CN117824527A - Measuring device and method for measuring deformation and surface microstructure of stacked sheet - Google Patents
Measuring device and method for measuring deformation and surface microstructure of stacked sheet Download PDFInfo
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- CN117824527A CN117824527A CN202410103301.0A CN202410103301A CN117824527A CN 117824527 A CN117824527 A CN 117824527A CN 202410103301 A CN202410103301 A CN 202410103301A CN 117824527 A CN117824527 A CN 117824527A
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- 238000004630 atomic force microscopy Methods 0.000 description 2
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Abstract
The invention belongs to the technical field of morphology measurement, and discloses a measuring device and a measuring method for measuring deformation and surface microstructure of stacked sheets. In the measuring process, the light in the light source is divided into transmitted light and refracted light by the light splitter, the transmitted light stretches into a position between adjacent stacked sheets to be measured through the light beam steering micro device to be measured and is reflected to the surface of the stacked sheets, the optical path difference compensation glass sheet is used for compensating the optical path difference generated by the measured light passing through the light beam steering micro device, the reflector is used for reflecting the refracted light of the light splitter into the tube mirror as reference light, and the tube mirror is used for converging the reference light and the measured light to form interference information patterns in the camera. The measuring method can solve the problems that the surface curved surface of each layer of sheet in the stacking sheet deforms and the microstructure morphology of the surface of the stacking sheet is difficult to accurately measure.
Description
Technical Field
The invention belongs to the technical field of morphology measurement, and particularly relates to a device and a method for measuring deformation and surface microstructure of stacked sheets.
Background
With the rapid development of the fields of material science and engineering, the application of stacked sheet structures in the fields of microelectronic devices, optical elements, and the like is gradually increasing. However, the existing measurement techniques are often limited to surface measurement, and it is difficult to meet the requirement for high-precision measurement of deformation between stacked sheets. In particular, no perfect measuring method exists at present for the whole deformation of each layer of thin sheet in the stacking sheet, the microstructure of the surface of the thin sheet and the three-dimensional appearance of the slit side wall in the slit structure.
Conventional measurement methods such as laser interferometry, white light interferometry, confocal laser, confocal spectroscopic techniques, scanning Electron Microscopy (SEM), atomic Force Microscopy (AFM) and the like have certain limitations in terms of surface measurement, because they often cannot penetrate deep into the internal layers of the stacked sheets for accurate measurement. And in the case of the three-dimensional morphology of the sheet surface microstructure and the three-dimensional morphology of the slit sidewall in the slit structure, the conventional method is more difficult to measure.
Therefore, a new technology is needed to realize comprehensive and accurate measurement of the whole deformation of each layer of thin sheet in the stacked sheet, the microstructure of the surface of the thin sheet and the three-dimensional shape of the slit side wall in the slit structure.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a device and a method for measuring the deformation of stacked sheets and the three-dimensional morphology of a microstructure on a sheet, and solves the problems of sheet curved surface deformation and three-dimensional morphology measurement of the microstructure on the sheet in the stacked sheets.
In order to achieve the above object, according to a first aspect of the present invention, there is provided a measuring device for measuring deformation of stacked sheets and surface microstructure, comprising a beam splitter, wherein a refractive optical path of the beam splitter penetrates a first face and an opposite face of the beam splitter, and a transmissive optical path of the beam splitter penetrates a second face and an opposite face of the beam splitter, the first face and the second face not being opposite to each other;
the first displacement table is used for loading and driving the reflecting mirror to displace;
the light source, the collimating lens and the second objective lens are sequentially arranged at the front end of the second face of the beam splitter, the second objective lens, the beam steering micro device and the second displacement platform are sequentially arranged at the rear end of the opposite face of the second face of the beam splitter, the second displacement platform is used for loading and driving the stacking sheets to be tested to displace and rotate, and the beam steering micro device is used for extending between adjacent stacking sheets to be tested in the measuring process;
wherein the refractive optical path and the transmissive optical path are used as a reference optical path and a measurement optical path of a measurement device, respectively, and the tube mirror is used to combine the reference light and the measurement light in the reference optical path and the measurement optical path to form an interference information pattern in the camera.
According to one embodiment of the invention, the measuring beam path is perpendicular to the reference beam path.
According to one embodiment of the present invention, a compensation optical path difference glass sheet is further provided between the first objective lens and the first displacement stage, and the compensation optical path difference glass sheet is used for compensating the optical path difference generated by the measuring light passing through the beam steering micro device.
According to one embodiment of the invention, the beam steering micro device is a micro mirror or micro prism having a size of 1-10000 microns.
According to one embodiment of the invention, the stacked sheet is a stacked sheet-like object or a structure with a slit, including a stacked semiconductor wafer, a stacked metal sheet, a stacked chip, a grooved or slit structure.
According to one embodiment of the invention, the camera is a CMOS camera or a CCD camera.
According to one embodiment of the invention, the measuring device further comprises a shading box body, and the beam splitter is located in the middle of the shading box body.
According to another aspect of the present invention, there is also provided a method for measuring deformation and surface microstructure of a stacked sheet using the above measuring apparatus, the method comprising the steps of:
s1: the positions of the reflector and the stacking sheets to be tested are adjusted to be respectively positioned in the effective working distances of the first objective lens and the second objective lens, and the beam steering micro device is controlled to extend between the adjacent stacking sheets to be tested;
s2: controlling the first displacement table to drive the reflecting mirror to move, observing interference fringes of the surface microstructure of the stacked sheet in the camera, and collecting all interference information patterns of the surface microstructure of the stacked sheet;
s3: calculating to obtain three-dimensional shape information of the microstructure on the surface of the stacked sheet by utilizing the interference information patterns collected in the step S2;
and or measuring the height change of a plurality of edge points on the single sheet in the stacked sheet, and fitting the deformation pattern of the whole single sheet in the stacked sheet according to the height change.
According to one embodiment of the invention, step S3 comprises:
s3.1: recording the moving distance of a first displacement table corresponding to each pixel point in the interference information pattern when the light intensity reaches the maximum value, and obtaining initial three-dimensional morphology information of the surface microstructure of the stacked sheet after data summarizing and reconstructing the moving distance;
s3.2: and optimizing the initial three-dimensional morphology information by at least one algorithm selected from a direct solution method, a phase shifting method and an envelope curve fitting method to obtain final three-dimensional morphology information of the surface microstructure of the stacked sheet.
In general, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
1. the measuring device of the invention is based on an optical measuring principle, and collects the reflected light data of the surface of the stacked sheet through the light beam steering micro-device to obtain the deformation condition of the stacked sheet and the three-dimensional shape of the microstructure on the sheet, compared with the traditional mechanical probe measuring mode, the measuring device has higher measuring accuracy and wider application measuring scene, not only solves the limit of the traditional measuring method on interlayer measurement, but also provides a brand new high-efficiency means for the deep research and application of the stacked sheet and other micro-nano structures, and has important practicability and popularization value.
2. The beam steering micro device has fine size, and the measuring beam can be accurately reflected to the measuring area by extending the beam steering micro device between adjacent stacked sheets to be measured in the measuring process, so that the three-dimensional shape and the height change of the surface microstructure of the stacked sheets can be completely and accurately mapped.
3. Because the optical path difference can be generated between the reference light and the measuring light when the light beam passes through the light beam steering micro-device, the invention arranges the optical path difference compensation glass sheet between the first objective lens and the first displacement table to compensate the optical path difference generated by the light beam passing through the light beam steering micro-device, so that the reference light path and the measuring light path generate obvious interference patterns in the camera, thereby obtaining accurate measuring data and ensuring accurate measuring results.
Drawings
FIG. 1 is a schematic illustration of a measurement device for measuring sheet stack deformation and surface microstructure constructed in accordance with an embodiment of the invention;
FIG. 2 is an observation view of a stacked sheet surface microstructure obtained by a measuring apparatus according to an embodiment of the present invention under an optical microscope;
FIG. 3 is a graph of measurement results of surface microstructure and sheet cross-section height of stacked sheets constructed in accordance with an embodiment of the invention;
FIG. 4 is a graph of sheet deformation curve measurements in a stacked sheet constructed in accordance with an embodiment of the present invention.
Reference numerals: 1. the optical system comprises a light source, 2, a collimating lens, 3, a beam splitter, 4, a first objective lens, 5, a compensating optical path difference glass sheet, 6, a first displacement table, 7, a reflecting mirror, 8, a reference optical path, 9, a second objective lens, 10, a beam steering micro device, 11, a stacked sheet, 12, a measuring optical path, 13, a tube mirror, 14, a camera, 15 and a second displacement table.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The measurement object in the present invention is a stacked sheet-like object or a structure with a slit, including but not limited to a stacked semiconductor wafer, a stacked metal sheet, a stacked chip, a structure with a trench or a slit, or the like.
As shown in fig. 1, an apparatus for measuring deformation of stacked sheets and three-dimensional morphology of microstructures on a sheet, comprising: a light source 1, a collimating lens 2, a beam splitter 3, an objective lens 4, a compensating optical path difference glass plate 5, a displacement table 6, a reflecting mirror 7, a beam steering micro device 10, a tube mirror 13, a camera 14 and a second displacement table 15;
the beam splitter 3 is used for connecting the reference light path 8 and the measuring light path 12; wherein, the reference light path 8 is positioned in the refraction light path direction of the beam splitter 3, and the measuring light path 12 is positioned in the transmission light path direction of the beam splitter 3; the reference light path 8 is provided with a first objective lens 4, a compensating optical path difference glass sheet 5, a first displacement table 6 and a reflecting mirror 7, the reflecting mirror 7 is mounted on the first displacement table 6, and the reflecting mirror 7 is used for reflecting light on the reference light path 8 into the beam splitter 3; the measuring optical path 12 is provided with a second objective 9, a beam steering micro-device 10 and a stack 11, the beam steering micro-device 10 being arranged to reflect light on the measuring optical path 12 onto the stack and to reflect reflected light on the stack into the beam splitter 3. The stacking sheet 11 to be tested is placed on the second displacement table 15, and the second displacement table 15 rotates to drive the stacking sheet to be tested to move or rotate.
The beam steering micro-device 10 is capable of transmitting an interference signal onto the sheet. Particularly, when the distance between the stacked sheets is generally from a few micrometers to a few centimeters, the deformation condition of the sheets in the stacked sheets and the three-dimensional shape of the microstructure on the sheets can be measured efficiently and accurately based on the measuring device of the embodiment.
The thickness and refractive index of the compensation optical path difference glass sheet 5 should correspond to the optical path difference generated by the light beam passing through the light beam steering micro device, Δl=n×d, where Δl is the optical path difference generated by the light beam steering micro device, and n and d are the refractive index and thickness of the compensation optical path difference glass sheet 5, respectively.
In this embodiment, the micro-mirror is formed by 3D printing with a two-photon polymer gel, and the size is 10 micrometers.
The measuring device in this embodiment further comprises a further observation camera, which is arranged in the opposite direction of the reference beam path 8. In the actual test, the measuring device also comprises a controller and a processing terminal.
The embodiment also has a peripheral shading box body in the measuring device, and the shading box body surrounds all devices of the measuring device, so that the influence of external light on a measuring result is avoided.
The measurement method of this embodiment is as follows:
s1: the positions of the reflector and the stacking sheets to be tested are adjusted to be respectively positioned in the effective working distances of the first objective lens and the second objective lens, and the beam steering micro device is controlled to extend between the adjacent stacking sheets to be tested;
s2: controlling the first displacement table to drive the reflecting mirror to move, observing interference fringes of the surface microstructure of the stacked sheet in the camera, and collecting all interference information patterns of the surface microstructure of the stacked sheet;
s3.1: recording the moving distance of a first displacement table corresponding to each pixel point in the interference information pattern in S2 when the light intensity reaches the maximum value, and collecting the moving distance to obtain initial three-dimensional morphology information of the surface microstructure of the stacked sheet;
s3.2: correcting the initial three-dimensional morphology information by using a direct solution method, a phase shifting method and an envelope curve fitting method to obtain final three-dimensional morphology information of the surface microstructure of the stacked sheet;
s3.3: and measuring the height change of a plurality of edge points of the single sheet in the stacked sheet, and fitting the deformation pattern of the whole single sheet in the stacked sheet by adopting a fitting algorithm according to the height change.
In this embodiment, the effective working distance between the first objective lens and the second objective lens is not less than half the length of the light shielding box.
The observation result of the microstructure on the sheet in the stacked sheet in the embodiment under the optical microscope is shown in fig. 2, and the three-dimensional morphology and the cross-sectional height result chart of the microstructure on the stacked sheet can be obtained by using the measuring device shown in fig. 1 through step S3 and is shown in fig. 3. The measurement result graph of the deformation curved surface of the thin sheet in the stacked sheet obtained through the step S4 is shown in fig. 4, and the feasibility of the measurement device is proved.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The measuring device for measuring the deformation and the surface microstructure of the stacked sheets is characterized by comprising a beam splitter, wherein a refraction light path of the beam splitter penetrates through a first surface and an opposite surface of the beam splitter, a transmission light path of the beam splitter penetrates through a second surface and an opposite surface of the beam splitter, and the first surface and the second surface are not opposite surfaces;
the first displacement table is used for loading and driving the reflecting mirror to displace;
the light source, the collimating lens and the second objective lens are sequentially arranged at the front end of the second face of the beam splitter, the second objective lens, the beam steering micro device and the second displacement platform are sequentially arranged at the rear end of the opposite face of the second face of the beam splitter, the second displacement platform is used for loading and driving the stacking sheets to be tested to displace and rotate, and the beam steering micro device is used for extending between adjacent stacking sheets to be tested in the measuring process;
wherein the refractive optical path and the transmissive optical path are used as a reference optical path and a measurement optical path of a measurement device, respectively, and the tube mirror is used to combine the reference light and the measurement light in the reference optical path and the measurement optical path to form an interference information pattern in the camera.
2. A measuring device for measuring sheet deformation and surface microstructure according to claim 1 wherein the measuring light path is perpendicular to the reference light path.
3. The device of claim 1, wherein a compensating optical path difference glass sheet is further provided between the first objective lens and the first displacement stage, and the compensating optical path difference glass sheet is used for compensating the optical path difference of the measuring light generated by the beam steering micro device.
4. The device of claim 1, wherein the beam steering micro-device is a micromirror or a micro-prism, and the micromirror or micro-prism is 1-10000 microns in size.
5. The measurement device for measuring deformation and surface microstructure of stacked sheets according to claim 1, wherein the camera is a CMOS camera or a CCD camera.
6. The measurement device for measuring deformation and surface microstructure of stacked sheets of claim 1, further comprising a light shielding box, wherein the beam splitter is located in the middle of the light shielding box.
7. A method of measuring stack sheet deformation and surface microstructure using a measuring device according to any one of claims 1 to 6, comprising:
s1: the positions of the reflector and the stacking sheets to be tested are adjusted to be respectively positioned in the effective working distances of the first objective lens and the second objective lens, and the beam steering micro device is controlled to extend between the adjacent stacking sheets to be tested;
s2: controlling the first displacement table to drive the reflecting mirror to move, observing interference fringes of the surface microstructure of the stacked sheet in the camera, and collecting all interference information patterns of the surface microstructure of the stacked sheet;
s3: calculating to obtain three-dimensional shape information of the microstructure on the surface of the stacked sheet by utilizing the interference information patterns collected in the step S2;
and or measuring the height change of a plurality of edge points on the single sheet in the stacked sheet, and fitting the deformation pattern of the whole single sheet in the stacked sheet according to the height change.
8. The method of claim 7, wherein step S3 comprises:
s3.1: recording the moving distance of a first displacement table corresponding to each pixel point in the interference information pattern when the light intensity reaches the maximum value, and obtaining initial three-dimensional morphology information of the surface microstructure of the stacked sheet after data summarizing and reconstructing the moving distance;
s3.2: and optimizing the initial three-dimensional morphology information by at least one algorithm selected from a direct solution method, a phase shifting method and an envelope curve fitting method to obtain final three-dimensional morphology information of the surface microstructure of the stacked sheet.
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| CN202410103301.0A CN117824527A (en) | 2024-01-25 | 2024-01-25 | Measuring device and method for measuring deformation and surface microstructure of stacked sheet |
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| CN202410103301.0A CN117824527A (en) | 2024-01-25 | 2024-01-25 | Measuring device and method for measuring deformation and surface microstructure of stacked sheet |
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