CN117849402A - Bearing device and detection equipment - Google Patents

Abstract

The embodiment of the invention discloses a bearing device, which comprises: a bottom plate; the top plate is arranged opposite to the bottom plate; the driving motor is fixed on the bottom plate, and the output end of the driving motor is connected with the top plate; a spring piece stacked between the bottom plate and the top plate and disposed adjacent to the driving motor; the spring piece is provided with a first fixed area and a second fixed area which are opposite; the top plate is fixedly connected with the first fixing area, the bottom plate is connected with the second fixing area, and the orthographic projection positions of the first fixing area and the second fixing area on the bottom plate are different. The bearing device disclosed by the embodiment of the invention can realize the guiding of the voice coil motor.

Description

Bearing device and detection equipment

Technical Field

The present invention relates to the field of semiconductor detection technologies, and in particular, to a carrier device and a detection apparatus.

Background

In the semiconductor detection technology, for example, a wafer detection device is generally required to be provided with a bearing device to bear a piece to be detected such as a wafer, the bearing device is required to be controlled to drive the piece to be detected to carry out operations such as movement, rotation and the like in all directions in space in the detection process, and sometimes the bearing angle of the bearing device is required to be adjusted, so that the piece to be detected can be adjusted from different angles conveniently. In the prior art, when the voice coil motor is used for moving up and down, the carrying device can drive the platform carrying the sample to be detected to shift together, so that the problem of inaccurate position shift detection result of the piece to be detected is caused.

Therefore, it is desirable to provide a solution to the problem of carrier deflection caused by the voice coil motor.

Disclosure of Invention

Therefore, in order to overcome at least part of the defects in the prior art, the embodiment of the invention provides a bearing device and a detection device, which can guide a voice coil motor and reduce the deviation of the bearing device.

Specifically, in one aspect, an embodiment of the present invention provides a carrier device, including: a bottom plate; the top plate is arranged opposite to the bottom plate; the driving motor is fixed on the bottom plate, and the output end of the driving motor is connected with the top plate; a spring piece stacked between the bottom plate and the top plate and disposed adjacent to the driving motor; the spring piece is provided with a first fixed area and a second fixed area which are opposite; the top plate is fixedly connected with the first fixing area, the bottom plate is connected with the second fixing area, and the orthographic projection positions of the first fixing area and the second fixing area on the bottom plate are different.

In one embodiment, the number of the spring pieces is a plurality of the spring pieces, and the plurality of the spring pieces are stacked in order from the bottom plate to the top plate.

In one embodiment, the carrier device further comprises: the first upper fixing block is fixed on one side of the top plate adjacent to the plurality of spring pieces and is fixedly connected with the first fixing area; the first lower fixing block is fixed on one side of the bottom plate, which is adjacent to the plurality of spring pieces, and is fixedly connected with the second fixing area.

In one embodiment, the carrier device further comprises: the second upper fixing blocks are fixed on one sides of the plurality of spring pieces, which deviate from the first lower fixing blocks, and are arranged at intervals with the top plate; the second lower fixing block is fixed on one side of the plurality of spring pieces, which is away from the first upper fixing block, and is arranged at intervals with the bottom plate.

In one embodiment, the first upper fixed block has a first height in a direction from the bottom plate to the top plate; the second upper fixing block has a second height in a direction from the bottom plate to the top plate, and the first height is greater than the second height; and grooves are formed in the bottom plate corresponding to the second lower fixing blocks.

In one embodiment, a first hollowed-out gap is arranged between the first fixing area and the second fixing area.

In one embodiment, the first fixing area is located at one side of the first hollowed-out gap adjacent to the periphery of the spring piece; the second fixing area is located at one side of the first hollowed-out gap, which is adjacent to the center of the spring piece.

In one embodiment, the number of driven motors is a plurality, the plurality of driven motors being disposed around the periphery of the spring plate; the first fixing area is provided with a plurality of second hollowed-out gaps which are in one-to-one correspondence with the driving motors, and the second hollowed-out gaps extend towards the direction close to the second fixing area along the first fixing area respectively and divide the first fixing area into a plurality of first sub-fixing areas.

In one embodiment, the carrier device further comprises: the sucking disc is used for fixing one side of the top plate, which is away from the spring piece; the turntable is fixed on one side of the bottom plate, which is away from the spring piece, and can drive the bottom plate to rotate.

Another embodiment of the present invention provides a detection device comprising a carrying arrangement according to any of the preceding embodiments.

As can be seen from the above, the above embodiments of the present invention can achieve one or more of the following advantages: through setting up spring leaf and roof and the specific connection of bottom plate for driving motor is close to or keeps away from the bottom plate at the effect of spring leaf down the roof can only reciprocate relative to the bottom plate, reduces the deviation of horizontal direction, guarantees the accuracy when bearing device removes the thing that awaits measuring.

Other aspects and features of the present invention will become apparent from the following detailed description, which refers to the accompanying drawings. It is to be understood, however, that the drawings are designed solely for the purposes of illustration and not as a definition of the limits of the invention. It should be further understood that the drawings are not necessarily drawn to scale and that, unless otherwise indicated, they are merely intended to conceptually illustrate the structures and procedures described herein.

Drawings

The following detailed description of specific embodiments of the invention refers to the accompanying drawings.

Fig. 1 is a schematic structural diagram of a detection device according to an embodiment of the present invention.

Fig. 2 is a schematic overall structure of a carrying device according to an embodiment of the invention.

Fig. 3 is a schematic structural view of the carrying device shown in fig. 2 without the suction cup.

Fig. 4 is an exploded view of a part of the structure of the carrying device shown in fig. 2.

Fig. 5 is a schematic structural diagram of a spring leaf in a carrying device according to an embodiment of the present invention.

[ reference numerals description ]

200: a detection device; 100: a carrying device; 10: a bottom plate; 11: a groove; 20: a top plate; 30: a driving motor; 40: a spring piece; 41: a first fixed region; 411: a first sub-fixed region; 42: a second fixed region; 43: a first hollowed-out gap; 44: the second hollowed-out gap; 51: a first upper fixing block; 52: a first lower fixing block; 53: a second upper fixing block; 54: a second lower fixing block; 60: a suction cup; 70: a turntable.

Detailed Description

In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings.

In order that those skilled in the art will better understand the technical solutions of the present invention, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It should be further noted that the division of the embodiments in the present invention is only for convenience of description, and should not be construed as a specific limitation, and features in the various embodiments may be combined and mutually referenced without contradiction.

As shown in fig. 1, an embodiment of the present invention provides a detection apparatus 200, including a carrier device 100. The inspection apparatus 200 may be, for example, a wafer inspection apparatus for inspecting a wafer, and the carrier device 100 is used for carrying the wafer during the inspection process. Referring specifically to fig. 2 and 3, the carrying device 100 includes, for example, a bottom plate 10, a top plate 20, a driving motor 30, a spring piece 40, a suction cup 60, and a turntable 70.

Specifically, the top plate 20 and the bottom plate 10 are disposed opposite to each other. The driving motor 30 is fixed to the base plate 10. And an output end of the driving motor 30 is connected to the top plate 20. The spring piece 40 is stacked between the bottom plate 10 and the top plate 20 and is disposed adjacent to the driving motor 30. The leaf spring 40 has opposite first and second fixing regions 41 and 42. The top plate 20 is fixedly connected to the first fixing region 41. The base plate 10 is fixedly connected to the second fixing area 42. Wherein the orthographic projection positions of the first fixing area 41 and the second fixing area 42 on the base plate 10 are different. The suction cup 60 is fixed on a side of the top plate 20 facing away from the spring plate 40, for sucking a wafer (i.e., an object to be tested). The turntable 70 is fixed on the side of the base plate 10 facing away from the spring plate 40, and can drive the base plate 10 to rotate.

For example, the direction from the bottom plate 10 to the top plate 20 is a vertical direction (or Z-axis direction), and the direction parallel to the bottom plate 10 or the top plate 20 is a horizontal plane (or XY-plane). The bottom plate 10, the spring plate 40, the top plate 20 and the suction cup 60 are stacked in the carrying device 100 from the bottom to the top in order from the turntable 70, wherein the driving motor 30 is arranged in the same layer as the spring plate 40. The carrier 100 further includes a lifting assembly for supporting the wafer, where the lifting assembly includes a cylinder and a lifting thimble connected to the cylinder. Taking wafer inspection as an example, during inspection, when a wafer needs to be positioned on the carrier 100, for example, a lifting thimble is first kept extending out of the surface of the suction cup 60 facing away from the top plate 20, and after the wafer is placed on the lifting thimble, the cylinder drives the lifting thimble to descend below the surface of the suction cup 60 facing away from the top plate 20, so that the wafer contacts with the suction cup 60 and is sucked by the suction cup 60. Because the suction cup 60 is fixedly connected with the top plate 20, the top plate 20 is driven to move up and down in the Z-axis direction by the driving motor 30, so that the wafer can be driven to move up and down. The turntable 70 controls the bottom plate 10 to rotate on the XY plane, so that the wafer can be driven to rotate on the horizontal plane. Of course, the detecting apparatus 200 further includes, for example, a horizontal moving mechanism for controlling the movement of the entire carrying device 100 in the X-axis direction or the Y-axis direction. Thus, the wafer can be moved and rotated in multiple directions in space. When the wafer on the chuck 60 needs to be transferred, the air cylinder drives the lifting thimble to extend from the through hole on the chuck 60 towards the side of the chuck 20 away from the top plate 20, so that the wafer is lifted up and is not contacted with the chuck 60, and the wafer can be removed. Wherein the lift pins are used to contact the end surface of the wafer, for example, to cover the new material that is easily adhered to the wafer, so that the wafer can be transferred to the chuck 60 more stably.

The driving motor 30 is, for example, a voice coil motor, and because of the characteristics of the voice coil motor, the voice coil motor is easy to shift in the horizontal direction during operation, so if the voice coil motor directly drives the top plate 20 to move up and down, the top plate 20 also shifts in the horizontal direction, and further the wafer fixed on the chuck 60 shifts in the XY plane, and if the shift problem is not improved, a larger error in the data obtained in the wafer detection process will be caused. In the present embodiment, a spring piece 40 is provided, the top plate 20 is fixedly connected to a first fixing area 41, and the bottom plate 10 is fixedly connected to a second fixing area 42. The difference in the orthographic projection positions of the first fixing region 41 and the second fixing region 42 on the base plate 10 can also be understood as, for example, that the first fixing region 41 and the second fixing region 42 are at a distance in the XY plane. For example, when the spring plate 40 is in the shape of a circular plate as shown in fig. 4 or 5, the first fixing area 41 may be a position of the spring plate 40 near the periphery, and the second fixing area 42 may be a position of the spring plate 40 near the center. Or vice versa, the first fixing area 41 is a position of the spring plate 40 near the center, and the second fixing area 42 is a position of the spring plate 40 near the periphery. Or the first fixing region 41 is a region on the left of the spring piece 40, the second fixing region 42 is a region on the right of the spring piece 40, and so on. By the above-described connection design of the spring piece 40 with the top plate 20 and the bottom plate 10, for example, when the driving motor 30 drives the top plate 20 to move upward, the first fixing area 41 of the spring piece 40 is tilted upward with the top plate 20, or when the driving motor 30 drives the top plate 20 to move downward, the first fixing area 41 of the spring piece 40 is bent downward with the top plate 20, and the second fixing area 42 is fixed on the bottom plate 10, so that the top plate 20 does not move on the XY plane due to the characteristics of the spring piece 40. Thus, the positioning of the top plate 20 is realized, and the deflection of the voice coil motor can be reduced, thereby reducing errors.

In one embodiment, for example, referring to fig. 5, in order to ensure the positioning effect of the spring piece 40 and facilitate the deformation in the Z-axis direction, a first hollowed-out gap 43 is further formed between the first fixing area 41 and the second fixing area 42 on the spring piece 40. For example, the first fixing area 41 is located at a side of the first hollow gap 43 adjacent to the periphery of the spring plate 40. The second fixing area 42 is located at a side of the first hollow gap 43 adjacent to the center of the spring plate 40. Briefly, for example, the spring plate 40 is circular as shown in fig. 5, the first fixing region 41 is, for example, an outer ring of the spring plate 40, and the second fixing region 42 is an inner ring of the spring plate 40.

In one embodiment, the number of drive motors 30 is, for example, a plurality, with the plurality of drive motors 30 disposed about the periphery of the spring plate 40. For example, referring to fig. 4, three drive motors 30 are distributed at 120 degrees around the periphery of the spring plate 40. The plurality of driving motors 30 may be operated synchronously or asynchronously. For example, when the driving motors 30 are operated, the top plate 20 is driven to move up and down, for example, when only one driving motor 30 is operated, the top plate 20 is at a certain angle, so that the measurement of different angles of the object to be measured can be realized.

Further, a plurality of second hollow gaps 44 corresponding to the plurality of driving motors 30 one by one are disposed on the first fixing area 41. The second hollowed-out gaps 44 extend along the first fixing area 41 towards the direction approaching the second fixing area 42, and divide the first fixing area 41 into a plurality of first sub-fixing areas 411. As shown in fig. 4 and 5, for example, three second hollow gaps 44 are disposed on the first fixing area 41 and correspond to the three driving motors 30 one by one. Each second hollowed-out gap 44 is disposed along the radial direction of the spring piece 40. The plurality of second hollowed-out gaps 44 divide the first fixing area 41 into three first sub-fixing areas 411. For example, a first hollow gap 43 is formed between each of the first fixing sub-areas 411 and the second fixing area 42, and the second hollow gap 44 is not in communication with the first hollow gap 43. Referring to fig. 5, three first hollowed-out gaps 43 are formed on the spring piece 40 corresponding to the three first sub-fixing areas 411. Through the arrangement of the second hollowed-out gap 44, more movement space of the spring piece 40 is provided when the top plate 20 is driven by the driving motors 30 to move at different angles. As shown in fig. 5, a third hollow gap is further disposed on the second fixing area 42, and the third hollow gap is communicated with one end of the second hollow gap 44 near the second fixing area 42.

In one embodiment, the number of the spring pieces 40 is, for example, a plurality, and the plurality of spring pieces 40 are stacked in order in the direction from the bottom plate 10 to the top plate 20. The structures of the plurality of spring plates 40 are the same, for example, the first hollow gaps 43 of the plurality of spring plates 40 are aligned to form a first hollow groove penetrating along the direction from the bottom plate 10 to the top plate 20. The second hollow gaps 44 of the plurality of spring plates 40 are also aligned one by one, so as to form a plurality of second hollow grooves along the direction from the bottom plate 10 to the top plate 20. The stacked arrangement of the plurality of spring pieces 40 can reduce the horizontal displacement of the top plate 20 to a greater extent.

In one embodiment, the carrying device 100 further comprises a first upper fixing block 51 and a first lower fixing block 52, for example. The first upper fixing block 51 is fixed to a side of the top plate 20 adjacent to the plurality of spring pieces 40, and is fixedly connected to the first fixing region 41. The first lower fixing block 52 is fixed to a side of the base plate 10 adjacent to the plurality of spring pieces 40, and is fixedly connected to the second fixing region 42. As shown in fig. 4, the first upper fixing block 51 is disposed corresponding to the outer ring portion of the spring piece 40, and the first lower fixing block 52 is disposed corresponding to the inner ring portion of the spring piece 40. As described in the previous embodiment, a first hollow gap 43 is disposed between the first fixing area 41 and the second fixing area 42, and then the first upper fixing block 51 is located at one side of the first hollow gap 43 adjacent to the periphery of the spring plate 40, and the first lower fixing block 52 is located at one side of the first hollow gap 43 adjacent to the center of the spring plate 40. Also for example, the first fixing area 41 is divided into three first sub-fixing areas 411 by the second hollowed-out gaps 44 in the foregoing embodiment, for example, one first upper fixing block 51 is disposed corresponding to each first sub-fixing area 411, and each first upper fixing block 51 corresponds to one first lower fixing block 52. For example, as shown in fig. 4, three first upper fixing blocks 51 and three first lower fixing blocks 52 are provided corresponding to the three first sub-fixing areas 4111, respectively. The first fixing region 41 and the second fixing region 42 are provided with a plurality of screw holes, for example, respectively, and the first upper fixing block 51 and the first lower fixing block 52 are locked to the spring piece 40 by screws, for example.

More specifically, for example, the second upper fixing block 53 and the second lower fixing block 54 are also included. The second upper fixing block 53 is fixed on a first side of the plurality of spring plates 40 facing away from the first lower fixing block 52 and is spaced apart from the top plate 20. The second lower fixing block 54 is fixed on one side of the plurality of spring pieces 40 facing away from the first upper fixing block 51 and is spaced apart from the bottom plate 10. The first upper fixing block 51 and the second lower fixing block 54 are disposed in one-to-one correspondence, the first upper fixing block 51 and the second lower fixing block 54 sandwich the first fixing region 41 of the spring plate 40 and are fixed to the top plate 20, and the second lower fixing block 54 is not fixed to the bottom plate 10, but in some cases, a side of the second lower fixing block 54 adjacent to the bottom plate 10 may be in contact with the bottom plate 10. The first lower fixing block 52 and the second upper fixing block 53 are disposed in one-to-one correspondence, and the first lower fixing block 52 and the second upper fixing block 53 sandwich the second fixing region 42 of the spring piece 40 and are fixed with the bottom plate 10, and the second upper fixing block 53 is not fixed with the top plate 20, but in some cases, a side of the second upper fixing block 53 adjacent to the top plate 20 may be in contact with the top plate 20.

In one embodiment, the first upper fixed block 51 has a first height in a direction from the bottom plate 10 to the top plate 20. The second upper fixing block 53 has a second height in the direction from the bottom plate 10 to the top plate 20. The first height is greater than the second height. The bottom plate 10 is provided with a groove 11 corresponding to the second lower fixing block 54. More active space for the spring 40 may be provided.

It should be noted that, the above only illustrates a part of the structure of the carrying device 100 provided in the embodiment of the present invention, but the embodiment of the present invention is not limited thereto, for example, a plurality of guide springs are further disposed on the bottom plate 10, for example, one guide spring is disposed on each of two sides of each driving motor 30 as shown in fig. 4, and the other end of each guide spring away from the bottom plate 10 abuts against the top plate 20, and the disposition of the guide springs can also assist in positioning the top plate 20. A plurality of sensors are also provided on the base plate 10, for example, to sense the operating state of the carrying device 100, etc. The arrangement can be performed with reference to the conventional wafer inspection apparatus, and the description of this embodiment is omitted.

The implementation of the invention has the following beneficial effects: through setting up the spring leaf 40 and roof 20 and the specific connection of bottom plate 10 for the actuating motor 30 is when driving roof 20 to be close to or keep away from bottom plate 10, and roof 20 only can reciprocate relative bottom plate 10 under the effect of spring leaf 40, reduces the deviation of horizontal direction, guarantees the accuracy when loading attachment removes the thing that awaits measuring.

The present invention is not limited to the above-mentioned embodiments, but is intended to be limited to the following embodiments, and any modifications, equivalent changes and variations in the above-mentioned embodiments can be made by those skilled in the art without departing from the scope of the present invention.

Claims (10)

1. A load carrying device (100), comprising:

a bottom plate (10);

a top plate (20) disposed opposite to the bottom plate (10);

the driving motor (30) is fixed on the bottom plate (10), and the output end of the driving motor (30) is connected with the top plate (20);

a spring piece (40) which is stacked between the bottom plate (10) and the top plate (20) and is disposed adjacent to the drive motor (30); the spring piece (40) has opposite first and second fixing areas (41, 42); the top plate (20) is fixedly connected with the first fixing area (41), the bottom plate (10) is connected with the second fixing area (42), and the orthographic projection positions of the first fixing area (41) and the second fixing area (42) on the bottom plate (10) are different.

2. The carrying device (100) according to claim 1, wherein the number of the spring pieces (40) is plural, and the plural spring pieces (40) are stacked in order in a direction from the bottom plate (10) to the top plate (20).

3. The carrier (100) of claim 2, further comprising:

a first upper fixing block (51) fixed on one side of the top plate (20) adjacent to the plurality of spring pieces (40) and fixedly connected with the first fixing region (41);

and a first lower fixing block (52) fixed on one side of the bottom plate (10) adjacent to the plurality of spring pieces (40) and fixedly connected with the second fixing area (42).

4. A carrier (100) as claimed in claim 3, further comprising:

a second upper fixing block (53) fixed on one side of the plurality of spring pieces (40) away from the first lower fixing block (52) and arranged at intervals from the top plate (20);

the second lower fixing block (54) is fixed on one side of the plurality of spring pieces (40) away from the first upper fixing block (51) and is arranged at intervals with the bottom plate (10).

5. The carrying device (100) according to claim 4, wherein the first upper fixed block (51) has a first height in a direction from the bottom plate (10) to the top plate (20); the second upper fixing block (53) has a second height in a direction from the bottom plate (10) to the top plate (20), the first height being greater than the second height; the bottom plate (10) is provided with a groove (11) corresponding to the second lower fixing block (54).

6. The carrying device (100) according to claim 1, wherein a first hollowed-out gap (43) is provided between the first fixing area (41) and the second fixing area (42).

7. The carrying device (100) according to claim 6, wherein the first fixing area (41) is located at a side of the first hollowed-out gap (43) adjacent to the periphery of the spring plate (40); the second fixing area (42) is located on one side, adjacent to the center of the spring piece (40), of the first hollowed-out gap (43).

8. The carrying device (100) of claim 7, wherein the number of drive motors (30) is a plurality, the plurality of drive motors (30) being disposed around the periphery of the leaf spring (40); the first fixing area (41) is provided with a plurality of second hollowed-out gaps (44) which are in one-to-one correspondence with the driving motors (30), and the second hollowed-out gaps (44) extend along the first fixing area (41) towards the direction close to the second fixing area (42) respectively and divide the first fixing area (41) into a plurality of first sub-fixing areas (411).

9. The carrier (100) of claim 1, further comprising:

a suction cup (60) for fixing one side of the top plate (20) facing away from the spring piece (40);

the turntable (70) is fixed on one side of the bottom plate (10) away from the spring piece (40) and can drive the bottom plate (10) to rotate.

10. A detection device (200) characterized by comprising a carrier (100) according to any one of claims 1-9.