CN117840771A - PECVD and boron expansion heating furnace inner core manufacturing device and production process thereof - Google Patents

PECVD and boron expansion heating furnace inner core manufacturing device and production process thereof Download PDF

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Publication number
CN117840771A
CN117840771A CN202311822804.5A CN202311822804A CN117840771A CN 117840771 A CN117840771 A CN 117840771A CN 202311822804 A CN202311822804 A CN 202311822804A CN 117840771 A CN117840771 A CN 117840771A
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furnace
core
hollow steel
pecvd
hole
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CN202311822804.5A
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CN117840771B (en
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姚佳杰
沈华芬
沈鑫泉
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Deqing Kano Crystal Fiber Co ltd
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Deqing Kano Crystal Fiber Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P23/00Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
    • B23P23/06Metal-working plant comprising a number of associated machines or apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)

Abstract

The invention relates to the technical field of furnace core manufacturing, and provides a PECVD and boron expansion heating furnace inner core manufacturing device and a production process thereof, wherein the device comprises a base, a rotating roller rotatably connected to the outer surface of the base, a bottom bracket and a furnace body tube; one end swing joint of furnace body pipe has a bottom fixed plate, and the other end fixedly connected with top fixed plate, the surface swing joint of top fixed plate has a top blank, the surface fixedly connected with vacuum tube of top fixed plate, the draw-in hole has been seted up to the surface of top fixed plate, the draw-in groove has been seted up to the surface of bottom fixed plate. By the technical scheme, the problems that the existing heating furnace core manufacturing process is easy to generate inverted wire collapse, the high-temperature stability is poor, the filament process technology in the furnace tube is enhanced in stability, the service life is short, the service life of the existing furnace core in a coating process below 700 ℃ can reach half a year or more, but the service life in a boron diffusion furnace in a coating process at 1050 ℃ is usually only 1-3 months, and even shorter are solved.

Description

PECVD and boron expansion heating furnace inner core manufacturing device and production process thereof
Technical Field
The invention relates to the technical field of furnace core manufacturing, in particular to a PECVD and boron expansion heating furnace inner core manufacturing device and a production process thereof.
Background
The solar cell is a core link for collecting solar energy and converting the solar energy into electric energy, and is also one of key components of the solar cell assembly; the solar cell is divided into crystalline silicon and amorphous silicon, wherein the crystalline silicon cell adopts an advanced tubular PECVD film forming technology and an advanced diffusion technology, so that a silicon nitride antireflection film covering the surface of the cell is uniform, the matching loss between the cell is reduced, and the solar cell has the characteristics of high efficiency, low attenuation and the like, and can be divided into a single-crystal cell and a multi-crystal cell;
the heating furnace tube required by the film coating of the tubular PECVD film forming technology and the advanced boron diffusion technology is characterized in that when the old diffusion heating furnace is used on boron diffusion, inverted wires collapse, the high-temperature stability is poor, the old heating furnace mainly refers to heating wires with the length of more than 5mm, and conventionally, 6 or 8 mm of electric heating wires are used, the heating wires in the existing heating furnace are wound on a steel tube for direct forming, and the heating wires are embedded in the furnace core;
after searching, the combustible solid semisolid zero smoke combustion matched small stove core with the authorized bulletin number of WO2020143637A 1; the section A furnace core inner ring (2) and the fire collecting plate (6) are made of high-whiteness aluminum silicate fibers with high heat preservation and fire resistance in a modularized mode, and the furnace core outer ring (3) adopts foam glass or foam ceramic or calcium silicate modules with lower cost, so that the reliability of successful ignition in a zero smoke state is improved; the lower coal (9) at the concave top makes the whole coal pile ventilation hole aligned simply and quickly, and the probability of smoke burning caused by insufficient local ventilation can be greatly reduced; the total area of the ventilation holes is enlarged by 30% and is reasonably distributed, so that more reasonable distribution of air quantity is ensured;
however, the existing heating furnace core manufacturing process is easy to generate inverted wire collapse, the high-temperature stability is poor, the filament technology in the furnace tube is enhanced in stability, the service life is large, the service life of the existing furnace core can reach half a year or more than that of the existing coating process at the temperature below 700 ℃, but the service life in the boron expansion furnace at the coating process at the temperature of 1050 ℃ is usually only 1-3 months or even shorter, and for this reason, the PECVD and boron expansion heating furnace inner core manufacturing device and the production process thereof are provided.
Disclosure of Invention
The invention provides a PECVD and boron-expansion heating furnace inner core manufacturing device and a production process thereof, which solve the problems that the existing heating furnace core manufacturing process in the background technology is easy to generate inverted wire collapse, has poor high-temperature stability, strengthens the stability of filament process technology in a furnace tube, but has larger service life, the service life of the existing furnace core in a coating process below 700 ℃ can reach half a year or more, but the service life in a boron-expansion furnace in a coating process at 1050 ℃ is usually only 1-3 months, and even shorter.
The technical scheme of the invention is as follows:
the manufacturing device of the inner core of the PECVD and boron expansion heating furnace comprises a base, a rotating roller rotatably connected to the outer surface of the base, a bottom bracket and a furnace body tube;
one end swing joint of furnace body pipe has a bottom fixed plate, and the other end fixedly connected with top fixed plate, the surface swing joint of top fixed plate has a top blank, the surface fixedly connected with vacuum tube of top fixed plate, the draw-in hole has been seted up to the surface of top fixed plate, the draw-in groove has been seted up to the surface of bottom fixed plate, the inside of draw-in hole runs through respectively and is provided with plastic strip and hollow steel pipe, the surface of furnace body pipe is around being equipped with release cloth.
As a further technical scheme of the invention, the rotating roller is used for supporting the die part, one end of the bottom bracket is rotatably connected with a rotating frame, and the outer side of the rotating frame is fixedly connected with an auxiliary rod.
As a further technical scheme of the invention, the furnace body tube is of a hollow columnar structure, the outer surface of the furnace body tube is provided with a negative pressure air suction through hole, the opening of the clamping hole just can be penetrated by a group of plastic strips and hollow steel tubes, the inwards concave notch of the clamping groove is matched with the clamping hole, the hollow steel tubes and the plastic strips are used for reserving the notch of a heating element for a formed furnace core, the clamping groove is fixed with the furnace body tube and the top blank plate is fixed with the top fixing plate through bolts, the top blank plate is used for fixing and limiting the positions of the hollow steel tubes and the plastic strips, and the number of the vacuum tubes is a plurality of groups and distributed in an annular array.
As a further technical scheme of the invention, the auxiliary rod rotates by taking the axle center of the rotating frame as the axle center, the auxiliary rod is used for assisting the rotation of the hollow steel pipe and promoting the forming of the furnace core, and the lower end of the bottom bracket is propped against the edge of the outer surface of the base.
The invention also comprises a manufacturing and production process of the PECVD and boron-expansion heating furnace inner core, which is manufactured by using the manufacturing device of the PECVD and boron-expansion heating furnace inner core, which is characterized by comprising the following steps:
step one: assembling the device;
step two: vacuum treatment, primary pulp pouring and molding;
step three: demolding and drying;
step four: polishing and threading;
the first step specifically comprises the following steps: 1) Winding the release cloth on the outer surface of the furnace body pipe, and positioning and fixing the release cloth at the outermost edge of the release cloth through a latch piece;
2) Penetrating one end of the plastic strip into the opening of the clamping hole until the other end of the plastic strip is inserted into the corresponding hole position in the clamping groove, then inserting one end of the hollow steel pipe into the corresponding hole position of the clamping hole until one end of the hollow steel pipe is just inserted into the corresponding group of clamping groove hole positions, at the moment, just corresponding one group of clamping grooves and clamping holes by one group of plastic strip and hollow steel pipe, and repeating the operation until the installation of a plurality of groups of plastic strips and hollow steel pipes is completed;
3) Placing the top blank plate corresponding to the fixing hole position on the top fixing plate, fixing the top blank plate on the outer surface of the top fixing plate through bolts, and extruding and fixing one ends of the plastic strips and the hollow steel pipes through the top blank plate, wherein the die part is assembled;
4) And placing the assembled mould part between two groups of rotating rollers, simultaneously propping the lower end of the bottom bracket against the edge of the upper end of the base, simultaneously placing the auxiliary rod against gaps formed by a plurality of groups of hollow steel pipes, connecting the end head of the vacuum pipe into the hose, connecting the other end of the hose into the vacuum pump, and completing the assembly of the device.
Further, the second step specifically includes: 1) Starting a vacuum pump to pump air in the furnace body pipe;
2) In the process of drawing, a user continuously pours ceramic fiber primary pulp into the area between the bottom fixing plate and the top fixing plate of the die through the container, the ceramic fiber primary pulp is adsorbed on the surface of the die due to the through holes arranged on the furnace body pipe in cooperation with the drawing action of the vacuum pump, the other hand of the user continuously slowly rotates the whole die part in the process of pouring the primary pulp, at the moment, the auxiliary rod can rotate along with the rotation of the hollow steel pipe, the ceramic fiber primary pulp is continuously poured and the die part rotates, the fastening action of the auxiliary rod is matched with the shaping action of the rotating roller, the ceramic fiber is gradually shaped and fixed on the surface of the die, and finally the forming furnace core is formed.
Further, the third step specifically includes: 1) After forming the forming furnace core, a user unscrews the bolts for fastening the clamping grooves and takes down the clamping grooves;
2) Slowly lifting one end of the die with the top fixing plate by using lifting equipment so that the die is kept in a vertical state;
3) The hollow steel pipes and the plastic strips are vertically pulled out upwards one by one through the clamping pliers, then the top fixing plate is slowly lifted upwards, the top fixing plate, the furnace body pipe, the formed forming furnace core and the demolding cloth are separated, the demolding cloth is taken out from the inner side of the forming furnace core after the separation, the forming furnace core can be obtained, and the obtained forming furnace core is placed into the existing supporting ring to position roundness;
4) And drying the formed furnace core through dryer equipment, and obtaining the dried formed furnace core after drying is completed.
Further, the temperature of the drying in the third step is controlled to be 100 ℃, and the drying time is set to be 20 hours.
Further, the fourth step specifically includes: 1) A group of expansion joints are arranged on the inner side of the dried forming furnace core;
2) The position of the shaping stove core corresponding to the hollow steel pipe and the plastic strip is a preformed hole, the notch is formed by inwards sinking the gap at the position of the upper and lower outer surfaces of the shaping stove core corresponding to the preformed hole end head at intervals, the heating wire penetrates into the preformed hole and the formed notch after the notch is formed, one end of the heating wire penetrates into the preformed hole from the upper end of the preformed hole, the heating wire penetrates into the notch from the lower end of the adjacent preformed hole until the upper end of the preformed hole is embedded into the notch, the heating wire penetrates into the preformed hole from the upper end opening of the adjacent side downwards, the shaping is sequentially carried out, the part of the heating wire positioned in the preformed hole is in a spiral structure until the wire penetrating operation is completed in the interior of each group of preformed holes, and the shaped complete shaping stove core can be obtained after secondary solidification.
Further, before the third substep is carried out, a circle of adhesive tape is transversely wound on the outer side surface of the forming furnace core close to the lower end and the middle part, so that stability of the forming furnace core during demolding is kept, the adhesive tape is torn off after demolding is finished, nonionic polyacrylamide is contained in ceramic fiber primary pulp, the ceramic fiber primary pulp does not contain cationic starch, a ceramic rod is fixedly connected to the inside of the preformed hole and used for positioning and fixing the position of the heating wire, and the outer diameter of the heating wire is smaller than the diameter of the preformed hole.
The working principle and the beneficial effects of the invention are as follows:
1. the device can reserve the notch of the heating wire for the finally formed furnace core by matching the plastic strip with the hollow steel pipe, and can fasten the ceramic fiber by rotating the auxiliary rod, so that the finally formed furnace core has higher strength and convenient demoulding.
2. The invention changes the existing integrated forming process for the furnace core manufacturing process, adopts the split type manufacturing process, so that the furnace core stress is released, the heating wire support bar is not easy to crack, the furnace core crack is greatly improved, the furnace core crack and even collapse caused by the expansion of the heating wire after heating are avoided, the furnace core is prevented from being damaged, meanwhile, the nonionic polyacrylamide is used for replacing the components of the existing cationic starch in the ceramic fiber furnace, the microscopic gap in the ceramic fiber furnace core tube is not increased, the pulverization caused by poor compactness after multiple heating use is avoided, and the design that the heating wire and the forming furnace core are separated can avoid the cracking of the furnace core caused by the difference of the thermal expansion coefficients of the heating wire and the forming furnace core.
Drawings
The invention will be described in further detail with reference to the drawings and the detailed description.
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the split structure of FIG. 1 according to the present invention;
FIG. 3 is a schematic view of a portion of a furnace body mold according to the present invention;
FIG. 4 is an exploded view of FIG. 3 in accordance with the present invention;
FIG. 5 is a schematic view of the partial structure of the installation of the plastic strip and the hollow steel tube of the present invention;
FIG. 6 is a schematic view of the partial construction of the plastic strip and hollow steel tube installation and bottom mounting plate of the present invention;
FIG. 7 is a schematic view of a part of the bottom fixing plate of the present invention, which is disassembled;
FIG. 8 is a schematic view of a partial structure of the demolding of the present invention;
FIG. 9 is a schematic view of a partial structure of the support ring of the present invention mounted on the upper end of the furnace core;
FIG. 10 is a schematic view showing a partial structure of the heater wire of the present invention installed inside a preformed hole of a furnace core.
In the figure: 1. a base; 2. a rotating roller; 3. a rotating frame; 4. an auxiliary lever; 5. a bottom bracket; 6. a bottom fixing plate; 7. a top fixing plate; 8. a top blank; 9. a vacuum tube; 10. a furnace body tube; 11. a clamping groove; 12. a clamping hole; 13. a plastic strip; 14. hollow steel pipe; 15. demolding cloth; 16. shaping a furnace core; 17. a preformed hole; 18. an expansion joint; 19. a heating wire; 20. and a support ring.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
As shown in fig. 1 to 6, the embodiment provides a device for manufacturing an inner core of a PECVD and boron expansion heating furnace, which comprises a base 1, a rotary roller 2 rotatably connected to the outer surface of the base 1, a bottom bracket 5 and a furnace body tube 10;
one end swing joint of furnace body pipe 10 has bottom fixed plate 6, the other end fixedly connected with top fixed plate 7, the surface swing joint of top fixed plate 7 has top blank 8, the surface fixedly connected with vacuum tube 9 of top fixed plate 7, draw-in groove 12 has been seted up to the surface of top fixed plate 7, draw-in groove 11 has been seted up to the surface of bottom fixed plate 6, the inside of draw-in groove 12 runs through respectively and is provided with plastic strip 13 and hollow steel pipe 14, the surface of furnace body pipe 10 is around being equipped with release cloth 15.
The rotating roller 2 is used for supporting a mold part, one end of the bottom bracket 5 is rotatably connected with the rotating frame 3, and the outer side of the rotating frame 3 is fixedly connected with the auxiliary rod 4.
The furnace body tube 10 is hollow columnar structure and the through-hole that negative pressure was inhaled is offered to the surface of furnace body tube 10, and the opening of draw-in hole 12 just can supply a set of plastic strip 13 and hollow steel pipe 14 to pass, and the notch of draw-in groove 11 inwards sunken and draw-in hole 12 assorted, hollow steel pipe 14 and plastic strip 13 are used for reserving the notch of heating member for fashioned stove core, all pass through bolt fastening between draw-in groove 11 and furnace body tube 10 and top blank 8 and the top fixed plate 7, and top blank 8 is used for fixed spacing to the position of hollow steel pipe 14 and plastic strip 13, and the quantity of vacuum tube 9 is a plurality of groups and is the annular array distribution.
The auxiliary rod 4 rotates by taking the axle center of the rotating frame 3 as the axle center, the auxiliary rod 4 is used for assisting the rotation of the hollow steel tube 14 and promoting the forming of the furnace core, and the lower end of the bottom bracket 5 is propped against the edge of the outer surface of the base 1.
In this embodiment, the reservation of the heating wire notch is performed for the final formed furnace core by the plastic strip 13 and the hollow steel pipe 14, and meanwhile, the ceramic fiber can be fastened by the rotary extrusion of the auxiliary rod 4, so that the connection of the furnace core raw materials is tighter, the final formed furnace core 16 is higher in strength, and the demolding is convenient.
Example 1
As shown in fig. 7 to 10, on the basis of embodiment 1, a production process for manufacturing the inner core of the PECVD and boron expansion heating furnace is also provided, and the production process is manufactured by using the device for manufacturing the inner core of the PECVD and boron expansion heating furnace according to any one of claims 1 to 4, and is characterized in that the production process specifically comprises the following steps:
step one: assembling the device;
step two: vacuum treatment, primary pulp pouring and molding;
step three: demolding and drying;
step four: polishing and threading;
the first step specifically comprises the following steps: 1) The release cloth 15 is wound on the outer surface of the furnace body pipe 10, and the release cloth 15 is positioned and fixed at the outermost edge of the release cloth 15 through a latch component;
2) Penetrating one end of the plastic strip 13 corresponding to the opening of the clamping hole 12 until the other end of the plastic strip 13 is inserted into the corresponding hole site in the clamping groove 11, then inserting one end of the hollow steel pipe 14 corresponding to the hole site of the clamping hole 12 until one end of the hollow steel pipe 14 is just inserted into the corresponding group of clamping groove 11 hole sites, at this time, a group of plastic strips 13 and hollow steel pipes 14 just correspond to a group of clamping grooves 11 and clamping holes 12, and then repeating the above operation until the installation of a plurality of groups of plastic strips 13 and hollow steel pipes 14 is completed;
3) Placing the top blank 8 corresponding to the fixing hole position on the top fixing plate 7, fixing the top blank 8 on the outer surface of the top fixing plate 7 through bolts, and extruding and fixing one ends of the plastic strips 13 and the hollow steel pipes 14 through the top blank 8, wherein the die part is assembled;
4) The assembled mould part is placed between the two groups of rotating rollers 2, the lower end of the bottom bracket 5 is propped against the edge of the upper end of the base 1, the auxiliary rod 4 is placed corresponding to gaps formed by a plurality of groups of hollow steel pipes 14, the end head of the vacuum pipe 9 is connected into the hose, the other end of the hose is connected into the vacuum pump, and the device is assembled.
The second step specifically comprises: 1) Starting a vacuum pump so that the vacuum pump pumps air in the furnace body pipe 10;
2) In the process of drawing, a user continuously pours ceramic fiber raw pulp into the area between the bottom fixing plate 6 and the top fixing plate 7 of the die through the container, the ceramic fiber raw pulp is adsorbed on the surface of the die due to the cooperation of the drawing action of the vacuum pump and the through holes arranged on the furnace body tube 10, the other hand of the user continuously slowly rotates the whole die part in the process of pouring the raw pulp, at this time, the auxiliary rod 4 rotates along with the rotation of the hollow steel tube 14, the ceramic fiber raw pulp is continuously poured and the rotation of the die part, and the fastening action of the auxiliary rod 4 is matched with the shaping action of the rotary roller 2, and the ceramic fiber is gradually formed and fixed on the surface of the die, and finally the forming furnace core 16 is formed.
The third step specifically comprises: 1) After forming the forming furnace core 16, the user unscrews the bolts for fastening the clamping groove 11 and then removes the clamping groove 11;
2) Slowly lifting one end of the die with the top fixing plate 7 by using lifting equipment so that the die is kept in a vertical state;
3) The hollow steel pipes 14 and the plastic strips 13 are vertically pulled upwards one by one through clamping pliers, then the top fixing plate 7 is slowly lifted upwards, the top fixing plate 7, the furnace body pipe 10, the formed forming furnace core 16 and the demolding cloth 15 are separated, the demolding cloth 15 is taken out from the inner side of the forming furnace core 16 after separation, the forming furnace core 16 can be obtained, and the obtained forming furnace core 16 is placed into the existing supporting ring 20 to position roundness;
4) And drying the formed furnace core 16 by using dryer equipment, and obtaining the dried formed furnace core 16 after drying is completed.
And in the third step, the drying temperature is controlled to be 100 ℃, and the drying time is set to be 20 hours.
The fourth step specifically comprises: 1) A group of expansion joints 18 are arranged on the inner side of the oven core 16 after drying;
2) The positions of the forming furnace core 16 corresponding to the hollow steel pipes 14 and the plastic strips 13 are reserved holes 17, notches which are inwards recessed are formed in the positions, corresponding to the ends of the reserved holes 17, of the upper outer surface and the lower outer surface of the forming furnace core 16 at intervals, the notches are formed, heating wires 19 penetrate into the reserved holes 17 and the formed notches after the notches are formed, one ends of the heating wires 19 penetrate into the upper ends of the reserved holes 17, penetrate into the lower ends of adjacent reserved holes 17 after the heating wires 19 are embedded into the notches, until the upper ends of the reserved holes 17 are reached, the heating wires are downwards penetrated into the notches from the openings at the upper ends of the reserved holes 17 at the adjacent sides, the forming furnace core 16 penetrates through the forming holes in sequence, the parts, located inside the reserved holes 17, of the heating wires 19 are of a spiral structure until wire penetrating operation is completed in the interiors of each group of reserved holes 17, and the formed complete forming furnace core 16 can be obtained after secondary solidification.
In the third substep, before the third substep is carried out, a circle of adhesive tape is transversely wound on the outer side surface of the forming furnace core 16 near the lower end and the middle part, so that the stability of the forming furnace core 16 during demolding is maintained, the adhesive tape is torn off after demolding is finished, the ceramic fiber primary pulp contains nonionic polyacrylamide, the ceramic fiber primary pulp does not contain cationic starch, a ceramic rod is fixedly connected inside the preformed hole 17 and used for positioning and fixing the position of the heating wire 19, and the outer diameter of the heating wire 19 is smaller than the diameter of the preformed hole 17.
In this embodiment, a split type manufacturing process is adopted, so that the heating wire 19 in the forming furnace core 16 is not easy to crack in the process of releasing the stress of the forming furnace core 16, the crack of the forming furnace core 16 is greatly reduced, the cracking or even collapse of the furnace core caused by the expansion of the heating wire 19 after heating is avoided, the forming furnace core 16 is prevented from being damaged, meanwhile, the components of the existing cationic starch in the ceramic fiber furnace are replaced by nonionic polyacrylamide, the micro-gap in the ceramic fiber furnace core tube is not increased, calcination and smoke discharge before shipment of a calcination furnace body can be avoided, pulverization cannot be caused due to poor compactness after multiple heating use, the heating wire 19 and the forming furnace core 16 are separated, the cracking of the furnace core caused by the difference of thermal expansion coefficients of the heating wire 19 and the forming furnace core can be avoided, the heating wire 19 is positioned through a ceramic rod, the overall forming heating effect is better, the heating wire 19 penetrates into the furnace body after being formed and hardened, and the condition of open fire or high temperature damage does not exist.
The invention opens a half millimeter shrinkage joint at the middle part of the formed furnace core 16 to release the expansion caused by heat and contraction caused by cold when and after the formed furnace core 16 is used, so that the structure is more stable and reliable, the shrinkage joint is enlarged by about 2-3 millimeters after the 1100 ℃ test, and the whole furnace is neat, beautiful and not cracked.
It should be noted that, the invention can customize the size of the assembly hole of the furnace tube according to the actual outer diameter of the heating wire 19 during split manufacturing, and the hole position of the reserved hole 17 is slightly larger than that of the electric furnace wire, so that the extrusion of the furnace wire to the furnace arm can be ignored after the test and observation at 1050 ℃ or even 1100 ℃ and the test within 2 months does not generate obvious extrusion deformation.
When the heating wire 19 is installed, the installation level is parallel to the horizon line, a ceramic rod is added in a fixing groove of the heating wire 19 to restrict the falling of the furnace wire, the ceramic rod is equivalent to a safety belt of the furnace wire, and the ceramic rod is supported on a corundum-mullite support ring between the furnace body and the furnace body.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (10)

  1. The manufacturing device of the inner core of the PECVD and boron expansion heating furnace comprises a base (1) and a rotary roller (2) rotatably connected to the outer surface of the base (1), and is characterized by further comprising a bottom bracket (5) and a furnace body tube (10);
    one end swing joint of furnace body pipe (10) has end fixed plate (6), and the other end fixedly connected with top fixed plate (7), the surface swing joint of top fixed plate (7) has top blank (8), the surface fixedly connected with vacuum tube (9) of top fixed plate (7), draw-in hole (12) have been seted up to the surface of top fixed plate (7), draw-in groove (11) have been seted up to the surface of end fixed plate (6), the inside of draw-in hole (12) is run through respectively and is provided with plastic strip (13) and hollow steel pipe (14), the surface of furnace body pipe (10) is around being equipped with drawing of patterns cloth (15).
  2. 2. The device for manufacturing the inner core of the PECVD and boron expansion heating furnace according to claim 1, wherein the rotating roller (2) is used for supporting a mold part, one end of the bottom bracket (5) is rotatably connected with a rotating frame (3), and the outer side of the rotating frame (3) is fixedly connected with an auxiliary rod (4).
  3. 3. The device for manufacturing the inner core of the PECVD and boron expansion heating furnace according to claim 2, wherein the furnace body tube (10) is of a hollow columnar structure, a negative pressure air suction through hole is formed in the outer surface of the furnace body tube (10), a group of plastic strips (13) and hollow steel tubes (14) can just pass through the opening of the clamping hole (12), the inwards concave notch of the clamping groove (11) is matched with the clamping hole (12), the hollow steel tubes (14) and the plastic strips (13) are used for reserving the notch of a heating piece for a formed furnace core, the clamping groove (11) is fixed with the furnace body tube (10) and a top blank (8) and a top fixing plate (7) through bolts, the top blank (8) is used for fixing and limiting the positions of the hollow steel tubes (14) and the plastic strips (13), and the number of the vacuum tubes (9) is a plurality of groups and is distributed in a ring array.
  4. 4. The device for manufacturing the inner core of the PECVD and boron expanding heating furnace according to claim 2, wherein the auxiliary rod (4) rotates by taking the axle center of the rotating frame (3) as the axle center, the auxiliary rod (4) is used for assisting the rotation of the hollow steel tube (14) and promoting the forming of the furnace core, and the lower end of the bottom bracket (5) is propped against the edge of the outer surface of the base (1).
  5. A production process for manufacturing a PECVD and boron-expansion heating furnace inner core, which is manufactured by using the manufacturing device of the PECVD and boron-expansion heating furnace inner core according to any one of claims 1-4, and is characterized by comprising the following steps:
    step one: assembling the device;
    step two: vacuum treatment, primary pulp pouring and molding;
    step three: demolding and drying;
    step four: polishing and threading;
    the first step specifically comprises the following steps: 1) Winding the release cloth (15) on the outer surface of the furnace body tube (10), and positioning and fixing the release cloth (15) at the outermost edge of the release cloth (15) through a latch component;
    2) Penetrating one end of the plastic strip (13) corresponding to the opening of the clamping hole (12) until the other end of the plastic strip (13) is inserted into the corresponding hole position in the clamping groove (11), then inserting one end of the hollow steel pipe (14) corresponding to the hole position of the clamping hole (12) until one end of the hollow steel pipe (14) is just inserted into the corresponding group of clamping groove (11) hole positions, at the moment, just corresponding one group of clamping grooves (11) and clamping holes (12) by one group of plastic strips (13) and hollow steel pipes (14), and repeating the operation until a plurality of groups of plastic strips (13) and hollow steel pipes (14) are installed;
    3) Placing the top blank (8) corresponding to a fixed hole position on the top fixed plate (7), fixing the top blank (8) on the outer surface of the top fixed plate (7) through bolts, and extruding and fixing one ends of the plastic strips (13) and the hollow steel pipes (14) through the top blank (8), wherein the die part is assembled;
    4) The assembled mould part is placed between the two groups of rotating rollers (2), the lower end of the bottom bracket (5) is propped against the edge of the upper end of the base (1) correspondingly, the auxiliary rod (4) is placed corresponding to gaps formed by the groups of hollow steel pipes (14), the end head of the vacuum pipe (9) is connected into the hose, the other end of the hose is connected into the vacuum pump, and the device is assembled.
  6. 6. The process for manufacturing the inner core of the PECVD and boron-expanding heating furnace according to claim 5, wherein the second step specifically comprises the following steps: 1) Starting a vacuum pump, so that the vacuum pump pumps air in the furnace body tube (10);
    2) In the process of drawing, a user continuously pours ceramic fiber raw pulp into the area between the bottom fixing plate (6) and the top fixing plate (7) of the die through the container, the ceramic fiber raw pulp is adsorbed on the surface of the die due to the through holes arranged on the vacuum pump matched furnace body tube (10), the other hand of the user continuously slowly rotates the whole die part in the process of pouring the raw pulp, at the moment, the auxiliary rod (4) can rotate along with the rotation of the hollow steel tube (14), and the ceramic fiber raw pulp continuously irrigates and rotates along with the rotation of the die part and the fastening function of the auxiliary rod (4) is matched with the shaping function of the rotary roller (2), the ceramic fiber is gradually shaped and fixed on the surface of the die, and finally the forming furnace core (16) is formed.
  7. 7. The process for manufacturing the inner core of the PECVD and boron-expanding heating furnace according to claim 5, wherein the third step comprises the following steps: 1) After forming the forming furnace core (16), a user unscrews the bolt for fastening the clamping groove (11) and takes down the clamping groove (11);
    2) Slowly lifting one end of the die with the top fixing plate (7) by using lifting equipment so that the die is kept in a vertical state;
    3) The hollow steel pipes (14) and the plastic strips (13) are vertically pulled out one by one through the clamping pliers, then the top fixing plate (7) is slowly lifted upwards, the top fixing plate (7) and the furnace body pipe (10) are separated from the formed forming furnace core (16) and the demolding cloth (15), the demolding cloth (15) is taken out from the inner side of the forming furnace core (16) after the separation, the forming furnace core (16) can be obtained, and the obtained forming furnace core (16) is placed into the existing supporting ring (20) to position roundness;
    4) And (5) drying the formed furnace core (16) through dryer equipment, and obtaining the dried formed furnace core (16) after drying is completed.
  8. 8. The process for manufacturing the inner core of the PECVD and boron-expanding heating furnace according to claim 7, wherein the temperature of drying in the third step is controlled to be 100 ℃, and the drying time is set to be 20 hours.
  9. 9. The process for manufacturing the inner core of the PECVD and boron-expanding heating furnace according to claim 8, wherein the fourth step comprises the following steps: 1) A group of expansion joints (18) are formed on the inner side of the oven core (16) after drying, and the thickness of the expansion joints is 0.5mm;
    2) The position of the shaping stove core (16) corresponding to the hollow steel tube (14) and the plastic strip (13) is provided with a preformed hole (17), notches which are inwards sunken are formed in the positions of the upper outer surface and the lower outer surface of the shaping stove core (16) corresponding to the ends of the preformed hole (17) at intervals, heating wires (19) penetrate into the preformed hole (17) and the opened notches after the notch is formed, one end of each heating wire (19) penetrates into the preformed hole from the upper end of the preformed hole (17), the heating wires (19) penetrate into the notch from the lower end of the adjacent preformed hole (17) until the upper end of the preformed hole (17) is embedded into the notch, the parts, which are positioned in the preformed holes (17) on the adjacent side, of the preformed hole penetrate downwards, sequentially penetrate through the shaping, the parts, which are positioned in the preformed holes (17), of the heating wires (19) are in a spiral structure until wire penetrating operation is completed in the interiors of each group of the preformed holes (17), and the shaped complete shaping stove core (16) can be obtained after secondary solidification.
  10. 10. The manufacturing and production process of the PECVD and boron expanding heating furnace inner core according to claim 9, wherein in the third substep, before the third substep is performed, a circle of adhesive tape is transversely wound on the outer side surface of the forming furnace core (16) near the lower end and the middle part for keeping stability of the forming furnace core (16) during demolding, the adhesive tape is torn off after demolding is completed, nonionic polyacrylamide is contained in ceramic fiber primary pulp, the ceramic fiber primary pulp does not contain cationic starch, ceramic rods are fixedly connected in the reserved holes (17) and used for positioning and fixing the positions of the heating wires (19), and the outer diameter of the heating wires (19) is smaller than the diameter of the reserved holes (17).
CN202311822804.5A 2023-12-27 2023-12-27 PECVD and boron expansion heating furnace inner core manufacturing device and production process thereof Active CN117840771B (en)

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CN207578003U (en) * 2017-11-27 2018-07-06 厦门劲华机械有限公司 The beveler logical stent of rolling
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CN116922101A (en) * 2023-08-02 2023-10-24 浙江传播者金属装饰材料有限公司 Steel pipe cutting equipment

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