CN117867643A - Earthquake processing method, device, electronic equipment and storage medium - Google Patents

Earthquake processing method, device, electronic equipment and storage medium Download PDF

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CN117867643A
CN117867643A CN202211190474.8A CN202211190474A CN117867643A CN 117867643 A CN117867643 A CN 117867643A CN 202211190474 A CN202211190474 A CN 202211190474A CN 117867643 A CN117867643 A CN 117867643A
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processing
single crystal
earthquake
state
seismic
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李羊飞
张伟建
刘永生
武高峰
张威
周宏坤
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Longi Green Energy Technology Co Ltd
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Longi Green Energy Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

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  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The embodiment of the invention provides a seismic processing method, a seismic processing device, seismic processing equipment and a seismic processing medium. The method comprises the following steps: detecting crystal arcing conditions of a plurality of Czochralski single crystal devices, determining seismic events according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, and executing corresponding seismic exception handling on the plurality of Czochralski single crystal devices according to the seismic events, so that the seismic events are automatically detected by using the crystal arcing conditions, the Czochralski single crystal devices are automatically controlled to take the seismic exception handling, damage to the devices and personnel is avoided, and loss caused by seismic disasters is reduced.

Description

地震处理方法、装置、电子设备及存储介质Earthquake processing method, device, electronic equipment and storage medium

技术领域Technical Field

本发明涉及晶体制备技术领域,特别是涉及一种地震处理方法、一种地震处理装置、一种电子设备以及一种存储介质。The present invention relates to the technical field of crystal preparation, and in particular to a seismic processing method, a seismic processing device, an electronic device and a storage medium.

背景技术Background technique

单晶硅材料的制备工艺以直拉法(Czochralski process/CZ)为主,利用直拉法将多晶硅原料提炼成单晶硅。在直拉单晶过程中生成棒状单晶硅晶体的过程分为装料、加热熔料、调温、引晶、放肩、转肩、等径、收尾等步骤。The preparation process of single crystal silicon materials is mainly based on the Czochralski process (CZ), which uses the CZ process to refine polysilicon raw materials into single crystal silicon. The process of generating rod-shaped single crystal silicon crystals in the CZ process is divided into the steps of loading, heating melt, temperature adjustment, seeding, shoulder release, shoulder rotation, equal diameter, and finishing.

其中,当多晶硅原料融化完成后,还不能马上开始引晶,因为这时的温度要高于引晶温度,还必须经过降温,将温度调整到引晶的温度。引晶是将事先装到钢丝绳末端的籽晶(也就是加工成一定形状的单晶)与液面接触,在引晶温度下,硅分子将沿着籽晶的晶格方向生长,从而形成单晶。放肩是将晶体直径逐步生长到生成所要求的直径,在放肩的过程中将拉出随着长度逐渐变长,直径逐渐变大到要求的直径左右的一段晶体,以便消除晶体位错。当晶体在放肩过程中生长到生产要求的直径后,进入转肩过程。转肩是将晶体直径控制在生产所要求的直径。当转肩完成后进入等径控制步骤,在该步骤中,通过对拉速和温度的自动控制,让晶体将按照设定的直径等径生长。晶体在完成等径生长后将进入收尾过程,收尾的过程也是为了消除位错。收尾完成后晶体生长基本完成,让晶体继续保留在硅单晶炉中一定的时间,从而完成晶体的退火。Among them, after the polysilicon raw material is melted, seeding cannot be started immediately, because the temperature at this time is higher than the seeding temperature, and it must be cooled down to adjust the temperature to the seeding temperature. Seeding is to contact the seed crystal (that is, a single crystal processed into a certain shape) installed at the end of the wire rope in advance with the liquid surface. At the seeding temperature, the silicon molecules will grow along the lattice direction of the seed crystal to form a single crystal. Shouldering is to gradually grow the crystal diameter to the required diameter for generation. During the shouldering process, a section of crystal will be pulled out with the length gradually increasing and the diameter gradually increasing to about the required diameter, so as to eliminate crystal dislocations. When the crystal grows to the diameter required for production during the shouldering process, it enters the shoulder turning process. Shoulder turning is to control the crystal diameter to the diameter required for production. After the shoulder turning is completed, it enters the equal diameter control step. In this step, the crystal will grow equal diameter according to the set diameter through automatic control of the pulling speed and temperature. After completing equal diameter growth, the crystal will enter the finishing process, and the finishing process is also to eliminate dislocations. After the finishing is completed, the crystal growth is basically completed, and the crystal is allowed to continue to remain in the silicon single crystal furnace for a certain period of time to complete the annealing of the crystal.

由于单晶炉台数量众多,发生地震事件时,对所有炉台都有影响,造成的损失是极其巨大的,尤其是在拉晶阶段晶棒逐渐成型或晶棒的提出过程中,严重者除了造成设备损坏还会造成人身伤害。地震发生时首先要做的是疏散现场人员,其次才是进行炉台相关操作以及时止损,但这样存在很大的滞后性。Due to the large number of single crystal furnaces, when an earthquake occurs, all furnaces are affected, causing huge losses, especially during the crystal pulling stage when the crystal rod is gradually formed or the crystal rod is taken out. In serious cases, in addition to equipment damage, personal injury may also occur. When an earthquake occurs, the first thing to do is to evacuate the on-site personnel, and then to perform furnace-related operations and stop losses in time, but this has a large lag.

发明内容Summary of the invention

鉴于上述问题,提出了本发明实施例以便提供一种克服上述问题或者至少部分地解决上述问题的一种地震处理方法,以解决地震发生时,对设备甚至人身造成伤害,无法及时止损的问题。In view of the above problems, an embodiment of the present invention is proposed to provide an earthquake processing method that overcomes the above problems or at least partially solves the above problems, so as to solve the problem that when an earthquake occurs, damage to equipment or even human beings cannot be stopped in time.

相应的,本发明实施例还提供了一种地震处理装置、一种电子设备以及一种存储介质,用以保证上述方法的实现及应用。Correspondingly, an embodiment of the present invention further provides a seismic processing device, an electronic device and a storage medium to ensure the implementation and application of the above method.

为了解决上述问题,本发明实施例公开了一种地震处理方法,包括:In order to solve the above problems, an embodiment of the present invention discloses a seismic processing method, comprising:

检测多个直拉单晶设备的晶体划弧情况;Detect crystal arcing in multiple CZ single crystal equipment;

根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;Determining a seismic event according to arcing conditions of crystals of the plurality of CZ single crystal devices;

根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。According to the seismic event, corresponding seismic anomaly processing is performed on the plurality of CZ single crystal devices.

可选地,所述根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,包括:Optionally, determining a seismic event according to arcing conditions of crystals of the plurality of CZ single crystal devices includes:

根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比;According to the crystal arcing conditions of the plurality of Czochralski single crystal devices, determining the equipment ratio of Czochralski single crystal devices having crystal arcing at the same time among the Czochralski single crystal devices in an equal diameter state;

根据所述设备占比,确定所述地震事件。The earthquake event is determined according to the equipment proportion.

可选地,所述根据所述设备占比,确定所述地震事件,包括:Optionally, determining the earthquake event according to the equipment proportion includes:

若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件;所述第二预设占比大于所述第一预设占比;If the device proportion is between the first preset proportion and the second preset proportion, it is determined that the earthquake event occurs and the earthquake event is a minor earthquake event; and the second preset proportion is greater than the first preset proportion;

若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。If the equipment proportion exceeds a second preset proportion, it is determined that the earthquake event has occurred and the earthquake event is a severe earthquake event.

可选地,所述地震事件为轻微地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:Optionally, the earthquake event is a minor earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event includes:

获取所述多个直拉单晶设备的设定晶棒转速;Obtaining the set crystal rod rotation speeds of the plurality of CZ single crystal devices;

针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;For each CZ single crystal device, according to the set crystal rod speed, a corresponding crystal rod speed reduction process is determined;

分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。The corresponding crystal rod rotation speed reduction processes are respectively performed on the plurality of Czochralski single crystal devices.

可选地,所述地震事件为严重地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:Optionally, the earthquake event is a severe earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event includes:

获取所述多个直拉单晶设备的工步状态;Obtaining the working step status of the plurality of CZ single crystal devices;

针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;For each CZ single crystal device, determine the corresponding earthquake anomaly processing according to the working step status;

分别对所述多个直拉单晶设备执行对应的地震异常处理。Corresponding earthquake anomaly processing is performed on the plurality of CZ single crystal devices respectively.

可选地,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:Optionally, for each CZ single crystal device, determining a corresponding seismic anomaly process according to the process step status includes:

若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理;其中,所述第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态,所述第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理,所述第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。If the process step state is the first preset state, it is determined that the corresponding seismic anomaly processing includes the first motion control processing and/or the first power control processing; wherein, the first preset state includes the crystal induction state, or the shoulder release state, or the shoulder rotation state, or the equal diameter state, or the ending state, or the crystal rod lifting state, or the remelting state, the first motion control processing includes at least one of the following: crystal rod speed reduction processing, crucible speed reduction processing, crystal rod lifting processing, crucible lowering processing, and the first power control processing includes adjusting the heater power to the sum of the crystal induction power and the first preset power.

可选地,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:Optionally, for each CZ single crystal device, determining a corresponding seismic anomaly process according to the process step status includes:

若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;If the process step state is the feeder feeding state, determining the corresponding seismic anomaly processing includes a second motion control process and/or a second power control process; wherein the second motion control includes at least one of the following: stopping feeding, and the material tank retreating to the rear limit position; the second power control process includes adjusting the heater power to the sum of the seeding power and the second preset power;

若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;If the working step state is that the barrel is lifted in and the isolation valve is open, it is determined that the corresponding seismic anomaly processing includes the third motion control processing and/or the second power control processing; wherein the third motion control processing includes at least one of the following: lifting the barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve;

若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;If the working step state is the state of the material bucket being lifted in and the isolation valve being closed, determining that the corresponding earthquake anomaly processing includes the second power control processing;

若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。If the working step state is the bucket lifting state, it is determined that the corresponding seismic anomaly processing includes the second power control processing.

本发明实施例还公开了一种地震处理装置,包括:The embodiment of the present invention further discloses a seismic processing device, comprising:

情况检测模块,用于检测多个直拉单晶设备的晶体划弧情况;A situation detection module, used to detect the crystal arcing situation of multiple CZ single crystal equipment;

事件确定模块,用于根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;An event determination module, used for determining a seismic event according to the arcing conditions of the crystals of the plurality of CZ single crystal devices;

地震处理模块,用于根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。A seismic processing module is used to perform corresponding seismic anomaly processing on the multiple CZ single crystal devices according to the seismic event.

可选地,所述事件确定模块,包括:Optionally, the event determination module includes:

占比确定子模块,用于根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比;A proportion determination submodule, for determining the proportion of CZ single crystal devices having crystal arcing simultaneously among CZ single crystal devices in an equal diameter state according to the crystal arcing conditions of the plurality of CZ single crystal devices;

事件确定子模块,用于根据所述设备占比,确定所述地震事件。An event determination submodule is used to determine the earthquake event according to the equipment proportion.

可选地,所述事件确定子模块,包括:Optionally, the event determination submodule includes:

轻微事件确定单元,用于若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件;所述第二预设占比大于所述第一预设占比;A minor event determination unit, configured to determine that the earthquake event has occurred and that the earthquake event is a minor earthquake event if the device proportion is between a first preset proportion and a second preset proportion; and the second preset proportion is greater than the first preset proportion;

严重事件确定单元,用于若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。A severe event determination unit is used to determine that the earthquake event has occurred and that the earthquake event is a severe earthquake event if the equipment proportion exceeds a second preset proportion.

可选地,所述地震事件为轻微地震事件,所述地震处理模块,包括:Optionally, the seismic event is a minor seismic event, and the seismic processing module includes:

转速获取子模块,用于获取所述多个直拉单晶设备的设定晶棒转速;A rotation speed acquisition submodule, used to acquire the set crystal rod rotation speeds of the plurality of CZ single crystal devices;

第一处理确定子模块,用于针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;The first processing determination submodule is used to determine the corresponding crystal rod speed reduction processing according to the set crystal rod speed for each CZ single crystal device;

第一处理执行子模块,用于分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。The first processing execution submodule is used to respectively execute corresponding crystal rod rotation speed reduction processing on the multiple CZ single crystal devices.

可选地,所述地震事件为严重地震事件,所述地震处理模块,包括:Optionally, the earthquake event is a severe earthquake event, and the earthquake processing module includes:

状态获取子模块,用于获取所述多个直拉单晶设备的工步状态;A status acquisition submodule, used to acquire the working step status of the plurality of CZ single crystal devices;

第二处理确定子模块,用于针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;A second processing determination submodule is used to determine the corresponding seismic anomaly processing for each CZ single crystal device according to the process step status;

第二处理执行子模块,用于分别对所述多个直拉单晶设备执行对应的地震异常处理。The second processing execution submodule is used to execute corresponding seismic anomaly processing on the multiple CZ single crystal devices respectively.

可选地,所述第二处理确定子模块,包括:Optionally, the second processing determination submodule includes:

第一确定单元,用于若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理;其中,所述第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态,所述第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理,所述第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。The first determination unit is used to determine that if the working step state is a first preset state, the corresponding seismic anomaly processing includes a first motion control processing and/or a first power control processing; wherein, the first preset state includes a crystal seeding state, or a shoulder release state, or a shoulder rotation state, or an equal diameter state, or a finishing state, or a crystal rod lifting state, or a remelting state; the first motion control processing includes at least one of the following: a crystal rod speed reduction processing, a crucible speed reduction processing, a crystal rod lifting processing, and a crucible lowering processing; the first power control processing includes adjusting the heater power to the sum of the crystal seeding power and the first preset power.

可选地,所述第二处理确定子模块,包括:Optionally, the second processing determination submodule includes:

第二确定单元,用于若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;A second determination unit is used for determining, if the process step state is a feeder feeding state, that the corresponding seismic anomaly processing includes a second motion control process and/or a second power control process; wherein the second motion control includes at least one of the following: stopping feeding, and the material tank retreating to a rear limit position; and the second power control process includes adjusting the heater power to the sum of the seeding power and the second preset power;

第三确定单元,用于若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;A third determining unit is used for determining that the corresponding seismic anomaly processing includes a third motion control processing and/or the second power control processing if the working step state is the material barrel lifting and the isolation valve is open; wherein the third motion control processing includes at least one of the following: lifting the material barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve;

第四确定单元,用于若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;A fourth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the working step state is a material bucket lifting state and the isolation valve is closed;

第五确定单元,用于若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。The fifth determining unit is used to determine that the corresponding seismic anomaly processing includes the second power control processing if the working step state is the bucket lifting state.

本发明实施例还公开了一种电子设备,其特征在于,包括处理器、通信接口、存储器和通信总线,其中,处理器,通信接口,存储器通过通信总线完成相互间的通信;The embodiment of the present invention further discloses an electronic device, characterized in that it includes a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory communicate with each other via the communication bus;

存储器,用于存放计算机程序;Memory, used to store computer programs;

处理器,用于执行存储器上所存放的程序时,实现如上所述的方法步骤。The processor is used to implement the above-mentioned method steps when executing the program stored in the memory.

本发明实施例还公开了一种可读存储介质,当所述存储介质中的指令由电子设备的处理器执行时,使得电子设备能够执行本发明实施例中一个或多个所述的地震处理方法。The embodiment of the present invention further discloses a readable storage medium. When the instructions in the storage medium are executed by a processor of an electronic device, the electronic device can execute one or more seismic processing methods described in the embodiment of the present invention.

本发明实施例包括以下优点:The embodiments of the present invention include the following advantages:

依据本发明实施例,通过检测多个直拉单晶设备的晶体划弧情况,根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,使得利用晶体划弧情况自动检测地震事件,并自动控制直拉单晶设备采取地震异常处理,避免对设备、人员造成伤害,减少了地震灾害带来的损失。According to an embodiment of the present invention, by detecting the crystal arcing conditions of a plurality of Czochralski single crystal devices, an earthquake event is determined according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, and according to the earthquake event, corresponding earthquake anomaly processing is performed on the plurality of Czochralski single crystal devices, so that an earthquake event is automatically detected by utilizing the crystal arcing conditions, and the Czochralski single crystal devices are automatically controlled to take earthquake anomaly processing, thereby avoiding damage to equipment and personnel and reducing losses caused by earthquake disasters.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本发明的一种地震处理方法实施例的步骤流程图;FIG1 is a flow chart of steps of an embodiment of a seismic processing method of the present invention;

图2是本发明的一种地震处理方法实施例的步骤流程图;FIG2 is a flow chart of steps of an embodiment of a seismic processing method of the present invention;

图3是轻微地震时的自动处理流程的示意图;FIG3 is a schematic diagram of the automatic processing flow in the event of a minor earthquake;

图4是严重地震时的自动处理流程的示意图;FIG4 is a schematic diagram of the automatic processing flow in case of a severe earthquake;

图5是本发明的一种地震处理装置实施例的结构框图;FIG5 is a structural block diagram of an embodiment of a seismic processing device of the present invention;

图6是根据一示例性实施例示出的一种用于地震处理的计算设备的结构框图。Fig. 6 is a structural block diagram of a computing device for earthquake processing according to an exemplary embodiment.

具体实施方式Detailed ways

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

参照图1,示出了本发明的一种地震处理方法实施例的步骤流程图,具体可以包括如下步骤:1 , a flowchart of a seismic processing method according to an embodiment of the present invention is shown, which may specifically include the following steps:

步骤101,检测多个直拉单晶设备的晶体划弧情况。Step 101, detecting arcing conditions of crystals of a plurality of CZ single crystal devices.

在本发明实施例中,直拉单晶过程是利用直拉法将原料提炼成单晶的过程,例如,直拉单晶硅的过程。直拉单晶过程可以划分为加料阶段、熔料阶段、调温阶段、引晶阶段等。In the embodiment of the present invention, the Czochralski process is a process of refining raw materials into single crystals using the Czochralski method, for example, a process of Czochralski single crystal silicon. The Czochralski process can be divided into a feeding stage, a melting stage, a temperature adjustment stage, a seeding stage, and the like.

在本发明实施例中,直拉单晶设备是用于直拉单晶的设备,例如,直拉单晶硅的单晶炉。晶体划弧是指直拉单晶过程中出现的晶体摆动的现象,是直拉法经常出现的异常现象,并影响单晶的正常生长,造成单晶生产的成本上升,从生长机理方面看,晶体摆动会引起液面温度的变化,对固体-液体界面的稳定性造成干扰,从而影响单晶的品质和无位错生长。从操作控制方面而言,晶体摆动动会使直径控制变得困难,也不利于等径生长过程中的自动控制,造成了生产周期的相对延长,从而增加了生产成本。In the embodiment of the present invention, the Czochralski single crystal equipment is equipment for Czochralski single crystals, for example, a single crystal furnace for Czochralski single crystal silicon. Crystal arcing refers to the phenomenon of crystal swinging that occurs during the Czochralski single crystal pulling process. It is an abnormal phenomenon that often occurs in the Czochralski method and affects the normal growth of single crystals, causing the cost of single crystal production to rise. From the perspective of growth mechanism, crystal swinging will cause changes in liquid surface temperature, interfere with the stability of the solid-liquid interface, and thus affect the quality of the single crystal and dislocation-free growth. From the perspective of operation control, crystal swinging will make diameter control difficult and is not conducive to automatic control during equal diameter growth, resulting in a relative extension of the production cycle, thereby increasing production costs.

对于一个规模较大的生产单位来说,直拉单晶设备的数量比较多,个别直拉单晶设备出现晶体划弧是正常的,但如果大量直拉单晶设备出现晶体划弧则相对异常的,很大可能是地震引起的,基于这样的考虑,本发明提出根据多个直拉单晶设备的晶体划弧情况来检测地震的方法。For a large-scale production unit, there are a large number of CZ single crystal equipment. It is normal for individual CZ single crystal equipment to have crystal arcing. However, if a large number of CZ single crystal equipment have crystal arcing, it is relatively abnormal and is most likely caused by an earthquake. Based on this consideration, the present invention proposes a method for detecting earthquakes according to the crystal arcing conditions of multiple CZ single crystal equipment.

在本发明实施例中,对于单个直拉单晶设备的晶体划弧情况的检测可以利用CCD(Charge Coupled Device,电荷耦合元件)机器视觉系统检测晶棒的位置,若晶棒的位置出现摆动,且摆动幅度超过设定阈值,则确定该直拉单晶设备出现晶体划弧,或者其他任意适用的实现方式,本发明实施例对此不做限制。晶体划弧情况可以分为发生晶体划弧和未发生晶体划弧两种情况,或者还可以将看晶体划弧的情况再分为划弧的多种程度,或者其他任意适用的情况,本发明实施例对此不做限制。In the embodiment of the present invention, the detection of crystal arcing of a single CZ single crystal device can utilize a CCD (Charge Coupled Device) machine vision system to detect the position of the crystal rod. If the position of the crystal rod swings and the swing amplitude exceeds a set threshold, it is determined that the crystal arcing of the CZ single crystal device occurs, or any other applicable implementation method is not limited in this embodiment of the present invention. Crystal arcing can be divided into two situations: crystal arcing occurs and crystal arcing does not occur, or the situation of crystal arcing can be further divided into multiple degrees of arcing, or any other applicable situation is not limited in this embodiment of the present invention.

在本发明实施例中,分别对多个直拉单晶设备进行检测,得到多个直拉单晶设备的晶体划弧情况。例如,各个直拉单晶设备分别检测晶体划弧情况,再上报到应急中控平台,由应急中控平台据此检测地震。In the embodiment of the present invention, multiple CZ single crystal devices are tested respectively to obtain the crystal arcing conditions of the multiple CZ single crystal devices. For example, each CZ single crystal device tests the crystal arcing condition respectively, and then reports it to the emergency central control platform, which detects earthquakes accordingly.

步骤102,根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件。Step 102: determining a seismic event based on the arcing conditions of the crystals of the plurality of CZ single crystal devices.

在本发明实施例中,地震事件是指发生地震的事件,地震事件还可以分为轻微地震事件、严重地震事件等,或者其他任意适用的地震事件,本发明实施例对此不做限制。In the embodiment of the present invention, an earthquake event refers to an event in which an earthquake occurs. An earthquake event can also be divided into a minor earthquake event, a severe earthquake event, or any other applicable earthquake event, which is not limited in the embodiment of the present invention.

在本发明实施例中,由于多个直拉单晶设备中若有一定数量的设备同时发生晶体划弧极有可能是地震引起的,因此,根据多个直拉单晶设备的晶体划弧情况,可以比较可靠的确定是否发生地震,或者还可以确定地震的严重程度。In the embodiment of the present invention, if a certain number of devices among multiple CZ single crystal devices simultaneously experience crystal arcing, it is very likely caused by an earthquake. Therefore, based on the crystal arcing conditions of the multiple CZ single crystal devices, it is possible to more reliably determine whether an earthquake has occurred, or to determine the severity of the earthquake.

在本发明实施例中,根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件的具体实现方式可以包括多种。例如,根据多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比,根据设备占比,确定地震事件。又例如,根据多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比,晶体划弧情况还包括晶体划弧相关的数据,例如,描述晶体划弧的程度的数据等,结合设备占比和晶体划弧相关的数据,确定地震事件。具体可以包括任意适用的实现方式,本发明实施例对此不做限制。In an embodiment of the present invention, according to the crystal arcing conditions of the multiple CZ single crystal devices, the specific implementation methods for determining the earthquake event may include multiple. For example, according to the crystal arcing conditions of the multiple CZ single crystal devices, the equipment ratio of the CZ single crystal devices with crystal arcing occurring simultaneously in the CZ single crystal devices in the equal-diameter state is determined, and the earthquake event is determined according to the equipment ratio. For another example, according to the crystal arcing conditions of the multiple CZ single crystal devices, the equipment ratio of the CZ single crystal devices with crystal arcing occurring simultaneously in the CZ single crystal devices in the equal-diameter state is determined, and the crystal arcing conditions also include data related to crystal arcing, such as data describing the degree of crystal arcing, etc., and the earthquake event is determined in combination with the equipment ratio and the data related to crystal arcing. Specifically, any applicable implementation method may be included, and the embodiment of the present invention does not limit this.

步骤103,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。Step 103: Perform corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event.

在本发明实施例中,检测到地震事件后,自动对多个直拉单晶设备执行对应的地震异常处理。地震异常处理是指预先设定的发生地震时自动执行的一个或一系列处理。例如,将直拉单晶设备的工步切换到异常处理工步,对晶棒转速的降低处理,加热器功率的设定处理,坩埚转速的降低处理等,或者其他任意适用的处理,本发明实施例对此不做限制。In an embodiment of the present invention, after an earthquake event is detected, corresponding earthquake abnormality processing is automatically performed on multiple CZ single crystal devices. Earthquake abnormality processing refers to one or a series of processing that is automatically performed when an earthquake occurs. For example, the process step of the CZ single crystal device is switched to the abnormality processing process step, the crystal rod rotation speed is reduced, the heater power is set, the crucible rotation speed is reduced, or any other applicable processing is performed, which is not limited by the embodiment of the present invention.

在本发明实施例中,若地震事件分为多种地震事件,针对每种地震事件,可以预先设定对应的地震异常处理,从而针对不同的地震事件,采取相适合的处理。In the embodiment of the present invention, if the earthquake event is divided into multiple types of earthquake events, a corresponding earthquake anomaly processing can be preset for each earthquake event, so that appropriate processing can be taken for different earthquake events.

另外,除了通过上述方式确定地震事件外,还可以接收外部通知的地震事件,或者人工提交的地震事件,或者其他任意适用的方式确定地震事件,以及地震事件的程度等其他信息。控制系统也可以据此控制多个直拉单晶设备自动执行对应的地震异常处理。In addition, in addition to determining earthquake events in the above manner, earthquake events notified from outside, or earthquake events submitted manually, or any other applicable manner can be used to determine earthquake events, as well as other information such as the extent of earthquake events. The control system can also control multiple CZ single crystal devices to automatically perform corresponding earthquake anomaly processing accordingly.

在本发明实施例中,多个直拉单晶设备所处的工步状态可能各不相同,例如,有的直拉单晶设备处于引晶状态、有的直拉单晶设备处于加料器加料状态、有的直拉单晶设备处于料桶提入状态等。针对直拉单晶设备所处的每种工步状态,可以预先设定对应的地震异常处理,从而针对不同的工步状态,采取相适合的处理。In the embodiment of the present invention, the working step states of the plurality of CZ single crystal devices may be different. For example, some CZ single crystal devices are in the seeding state, some CZ single crystal devices are in the feeder feeding state, and some CZ single crystal devices are in the bucket lifting state. For each working step state of the CZ single crystal device, the corresponding earthquake anomaly processing can be preset, so that appropriate processing can be adopted for different working step states.

在本发明实施例中,在确定地震异常处理后,分别控制多个直拉单晶设备执行对应的地震异常处理,以使在直拉单晶过程中自动检测地震事件,并使直拉单晶设备可以自动进行地震异常处理。In an embodiment of the present invention, after determining the earthquake anomaly processing, multiple CZ single crystal devices are controlled to perform corresponding earthquake anomaly processing respectively, so that earthquake events can be automatically detected during the CZ single crystal process, and the CZ single crystal devices can automatically perform earthquake anomaly processing.

依据本发明实施例,通过检测多个直拉单晶设备的晶体划弧情况,根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,使得利用晶体划弧情况自动检测地震事件,并自动控制直拉单晶设备采取地震异常处理,避免对设备、人员造成伤害,减少了地震灾害带来的损失。According to an embodiment of the present invention, by detecting the crystal arcing conditions of a plurality of Czochralski single crystal devices, an earthquake event is determined according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, and according to the earthquake event, corresponding earthquake anomaly processing is performed on the plurality of Czochralski single crystal devices, so that an earthquake event is automatically detected by utilizing the crystal arcing conditions, and the Czochralski single crystal devices are automatically controlled to take earthquake anomaly processing, thereby avoiding damage to equipment and personnel and reducing losses caused by earthquake disasters.

参照图2,示出了本发明的一种地震处理方法实施例的步骤流程图,具体可以包括如下步骤:2, there is shown a flowchart of a seismic processing method according to an embodiment of the present invention, which may specifically include the following steps:

步骤201,检测多个直拉单晶设备的晶体划弧情况。Step 201, detecting arcing conditions of crystals of a plurality of CZ single crystal devices.

在本发明实施例中,此步骤的具体实现方式可以参见前述实施例中的描述,此处不另赘述。In the embodiment of the present invention, the specific implementation method of this step can refer to the description in the aforementioned embodiment and will not be further described here.

步骤202,根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比。Step 202, according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, determine the equipment ratio of Czochralski single crystal devices in which crystal arcing occurs simultaneously among the Czochralski single crystal devices in an equal diameter state.

在本发明实施例中,在直拉单晶过程中,晶体划弧从直拉单晶设备中拉出了晶体之后才开始出现。处于等径状态的直拉单晶设备一般处于稳定的产出晶体的阶段,期间可能出现晶体划弧。先获取处于等径状态的直拉单晶设备的数量,再根据多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比。In an embodiment of the present invention, during the CZ-pull single crystal process, crystal arcing begins to occur after the crystal is pulled out of the CZ-pull single crystal device. The CZ-pull single crystal device in the equal-diameter state is generally in a stable crystal output stage, during which crystal arcing may occur. First, the number of CZ-pull single crystal devices in the equal-diameter state is obtained, and then, based on the crystal arcing conditions of multiple CZ-pull single crystal devices, the proportion of CZ-pull single crystal devices in which crystal arcing occurs simultaneously in the CZ-pull single crystal devices in the equal-diameter state is determined.

步骤203,根据所述设备占比,确定所述地震事件。Step 203: Determine the earthquake event according to the equipment proportion.

在本发明实施例中,根据上述确定的设备占比,可以确定地震事件。例如,若设备占比超过50%,则确定已经发生地震事件。In the embodiment of the present invention, an earthquake event may be determined based on the above determined device proportions. For example, if the device proportion exceeds 50%, it is determined that an earthquake event has occurred.

在本发明的一种可选实施例中,根据所述设备占比,确定所述地震事件的一种具体实现方式中,可以包括:若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件,若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。所述第二预设占比大于所述第一预设占比。In an optional embodiment of the present invention, a specific implementation of determining the earthquake event according to the device proportion may include: if the device proportion is between a first preset proportion and a second preset proportion, determining that the earthquake event has occurred and the earthquake event is a minor earthquake event, and if the device proportion exceeds the second preset proportion, determining that the earthquake event has occurred and the earthquake event is a severe earthquake event. The second preset proportion is greater than the first preset proportion.

设备占比达到第一预设占比,可以确定已经发生地震事件。第一预设占比可以设置为任意适用的预设值,本发明实施例对此不做限制。若设备占比在第一预设占比和第二预设占比之间,则确定地震事件为轻微地震事件,因相较于严重地震事件,轻微地震事件时设备占比相对较小。When the device ratio reaches the first preset ratio, it can be determined that an earthquake event has occurred. The first preset ratio can be set to any applicable preset value, and the embodiment of the present invention does not limit this. If the device ratio is between the first preset ratio and the second preset ratio, the earthquake event is determined to be a minor earthquake event, because compared with a serious earthquake event, the device ratio is relatively small in a minor earthquake event.

设备占比超过第二预设占比,则确定地震事件为严重地震事件。If the equipment proportion exceeds the second preset proportion, the earthquake event is determined to be a severe earthquake event.

根据设备占比,不仅可以检测是否发生地震,还可以检测地震事件的强度,从而对地震事件更加精细的划分。Based on the proportion of devices, it is possible to detect not only whether an earthquake has occurred, but also the intensity of the earthquake event, thereby making a more detailed classification of earthquake events.

步骤204,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。Step 204: Perform corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event.

在本发明的一种可选实施例中,所述地震事件为轻微地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理的一种具体实现方式中,可以包括:获取所述多个直拉单晶设备的设定晶棒转速;针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。In an optional embodiment of the present invention, the earthquake event is a minor earthquake event, and a specific implementation method of performing corresponding earthquake anomaly processing on the multiple CZ single crystal devices according to the earthquake event may include: obtaining set crystal rod rotation speeds for the multiple CZ single crystal devices; determining corresponding crystal rod rotation speed reduction processing for each CZ single crystal device according to the set crystal rod rotation speed; and performing corresponding crystal rod rotation speed reduction processing on the multiple CZ single crystal devices respectively.

在确定轻微地震事件后,预设设定轻微地震事件对应的地震异常处理为晶棒转速降低处理。具体实现时,针对各个直拉单晶设备,获取设定晶棒转速,然后根据设定晶棒转速,确定对应的晶棒转速降低处理。例如,如图3所示的轻微地震时的自动处理流程的示意图。若设定晶棒转速小于设定转速阈值X,则确定对应的晶棒转速降低处理为晶棒转速降低到零。若设定晶棒转速不小设定转速阈值X,则确定对应的晶棒转速降低处理为在当前的晶棒转速的基础上降低设定转速Y。After determining a minor earthquake event, the earthquake anomaly processing corresponding to the minor earthquake event is preset to be a crystal rod speed reduction processing. In specific implementation, for each vertical single crystal device, the set crystal rod speed is obtained, and then the corresponding crystal rod speed reduction processing is determined according to the set crystal rod speed. For example, a schematic diagram of the automatic processing flow during a minor earthquake is shown in Figure 3. If the set crystal rod speed is less than the set speed threshold X, the corresponding crystal rod speed reduction processing is determined to be the crystal rod speed is reduced to zero. If the set crystal rod speed is not less than the set speed threshold X, the corresponding crystal rod speed reduction processing is determined to be a reduction in the set speed Y based on the current crystal rod speed.

在轻微地震事件时,自动降低晶棒转速,可以降低晶体划弧的幅度,减少晶体划弧对单晶生长和操作控制方面的影响,降低因晶体划弧带来的产品的失败率,保证产品质量,减少损失。In the event of a minor earthquake, the crystal rod rotation speed is automatically reduced, which can reduce the amplitude of crystal arcing, reduce the impact of crystal arcing on single crystal growth and operation control, reduce the failure rate of products caused by crystal arcing, ensure product quality and reduce losses.

在本发明的一种可选实施例中,所述地震事件为严重地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理的一种具体实现方式中,可以包括:获取所述多个直拉单晶设备的工步状态;针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;分别对所述多个直拉单晶设备执行对应的地震异常处理。In an optional embodiment of the present invention, the earthquake event is a severe earthquake event, and a specific implementation method of performing corresponding earthquake anomaly processing on the multiple CZ single crystal devices according to the earthquake event may include: acquiring the working step status of the multiple CZ single crystal devices; determining the corresponding earthquake anomaly processing for each CZ single crystal device according to the working step status; and performing corresponding earthquake anomaly processing on the multiple CZ single crystal devices respectively.

在严重地震事件时,预先设定了对应的的地震异常处理。对于严重地震事件,需要预先设定与直拉单晶设备的工步状态相适合的地震异常处理。In case of severe earthquake events, the corresponding earthquake abnormality processing is pre-set. For severe earthquake events, it is necessary to pre-set the earthquake abnormality processing suitable for the working step status of the CZ single crystal equipment.

其中,工步状态是指直拉单晶设备所处的工步。工步状态可以包括引晶状态、放肩状态、转肩状态、等径状态、收尾状态、晶棒提出状态、回熔状态、加料器加料状态、料桶提入且隔离阀开启状态、料桶提入且隔离阀关闭状态、料桶提出状态等,或者其他任意适用的状态,本发明实施例对此不做限制。各种工步状态预先设定的对应的地震异常处理可以根据实际需要进行设定,本发明实施例对此不做限制。Among them, the working step state refers to the working step of the CZ single crystal equipment. The working step state may include the crystal seeding state, shoulder release state, shoulder rotation state, equal diameter state, finishing state, crystal rod withdrawal state, remelting state, feeder feeding state, bucket lifting and isolation valve opening state, bucket lifting and isolation valve closing state, bucket lifting state, etc., or any other applicable state, which is not limited by the embodiment of the present invention. The corresponding seismic anomaly processing preset in various working step states can be set according to actual needs, which is not limited by the embodiment of the present invention.

根据每个直拉单晶设备工步状态,确定对应的地震异常处理,对每个直拉单晶设备执行对应的地震异常处理,从而有针对性的对于不同工步状态的直拉单晶设备采取相适应的地震异常处理,继而避免对设备、人员造成伤害,减少了地震灾害带来的损失。According to the working step status of each Czochralski single crystal equipment, the corresponding earthquake abnormality processing is determined, and the corresponding earthquake abnormality processing is performed on each Czochralski single crystal equipment, so that the appropriate earthquake abnormality processing can be taken for the Czochralski single crystal equipment in different working step statuses in a targeted manner, thereby avoiding damage to equipment and personnel and reducing the losses caused by earthquake disasters.

在本发明的一种可选实施例中,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理的一种具体实现方式中,可以包括:若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理。In an optional embodiment of the present invention, a specific implementation method of determining the corresponding seismic anomaly processing for each CZ single crystal device according to the process step state may include: if the process step state is a first preset state, determining that the corresponding seismic anomaly processing includes a first motion control processing and/or a first power control processing.

其中,第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态。在工步状态为第一预设状态时,对应的地震异常处理包括第一运动控制处理,或者第一功率控制处理,或者第一运动控制处理和第一功率控制处理。如图4所示的严重地震时的自动处理流程的示意图。The first preset state includes a seeding state, a shoulder release state, a shoulder rotation state, an equal diameter state, a tailing state, a crystal rod extraction state, or a remelting state. When the process state is the first preset state, the corresponding earthquake abnormality processing includes a first motion control process, a first power control process, or a first motion control process and a first power control process. A schematic diagram of the automatic processing flow during a severe earthquake as shown in Figure 4.

其中,第一运动控制处理是对直拉单晶设备中与运动控制相关的处理。第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理。晶棒转速降低处理为对晶棒转速进行降低的处理。例如,晶棒转速在T1时间内降低到A转速。坩埚转速降低处理为对坩埚转速进行降低的处理。例如,坩埚转速在T2时间内降低到B转速。晶棒提升处理为对晶棒进行提升的处理。例如,晶棒提升速度设定为C速度。坩埚下降处理为对坩埚进行下降的处理。例如,坩埚下降速度设定为D速度,坩埚自动下降E距离。通过第一运动控制处理,可以减少地震对生产安全的影响,避免对设备和人身造成的伤害,减少损失。Among them, the first motion control processing is the processing related to motion control in the vertical single crystal equipment. The first motion control processing includes at least one of the following: crystal rod speed reduction processing, crucible speed reduction processing, crystal rod lifting processing, and crucible lowering processing. The crystal rod speed reduction processing is the processing of reducing the crystal rod speed. For example, the crystal rod speed is reduced to A speed within T1 time. The crucible speed reduction processing is the processing of reducing the crucible speed. For example, the crucible speed is reduced to B speed within T2 time. The crystal rod lifting processing is the processing of lifting the crystal rod. For example, the crystal rod lifting speed is set to C speed. The crucible lowering processing is the processing of lowering the crucible. For example, the crucible lowering speed is set to D speed, and the crucible automatically drops E distance. Through the first motion control processing, the impact of earthquakes on production safety can be reduced, damage to equipment and personnel can be avoided, and losses can be reduced.

其中,第一功率控制处理是对直拉单晶设备中与功率控制相关的处理。第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。第一预设功率可以设置为任意适用的功率,本发明实施例对此不做限制。例如,加热器功率变更为引晶功率+XKw。加热器功率保持在引晶功率和第一预设功率的和值,可以是原料保持熔化状态,避免原料在坩埚内结晶,对设备造成伤害。Among them, the first power control process is a process related to power control in the CZ single crystal device. The first power control process includes adjusting the heater power to the sum of the seeding power and the first preset power. The first preset power can be set to any applicable power, and the embodiment of the present invention does not limit this. For example, the heater power is changed to the seeding power + XKw. The heater power is maintained at the sum of the seeding power and the first preset power, which can keep the raw material in a molten state to prevent the raw material from crystallizing in the crucible and causing damage to the equipment.

在本发明的一种可选实施例中,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理的一种具体实现方式中,可以包括:若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。In an optional embodiment of the present invention, for each CZ single crystal device, a specific implementation method of determining the corresponding seismic anomaly processing according to the process step status may include: if the process step status is the feeder feeding status, determining that the corresponding seismic anomaly processing includes a second motion control processing and/or a second power control processing; wherein the second motion control includes at least one of the following: stopping feeding and retreating the material tank to the rear limit position; the second power control processing includes adjusting the heater power to the sum of the seeding power and the second preset power; if the process step status is the barrel lifting and the isolation valve opening status, determining that the corresponding seismic anomaly processing includes a third motion control processing and/or the second power control processing; wherein the third motion control processing includes at least one of the following: raising the barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve; if the process step status is the barrel lifting and the isolation valve closing status, determining that the corresponding seismic anomaly processing includes the second power control processing; if the process step status is the barrel lifting status, determining that the corresponding seismic anomaly processing includes the second power control processing.

加料器是直拉单晶设备中用于加料的一种部件,加料器加料状态是指设备处于通过加料器进行加料的状态。若工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理,或者第二功率控制处理,或者第二运动控制处理和第二功率控制处理。The feeder is a component used for feeding in the CZ single crystal device, and the feeder feeding state refers to the state in which the device is feeding through the feeder. If the process step state is the feeder feeding state, it is determined that the corresponding seismic anomaly processing includes the second motion control processing, or the second power control processing, or the second motion control processing and the second power control processing.

其中,第二运动控制处理是对直拉单晶设备中与运动控制相关的处理。第二运动控制包括以下至少一种:停止加料、料罐退至后限位置。料罐是加料器中装料的容器。后限位置是料罐在加料器中所能退回的极限位置。通过第二运动控制处理,可以减少地震对生产安全的影响,避免对设备和人身造成的伤害,减少损失。Among them, the second motion control processing is the processing related to motion control in the CZ single crystal equipment. The second motion control includes at least one of the following: stopping feeding, and the material tank retreating to the rear limit position. The material tank is a container for loading materials in the feeder. The rear limit position is the limit position to which the material tank can retreat in the feeder. Through the second motion control processing, the impact of earthquakes on production safety can be reduced, damage to equipment and personnel can be avoided, and losses can be reduced.

其中,第二功率控制处理是对直拉单晶设备中与功率控制相关的处理。第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值。第二预设功率可以设置为任意适用的功率,本发明实施例对此不做限制。例如,加热器功率变更为引晶功率+YKw。加热器功率保持在引晶功率和第二预设功率的和值,可以是原料保持熔化状态,避免原料在坩埚内结晶,对设备造成伤害。Among them, the second power control processing is a processing related to power control in the CZ single crystal device. The second power control processing includes adjusting the heater power to the sum of the seeding power and the second preset power. The second preset power can be set to any applicable power, and the embodiment of the present invention does not limit this. For example, the heater power is changed to the seeding power + YKw. The heater power is maintained at the sum of the seeding power and the second preset power, which can keep the raw material in a molten state to prevent the raw material from crystallizing in the crucible and causing damage to the equipment.

料桶是直拉单晶设备中用于加料的一种部件,料桶提入且隔离阀开启状态是指设备处于通过料桶进行加料,且料桶已经提入到加料的位置,隔离阀处于开启的状态。若工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理,或者第二功率控制处理,或者第三运动控制处理和第二功率控制处理。The barrel is a component used for feeding in the CZ single crystal equipment. The barrel is lifted in and the isolation valve is open, which means that the equipment is feeding through the barrel, and the barrel has been lifted in to the feeding position, and the isolation valve is open. If the working step state is the barrel is lifted in and the isolation valve is open, it is determined that the corresponding seismic anomaly processing includes the third motion control processing, or the second power control processing, or the third motion control processing and the second power control processing.

其中,第三运动控制处理是对直拉单晶设备中与运动控制相关的处理。第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀。副炉室是直拉单晶设备中的一个空间,料桶在主炉室内,因此需要将料桶升至副炉室下沿。通过第三运动控制处理,可以减少地震对生产安全的影响,避免对设备和人身造成的伤害,减少损失。Among them, the third motion control processing is the processing related to motion control in the CZ single crystal equipment. The third motion control processing includes at least one of the following: raising the barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve. The auxiliary furnace chamber is a space in the CZ single crystal equipment, and the barrel is in the main furnace chamber, so it is necessary to raise the barrel to the lower edge of the auxiliary furnace chamber. Through the third motion control processing, the impact of earthquakes on production safety can be reduced, damage to equipment and personnel can be avoided, and losses can be reduced.

若工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理。If the working step state is that the material bucket is lifted in and the isolation valve is closed, it is determined that the corresponding seismic anomaly processing includes the second power control processing.

若工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。If the working step state is the bucket lifting state, it is determined that the corresponding seismic anomaly processing includes the second power control processing.

依据本发明实施例,通过检测多个直拉单晶设备的晶体划弧情况,根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比,根据所述设备占比,确定所述地震事件,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,使得利用晶体划弧情况自动检测地震事件,并自动控制直拉单晶设备采取地震异常处理,避免对设备、人员造成伤害,减少了地震灾害带来的损失。According to an embodiment of the present invention, by detecting the crystal arcing conditions of multiple Czochralski single crystal devices, the equipment ratio of Czochralski single crystal devices that simultaneously experience crystal arcing in Czochralski single crystal devices in an equal-diameter state is determined, and based on the equipment ratio, the earthquake event is determined, and based on the earthquake event, corresponding earthquake anomaly processing is performed on the multiple Czochralski single crystal devices, so that the earthquake event is automatically detected by utilizing the crystal arcing conditions, and the Czochralski single crystal devices are automatically controlled to take earthquake anomaly processing, thereby avoiding damage to equipment and personnel and reducing losses caused by earthquake disasters.

依据本发明实施例,通过检测多个直拉单晶设备的晶体划弧情况,根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,使得利用晶体划弧情况自动检测地震事件,并自动控制直拉单晶设备采取地震异常处理,避免对设备、人员造成伤害,减少了地震灾害带来的损失。According to an embodiment of the present invention, by detecting the crystal arcing conditions of a plurality of Czochralski single crystal devices, an earthquake event is determined according to the crystal arcing conditions of the plurality of Czochralski single crystal devices, and according to the earthquake event, corresponding earthquake anomaly processing is performed on the plurality of Czochralski single crystal devices, so that an earthquake event is automatically detected by utilizing the crystal arcing conditions, and the Czochralski single crystal devices are automatically controlled to take earthquake anomaly processing, thereby avoiding damage to equipment and personnel and reducing losses caused by earthquake disasters.

需要说明的是,对于方法实施例,为了简单描述,故将其都表述为一系列的动作组合,但是本领域技术人员应该知悉,本发明实施例并不受所描述的动作顺序的限制,因为依据本发明实施例,某些步骤可以采用其他顺序或者同时进行。其次,本领域技术人员也应该知悉,说明书中所描述的实施例均属于优选实施例,所涉及的动作并不一定是本发明实施例所必须的。It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations, but those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

参照图5,示出了本发明的一种地震处理装置实施例的结构框图,具体可以包括如下模块:5, a structural block diagram of an embodiment of a seismic processing device of the present invention is shown, which may specifically include the following modules:

情况检测模块301,用于检测多个直拉单晶设备的晶体划弧情况;A situation detection module 301 is used to detect the arcing situation of crystals of multiple CZ single crystal devices;

事件确定模块302,用于根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;An event determination module 302 is used to determine a seismic event according to the arcing conditions of the crystals of the plurality of CZ single crystal devices;

地震处理模块303,用于根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。The earthquake processing module 303 is used to perform corresponding earthquake anomaly processing on the multiple CZ single crystal devices according to the earthquake event.

可选地,所述事件确定模块,包括:Optionally, the event determination module includes:

占比确定子模块,用于根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比;A proportion determination submodule, for determining the proportion of CZ single crystal devices having crystal arcing simultaneously among CZ single crystal devices in an equal diameter state according to the crystal arcing conditions of the plurality of CZ single crystal devices;

事件确定子模块,用于根据所述设备占比,确定所述地震事件。An event determination submodule is used to determine the earthquake event according to the equipment proportion.

可选地,所述事件确定子模块,包括:Optionally, the event determination submodule includes:

轻微事件确定单元,用于若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件;所述第二预设占比大于所述第一预设占比;A minor event determination unit, configured to determine that the earthquake event has occurred and that the earthquake event is a minor earthquake event if the device proportion is between a first preset proportion and a second preset proportion; and the second preset proportion is greater than the first preset proportion;

严重事件确定单元,用于若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。A severe event determination unit is used to determine that the earthquake event has occurred and that the earthquake event is a severe earthquake event if the equipment proportion exceeds a second preset proportion.

可选地,所述地震事件为轻微地震事件,所述地震处理模块,包括:Optionally, the seismic event is a minor seismic event, and the seismic processing module includes:

转速获取子模块,用于获取所述多个直拉单晶设备的设定晶棒转速;A rotation speed acquisition submodule, used to acquire the set crystal rod rotation speeds of the plurality of CZ single crystal devices;

第一处理确定子模块,用于针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;The first processing determination submodule is used to determine the corresponding crystal rod speed reduction processing according to the set crystal rod speed for each CZ single crystal device;

第一处理执行子模块,用于分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。The first processing execution submodule is used to respectively execute corresponding crystal rod rotation speed reduction processing on the plurality of CZ single crystal devices.

可选地,所述地震事件为严重地震事件,所述地震处理模块,包括:Optionally, the earthquake event is a severe earthquake event, and the earthquake processing module includes:

状态获取子模块,用于获取所述多个直拉单晶设备的工步状态;A status acquisition submodule, used to acquire the working step status of the plurality of CZ single crystal devices;

第二处理确定子模块,用于针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;A second processing determination submodule is used to determine the corresponding seismic anomaly processing for each CZ single crystal device according to the process step status;

第二处理执行子模块,用于分别对所述多个直拉单晶设备执行对应的地震异常处理。The second processing execution submodule is used to execute corresponding seismic anomaly processing on the multiple CZ single crystal devices respectively.

可选地,所述第二处理确定子模块,包括:Optionally, the second processing determination submodule includes:

第一确定单元,用于若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理;其中,所述第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态,所述第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理,所述第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。The first determination unit is used to determine that if the working step state is a first preset state, the corresponding seismic anomaly processing includes a first motion control processing and/or a first power control processing; wherein, the first preset state includes a crystal seeding state, or a shoulder release state, or a shoulder rotation state, or an equal diameter state, or a finishing state, or a crystal rod lifting state, or a remelting state; the first motion control processing includes at least one of the following: a crystal rod speed reduction processing, a crucible speed reduction processing, a crystal rod lifting processing, and a crucible lowering processing; the first power control processing includes adjusting the heater power to the sum of the crystal seeding power and the first preset power.

可选地,所述第二处理确定子模块,包括:Optionally, the second processing determination submodule includes:

第二确定单元,用于若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;A second determination unit is used for determining, if the process step state is a feeder feeding state, that the corresponding seismic anomaly processing includes a second motion control process and/or a second power control process; wherein the second motion control includes at least one of the following: stopping feeding, and the material tank retreating to a rear limit position; and the second power control process includes adjusting the heater power to the sum of the seeding power and the second preset power;

第三确定单元,用于若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;A third determining unit is used for determining that the corresponding seismic anomaly processing includes a third motion control processing and/or the second power control processing if the working step state is the material barrel lifting and the isolation valve is open; wherein the third motion control processing includes at least one of the following: lifting the material barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve;

第四确定单元,用于若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;A fourth determining unit, configured to determine that the corresponding seismic anomaly processing includes the second power control processing if the working step state is a material bucket lifting state and the isolation valve is closed;

第五确定单元,用于若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。The fifth determining unit is used to determine that the corresponding seismic anomaly processing includes the second power control processing if the working step state is the bucket lifting state.

对于装置实施例而言,由于其与方法实施例基本相似,所以描述的比较简单,相关之处参见方法实施例的部分说明即可。As for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

图6是根据一示例性实施例示出的一种用于地震处理的电子设备400的结构框图。例如,电子设备400可以是移动电话,计算机,数字广播终端,消息收发设备,游戏控制台,平板设备,医疗设备,健身设备,个人数字助理等。Fig. 6 is a block diagram of an electronic device 400 for earthquake processing according to an exemplary embodiment. For example, the electronic device 400 may be a mobile phone, a computer, a digital broadcast terminal, a messaging device, a game console, a tablet device, a medical device, a fitness device, a personal digital assistant, etc.

参照图6,电子设备400可以包括以下一个或多个组件:处理组件402,存储器404,电源组件406,多媒体组件408,音频组件410,输入/输出(I/O)的接口412,传感器组件414,以及通信组件416。6 , the electronic device 400 may include one or more of the following components: a processing component 402 , a memory 404 , a power component 406 , a multimedia component 408 , an audio component 410 , an input/output (I/O) interface 412 , a sensor component 414 , and a communication component 416 .

处理组件402通常控制电子设备400的整体操作,诸如与显示,电话呼叫,数据通信,相机操作和记录操作相关联的操作。处理组件402可以包括一个或多个处理器420来执行指令,以完成上述的地震处理方法的全部或部分步骤。此外,处理组件402可以包括一个或多个模块,便于处理组件402和其他组件之间的交互。例如,处理部件402可以包括多媒体模块,以方便多媒体组件408和处理组件402之间的交互。The processing component 402 generally controls the overall operation of the electronic device 400, such as operations associated with display, phone calls, data communications, camera operations, and recording operations. The processing component 402 may include one or more processors 420 to execute instructions to complete all or part of the steps of the above-mentioned seismic processing method. In addition, the processing component 402 may include one or more modules to facilitate the interaction between the processing component 402 and other components. For example, the processing component 402 may include a multimedia module to facilitate the interaction between the multimedia component 408 and the processing component 402.

存储器404被配置为存储各种类型的数据以支持在设备400的操作。这些数据的示例包括用于在电子设备400上操作的任何应用程序或方法的指令,联系人数据,电话簿数据,消息,图片,视频等。存储器404可以由任何类型的易失性或非易失性存储设备或者它们的组合实现,如静态随机存取存储器(SRAM),电可擦除可编程只读存储器(EEPROM),可擦除可编程只读存储器(EPROM),可编程只读存储器(PROM),只读存储器(ROM),磁存储器,快闪存储器,磁盘或光盘。The memory 404 is configured to store various types of data to support operations on the device 400. Examples of such data include instructions for any application or method operating on the electronic device 400, contact data, phone book data, messages, pictures, videos, etc. The memory 404 can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, magnetic disk or optical disk.

电力组件404为电子设备400的各种组件提供电力。电力组件404可以包括电源管理系统,一个或多个电源,及其他与为电子设备400生成、管理和分配电力相关联的组件。The power component 404 provides power to the various components of the electronic device 400. The power component 404 may include a power management system, one or more power supplies, and other components associated with generating, managing, and distributing power to the electronic device 400.

多媒体组件408包括在所述电子设备400和用户之间的提供一个输出接口的屏幕。在一些实施例中,屏幕可以包括液晶显示器(LCD)和触摸面板(TP)。如果屏幕包括触摸面板,屏幕可以被实现为触摸屏,以接收来自用户的输入信号。触摸面板包括一个或多个触摸传感器以感测触摸、滑动和触摸面板上的手势。所述触摸传感器可以不仅感测触摸或滑动动作的边界,而且还检测与所述触摸或滑动操作相关的持续时间和压力。在一些实施例中,多媒体组件408包括一个前置摄像头和/或后置摄像头。当电子设备400处于操作模式,如拍摄模式或视频模式时,前置摄像头和/或后置摄像头可以接收外部的多媒体数据。每个前置摄像头和后置摄像头可以是一个固定的光学透镜系统或具有焦距和光学变焦能力。The multimedia component 408 includes a screen that provides an output interface between the electronic device 400 and the user. In some embodiments, the screen may include a liquid crystal display (LCD) and a touch panel (TP). If the screen includes a touch panel, the screen may be implemented as a touch screen to receive input signals from the user. The touch panel includes one or more touch sensors to sense touch, slide, and gestures on the touch panel. The touch sensor may not only sense the boundaries of the touch or slide action, but also detect the duration and pressure associated with the touch or slide operation. In some embodiments, the multimedia component 408 includes a front camera and/or a rear camera. When the electronic device 400 is in an operating mode, such as a shooting mode or a video mode, the front camera and/or the rear camera may receive external multimedia data. Each front camera and the rear camera may be a fixed optical lens system or have a focal length and optical zoom capability.

音频组件410被配置为输出和/或输入音频信号。例如,音频组件410包括一个麦克风(MIC),当电子设备400处于操作模式,如呼叫模式、记录模式和语音识别模式时,麦克风被配置为接收外部音频信号。所接收的音频信号可以被进一步存储在存储器404或经由通信组件416发送。在一些实施例中,音频组件410还包括一个扬声器,用于输出音频信号。The audio component 410 is configured to output and/or input audio signals. For example, the audio component 410 includes a microphone (MIC), and when the electronic device 400 is in an operating mode, such as a call mode, a recording mode, and a voice recognition mode, the microphone is configured to receive an external audio signal. The received audio signal can be further stored in the memory 404 or sent via the communication component 416. In some embodiments, the audio component 410 also includes a speaker for outputting audio signals.

I/O接口412为处理组件402和外围接口模块之间提供接口,上述外围接口模块可以是键盘,点击轮,按钮等。这些按钮可包括但不限于:主页按钮、音量按钮、启动按钮和锁定按钮。I/O interface 412 provides an interface between processing component 402 and peripheral interface modules, such as keyboards, click wheels, buttons, etc. These buttons may include but are not limited to: a home button, a volume button, a start button, and a lock button.

传感器组件414包括一个或多个传感器,用于为电子设备400提供各个方面的状态评估。例如,传感器组件414可以检测到设备400的打开/关闭状态,组件的相对定位,例如所述组件为电子设备400的显示器和小键盘,传感器组件414还可以检测电子设备400或电子设备400一个组件的位置改变,用户与电子设备400接触的存在或不存在,电子设备400方位或加速/减速和电子设备400的温度变化。传感器组件414可以包括接近传感器,被配置用来在没有任何的物理接触时检测附近物体的存在。传感器组件414还可以包括光传感器,如CMOS或CCD图像传感器,用于在成像应用中使用。在一些实施例中,该传感器组件414还可以包括加速度传感器,陀螺仪传感器,磁传感器,压力传感器或温度传感器。The sensor assembly 414 includes one or more sensors for providing various aspects of status assessment for the electronic device 400. For example, the sensor assembly 414 can detect the open/closed state of the device 400, the relative positioning of the components, such as the display and keypad of the electronic device 400, and the sensor assembly 414 can also detect the position change of the electronic device 400 or a component of the electronic device 400, the presence or absence of contact between the user and the electronic device 400, the orientation or acceleration/deceleration of the electronic device 400, and the temperature change of the electronic device 400. The sensor assembly 414 may include a proximity sensor configured to detect the presence of nearby objects without any physical contact. The sensor assembly 414 may also include an optical sensor, such as a CMOS or CCD image sensor, for use in imaging applications. In some embodiments, the sensor assembly 414 may also include an accelerometer, a gyroscope sensor, a magnetic sensor, a pressure sensor, or a temperature sensor.

通信组件416被配置为便于电子设备400和其他设备之间有线或无线方式的通信。电子设备400可以接入基于通信标准的无线网络,如WiFi,2G或3G,或它们的组合。在一个示例性实施例中,通信部件414经由广播信道接收来自外部广播管理系统的广播信号或广播相关信息。在一个示例性实施例中,所述通信部件414还包括近场通信(NFC)模块,以促进短程通信。例如,在NFC模块可基于射频识别(RFID)技术,红外数据协会(IrDA)技术,超宽带(UWB)技术,蓝牙(BT)技术和其他技术来实现。The communication component 416 is configured to facilitate wired or wireless communication between the electronic device 400 and other devices. The electronic device 400 can access a wireless network based on a communication standard, such as WiFi, 2G or 3G, or a combination thereof. In an exemplary embodiment, the communication component 414 receives a broadcast signal or broadcast-related information from an external broadcast management system via a broadcast channel. In an exemplary embodiment, the communication component 414 also includes a near field communication (NFC) module to facilitate short-range communication. For example, the NFC module can be implemented based on radio frequency identification (RFID) technology, infrared data association (IrDA) technology, ultra-wideband (UWB) technology, Bluetooth (BT) technology and other technologies.

在示例性实施例中,电子设备400可以被一个或多个应用专用集成电路(ASIC)、数字信号处理器(DSP)、数字信号处理设备(DSPD)、可编程逻辑器件(PLD)、现场可编程门阵列(FPGA)、控制器、微控制器、微处理器或其他电子元件实现,用于执行上述地震处理方法。In an exemplary embodiment, the electronic device 400 can be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), controllers, microcontrollers, microprocessors or other electronic components to perform the above-mentioned seismic processing methods.

在示例性实施例中,还提供了一种包括指令的非临时性计算机可读存储介质,例如包括指令的存储器404,上述指令可由电子设备400的处理器420执行以完成上述地震处理方法。例如,所述非临时性计算机可读存储介质可以是ROM、随机存取存储器(RAM)、CD-ROM、磁带、软盘和光数据存储设备等。In an exemplary embodiment, a non-transitory computer-readable storage medium including instructions is also provided, such as a memory 404 including instructions, and the instructions can be executed by a processor 420 of an electronic device 400 to perform the above-mentioned seismic processing method. For example, the non-transitory computer-readable storage medium can be a ROM, a random access memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, etc.

一种非临时性计算机可读存储介质,当所述存储介质中的指令由终端的处理器执行时,使得终端能够执行一种地震处理方法,所述方法包括:A non-transitory computer-readable storage medium, when the instructions in the storage medium are executed by a processor of a terminal, enables the terminal to perform a seismic processing method, the method comprising:

检测多个直拉单晶设备的晶体划弧情况;Detect crystal arcing in multiple CZ single crystal equipment;

根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;Determining a seismic event according to arcing conditions of crystals of the plurality of CZ single crystal devices;

根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。According to the seismic event, corresponding seismic anomaly processing is performed on the plurality of CZ single crystal devices.

可选地,所述根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,包括:Optionally, determining a seismic event according to arcing conditions of crystals of the plurality of CZ single crystal devices includes:

根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比;According to the crystal arcing conditions of the plurality of Czochralski single crystal devices, determining the equipment ratio of Czochralski single crystal devices having crystal arcing at the same time among the Czochralski single crystal devices in an equal diameter state;

根据所述设备占比,确定所述地震事件。The earthquake event is determined according to the equipment proportion.

可选地,所述根据所述设备占比,确定所述地震事件,包括:Optionally, determining the earthquake event according to the equipment proportion includes:

若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件;所述第二预设占比大于所述第一预设占比;If the device proportion is between the first preset proportion and the second preset proportion, it is determined that the earthquake event occurs and the earthquake event is a minor earthquake event; and the second preset proportion is greater than the first preset proportion;

若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。If the equipment proportion exceeds a second preset proportion, it is determined that the earthquake event has occurred and the earthquake event is a severe earthquake event.

可选地,所述地震事件为轻微地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:Optionally, the earthquake event is a minor earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event includes:

获取所述多个直拉单晶设备的设定晶棒转速;Obtaining the set crystal rod rotation speeds of the plurality of CZ single crystal devices;

针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;For each CZ single crystal device, according to the set crystal rod speed, a corresponding crystal rod speed reduction process is determined;

分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。The corresponding crystal rod rotation speed reduction processes are respectively performed on the plurality of Czochralski single crystal devices.

可选地,所述地震事件为严重地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:Optionally, the earthquake event is a severe earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZ single crystal devices according to the earthquake event includes:

获取所述多个直拉单晶设备的工步状态;Obtaining the working step status of the plurality of CZ single crystal devices;

针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;For each CZ single crystal device, determine the corresponding earthquake anomaly processing according to the working step status;

分别对所述多个直拉单晶设备执行对应的地震异常处理。Corresponding earthquake anomaly processing is performed on the plurality of CZ single crystal devices respectively.

可选地,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:Optionally, for each CZ single crystal device, determining a corresponding seismic anomaly process according to the process step status includes:

若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理;其中,所述第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态,所述第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理,所述第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。If the process step state is the first preset state, it is determined that the corresponding seismic anomaly processing includes the first motion control processing and/or the first power control processing; wherein, the first preset state includes the crystal induction state, or the shoulder release state, or the shoulder rotation state, or the equal diameter state, or the ending state, or the crystal rod lifting state, or the remelting state, the first motion control processing includes at least one of the following: crystal rod speed reduction processing, crucible speed reduction processing, crystal rod lifting processing, crucible lowering processing, and the first power control processing includes adjusting the heater power to the sum of the crystal induction power and the first preset power.

可选地,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:Optionally, for each CZ single crystal device, determining a corresponding seismic anomaly process according to the process step status includes:

若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;If the process step state is the feeder feeding state, determining the corresponding seismic anomaly processing includes a second motion control process and/or a second power control process; wherein the second motion control includes at least one of the following: stopping feeding, and the material tank retreating to the rear limit position; the second power control process includes adjusting the heater power to the sum of the seeding power and the second preset power;

若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;If the working step state is that the barrel is lifted in and the isolation valve is open, it is determined that the corresponding seismic anomaly processing includes the third motion control processing and/or the second power control processing; wherein the third motion control processing includes at least one of the following: lifting the barrel to the lower edge of the auxiliary furnace chamber and closing the isolation valve;

若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;If the working step state is the state of the material bucket being lifted in and the isolation valve being closed, determining that the corresponding earthquake anomaly processing includes the second power control processing;

若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。If the working step state is the bucket lifting state, it is determined that the corresponding seismic anomaly processing includes the second power control processing.

本说明书中的各个实施例均采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似的部分互相参见即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

本领域内的技术人员应明白,本发明实施例的实施例可提供为方法、装置、或计算机程序产品。因此,本发明实施例可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且,本发明实施例可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。Those skilled in the art will appreciate that the embodiments of the embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, the embodiments of the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

本发明实施例是参照根据本发明实施例的方法、终端设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理终端设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理终端设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。The embodiments of the present invention are described with reference to the flowcharts and/or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and/or box in the flowchart and/or block diagram, as well as the combination of the processes and/or boxes in the flowchart and/or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate a device for implementing the functions specified in one process or multiple processes in the flowchart and/or one box or multiple boxes in the block diagram.

这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理终端设备以预测方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal device to operate in a predictable manner, so that the instructions stored in the computer-readable memory produce a manufactured product including an instruction device that implements the functions specified in one or more processes in the flowchart and/or one or more boxes in the block diagram.

这些计算机程序指令也可装载到计算机或其他可编程数据处理终端设备上,使得在计算机或其他可编程终端设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程终端设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce computer-implemented processing, so that the instructions executed on the computer or other programmable terminal device provide steps for implementing the functions specified in one or more processes in the flowchart and/or one or more boxes in the block diagram.

尽管已描述了本发明实施例的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例做出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本发明实施例范围的所有变更和修改。Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

最后,还需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者终端设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者终端设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者终端设备中还存在另外的相同要素。Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

以上对本发明所提供的一种地震处理方法和装置、一种电子设备以及一种可读储存介质,进行了详细介绍,本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本发明的限制。The above is a detailed introduction to a seismic processing method and device, an electronic device and a readable storage medium provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims (10)

1.一种地震处理方法,其特征在于,包括:1. A seismic processing method, comprising: 检测多个直拉单晶设备的晶体划弧情况;Detect crystal arcing in multiple CZ single crystal equipment; 根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;Determining a seismic event according to arcing conditions of crystals of the plurality of CZ single crystal devices; 根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。According to the seismic event, corresponding seismic anomaly processing is performed on the plurality of CZ single crystal devices. 2.根据权利要求1所述的方法,其特征在于,所述根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件,包括:2. The method according to claim 1, characterized in that the determining of the earthquake event according to the arcing conditions of the crystals of the plurality of CZ single crystal devices comprises: 根据所述多个直拉单晶设备的晶体划弧情况,确定在处于等径状态的直拉单晶设备中同时出现晶体划弧的直拉单晶设备的设备占比;According to the crystal arcing conditions of the plurality of Czochralski single crystal devices, determining the equipment ratio of Czochralski single crystal devices having crystal arcing at the same time among the Czochralski single crystal devices in an equal diameter state; 根据所述设备占比,确定所述地震事件。The earthquake event is determined according to the equipment proportion. 3.根据权利要求2所述的方法,其特征在于,所述根据所述设备占比,确定所述地震事件,包括:3. The method according to claim 2, characterized in that the determining the earthquake event according to the equipment proportion comprises: 若所述设备占比在第一预设占比和第二预设占比之间,确定发生所述地震事件,且所述地震事件为轻微地震事件;所述第二预设占比大于所述第一预设占比;If the device proportion is between the first preset proportion and the second preset proportion, it is determined that the earthquake event occurs and the earthquake event is a minor earthquake event; and the second preset proportion is greater than the first preset proportion; 若所述设备占比超过第二预设占比,确定发生所述地震事件,且所述地震事件为严重地震事件。If the equipment proportion exceeds a second preset proportion, it is determined that the earthquake event has occurred and the earthquake event is a severe earthquake event. 4.根据权利要求1所述的方法,其特征在于,所述地震事件为轻微地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:4. The method according to claim 1, wherein the earthquake event is a minor earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZC single crystal devices according to the earthquake event comprises: 获取所述多个直拉单晶设备的设定晶棒转速;Obtaining the set crystal rod rotation speeds of the plurality of CZ single crystal devices; 针对每个直拉单晶设备,根据所述设定晶棒转速,确定对应的晶棒转速降低处理;For each CZ single crystal device, according to the set crystal rod speed, a corresponding crystal rod speed reduction process is determined; 分别对所述多个直拉单晶设备执行对应的晶棒转速降低处理。The corresponding crystal rod rotation speed reduction processes are respectively performed on the plurality of Czochralski single crystal devices. 5.根据权利要求1所述的方法,其特征在于,所述地震事件为严重地震事件,所述根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理,包括:5. The method according to claim 1, wherein the earthquake event is a severe earthquake event, and the performing corresponding earthquake anomaly processing on the plurality of CZC single crystal devices according to the earthquake event comprises: 获取所述多个直拉单晶设备的工步状态;Obtaining the working step status of the plurality of CZ single crystal devices; 针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理;For each CZ single crystal device, determine the corresponding earthquake anomaly processing according to the working step status; 分别对所述多个直拉单晶设备执行对应的地震异常处理。Corresponding earthquake anomaly processing is performed on the plurality of CZ single crystal devices respectively. 6.根据权利要求5所述的方法,其特征在于,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:6. The method according to claim 5, characterized in that for each CZ single crystal device, determining the corresponding seismic anomaly processing according to the process step status comprises: 若所述工步状态为第一预设状态,确定对应的地震异常处理包括第一运动控制处理和/或第一功率控制处理;其中,所述第一预设状态包括引晶状态、或放肩状态、或转肩状态、或等径状态、或收尾状态、或晶棒提出状态、或回熔状态,所述第一运动控制处理包括以下至少一种:晶棒转速降低处理、坩埚转速降低处理、晶棒提升处理、坩埚下降处理,所述第一功率控制处理包括加热器功率调整为引晶功率和第一预设功率的和值。If the process step state is the first preset state, it is determined that the corresponding seismic anomaly processing includes the first motion control processing and/or the first power control processing; wherein, the first preset state includes the crystal induction state, or the shoulder release state, or the shoulder rotation state, or the equal diameter state, or the ending state, or the crystal rod lifting state, or the remelting state, the first motion control processing includes at least one of the following: crystal rod speed reduction processing, crucible speed reduction processing, crystal rod lifting processing, crucible lowering processing, and the first power control processing includes adjusting the heater power to the sum of the crystal induction power and the first preset power. 7.根据权利要求5所述的方法,其特征在于,所述针对每个直拉单晶设备,根据所述工步状态,确定对应的地震异常处理,包括:7. The method according to claim 5, characterized in that for each CZ single crystal device, determining the corresponding seismic anomaly processing according to the process step status comprises: 若所述工步状态为加料器加料状态,确定对应的地震异常处理包括第二运动控制处理和/或第二功率控制处理;其中,所述第二运动控制包括以下至少一种:停止加料、料罐退至后限位置;所述第二功率控制处理包括加热器功率调整为引晶功率和第二预设功率的和值;If the process step state is the feeder feeding state, determining the corresponding seismic anomaly processing includes a second motion control process and/or a second power control process; wherein the second motion control includes at least one of the following: stopping feeding, and the material tank retreating to the rear limit position; the second power control process includes adjusting the heater power to the sum of the seeding power and the second preset power; 若所述工步状态为料桶提入且隔离阀开启状态,确定对应的地震异常处理包括第三运动控制处理和/或所述第二功率控制处理;其中,所述第三运动控制处理包括以下至少一种:将料桶升至副炉室下沿、关闭隔离阀;If the working step state is that the bucket is lifted in and the isolation valve is open, it is determined that the corresponding seismic anomaly processing includes the third motion control processing and/or the second power control processing; wherein the third motion control processing includes at least one of the following: lifting the bucket to the lower edge of the auxiliary furnace chamber and closing the isolation valve; 若所述工步状态为料桶提入且隔离阀关闭状态,确定对应的地震异常处理包括所述第二功率控制处理;If the working step state is the state of the material bucket being lifted in and the isolation valve being closed, determining that the corresponding earthquake anomaly processing includes the second power control processing; 若所述工步状态为料桶提出状态,确定对应的地震异常处理包括所述第二功率控制处理。If the working step state is the bucket lifting state, it is determined that the corresponding seismic anomaly processing includes the second power control processing. 8.一种地震处理装置,其特征在于,包括:8. A seismic processing device, comprising: 情况检测模块,用于检测多个直拉单晶设备的晶体划弧情况;A situation detection module, used to detect the crystal arcing situation of multiple CZ single crystal equipment; 事件确定模块,用于根据所述多个直拉单晶设备的晶体划弧情况,确定地震事件;An event determination module, used for determining a seismic event according to the arcing conditions of the crystals of the plurality of CZ single crystal devices; 地震处理模块,用于根据所述地震事件,对所述多个直拉单晶设备执行对应的地震异常处理。A seismic processing module is used to perform corresponding seismic anomaly processing on the multiple CZ single crystal devices according to the seismic event. 9.一种电子设备,其特征在于,包括处理器、通信接口、存储器和通信总线,其中,处理器,通信接口,存储器通过通信总线完成相互间的通信;9. An electronic device, characterized in that it comprises a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory communicate with each other via the communication bus; 存储器,用于存放计算机程序;Memory, used to store computer programs; 处理器,用于执行存储器上所存放的程序时,实现权利要求1-7任一所述的方法步骤。A processor, for implementing the method steps described in any one of claims 1 to 7 when executing a program stored in a memory. 10.一种可读存储介质,其特征在于,当所述存储介质中的指令由电子设备的处理器执行时,使得电子设备能够执行如方法权利要求1-7中一个或多个所述的地震处理方法。10. A readable storage medium, characterized in that when the instructions in the storage medium are executed by a processor of an electronic device, the electronic device is enabled to perform the seismic processing method as described in one or more of method claims 1-7.
CN202211190474.8A 2022-09-28 2022-09-28 Earthquake processing method, device, electronic equipment and storage medium Pending CN117867643A (en)

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