CN117869521A - Active vibration isolation system and equipment based on pressure valve and flow valve - Google Patents
Active vibration isolation system and equipment based on pressure valve and flow valve Download PDFInfo
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Abstract
The application relates to the technical field of vibration isolation of semiconductor equipment, in particular to an active vibration isolation system and device based on a pressure valve and a flow valve, comprising: the rigid mounting plate is arranged below the equipment body and is connected with the equipment body; the bearing bases are distributed under the rigid mounting plate, and are connected with vertical displacement sensors which are used for detecting vertical displacement of the rigid mounting plate; the air springs are positioned between the rigid mounting plate and the bearing base, the air springs are connected with the bearing base, and rolling pistons of the air springs are connected with the rigid mounting plate; the pressure control unit is used for controlling the pressure in the inner cavity of the air spring according to the electric signal of the vertical displacement sensor; the vibration isolation device has the advantages that the vibration isolation of the rigid mounting plate is realized through the air spring conveniently matched with the pressure control unit, and the vibration isolation rigidity is conveniently actively adjusted while the vibration isolation system structure is simplified.
Description
Technical Field
The application relates to the technical field of vibration isolation of semiconductor equipment, in particular to an active vibration isolation system and device based on a pressure valve and a flow valve.
Background
The importance of the semiconductor device is self-evident from the fact that in the semiconductor device, the precision of the semiconductor device can be affected by micro-vibration of a base, direct disturbance of an operator, and disturbance of an inertia force generated by movement of the device itself, and further the quality of a product can be affected.
In order to realize vibration isolation of semiconductor equipment, the prior art discloses modes such as passive vibration isolation and contact vibration isolation, but the modes can not meet the low-frequency vibration isolation requirement, and electromagnetic air floating is relatively complex, and the vibration isolation equipment also comprises a working platform and a supporting platform, and further comprises a control module, wherein a plurality of magnetostrictive actuators are arranged between the working platform and the supporting platform, an acceleration sensor is arranged on the working platform and used for detecting vibration signals of the working platform and transmitting the vibration signals to the control module, and the control module controls actions of the magnetostrictive actuators according to the vibration signals so as to counteract vibration of the working platform.
Aiming at the related technology, the vibration signal of the working platform is detected through the acceleration sensor, and the magnetostrictive actuator is controlled by the control module to provide the active control force according to the vibration signal, and the vibration isolation structure is further provided with the traditional passive vibration isolation element such as a spring or a damper, so that the vibration isolator is complex in structure, high in control difficulty and inconvenient to control vibration isolation rigidity.
Disclosure of Invention
In order to facilitate the realization of active adjustment of vibration isolation rigidity, the application provides an active vibration isolation system and device based on a pressure valve and a flow valve.
The application provides an initiative vibration isolation system and equipment based on pressure valve and flow valve adopts following technical scheme:
in a first aspect, the present application provides an active vibration isolation system based on a pressure valve and a flow valve, comprising:
the rigid mounting plate is arranged below the equipment body and is used for being connected with the equipment body;
the bearing bases are distributed under the rigid mounting plate, and are connected with vertical displacement sensors which are used for detecting vertical displacement of the rigid mounting plate;
the air springs are positioned between the rigid mounting plate and the bearing base, the air springs are connected with the bearing base, and rolling pistons of the air springs are connected with the rigid mounting plate;
and the pressure control unit is electrically connected with the vertical displacement sensor and is communicated with the air spring inner cavity and used for controlling the pressure in the air spring inner cavity according to the electric signal of the vertical displacement sensor.
Through adopting above-mentioned technical scheme, when the equipment body takes place to vibrate because many factors such as the micro-vibration of base, the direct disturbance of operator or the inertial force disturbance that produces when equipment self work, need carry out vibration isolation processing in order to reduce the influence of vibration to equipment machining precision, the rigidity mounting panel is connected with the equipment body, when the equipment body takes place to vibrate, vertical displacement sensor detects the vertical displacement volume of the rigidity mounting panel in bearing base department corresponding region, then a plurality of vertical displacement sensor will multiple spot detection's displacement data transmission give pressure control unit, pressure control unit carries out centralized analysis processing with a plurality of displacement data, its centralized analysis processing arithmetic logic is: the motion signal of the working space, namely displacement data, can be converted into the motion signal of the modal space through modal space conversion operation, and as the three-degree-of-freedom dynamic equation of the isolation system in the modal space is mutually decoupled, the motion and force measurement signals of the modal space after conversion do not need to exist in a vector sense, and each component of the motion and force measurement signals of the modal space can be respectively used for measuring the motion and force of three independent degrees of freedom of the modal space; at the moment, the pressure control controls the pressure in the air spring according to the vibration intensity, so that the air pressure in the air spring correspondingly changes according to the vibration intensity, and further the rigidity of the air spring is changed, and the vibration isolation effect is achieved; the active vibration isolation system based on the pressure valve and the flow valve is convenient to connect with the equipment body through the rigid mounting plate, is convenient to install the air spring and the vertical displacement sensor through the bearing base, is convenient to detect the vertical displacement and the horizontal torsion of the rigid mounting plate through the vertical displacement sensor, is convenient to match with the pressure control unit through the air spring to realize vibration isolation of the rigid mounting plate, and is convenient to realize the active adjustment of vibration isolation rigidity while simplifying the vibration isolation system structure.
In a specific embodiment, the pressure control unit comprises
The controller is electrically connected with the vertical displacement sensor;
the air inlet ends of the air inlet valves are communicated with an air source, the air outlet ends of the air inlet valves are communicated with the inner cavity of the air spring, and the air inlet valves are electrically connected with the controller;
the exhaust valves are communicated with the air spring inner cavity and used for exhausting gas in the air spring inner cavity, and the exhaust valves are electrically connected with the controller.
Through adopting above-mentioned technical scheme, the pressure control unit of design can be according to the signal of telecommunication of a plurality of vertical displacement sensor transmission, and control admission valve or the opening and close of discharge valve, and then change the gas pressure in the air spring inner chamber, realizes the change of air spring rigidity to realize the adaptation to vibration intensity.
In a specific embodiment, the inlet valve is provided as a flow valve.
Through adopting above-mentioned technical scheme, the design sets up the admission valve as the flow valve, can measure the gas volume in the input air spring inner chamber, and then the rigidity of the control air spring of accurate, improves vibration isolation effect.
In a specific embodiment, the exhaust valve is configured as a pressure valve.
Through adopting above-mentioned technical scheme, the discharge valve of setting as the pressure valve of design can be through changing the pressure triggering threshold value of pressure valve, and the gas pressure of the control air spring inner chamber of accurate, and then the rigidity of accurate control air spring improves vibration isolation effect.
In a specific embodiment, a plurality of said load bearing bases are disposed in a matrix arrangement directly beneath said rigid mounting plate.
By adopting the technical scheme, the rigid mounting plate can be reliably supported, the area of a measuring plane formed by a plurality of vertical displacement sensors can be enlarged, the measuring sensitivity to vertical displacement or horizontal torsion of the rigid mounting plate is improved, and the vibration isolation effect and response timeliness are improved.
In a second aspect, the present application provides an apparatus comprising:
an equipment body;
the rigid mounting plate is arranged below the equipment body and is used for being detachably and fixedly connected with the equipment body;
the bearing bases are distributed under the rigid mounting plate, and are connected with vertical displacement sensors which are used for detecting vertical displacement of the rigid mounting plate;
the air springs are positioned between the rigid mounting plate and the bearing base, the air springs are connected with the bearing base, and rolling pistons of the air springs are connected with the rigid mounting plate;
and the pressure control unit is electrically connected with the vertical displacement sensor and is communicated with the air spring inner cavity and used for controlling the pressure in the air spring inner cavity according to the electric signal of the vertical displacement sensor.
Through adopting above-mentioned technical scheme, when the equipment body takes place to vibrate because many factors such as the micro-vibration of base, the direct disturbance of operator or the inertial force disturbance that produces when equipment body self work, need carry out vibration isolation processing in order to reduce the influence of vibration to equipment machining precision, the rigidity mounting panel is connected with the equipment body, when the equipment body takes place to vibrate, vertical displacement sensor detects the vertical displacement of the rigidity mounting panel in bearing base department corresponding region, then a plurality of vertical displacement sensor will multiple spot detection's displacement data transmission give pressure control unit, pressure control unit carries out centralized analysis processing with a plurality of displacement data, its centralized analysis processing arithmetic logic is: the motion signal of the working space, namely displacement data, can be converted into the motion signal of the modal space through modal space conversion operation, and as the three-degree-of-freedom dynamic equation of the isolation system in the modal space is mutually decoupled, the motion and force measurement signals of the modal space after conversion do not need to exist in a vector sense, and each component of the motion and force measurement signals of the modal space can be respectively used for measuring the motion and force of three independent degrees of freedom of the modal space; at the moment, the pressure control controls the pressure in the air spring according to the vibration intensity, so that the air pressure in the air spring correspondingly changes according to the vibration intensity, and the rigidity of the air spring is further changed, and an active vibration isolation effect is achieved; the equipment of design is convenient for be connected with the equipment body through the rigid mounting panel, is convenient for install air spring and vertical displacement sensor through the bearing base, is convenient for detect the vertical displacement and the horizontal torsion of rigid mounting panel through vertical displacement sensor, is convenient for cooperate the vibration isolation of pressure control unit realization to the rigid mounting panel through air spring, is convenient for realize the initiative adjustment of vibration isolation rigidity when simplifying vibration isolation system structure, and then realizes the vibration isolation of equipment body, improves the precision of equipment body processing product.
In a specific embodiment, the pressure control unit comprises
The controller is electrically connected with the vertical displacement sensor;
the air inlet ends of the air inlet valves are communicated with an air source, the air outlet ends of the air inlet valves are communicated with the inner cavity of the air spring, and the air inlet valves are electrically connected with the controller;
the exhaust valves are communicated with the air spring inner cavity and used for exhausting gas in the air spring inner cavity, and the exhaust valves are electrically connected with the controller.
Through adopting above-mentioned technical scheme, the pressure control unit of design can be according to the signal of telecommunication of a plurality of vertical displacement sensor transmission, and control admission valve or the opening and close of discharge valve, and then change the gas pressure in the air spring inner chamber, realizes the change of air spring rigidity to realize the adaptation to vibration intensity.
In a specific embodiment, the inlet valve is provided as a flow valve.
Through adopting above-mentioned technical scheme, the design sets up the admission valve as the flow valve, can measure the gas volume in the input air spring inner chamber, and then the rigidity of the control air spring of accurate, improves vibration isolation effect.
In a specific embodiment, the exhaust valve is configured as a pressure valve.
Through adopting above-mentioned technical scheme, the discharge valve of setting as the pressure valve of design can be through changing the pressure triggering threshold value of pressure valve, and the gas pressure of the control air spring inner chamber of accurate, and then the rigidity of accurate control air spring improves vibration isolation effect.
In a specific embodiment, a plurality of said load bearing bases are disposed in a matrix arrangement directly beneath said rigid mounting plate.
By adopting the technical scheme, the rigid mounting plate can be reliably supported, the area of a measuring plane formed by a plurality of vertical displacement sensors can be enlarged, the measuring sensitivity to vertical displacement or horizontal torsion of the rigid mounting plate is improved, and the vibration isolation effect and response timeliness are improved.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the active vibration isolation system based on the pressure valve and the flow valve is convenient to connect with the equipment body through the rigid mounting plate, is convenient to install the air spring and the vertical displacement sensor through the bearing base, is convenient to detect the vertical displacement and the horizontal torsion of the rigid mounting plate through the vertical displacement sensor, is convenient to match with the pressure control unit through the air spring to realize vibration isolation of the rigid mounting plate, and is convenient to realize the active adjustment of vibration isolation rigidity while simplifying the vibration isolation system structure.
2. The designed active vibration isolation system based on the pressure valve and the flow valve can control the opening and closing of the air inlet valve or the air outlet valve according to the electric signals transmitted by the plurality of vertical displacement sensors, so that the air pressure in the inner cavity of the air spring is changed, the change of the stiffness of the air spring is realized, and the adaptation of the vibration intensity is realized.
3. The designed active vibration isolation system based on the pressure valve and the flow valve can realize reliable support of the rigid mounting plate, enlarge the area of a measurement plane formed by a plurality of vertical displacement sensors, improve the measurement sensitivity to vertical displacement or horizontal torsion of the rigid mounting plate, and improve the vibration isolation effect and response timeliness.
Drawings
Fig. 1 is a schematic structural view of an active vibration isolation system based on a pressure valve and a flow valve disclosed in the first aspect of the embodiment of the present application.
Fig. 2 is a partial schematic structure of fig. 1.
Fig. 3 is a schematic three-dimensional structure of fig. 2.
Fig. 4 is a schematic structural view of an apparatus disclosed in the second aspect of the embodiment of the present application.
Reference numerals illustrate: 1. a rigid mounting plate; 2. a bearing base; 3. a vertical displacement sensor; 4. an air spring; 5. a pressure control unit; 51. a controller; 52. an intake valve; 53. an exhaust valve; 6. an apparatus body.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-4.
The embodiment of the application discloses an active vibration isolation system and equipment based on a pressure valve and a flow valve.
In a first aspect, embodiments of the present application disclose an active vibration isolation system based on a pressure valve and a flow valve.
Referring to fig. 1 and 2, an active vibration isolation system based on a pressure valve and a flow valve comprises a rigid mounting plate 1 and a plurality of bearing bases 2, wherein the rigid mounting plate 1 is horizontally arranged, the rigid mounting plate 1 is positioned below an equipment body 6, the rigid mounting plate 1 is detachably and fixedly connected with the equipment body 6, the number of the bearing bases 2 is multiple, the bearing bases 2 are uniformly distributed right below the rigid mounting plate 1, and the bearing bases 2 are connected with vertical displacement sensors 3, and the vertical displacement sensors 3 are used for detecting vertical displacement of the rigid mounting plate 1.
Referring to fig. 1 and 2, in the present application, the plurality of load-bearing bases 2 may be linearly distributed below the rigid mounting plate 1, may also be rectangular, and may also be in other distribution shapes, in this embodiment, in order to further realize reliable support for the rigid mounting plate 1, and may enlarge the area of a measurement plane formed by the plurality of vertical displacement sensors 3, improve the measurement sensitivity for vertical displacement or horizontal torsion of the rigid mounting plate 1, and improve the vibration isolation effect and response timeliness, and the plurality of load-bearing bases 2 are distributed right below the rigid mounting plate 1 in a matrix.
Referring to fig. 1 and 2, in order to facilitate vibration isolation of the apparatus body 6, a plurality of air springs 4 are further included, the air springs 4 are located between the rigid mounting plate 1 and the bearing base 2, fixed ends of the air springs 4 are bolted to the bearing base 2, and rolling piston ends of the air springs 4 are bolted to the rigid mounting plate 1; when the equipment body 6 vibrates, the vibration is transmitted to the rigid mounting plate 1, the air spring 4 receives vibration energy transmitted by the rigid mounting plate 1, so that the rolling piston is displaced, the pressure in the inner cavity of the air spring 4 is increased, the rigidity is increased until the equipment body 6 stops vibrating, the air spring 4 returns, the rigidity is reduced, and vibration isolation of the equipment body 6 is realized.
Referring to fig. 2 and 3, in order to facilitate the active vibration isolation of the apparatus body 6, further improve the precision of the product processed by the apparatus body 6, the apparatus further comprises a pressure control unit 5, wherein the pressure control unit 5 is electrically connected with the vertical displacement sensor 3, and the pressure control unit 5 is communicated with the inner cavity of the air spring 4, and is used for controlling the pressure in the inner cavity of the air spring 4 according to the electric signals of the plurality of vertical displacement sensors 3; the equipment body 6 vibrates, the vertical displacement sensor 3 detects the vertical displacement of the rigid mounting plate 1 in the corresponding area at the bearing base 2, then the plurality of vertical displacement sensors 3 transmit the displacement data detected by multiple points to the pressure control unit 5, the pressure control unit 5 carries out centralized analysis processing on the plurality of displacement data, and the centralized analysis processing arithmetic logic is as follows: the motion signal of the working space, namely displacement data, can be converted into the motion signal of the modal space through modal space conversion operation, and as the three-degree-of-freedom dynamic equation of the isolation system in the modal space is mutually decoupled, the motion and force measurement signals of the modal space after conversion do not need to exist in a vector sense, and each component of the motion and force measurement signals of the modal space can be respectively used for measuring the motion and force of three independent degrees of freedom of the modal space; at this time, the pressure control controls the pressure in the air spring 4 according to the vibration intensity, so that the air pressure in the air spring 4 correspondingly changes according to the vibration intensity, and the rigidity of the air spring 4 is further changed, so that an active vibration isolation effect is achieved.
Referring to fig. 2 and 3, in order to realize the pressure control of the inner cavity of the air spring 4, it is further disclosed that the pressure control unit 5 comprises a controller 51, an air inlet valve 52 and an air outlet valve 53, wherein the controller 51 is connected to the device body 6 by bolts, and the controller 51 is electrically connected with the vertical displacement sensor 3 and is used for receiving the vertical displacement of the rigid mounting plate 1 measured by the vertical displacement sensor 3 and the horizontal torsion displacement measured by a measuring plane formed by a plurality of vertical displacement sensors 3; in the application, the number of the air inlet valves 52 and the air outlet valves 53 is consistent with that of the air springs 4, the number of the air inlet valves 52 and the air outlet valves 53 connected to each air spring 4 is one, the air inlet ends of the air inlet valves 52 are used for being communicated with an air source, the air outlet ends of the air inlet valves 52 are used for being communicated with the inner cavity of the air springs 4 through connecting flanges, and the air inlet valves 52 are electrically connected with the controller 51; the exhaust valve 53 is communicated with the inner cavity of the air spring 4, the other end is communicated with the outside, the exhaust valve 53 is used for exhausting the air in the inner cavity of the air spring 4, and the exhaust valve 53 is electrically connected with the controller 51.
Referring to fig. 2 and 3, in order to further realize measurement of the volume of the gas in the inner cavity of the input air spring 4, and further precisely control the stiffness of the air spring 4, and improve the vibration isolation effect, in this embodiment, the air inlet valve 52 is preferably set to be a flow valve, and the controller 51 controls the intensity of the electrical signal input to the flow valve according to the vertical displacement data and the torsional displacement data measured by the plurality of vertical displacement sensors 3, and further controls the volume of the gas in the inner cavity of the input air spring 4.
Referring to fig. 2 and 3, in order to further precisely control the air pressure in the inner cavity of the air spring 4, and further precisely control the stiffness of the air spring 4, and improve the vibration isolation effect, in this embodiment, the exhaust valve 53 is preferably configured as a pressure valve, and the controller 51 controls the pressure trigger threshold of the pressure valve according to the vertical displacement data and the torsion displacement data measured by the plurality of vertical displacement sensors 3, and further controls the volume of air in the inner cavity of the exhaust air spring 4.
The implementation principle of the active vibration isolation system based on the pressure valve and the flow valve is as follows: when the device body 6 vibrates due to the micro vibration of the base, the direct disturbance of an operator or the disturbance of inertia force generated when the device body 6 works, and the like, vibration isolation treatment is needed to reduce the influence of the vibration on the processing precision of the device, the rigid mounting plate 1 is connected with the device body 6, when the device body 6 vibrates, the vertical displacement sensor 3 detects the vertical displacement of the rigid mounting plate 1 in the corresponding area at the bearing base 2, then the plurality of vertical displacement sensors 3 transmit the multi-point detected displacement data to the pressure control unit 5, the pressure control unit 5 carries out centralized analysis treatment on the plurality of displacement data, and the centralized analysis treatment arithmetic logic of the controller 51 is as follows: the motion signal of the working space, namely displacement data, can be converted into the motion signal of the modal space through modal space conversion operation, and as the three-degree-of-freedom dynamic equation of the isolation system in the modal space is mutually decoupled, the motion and force measurement signals of the modal space after conversion do not need to exist in a vector sense, and each component of the motion and force measurement signals of the modal space can be respectively used for measuring the motion and force of three independent degrees of freedom of the modal space; at this time, the pressure control controls the pressure in the air spring 4 according to the vibration intensity, so that the air pressure in the air spring 4 correspondingly changes according to the vibration intensity, and the rigidity of the air spring 4 is further changed, so that an active vibration isolation effect is achieved.
In a second aspect, embodiments of the present application disclose an apparatus.
Referring to fig. 4, an apparatus includes an apparatus body 6 and an active vibration isolation system based on a pressure valve and a flow valve disclosed in the first aspect of the embodiment of the present application, where the apparatus body 6 is located directly above the rigid mounting plate 1, and the apparatus body 6 is detachably and fixedly connected with the rigid mounting plate 1 through bolts; in this application, equipment body 6 can be semiconductor device, also can be laser processing equipment, still can be any other equipment that requires strictly to vibration isolation effect, equipment body 6 is semiconductor device in this embodiment, be convenient for be connected with equipment body 6 through rigid mounting panel 1, be convenient for install air spring 4 and vertical displacement sensor 3 through bearing base 2, and realize the reliable support to rigid mounting panel 1, and can enlarge the area of the measurement plane that a plurality of vertical displacement sensors 3 constitute, improve the measurement sensitivity to rigid mounting panel 1 vertical displacement or horizontal torsion, improve vibration isolation effect and response timeliness, be convenient for detect vertical displacement and horizontal torsion of rigid mounting panel 1 through vertical displacement sensor 3, according to the signal of telecommunication that a plurality of vertical displacement sensors 3 transmit, control admission valve 52 or be opening and close of discharge valve 53, and then change the gas pressure in the inner chamber of air spring 4, realize the change of air spring 4 rigidity, in order to realize the adaptation to vibration intensity, be convenient for cooperate pressure control unit 5 and vertical displacement sensor 3 realization to rigid mounting panel 1 through air spring 4, the vibration isolation device 6 of being convenient for realize the vibration isolation of body structure, and the vibration isolation processing quality of vibration isolation 6 processing quality of product and processing quality of the vibration isolation processing of the product that improves.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (10)
1. An active vibration isolation system based on a pressure valve and a flow valve is characterized in that: comprising the following steps:
the rigid mounting plate (1) is arranged below the equipment body (6) and is used for being connected with the equipment body (6);
the bearing bases (2) are distributed under the rigid mounting plate (1), vertical displacement sensors (3) are connected to the bearing bases (2), and the vertical displacement sensors (3) are used for detecting vertical displacement of the rigid mounting plate (1);
a plurality of air springs (4), wherein the air springs (4) are positioned between the rigid mounting plate (1) and the bearing base (2), the air springs (4) are connected with the bearing base (2), and rolling pistons of the air springs (4) are connected with the rigid mounting plate (1);
the pressure control unit (5), the pressure control unit (5) with perpendicular displacement sensor (3) electricity is connected, and pressure control unit (5) with air spring (4) inner chamber intercommunication is used for according to the electrical signal of perpendicular displacement sensor (3) pressure in air spring (4) inner chamber.
2. The active vibration isolation system based on pressure and flow valves of claim 1, wherein: the pressure control unit (5) comprises
A controller (51), the controller (51) being electrically connected to the vertical displacement sensor (3);
the air inlet ends of the air inlet valves (52) are used for being communicated with an air source, the air outlet ends of the air inlet valves (52) are used for being communicated with the inner cavity of the air spring (4), and the air inlet valves (52) are used for being electrically connected with the controller (51);
and the exhaust valves (53) are communicated with the inner cavity of the air spring (4) and used for exhausting gas in the inner cavity of the air spring (4), and the exhaust valves (53) are used for being electrically connected with the controller (51).
3. The active vibration isolation system based on pressure and flow valves of claim 2, wherein: the inlet valve (52) is configured as a flow valve.
4. A pressure valve and flow valve based active vibration isolation system according to any of claims 2 or 3, characterized in that: the exhaust valve (53) is configured as a pressure valve.
5. The active vibration isolation system based on pressure and flow valves of claim 1, wherein: the bearing bases (2) are distributed under the rigid mounting plate (1) in a matrix mode.
6. An apparatus, characterized in that: comprising the following steps:
an equipment body (6);
the rigid mounting plate (1) is arranged below the equipment body (6) and is used for being detachably and fixedly connected with the equipment body (6);
the bearing bases (2) are distributed under the rigid mounting plate (1), vertical displacement sensors (3) are connected to the bearing bases (2), and the vertical displacement sensors (3) are used for detecting vertical displacement of the rigid mounting plate (1);
a plurality of air springs (4), wherein the air springs (4) are positioned between the rigid mounting plate (1) and the bearing base (2), the air springs (4) are connected with the bearing base (2), and rolling pistons of the air springs (4) are connected with the rigid mounting plate (1);
the pressure control unit (5), the pressure control unit (5) with perpendicular displacement sensor (3) electricity is connected, and pressure control unit (5) with air spring (4) inner chamber intercommunication is used for according to the electrical signal of perpendicular displacement sensor (3) pressure in air spring (4) inner chamber.
7. The apparatus according to claim 6, wherein: the pressure control unit (5) comprises
A controller (51), the controller (51) being electrically connected to the vertical displacement sensor (3);
the air inlet ends of the air inlet valves (52) are used for being communicated with an air source, the air outlet ends of the air inlet valves (52) are used for being communicated with the inner cavity of the air spring (4), and the air inlet valves (52) are used for being electrically connected with the controller (51);
and the exhaust valves (53) are communicated with the inner cavity of the air spring (4) and used for exhausting gas in the inner cavity of the air spring (4), and the exhaust valves (53) are used for being electrically connected with the controller (51).
8. The apparatus according to claim 7, wherein: the inlet valve (52) is configured as a flow valve.
9. The apparatus according to any one of claims 6-7, wherein: the exhaust valve (53) is configured as a pressure valve.
10. The apparatus according to claim 6, wherein: the bearing bases (2) are distributed under the rigid mounting plate (1) in a matrix mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410181403.4A CN117869521A (en) | 2024-02-18 | 2024-02-18 | Active vibration isolation system and equipment based on pressure valve and flow valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410181403.4A CN117869521A (en) | 2024-02-18 | 2024-02-18 | Active vibration isolation system and equipment based on pressure valve and flow valve |
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| Publication Number | Publication Date |
|---|---|
| CN117869521A true CN117869521A (en) | 2024-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410181403.4A Pending CN117869521A (en) | 2024-02-18 | 2024-02-18 | Active vibration isolation system and equipment based on pressure valve and flow valve |
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| Country | Link |
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| CN (1) | CN117869521A (en) |
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- 2024-02-18 CN CN202410181403.4A patent/CN117869521A/en active Pending
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