber.

7. The processing liquid temperature control device for a production line according to claim 1, comprising a temperature adjusting tank and a processing liquid tank arranged in the temperature adjusting tank, wherein the temperature adjusting tank forms the first cavity, the processing liquid tank forms the second cavity, and the tank wall of the processing liquid tank comprises an annular heat insulation layer and an annular heat storage layer which are arranged along the radial direction.

8. The processing liquid temperature control device for a production line according to claim 7, wherein the annular heat storage layer is provided with a phase change energy storage material.

9. The processing liquid temperature control device for a production line according to claim 7, wherein an overflow port is provided on a wall of the processing liquid tank, and the overflow port is configured to output the processing liquid in the processing liquid tank to the temperature adjustment tank when a liquid level of the processing liquid in the processing liquid tank exceeds a design level.

10. The processing liquid temperature control device for a production line according to any one of claims 1 to 9, wherein the processing liquid temperature control device for a production line is a temperature control device for controlling the temperature of an electrolyte plasma polishing production line.

11. A temperature control method using the processing liquid temperature control device for a production line according to any one of claims 1 to 10, comprising:

when the temperature difference detection device detects that the temperature difference between the machining liquid in the first cavity and the machining liquid in the second cavity is larger than a first threshold value, the first control valve is controlled to be opened, the second control valve is controlled to be closed, and the bidirectional pump is controlled to work in a forward rotation mode;

when the temperature difference detection device detects that the temperature difference between the machining liquid in the first cavity and the machining liquid in the second cavity is smaller than a first threshold value, the first control valve is controlled to be closed, the second control valve is controlled to be opened, and the bidirectional pump is controlled to work in a reverse mode.