CN117867643A - Seismic processing method, seismic processing device, electronic equipment and storage medium - Google Patents

Seismic processing method, seismic processing device, electronic equipment and storage medium Download PDF

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Publication number
CN117867643A
CN117867643A CN202211190474.8A CN202211190474A CN117867643A CN 117867643 A CN117867643 A CN 117867643A CN 202211190474 A CN202211190474 A CN 202211190474A CN 117867643 A CN117867643 A CN 117867643A
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crystal
seismic
processing
determining
state
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Inventor
李羊飞
张伟建
刘永生
武高峰
张威
周宏坤
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Longi Green Energy Technology Co Ltd
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Longi Green Energy Technology Co Ltd
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Priority to CN202211190474.8A priority Critical patent/CN117867643A/en
Publication of CN117867643A publication Critical patent/CN117867643A/en
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The embodiment of the invention provides a seismic processing method, a seismic processing device, seismic processing equipment and a seismic processing medium. The method comprises the following steps: detecting crystal arcing conditions of a plurality of Czochralski single crystal devices, determining seismic events according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, and executing corresponding seismic exception handling on the plurality of Czochralski single crystal devices according to the seismic events, so that the seismic events are automatically detected by using the crystal arcing conditions, the Czochralski single crystal devices are automatically controlled to take the seismic exception handling, damage to the devices and personnel is avoided, and loss caused by seismic disasters is reduced.

Description

Seismic processing method, seismic processing device, electronic equipment and storage medium
Technical Field
The present invention relates to the field of crystal preparation, and in particular, to a seismic processing method, a seismic processing apparatus, an electronic device, and a storage medium.
Background
The preparation process of the monocrystalline silicon material mainly comprises a Czochralski method (Czochralski process/CZ), and the polycrystalline silicon raw material is refined into monocrystalline silicon by the Czochralski method. The process of generating rod-shaped monocrystalline silicon crystals in the process of pulling up the monocrystalline comprises the steps of charging, heating and melting, temperature adjustment, seeding, shouldering, shoulder turning, constant diameter ending and the like.
When the polysilicon raw material is melted, seeding cannot be started immediately, and the temperature is higher than the seeding temperature, and the temperature must be adjusted to the seeding temperature through cooling. Seeding is a process in which a seed crystal (i.e., a shaped single crystal) previously loaded onto the end of a wire rope is brought into contact with a liquid surface, and silicon molecules are grown in the lattice direction of the seed crystal at a seeding temperature, thereby forming a single crystal. The shouldering is to gradually grow the crystal diameter to a required diameter, and a section of crystal with the diameter gradually becoming larger to the required diameter or so is pulled out along with the length gradually becoming longer in the shouldering process so as to eliminate crystal dislocation. After the crystal grows to the diameter required by production in the shouldering process, the crystal enters the shouldering process. The shoulder is to control the crystal diameter to the diameter required for production. And after the shoulder turning is finished, the step of equal diameter control is carried out, and in the step, the crystal is grown according to the set diameter equal diameter through automatic control of the pulling speed and the temperature. After the isodiametric growth is completed, the crystal enters a final process which is also used for eliminating dislocation. After finishing, the crystal growth is basically finished, and the crystal is kept in the silicon single crystal furnace for a certain time, so that the annealing of the crystal is finished.
Because of the numerous single crystal furnace tops, when earthquake events occur, the impact on all furnace tops is extremely huge, and the loss caused is extremely huge, especially in the process of gradually forming or extracting the crystal bar in the crystal pulling stage, serious people can cause personal injury besides equipment damage. The first thing to do when an earthquake occurs is to evacuate the personnel on site, and the second thing is to do the operation related to the furnace platform to stop the damage in time, but there is a great hysteresis.
Disclosure of Invention
In view of the foregoing, embodiments of the present invention are provided to provide a seismic processing method that overcomes the foregoing problems or at least partially solves the foregoing problems, so as to solve the problem that, when an earthquake occurs, the apparatus and even the person are damaged, and the damage cannot be timely stopped.
Correspondingly, the embodiment of the invention also provides a seismic processing device, electronic equipment and a storage medium, which are used for ensuring the realization and application of the method.
In order to solve the above problems, an embodiment of the present invention discloses a seismic processing method, including:
detecting the crystal arcing condition of a plurality of Czochralski crystal pulling devices;
determining a seismic event according to the crystal arcing conditions of the plurality of Czochralski crystal growing devices;
And executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices according to the seismic event.
Optionally, determining the seismic event according to the crystal arcing condition of the plurality of czochralski crystal growing apparatuses includes:
determining the equipment duty ratio of the straight-pulling single crystal equipment with crystal arc in the straight-pulling single crystal equipment in the equal diameter state according to the crystal arc conditions of the plurality of straight-pulling single crystal equipment;
and determining the seismic event according to the equipment duty ratio.
Optionally, the determining the seismic event according to the device duty cycle includes:
if the equipment duty cycle is between a first preset duty cycle and a second preset duty cycle, determining that the earthquake event occurs and the earthquake event is a slight earthquake event; the second preset duty cycle is greater than the first preset duty cycle;
and if the equipment duty ratio exceeds a second preset duty ratio, determining that the earthquake event occurs and the earthquake event is a severe earthquake event.
Optionally, the seismic event is a slight seismic event, and the performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event includes:
acquiring set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices;
Determining corresponding crystal bar rotating speed reduction processing according to the set crystal bar rotating speed for each Czochralski crystal pulling device;
and respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
Optionally, the seismic event is a severe seismic event, and the performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event includes:
acquiring the process step states of the plurality of Czochralski crystal growing apparatuses;
determining corresponding seismic anomaly processing according to the step state for each Czochralski single crystal pulling device;
and respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices.
Optionally, the determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling according to the step status includes:
if the step state is a first preset state, determining that the corresponding seismic anomaly processing comprises first motion control processing and/or first power control processing; the first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, a constant diameter state, a ending state, a crystal bar extracting state or a remelting state, and the first motion control processing comprises at least one of the following steps: the first power control process comprises adjusting the heater power to be the sum of seeding power and first preset power.
Optionally, the determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling according to the step status includes:
if the step state is the feeder feeding state, determining that the corresponding seismic anomaly processing comprises second motion control processing and/or second power control processing; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power;
if the working step state is that the charging bucket is lifted and the isolation valve is opened, determining that the corresponding earthquake abnormal processing comprises a third motion control processing and/or the second power control processing; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve;
if the working step state is that the charging bucket is lifted and the isolation valve is closed, determining that the corresponding seismic anomaly processing comprises the second power control processing;
and if the step state is a charging bucket presenting state, determining that the corresponding earthquake abnormal processing comprises the second power control processing.
The embodiment of the invention also discloses a seismic processing device, which comprises:
The condition detection module is used for detecting crystal arcing conditions of a plurality of straight pulling single crystal devices;
the event determining module is used for determining earthquake events according to the crystal arc-striking conditions of the plurality of Czochralski crystal pulling devices;
and the earthquake processing module is used for executing corresponding earthquake exception processing on the plurality of Czochralski crystal pulling devices according to the earthquake event.
Optionally, the event determination module includes:
a duty ratio determining submodule for determining the equipment duty ratio of the Czochralski single crystal equipment with crystal arcing in the Czochralski single crystal equipment in the constant diameter state according to the crystal arcing conditions of the plurality of Czochralski single crystal equipment;
and the event determination submodule is used for determining the seismic event according to the equipment duty ratio.
Optionally, the event determination submodule includes:
a slight event determining unit, configured to determine that the seismic event occurs if the equipment duty cycle is between a first preset duty cycle and a second preset duty cycle, where the seismic event is a slight seismic event; the second preset duty cycle is greater than the first preset duty cycle;
and the serious event determining unit is used for determining that the earthquake event occurs if the equipment duty ratio exceeds a second preset duty ratio, and the earthquake event is a serious earthquake event.
Optionally, the seismic event is a minor seismic event, and the seismic processing module includes:
the rotating speed acquisition submodule is used for acquiring the set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices;
a first process determining sub-module for determining a corresponding crystal bar rotation speed reduction process according to the set crystal bar rotation speed for each czochralski crystal pulling apparatus;
and the first processing execution submodule is used for respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
Optionally, the seismic event is a severe seismic event, and the seismic processing module includes:
a state acquisition sub-module for acquiring the process step states of the plurality of czochralski crystal growing apparatuses;
a second processing determination submodule for determining, for each czochralski single crystal apparatus, a corresponding seismic anomaly processing according to the step status;
and the second processing execution submodule is used for respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal pulling devices.
Optionally, the second process determines a sub-module comprising:
the first determining unit is used for determining that the corresponding earthquake abnormal processing comprises first motion control processing and/or first power control processing if the step state is a first preset state; the first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, a constant diameter state, a ending state, a crystal bar extracting state or a remelting state, and the first motion control processing comprises at least one of the following steps: the first power control process comprises adjusting the heater power to be the sum of seeding power and first preset power.
Optionally, the second process determines a sub-module comprising:
the second determining unit is used for determining that the corresponding earthquake abnormal processing comprises second motion control processing and/or second power control processing if the step state is the feeder feeding state; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power;
the third determining unit is used for determining that the corresponding earthquake abnormal processing comprises third motion control processing and/or the second power control processing if the working step state is a charging basket lifting state and an isolation valve opening state; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve;
a fourth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the step status is a charging basket lift-in and isolation valve closing status;
and a fifth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the step status is a bucket-proposed status.
The embodiment of the invention also discloses an electronic device which is characterized by comprising a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory are communicated with each other through the communication bus;
a memory for storing a computer program;
and a processor for performing the method steps described above when executing the program stored on the memory.
The embodiment of the invention also discloses a readable storage medium, which enables the electronic equipment to execute one or more of the earthquake processing methods in the embodiment of the invention when the instructions in the storage medium are executed by the processor of the electronic equipment.
The embodiment of the invention has the following advantages:
according to the embodiment of the invention, the earthquake event is determined according to the crystal arc conditions of the plurality of Czochralski single crystal devices by detecting the crystal arc conditions of the plurality of Czochralski single crystal devices, and the corresponding earthquake exception handling is executed for the plurality of Czochralski single crystal devices according to the earthquake event, so that the earthquake event is automatically detected by utilizing the crystal arc conditions, the Czochralski single crystal devices are automatically controlled to take the earthquake exception handling, the damage to the devices and personnel is avoided, and the loss caused by the earthquake disaster is reduced.
Drawings
FIG. 1 is a flow chart of steps of an embodiment of a seismic processing method of the invention;
FIG. 2 is a flow chart of steps of an embodiment of a seismic processing method of the invention;
FIG. 3 is a schematic illustration of an automated process flow during a light earthquake;
FIG. 4 is a schematic diagram of an automated process flow during severe earthquakes;
FIG. 5 is a block diagram of an embodiment of a seismic processing device of the invention;
FIG. 6 is a block diagram illustrating a computing device for seismic processing according to an example embodiment.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1, a flowchart illustrating steps of an embodiment of a seismic processing method according to the present invention may specifically include the following steps:
step 101, detecting crystal arcing conditions of a plurality of Czochralski crystal growing apparatuses.
In the embodiment of the present invention, the Czochralski process is a process of pulling a raw material into a single crystal using a Czochralski method, for example, a process of Czochralski silicon. The process of pulling up single crystals can be divided into a charging stage, a melting stage, a temperature adjusting stage, a seeding stage and the like.
In an embodiment of the present invention, the Czochralski crystal apparatus is an apparatus for Czochralski single crystal, such as a single crystal furnace for Czochralski single crystal silicon. The crystal arcing refers to the phenomenon of crystal swing in the process of pulling a single crystal, is an abnormal phenomenon frequently occurring in the process of pulling the single crystal, influences the normal growth of the single crystal, and causes the increase of the production cost of the single crystal, and from the aspect of a growth mechanism, the crystal swing can cause the change of the liquid level temperature, and the stability of a solid-liquid interface is disturbed, so that the quality of the single crystal and the dislocation-free growth are influenced. In terms of operational control, the crystal oscillation can make diameter control difficult and also not conducive to automatic control during isodiametric growth, resulting in a relatively prolonged production cycle and thus increased production costs.
For a large scale production unit, the number of Czochralski single crystal apparatus is relatively large, and the occurrence of crystal arcing of individual Czochralski single crystal apparatus is normal, but is relatively abnormal if a large number of Czochralski single crystal apparatus are involved, and is most likely to be caused by an earthquake.
In the embodiment of the present invention, the detection of the crystal arcing condition of a single czochralski single crystal apparatus may detect the position of the ingot by using a CCD (Charge Coupled Device ) machine vision system, and if the position of the ingot swings and the swing amplitude exceeds a set threshold, determine that the crystal arcing condition of the czochralski single crystal apparatus occurs, or any other suitable implementation manner, and the embodiment of the present invention is not limited thereto. The crystal arcing condition may be divided into two conditions, i.e. a condition in which crystal arcing occurs and a condition in which crystal arcing does not occur, or the condition in which crystal arcing is seen may be subdivided into various degrees of arcing, or any other suitable condition, which is not limited in the embodiments of the present invention.
In the embodiment of the invention, a plurality of Czochralski single crystal devices are detected respectively to obtain the crystal arcing condition of the plurality of Czochralski single crystal devices. For example, each Czochralski single crystal apparatus detects a crystal arcing condition, and reports the crystal arcing condition to the emergency central control platform, from which the earthquake is detected.
And 102, determining a seismic event according to the crystal arc striking conditions of the plurality of Czochralski crystal growing devices.
In the embodiment of the present invention, the seismic event refers to an event in which an earthquake occurs, and the seismic event may be further divided into a slight seismic event, a severe seismic event, etc., or any other suitable seismic event, which is not limited in the embodiment of the present invention.
In the embodiment of the invention, if a certain number of devices in the plurality of Czochralski single crystal devices are likely to be caused by an earthquake, whether the earthquake occurs or not can be reliably determined or the severity of the earthquake can also be determined according to the crystal arcing condition of the plurality of Czochralski single crystal devices.
In the embodiment of the invention, the specific implementation manner for determining the seismic event can comprise a plurality of types according to the crystal arc-striking conditions of the plurality of czochralski crystal devices. For example, a device duty ratio of a single crystal pulling device in which crystal arcing occurs simultaneously in the single crystal pulling device in an isodiametric state is determined from crystal arcing conditions of a plurality of single crystal pulling devices, and a seismic event is determined from the device duty ratio. For another example, the device duty ratio of the Czochralski single crystal device in which crystal arcing occurs simultaneously in the Czochralski single crystal device in the isodiametric state is determined based on the crystal arcing conditions of the plurality of Czochralski single crystal devices, the crystal arcing conditions further including data relating to the crystal arcing, e.g., data describing the extent of the crystal arcing, etc., and the seismic event is determined in combination with the device duty ratio and the data relating to the crystal arcing. And in particular may comprise any suitable implementation, to which embodiments of the invention are not limited.
And step 103, executing corresponding seismic anomaly processing on the plurality of Czochralski crystal pulling devices according to the seismic event.
In the embodiment of the invention, after the earthquake event is detected, corresponding earthquake exception processing is automatically executed on a plurality of Czochralski single crystal devices. The earthquake anomaly processing refers to one or a series of processing automatically executed when an earthquake occurs, which is set in advance. For example, the step of the Czochralski crystal growing apparatus is switched to an abnormality processing step, a decrease in the rotation speed of the ingot, a setting of the heater power, a decrease in the rotation speed of the crucible, or any other suitable process, to which the embodiment of the present invention is not limited.
In the embodiment of the invention, if the seismic event is divided into a plurality of seismic events, corresponding seismic exception processing can be preset for each seismic event, so that appropriate processing is adopted for different seismic events.
In addition, in addition to determining the seismic event in the above manner, an externally notified seismic event may be received, or a manually submitted seismic event may be determined, or other information such as the extent of the seismic event may be determined in any other suitable manner. The control system can control the plurality of Czochralski crystal growing apparatuses to automatically execute corresponding seismic anomaly processing according to the seismic anomaly processing.
In the embodiment of the invention, the process steps of the plurality of Czochralski crystal growing apparatuses may be different, for example, some Czochralski crystal growing apparatuses are in a seeding state, some Czochralski crystal growing apparatuses are in a feeder feeding state, some Czochralski crystal growing apparatuses are in a charging bucket lifting state, etc. For each step state of the Czochralski crystal growing apparatus, the corresponding seismic anomaly processing may be preset, so that appropriate processing is adopted for different step states.
In the embodiment of the invention, after the earthquake exception handling is determined, a plurality of Czochralski crystal devices are respectively controlled to execute the corresponding earthquake exception handling, so that the earthquake event is automatically detected in the Czochralski crystal process, and the Czochralski crystal devices can automatically perform the earthquake exception handling.
According to the embodiment of the invention, the earthquake event is determined according to the crystal arc conditions of the plurality of Czochralski single crystal devices by detecting the crystal arc conditions of the plurality of Czochralski single crystal devices, and the corresponding earthquake exception handling is executed for the plurality of Czochralski single crystal devices according to the earthquake event, so that the earthquake event is automatically detected by utilizing the crystal arc conditions, the Czochralski single crystal devices are automatically controlled to take the earthquake exception handling, the damage to the devices and personnel is avoided, and the loss caused by the earthquake disaster is reduced.
Referring to fig. 2, a flowchart illustrating steps of an embodiment of a seismic processing method according to the present invention may specifically include the steps of:
step 201, detecting a crystal arcing condition of a plurality of Czochralski crystal growing apparatuses.
In the embodiments of the present invention, the specific implementation manner of this step may be referred to the description in the foregoing embodiments, which is not repeated herein.
Step 202, determining the equipment duty ratio of the Czochralski single crystal equipment with the crystal arcing in the Czochralski single crystal equipment in the constant diameter state according to the crystal arcing conditions of the plurality of Czochralski single crystal equipment.
In embodiments of the present invention, during pulling of a single crystal, crystal arcing begins to occur after the crystal is pulled from the single crystal pulling apparatus. Czochralski crystal apparatus in an isodiametric state are generally in a stable crystal-producing stage during which crystal arcing may occur. The method comprises the steps of firstly obtaining the number of the Czochralski single crystal devices in an equal diameter state, and then determining the device duty ratio of the Czochralski single crystal devices with crystal arcs in the Czochralski single crystal devices in the equal diameter state according to the crystal arc-striking conditions of the Czochralski single crystal devices.
And step 203, determining the seismic event according to the equipment duty ratio.
In embodiments of the present invention, a seismic event may be determined based on the determined device duty cycle. For example, if the device duty cycle exceeds 50%, it is determined that a seismic event has occurred.
In an alternative embodiment of the present invention, determining a specific implementation of the seismic event according to the device duty cycle may include: and if the equipment duty ratio is between a first preset duty ratio and a second preset duty ratio, determining that the earthquake event occurs and the earthquake event is a slight earthquake event, and if the equipment duty ratio exceeds the second preset duty ratio, determining that the earthquake event occurs and the earthquake event is a serious earthquake event. The second preset duty cycle is greater than the first preset duty cycle.
The device duty cycle reaches a first preset duty cycle and it may be determined that a seismic event has occurred. The first preset duty cycle may be set to any suitable preset value, which is not limited in this embodiment of the present invention. If the device duty cycle is between the first preset duty cycle and the second preset duty cycle, the seismic event is determined to be a minor seismic event, because the device duty cycle is relatively smaller at the minor seismic event compared to the severe seismic event.
And if the equipment duty ratio exceeds the second preset duty ratio, determining that the seismic event is a severe seismic event.
According to the equipment duty ratio, not only can whether the earthquake happens or not be detected, but also the intensity of the earthquake event can be detected, so that the earthquake event is finely divided.
And 204, executing corresponding seismic anomaly processing on the plurality of Czochralski crystal pulling devices according to the seismic event.
In an optional embodiment of the present invention, the seismic event is a slight seismic event, and in a specific implementation manner of performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event, the method may include: acquiring set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices; determining corresponding crystal bar rotating speed reduction processing according to the set crystal bar rotating speed for each Czochralski crystal pulling device; and respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
After the slight earthquake event is determined, presetting the earthquake abnormality corresponding to the slight earthquake event as crystal bar rotation speed reduction processing. In the specific implementation, a set crystal bar rotating speed is acquired for each Czochralski crystal pulling device, and then corresponding crystal bar rotating speed reduction processing is determined according to the set crystal bar rotating speed. For example, a schematic diagram of an automated process flow at the time of a light earthquake as shown in fig. 3. If the set crystal bar rotating speed is smaller than the set rotating speed threshold value X, determining that the corresponding crystal bar rotating speed reduction processing is that the crystal bar rotating speed is reduced to zero. If the set ingot rotation speed is not smaller than the set rotation speed threshold value X, the corresponding ingot rotation speed reduction processing is determined to reduce the set rotation speed Y on the basis of the current ingot rotation speed.
When a slight earthquake happens, the rotating speed of the crystal bar is automatically reduced, the amplitude of crystal arcing can be reduced, the influence of the crystal arcing on the aspects of single crystal growth and operation control is reduced, the failure rate of products caused by the crystal arcing is reduced, the product quality is ensured, and the loss is reduced.
In an optional embodiment of the present invention, the seismic event is a severe seismic event, and in a specific implementation manner of performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event, the method may include: acquiring the process step states of the plurality of Czochralski crystal growing apparatuses; determining corresponding seismic anomaly processing according to the step state for each Czochralski single crystal pulling device; and respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices.
When a severe seismic event occurs, corresponding seismic anomaly handling is preset. For severe seismic events, it is necessary to set in advance seismic anomaly handling compatible with the step state of the czochralski crystal growing apparatus.
Wherein the step state refers to the step in which the Czochralski crystal growing apparatus is located. The process step state may include a seeding state, a shouldering state, a shoulder turning state, an equal diameter state, a ending state, a crystal bar pulling state, a reflow state, a feeder charging state, a charging barrel pulling and isolating valve opening state, a charging barrel pulling and isolating valve closing state, a charging barrel pulling state, etc., or any other suitable state, which the embodiments of the present invention are not limited to. The corresponding seismic anomaly handling preset for each step state can be set according to actual needs, and the embodiment of the invention is not limited to this.
According to the step states of each Czochralski single crystal device, corresponding seismic anomaly processing is determined, and corresponding seismic anomaly processing is executed for each Czochralski single crystal device, so that adaptive seismic anomaly processing is adopted for the Czochralski single crystal device in different step states in a targeted manner, damage to the device and personnel is avoided, and loss caused by seismic disasters is reduced.
In an optional embodiment of the present invention, the determining, for each czochralski crystal growing apparatus, a specific implementation manner of the corresponding seismic anomaly processing according to the step status may include: if the step state is a first preset state, determining that the corresponding seismic anomaly processing comprises first motion control processing and/or first power control processing.
The first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, an equal diameter state, a ending state, a crystal bar lifting state or a remelting state. When the step state is a first preset state, the corresponding earthquake abnormal processing comprises first motion control processing, first power control processing, or first motion control processing and first power control processing. A schematic diagram of the automatic processing flow in severe earthquakes is shown in fig. 4.
Wherein the first motion control process is a process related to motion control in a Czochralski single crystal apparatus. The first motion control process includes at least one of: a crystal bar rotation speed reduction process, a crucible rotation speed reduction process, a crystal bar lifting process and a crucible descending process. The ingot rotation speed reduction process is a process of reducing the ingot rotation speed. For example, the ingot rotation speed is reduced to the a rotation speed during the T1 time. The crucible rotation speed reduction process is a process of reducing the crucible rotation speed. For example, the crucible rotation speed is reduced to the B rotation speed in the T2 time. The ingot lifting process is a process of lifting an ingot. For example, the ingot lifting speed is set to C speed. The crucible lowering process is a process of lowering the crucible. For example, the crucible lowering speed is set to D speed, and the crucible is automatically lowered by E distance. Through the first motion control processing, the influence of the earthquake on production safety can be reduced, the damage to equipment and human bodies is avoided, and the loss is reduced.
Wherein the first power control process is a process related to power control in a Czochralski single crystal apparatus. The first power control process includes adjusting the heater power to a sum of the seeding power and a first preset power. The first preset power may be set to any suitable power, which is not limited in the embodiment of the present invention. For example, the heater power is changed to seeding power + XKw. The heater power is kept at the sum of the seeding power and the first preset power, and can be the raw material is kept in a molten state, so that the raw material is prevented from crystallizing in the crucible and damaging equipment.
In an optional embodiment of the present invention, the determining, for each czochralski crystal growing apparatus, a specific implementation manner of the corresponding seismic anomaly processing according to the step status may include: if the step state is the feeder feeding state, determining that the corresponding seismic anomaly processing comprises second motion control processing and/or second power control processing; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power; if the working step state is that the charging bucket is lifted and the isolation valve is opened, determining that the corresponding earthquake abnormal processing comprises a third motion control processing and/or the second power control processing; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve; if the working step state is that the charging bucket is lifted and the isolation valve is closed, determining that the corresponding seismic anomaly processing comprises the second power control processing; and if the step state is a charging bucket presenting state, determining that the corresponding earthquake abnormal processing comprises the second power control processing.
The feeder is a component for feeding in the Czochralski single crystal apparatus, and the feeding state of the feeder means that the apparatus is in a state of feeding through the feeder. If the step state is the feeder feeding state, determining that the corresponding seismic anomaly processing includes a second motion control processing, or a second power control processing, or both the second motion control processing and the second power control processing.
Wherein the second motion control process is a process related to motion control in the Czochralski single crystal apparatus. The second motion control includes at least one of: stopping feeding and retreating the charging bucket to the rear limit position. The bucket is the container of loading in the feeder. The rear limit position is the limit position where the charging bucket can retract in the feeder. Through the second motion control processing, the influence of the earthquake on production safety can be reduced, the damage to equipment and human bodies is avoided, and the loss is reduced.
Wherein the second power control process is a process related to power control in the Czochralski crystal growing apparatus. The second power control process includes adjusting the heater power to a sum of the seeding power and a second preset power. The second preset power may be set to any suitable power, which is not limited in the embodiment of the present invention. For example, the heater power is changed to seeding power + YKw. The heater power is kept at the sum of the seeding power and the second preset power, and can be the raw material is kept in a molten state, so that the raw material is prevented from crystallizing in the crucible and damaging equipment.
The charging basket is a part for charging in the Czochralski single crystal equipment, the charging basket is lifted in, the opening state of the isolation valve means that the equipment is in a position for charging through the charging basket, and the charging basket is lifted in a charging position, and the isolation valve is in an opening state. If the step state is the state that the charging bucket is lifted and the isolation valve is opened, determining that the corresponding earthquake abnormal processing comprises third motion control processing, second power control processing, third motion control processing and second power control processing.
Wherein the third motion control process is a process related to motion control in the Czochralski single crystal apparatus. The third motion control process includes at least one of: and (5) lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve. The auxiliary furnace chamber is a space in the vertical pulling single crystal equipment, and the charging barrel is arranged in the main furnace chamber, so that the charging barrel needs to be lifted to the lower edge of the auxiliary furnace chamber. Through the third motion control processing, the influence of the earthquake on production safety can be reduced, the damage to equipment and human bodies is avoided, and the loss is reduced.
If the step state is the charging bucket lifting and isolation valve closing state, determining that the corresponding earthquake abnormal processing comprises the second power control processing.
If the step state is the bucket set-up state, determining that the corresponding seismic anomaly processing includes the second power control processing.
According to the embodiment of the invention, the device proportion of the Czochralski single crystal devices with crystal arcs in the equal-diameter state is determined according to the crystal arc conditions of the Czochralski single crystal devices by detecting the crystal arc conditions of the Czochralski single crystal devices, the earthquake event is determined according to the device proportion, and the corresponding earthquake abnormal processing is executed on the Czochralski single crystal devices according to the earthquake event, so that the earthquake event is automatically detected by using the crystal arc conditions, the Czochralski single crystal devices are automatically controlled to take the earthquake abnormal processing, the damage to the devices and personnel is avoided, and the loss caused by the earthquake disaster is reduced.
According to the embodiment of the invention, the earthquake event is determined according to the crystal arc conditions of the plurality of Czochralski single crystal devices by detecting the crystal arc conditions of the plurality of Czochralski single crystal devices, and the corresponding earthquake exception handling is executed for the plurality of Czochralski single crystal devices according to the earthquake event, so that the earthquake event is automatically detected by utilizing the crystal arc conditions, the Czochralski single crystal devices are automatically controlled to take the earthquake exception handling, the damage to the devices and personnel is avoided, and the loss caused by the earthquake disaster is reduced.
It should be noted that, for simplicity of description, the method embodiments are shown as a series of acts, but it should be understood by those skilled in the art that the embodiments are not limited by the order of acts, as some steps may occur in other orders or concurrently in accordance with the embodiments. Further, those skilled in the art will appreciate that the embodiments described in the specification are presently preferred embodiments, and that the acts are not necessarily required by the embodiments of the invention.
Referring to fig. 5, a block diagram of an embodiment of a seismic processing device according to the present invention is shown, and may specifically include the following modules:
a condition detection module 301, configured to detect crystal arcing conditions of a plurality of czochralski crystal growing apparatuses;
an event determining module 302, configured to determine a seismic event according to crystal arcing conditions of the plurality of czochralski crystal growing apparatuses;
and the seismic processing module 303 is configured to execute corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event.
Optionally, the event determination module includes:
a duty ratio determining submodule for determining the equipment duty ratio of the Czochralski single crystal equipment with crystal arcing in the Czochralski single crystal equipment in the constant diameter state according to the crystal arcing conditions of the plurality of Czochralski single crystal equipment;
And the event determination submodule is used for determining the seismic event according to the equipment duty ratio.
Optionally, the event determination submodule includes:
a slight event determining unit, configured to determine that the seismic event occurs if the equipment duty cycle is between a first preset duty cycle and a second preset duty cycle, where the seismic event is a slight seismic event; the second preset duty cycle is greater than the first preset duty cycle;
and the serious event determining unit is used for determining that the earthquake event occurs if the equipment duty ratio exceeds a second preset duty ratio, and the earthquake event is a serious earthquake event.
Optionally, the seismic event is a minor seismic event, and the seismic processing module includes:
the rotating speed acquisition submodule is used for acquiring the set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices;
a first process determining sub-module for determining a corresponding crystal bar rotation speed reduction process according to the set crystal bar rotation speed for each czochralski crystal pulling apparatus;
and the first processing execution submodule is used for respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
Optionally, the seismic event is a severe seismic event, and the seismic processing module includes:
A state acquisition sub-module for acquiring the process step states of the plurality of czochralski crystal growing apparatuses;
a second processing determination submodule for determining, for each czochralski single crystal apparatus, a corresponding seismic anomaly processing according to the step status;
and the second processing execution submodule is used for respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal pulling devices.
Optionally, the second process determines a sub-module comprising:
the first determining unit is used for determining that the corresponding earthquake abnormal processing comprises first motion control processing and/or first power control processing if the step state is a first preset state; the first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, a constant diameter state, a ending state, a crystal bar extracting state or a remelting state, and the first motion control processing comprises at least one of the following steps: the first power control process comprises adjusting the heater power to be the sum of seeding power and first preset power.
Optionally, the second process determines a sub-module comprising:
The second determining unit is used for determining that the corresponding earthquake abnormal processing comprises second motion control processing and/or second power control processing if the step state is the feeder feeding state; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power;
the third determining unit is used for determining that the corresponding earthquake abnormal processing comprises third motion control processing and/or the second power control processing if the working step state is a charging basket lifting state and an isolation valve opening state; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve;
a fourth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the step status is a charging basket lift-in and isolation valve closing status;
and a fifth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the step status is a bucket-proposed status.
For the device embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and reference is made to the description of the method embodiments for relevant points.
Fig. 6 is a block diagram of an electronic device 400 for seismic processing, according to an example embodiment. For example, electronic device 400 may be a mobile phone, computer, digital broadcast terminal, messaging device, game console, tablet device, medical device, exercise device, personal digital assistant, or the like.
Referring to fig. 6, electronic device 400 may include one or more of the following components: a processing component 402, a memory 404, a power supply component 406, a multimedia component 408, an audio component 410, an input/output (I/O) interface 412, a sensor component 414, and a communication component 416.
The processing component 402 generally controls overall operation of the electronic device 400, such as operations associated with display, telephone calls, data communications, camera operations, and recording operations. The processing component 402 may include one or more processors 420 to execute instructions to perform all or part of the steps of the seismic processing method described above. Further, the processing component 402 can include one or more modules that facilitate interaction between the processing component 402 and other components. For example, the processing component 402 may include a multimedia module to facilitate interaction between the multimedia component 408 and the processing component 402.
Memory 404 is configured to store various types of data to support operations at device 400. Examples of such data include instructions for any application or method operating on electronic device 400, contact data, phonebook data, messages, pictures, videos, and the like. The memory 404 may be implemented by any type or combination of volatile or nonvolatile memory devices such as Static Random Access Memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, magnetic or optical disk.
The power component 404 provides power to the various components of the electronic device 400. Power component 404 can include a power management system, one or more power sources, and other components associated with generating, managing, and distributing power for electronic device 400.
The multimedia component 408 includes a screen between the electronic device 400 and the user that provides an output interface. In some embodiments, the screen may include a Liquid Crystal Display (LCD) and a Touch Panel (TP). If the screen includes a touch panel, the screen may be implemented as a touch screen to receive input signals from a user. The touch panel includes one or more touch sensors to sense touches, swipes, and gestures on the touch panel. The touch sensor may sense not only the boundary of a touch or slide action, but also the duration and pressure associated with the touch or slide operation. In some embodiments, the multimedia component 408 includes a front camera and/or a rear camera. When the electronic device 400 is in an operational mode, such as a shooting mode or a video mode, the front-facing camera and/or the rear-facing camera may receive external multimedia data. Each front camera and rear camera may be a fixed optical lens system or have focal length and optical zoom capabilities.
The audio component 410 is configured to output and/or input audio signals. For example, the audio component 410 includes a Microphone (MIC) configured to receive external audio signals when the electronic device 400 is in an operational mode, such as a call mode, a recording mode, and a voice recognition mode. The received audio signals may be further stored in the memory 404 or transmitted via the communication component 416. In some embodiments, audio component 410 further includes a speaker for outputting audio signals.
The I/O interface 412 provides an interface between the processing component 402 and peripheral interface modules, which may be a keyboard, click wheel, buttons, etc. These buttons may include, but are not limited to: homepage button, volume button, start button, and lock button.
The sensor assembly 414 includes one or more sensors for providing status assessment of various aspects of the electronic device 400. For example, the sensor assembly 414 may detect an on/off state of the device 400, a relative positioning of components, such as a display and keypad of the electronic device 400, a change in position of the electronic device 400 or a component of the electronic device 400, the presence or absence of a user's contact with the electronic device 400, an orientation or acceleration/deceleration of the electronic device 400, and a change in temperature of the electronic device 400. The sensor assembly 414 may include a proximity sensor configured to detect the presence of nearby objects in the absence of any physical contact. The sensor assembly 414 may also include a light sensor, such as a CMOS or CCD image sensor, for use in imaging applications. In some embodiments, the sensor assembly 414 may also include an acceleration sensor, a gyroscopic sensor, a magnetic sensor, a pressure sensor, or a temperature sensor.
The communication component 416 is configured to facilitate communication between the electronic device 400 and other devices, either wired or wireless. The electronic device 400 may access a wireless network based on a communication standard, such as WiFi,2G, or 3G, or a combination thereof. In one exemplary embodiment, the communication part 414 receives a broadcast signal or broadcast-related information from an external broadcast management system via a broadcast channel. In an exemplary embodiment, the communication component 414 further includes a Near Field Communication (NFC) module to facilitate short range communications. For example, the NFC module may be implemented based on Radio Frequency Identification (RFID) technology, infrared data association (IrDA) technology, ultra Wideband (UWB) technology, bluetooth (BT) technology, and other technologies.
In an exemplary embodiment, the electronic device 400 may be implemented by one or more Application Specific Integrated Circuits (ASICs), digital Signal Processors (DSPs), digital Signal Processing Devices (DSPDs), programmable Logic Devices (PLDs), field Programmable Gate Arrays (FPGAs), controllers, microcontrollers, microprocessors, or other electronic elements for performing the above-described seismic processing methods.
In an exemplary embodiment, a non-transitory computer readable storage medium is also provided, such as memory 404, that includes instructions executable by processor 420 of electronic device 400 to perform the above-described seismic processing method. For example, the non-transitory computer readable storage medium may be ROM, random Access Memory (RAM), CD-ROM, magnetic tape, floppy disk, optical data storage device, etc.
A non-transitory computer readable storage medium, which when executed by a processor of a terminal, causes the terminal to perform a method of seismic processing, the method comprising:
detecting the crystal arcing condition of a plurality of Czochralski crystal pulling devices;
determining a seismic event according to the crystal arcing conditions of the plurality of Czochralski crystal growing devices;
and executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices according to the seismic event.
Optionally, determining the seismic event according to the crystal arcing condition of the plurality of czochralski crystal growing apparatuses includes:
determining the equipment duty ratio of the straight-pulling single crystal equipment with crystal arc in the straight-pulling single crystal equipment in the equal diameter state according to the crystal arc conditions of the plurality of straight-pulling single crystal equipment;
and determining the seismic event according to the equipment duty ratio.
Optionally, the determining the seismic event according to the device duty cycle includes:
if the equipment duty cycle is between a first preset duty cycle and a second preset duty cycle, determining that the earthquake event occurs and the earthquake event is a slight earthquake event; the second preset duty cycle is greater than the first preset duty cycle;
And if the equipment duty ratio exceeds a second preset duty ratio, determining that the earthquake event occurs and the earthquake event is a severe earthquake event.
Optionally, the seismic event is a slight seismic event, and the performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event includes:
acquiring set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices;
determining corresponding crystal bar rotating speed reduction processing according to the set crystal bar rotating speed for each Czochralski crystal pulling device;
and respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
Optionally, the seismic event is a severe seismic event, and the performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices according to the seismic event includes:
acquiring the process step states of the plurality of Czochralski crystal growing apparatuses;
determining corresponding seismic anomaly processing according to the step state for each Czochralski single crystal pulling device;
and respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices.
Optionally, the determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling according to the step status includes:
If the step state is a first preset state, determining that the corresponding seismic anomaly processing comprises first motion control processing and/or first power control processing; the first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, a constant diameter state, a ending state, a crystal bar extracting state or a remelting state, and the first motion control processing comprises at least one of the following steps: the first power control process comprises adjusting the heater power to be the sum of seeding power and first preset power.
Optionally, the determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling according to the step status includes:
if the step state is the feeder feeding state, determining that the corresponding seismic anomaly processing comprises second motion control processing and/or second power control processing; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power;
If the working step state is that the charging bucket is lifted and the isolation valve is opened, determining that the corresponding earthquake abnormal processing comprises a third motion control processing and/or the second power control processing; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve;
if the working step state is that the charging bucket is lifted and the isolation valve is closed, determining that the corresponding seismic anomaly processing comprises the second power control processing;
and if the step state is a charging bucket presenting state, determining that the corresponding earthquake abnormal processing comprises the second power control processing.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described by differences from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other.
It will be apparent to those skilled in the art that embodiments of the present invention may be provided as a method, apparatus, or computer program product. Accordingly, embodiments of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, embodiments of the invention may take the form of a computer program product on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.
Embodiments of the present invention are described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or terminal device comprising the element.
The foregoing has described in detail a seismic processing method and apparatus, an electronic device and a readable storage medium, wherein specific examples are provided herein to illustrate the principles and embodiments of the present invention, and the above examples are provided to assist in understanding the methods and core concepts of the present invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.

Claims (10)

1. A method of seismic processing comprising:
detecting the crystal arcing condition of a plurality of Czochralski crystal pulling devices;
determining a seismic event according to the crystal arcing conditions of the plurality of Czochralski crystal growing devices;
and executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices according to the seismic event.
2. The method of claim 1, wherein determining a seismic event based on crystal arcing conditions of the plurality of czochralski crystal growing apparatuses comprises:
determining the equipment duty ratio of the straight-pulling single crystal equipment with crystal arc in the straight-pulling single crystal equipment in the equal diameter state according to the crystal arc conditions of the plurality of straight-pulling single crystal equipment;
And determining the seismic event according to the equipment duty ratio.
3. The method of claim 2, wherein the determining the seismic event from the device duty cycle comprises:
if the equipment duty cycle is between a first preset duty cycle and a second preset duty cycle, determining that the earthquake event occurs and the earthquake event is a slight earthquake event; the second preset duty cycle is greater than the first preset duty cycle;
and if the equipment duty ratio exceeds a second preset duty ratio, determining that the earthquake event occurs and the earthquake event is a severe earthquake event.
4. The method of claim 1, wherein the seismic event is a minor seismic event, the performing corresponding seismic anomaly processing on the plurality of czochralski single crystal devices based on the seismic event comprising:
acquiring set crystal bar rotating speeds of the plurality of Czochralski crystal pulling devices;
determining corresponding crystal bar rotating speed reduction processing according to the set crystal bar rotating speed for each Czochralski crystal pulling device;
and respectively executing corresponding crystal bar rotating speed reduction processing on the plurality of Czochralski crystal pulling devices.
5. The method of claim 1, wherein the seismic event is a severe seismic event, the performing corresponding seismic anomaly processing on the plurality of czochralski crystal devices based on the seismic event comprising:
Acquiring the process step states of the plurality of Czochralski crystal growing apparatuses;
determining corresponding seismic anomaly processing according to the step state for each Czochralski single crystal pulling device;
and respectively executing corresponding seismic anomaly processing on the plurality of Czochralski crystal devices.
6. The method of claim 5, wherein said determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling based on the step status comprises:
if the step state is a first preset state, determining that the corresponding seismic anomaly processing comprises first motion control processing and/or first power control processing; the first preset state comprises a seeding state, a shouldering state, a shoulder rotating state, a constant diameter state, a ending state, a crystal bar extracting state or a remelting state, and the first motion control processing comprises at least one of the following steps: the first power control process comprises adjusting the heater power to be the sum of seeding power and first preset power.
7. The method of claim 5, wherein said determining, for each czochralski crystal growing apparatus, a corresponding seismic anomaly handling based on the step status comprises:
If the step state is the feeder feeding state, determining that the corresponding seismic anomaly processing comprises second motion control processing and/or second power control processing; wherein the second motion control comprises at least one of: stopping feeding and retreating the charging bucket to a rear limit position; the second power control process comprises the step of adjusting the power of the heater to be the sum of the seeding power and a second preset power;
if the working step state is that the charging bucket is lifted and the isolation valve is opened, determining that the corresponding earthquake abnormal processing comprises a third motion control processing and/or the second power control processing; wherein the third motion control process includes at least one of: lifting the charging basket to the lower edge of the auxiliary furnace chamber, and closing the isolating valve;
if the working step state is that the charging bucket is lifted and the isolation valve is closed, determining that the corresponding seismic anomaly processing comprises the second power control processing;
and if the step state is a charging bucket presenting state, determining that the corresponding earthquake abnormal processing comprises the second power control processing.
8. A seismic processing device, comprising:
the condition detection module is used for detecting crystal arcing conditions of a plurality of straight pulling single crystal devices;
The event determining module is used for determining earthquake events according to the crystal arc-striking conditions of the plurality of Czochralski crystal pulling devices;
and the earthquake processing module is used for executing corresponding earthquake exception processing on the plurality of Czochralski crystal pulling devices according to the earthquake event.
9. The electronic equipment is characterized by comprising a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory are communicated with each other through the communication bus;
a memory for storing a computer program;
a processor for carrying out the method steps of any one of claims 1-7 when executing a program stored on a memory.
10. A readable storage medium, characterized in that instructions in the storage medium, when executed by a processor of an electronic device, enable the electronic device to perform the seismic processing method according to one or more of the method claims 1-7.
CN202211190474.8A 2022-09-28 2022-09-28 Seismic processing method, seismic processing device, electronic equipment and storage medium Pending CN117867643A (en)

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