CN117806135A - A quick sample changing device and a quick sample changing method - Google Patents

Abstract

The invention relates to a quick sample changing device, a first vacuum valve is arranged between an exposure cavity and a first sample changing cavity, a second vacuum valve is arranged between the exposure cavity and a second sample changing cavity, a sample table is arranged in the exposure cavity, a movable sample rack is fixed on an electromagnetic hanging rod through an electromagnetic adsorption device, a first conveying rod is arranged to move between the first sample changing cavity and the exposure cavity in a vacuum state so as to transfer the sample rack from a first position in the first sample changing cavity into a second position in the exposure cavity, and a second conveying rod is arranged to move between the exposure cavity and the second sample changing cavity in the vacuum state so as to transfer the sample rack from the second position in the exposure cavity into a third position in the second sample changing cavity. The invention also relates to a quick sample changing method of the quick sample changing device. According to the rapid sample changing device and the rapid sample changing method thereof, the vacuum state of the exposure cavity is not damaged when the sample is changed, the rapid sample changing is realized, and the experimental efficiency is improved.

Description

A quick sample changing device and a quick sample changing method

Technical Field

The present invention relates to photolithography, and more specifically to a rapid sample change device and a rapid sample change method.

Background technique

As the next generation of lithography technology, extreme ultraviolet lithography technology has been given the mission of saving Moore's Law by the semiconductor industry. Extreme ultraviolet photoresist is a key material for manufacturing integrated circuits, and its performance directly affects the performance of integrated circuit chips. The core exposure performance of extreme ultraviolet photoresist mainly includes three aspects: sensitivity, resolution and edge roughness. Characterization of these exposure properties is a necessary condition for the development of extreme ultraviolet photoresists and an important step in achieving optimization of extreme ultraviolet photoresist formulas.

X-ray interference lithography (XIL) is a new advanced micro- and nano-processing technology that uses the interference fringes of two or more coherent X-beams to expose photoresist. It can carry out nanostructure processing of dozens or even dozens of nanometer cycles. . The principle of interference lithography is to use a mask grating to divide a beam of light into multiple coherent beams, and generate interference fringes at the photoresist to expose the photoresist, and the exposure pattern can be recorded. The performance of the photoresist can be characterized by detecting the quality of the exposure pattern. At present, interference lithography technology is the only experimental technology that can simultaneously detect three exposure properties of photoresist in one exposure.

In addition to the period of the mask grating, factors that affect the final exposure stripe resolution include the stability of the exposure system, the development process, etc. In order to improve the stability of the exposure system, the current method is: use vacuum tape to paste the sample on the sample rack 6' as shown in Figure 2, and the sample rack 6' is suspended on the sample rack 6' through three hanging holes 61' as shown in Figure 3 On the three electromagnetic hanging rods 12' of the sample stage 11'. Specifically, the sample holder 6' is pressed onto the sample stage 11' by three fixing springs 13'. After the exposure is completed, the three fixing springs 13' must be loosened before the sample holder 6' can be taken out. Among them, the fixed spring 13' has two states: a compressed state and a relaxed state. These two states need to be manually changed to squeeze or relax the sample holder 6'. In the relaxed state, the fixed spring 13' is stuck on a fixed pin. To change to the compressed state, the fixed spring 13' needs to be manually rotated to disengage from the fixed pin, and then the sample rack 6' is pressed to the sample stage 11'. superior.

Due to the transmission characteristics of extreme ultraviolet light/soft X-rays, the exposure cavity needs to be in a vacuum state. It takes a long time to complete the vacuum acquisition of the exposure cavity before exposure. After the exposure is completed, the vacuum state of the cavity is destroyed and restored. After reaching the atmospheric state, the sample replacement can be completed manually. Therefore, in the current state, during a complete exposure process, the time spent on vacuum acquisition and release is often longer than the actual exposure experiment time, resulting in low experimental efficiency and a waste of exposure resources.

Contents of the invention

In order to solve the above-mentioned problems of low experimental efficiency in the prior art, the present invention provides a rapid sample changing device and a rapid sample changing method.

The quick sample changing device according to the present invention includes an exposure chamber, a first sample changing chamber, a second sample changing chamber, a first transfer rod and a second transfer rod, wherein the exposure cavity and the first sample changing chamber A first vacuum valve is provided between the bodies, a second vacuum valve is provided between the exposure chamber and the second sample changing chamber, a sample stage is installed in the exposure chamber, and the movable sample rack is fixed on the sample stage through an electromagnetic adsorption device. On the electromagnetic hanging rod, the first transfer rod is configured to move between the first sample changing chamber and the exposure chamber in a vacuum state to transfer the sample rack from the first position in the first sample changing chamber into the exposure chamber. In the second position, the second transfer rod is configured to move between the exposure chamber and the second sample change chamber in a vacuum state to transfer the sample rack from the second position in the exposure chamber into the second sample change chamber. third position.

Preferably, the first and second transfer rods are detachably connected to the sample holder respectively.

Preferably, the sample holder is made of magnetic material.

Preferably, the position of the sample rack fixed on the sample stage is moved by the first motor and the second motor.

Preferably, the first sample changing cavity and the second sample changing cavity are respectively located on both sides of the exposure cavity.

The rapid sample changing method of the rapid sample changing device according to the present invention comprises the following steps: S1, closing the first vacuum valve and the second vacuum valve, and evacuating the exposure chamber and the second sample changing chamber to a vacuum state so that they are in a working state, and the first sample changing chamber is in an atmospheric state; S2, placing the first sample holder in the first sample changing chamber and connecting it to the first transmission rod, at which time the first sample holder is in a first position; S3, starting the vacuum pump of the first sample changing chamber to evacuate the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber reaches the same level as the vacuum of the exposure chamber; S4, opening the first vacuum valve, transferring the first sample holder to the exposure chamber through the first transmission rod, and hanging it on the electromagnetic hanging rod, at which time the first sample holder is in a first position. The rack is in the second position; S5, energize the electromagnetic hanging rod to make it magnetic, and adsorb the first sample rack on the electromagnetic hanging rod; S6, untie the connection between the first transmission rod and the first sample rack, withdraw the first transmission rod from the exposure chamber, and return it to the first sample changing chamber; S7, close the first vacuum valve and start the exposure experiment; S8, after the exposure experiment in the exposure chamber is completed, open the second vacuum valve, connect the second transmission rod to the first sample rack and then cut off the power of the electromagnetic hanging rod; S9, use the second transmission rod to take the first sample rack out of the second sample changing chamber, close the second vacuum valve, and the first sample rack is in the third position; S10, restore the vacuum of the second sample changing chamber to the atmospheric state, and take out the first sample rack.

Preferably, after step S7, the first sample changing chamber is returned to the atmospheric state, the second sample rack is placed into the first sample changing chamber, and after being connected to the first transfer rod, the first sample changing chamber is opened. The vacuum pump pumps the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level.

Preferably, after step S9, steps S4-S7 are repeated to place the second sample rack into the exposure cavity and the third sample rack into the first sample changing cavity.

Preferably, after the first sample rack is taken out in step S10, the vacuum pump of the second sample changing chamber is turned on to pump the vacuum of the second sample changing chamber until the vacuum of the second sample changing chamber and the vacuum of the exposure chamber reach the same level. same level.

According to the rapid sample changing device and its rapid sample changing method of the present invention, through the first sample changing cavity, the second sample changing cavity, the first transfer rod, the second transfer rod and the electromagnetic adsorption device, the sample is not damaged when changing The vacuum state of the exposure cavity enables rapid replacement of samples and improves experimental efficiency.

Description of drawings

FIG. 1 is a top view of a rapid sample changing device according to a preferred embodiment of the present invention.

FIG. 2 is an appearance diagram of a sample rack in the prior art.

Figure 3 is a side view of a sample stage in the prior art.

Detailed ways

Below, preferred embodiments of the present invention are given and described in detail with reference to the accompanying drawings.

As shown in Figure 1, a rapid sample change device according to a preferred embodiment of the present invention is used for synchrotron radiation X-ray interference lithography, including an exposure cavity 1, a first sample change cavity 2 and a second sample change cavity 3. A first vacuum valve 4 is provided between the exposure chamber 1 and the first sample change chamber 2, and a second vacuum valve 4 is provided between the exposure chamber 1 and the second sample change chamber 3. In this embodiment, the first sample changing chamber 2 and the second sample changing chamber 3 are respectively located on the left and right sides of the exposure chamber 1 and arranged in a straight line of 180°. It should be understood that the straight-line arrangement is only an example and not a limitation, and it is also possible to arrange the first sampling cavity 2 and the second sampling cavity 3 at 90°, for example.

As shown in Figure 1, a sample stage 11 is installed in the exposure chamber 1, and the movable sample rack 6 is suspended on three electromagnetic hanging rods 12 of the sample stage 11 through three suspension holes. Specifically, the sample rack 6 is fixed on the electromagnetic hanging rod 12 through an electromagnetic adsorption device. It should be understood that the arrangement of the hanging holes of the sample holder 6 can be the same as that of the prior art in Figure 2, or can be adjusted as needed. In addition, the position of the sample rack 6 fixed on the sample stage 11 can be moved by the first motor 13 and the second motor 14 to complete the exposure as needed. In particular, the sample holder 6 of the present invention is made of magnetic material so as to be adsorbed by the electromagnet. The electromagnetic adsorption device is used to replace the fixed spring in the prior art to fix the sample holder 6 on the sample stage 11, thus avoiding the problems in the prior art. The manual operation of the fixed spring is necessary to complete the replacement of the sample without destroying the vacuum state of the exposure chamber 1, realizing rapid replacement of the sample and improving experimental efficiency.

As shown in Figure 1, the quick sample change device according to this embodiment also includes a first transfer rod 7 and a second transfer rod 8, wherein the first transfer rod 7 is between the first sample change chamber 2 and the exposure chamber 1. to move the sample rack 6 from the first position 61 in the first sample change chamber 2 to the second position 62 in the exposure chamber 1. The second transfer rod 8 is between the exposure cavity 1 and the second sample change chamber. The sample holder 6 is moved from the second position 62 in the exposure chamber 1 to the third position 63 in the second sample change chamber 3 by moving between the bodies 3 .

It should be understood that the detachable connection method of the transfer rods 7, 8 and the sample holder 6 can be selected as needed. In one embodiment, screw holes are reserved on the side of the sample holder 6 and screws are reserved at the connecting ends of the transfer rods 7 and 8 , thereby realizing the connection between the sample holder 6 and the transfer rods 7 and 8 . In another embodiment, a clamp is installed at the connecting end of the transfer rods 7 and 8 , and the sample holder 6 is connected to the transfer rods 7 and 8 through the clamp.

The following is a brief description of the quick sample change method.

(1) Close the first vacuum valve 4 and the second vacuum valve 5. Before exposure, the exposure chamber 1 and the second sample changing chamber 3 are evacuated to a vacuum state so that they are in working condition. The first sample changing chamber 2 is in the atmosphere. state.

(2) After pasting the first sample to be tested to the first sample rack 6, put the first sample rack 6 into the first sample changing chamber 2 and connect it to the first transfer rod 7. At this time, the first The product rack 6 is in the first position 61 .

(3) Turn on the vacuum pump of the first sample changing chamber 2 to pump the vacuum of the first sample changing chamber 2 until the vacuum of the first sample changing chamber 2 and the vacuum of the exposure chamber 1 reach the same level.

(4) Open the first vacuum valve 4, transfer the first sample rack 6 into the exposure chamber 1 through the first transfer rod 7, and hang it on the electromagnetic hanging rod 12. At this time, the first sample rack 6 is in the second position. Location 62.

(5) Energize the electromagnetic hanging rod 12 to make it magnetic, and adsorb the first sample holder 6 to the electromagnetic hanging rod 12 .

(6) Unlock the connection between the first transfer rod 7 and the first sample holder 6 , exit the first transfer rod 7 from the exposure chamber 1 , and return to the first sample change chamber 2 .

(7) Close the first vacuum valve 4 and start the exposure experiment.

(8) Return the first sample changing chamber 2 to the atmospheric state, and after pasting the second sample to be measured to the second sample rack 6, place the second sample rack 6 into the first sample changing chamber 2, and connect it with the second sample rack 6. After a transfer rod 7 is connected, the vacuum pump of the first sample changing chamber 2 is turned on to pump the vacuum of the first sample changing chamber 2 until the vacuum of the first sample changing chamber 2 and the vacuum of the exposure chamber 1 reach the same level.

(9) After the exposure experiment in the exposure chamber 1 is completed, the second vacuum valve 5 is opened, the second conveying rod 8 is connected to the first sample holder 6, and then the electromagnetic hanging rod 12 is powered off.

(10) Use the second transfer rod 8 to take out the first sample rack 6 into the second sample changing chamber 3 and close the second vacuum valve 5. At this time, the first sample rack 6 is in the third position 63.

(11) Repeat the above steps (4) to (7) to place the second sample rack 6 into the exposure chamber 1 and the third sample rack 6 into the first sample changing chamber 2 .

(12) Restore the vacuum of the second sample changing chamber 3 to the atmospheric state. After taking out the first sample rack 6, turn on the vacuum pump of the second sample changing chamber 3 to pump the vacuum of the second sample changing chamber 3 until the first The vacuum of the second sample changing chamber 3 and the vacuum of the exposure chamber 1 reach the same level.

At this point, a complete sample replacement process is completed.

Obviously, the present invention controls the power supply of the electromagnetic hanging rod 12 by the switch, thereby realizing the control of magnetism, so that the sample holder 6 is fixed on the electromagnetic hanging rod 12. In this way, by adding the sample changing chamber 2, 3, the transmission rod 7, 8 and the electromagnetic adsorption device, the present invention can realize fast sample changing.

The above are only preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various changes can be made to the above-mentioned embodiments of the present invention. That is to say, all simple and equivalent changes and modifications made based on the claims and description of the present invention fall within the scope of protection of the claims of the patent of the present invention. What is not described in detail in the present invention is conventional technical content.

Claims (9)

1. A quick sample change device, characterized in that the rapid sample change device includes an exposure chamber, a first sample change chamber, a second sample change chamber, a first transfer rod and a second transfer rod, wherein the exposure A first vacuum valve is provided between the chamber and the first sample changing chamber, a second vacuum valve is provided between the exposure chamber and the second sample changing chamber, and a sample stage and a movable sample rack are installed in the exposure chamber. The first transfer rod is fixed on the electromagnetic hanging rod of the sample stage through an electromagnetic adsorption device. The first transfer rod is configured to move between the first sample changing chamber and the exposure chamber in a vacuum state to remove the sample rack from the first sample changing chamber. The first position is transferred into the second position in the exposure chamber, and the second transfer rod is configured to move between the exposure chamber and the second sample change chamber in a vacuum state to transfer the sample holder from the second position in the exposure chamber. Enter the third position in the second sample changing chamber. 2 . The rapid sample changing device according to claim 1 , wherein the first and second conveying rods are detachably connected to the sample rack. 3. The rapid sample changing device according to claim 1, characterized in that the sample holder is made of magnetic material. 4 . The rapid sample changing device according to claim 1 , wherein the position of the sample rack fixed on the sample stage is moved by a first motor and a second motor. 5. The rapid sample changing device according to claim 1, characterized in that the first sample changing chamber and the second sample changing chamber are respectively located on both sides of the exposure chamber. 6. The rapid sample changing method of the rapid sample changing device according to any one of claims 1 to 5, characterized in that the rapid sample changing method includes the following steps: S1, close the first vacuum valve and the second vacuum valve, pump the exposure chamber and the second sample change chamber to a vacuum state respectively to make them in working condition, and the first sample change chamber is in an atmospheric state; S2, placing the first sample rack into the first sample changing chamber and connecting it to the first transmission rod, at which time the first sample rack is in the first position; S3, turning on the vacuum pump of the first sample changing chamber to draw the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber reaches the same level as the vacuum of the exposure chamber; S4, opening the first vacuum valve, transferring the first sample holder into the exposure chamber through the first transfer rod, and hanging the first sample holder on the electromagnetic hanging rod, at which time the first sample holder is in the second position; S5, energize the electromagnetic hanging rod to make it magnetic, and adsorb the first sample holder to the electromagnetic hanging rod; S6, untie the connection between the first transfer rod and the first sample holder, exit the first transfer rod from the exposure chamber, and return to the first sample change chamber; S7, close the first vacuum valve and start the exposure experiment; S8, after the exposure experiment in the exposure chamber is completed, open the second vacuum valve, connect the second transfer rod to the first sample rack, and then power off the electromagnetic hanging rod; S9, use the second transfer rod to take out the first sample rack into the second sample changing chamber, close the second vacuum valve, and at this time, the first sample rack is in the third position; S10, restore the vacuum of the second sample changing chamber to the atmospheric state, and take out the first sample holder. 7. The rapid sample changing method according to claim 6, characterized in that, after step S7, the first sample changing chamber is returned to the atmospheric state, the second sample rack is placed into the first sample changing chamber, and After the first transfer rod is connected, the vacuum pump of the first sample changing chamber is turned on to pump the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level. 8. The rapid sample changing method according to claim 7, characterized in that after step S9, steps S4-S7 are repeated to place the second sample rack into the exposure chamber and the third sample rack into the first sample changing chamber. 9. The rapid sample changing method according to claim 6, characterized in that, after taking out the first sample rack in step S10, the vacuum pump of the second sample changing chamber is turned on to evacuate the vacuum of the second sample changing chamber until The vacuum of the second sample changing chamber and the vacuum of the exposure chamber reach the same level.