CN117840126A - Ultrasonic cleaning component and semiconductor cleaning equipment - Google Patents
Ultrasonic cleaning component and semiconductor cleaning equipment Download PDFInfo
- Publication number
- CN117840126A CN117840126A CN202410072922.7A CN202410072922A CN117840126A CN 117840126 A CN117840126 A CN 117840126A CN 202410072922 A CN202410072922 A CN 202410072922A CN 117840126 A CN117840126 A CN 117840126A
- Authority
- CN
- China
- Prior art keywords
- cleaning
- cleaning box
- pipe
- ultrasonic
- circulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 111
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 24
- 239000012535 impurity Substances 0.000 claims abstract description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 230000002093 peripheral effect Effects 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 238000001914 filtration Methods 0.000 claims description 9
- 210000001503 joint Anatomy 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000003032 molecular docking Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 15
- 230000000712 assembly Effects 0.000 abstract description 9
- 238000000429 assembly Methods 0.000 abstract description 9
- 230000002146 bilateral effect Effects 0.000 abstract 1
- 238000010992 reflux Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000007790 scraping Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 244000309464 bull Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The embodiment of the application provides an ultrasonic cleaning component and semiconductor cleaning equipment, relates to the ultrasonic cleaning field. An ultrasonic cleaning member and a semiconductor cleaning apparatus, comprising: the cleaning equipment further comprises a cleaning box which can be used for independently storing cleaning liquid, an ultrasonic component is further arranged at the bottom of the cleaning box, two groups of opposite guide rail assemblies are arranged in the cleaning box, a circulating pump capable of sucking solution is arranged on one side of the bottom of the cleaning box, a circulating pipe is further arranged at the water inlet end of the self-circulating pump, a return pipe is arranged on the side wall of the cleaning box along two sides of the outer peripheral surface of the circulating pipe, a suction hood arranged at the free end of the return pipe is arranged in the cleaning box, the circulating pump operates simultaneously when the ultrasonic component cleans the semiconductor chip inside the cleaning box, the solution inside the cleaning box is sucked through the return pipes on the two sides, and then a bilateral circulating effect is formed in the cleaning box, so that impurities falling off from the semiconductor chip can be far away from the semiconductor chip along with circulating water flow.
Description
Technical Field
The application relates to the technical field of ultrasonic cleaning, in particular to an ultrasonic cleaning component and semiconductor cleaning equipment.
Background
In the related art, a large amount of free matters or oxides are adhered to the surface of the semiconductor chip in the production process, so that the semiconductor chip can continuously move forwards along with the conveying assembly, and meanwhile, the semiconductor chip can be operated through an ultrasonic cleaner, and then impurities on the surface of the semiconductor chip can be cleaned to a certain extent.
In the prior art, after the impurities on the surface of the semiconductor chip are transferred to the ultrasonic cleaning area along with the conveyor belt, along with ultrasonic wave, the impurities on the surface of the semiconductor chip remain on the surface of the cleaning liquid and in the solution, so that when the semiconductor chip is transferred and displaced along with the conveyor belt, part of the impurities on the surface of the cleaning liquid can be attached to the semiconductor chip, and the subsequent cleaning effect can be increased.
Disclosure of Invention
The application aims to at least solve the technical problem that part of impurities on the surface of a cleaning liquid in the prior art can be attached to a semiconductor chip, and then the subsequent cleaning effect can be increased. For this purpose, the present application proposes an ultrasonic cleaning member and a semiconductor cleaning apparatus.
An ultrasonic cleaning member according to an embodiment of the present application includes an operation device and a cleaning device provided at an upper portion of the operation device,
the cleaning equipment further comprises a cleaning box which can independently store cleaning liquid, the bottom of the cleaning box is further provided with an ultrasonic component, two groups of opposite guide rail assemblies are arranged in the cleaning box, a circulating pump capable of sucking solution is arranged on one side of the bottom of the cleaning box, a circulating pipe is further arranged at the water inlet end of the self-circulating pump, a return pipe is arranged along two sides of the outer peripheral surface of the circulating pipe to the side wall of the cleaning box, and a suction hood arranged at the free end of the return pipe is arranged in the cleaning box.
Preferably, the water outlet hole penetrating through the bottom surface of the cleaning box is communicated with the water outlet end of the circulating pump, the first brackets are respectively arranged on two sides of the opening of the suction hood, and a filter cylinder capable of rotating is arranged in a region between the first brackets.
Preferably, the outer peripheral surface of the return pipe extends to one side to be provided with a butt joint pipe, a collecting cylinder capable of blocking impurities is further arranged at the opening of the top of the butt joint pipe, a suction pipe is arranged on the upper surface of the filter cylinder extending from the opening of the collecting cylinder, and an opening mask is arranged at the tail end of the suction pipe and connected to the cleaning cover of the outer peripheral surface of the filter cylinder.
Preferably, the lower part of the collecting cylinder is provided with a thread bush in threaded connection with the pipe orifice of the butt joint pipe, the bottom of the collecting cylinder extends upwards to be provided with a collecting pipe, and the top of the collecting pipe is provided with a filter screen capable of filtering impurities.
Preferably, the two side ends of the guide rail assembly are respectively provided with a rotatable first rotating shaft and a rotatable second rotating shaft, one side end of the first rotating shaft is also provided with a driven wheel, the driven wheel is driven by a servo motor oppositely arranged above the driven wheel, a driving wheel is further arranged at the power output end of the self-servo motor, and a belt is sleeved between the driving wheel and the driven wheel.
Preferably, two ends of the second rotating shaft are respectively provided with a first gear capable of driving the filter cartridge to rotate, one side of the first gear is also meshed with a first crown gear, one side of the first crown gear realizes power transmission through a universal joint, the other end of the universal joint is also provided with a third crown gear, one end face of the filter cartridge is provided with a second crown gear, and the filter cartridge can rotate through the second gear between the second crown gear and the third crown gear.
Preferably, the top of the collecting pipe is provided with an impeller which can rotate, and meanwhile, one side of the peripheral surface of the top of the impeller is provided with a scraping rod which can clean the surface of the filter screen.
Preferably, the inside of cartridge filter still is equipped with the backward flow chamber that can transversely set up, and it is equipped with support two to wasing the extension of box bottom simultaneously from backward flow chamber both ends, and one side tip in backward flow chamber runs through and has offered the through-hole that can supply the bull stick to penetrate, and the one end of bull stick extends to the universal joint terminal surface.
Preferably, the outer peripheral surface of the rotating rod in the reflux cavity is provided with a half gear, the inside of the reflux cavity is also provided with a bottom plate capable of moving, the bottom plate is in a right-angle structure, one side of the bottom plate is also provided with a one-way valve, one side of the one-way valve is provided with a spring II, a spring I is arranged between one side of the bottom plate and the inner wall of the reflux cavity, and the upper surface of the bottom plate is provided with a rack meshed with the half gear.
The semiconductor cleaning equipment comprises a cleaning equipment, wherein a pre-cleaning area, a pure water area and a drying area are sequentially arranged in the cleaning travelling direction, and a circulating equipment for circulating solution is arranged below a cleaning box.
The beneficial effects of this application are: when the ultrasonic member cleans the semiconductor chip in the cleaning box, the ultrasonic member can clean the impurities remained on the surface of the semiconductor chip into the solution, meanwhile, the solution discharged from the water outlet end after the operation of the circulating pump is discharged upwards through the water outlet holes, and the solution in the cleaning box is sucked through the return pipes on two sides, so that the inside of the cleaning box forms a double-side circulating effect, the impurities falling from the semiconductor chip can be far away from the semiconductor chip along with circulating water flow, and the impurities adhered and filtered on the peripheral surface of the filter cylinder can be adsorbed and cleaned by the suction force of the collecting cylinder and the cleaning cover, so that the filtering effect of the filter cylinder is improved, and meanwhile, when the collecting pipe sucks to generate corresponding wind force, the airflow flowing later can drive the corresponding impeller, the second rotating shaft drives the first crown gear to rotate anticlockwise along with the rotation of the first crown gear, the second crown gear drives the filter cylinder to rotate anticlockwise along with the rotation of the first crown gear, the cleaning cover is convenient to suck and clean the surface of the filter cylinder, the bottom plate is enabled to move to one side along with the rotation of the rotating rod, the solution in the backflow cavity is pressurized through the one-way valve, the solution can be accelerated to pass through the filter cylinder, the filtering effect of the solution is further improved, meanwhile, the flow circulation of the solution can be accelerated, finally, the connecting rod can be pushed back and forth through the crankshaft and the push rod when the rotating rod rotates, and the guide rail assembly can move back and forth along the sliding groove of the guide rail assembly, and then the semiconductor chip passing through the limit between the guide rail components can further clean impurities on the surface of the semiconductor chip under shaking.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of an entire structure of an ultrasonic cleaning member and a semiconductor cleaning apparatus according to an embodiment of the present application;
FIG. 2 is a schematic diagram of an overall explosive structure according to an embodiment of the present application;
FIG. 3 is a schematic view of a cleaning cartridge according to an embodiment of the present application;
FIG. 4 is a schematic view of a bottom view of a cleaning cartridge according to an embodiment of the present application;
FIG. 5 is a schematic view of a suction hood structure according to an embodiment of the present application;
FIG. 6 is a schematic view of a circulation tube structure according to an embodiment of the present application;
FIG. 7 is an enlarged schematic view of the structure of FIG. 6A according to an embodiment of the present application;
FIG. 8 is a schematic top view of a circulation tube according to an embodiment of the present application;
FIG. 9 is a schematic view of a cross-sectional structure along A-A according to an embodiment of the present application;
FIG. 10 is an enlarged schematic view of the structure of FIG. 9B according to an embodiment of the present application;
FIG. 11 is a schematic diagram of a rotating rod and reflow chamber explosion configuration in accordance with an embodiment of the present application;
FIG. 12 is a schematic elevational view of a crown gear according to an embodiment of the present application;
FIG. 13 is a schematic view of a cross-sectional structure along B-B in accordance with an embodiment of the present application;
fig. 14 is a schematic view of a rail assembly structure according to an embodiment of the present application.
Icon: 1. operating the device; 2. a cleaning device; 21. a pre-wash zone; 211. a cleaning box; 22. a cleaning zone; 221. a water outlet hole; 222. an ultrasonic member; 223. a second bracket; 23. a pure water zone; 24. a drying area; 3. a circulation device; 4. a servo motor; 41. a driving wheel; 42. a belt; 5. a first rotating shaft; 51. driven wheel; 52. a transport assembly; 53. a second rotating shaft; 54. a first gear; 6. a guide rail assembly; 61. a cross bar; 62. a chute; 63. a support rod; 64. a slide block; 65. a connecting rod; 7. a circulation pump; 71. a circulation pipe; 72. a return pipe; 721. a suction hood; 722. a first bracket; 723. a filter cartridge; 724. a crown gear II; 73. a butt joint pipe; 74. a collection cylinder; 741. a thread sleeve; 742. a collection pipe; 743. a filter screen; 744. an impeller; 745. a scraping rod; 75. a suction tube; 76. cleaning the cover; 8. crown gear one; 81. a universal joint; 82. a rotating rod; 821. a crankshaft; 822. a half gear; 823. a push rod; 83. a crown gear III; 84. a second gear; 9. a reflow chamber; 91. a through hole; 92. a bottom plate; 93. a first spring; 94. a one-way valve; 95. a second spring; 96. a rack.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some of the embodiments of the present application, but not all of the embodiments. All other embodiments, based on the embodiments herein, which would be apparent to one of ordinary skill in the art without undue burden are within the scope of the present application.
Accordingly, the following detailed description of the embodiments of the present application, provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, based on the embodiments herein, which would be apparent to one of ordinary skill in the art without undue burden are within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or are based on the orientation or positional relationship shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In this application, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
An ultrasonic cleaning member and a semiconductor cleaning apparatus according to embodiments of the present application are described below with reference to the accompanying drawings.
As shown in fig. 1 to 4, an ultrasonic cleaning member according to an embodiment of the present application includes an operation device 1, while a cleaning device 2 for cleaning a semiconductor chip is further provided on the operation device 1, the cleaning device 2 is provided with a pre-cleaning zone 21, a cleaning zone 22, a pure water zone 23, and a drying zone 24 in this order in a cleaning traveling direction, and the pre-cleaning zone 21, the cleaning zone 22, the pure water zone 23, and the drying zone 24 are formed as separate areas by cleaning cartridges 211, respectively, while cleaning liquids of corresponding concentrations are poured inside the cleaning cartridges 211 of the pre-cleaning zone 21 and the cleaning zone 22 to improve cleaning effects on the surface of the semiconductor chip. The bottom of the cleaning box 211 of the cleaning area 22 is also provided with ultrasonic members 222, and the cleaning effect can be further improved by the ultrasonic members 222.
And a circulation device 3 for circulating the solution is further provided below the cleaning box 211.
As shown in fig. 3-4, two sets of guide rail assemblies 6 opposite to each other are respectively arranged in the cleaning box 211, meanwhile, a rotatable first rotating shaft 5 and a rotatable second rotating shaft 53 are respectively arranged at two side ends of the guide rail assemblies 6, a driven wheel 51 is further arranged at one side end of the first rotating shaft 5, the driven wheel 51 is driven by a servo motor 4 oppositely arranged above, a driving wheel 41 is further arranged at a power output end of the self-servo motor 4, and a belt 42 is further sleeved between the driving wheel 41 and the driven wheel 51, so that the driving wheel 41 arranged at the output end of the servo motor 4 can drive the driven wheel 51 to rotate together through the belt 42 after the servo motor 4 runs, and meanwhile, after the first rotating shaft 5 rotates, the conveying assembly 52 can rotate together and convey the semiconductor chip to one side in a displacement mode. And the second rotating shaft 53 on the side away from the first rotating shaft 5 rotates together with the conveying assembly 52 via a belt.
The circulating pump 7 for sucking solution is arranged at one side of the bottom of the cleaning box 211, the circulating pipe 71 is also arranged at the water inlet end of the circulating pump 7, the opening of one end of the circulating pipe 71 is communicated with the opening of the circulating pump 7, the side wall extending to the cleaning box 211 along the two sides of the outer peripheral surface of the circulating pipe 71 is provided with the return pipe 72, the suction hood 721 arranged at the free end of the return pipe 72 is arranged inside the cleaning box 211, and then the solution can be circulated and sucked.
The water outlet 221 penetrating the bottom of the cleaning box 211 is communicated with the water outlet end of the circulating pump 7, so that the circulated solution is sprayed upwards from the bottom of the cleaning box 211 and is then sucked by the suction covers 721 at the two sides, a bidirectional circulating effect can be formed, the ultrasonic member 222 can act on the impurities cleaned on the surface of the semiconductor chip, the impurities can flow to the two sides, and the semiconductor chip is prevented from carrying away the impurities floating on the liquid surface in the conveying displacement.
As shown in fig. 3 to 10, brackets 722 are respectively arranged at two sides of the opening of the suction hood 721, a rotatable filter cartridge 723 is arranged in a region between the two groups of brackets 722, the filter cartridge 723 is of a hollow structure, and two ends of the filter cartridge 723 are respectively hinged with the brackets 722. At the same time, a butt joint pipe 73 extends to one side from the outer peripheral surface of the return pipe 72, a collecting cylinder 74 capable of blocking impurities is arranged at the opening of the top of the butt joint pipe 73, a suction pipe 75 is arranged on the upper surface of the filter cylinder 723 extending from the opening of the collecting cylinder 74, a cleaning cover 76 which is connected to the outer peripheral surface of the filter cylinder 723 by an opening mask is arranged at the tail end of the suction pipe 75, and impurities filtered on the outer peripheral surface of the filter cylinder 723 can be adsorbed and cleaned by the cleaning cover 76.
A screw sleeve 741 screwed with the pipe orifice of the butt joint pipe 73 is arranged at the lower part of the collecting cylinder 74, a collecting pipe 742 is arranged at the bottom of the collecting cylinder 74 in an upward extending mode, and a filter screen 743 capable of filtering impurities is arranged at the top of the collecting pipe 742. Therefore, when the ultrasonic member 222 cleans the semiconductor chip inside the cleaning box 211, the ultrasonic member 222 cleans the impurities remained on the surface of the semiconductor chip into the solution, meanwhile, the solution discharged from the water outlet end after the operation of the circulating pump 7 is discharged upwards through the water outlet hole 221, and the solution inside the cleaning box 211 is pumped through the return pipes 72 at two sides, so that the inside of the cleaning box 211 forms a double-side circulation effect, the impurities dropped by the semiconductor chip can be far away from the semiconductor chip along with the circulating water flow, and the impurities adhered and filtered on the peripheral surface of the filter cartridge 723 can be adsorbed and cleaned by the pumping force of the collecting cylinder 74 and the cleaning cover 76, so that the filtering effect of the filter cartridge 723 is improved.
As shown in fig. 3, 7 and 10, a first gear 54 capable of driving the filter cartridge 723 to rotate is arranged at two ends of the rotation shaft two 53, a first crown gear 8 is meshed with one side of the first gear 54, one side of the first crown gear 8 is driven by a universal joint 81 to realize power transmission, a third crown gear 83 is arranged at the other end of the universal joint 81, a second crown gear 724 is arranged at one side end surface of the filter cartridge 723, and the filter cartridge 723 can rotate towards the cleaning cover 76 through a second gear 84 between the second crown gear 724 and the third crown gear 83. Therefore, when the conveying assembly 52 is operated to convey the semiconductor chips, the rotary shaft 53 of the conveying assembly can drive the crown gear 8 to rotate, and the filter cartridge 723 is driven to rotate anticlockwise through the gear 84 after the crown gear 8 rotates, so that the cleaning cover 76 can conveniently suck and clean the surface of the filter cartridge 723.
A rotatable impeller 744 is provided at the top of the collection pipe 742, and a scraper 745 capable of cleaning the surface of the filter screen 743 is provided on the top peripheral surface side of the impeller 744. Therefore, when the collecting pipe 742 sucks and generates corresponding wind force, the airflow flowing later can drive the corresponding impeller 744, and then impurities adsorbed on the surface of the filter screen 743 can be cleaned and scraped by the scraping rod 745 after the impeller 744 rotates.
As shown in fig. 9 and 11-13, a backflow chamber 9 capable of being transversely arranged is further arranged in the filter cartridge 723, and two supports 223 extend from two ends of the backflow chamber 9 to the bottom of the cleaning box 211, and the backflow chamber 9 can be fixed and limited through the two supports 223. And a through hole 91 through which the rotating rod 82 penetrates is formed from one side end of the reflow chamber 9, one end of the rotating rod 82 extends to the end face of the universal joint 81, and then the rotating rod 82 can rotate together when the universal joint 81 rotates. Meanwhile, the outer peripheral surface of the rotating rod 82 positioned in the reflux cavity 9 is provided with a half gear 822, the inside of the reflux cavity 9 is also provided with a bottom plate 92 capable of moving, the bottom plate 92 is arranged in a right-angle structure, one side of the bottom plate 92 is also provided with a one-way valve 94, one side of the one-way valve 94 is provided with a second spring 95, and a first spring 93 is arranged between one side of the bottom plate 92 and the inner wall of the reflux cavity 9. And a rack 96 engaged with the half gear 822 is provided on the upper surface of the base plate 92. Therefore, when the universal joint 81 rotates, the universal joint 81 can drive the rotating rod 82 to rotate together, and the rack 96 meshed below is driven by the half gear 822 after the rotating rod 82 rotates, so that the bottom plate 92 can move to one side, and the solution in the reflux cavity 9 is pressurized through the one-way valve 94, so that the solution can be accelerated to pass through the filter cartridge 723, the filtering effect of the solution is further improved, and meanwhile, the flowing circulation of the solution can be accelerated.
As shown in fig. 14, when the semiconductor chip is transferred by displacement of the rail assembly 6, the ultrasonic member 222 cleans the surface of the semiconductor chip of impurities, and then the dropped impurities of the semiconductor chip partially float on the surface of the solution and circulate away from the semiconductor chip along with the solution, but some impurities remain on the surface of the semiconductor chip. The upper surface of the cleaning box 211 is provided with a cross bar 61, the cross bar 61 is provided with a chute 62 downwards from the surface for the transverse displacement of the guide rail assembly 6, meanwhile, a supporting rod 63 extends from the bottom of the guide rail assembly 6 to the inside of the chute 62, and the tail end of the supporting rod 63 is provided with a sliding block 64 capable of displacing along the inside of the chute 62. And a connecting rod 65 is provided from the side of the outer surface of the guide rail assembly 6.
And a crankshaft 821 is provided at the middle of the rotating rod 82, and a push rod 823 hinged with the connecting rod 65 is sleeved on the outer circumferential surface of the crankshaft 821. And meanwhile, a plurality of groups of guide rail assemblies 6 are connected end to end. Therefore, when the semiconductor chip needs to be cleaned, the servo motor 4 immediately starts to operate, then the rotating rod 82 starts to rotate, and when the rotating rod 82 rotates, the connecting rod 65 can be pushed back and forth through the crankshaft 821 and the push rod 823. The guide rail assemblies 6 can then reciprocate along the sliding grooves 62, and then the semiconductor chips passing through the guide rail assemblies 6 in a limited manner can further clean impurities on the surfaces of the semiconductor chips under shaking.
Specifically, this ultrasonic cleaning component and semiconductor cleaning equipment's theory of operation: when the ultrasonic member 222 cleans the semiconductor chip inside the cleaning box 211, at this time, the ultrasonic member 222 can clean the impurities remained on the surface of the semiconductor chip into the solution, meanwhile, the solution discharged from the water outlet end after the operation of the circulating pump 7 is discharged upwards through the water outlet hole 221, and the solution inside the cleaning box 211 is pumped through the return pipes 72 on two sides, so that the inside of the cleaning box 211 forms a double-side circulation effect, the impurities dropped on the semiconductor chip can be far away from the semiconductor chip along with the circulating water flow, and the filtered impurities can be adsorbed and cleaned on the peripheral surface of the filter cartridge 723 by the suction force of the collecting cylinder 74 and the cleaning cover 76, so that the filtering effect of the filter cartridge 723 is improved, meanwhile, when the collecting pipe 742 sucks and generates corresponding wind force, the flowing air current can drive the corresponding impeller 744, and then the impurities adsorbed on the surface of the filter screen 743 can be cleaned and scraped by the scraping rod 745 along with the rotation of the impeller 744.
Meanwhile, when the conveying assembly 52 is operated to convey the semiconductor chips, the rotary shaft II 53 of the conveying assembly can drive the crown gear I8 to rotate, and the filter cartridge 723 is driven to rotate anticlockwise along with the rotation of the crown gear I8 through the gear II 84, so that the cleaning cover 76 is convenient to suck and clean the surface of the filter cartridge 723, and when the rotary rod 82 is rotated together, the rack 96 meshed below is driven through the half gear 822 along with the rotation of the rotary rod 82, so that the bottom plate 92 can be displaced to one side, and the solution in the backflow cavity 9 is pressurized through the one-way valve 94, so that the solution can be accelerated to pass through the filter cartridge 723, the filtering effect of the solution is further improved, and meanwhile, the flow circulation of the solution can be accelerated.
Finally, when the rotating rod 82 rotates, the connecting rod 65 can be pushed back and forth through the crankshaft 821 and the push rod 823, so that the guide rail assemblies 6 can move back and forth along the sliding grooves 62, and then the semiconductor chips passing through the guide rail assemblies 6 in a limiting mode can further clean impurities on the surfaces of the semiconductor chips under shaking.
It should be noted that, specific model specifications of the servo motor 4, the circulating pump 7 and the ultrasonic member 222 need to be determined by selecting a model according to actual specifications of the device, and a specific model selection calculation method adopts the prior art in the field, so that details are not repeated.
The power supply of the servo motor 4, the circulation pump 7 and the ultrasonic member 222 and the principle thereof will be clear to a person skilled in the art and will not be described in detail here.
The above is only an example of the present application, and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes or substitutions are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. An ultrasonic cleaning member comprising an operation device (1) and a cleaning device (2) arranged on the upper part of the operation device (1), characterized in that,
the cleaning equipment (2) further comprises a cleaning box (211) which can be used for independently storing cleaning liquid, an ultrasonic component (222) is further arranged at the bottom of the cleaning box (211), two groups of opposite guide rail components (6) are arranged in the cleaning box (211), a circulating pump (7) capable of sucking the solution is arranged on one side of the bottom of the cleaning box (211), a circulating pipe (71) is further arranged at the water inlet end of the circulating pump (7), a return pipe (72) is arranged along two sides of the outer peripheral surface of the circulating pipe (71) and extends to the side wall of the cleaning box (211), and a suction hood (721) arranged at the free end of the return pipe (72) is arranged in the cleaning box (211).
2. The ultrasonic cleaning member according to claim 1, wherein the water outlet hole (221) penetrating the bottom surface of the cleaning box (211) is communicated with the water outlet end of the circulating pump (7), the two sides of the opening of the suction cover (721) are respectively provided with a first bracket (722), and a rotatable filter cartridge (723) is arranged in a region between the two first brackets (722).
3. The ultrasonic cleaning member according to claim 2, wherein the outer peripheral surface of the return pipe (72) extends to one side and is provided with a butt joint pipe (73), a collecting cylinder (74) capable of blocking impurities is further arranged at the opening of the top of the butt joint pipe (73), a suction pipe (75) is arranged on the upper surface of the filter cylinder (723) extending from the opening of the collecting cylinder (74), and a cleaning cover (76) which is connected to the outer peripheral surface of the filter cylinder (723) by an opening cover is arranged at the tail end of the suction pipe (75).
4. An ultrasonic cleaning member according to claim 3, wherein the lower part of the collecting cylinder (74) is provided with a screw bush (741) screw-coupled to the nozzle of the docking pipe (73), and the bottom of the collecting cylinder (74) extends upward to further be provided with a collecting pipe (742), while a filter screen (743) for filtering impurities is provided at the top of the collecting pipe (742).
5. The ultrasonic cleaning member according to claim 4, wherein the two side end portions of the guide rail assembly (6) are respectively provided with a rotatable first rotating shaft (5) and a rotatable second rotating shaft (53), one side end portion of the first rotating shaft (5) is further provided with a driven wheel (51), the driven wheel (51) is driven by a servo motor (4) oppositely arranged above, a driving wheel (41) is further arranged at the power output end of the self-servo motor (4), and a belt (42) is sleeved between the driving wheel (41) and the driven wheel (51).
6. The ultrasonic cleaning member according to claim 5, wherein the rotation shaft two (53) is provided at both ends thereof with a gear one (54) capable of driving a filter cartridge (723) thereof to rotate, and a crown gear one (8) is further meshed on one side of the gear one (54), one side of the crown gear one (8) is power-transmitted through a universal joint (81), and the other end of the universal joint (81) is further provided with a crown gear three (83), and a crown gear two (724) is provided on one side end surface of the filter cartridge (723), and the filter cartridge (723) is rotatable between the crown gear two (724) and the crown gear three (83) through a gear two (84).
7. The ultrasonic cleaning member according to claim 6, wherein the top of the collecting pipe (742) is provided with a rotatable impeller (744), and a scraper (745) capable of cleaning the surface of the filter screen (743) is provided on the top peripheral surface side of the impeller (744).
8. The ultrasonic cleaning member according to claim 7, wherein a backflow cavity (9) capable of being transversely arranged is further arranged in the filter cartridge (723), two brackets (223) are arranged at two ends of the backflow cavity (9) in an extending mode towards the bottom of the cleaning box (211), one side end portion of the backflow cavity (9) is provided with a through hole (91) through which the rotating rod (82) can penetrate, and one end of the rotating rod (82) extends to the end face of the universal joint (81).
9. The ultrasonic cleaning member according to claim 8, wherein the outer peripheral surface of the rotating rod (82) inside the reflow chamber (9) is provided with a half gear (822), and a bottom plate (92) capable of being displaced is further provided inside the reflow chamber (9), the bottom plate (92) thereof is provided in a right-angle structure, a check valve (94) is further provided on one side of the bottom plate (92), a second spring (95) is provided on one side of the check valve (94), a first spring (93) is provided between one side of the bottom plate (92) and the inner wall of the reflow chamber (9), and a rack (96) engaged with the half gear (822) is provided on the upper surface of the bottom plate (92).
10. A semiconductor cleaning apparatus comprising the ultrasonic cleaning member according to any one of claims 1 to 9, characterized in that the cleaning apparatus (2) is provided with a pre-cleaning zone (21), a cleaning zone (22), a pure water zone (23) and a drying zone (24) in this order in a cleaning traveling direction, and a circulating apparatus (3) for circulating a solution is further provided below the cleaning box (211).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410072922.7A CN117840126B (en) | 2024-01-18 | 2024-01-18 | Ultrasonic cleaning component and semiconductor cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410072922.7A CN117840126B (en) | 2024-01-18 | 2024-01-18 | Ultrasonic cleaning component and semiconductor cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117840126A true CN117840126A (en) | 2024-04-09 |
| CN117840126B CN117840126B (en) | 2024-06-25 |
Family
ID=90546057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410072922.7A Active CN117840126B (en) | 2024-01-18 | 2024-01-18 | Ultrasonic cleaning component and semiconductor cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117840126B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07108110A (en) * | 1993-10-08 | 1995-04-25 | Tsukishima Kikai Co Ltd | Method for concentrating slurry and device therefor |
| KR20000025455A (en) * | 1998-10-12 | 2000-05-06 | 김진억 | Washing system using supersonic |
| KR200313517Y1 (en) * | 2003-02-18 | 2003-05-16 | 주식회사 울쏘하이텍 | An ultrasonic cleansing Device With A Hydro-Flux Generating Structure |
| CN209378570U (en) * | 2018-12-10 | 2019-09-13 | 常州德洛菲特过滤系统有限公司 | A kind of sewage treatment desanding device |
| CN113492134A (en) * | 2021-06-28 | 2021-10-12 | 亚电科技(苏州)有限公司 | Quartz boat cleaning device with circulating mechanism |
| JP6994654B1 (en) * | 2021-03-04 | 2022-01-14 | 株式会社Flex | Ultrasonic cleaner |
| CN216044142U (en) * | 2021-10-29 | 2022-03-15 | 三峡大学 | River sewage-cleaning power generation device |
| CN218280992U (en) * | 2021-08-03 | 2023-01-13 | 上海润旌智能科技有限公司 | Portable air cleaner that purifying effect is good |
| CN116608459A (en) * | 2023-07-06 | 2023-08-18 | 中国电建集团福建工程有限公司 | Deaerator heat exchange device and deaerator heat exchange method |
-
2024
- 2024-01-18 CN CN202410072922.7A patent/CN117840126B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07108110A (en) * | 1993-10-08 | 1995-04-25 | Tsukishima Kikai Co Ltd | Method for concentrating slurry and device therefor |
| KR20000025455A (en) * | 1998-10-12 | 2000-05-06 | 김진억 | Washing system using supersonic |
| KR200313517Y1 (en) * | 2003-02-18 | 2003-05-16 | 주식회사 울쏘하이텍 | An ultrasonic cleansing Device With A Hydro-Flux Generating Structure |
| CN209378570U (en) * | 2018-12-10 | 2019-09-13 | 常州德洛菲特过滤系统有限公司 | A kind of sewage treatment desanding device |
| JP6994654B1 (en) * | 2021-03-04 | 2022-01-14 | 株式会社Flex | Ultrasonic cleaner |
| CN113492134A (en) * | 2021-06-28 | 2021-10-12 | 亚电科技(苏州)有限公司 | Quartz boat cleaning device with circulating mechanism |
| CN218280992U (en) * | 2021-08-03 | 2023-01-13 | 上海润旌智能科技有限公司 | Portable air cleaner that purifying effect is good |
| CN216044142U (en) * | 2021-10-29 | 2022-03-15 | 三峡大学 | River sewage-cleaning power generation device |
| CN116608459A (en) * | 2023-07-06 | 2023-08-18 | 中国电建集团福建工程有限公司 | Deaerator heat exchange device and deaerator heat exchange method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117840126B (en) | 2024-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208894823U (en) | A kind of intelligentized Furniture textile machine dust-extraction unit | |
| CN108568698A (en) | A kind of mechanical processing steel plate drilling debris collection device | |
| CN114310471A (en) | Circulating cooling device for valve production and cooling method thereof | |
| CN108145802B (en) | Wood lathe based on programmable controller | |
| CN117840126B (en) | Ultrasonic cleaning component and semiconductor cleaning equipment | |
| CN209251694U (en) | Vegetables circulation cleaning device | |
| CN207574475U (en) | A kind of agricultural vegetable washer of included cleaning water filtration | |
| CN110898486A (en) | Negative pressure type chip-liquid separator | |
| CN213670672U (en) | Belt cleaning device of water pump accessory | |
| CN216228366U (en) | Spherical bearing roller grinding device with garbage collection function | |
| CN215317488U (en) | Cylindrical grinder is used in air-blower production and processing | |
| CN111136056B (en) | Automobile parts belt cleaning device | |
| CN210304838U (en) | Magnetic part ultrasonic cleaning device | |
| CN113732910A (en) | Can carry out filtering cycle's grinding machine for metalworking to waste water | |
| CN2936461Y (en) | Vibrative cleaner | |
| CN213848656U (en) | Bubble cleaning machine | |
| CN220920141U (en) | Bearing surface cleaning device | |
| CN111672855A (en) | Water-saving glass cleaning machine | |
| CN214516258U (en) | Belt cleaning device is used in processing of water pump wheel hub | |
| CN210584279U (en) | Air purification device convenient to it is clean | |
| CN218164231U (en) | Vegetable cleaning equipment | |
| CN218873027U (en) | Circuit board cleaning machine based on high-pressure spraying cleaning technology | |
| CN220330767U (en) | Blade grinding machine piece washs filtration | |
| CN220703330U (en) | Skid-mounted oily sewage treatment device | |
| CN220778249U (en) | Washing and mopping integrated floor sweeping robot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |