CN117865081A - Helium neon removal system and method thereof - Google Patents

Abstract

The invention relates to the technical field of gas separation, in particular to a helium neon removal system and a helium neon removal method, wherein the helium neon removal system comprises a stage membrane group, a second membrane group, a third membrane group, an impermeable gas collecting pipeline, an emptying pipeline and a high-purity helium recovery device, the input end of the stage membrane group is filled with neon-containing high-purity helium provided by a neon-containing high-purity helium inlet, and the penetrating end of the stage membrane group is communicated with the input end of the second membrane group or the input end of the third membrane group or the high-purity helium recovery device; the permeation end of the second-level membrane group is communicated with the input end of the third-level membrane group or is led into a high-purity helium recovery device, and the non-permeation end of the first-level membrane group, the non-permeation end of the second-level membrane group and the non-permeation end of the third-level membrane group are connected in parallel to a non-permeation gas collecting pipeline; the primary membrane group, the secondary membrane group and the tertiary membrane group are also respectively communicated with an emptying pipeline; according to the invention, one group or two groups or three groups of separation modules can be selectively selected for separation so as to meet the filling requirement of high-purity helium, and non-permeable gas is discharged from a neon-rich gas outlet and is recovered.

Description

Helium neon removal system and method thereof

Technical Field

The invention relates to the technical field of gas separation, in particular to a helium neon-removing system and a helium neon-removing method.

Background

Helium has very low boiling point, low density, radioactivity and other special properties, becomes one of indispensable important gases in fields of national defense, military industry, high technology and the like, has irreplaceable functions in national defense, industrial and scientific fields such as aerospace, nuclear weapons, submarines, saturated diving operation, nuclear magnetic resonance, semiconductors, mobile phones, liquid crystal screens, optical fibers, large scientific devices and the like, is known as gas gold, and with the development of economy in China, the demand for helium is in an ascending trend, but the total amount of helium resources in China is less, the helium content is low, and the helium is a product of radioactive decay, exists in only a small part of natural gas at higher concentration, so that natural gas stripping helium is the only source of current commercial helium application; global industrial helium production mainly comes from direct natural gas helium extraction and liquefied natural gas flash (LNG-BOG) helium extraction; the processes of directly extracting helium from natural gas and extracting helium from liquefied natural gas flash gas (LNG-BOG) comprise crude helium extraction, crude helium refining and the like, and crude helium comprises impurities such as nitrogen, hydrogen, water, oxygen, argon, neon and the like; the technical routes of the natural gas helium separation method are classified into a cryogenic method, a membrane separation method, a pressure swing adsorption method and a combination method from a large scale. Wherein, nitrogen is removed by low-temperature condensation, hydrogen is removed by catalytic oxidation, water is removed by molecular sieve adsorption, and oxygen, argon and neon are removed by low-temperature adsorption.

In the prior art, because the physical and chemical properties of neon are similar to those of helium, such as low boiling point, small molecule, difficult adsorption and the like, the helium extracted by the natural gas helium separation method has the problem of exceeding the standard of neon enrichment.

Thus, there is a need for a helium de-neon system and method that addresses the above-described challenges.

Disclosure of Invention

In view of the above problems, the present invention provides a helium neon-removing system and a method thereof, which can selectively select one or two or three groups of membrane groups for separation to meet the requirement of high purity helium gas filling, and the non-permeate gas is discharged from a neon-rich gas outlet to recover neon-rich helium gas.

The invention solves the technical problems by adopting the technical scheme that:

a helium neon removal system comprises a first-stage membrane group, a second-stage membrane group, a third-stage membrane group, an impermeable gas collecting pipeline, an emptying pipeline and a high-purity helium recovery device, wherein the input end of the first-stage membrane group is filled with neon-containing high-purity helium provided by a user, and the penetration end of the first-stage membrane group is communicated with the input end of the second-stage membrane group or the input end of the third-stage membrane group or the high-purity helium recovery device; the permeation end of the second-level membrane group is communicated with the input end of the third-level membrane group or is led into a high-purity helium recovery device, and the non-permeation end of the first-level membrane group, the non-permeation end of the second-level membrane group and the non-permeation end of the third-level membrane group are connected in parallel to a non-permeation gas collecting pipeline; the primary membrane group, the secondary membrane group and the tertiary membrane group are also respectively communicated with an emptying pipeline through a safety valve.

Preferably, the high-purity helium recovery device further comprises a first-stage cold dryer, a first-stage buffer tank and a first-stage compressor, wherein the input end of the first-stage membrane group is connected with the first-stage cold dryer, the penetrating end of the first-stage membrane group is provided with a first switch valve, a fourth switch valve and a fifth switch valve respectively, the penetrating end of the first-stage membrane group is sequentially communicated with the first-stage buffer tank and the first-stage compressor through the first switch valve, the penetrating end of the first-stage membrane group is communicated with the third-stage membrane group through the fourth switch valve, and the penetrating end of the first-stage membrane group is communicated with the high-purity helium recovery device through the fifth switch valve.

Preferably, the device further comprises a second-stage cold dryer, a second-stage buffer tank and a second-stage compressor, wherein the input end of the second-stage membrane group is communicated with the second-stage cold dryer, the second-stage cold dryer is communicated with the first-stage compressor, the permeation end of the second-stage membrane group is provided with a second switch valve and a sixth switch valve, the permeation end of the second-stage membrane group is sequentially communicated with the second-stage buffer tank and the second-stage compressor through the second switch valve, and the permeation end of the second-stage membrane group is communicated with the high-purity helium recovery device through the sixth switch valve.

Preferably, the device further comprises a three-stage cold dryer, a three-stage buffer tank, a three-stage compressor, a four-stage buffer tank and a four-stage compressor; the three-stage membrane group input end is communicated with the three-stage cold dryer, the three-stage cold dryer is communicated with the two-stage compressor, the three-stage membrane group permeation end is provided with a third switch valve, and the three-stage membrane group permeation end is sequentially communicated with the three-stage buffer tank, the three-stage compressor, the four-stage buffer tank, the four-stage compressor and the high-purity helium recovery device through the third switch valve.

Preferably, the primary membrane group comprises a first membrane filter, a second membrane filter, a third membrane filter, a fourth membrane filter, a fifth membrane filter and a sixth membrane filter; the first membrane filter and the second membrane filter are respectively communicated with the first-stage cold dryer, the non-permeable ends of the first membrane filter and the second membrane filter are connected in parallel and then are connected with the input port of the third membrane filter, the non-permeable end of the third membrane filter is connected with the input port of the fourth membrane filter, the non-permeable end of the fourth membrane filter is connected with the input port of the fifth membrane filter, the non-permeable end of the fifth membrane filter is connected with the input port of the sixth membrane filter, the non-permeable end of the sixth membrane filter is connected with the non-permeable air collecting pipeline, and the permeable ends of the first membrane filter, the second membrane filter, the third membrane filter, the fourth membrane filter, the fifth membrane filter and the sixth membrane filter are all connected with the first-stage permeable air pipeline, and the output end of the first-stage permeable air pipeline is connected with the first switch valve, the fourth switch valve or the fifth switch valve.

Preferably, the second-stage membrane group comprises a seventh membrane filter, an eighth membrane filter, a ninth membrane filter, a tenth membrane filter, an eleventh membrane filter and a twelfth membrane filter, wherein the input ports of the seventh membrane filter and the eighth membrane filter are respectively communicated with the second-stage cold dryer, the non-permeable ends of the seventh membrane filter and the eighth membrane filter are connected in parallel and then are connected with the input port of the ninth membrane filter, the non-permeable end of the ninth membrane filter is connected with the input port of the tenth membrane filter, the non-permeable end of the tenth membrane filter is connected with the input port of the eleventh membrane filter, the non-permeable end of the eleventh membrane filter is connected with the input port of the twelfth membrane filter, and the non-permeable end of the twelfth membrane filter is connected with the non-permeable gas collecting pipeline; the infiltration ends of the seventh membrane filter, the eighth membrane filter, the ninth membrane filter, the tenth membrane filter, the eleventh membrane filter and the twelfth membrane filter are all connected with a second-stage infiltration pipeline, and the output end of the second-stage infiltration pipeline is connected with a second switch valve or a sixth switch valve.

Preferably, the third-stage membrane group comprises a thirteenth membrane filter, a fourteenth membrane filter, a fifteenth membrane filter, a sixteenth membrane filter, a seventeenth membrane filter and an eighteenth membrane filter, wherein the input ports of the thirteenth membrane filter and the fourteenth membrane filter are respectively communicated with the third-stage cold dryer, the non-permeable ends of the thirteenth membrane filter and the fourteenth membrane filter are connected in parallel and then are connected with the input port of the fifteenth membrane filter, the non-permeable end of the fifteenth membrane filter is connected with the input port of the sixteenth membrane filter, the non-permeable end of the seventeenth membrane filter is connected with the input port of the eighteenth membrane filter, the non-permeable ends of the seventeenth membrane filter are connected with the non-permeable end of the eighteenth membrane filter, the permeable ends of the thirteenth membrane filter, the fourteenth membrane filter, the fifteenth membrane filter, the seventeenth membrane filter and the eighteenth membrane filter are all connected with the third-stage permeable pipeline, and the output end of the third-stage permeable pipeline is connected with the third switch valve.

Preferably, the system further comprises a water cooling machine which is respectively communicated with the first-stage compressor, the second-stage compressor, the third-stage compressor and the fourth-stage compressor.

Preferably, the emptying pipeline is further connected with the primary buffer tank, the primary compressor, the secondary buffer tank, the secondary compressor, the tertiary buffer tank, the tertiary compressor, the quaternary buffer tank and the quaternary compressor through safety valves.

A helium neon-removing method is applied to the helium neon-removing system, and comprises the following steps:

s1, controlling an evacuation pipeline to be connected with each device for exhausting and releasing pressure;

s2, introducing neon-containing high-purity helium gas into a first-stage cold dryer, drying and cooling by the first-stage cold dryer, then introducing the helium gas into a first-stage membrane group, and introducing first-stage non-permeation gas discharged from a non-permeation end of the first-stage membrane group into a non-permeation gas collecting pipeline;

s3, collecting the primary permeation air discharged from the permeation end of the primary membrane group in a primary permeation air pipeline; if the purity of helium in the primary permeation gas is greater than or equal to a first preset value, communicating with a tertiary buffer tank, and entering S8; if the purity of helium in the primary permeation gas is lower than a second preset value, communicating the primary buffer tank, and entering S4; if the purity of helium in the primary permeation gas is greater than or equal to a second preset value but less than the first preset value, communicating a secondary buffer tank, and entering S6;

s4, enabling the primary permeation air to enter a primary compressor through a primary buffer tank, enabling the primary permeation air to be boosted by the primary compressor, then enabling the primary permeation air to enter a secondary cold dryer, enabling the primary permeation air to enter a secondary membrane group after being dried and cooled by the secondary cold dryer, and enabling secondary non-permeation air discharged from a non-permeation end of the secondary membrane group to enter a non-permeation air collecting pipeline;

S5, collecting secondary permeation air discharged from the permeation end of the secondary membrane group in a secondary permeation air pipeline; if the purity of helium in the secondary permeation gas is greater than or equal to a first preset value, communicating with a tertiary buffer tank, and entering S8; if the purity of helium in the secondary permeation gas is smaller than a first preset value, communicating the secondary buffer tank, and entering S6;

s6, enabling the second-level seepage or the first-level seepage to enter a second-level compressor through a second-level buffer tank, enabling the second-level seepage to be boosted by the second-level compressor, then enabling the second-level seepage to enter a third-level cold dryer, drying and cooling the second-level seepage or the first-level seepage through the third-level cold dryer, and then enabling the second-level seepage or the first-level seepage to enter a third-level membrane group;

s7, introducing the three-stage non-permeate gas discharged from the non-permeate end of the three-stage membrane group into a non-permeate gas collecting pipeline; three-stage permeation air discharged from the permeation end of the three-stage membrane group is collected in a three-stage permeation air pipeline and is introduced into a three-stage buffer tank;

s8: and (3) introducing gas discharged from the permeation end of the primary membrane group or the secondary membrane group or the tertiary membrane group into a tertiary compressor through a tertiary buffer tank for boosting, introducing the gas into a quaternary buffer tank, introducing the gas into the quaternary compressor through the quaternary buffer tank for continuous boosting, and introducing the gas into a high-purity helium collecting device.

Compared with the prior art, the invention has the beneficial effects that:

according to the helium neon removal system provided by the invention, the neon-containing high-purity helium can be selectively separated through the first-stage separation membrane, the second-stage separation membrane and the third-stage separation membrane, and the neon in the high-purity helium is separated to the maximum extent through the plurality of gas separation membranes, so that the production requirement of the high-purity helium with higher purity is ensured; the neon-rich non-permeate gas passing through the first-stage separation membrane, the second-stage separation membrane and the third-stage separation membrane is discharged from the neon-rich gas outlet through pipelines so as to be convenient for gas recovery, and the system is also connected with an evacuation pipeline to prevent the pressure in the system from being excessive and influence the safe operation of the system and equipment.

The helium neon-removing method provided by the invention is applied to the helium neon-removing system, the whole process flow does not generate gas phase change, the energy consumption generated by equipment operation is low, and the high-purity helium with the purity of 99.999% can be produced.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it will be obvious to those skilled in the art that other drawings can be obtained according to these drawings without inventive effort.

FIG. 1 is a schematic flow chart of a helium de-neon system according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a helium de-neon system according to an embodiment of the present invention;

FIG. 3 is a schematic view of a primary membrane module structure according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a second-stage membrane module according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a three-stage membrane module structure according to an embodiment of the present invention;

FIG. 6 is a flow chart of a helium de-neon method according to an embodiment of the present invention.

Reference numerals illustrate:

1. a first-stage cold dryer; 2. a first-stage membrane group; 21. a first membrane filter; 22. a second membrane filter; 23. a third membrane filter; 24. a fourth membrane filter; 25. a fifth membrane filter; 26. a sixth membrane filter; 3. a second-stage cold dryer; 4. a second-stage membrane group; 41. a seventh membrane filter; 42. an eighth membrane filter; 43. a ninth membrane filter; 44. a tenth membrane filter; 45. an eleventh membrane filter; 46. a twelfth membrane filter; 5. a third-stage cold dryer; 6. a third-stage membrane group; 61. a thirteenth membrane filter; 62. a fourteenth membrane filter; 63. a fifteenth membrane filter; 64. a sixteenth membrane filter; 65. seventeenth membrane filter; 66. an eighteenth membrane filter; 7. a first-stage buffer tank; 8. a first stage compressor; 9. a second-stage buffer tank; 10. a secondary compressor; 11. a three-stage buffer tank; 12. a three-stage compressor; 13. a four-stage buffer tank; 14. a four-stage compressor; 15. a water cooling machine; 1E, evacuating the pipeline; 2E, a non-permeate gas collecting pipeline; 3E, a water cooling flow path; 2F, a primary seepage pipeline; 4F, a secondary seepage pipeline; 6F, a three-level seepage pipeline; A. a neon-containing high purity helium inlet; B. an air discharge collection port; C. a neon-rich gas outlet; D. a high purity helium outlet; 1V, a first flow control valve; 2V, a second flow control valve; 3V, a third flow control valve; 1T, a first regulating valve; 2T, a second regulating valve; 3T, a third regulating valve; 1t, a fourth regulating valve; 2t, a fifth regulating valve; 3t, a sixth regulating valve; 1G, a first switch valve; 2G, a second switch valve; 3G, a third switch valve; 4G, a fourth switch valve; 5G, a fifth switching valve; 6G, a sixth switch valve; 1M, seventh switch valve.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the following description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements to be referred to must have a specific orientation or be constructed and operated in a specific orientation. The term "connected" merely means a connection between devices and is not of special significance.

1-5, a helium neon removal system comprises a first-stage membrane group 2, a second-stage membrane group 4, a third-stage membrane group 6, an impermeable gas collecting pipeline 2E, an emptying pipeline 1E and a high-purity helium recovery device, wherein the input end of the first-stage membrane group 2 is filled with neon-containing high-purity helium provided by a neon-containing high-purity helium inlet A, and the permeation end of the first-stage membrane group 2 is communicated with the input end of the second-stage membrane group 4, or is communicated with the input end of the third-stage membrane group 6, or is filled with the high-purity helium recovery device; the permeation end of the second-stage membrane group 4 is communicated with the input end of the third-stage membrane group 6 or is led into a high-purity helium recovery device, and the non-permeation end of the first-stage membrane group 2, the non-permeation end of the second-stage membrane group 4 and the non-permeation end of the third-stage membrane group 6 are connected in parallel to a non-permeation gas collecting pipeline 2E; the primary membrane group 2, the secondary membrane group 4 and the tertiary membrane group 6 are also respectively communicated with an emptying pipeline 1E through a safety valve.

Inputting neon-containing high-purity helium gas into the system at the neon-containing high-purity helium gas inlet A, separating by utilizing a plurality of groups of membrane filters, and separating the helium gas from the neon-containing high-purity helium gas by utilizing the molecular size and shape difference of the helium gas and the neon gas through the selective permeation action of the membrane by utilizing the membrane filter; the permeation gas collection pipeline 2E collects non-permeation gas which does not pass through the membrane filter to the position of a neon-rich gas outlet C to form high-neon-content helium, the permeation gas which is formed after permeation by the multi-stage membrane group passes through the position of a high-purity helium outlet D to form high-purity helium, and the high-purity helium is collected to a high-purity helium recovery device, so that most neon can be effectively removed by the first-stage membrane group 2, the second-stage membrane group 4 and the third-stage membrane group 6, and the neon removal effect is good;

in one embodiment, the neon-containing high-purity helium inlet A is connected with a pressure swing adsorption outlet, neon-containing high-purity helium separated by pressure swing adsorption is introduced into the system through the neon-containing high-purity helium inlet A after pressure fluctuation is stabilized by a buffer tank, the content of neon-containing high-purity helium is greater than or equal to 99.99%, and the content of high-purity helium formed at the high-purity helium outlet D is greater than or equal to 99.999%.

The evacuation pipeline 1E is used for collecting high-pressure gas accumulated by all components in the system or air exhausted by all components in the system, so that the pressure of the gas in the system is conveniently maintained, the safety of a pipeline is ensured, the contact and mixing of helium and air are avoided, the gas separation effect is influenced, and the gas collected by the evacuation pipeline 1E is exhausted and collected from the vent gas collecting port B.

The non-permeable gas collecting pipeline 2E discharges and collects neon-rich helium gas output from non-permeable ends of the primary membrane group 2, the secondary membrane group 4 and the tertiary membrane group 6 from a neon-rich gas outlet C; a fourth regulating valve 1T is arranged between the first-stage membrane group 2 and the non-permeable air collecting pipeline 2E, a fifth regulating valve 2T is arranged between the second-stage membrane group 4 and the non-permeable air collecting pipeline 2E, a sixth regulating valve 3T is arranged between the third-stage membrane group 6 and the non-permeable air collecting pipeline 2E, the non-permeable air collecting pipeline 2E is also communicated with a neon-containing high-purity helium inlet A, and a seventh switching valve 1M is arranged at the joint of the neon-containing high-purity helium inlet A and the non-permeable air collecting pipeline 2E.

Specifically, in one embodiment, if the neon-containing high purity helium gas is separated by the combined action of the first stage membrane group 2, the second stage membrane group 4 and the third stage membrane group 6, the neon-containing high purity helium gas contains neon components at about 50PPM, the neon-containing components in the first permeate gas separated in the first stage membrane group 2 is reduced from about 50PPM to about 30PPM, the neon-containing components in the second permeate gas separated in the second stage membrane group 4 is reduced from about 30PPM to about 10PPM, and the neon-containing components in the third permeate gas separated in the third stage membrane group 6 is reduced from about 10PPM to about 4PPM.

The helium neon-removing system further comprises a first-stage cold dryer 1, a first-stage buffer tank 7, a first-stage compressor 8 and a first-stage permeation pipeline 2F, wherein the input end of the first-stage membrane group 2 is connected with the first-stage cold dryer 1, the permeation end of the first-stage membrane group 2 is sequentially communicated with the first-stage buffer tank 7 and the first-stage compressor 8, neon-containing high-purity helium input from a neon-containing high-purity helium inlet A is introduced into the first-stage membrane group 2 for separation through the first-stage cold dryer 1, first-stage permeation gas is discharged from the permeation end of the first-stage membrane group 2 and introduced into the first-stage permeation pipeline 2F, and first-stage non-permeation gas is discharged from the non-permeation end of the first-stage membrane group 2 and introduced into a non-permeation gas collecting pipeline 2E; the primary compressor 8 is communicated with the water cooler 15 through a water cooling flow path 3E, and is subjected to heat exchange and cooling, and the primary membrane group 2, the primary buffer tank 7 and the primary compressor 8 are all communicated with the emptying pipeline 1E.

The first-stage permeation pipeline 2F is communicated with three flow paths, namely an inter-stage permeation flow path I, a skip-stage permeation flow path I and a skip-stage permeation flow path, a first switch valve 1G is arranged on the inter-stage permeation flow path I and is connected with a first-stage buffer tank 7, a fourth switch valve 4G is arranged on the skip-stage permeation flow path I and is connected with a three-stage module 6, a fifth switch valve 5G is arranged on the skip-stage permeation flow path and is communicated with a high-purity helium recovery device.

If the purity of helium in the primary permeation gas reaches a first preset value, controlling the fifth switch valve 5G to be opened, communicating with the high-purity helium recovery device, discharging from the high-purity helium outlet D and collecting by the high-purity helium recovery device; if the purity of helium in the primary permeation gas is lower than a second preset value, the first switch valve 1G is controlled to be opened, the primary buffer tank 7 is communicated, the primary permeation gas enters the secondary membrane group 4 for separation after being pressurized by the primary compressor 8, and if the purity of helium in the primary permeation gas reaches the second preset value, the fourth switch valve 4G is controlled to be opened, the secondary buffer tank 9 is communicated, and the primary permeation gas enters the tertiary membrane group 6 for separation.

Wherein the helium purity reaches a first preset value, for example, the first preset value is 99.999%; the second preset value is about 99.997%, and the specific value can be reasonably set according to the separation effect of the membrane filter in the actual separation process.

The first-stage cold dryer 1 has the function of cooling and drying gas, cooling the high-purity helium gas to be separated through a refrigerating device, keeping the temperature at 0-5 ℃, arranging a first gas inlet on one side of the first-stage cold dryer 1, connecting the first gas inlet with a neon-containing high-purity helium gas inlet A, arranging a first regulating valve 1T between the first gas inlet and the first gas inlet, arranging a first gas outlet on the other side of the first-stage cold dryer 1, connecting the first gas outlet with a first-stage membrane group 2, arranging a first flow control valve 1V between the first gas outlet and the first-stage membrane group 2, detecting the neon-containing high-purity gas flow outputted by the first-stage cold dryer 1 through cooling, feeding back to the first regulating valve 1T, controlling the size of a fluid through cavity in the first regulating valve 1T, enabling the first regulating valve 1T to continuously regulate the input flow of the neon-containing high-purity helium gas outputted from the neon-containing high-purity helium gas inlet A, refrigerating and drying the neon-containing high-purity helium gas through the first-stage cold dryer 1, and separating the neon-containing high-purity helium gas in the first-stage membrane group 2.

The primary membrane group 2 comprises a first membrane filter 21, a second membrane filter 22, a third membrane filter 23, a fourth membrane filter 24, a fifth membrane filter 25 and a sixth membrane filter 26, wherein the first membrane filter 21, the second membrane filter 22, the third membrane filter 23, the fourth membrane filter 24, the fifth membrane filter 25 and the sixth membrane filter 26 have the same structure, an input port is arranged on one side of the first membrane filter 21 for example, the first membrane filter 21 is connected with neon-containing high-purity helium after drying and cooling, one end of the first membrane filter 21 is a permeation end, permeation is discharged, the other end is an impermeable end, non-permeation gas is discharged, flow valves are arranged outside the permeation end and the non-permeation end of the first membrane filter 21, neon-containing high-purity helium gas after drying and cooling enters the first membrane filter 21 from the input port, neon-containing permeation gas discharged from the permeation end is less, and non-permeation gas neon-content discharged from the non-permeation end is more; the first membrane filter 21 and the second membrane filter 22 are connected in parallel and then connected in series with the third membrane filter 23, the fourth membrane filter 24, the fifth membrane filter 25 and the sixth membrane filter 26 in sequence, that is, the input ports of the first membrane filter 21 and the second membrane filter 22 are respectively communicated with the first gas outlet of the first stage chiller-dryer 1, the first membrane filter 21 and the second membrane filter 22 and the first gas outlet of the first stage chiller-dryer 1 are both provided with circulation valves, the on-off of the neon-containing high-purity helium after the drying and cooling is controlled, the connecting pipelines of the non-permeation ends of the first membrane filter 21 and the second membrane filter 22 are connected in parallel and then connected with the input port of the third membrane filter 23, the non-permeation end of the third membrane filter 23 is connected with the input port of the fourth membrane filter 24, the non-permeation end of the fourth membrane filter 24 is connected with the input port of the fifth membrane filter 25, the non-permeation end of the fifth membrane filter 25 is connected with the input port of the sixth membrane filter 26, the high-neon-containing gas discharged from the non-permeation end of the sixth membrane filter 26 is collected into non-permeation gas in the non-permeation gas collecting pipeline 2E, and the non-permeation gas is collected into the first stage-permeation gas in the non-permeation gas collecting pipeline 2E, and the first stage-permeation gas is collected into the first stage-permeation gas through the first permeation pipeline 21, the second membrane filter 22, the third membrane filter 23 and the third membrane filter 24 and the fourth membrane filter 24 are connected into the normal-permeation pipeline 2 through the normal-pressure filter 2 and the normal-pressure permeation pipeline if the normal-pressure filter 2 is required to be directly connected to the first stage permeation pipeline.

The first-stage buffer tank 7 has the effect of buffering pressure fluctuation between the equipment, so that the equipment works more stably, one end of the first-stage buffer tank 7 is provided with a first air inlet which is communicated with a first-stage seepage pipeline 2F, the first-stage seepage pipeline 7 is communicated with the first-stage seepage pipeline, the other end of the first-stage buffer tank 7 is provided with a first air outlet which is connected with a first-stage compressor 8, one side of the first-stage buffer tank 7 is provided with a first air discharge port, the first-stage buffer tank 7 is connected with an emptying pipeline 1E through the first air discharge port, and a safety valve is arranged between the first air discharge port and the emptying pipeline 1E and used for safety pressure relief.

One end of the primary compressor 8 is provided with a first air delivery port, the first air delivery port is connected with a first air outlet, the primary air permeating introduced into the primary compressor 8 is compressed and pressurized, after the primary compressor 8 works, the primary air permeating is boosted by about 1.5 times, the other end of the primary compressor 8 is provided with a first air outlet, the first air outlet is connected with the secondary cold dryer 3, one side of the primary compressor 8 is provided with a second air discharge port, the primary compressor 8 is connected with the emptying pipeline 1E through the second air discharge port, a safety valve is arranged between the second air discharge port and the emptying pipeline 1E and used for safety pressure relief, the other side of the primary compressor 8 is provided with a first heat exchange port, the first heat exchange port is connected with the water cooler 15 through the water cooling flow path 3E, cooling circulating water is introduced into the primary compressor 8 for heat exchange, and heat generated in the continuous operation process of the primary compressor 8 is led out through water cooling, so that the primary compressor 8 has a protection effect.

The helium neon-removing system further comprises a second-stage cold dryer 3, a second-stage buffer tank 9, a second-stage compressor 10 and a second-stage permeation pipeline 4F, wherein the input end of the second-stage membrane group 4 is communicated with the second-stage cold dryer 3, the second-stage cold dryer 3 is also communicated with the first-stage compressor 8, the permeation end of the second-stage membrane group 4 is sequentially communicated with the second-stage buffer tank 9 and the second-stage compressor 10, the first-stage permeation gas pressurized by the first-stage compressor 8 is introduced into the second-stage membrane group 4 through the second-stage cold dryer 3 to be separated, and the second-stage permeation gas discharged from the permeation end of the second-stage membrane group 4 is introduced into the second-stage permeation pipeline 4F; the secondary compressor 10 is also communicated with the water cooler 15 through a water cooling flow path 3E, and the secondary membrane group 4, the secondary buffer tank 9 and the secondary compressor 10 are all communicated with the emptying pipeline 1E for heat exchange and cooling.

The secondary seepage pipeline 4F is communicated with two flow paths, namely an inter-stage seepage flow path II and a skip-stage seepage flow path II, a second switch valve 2G is arranged on the inter-stage seepage flow path II and is connected with the secondary buffer tank 9, and a sixth switch valve 6G is arranged on the skip-stage seepage flow path II and is connected with the high-purity helium recovery device.

If the purity of helium in the secondary permeation gas reaches a first preset value, controlling a sixth switch valve 6G to be opened, and connecting the high-purity helium recovery device in a communicated manner, and discharging and collecting the helium from a high-purity helium outlet D; if the neon content in the secondary permeation gas does not reach the standard, the second switch valve 2G is controlled to be opened and communicated with the secondary buffer tank 9, so that the secondary permeation gas enters the third separation module for separation after being pressurized by the secondary compressor 10.

The structure and the function of the second-stage cold dryer 3 are the same as those of the first-stage cold dryer 1, a second gas inlet arranged on one side of the second-stage cold dryer 3 is connected with a first gas outlet on the first-stage compressor 8 through a pipeline, a second regulating valve 2T is arranged between the second gas inlet and the first gas outlet, the temperature of first-stage permeate air after being pressurized by the first-stage compressor 8 is increased, the temperature of the first-stage permeate air is reduced to 0-5 ℃ in the second-stage cold dryer 3, a second gas outlet arranged on the other side of the second-stage cold dryer 3 is connected with the second-stage membrane group 4 through a pipeline, a second flow control valve 2V is arranged between the second gas outlet and the second-stage membrane group 4, and the second flow control valve 2V is matched with the second regulating valve 2T to control the flow of first-stage permeate air.

The structure, function and connection mode of the second-stage membrane group 4 are the same as those of the first-stage membrane group 2, the second-stage membrane group 4 comprises a seventh membrane filter 41, an eighth membrane filter 42, a ninth membrane filter 43, a tenth membrane filter 44, an eleventh membrane filter 45 and a twelfth membrane filter 46, the input ports of the seventh membrane filter 41 and the eighth membrane filter 42 are respectively communicated with the gas outlet II on the second-stage cold dryer 3, a circulation valve is arranged between the seventh membrane filter 41 and the eighth membrane filter 42 and the gas outlet II, the on-off of the first-stage permeation is controlled, the connecting pipelines of the non-permeation ends of the seventh membrane filter 41 and the eighth membrane filter 42 are connected in parallel and then are connected with the input port of the ninth membrane filter 43, the non-permeation end of the ninth membrane filter 43 is connected with the input port of the tenth membrane filter 44, the non-permeation end of the tenth membrane filter 44 is connected with the input port of the eleventh membrane filter 45, the non-permeation end of the eleventh membrane filter 45 is connected with the input port of the twelfth membrane filter 46, the high-content neon-containing canned gas discharged from the non-permeation end of the twelfth membrane filter 46 is in the non-permeation collecting pipeline 2E, and the first-stage permeation pipeline is directly connected with the second-stage permeation pipeline 4 at normal temperature, and the normal temperature is needed to be cooled down the first-stage 4, and the first-stage permeation pipeline is needed to be cooled down, and the first-stage 4 is directly connected with the second-stage permeation pipeline 4, and the filtration filter is needed.

The structure of the secondary buffer tank 9 and the same-level buffer tank 7 in a connection mode are characterized in that an air inlet II arranged at one end of the secondary buffer tank 9 is communicated with a secondary permeation air pipeline 4F, secondary permeation air is introduced into the secondary buffer tank 9, an air outlet II arranged at the other end of the secondary buffer tank 9 is connected with a secondary compressor 10, an air discharge port III is arranged at one side of the secondary buffer tank 9, the secondary buffer tank 9 is connected with an emptying pipeline 1E through the air discharge port III, and a safety valve is arranged between the air discharge port III and the emptying pipeline 1E for safety pressure relief.

The structure and the connection mode of the two-stage compressor 10 are the same as those of the one-stage compressor 8, a second gas transmission port arranged at one end of the two-stage compressor 10 is connected with a second gas outlet, the second permeation gas introduced into the two-stage compressor 10 is pressurized, the pressure of the second permeation gas is increased by about 1.5 times after the two-stage compressor 10 works, a second gas exhaust port arranged at the other end of the two-stage compressor 10 is connected with a third-stage cold dryer 5, a fourth gas exhaust port is arranged at one side of the two-stage compressor 10, the two-stage compressor 10 is connected with a emptying pipeline 1E through the fourth gas exhaust port, and a safety valve is arranged between the fourth gas exhaust port and the emptying pipeline 1E for safety pressure relief; the second heat exchange port arranged on the other side of the secondary compressor 10 is connected with the water cooler 15 through the water cooling flow path 3E, cooling circulating water is introduced into the secondary compressor 10, and heat generated by the operation of the secondary compressor 10 is led out.

The helium neon removal system further comprises a three-stage cold dryer 5, a three-stage buffer tank 11, a three-stage compressor 12, a four-stage buffer tank 13, a four-stage compressor 14 and a three-stage permeation pipeline 6F, wherein the input end of the three-stage membrane group 6 is communicated with the three-stage cold dryer 5, the three-stage cold dryer 5 is also communicated with the two-stage compressor 10, the permeation end of the three-stage membrane group 6 is sequentially communicated with the three-stage buffer tank 11, the three-stage compressor 12, the four-stage buffer tank 13 and the four-stage compressor 14, the three-stage permeation pipeline 6F is communicated with the three-stage permeation pipeline 6F through the three-stage cold dryer 5 after the three-stage permeation pipeline 6 is pressurized by the two-stage compressor 10; the three-stage membrane group 6, the three-stage buffer tank 11, the three-stage compressor 12, the four-stage buffer tank 13 and the four-stage compressor 14 are communicated with the air discharge collecting port B through an emptying pipeline 1E, the emptying and pressure relief are realized, and the three-stage compressor 12 and the four-stage compressor 14 are communicated with the water cooler 15 through a water cooling flow path 3E, and the heat exchange and cooling are realized.

The third-stage permeation pipeline 6F is communicated with the third-stage buffer tank 11, a third switch valve 3G is arranged at the joint of the third-stage buffer tank 11 and the third-stage permeation pipeline 6F, the on-off of the third-stage permeation gas is controlled, the third switch valve 3G is opened, the third-stage buffer tank 11 is communicated, the third-stage permeation gas is pressurized through the third-stage buffer tank 11 by the three-stage compressor 12 and the four-stage compressor 14 and then rises to about 20MPA, and the third-stage permeation gas is discharged from the high-purity helium outlet D and is collected by the high-purity helium recovery device.

The structure and the function of the three-stage cold dryer 5 are the same as those of the two-stage cold dryer 3, a gas inlet arranged on one side of the three-stage cold dryer 5 is connected with a second exhaust port on the two-stage compressor 10 through a pipeline, a third regulating valve 3T is arranged between the third gas inlet and the second exhaust port, the temperature of the second-stage permeate air pressurized by the two-stage compressor 10 is increased, the temperature of the second-stage permeate air is reduced to 0-5 ℃ in the three-stage cold dryer 5, a gas outlet arranged on the other side of the three-stage cold dryer 5 is connected with the three-stage membrane group 6 through a pipeline, a third flow control valve 3V is arranged between the third gas outlet and the three-stage membrane group 6, and the third flow control valve 3V is matched with the third regulating valve 3T to control the flow of the second-stage permeate air.

The structure, function and connection mode of the three-stage membrane group 6 are the same as those of the two-stage membrane group 4, the three-stage membrane group 6 comprises a thirteenth membrane filter 61, a fourteenth membrane filter 62, a fifteenth membrane filter 63, a sixteenth membrane filter 64, a seventeenth membrane filter 65 and an eighteenth membrane filter 66, the input ports of the thirteenth membrane filter 61 and the fourteenth membrane filter 62 are respectively communicated with a gas outlet III on the three-stage chiller-dryer 5, a circulation valve is arranged between the thirteenth membrane filter 61, the fourteenth membrane filter 62 and the gas outlet III, the on-off of the second-stage permeation is controlled, connecting pipelines of the non-permeation ends of the thirteenth membrane filter 61 and the fourteenth membrane filter 62 are connected in parallel and then are connected with the input port of the fifteenth membrane filter 63, the non-permeation end of the fifteenth membrane filter 63 is connected with the input port of the sixteenth membrane filter 64, the non-permeation end of the seventeenth membrane filter 65 is connected with the input port of the eighteenth membrane filter 66, the non-permeation end of the seventeenth membrane filter 65 is connected with the eighteenth membrane filter 66, the high-content neon gas at the non-permeation end of the eighteenth membrane filter 66 is in a non-permeation collecting pipeline 2E, the non-permeation end of the third membrane filter 61 is in the non-permeation collecting pipeline 6F, the non-permeation end is in the normal temperature collecting pipeline F, and the non-permeation pipeline F is required to be compressed, and the non-permeation pipeline F is compressed at the normal temperature, and the normal temperature is the filtration pipeline is compressed to the filtration and the filtration pipeline is the filtration.

The structure, the function and the connection mode of the three-stage buffer tank 11 are the same as those of the two-stage buffer tank 9, an air inlet three arranged at one end of the three-stage buffer tank 11 is communicated with a three-stage seepage pipeline 6F, three-stage seepage air is introduced into the three-stage buffer tank 11, an air outlet three arranged at the other end of the three-stage buffer tank 11 is connected with a three-stage compressor 12, one side of the three-stage buffer tank 11 is provided with a deflation port five, the three-stage buffer tank 11 is connected with an emptying pipeline 1E through the deflation port five, and a safety valve is arranged between the deflation port five and the emptying pipeline 1E and used for safety pressure relief.

The structure, the function and the connection mode of the three-stage compressor 12 are the same as those of the two-stage compressor 10, a gas transmission port III arranged at one end of the three-stage compressor 12 is connected with a gas outlet III on the three-stage buffer tank 11, three-stage permeation gas introduced into the three-stage compressor 12 is pressurized, the three-stage permeation gas is pressurized by about 1.5 times after the three-stage compressor 12 works, a gas outlet III arranged at the other end of the three-stage compressor 12 is connected with the four-stage buffer tank 13, a gas discharge port VI is arranged at one side of the three-stage compressor 12, the three-stage compressor 12 is connected with the emptying pipeline 1E through the gas discharge port VI, and a safety valve is arranged between the gas discharge port VI and the emptying pipeline 1E for safety pressure relief; the third heat exchange port arranged on the other side of the three-stage compressor 12 is connected with the water cooler 15 through a water cooling flow path 3E, cooling circulating water is introduced into the three-stage compressor 12, and heat generated by the operation of the three-stage compressor 12 is led out.

The four-stage buffer tank 13 is structurally and functionally the same as the three-stage buffer tank 11, an air inlet four arranged at one end of the four-stage buffer tank 13 is communicated with an air outlet three arranged on the three-stage compressor 12, three-stage seepage air after 1.5 times of pressure rise is introduced into the four-stage buffer tank 13, an air outlet four arranged at the other end of the four-stage buffer tank 13 is connected with the four-stage compressor 14, one side of the four-stage buffer tank 13 is provided with a deflation port seven, the four-stage buffer tank 13 is connected with the emptying pipeline 1E through the deflation port seven, and a safety valve is arranged between the deflation port seven and the emptying pipeline 1E for safety pressure relief.

The structure and the function of the four-stage compressor 14 are the same as those of the three-stage compressor 12, a gas transmission port IV arranged at one end of the four-stage compressor 14 is connected with a gas outlet IV on the four-stage buffer tank 13, three-stage permeation gas introduced into the four-stage compressor 14 is pressurized, the three-stage permeation gas is pressurized by about 1.5 times after the four-stage compressor 14 works, about 20MPA is realized, high-purity helium is discharged from a high-purity helium outlet D through a pipeline by a gas outlet IV arranged at the other end of the four-stage compressor 14 and is collected through a high-purity helium recovery device, a gas discharge port eighth is arranged at one side of the four-stage compressor 14, the four-stage compressor 14 is connected with a gas discharge pipeline 1E through the gas discharge port eighth, and a safety valve is arranged between the gas discharge port eighth and the gas discharge pipeline 1E for safety pressure relief; and a heat exchange port IV is arranged on the other side of the four-stage compressor 14.

The helium neon removal system further comprises a water cooling machine 15, the water cooling machine 15 is connected with a water cooling flow path 3E, the water cooling flow path 3E is respectively communicated with a first heat exchange port on the primary compressor 8, a second heat exchange port on the secondary compressor 10, a third heat exchange port on the tertiary compressor 12 and a fourth heat exchange port on the quaternary compressor 14, circulation valves are arranged between the water cooling machine 15 and the primary compressor 8, the secondary compressor 10, the tertiary compressor 12 and the quaternary compressor 14, the on-off of cooling circulating water is controlled, the water cooling flow path 3E can be used for respectively introducing cooling circulating water into the primary compressor 8, the secondary compressor 10, the tertiary compressor 12 and the quaternary compressor 14, heat generated by the operation of equipment is led out, and the cooling circulating water heated after heat exchange returns to the water cooling machine 15 through a heat exchange loop (not shown in the figure) so that the cooling circulating water heated after heat exchange is cooled down and is recycled.

Further, the output ratio of the permeation gas to the non-permeation gas in the primary membrane group 2 is approximately 8:2, and the output ratio of the permeation gas to the non-permeation gas of the secondary membrane group 4 and the tertiary membrane group 6 is the same as that of the primary membrane group 2; for example, if the input amount of the neon-containing high-purity helium gas delivered from the neon-containing high-purity helium gas inlet A is 40 cubic meters, after the separation of the first-stage membrane group 2, the first-stage permeation gas and the first-stage non-permeation gas are respectively about 32 cubic meters and 8 cubic meters; after the primary permeation gas is introduced into the secondary membrane group 4 for separation, the secondary permeation gas and the secondary non-permeation gas are respectively about 25.6 cubic meters and 6.4 cubic meters; after the secondary permeate gas is introduced into the tertiary membrane group 6 for separation, the tertiary permeate gas and the tertiary non-permeate gas are respectively about 20.48 cubic meters and 5.12 cubic meters.

According to the helium neon removal system provided by the invention, the neon-containing high-purity helium can be selectively separated through the first-stage separation membrane, the second-stage separation membrane and the third-stage separation membrane, and the neon in the high-purity helium is separated to the maximum extent through the plurality of gas separation membranes, so that the production requirement of the high-purity helium with the purity of 99.999% is met; the high-neon-content non-permeable gas passing through the first-stage separation membrane, the second-stage separation membrane and the third-stage separation membrane in the system is discharged from a neon-rich gas outlet through a pipeline; the whole process flow of the system has no gas phase change, the energy consumption generated by the operation of equipment is low, and the system is also connected with an evacuation pipeline, so that the system is prevented from being excessively high in pressure and the safe operation of the system and the equipment is prevented from being influenced.

Referring to fig. 6, a helium neon-removing method is applied to a helium neon-removing system provided in the above embodiment, and includes the following steps:

s1, controlling a safety valve connected to an emptying pipeline 1E to be opened, so that each device in the system is exhausted and depressurized, and the gas exhausted from the system is exhausted from an air exhaust collecting port B;

s2, opening a first regulating valve 1T and a first flow control valve 1V, leading neon-containing high-purity helium gas into a first-stage cold dryer 1 from a neon-containing high-purity helium gas inlet A, drying and cooling to 0-5 ℃ through the first-stage cold dryer 1, leading the dried and cooled neon-containing high-purity helium gas into a first-stage membrane group 2 for separation, leading first-stage non-permeable gas discharged from a non-permeable end of the first-stage membrane group 2 to enter a non-permeable gas collecting pipeline 2E after passing through a fourth regulating valve 1T, and discharging the first-stage non-permeable gas from a neon-rich gas outlet C;

S3, collecting the primary permeation air discharged from the permeation end of the primary membrane group 2 in a primary permeation air pipeline 2F; if the purity of helium in the primary permeation gas is greater than or equal to a first preset value, controlling the fifth switch valve 5G to be opened, communicating the third-stage buffer tank 11, and entering S8; if the purity of helium in the primary permeation gas is lower than a second preset value, controlling the first switch valve 1G to be opened, communicating the primary buffer tank 7, and entering S4; if the purity of helium in the primary permeation gas is larger than or equal to a second preset value but smaller than a first preset value, controlling the fourth switch valve 4G to be opened, communicating the secondary buffer tank 9, and entering S6;

s4, opening a second regulating valve 2T and a second flow control valve 2V, enabling the primary permeation gas to enter a primary compressor 8 through a primary buffer tank 7, enabling the primary permeation gas to be boosted by about 1.5 times after the primary compressor 8 works, then, introducing the primary permeation gas into a secondary cold dryer 3, cooling to 0-5 ℃ through the secondary cold dryer 3, enabling the cooled primary permeation gas to enter a secondary membrane group 4 for separation, enabling the secondary non-permeation gas discharged from a non-permeation end of the secondary membrane group 4 to enter a non-permeation gas collecting pipeline 2E after passing through a fifth regulating valve 2T, and discharging the non-permeation gas from a neon-rich gas outlet C;

s5, collecting secondary permeation air discharged from the permeation end of the secondary membrane group 4 in a secondary permeation air pipeline 4F; if the purity of helium in the secondary permeation gas is greater than or equal to a first preset value, controlling a sixth switch valve 6G to be opened, communicating with a tertiary buffer tank 11, and entering S8; if the purity of helium in the secondary permeation gas is smaller than the first preset value, controlling the second switch valve 2G to be opened, communicating the secondary buffer tank 9, and entering S6;

S6, opening a third regulating valve 3T and a third flow control valve 3V, enabling the secondary permeation gas or the primary permeation gas to enter a secondary compressor 10 through a secondary buffer tank 9, enabling the secondary permeation gas to be boosted by about 1.5 times after the secondary compressor 10 works, then, introducing the secondary permeation gas into a tertiary cold dryer 5, cooling to 0-5 ℃ through the tertiary cold dryer 5, and enabling the cooled secondary permeation gas to enter a tertiary membrane group 6 for separation;

s7, the tertiary impermeable gas discharged from the impermeable end of the tertiary membrane group 6 passes through a sixth regulating valve 3T, enters a impermeable gas collecting pipeline 2E, and is discharged from a neon-rich gas outlet C; opening a third switch valve 3G, collecting the third-stage permeation air discharged from the permeation end of the third-stage membrane group 6 in a third-stage permeation air pipeline 6F, and introducing the third-stage permeation air into a third-stage buffer tank 11;

s8: penetrating gas discharged from the penetrating end of the primary membrane group 2 or the secondary membrane group 4 or the tertiary membrane group 6 is pumped into the tertiary compressor 12 through the tertiary buffer tank 11 for boosting, then is pumped into the quaternary buffer tank 13, enters the quaternary compressor 14 from the quaternary buffer tank 13 for continuously boosting to about 20MPA, and then is discharged from the high-purity helium outlet D and is collected by the high-purity helium recovery device.

It can be appreciated that the helium de-neon method and the helium de-neon system provided by the invention have the same beneficial effects, and are not described in detail herein.

Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The helium neon removing system is characterized by comprising a first-stage membrane group (2), a second-stage membrane group (4), a third-stage membrane group (6), an impermeable gas collecting pipeline (2E), an emptying pipeline (1E) and a high-purity helium recovery device, wherein the input end of the first-stage membrane group (2) is filled with neon-containing high-purity helium provided by a user, and the permeation end of the first-stage membrane group (2) is communicated with the input end of the second-stage membrane group (4), or is communicated with the input end of the third-stage membrane group (6), or is filled with the high-purity helium recovery device; the permeation end of the second-level membrane group (4) is communicated with the input end of the third-level membrane group (6) or is led into a high-purity helium recovery device, and the non-permeation end of the first-level membrane group (2), the non-permeation end of the second-level membrane group (4) and the non-permeation end of the third-level membrane group (6) are connected in parallel to a non-permeation gas collecting pipeline (2E); the primary membrane group (2), the secondary membrane group (4) and the tertiary membrane group (6) are also respectively communicated with an emptying pipeline (1E) through a safety valve.

2. The helium neon removal system according to claim 1, further comprising a primary cold dryer (1), a primary buffer tank (7) and a primary compressor (8), wherein the input end of the primary membrane group (2) is connected with the primary cold dryer (1), the penetrating end of the primary membrane group (2) is respectively provided with a first switch valve (1G), a fourth switch valve (4G) and a fifth switch valve (5G), the penetrating end of the primary membrane group (2) is sequentially communicated with the primary buffer tank (7) and the primary compressor (8) through the first switch valve (1G), the penetrating end of the primary membrane group (2) is communicated with a tertiary membrane group (6) through the fourth switch valve (4G), and the penetrating end of the primary membrane group (2) is communicated with a high-purity helium recovery device through the fifth switch valve (5G).

3. The helium neon removal system according to claim 2, further comprising a secondary cold dryer (3), a secondary buffer tank (9) and a secondary compressor (10), wherein the input end of the secondary membrane group (4) is communicated with the secondary cold dryer (3), the secondary cold dryer (3) is communicated with the primary compressor (8), a second switch valve (2G) and a sixth switch valve (6G) are arranged at the penetrating end of the secondary membrane group (4), the penetrating end of the secondary membrane group (4) is sequentially communicated with the secondary buffer tank (9) and the secondary compressor (10) through the second switch valve (2G), and the penetrating end of the secondary membrane group (4) is communicated with the high-purity helium recovery device through the sixth switch valve (6G).

4. A helium de-neon system according to claim 3, further comprising a tertiary cold dryer (5), a tertiary buffer tank (11), a tertiary compressor (12), a quaternary buffer tank (13) and a quaternary compressor (14); the three-stage membrane group (6) input end is communicated with the three-stage cold dryer (5) and the two-stage compressor (10), the third switching valve (3G) is arranged at the permeation end of the three-stage membrane group (6), and the permeation end of the three-stage membrane group (6) is sequentially communicated with the three-stage buffer tank (11), the three-stage compressor (12), the four-stage buffer tank (13) and the four-stage compressor (14) through the third switching valve (3G) to recycle high-purity helium.

5. A helium de-neon system according to claim 2, wherein said primary membrane group (2) comprises a first membrane filter (21), a second membrane filter (22), a third membrane filter (23), a fourth membrane filter (24), a fifth membrane filter (25) and a sixth membrane filter (26); the first membrane filter (21) and the second membrane filter (22) are respectively communicated with the first-stage cold dryer (1), the first membrane filter (21) and the second membrane filter (22) are connected in parallel and then are connected with the input port of the third membrane filter (23), the non-permeable end of the third membrane filter (23) is connected with the input port of the fourth membrane filter (24), the non-permeable end of the fourth membrane filter (24) is connected with the input port of the fifth membrane filter (25), the non-permeable end of the fifth membrane filter (25) is connected with the input port of the sixth membrane filter (26), the non-permeable end of the sixth membrane filter (26) is connected with the non-permeable gas collecting pipeline (2E), and the permeable ends of the first membrane filter (21), the second membrane filter (22), the third membrane filter (23), the fourth membrane filter (24), the fifth membrane filter (25) and the sixth membrane filter (26) are all connected with the first-stage permeable gas pipeline (2F), and the output end of the first-stage permeable gas pipeline (2F) is connected with the first switch valve (1G), the fourth switch valve (4G) or the fifth switch valve (5G).

6. A helium removal neon system according to claim 3, wherein the second-stage membrane module (4) comprises a seventh membrane filter (41), an eighth membrane filter (42), a ninth membrane filter (43), a tenth membrane filter (44), an eleventh membrane filter (45) and a twelfth membrane filter (46), wherein the input ports of the seventh membrane filter (41) and the eighth membrane filter (42) are respectively communicated with the second-stage dryer (3), the non-permeable ends of the seventh membrane filter (41) and the eighth membrane filter (42) are connected in parallel and then are connected with the input port of the ninth membrane filter (43), the non-permeable end of the ninth membrane filter (43) is connected with the input port of the tenth membrane filter (44), the non-permeable end of the tenth membrane filter (44) is connected with the input port of the eleventh membrane filter (45), the non-permeable end of the eleventh membrane filter (45) is connected with the input port of the twelfth membrane filter (46), and the non-permeable end of the twelfth membrane filter (46) is connected with the non-permeable gas collecting pipeline (2E); the infiltration ends of the seventh membrane filter (41), the eighth membrane filter (42), the ninth membrane filter (43), the tenth membrane filter (44), the eleventh membrane filter (45) and the twelfth membrane filter (46) are all connected with a secondary infiltration air pipeline (4F), and the output end of the secondary infiltration air pipeline (4F) is connected with a second switch valve (2G) or a sixth switch valve (6G).

7. The helium removal neon system according to claim 4, wherein the third-stage membrane group (6) comprises a thirteenth membrane filter (61), a fourteenth membrane filter (62), a fifteenth membrane filter (63), a sixteenth membrane filter (64), a seventeenth membrane filter (65) and an eighteenth membrane filter (66), the input ports of the thirteenth membrane filter (61) and the fourteenth membrane filter (62) are respectively communicated with the third-stage cold dryer (5), the non-permeable ends of the thirteenth membrane filter (61) and the fourteenth membrane filter (62) are connected in parallel and then connected with the input port of the fifteenth membrane filter (63), the non-permeable end of the fifteenth membrane filter (63) is connected with the input port of the sixteenth membrane filter (64), the non-permeable end of the seventeenth membrane filter (64) is connected with the input port of the eighteenth membrane filter (66), the non-permeable air collecting line (2E) is connected from the non-permeable end of the eighteenth membrane filter (66), the thirteenth membrane filter (61), the fourteenth membrane filter (62), the non-permeable end of the sixteenth membrane filter (63) is connected with the input port of the seventeenth membrane filter (65), the eighteenth membrane filter (65) is connected with the input port of the eighteenth membrane filter (65), the output end of the three-level seepage pipeline (6F) is connected with a third switch valve (3G).

8. The helium de-neon system of claim 4, further comprising a water cooler (15), wherein the water cooler (15) is in communication with the primary compressor (8), the secondary compressor (10), the tertiary compressor (12) and the quaternary compressor (14), respectively.

9. A helium de-neon system according to claim 1, wherein said evacuation line (1E) is further connected to a primary buffer tank (7), a primary compressor (8), a secondary buffer tank (9), a secondary compressor (10), a tertiary buffer tank (11), a tertiary compressor (12), a quaternary buffer tank (13) and a quaternary compressor (14) by safety valves.

10. A helium de-neon method for use in a helium de-neon system according to any one of claims 1-9, comprising the steps of:

s1, controlling an evacuation pipeline (1E) to be connected with each device for exhausting and releasing pressure;

s2, introducing neon-containing high-purity helium gas into a first-stage cold dryer (1), drying and cooling by the first-stage cold dryer (1), then introducing the helium gas into a first-stage membrane group (2), and introducing first-stage non-permeation gas discharged from a non-permeation end of the first-stage membrane group (2) into a non-permeation gas collecting pipeline (2E);

s3, collecting the primary permeation air discharged from the permeation end of the primary membrane group (2) in a primary permeation air pipeline (2F); if the purity of helium in the primary permeation gas is greater than or equal to a first preset value, communicating with a tertiary buffer tank (11), and entering S8; if the purity of helium in the primary permeation gas is lower than a second preset value, communicating the primary buffer tank (7), and entering S4; if the purity of helium in the primary permeation gas is larger than or equal to a second preset value but smaller than a first preset value, communicating a secondary buffer tank (9), and entering S6;

S4, enabling the primary seepage air to enter a primary compressor (8) through a primary buffer tank (7), enabling the primary seepage air to be boosted by the primary compressor (8), then enabling the primary seepage air to enter a secondary cold dryer (3), enabling the primary seepage air to enter a secondary membrane group (4) after being dried and cooled by the secondary cold dryer (3), and enabling the secondary non-seepage air discharged from a non-seepage end of the secondary membrane group (4) to enter a non-seepage air collecting pipeline (2E);

s5, collecting secondary permeation air discharged from the permeation end of the secondary membrane group (4) in a secondary permeation air pipeline (4F); if the purity of helium in the secondary permeation gas is greater than or equal to a first preset value, communicating with a tertiary buffer tank (11), and entering S8; if the purity of helium in the secondary permeation gas is smaller than a first preset value, communicating the secondary buffer tank (9), and entering S6;

s6, enabling the second-level seepage or the first-level seepage to enter a second-level compressor (10) through a second-level buffer tank (9), enabling the second-level seepage to be boosted by the second-level compressor (10), then, enabling the second-level seepage to enter a third-level cold dryer (5), drying and cooling the second-level seepage by the third-level cold dryer (5), and then, enabling the second-level seepage to enter a third-level membrane group (6);

s7, introducing the three-stage non-permeate gas discharged from the non-permeate end of the three-stage membrane group (6) into a non-permeate gas collecting pipeline (2E); the third-stage permeation air discharged from the permeation end of the third-stage membrane group (6) is collected in a third-stage permeation air pipeline (6F) and is introduced into a third-stage buffer tank (11);

S8: and (3) introducing gas exhausted from the permeation end of the primary membrane group (2) or the secondary membrane group (4) or the tertiary membrane group (6) into the tertiary compressor (12) through the tertiary buffer tank (11) for boosting, introducing the gas into the quaternary buffer tank (13), introducing the gas into the quaternary compressor (14) through the quaternary buffer tank (13) for continuously boosting, and introducing the gas into the high-purity helium gas collecting device.