CN115704505A - Vacuum rectangular valve suitable for semiconductor industry - Google Patents
Vacuum rectangular valve suitable for semiconductor industry Download PDFInfo
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- CN115704505A CN115704505A CN202110918196.2A CN202110918196A CN115704505A CN 115704505 A CN115704505 A CN 115704505A CN 202110918196 A CN202110918196 A CN 202110918196A CN 115704505 A CN115704505 A CN 115704505A
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Abstract
The invention discloses a vacuum rectangular valve suitable for the semiconductor industry, which comprises a valve fixing mechanism, a cylinder assembly, a setting piece, a guide assembly, a lifting assembly and an external air path, wherein the cylinder assembly is arranged on the valve fixing mechanism; the valve fixing mechanism comprises a vacuum cavity, a cavity connecting plate and a fixing seat, the vacuum cavity is fixedly arranged at the top of the cavity connecting plate through a bolt, and the fixing seat is fixedly arranged at the bottom of the cavity connecting plate. According to the invention, a standard air cylinder assembly is selected as a power source, aiming at the characteristic that a piston rod cannot bear radial impact load, an auxiliary guide mechanism is designed, and radial force is transmitted to a mounting seat, so that a lifting assembly is protected.
Description
Technical Field
The invention relates to the technical field of valves, in particular to a vacuum rectangular valve suitable for the semiconductor industry.
Background
In the semiconductor industry, the sealing, stability, low vibration and easy maintenance of the valves of each chamber have a great influence on the efficiency and yield of the whole process.
However, in the prior art, during actual use, various valves at present are generally driven by a self-designed cylinder, and the lifting action of the valve is completed by designing a corresponding gas circuit, so that the valve is complex to assemble, the gas circuit is scrapped after failure, and a sealing surface has certain friction when being closed and opened, so that tiny particles are easily generated, and the environment of a cavity is polluted.
Disclosure of Invention
The invention aims to provide a vacuum rectangular valve suitable for the semiconductor industry so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the device comprises a valve fixing mechanism, a cylinder assembly, a setting piece, a guide assembly, a lifting assembly and an external gas circuit;
the valve fixing mechanism comprises a vacuum cavity, a cavity connecting plate and a fixing seat, the vacuum cavity is fixedly arranged at the top of the cavity connecting plate through a bolt, and the fixing seat is fixedly arranged at the bottom of the cavity connecting plate;
the air cylinder assembly and the setting piece comprise an air cylinder assembly, a guide support, a bottom connecting plate and a connecting seat, the air cylinder assembly is fixedly arranged at the bottom of the fixing seat through bolts, the guide support is fixedly arranged at the outer side of the air cylinder assembly, the bottom connecting plate is fixedly arranged at the bottom of the guide support, the connecting seat is fixedly arranged at the bottom of the output end of the air cylinder assembly, and the connecting seat is movably arranged on the inner wall of the guide support;
the guide assembly comprises cam grooves, a left guide block, a right guide block and a limiting block, the cam grooves are fixedly arranged at the top of the connecting seat, the number of the cam grooves is two, the left guide block and the right guide block are respectively and fixedly arranged on back-leaving surfaces of the two cam grooves, and one ends of opposite surfaces of the left guide block and the right guide block are respectively and fixedly provided with the limiting block through bolts;
the lifting assembly comprises a valve, a bearing screw, a bearing, a transmission shaft nut, a transmission shaft seat, a corrugated pipe pressing block, a corrugated pipe and a spring, wherein the spring is fixedly arranged at the middle part of the top of the connecting seat, the top of the connecting seat is movably arranged with the inner wall of the transmission shaft seat, the transmission shaft is fixedly arranged at the middle part of the transmission shaft seat, the bearing screw is fixedly arranged on the surface of the transmission shaft seat, the bearing screw is rotatably arranged on the surface of the bearing screw, the bearing screw penetrates through the transmission shaft seat and is fixedly arranged on the surface of the transmission shaft, the transmission shaft is fixedly penetrated through and extends to the top of the cavity connecting plate, the valve is fixedly arranged at the top of the transmission shaft, the corrugated pipe pressing block is fixedly arranged at one end of the position of the corresponding cavity connecting plate of the transmission shaft, the corrugated pipe is fixedly arranged at the bottom of the corrugated pipe pressing block, the corrugated pipe is fixedly arranged at the top of the transmission shaft seat, and the transmission shaft nut is fixedly arranged at one end of the opposite surface of two cam grooves.
Preferably, an O-shaped sealing ring is arranged between the vacuum cavity and the cavity connecting plate, the number of the fixing seats is two, the two fixing seats are symmetrically arranged about the vertical axis of the midpoint of the cavity connecting plate, and a guide structure and a rotary pair structure are designed at the bottom of each fixing seat.
Preferably, the inside of direction support is equipped with guide way and sensor installation slide, distance sensor is all installed at the both ends of connecting seat.
Preferably, two the cam groove sets up for symmetry axis symmetry about the vertical axis of connecting seat midpoint, left side guide block and right side guide block size equal, and left side guide block and right side guide block set up for symmetry axis symmetry about the vertical axis of connecting seat midpoint.
Preferably, the transmission shaft seat is of a hollow structure in the middle, and a sealing ring is arranged on the surface of the valve.
Preferably, the external gas circuit comprises a gas branch pressure control instrument, the surface of the gas branch pressure control instrument is connected with two three-way adapters through hoses, the output ends of the two three-way adapters are respectively and fixedly connected with an upper gas inlet pipeline and a lower gas inlet pipeline, the upper gas inlet pipeline is fixedly connected with a gas inlet hole in the top of the cylinder assembly, and the lower gas inlet pipeline is fixedly connected with a gas outlet hole in the bottom of the cylinder assembly.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, a standard air cylinder assembly is selected as a power source, aiming at the characteristic that a piston rod cannot bear radial impact load, an auxiliary guide mechanism is designed, and radial force is transmitted to a mounting seat, so that a lifting assembly is protected;
2. the invention also has better economy by selecting the standard air cylinder component, avoids the radial impact load on the piston rod in the stroke by designing the related structure, and prolongs the service life of the air cylinder component; according to the invention, the accuracy of the valve at the closing position is ensured through the designed cam groove structure, the contour curve is obtained through calculation and analysis, and the buffer curve is added according to the actual motion condition; the invention avoids friction and reduces the generation of pollution particles by a swing closing mode.
Drawings
FIG. 1 is an exploded view of the overall structure of a vacuum rectangular valve suitable for the semiconductor industry according to the present invention;
FIG. 2 is an assembly view of the overall structure of a vacuum rectangular valve suitable for the semiconductor industry according to the present invention;
FIG. 3 isbase:Sub>A cross-sectional view of the vacuum rectangular valve of the present invention taken along line A-A;
FIG. 4 isbase:Sub>A cross-sectional view of the vacuum rectangular valve of the present invention taken along the middle of A-A;
FIG. 5 isbase:Sub>A cross-sectional view of the vacuum rectangular valve of the present invention taken along line A-A inbase:Sub>A closed position;
fig. 6 is a schematic view of an external air passage structure of a vacuum rectangular valve suitable for the semiconductor industry.
In the figure: 1. a cylinder assembly; 2. a vacuum chamber; 3. a cavity connecting plate; 4. a fixed seat; 5. a valve; 6. a guide support; 7. a bottom connecting plate; 8. a connecting seat; 9. a cam slot; 10. a left guide block; 11. a right guide block; 12. a bearing screw; 13. a bearing; 14. a limiting block; 15. a drive shaft nut; 16. a drive shaft; 17. a transmission shaft seat; 18. pressing a corrugated pipe block; 19. a bellows; 20. a spring; 21. a gas branch pressure control instrument; 22. a three-way adapter; 23. an upper air inlet duct; 24. a down path air inlet pipeline.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: the device comprises a valve fixing mechanism, a cylinder assembly, a connecting piece, a guide assembly, a lifting assembly and an external gas circuit;
the valve fixing mechanism comprises a vacuum cavity 2, a cavity connecting plate 3 and a fixing seat 4, the vacuum cavity 2 is fixedly arranged at the top of the cavity connecting plate 3 through a bolt, and the fixing seat 4 is fixedly arranged at the bottom of the cavity connecting plate 3;
the air cylinder assembly and the connecting piece comprise an air cylinder assembly 1, a guide support 6, a bottom connecting plate 7 and a connecting seat 8, the air cylinder assembly 1 is fixedly arranged at the bottom of the fixed seat 4 through a bolt, the guide support 6 is fixedly arranged at the outer side of the air cylinder assembly 1, the bottom connecting plate 7 is fixedly arranged at the bottom of the guide support 6, the connecting seat 8 is fixedly arranged at the bottom of the output end of the air cylinder assembly 1, and the connecting seat 8 is movably connected with the inner wall of the guide support 6;
the guide assembly comprises cam grooves 9, left guide blocks 10, right guide blocks 11 and limiting blocks 14, the cam grooves 9 are fixedly mounted at the top of the connecting seat 8, the number of the cam grooves 9 is two, the left guide blocks 10 and the right guide blocks 11 are respectively fixedly mounted on the deviating surfaces of the two cam grooves 9, and the limiting blocks 14 are respectively fixedly mounted at one ends of the opposite surfaces of the left guide blocks 10 and the right guide blocks 11 through bolts;
the lifting assembly comprises a valve 5, a bearing screw 12, a bearing 13, a transmission shaft nut 15, a transmission shaft 16, a transmission shaft seat 17, a corrugated pipe pressing block 18, a corrugated pipe 19 and a spring 20, the spring 20 is fixedly installed at the middle of the top of the connection seat 8, the top of the connection seat 8 is movably connected with the inner wall of the transmission shaft seat 17, the transmission shaft 16 is fixedly installed at the middle of the transmission shaft seat 17, the bearing screw 12 is fixedly installed on the surface of the transmission shaft seat 17, the bearing 13 is rotatably connected to the surface of the bearing screw 12, the bearing screw 12 penetrates through the transmission shaft seat 17 and is fixedly installed on the surface of the transmission shaft 16, the transmission shaft 16 is fixedly penetrated through and extends to the top of the cavity connecting plate 3, the valve 5 is fixedly installed at the top of the transmission shaft 16, the corrugated pipe pressing block 18 is fixedly installed at one end of the position, corresponding to the cavity connecting plate 3, of the transmission shaft 16, the corrugated pipe 19 is fixedly installed at the bottom of the pressing block 18, the corrugated pipe 19 is fixedly installed at the top of the transmission shaft seat 17, and the transmission shaft nut 15 is fixedly installed at one end of the opposite surface of the two cam grooves 9.
An O-shaped sealing ring is arranged between the vacuum cavity 2 and the cavity connecting plate 3, the number of the fixing seats 4 is two, the two fixing seats 4 are symmetrically arranged relative to the vertical axis of the midpoint of the cavity connecting plate 3, and a guide structure and a rotary pair structure are designed at the bottom of each fixing seat 4.
The inside of direction support 6 is equipped with guide way and sensor installation slide, and distance sensor is all installed at the both ends of connecting seat 8.
Two cam grooves 9 set up for symmetry axis symmetry about the vertical axis of 8 midpoints of connecting seat, left side guide block 10 and right side guide block 11 size are equal, and left side guide block 10 and right side guide block 11 set up for symmetry axis symmetry about the vertical axis of 8 midpoints of connecting seat, can play supplementary guide effect for the lift of valve 5 through left side guide block 10 and right side guide block 11, the profile curve that cam groove 9 design obtained through calculation for the action of closing of valve 5.
The transmission shaft seat 17 is of a hollow structure in the middle, a sealing ring is arranged on the surface of the valve 5, the transmission shaft 16 and the transmission shaft seat 17 are fixed through a set screw to prevent the transmission shaft 16 and the transmission shaft seat 17 from rotating relatively, the corrugated pipe 19 is fixed through the corrugated pipe pressing block 18, and the corrugated pipe 19 is kept from rotating and moving.
External gas circuit includes that gas fork divides accuse pressure instrument 21, and the surface of gas fork branch accuse pressure instrument 21 has three way connection 22 through hose connection, and three way connection 22's quantity is two, and two three way connection 22 outputs respectively fixed mounting have last way admission line 23 and next way admission line 24, the inlet port at cylinder assembly 1 top of last way admission line 23 fixed mounting, and the venthole of next way admission line 24 fixed mounting in cylinder assembly 1 bottom.
The working principle is as follows: when the valve is used, when the valve 5 is at an initial position, the valve is connected with air inlet and outlet holes of the standard cylinder assemblies 1 at the left side and the right side through an upper air inlet pipeline 23 and a lower air inlet pipeline 24 in an external air path, when a system starts to operate, the cylinder assemblies 1 start to move upwards, the connecting seats 8 are driven to move upwards through a fixing structure on the connecting seats 8, the springs 20 are continuously compressed at the moment, the lower end bearings 13 are limited in the contour of the cam grooves 9, the upper limit is limited by the left side guide block 10 and the right side guide block 11, the valve 5, the transmission shaft 16 and the transmission shaft seat 17 rise linearly at the moment, and the corrugated pipe 19 is in a compressed state; when the upper end bearing 13 of the lifting assembly reaches the upper limit position, namely the limit block 14 is positioned in the limit structure of the fixed seat 4, the lifting assembly stops moving upwards, the lower end bearing 13 is positioned in the contour of the cam groove 9, and the bearing 13 is separated from the left guide block 10 and the right guide block 11, because of the structural design of the cam groove 9, the cylinder assembly 1 can still continue to move for a stroke, so that the valve 5 is closed; when the cylinder component 1 continues to move, because the upper end bearing 13 is in a revolute pair state, the valve 5, the transmission shaft 16 and the transmission shaft seat 17 rotate integrally, meanwhile, the lower end bearing 13 is positioned in the outline of the cam groove 9, the maximum rotatable angle is determined, when the valve 5 is closed and sealed through rotation, the cylinder component 1 stops moving, and meanwhile, the cam groove 9 structure plays a role in limiting the position and keeping; when the valve 5 is opened, the movement process is opposite to the sequence, namely swinging door opening is carried out, and the valve linearly descends to the initial position;
1. according to the invention, the standard cylinder component 1 can be selected, the economy is better, the radial impact load on the piston rod in the stroke is avoided by designing a related structure, and the service life of the cylinder component 1 is prolonged;
2. according to the invention, the accuracy of the valve 5 at the closing position is ensured through the designed cam groove 9 structure, a contour curve is obtained through calculation and analysis, and a buffer curve is added according to the actual motion condition;
3. the invention avoids friction and reduces the generation of pollution particles by a swing closing mode.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a vacuum rectangle valve suitable for semiconductor trade which characterized in that: the device comprises a valve fixing mechanism, a cylinder assembly, a setting piece, a guide assembly, a lifting assembly and an external gas circuit;
the valve fixing mechanism comprises a vacuum cavity (2), a cavity connecting plate (3) and a fixing seat (4), the vacuum cavity (2) is fixedly arranged at the top of the cavity connecting plate (3) through a bolt, and the fixing seat (4) is fixedly arranged at the bottom of the cavity connecting plate (3);
the air cylinder assembly and the setting piece comprise an air cylinder assembly (1), a guide support (6), a bottom connecting plate (7) and a connecting seat (8), the air cylinder assembly (1) is fixedly arranged at the bottom of the fixing seat (4) through bolts, the guide support (6) is fixedly arranged on the outer side of the air cylinder assembly (1), the bottom connecting plate (7) is fixedly arranged at the bottom of the guide support (6), the connecting seat (8) is fixedly arranged at the bottom of the output end of the air cylinder assembly (1), and the connecting seat (8) is movably arranged on the inner wall of the guide support (6);
the guide assembly comprises cam grooves (9), left guide blocks (10), right guide blocks (11) and limiting blocks (14), the cam grooves (9) are fixedly arranged at the top of the connecting seat (8), the number of the cam grooves (9) is two, the left guide blocks (10) and the right guide blocks (11) are respectively and fixedly arranged on back-separating surfaces of the two cam grooves (9), and one ends of opposite surfaces of the left guide blocks (10) and the right guide blocks (11) are respectively and fixedly provided with the limiting blocks (14) through bolts;
the lifting component comprises a valve (5), a bearing screw (12), a bearing (13), a transmission shaft nut (15), a transmission shaft (16), a transmission shaft seat (17), a corrugated pipe pressing block (18), a corrugated pipe (19) and a spring (20), the spring (20) is fixedly arranged in the middle of the top of the connecting seat (8), the top of the connecting seat (8) is movably arranged with the inner wall of the transmission shaft seat (17), the transmission shaft (16) is fixedly arranged in the middle of the transmission shaft seat (17), the bearing screw (12) is fixedly arranged on the surface of the transmission shaft seat (17), and the bearing (13) is rotatably arranged on the surface of the bearing screw (12), the bearing screw (12) penetrates through the transmission shaft seat (17) and is fixedly arranged on the surface of the transmission shaft (16), the transmission shaft (16) fixedly penetrates through and extends to the top of the cavity connecting plate (3), the valve (5) is fixedly arranged on the top of the transmission shaft (16), the corrugated pipe pressing block (18) is fixedly arranged at one end of the transmission shaft (16) corresponding to the cavity connecting plate (3), and the corrugated pipe (19) is fixedly arranged at the bottom of the corrugated pipe pressing block (18), the corrugated pipe (19) is fixedly arranged at the top of the transmission shaft seat (17), the transmission shaft nut (15) is fixedly arranged at one end of the opposite surfaces of the two cam grooves (9).
2. The vacuum rectangular valve suitable for semiconductor industry according to claim 1, wherein: be provided with O type sealing washer between vacuum cavity (2) and cavity connecting plate (3), the quantity of fixing base (4) is two, and two fixing bases (4) are symmetry axis symmetry setting about the vertical axis of cavity connecting plate (3) mid point, the bottom design guide structure and the revolute pair structure of fixing base (4).
3. The vacuum rectangular valve suitable for semiconductor industry according to claim 1, wherein: the inside of direction support (6) is equipped with guide way and sensor installation slide, distance sensor is all installed at the both ends of connecting seat (8).
4. The vacuum rectangular valve suitable for semiconductor industry according to claim 1, wherein: two cam groove (9) are symmetry axis symmetry setting about the vertical axis of connecting seat (8) mid point, left side guide block (10) and right side guide block (11) size are equal, and left side guide block (10) and right side guide block (11) are symmetry axis symmetry setting about the vertical axis of connecting seat (8) mid point.
5. The vacuum rectangular valve suitable for semiconductor industry according to claim 1, wherein: the transmission shaft seat (17) is of a hollow structure in the middle, and a sealing ring is arranged on the surface of the valve (5).
6. The vacuum rectangular valve suitable for semiconductor industry according to claim 1, wherein: the external gas circuit comprises a gas branch pressure control instrument (21), the surface of the gas branch pressure control instrument (21) is connected with three-way adapters (22) through hoses, the number of the three-way adapters (22) is two, the output ends of the two three-way adapters (22) are respectively fixedly connected with an upper air inlet pipeline (23) and a lower air inlet pipeline (24), the upper air inlet pipeline (23) is fixedly connected with an air inlet hole in the top of the cylinder assembly (1), and the lower air inlet pipeline (24) is fixedly connected with an air outlet hole in the bottom of the cylinder assembly (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110918196.2A CN115704505A (en) | 2021-08-11 | 2021-08-11 | Vacuum rectangular valve suitable for semiconductor industry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110918196.2A CN115704505A (en) | 2021-08-11 | 2021-08-11 | Vacuum rectangular valve suitable for semiconductor industry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115704505A true CN115704505A (en) | 2023-02-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110918196.2A Pending CN115704505A (en) | 2021-08-11 | 2021-08-11 | Vacuum rectangular valve suitable for semiconductor industry |
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| Country | Link |
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| CN (1) | CN115704505A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117847248A (en) * | 2024-03-07 | 2024-04-09 | 沈阳富创精密设备股份有限公司 | Rectangular valve with adjustable valve plate |
| CN117869605A (en) * | 2024-03-11 | 2024-04-12 | 沈阳富创精密设备股份有限公司 | Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber |
-
2021
- 2021-08-11 CN CN202110918196.2A patent/CN115704505A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117847248A (en) * | 2024-03-07 | 2024-04-09 | 沈阳富创精密设备股份有限公司 | Rectangular valve with adjustable valve plate |
| CN117869605A (en) * | 2024-03-11 | 2024-04-12 | 沈阳富创精密设备股份有限公司 | Single-cylinder driving vacuum rectangular valve for sealing semiconductor process chamber |
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