CN117869605A - Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber - Google Patents
Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber Download PDFInfo
- Publication number
- CN117869605A CN117869605A CN202410269488.1A CN202410269488A CN117869605A CN 117869605 A CN117869605 A CN 117869605A CN 202410269488 A CN202410269488 A CN 202410269488A CN 117869605 A CN117869605 A CN 117869605A
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- Prior art keywords
- cylinder
- plate
- valve
- seat
- lower extreme
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000007789 sealing Methods 0.000 title claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 39
- 239000002245 particle Substances 0.000 abstract description 5
- 230000001105 regulatory effect Effects 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Sliding Valves (AREA)
Abstract
The invention discloses a single-cylinder driving vacuum rectangular valve for sealing a semiconductor process chamber, and relates to the technical field of semiconductor vacuum valves. The valve comprises: the valve plate, the valve plate rear surface is connected with the valve plate seat, cavity connecting plate lower surface is connected with the fixing base, the curb plate lower extreme is connected with the cylinder mounting panel, cylinder mounting panel upper end is provided with the cylinder connecting seat, be provided with the drive axle bed between cavity connecting plate and the cylinder mounting panel, be connected with the transmission shaft in the middle of the valve plate seat, the transmission shaft lower extreme is provided with transmission shaft nut, cylinder connecting seat upper surface left and right sides is connected with the cam groove, the drive axle bed left and right sides is connected with the bearing, cylinder mounting panel lower extreme is connected with the cylinder package board, cylinder package board internal connection cylinder subassembly, cylinder subassembly upside output is connected with the cylinder upper plate. The valve can be stably closed, friction is not generated, vibration is reduced, and generation of tiny particles is prevented.
Description
Technical Field
The invention relates to the technical field of semiconductor vacuum valves, in particular to a single-cylinder driving vacuum rectangular valve for sealing a semiconductor process chamber.
Background
In the semiconductor industry, the valves at different chamber positions have different use conditions, but all the valves have the requirements of tightness, stability, low vibration, long service life and the like under the use conditions, and the valves meeting the requirements can ensure the efficiency and the yield of the whole process. In the existing various valves, a standard double-cylinder driving mode or a self-designed single-cylinder driving mode is generally adopted between a transmission chamber and a reaction chamber, lifting actions of the valves are completed through designing corresponding air paths, the occupied space of the valves is large, the air paths are tedious, the performances of the whole valves are affected by the excellent air paths, and the valve plates and sealing surfaces often have certain friction in the circulating motion process of the valves, so that tiny particles are generated, the environment of the chambers is polluted, and the yield of products is affected.
Disclosure of Invention
In order to solve the technical problems, the invention provides a single-cylinder driving vacuum rectangular valve for sealing a semiconductor process chamber.
The specific technical scheme is as follows:
a single cylinder actuated vacuum rectangular valve for semiconductor process chamber sealing comprising: the valve plate, the valve plate rear surface is connected with the valve plate seat through the screw, the valve plate seat lower extreme is provided with the cavity connecting plate, both ends are connected with the fixing base that is the L type through the screw about the cavity connecting plate lower surface, the cavity connecting plate left and right sides is connected with the curb plate through the screw, the curb plate lower extreme is connected with the cylinder mounting panel, the cylinder mounting panel upper end is provided with the cylinder connecting seat, be provided with the drive shaft seat between cavity connecting plate and the cylinder mounting panel, the middle transmission shaft that inserts of valve plate seat is connected with, the transmission shaft lower extreme passes cavity connecting plate and drive shaft seat and extends to the lower extreme, transmission shaft lower extreme and drive shaft seat lower extreme junction are provided with the transmission shaft nut, be connected with the spring between transmission shaft nut and the cylinder connecting seat, cylinder connecting seat upper surface left and right sides is connected with the cam groove, the position of the cam groove is opposite to the position of the fixed seat, the upper end and the lower end of the left side and the right side of the transmission shaft seat are connected with bearings, the lower end of the bearings are positioned in the inner outline of the cam groove, the upper end of the bearings is fixedly connected with the fixed seat through bearing stop pins, the upper ends of the left and right limit seats (19) are provided with limit plastic pieces (4), the cam groove is connected with the left and right limit seats through screws, the lower end of the cylinder mounting plate is connected with a cylinder wrapping plate, the inside of the cylinder wrapping plate is connected with a cylinder cushion block, the upper end of the cylinder cushion block is connected with a cylinder assembly, the upper output end of the cylinder assembly passes through the cylinder mounting plate and is connected with a cylinder upper plate, the upper end of the cylinder upper plate is connected with a cylinder connecting seat, the left surface of the cylinder wrapping plate is connected with a throttle speed regulating valve, the left surface of the cylinder wrapping plate is connected with a pressure maintaining stop valve at the front end of the throttle speed regulating valve, the throttle speed regulating valve is connected with the pressure maintaining stop valve through a pipeline, and the pressure maintaining stop valve is connected with the cylinder assembly through a pipeline.
The cavity connecting plate, the side plates and the rear surface of the cylinder mounting plate are connected with a shell through screws.
The upper end of the guide groove in the fixing base is provided with a buffer part, and the lower end of the buffer part extends to the upper end of the guide groove in the fixing base.
And a bearing stop pin is inserted and connected into the bearing.
And a corrugated pipe is sleeved on the outer side of the transmission shaft and positioned between the cavity connecting plate and the transmission shaft seat.
The left side and the right side of the cylinder connecting seat are connected with bearing followers, the lower end of the inner side of the side plate is connected with a side plate guide rail, and the bearing followers are connected with the lower end of the side plate guide rail in an inserting way.
Compared with the prior art, the invention has the following beneficial technical effects:
1. the invention solves the problems that the existing valve completes the lifting action of the valve through designing the corresponding air channel, the occupied space is large, the air channel is complicated, the performance of the whole valve is affected by the excellent air channel, and meanwhile, the valve plate and the sealing surface often have certain friction in the process of circulating movement, so that tiny particles are generated, the chamber environment is polluted, and the product yield is affected.
2. The single-cylinder driving vacuum rectangular valve adopts a single standard cylinder as power driving, and simultaneously, the air path control system is designed at the outer side, so that the occupied space is small, and meanwhile, the air path is simplified.
3. According to the single-cylinder driving vacuum rectangular valve, the valve can be closed stably through the cooperation of the bearing and the cam groove, friction is not generated, the vibration phenomenon is reduced, and tiny particles are prevented from being generated.
4. The driving cylinder and the transmission assembly are connected in series, the structure is compact, and the upper limit and the lower limit of the transmission assembly are both provided with buffer structures, so that vibration and noise can be greatly reduced.
Drawings
FIG. 1 is an exploded view of the present invention;
FIG. 2 is a diagram of an assembly of the present invention;
FIG. 3 is a diagram of an initial position of the present invention;
FIG. 4 is a diagram of an intermediate position according to the present invention;
fig. 5 is a view of the closed position of the present invention.
In the figure: 1. a valve plate; 2. a cavity connecting plate; 3. a housing; 4. limiting plastic parts; 5. a bearing stop pin; 6. a bearing; 7. a bearing follower; 8. cam grooves; 9. a cylinder connecting seat; 10. a throttle speed regulating valve; 11. a pressure maintaining stop valve; 12. a cylinder wrapping plate; 13. a cylinder cushion block; 14. a cylinder assembly; 15. a cylinder mounting plate; 16. an air cylinder upper plate; 17. a spring; 18. a drive shaft nut; 19. a left limit seat and a right limit seat; 20. a transmission shaft seat; 21. a side plate guide rail; 22. a side plate; 23. a bellows; 24. a fixing seat; 25. a buffer member; 26. a transmission shaft; 27. a valve plate seat.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings, but the scope of the present invention is not limited by the accompanying drawings.
Referring to fig. 1-5, the present invention provides a technical solution: a single cylinder actuated vacuum rectangular valve for semiconductor process chamber sealing comprising: the valve plate 1, the back surface of the valve plate 1 is connected with a valve plate seat 27 through a screw, the lower end of the valve plate seat 27 is provided with a cavity connecting plate 2, the left end and the right end of the lower surface of the cavity connecting plate 2 are connected with L-shaped fixing seats 24 through screws, the left side and the right side of the cavity connecting plate 2 are connected with side plates 22 through screws, the lower end of each side plate 22 is connected with an air cylinder mounting plate 15, the upper end of each air cylinder mounting plate 15 is provided with an air cylinder connecting seat 9, a transmission shaft seat 20 is arranged between the cavity connecting plate 2 and the air cylinder mounting plate 15, a transmission shaft 26 is inserted and connected in the middle of the valve plate seat 27, the lower end of the transmission shaft 26 penetrates through the cavity connecting plate 2 and the transmission shaft seat 20 to the lower end, a transmission shaft nut 18 is arranged at the joint of the lower end of the transmission shaft 26 and the lower end of the transmission shaft seat 20, a spring 17 is connected between the transmission shaft nut 18 and the air cylinder connecting seats 9, the left and right sides of the upper surface of the cylinder connecting seat 9 are connected with a cam groove 8, the position of the cam groove 8 is opposite to that of a fixed seat 24, the upper end and the lower end of the left and right sides of a transmission shaft seat 20 are connected with a bearing 6, the lower end of the bearing 6 is positioned in the inner contour of the cam groove 8, the upper end of the bearing 6 is fixedly connected with the fixed seat 24 through a bearing stop pin, the upper end of a left and right limiting seat 19 is provided with a limiting plastic piece 4, the cam groove 8 is connected with the left and right limiting seats 19 through screws, the lower end of a cylinder mounting plate 15 is connected with a cylinder wrapping plate 12, the inside of the cylinder wrapping plate 12 is connected with a cylinder cushion block 13, the upper end of the cylinder cushion block 13 is connected with a cylinder assembly 14, the upper output end of the upper side of the cylinder assembly 14 passes through the cylinder mounting plate 15 and is connected with the cylinder connecting seat 9, the left surface of the cylinder wrapping plate 12 is connected with a throttle speed regulating valve 10, the left surface of the cylinder package plate 12 and the front end of the throttle valve 10 are connected with a pressure maintaining stop valve 11, the throttle valve 10 is connected with the pressure maintaining stop valve 11 through a pipeline, and the pressure maintaining stop valve 11 is connected with the cylinder assembly 14 through a pipeline.
In use, the air supply pipeline is connected to the throttle speed regulating valve 10, then is connected to the pressure maintaining stop valve 11 from the throttle speed regulating valve 10, and is connected to the cylinder assembly 14 through the pressure maintaining stop valve 11. When the valve is at the initial position, the telescopic end of the pneumatic assembly 14 starts to move upwards under the action of pneumatic thrust, and the lifting assembly (comprising the valve plate 1, the valve plate seat 27, the transmission shaft 26, the transmission shaft seat 20, the bearing 6, the cylinder connection seat 9, the transmission shaft nut 18 and the spring 17) is driven to move upwards through the cylinder connection seat 9, at the moment, the spring 17 is continuously compressed, and the precompression force enables the movement state of the whole lifting assembly and the cylinder upper plate 16 to be consistent. The lower bearing 6 on the drive shaft seat 20 is constrained in the contour of the cam groove 8, and the valve plate 1, the valve plate seat 27, the drive shaft seat 20, the drive shaft 26 and the cam groove 8 rise straight.
When the upper bearing 6 on the drive shaft seat in the lifting assembly reaches the upper limit position of the fixing seat 24, the lifting assembly cannot continue to move upwards. The lower end bearing 6 is positioned in the contour of the cam groove 8, at the moment, the air cylinder is continuously supplied with air, the air cylinder upper plate 16 drives the air cylinder connecting plate 9 and the cam groove 8 to continuously move upwards, at the moment, the bearing 6 is separated from the left and right limiting seats 19, and the bearing 6 at the limiting position on the fixing seat 24 is used as a rotating fulcrum for lifting and lowering the price, so that the swing action is started.
When the cylinder is continuously supplied with air to enable the cylinder upper plate 16 to continuously move upwards, because the upper end bearing 6 of the transmission shaft seat 20 is in a revolute pair state, the cylinder connecting seat 9 and the cam groove 8 continuously move upwards to drive the valve plate 1, the valve plate seat 27, the transmission shaft 26 and the transmission shaft seat 20 to rotate as a whole until the circular contour of the bottom of the cam groove 8 coincides with the lower bearing 6 on the transmission shaft seat 20, the cylinder upper plate 16 cannot continuously move upwards, and the valve is closed at the moment.
When the valve is opened, the movement process is reverse to the sequence, namely swing door opening is performed and the valve is linearly lowered to the initial position.
As shown in fig. 1, the embodiment of the present invention provides an implementation manner, and based on the above implementation manner, the cavity connecting plate 2, the side plate 22 and the rear surface of the cylinder mounting plate 15 are connected with the housing 3 through screws. By analyzing the structure, the shell 3 is arranged on the rear surfaces of the cavity connecting plate 2, the side plates 22 and the cylinder mounting plate 15 through screws, so that a certain protection effect can be achieved for the inner part of the single-cylinder driving vacuum rectangular valve.
As shown in fig. 1 to 5, an embodiment of the present invention provides an implementation manner, based on the above embodiment, a buffer member 25 is disposed at an upper end of the inner guide slot of the fixing base 24, and a lower end of the buffer member 25 extends to an upper end of the inner guide slot of the fixing base 24. As can be seen from an analysis of the above structure, the buffer member 25 plays a certain role in buffering the bearing 6 at the end when the bearing 6 moves upward, reducing the occurrence of vibration.
As shown in fig. 1 to 5, the embodiment of the present invention provides an implementation manner, based on which the bearing 6 is internally inserted with a bearing stop pin 5. By analyzing the structure, the bearing stop pin 5 can ensure the accurate position of the bearing 6 in the running process and prolong the service life.
As shown in fig. 1, the embodiment of the present invention provides an implementation manner, based on the above implementation manner, a bellows 23 is sleeved on the outer side of the transmission shaft 26 and located between the cavity connecting plate 2 and the transmission shaft seat 20. As a result of analyzing the above structure, the bellows 23 is in a continuously compressed state when the transmission shaft 26 is pushed upward, and the bellows 23 can prevent the entry of contaminating particles into the chamber.
As shown in fig. 1, the embodiment of the present invention provides an implementation manner, based on the above implementation manner, the left and right sides of the cylinder connecting seat 9 are connected with bearing followers 7, the lower end of the inner side of the side plate 22 is connected with a side plate guide rail 21, and the bearing followers 7 are connected with the lower end of the side plate guide rail 21 in an inserting manner. As can be seen from an analysis of the above structure, when the cylinder assembly 14 pushes the cylinder connecting seat 9 to rise, the bearing follower 7 moves upward in the side plate guide rail 21 together, which plays a role in guiding the cylinder connecting seat 9, and prevents the position of the cylinder connecting seat 9 from being deviated.
Claims (6)
1. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber, comprising: valve plate (1), valve plate (1) rear surface has valve plate seat (27) through the screw connection, valve plate seat (27) lower extreme is provided with cavity connecting plate (2), cavity connecting plate (2) lower surface left and right sides has fixing base (24) that are L type through the screw connection, cavity connecting plate (2) left and right sides has curb plate (22) through the screw connection, curb plate (22) lower extreme is connected with cylinder mounting panel (15), cylinder mounting panel (15) upper end is provided with cylinder connecting seat (9), be provided with drive axle seat (20) between cavity connecting plate (2) and cylinder mounting panel (15), insert in the middle of valve plate seat (27) and be connected with transmission shaft (26), cavity connecting plate (2) and drive axle seat (20) are passed to the lower extreme in the lower extreme, drive axle nut (18) lower extreme and drive axle seat (20) lower extreme junction are provided with transmission shaft nut (18), be connected with spring (17) between cylinder connecting seat (9) and cylinder connecting seat (9), upper and lower surface (8) both sides are connected with cam groove (8) and the relative position of both sides, the position is connected with fixing base (8), the lower extreme bearing (6) is located cam slot (8) inner profile, and the upper end bearing (6) passes through bearing stop pin fixed connection with fixing base (24), limit plastic part (4) are installed to limit seat (19) upper end about, cam slot (8) pass through screw connection with limit seat (19) about, cylinder mounting panel (15) lower extreme is connected with cylinder package board (12), cylinder package board (12) internally connected with cylinder cushion (13), cylinder cushion (13) upper end is connected with cylinder subassembly (14), cylinder subassembly (14) upside output is passed cylinder mounting panel (15) and is connected with cylinder upper plate (16), cylinder upper plate (16) upper end is connected with cylinder connecting seat (9), cylinder package board (12) left surface is connected with throttle valve (10), throttle valve (10) and pressure retaining stop valve (11) are passed through pressure retaining check valve (11) and are connected with cylinder subassembly (14) through pressure retaining check pipe.
2. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber as claimed in claim 1 wherein: the cavity connecting plate (2), the side plates (22) and the rear surface of the cylinder mounting plate (15) are connected with the shell (3) through screws.
3. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber as claimed in claim 1 wherein: the upper end of the guide groove in the fixing seat (24) is provided with a buffer piece (25), and the lower end of the buffer piece (25) extends to the upper end of the guide groove in the fixing seat (24).
4. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber as claimed in claim 1 wherein: the bearing (6) is internally inserted and connected with a bearing stop pin (5).
5. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber as claimed in claim 1 wherein: a corrugated pipe (23) is sleeved between the cavity connecting plate (2) and the transmission shaft seat (20) and is arranged on the outer side of the transmission shaft (26) in a circle.
6. A single cylinder actuated vacuum rectangular valve for sealing a semiconductor process chamber as claimed in claim 1 wherein: the left side and the right side of the cylinder connecting seat (9) are connected with bearing followers (7), the lower end of the inner side of the side plate (22) is connected with a side plate guide rail (21), and the bearing followers (7) are connected with the lower end of the side plate guide rail (21) in an inserting mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410269488.1A CN117869605A (en) | 2024-03-11 | 2024-03-11 | Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410269488.1A CN117869605A (en) | 2024-03-11 | 2024-03-11 | Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117869605A true CN117869605A (en) | 2024-04-12 |
Family
ID=90595092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410269488.1A Pending CN117869605A (en) | 2024-03-11 | 2024-03-11 | Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117869605A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110089354A1 (en) * | 2009-10-15 | 2011-04-21 | Smc Corporation | Gate valve |
| KR101092138B1 (en) * | 2011-03-30 | 2011-12-12 | 한익수 | Rectangular gate valve |
| US20200208755A1 (en) * | 2018-12-28 | 2020-07-02 | Smc Corporation | Low noise gate valve |
| EP3872376A1 (en) * | 2020-02-28 | 2021-09-01 | SMC Corporation | Gate valve |
| CN115111388A (en) * | 2021-03-19 | 2022-09-27 | Smc株式会社 | Gate valve with shaking prevention mechanism |
| CN115704505A (en) * | 2021-08-11 | 2023-02-17 | 沈阳富创精密设备股份有限公司 | Vacuum rectangular valve suitable for semiconductor industry |
-
2024
- 2024-03-11 CN CN202410269488.1A patent/CN117869605A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110089354A1 (en) * | 2009-10-15 | 2011-04-21 | Smc Corporation | Gate valve |
| KR101092138B1 (en) * | 2011-03-30 | 2011-12-12 | 한익수 | Rectangular gate valve |
| US20200208755A1 (en) * | 2018-12-28 | 2020-07-02 | Smc Corporation | Low noise gate valve |
| EP3872376A1 (en) * | 2020-02-28 | 2021-09-01 | SMC Corporation | Gate valve |
| CN115111388A (en) * | 2021-03-19 | 2022-09-27 | Smc株式会社 | Gate valve with shaking prevention mechanism |
| CN115704505A (en) * | 2021-08-11 | 2023-02-17 | 沈阳富创精密设备股份有限公司 | Vacuum rectangular valve suitable for semiconductor industry |
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