CN117829749A - Method, equipment and medium for reducing personnel load based on automatic process integration - Google Patents

Abstract

The application provides a method, equipment and medium for reducing personnel load based on automatic process integration, which comprises the following steps: collecting historical data; analyzing artificial nodes in the process; determining an automation alternative of the artificial node in the flow; testing and verifying the alternative scheme; gradually replacing the artificial nodes passing verification; alternatives are monitored and continuous optimization is performed. The method can be at least used for solving the problem that the FFS flow system needs to rely on a large amount of human resources to finish the operation, decision-making and monitoring of each node. A large number of manual tasks need to be analyzed, confirmed and processed, and the technical problems of certain uncertainty and error and heavier personnel load exist.

Description

Method, equipment and medium for reducing personnel load based on automatic process integration

Technical Field

The application relates to the technical field of process automation, in particular to a method, equipment and medium for reducing personnel load based on automatic process integration.

Background

Wafer manufacturers are responsible for converting silicon wafers into chips, one chip needs to plug all circuit elements into the wafer in a line width which is not reached by one piece of the wafer, and thousands of complicated process procedures such as film deposition, photoresist coating, photoetching development, etching, measurement, cleaning, ion implantation and the like are performed, during which a large amount of production process data is generated, and various related systems such as a Manufacturing Execution System (MES), a statistical process control System (SPC), an equipment automation scheme (EAP), a formula management system (RMS), a Yield Management System (YMS), a Defect Management System (DMS), an Automatic Defect Classification (ADC), a PMS (maintenance management system) and the like are involved to monitor the production process conditions, finish the production, and improve the yield. In conventional semiconductor manufacturing facilities, an exception flow system is mostly used to set up a process flow for general MES and SPC exceptions. For new staff in the factory to want to be familiar with business operations, similar documents are also needed for instruction operations. The factory flow system is used, an interactive workflow is provided for each scene of factory manufacture through the internal and external systems of the factory, daily work, relevant supervisors, trouble shooting case (fault removal cases) and exception handling are converted into relevant flows, the flows are started through information receiving and parameter rules, problems and exception conditions are solved through manual or system nodes with configured flows, and efficient and reliable service is provided.

However, the applicant found that there are at least the following technical problems in the related art:

in the prior art, an FFS Flow System (Fab Flow System: fab Flow System is a System which is manufactured for a wafer Fab factory and penetrates through each System in the factory, and provides an omnibearing interactive workflow for production purposes, and aims to convert daily work, trouble shooting case and exception handling into related flows, and start the flows through information receiving and parameter rules, solve problems and abnormal conditions through manual or System nodes configured in the flows, and provide efficient and reliable service), and a great deal of manpower resources are needed to finish the operation, decision and monitoring of each node. The large number of manual tasks need to be analyzed, confirmed and processed, certain uncertainty and error exist, the personnel load is heavy, and the personnel management and the cost are challenges. Therefore, in practical application, the automation node is used to replace the manual node to perform the automation process integration, so that the personnel load is continuously reduced to be the pursuing direction of the FFS system.

Therefore, the method, the device and the medium for reducing personnel load based on automatic process integration are provided, firstly, historical data information of manual nodes of an FFS process system is counted, and a scheme that the manual nodes in analysis data can be replaced by automatic nodes is provided; and then gradually replacing the manual nodes in the FFS system with automatic nodes. By integrating the different process nodes, a more efficient, fast and accurate production process can be achieved.

Content of the application

An object of the present application is to provide a method, apparatus and medium for reducing personnel load based on automated process integration, which at least solves the above-mentioned drawbacks of the prior art.

To achieve the above object, some embodiments of the present application provide the following aspects:

in a first aspect, some embodiments of the present application further provide a method for reducing workload based on automated process integration, including the steps of:

collecting historical data;

analyzing artificial nodes in the process;

determining an automation alternative of the artificial node in the flow;

testing and verifying the alternative scheme;

gradually replacing the artificial nodes passing verification;

alternatives are monitored and continuous optimization is performed.

As a preferred technical scheme of the present application: the historical data in the step of collecting the historical data comprises historical flow instance data, historical manual task data and historical node data.

As a preferred technical scheme of the present application: the historical manual task data comprises manual task starting parameters, manual task form data and manual task circulation data.

As a preferred technical scheme of the present application: and in the step of analyzing the artificial nodes in the flow, analyzing the artificial tasks in the historical data.

As a preferred technical scheme of the present application: in the step of determining the automatic alternative scheme of the artificial node in the flow, according to the analysis result, selecting the automatic scheme matched with the system node parameter rule to replace the artificial node,

as a preferred technical scheme of the present application: the automation scheme is also integrated with the system.

As a preferred technical scheme of the present application: in the step of testing and verifying the alternative scheme, the replaced automatic node is tested and verified, the function of the automatic node in the whole process is confirmed to be superior to that of a manual node, evaluation is carried out according to the replaced effect, and the performance and related parameters of the automatic node are optimized.

As a preferred technical scheme of the present application: in the step of gradually replacing the manual node passing the verification, after the verification by the test, gradually replacing the manual node by the automatic node, and analyzing the replaced effect according to the history record.

In a second aspect, some embodiments of the present application further provide a computer device, the device comprising:

one or more processors; and a memory storing computer program instructions that, when executed, cause the processor to perform the method as described above.

In a third aspect, some embodiments of the present application also provide a computer readable medium having stored thereon computer program instructions executable by a processor to implement a method as described above.

Compared with the prior art, in the scheme provided by the embodiment of the application, the historical data information of the artificial nodes of the statistical flow system is analyzed, and the scheme that the artificial nodes in the data can be replaced by automatic nodes is adopted; then gradually replacing the manual nodes in the system with automatic nodes; the manual nodes in the workflow are replaced by automatic nodes, so that the operation of the workflow is more accurate and reliable, the manual errors can be greatly reduced, and the production efficiency is improved; the dependence on the manual nodes is reduced, and a great amount of manpower resources and related management cost are saved; the automation node can realize consistent operation and monitoring and provide better stability in the whole process; by integrating different process nodes, a more efficient, rapid and accurate production process can also be achieved.

Drawings

FIG. 1 is a flow chart of a method provided in an embodiment of the present application;

fig. 2 is a flowchart of automatic node replacement manual node implementation automation provided in an embodiment of the present application;

FIG. 3 is a diagram of a system node replacement artificial node provided in an embodiment of the present application;

FIG. 4 is a flowchart for confirming a scenario result provided in an embodiment of the present application;

fig. 5 is a schematic structural diagram of a computer device according to an embodiment of the present application.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

The following terms are used herein.

Example 1

The process comprises the following steps:

step S101, collecting historical data;

step S102, analyzing artificial nodes in the flow;

step S103, determining an automatic alternative scheme of the artificial node in the flow;

step S104, testing and verifying the alternative scheme;

step S105, gradually replacing the verified artificial nodes;

step S106, monitoring the alternative and performing continuous optimization.

In some embodiments of the present application, the historical data in S101 includes historical process instance data, historical manual task data, and historical node data.

In some embodiments of the present application, the historical manual task data includes manual task initiation parameters, manual task form data, and manual task flow data.

In some embodiments of the present application, in S102, an analysis is performed on the artificial task in the historical data.

In some embodiments of the present application, in S103, according to the analysis result, an automation scheme of matching the system node parameter rule is selected to replace the manual node,

in some embodiments of the present application, in S103, the automation scheme is further integrated with a system.

In some embodiments of the present application, in S104, the replaced automation node is tested and verified, and its function in the whole process is confirmed to be better than that of the manual node, and the performance and related parameters of the automation node are optimized by evaluating according to the effect after the replacement.

In some embodiments of the present application, after the test and verification, the manual node is gradually replaced by the automatic node, and the replaced effect is analyzed according to the history record in S105.

Example two

Referring to FIG. 2, an example of a manufacturing execution system MES introduction automation node is shown:

collecting historical manufacturing flow instance data of a manufacturing execution system MES, task data needing to be manually executed, and historical node data comprising manual nodes. The method specifically comprises the steps of manufacturing process types, wherein the wafer is processed into the semiconductor manufacturing industry; manufacturing instance content, including specific instances of manufacturing wafers; manufacturing task types including thin film deposition, photoresist coating, photolithographic development, etching, metrology, cleaning, ion implantation, etc.; node types, including manual nodes and automatic nodes; starting parameters including normal working parameters of each device; processing time information such as wafer processing inspection time intervals, etc.

And collecting the manual task starting parameters of related manual tasks, manual task form data and manual task circulation data. The method specifically comprises the steps of analyzing the result of the manual task, deciding the manual task, transferring the countersign to the office data and the like;

comprehensively analyzing the artificial tasks in the historical flow data, wherein the comprehensive analysis comprises the functional requirements of the artificial task nodes, the artificial task form types, the artificial task decision types, the time sequence relations among the artificial nodes and the like;

then according to the analysis result, selecting an appropriate automation scheme matched with the system node parameter rule to replace manual nodes in the system node parameter rule, and integrating the system node parameter rule with some systems to complete higher-level automation nodes so as to meet the manufacturing requirement;

the replaced automatic nodes are tested and verified in detail, the performance and stability of the automatic nodes are ensured to meet the design requirements, and the function of the automatic nodes in the whole process is ensured to be superior to that of the manual nodes; according to the replaced effect evaluation, optimizing the performance and related parameters of the automatic node so as to better adapt to the whole flow;

after test verification, gradually replacing the manual nodes with automatic nodes, analyzing the replaced effect according to the history record, adopting a progressive replacement method, and gradually replacing other proper manual nodes until most or all manual nodes in the whole flow are replaced by the automatic nodes.

And continuously monitoring all replaced artificial nodes, and continuously optimizing according to the monitoring result so as to improve the performance and fitness of the automatic nodes.

Example III

Referring to fig. 3, taking 24 hours &48 hours of activities or tasks as an example, the activities or tasks are divided into 6 stages, wherein the second stage to the fifth stage are originally artificial node tasks, after the second stage to the fifth stage are configured as system tasks in a process system, the second stage to the fifth stage are converted into electronic equipment monitor system nodes, the system is automatically processed through a configured business logic system, and the original second stage to the fifth stage are converted into a system sub-process to be circulated and completed, so that the artificial processing or confirmation is reduced, and the prevention of human resources from higher-value work is facilitated.

According to the existing flow, multiple scenes only need to confirm the result manually, and an automatic node can be used for replacing the mode of confirming the result by using configuration rules. With reference to fig. 4, the api gateway configures the PMS system, and then configures the automation node to receive the PM parameters, and then obtain the PM information of the original artificial Review, define the artificial judgment basis as different rules, and automatically return to the yes or no decision according to the rules. The replacement of the manual node is realized by an automation node.

The system also continuously monitors according to the execution result after the system node replaces the manual node, or performs timing detection by manual work, and continuously optimizes according to the monitoring result or the detection result, so as to improve the execution accuracy and the execution efficiency of the automatic node.

Example IV

The FFS flow system is a system which is built for a wafer FFS factory and which runs through various systems in the factory to provide an all-round interactive workflow for production purposes. The method aims to convert daily work, trouble shooting case and exception handling into related processes, start the processes through information receiving and parameter rules, solve problems and exception conditions through manual or system nodes with the processes configured, and provide efficient and reliable services.

The FFS-based flow system can acquire historical processing data, manual task data and the like of the FFS factory of the wafer. Acquiring the type, time sequence relation and the like of the manual task according to the historical processing data and the manual task data,

the reduction of the personnel load, which is generally referred to as personnel load or workload, may be performed in accordance with the manual task. Which represents the amount of work or tasks a person has to undertake in a particular time. By reducing the personnel load, it means reducing the number of tasks each person needs to complete, thereby reducing the working pressure and improving the working efficiency and the production quality. The method for reducing the personnel load based on the automatic flow integration is hoped to reduce the workload of people by introducing automatic nodes, improve the working efficiency and optimize the production process. According to the node which can be optimized by the manual task, such as digital detection and the like, the nodes can be integrated through an automatic node of the system so as to meet the manufacturing requirement. And testing and verifying according to the integrated detection result, and optimizing and gradually replacing the automatic nodes according to the detection accuracy of the automatic nodes until most or all of the manual nodes in the whole process are replaced by the automatic nodes.

With the application of the FFS system, the system is perfected gradually, the maintenance of low codes is performed, the artificial nodes in the workflow are reduced gradually, and the gradual upgrade of software and hardware parts in a factory is realized, so that the FFS system is more suitable for replacing the artificial nodes with the system nodes, and the code logic is used for replacing the artificial mechanical rule class to work so as to reduce the personnel load.

Example five

In addition, the embodiment of the application further provides a computer device, the structure of which is shown in fig. 5, the device comprises a memory 1 for storing computer readable instructions and a processor 2 for executing the computer readable instructions, wherein the computer readable instructions, when executed by the processor, trigger the processor to execute the method.

The methods and/or embodiments of the present application may be implemented as a computer software program. For example, embodiments of the present disclosure include a computer program product comprising a computer program embodied on a computer readable medium, the computer program comprising program code for performing the method shown in the flowcharts. The above-described functions defined in the method of the present application are performed when the computer program is executed by a processing unit.

It should be noted that, the computer readable medium described in the present application may be a computer readable signal medium or a computer readable storage medium, or any combination of the two. The computer readable medium can be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a combination of any of the foregoing. More specific examples of the computer-readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. In the context of this document, a computer readable medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device.

In the present application, however, a computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, with computer-readable program code embodied therein. Such a propagated data signal may take any of a variety of forms, including, but not limited to, electro-magnetic, optical, or any suitable combination of the foregoing. A computer readable signal medium may also be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, fiber optic cable, RF, etc., or any suitable combination of the foregoing.

Computer program code for carrying out operations of the present application may be written in one or more programming languages, including an object oriented programming language such as Java, smalltalk, C ++ and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any kind of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or may be connected to an external computer (for example, through the Internet using an Internet service provider).

The flowchart or block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of devices, methods and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.

As another aspect, the present application also provides a computer-readable medium, which may be contained in the apparatus described in the above embodiments; or may be present alone without being fitted into the device. The computer readable medium carries one or more computer readable instructions executable by a processor to implement the steps of the methods and/or techniques of the various embodiments of the present application described above.

In a typical configuration of the present application, the terminals, the devices of the services network each include one or more processors (CPUs), input/output interfaces, network interfaces, and memory.

The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). Memory is an example of computer-readable media.

Computer-readable media include both permanent and non-permanent, removable and non-removable media, and information storage may be implemented by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape storage or other magnetic storage devices, or any other non-transmission medium which can be used to store information that can be accessed by a computing device.

In addition, the embodiment of the application also provides a computer program which is stored in the computer equipment, so that the computer equipment executes the method for executing the control code.

It should be noted that the present application may be implemented in software and/or a combination of software and hardware, for example, using Application Specific Integrated Circuits (ASIC), a general purpose computer or any other similar hardware device. In some embodiments, the software programs of the present application may be executed by a processor to implement the above steps or functions. Likewise, the software programs of the present application (including associated data structures) may be stored on a computer readable recording medium, such as RAM memory, magnetic or optical drive or diskette and the like. In addition, some steps or functions of the present application may be implemented in hardware, for example, as circuitry that cooperates with the processor to perform various steps or functions.

It will be evident to those skilled in the art that the present application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned. Furthermore, it is evident that the word "comprising" does not exclude other elements or steps, and that the singular does not exclude a plurality. A plurality of units or means recited in the apparatus claims can also be implemented by means of one unit or means in software or hardware. The terms first, second, etc. are used to denote a name, but not any particular order.

Claims (10)

1. The method for reducing the personnel load based on the automatic process integration is characterized by comprising the following steps of:

collecting historical data;

analyzing artificial nodes in the process;

determining an automation alternative of the artificial node in the flow;

testing and verifying the alternative scheme;

gradually replacing the artificial nodes passing verification;

alternatives are monitored and continuous optimization is performed.

2. The automated process integration-based personnel load reduction method of claim 1, wherein the historical data in the step of collecting historical data comprises historical process instance data, historical manual task data, and historical node data.

3. The automated process integration-based personnel load reduction method of claim 2, wherein the historical manual task data includes manual task initiation parameters, manual task form data, and manual task flow data.

4. The automated process integration-based personnel load reduction method of claim 1, wherein in the step of analyzing the artificial nodes in the process, the artificial tasks in the historical data are analyzed.

5. The method for reducing workload based on automated process integration according to claim 1, wherein in the step of determining an automation alternative of the artificial nodes in the process, an automation alternative of system node parameter rule matching is selected to replace the artificial nodes according to the analysis result.

6. The automated process integration-based personnel load reduction method of claim 5, wherein the automation solution is further integrated with a system.

7. The method for reducing personnel load based on automated process integration according to claim 1, wherein in the step of testing and verifying the alternative, the replaced automated node is tested and verified, and the function of the replaced automated node in the whole process is confirmed to be better than that of the manual node, and the performance and related parameters of the automated node are optimized by evaluating the replaced effect.

8. The method for reducing personnel load based on automated process integration according to claim 1, wherein in the step of gradually replacing the verified artificial nodes, after the verification by the test, the artificial nodes are gradually replaced by automatic nodes, and the replaced effects are analyzed according to the history.

9. A computer device, the device comprising:

one or more processors; and a memory storing computer program instructions that, when executed, cause the processor to perform the method of claims 1-8.

10. A computer readable medium having stored thereon computer program instructions executable by a processor to implement the method of claims 1-8.