CN117803659A - Intelligent static pressure air bearing device and detection method - Google Patents
Intelligent static pressure air bearing device and detection method Download PDFInfo
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- CN117803659A CN117803659A CN202311827091.1A CN202311827091A CN117803659A CN 117803659 A CN117803659 A CN 117803659A CN 202311827091 A CN202311827091 A CN 202311827091A CN 117803659 A CN117803659 A CN 117803659A
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- 238000001514 detection method Methods 0.000 title claims abstract description 93
- 230000003068 static effect Effects 0.000 title claims abstract description 21
- 230000000087 stabilizing effect Effects 0.000 claims description 23
- 230000002706 hydrostatic effect Effects 0.000 claims description 13
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 7
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 claims description 7
- 229920006351 engineering plastic Polymers 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229920002530 polyetherether ketone Polymers 0.000 claims description 7
- 229910052582 BN Inorganic materials 0.000 claims description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 6
- 238000011897 real-time detection Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 230000006641 stabilisation Effects 0.000 claims description 3
- 238000011105 stabilization Methods 0.000 claims description 3
- 239000000725 suspension Substances 0.000 abstract description 3
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000006870 function Effects 0.000 description 5
- 238000013528 artificial neural network Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000012549 training Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention relates to the technical field of air bearing, and particularly discloses an intelligent static pressure air bearing device and a detection method thereof, wherein the device comprises an air bearing body, a throttle, a detection circuit board, a first air pressure sensor, a temperature sensor and a second air pressure sensor; the air bearing body is provided with an air inlet channel and a first air pressure detection hole; the throttle device is provided with a throttle hole and a second air pressure detection hole, one end of the throttle hole and one end of the second air pressure detection hole are communicated with an air film formed below the throttle device, and the other end of the throttle hole and the other end of the second air pressure detection hole are respectively communicated with the air inlet channel and the first air pressure detection hole; the detection circuit board is placed on the back of the air bearing body and is configured to judge the suspension height of the air bearing in real time according to the information acquired by the first air pressure sensor, the temperature sensor and the second air pressure sensor, so that self-detection and self-detection are realized and the state of the air bearing body is transmitted to the outside.
Description
Technical Field
The invention relates to the technical field of air bearing, in particular to an intelligent static pressure air bearing device.
Background
The air bearing is a non-contact bearing, uses high-pressure gas as a lubricating medium, isolates the space between a moving part and a fixed guide rail, does not generate more friction heat even under a very high shearing speed due to smaller gas viscosity, has the characteristics of low hysteresis, high precision and the like, and is suitable for semiconductor equipment, ultra-precise machine tools and high-precision measuring instruments. Although the air bearing is accurate, the accuracy of the air bearing is reduced due to improper use, in theory, the air bearing is non-contact, but two air bearing surfaces of the air bearing can be in contact with each other in an accidental manner in engineering application, and the accuracy of the air bearing is affected. Essentially, the prior air bearing has no feedback function, the air bearing cannot detect state information such as collision, suspension height and the like in real time, and the prior patent takes the air bearing as a mechanical part and has no self-checking function.
Disclosure of Invention
The invention provides an intelligent static pressure air bearing device capable of detecting the self condition for solving the technical problems; the problem of current air bearing lack detection function, suspension height and collision information is solved.
In order to solve the problems, the invention adopts the following technical scheme:
in a first aspect, at least one embodiment of the present disclosure provides an intelligent hydrostatic air bearing device, including an air bearing body, a restrictor, a detection circuit board, a first air pressure sensor, a second air pressure sensor, and a temperature sensor.
The air bearing body is provided with an air inlet channel and a first air pressure detection hole;
the throttle device is provided with a throttle hole and a second air pressure detection hole, one ends of the throttle hole and the second air pressure detection hole are communicated with an air film formed below the throttle device, and the other ends of the throttle hole and the second air pressure detection hole are respectively communicated with the air inlet channel and the first air pressure detection hole.
The first air pressure sensor is configured to be electrically connected with the detection circuit board, and the first air pressure sensor is used for acquiring air pressure in the air inlet channel, namely air inlet pressure.
The temperature sensor is configured to be electrically connected with the detection circuit board, and the temperature sensor is used for acquiring the temperature of the air bearing body.
The second air pressure sensor is configured to be electrically connected with the detection circuit board and used for acquiring air pressure at a specific position of the air film.
And the detection circuit board judges and feeds back the service condition of the air bearing according to the information acquired by the first air pressure sensor, the second air pressure sensor and the temperature sensor.
In the intelligent static pressure air bearing device provided by at least one embodiment of the present disclosure, the material of the restrictor is one of boron nitride material or PEEK engineering plastic.
In the intelligent static pressure air bearing device provided in at least one embodiment of the present disclosure, further includes: and a display screen.
The display screen is electrically connected with the detection circuit board and is used for displaying the service condition of the air bearing.
In the intelligent static pressure air bearing device provided by at least one embodiment of the present disclosure, the first air pressure sensor and the second air pressure sensor are both air pressure detection sensors, and the temperature sensor is of a thermocouple type.
In the intelligent static pressure air bearing device provided in at least one embodiment of the present disclosure, further includes: a housing.
The housing has a receiving cavity for receiving the detection circuit board.
The shell is configured to be fixedly connected with the air bearing body, and the detection circuit board is located between the shell and the air bearing body.
And a window is arranged on the upper surface of the shell, and the display screen protrudes to the window.
In the intelligent static pressure air bearing device provided by at least one embodiment of the disclosure, a first embedding groove and a second embedding groove are formed in the air bearing body, and the first air pressure sensor and the second air pressure sensor are respectively embedded into the first embedding groove and the second embedding groove.
The air inlet channel is communicated with the first embedded groove.
In the intelligent static pressure air bearing device provided by at least one embodiment of the disclosure, a third embedded groove is formed in the air bearing body, and the temperature sensor is embedded in the third embedded groove.
In the intelligent static pressure air bearing device provided by at least one embodiment of the disclosure, at least two second air pressure sensors and at least two first air pressure detection holes are configured, the first air pressure detection holes and the second air pressure sensors are distributed in an annular array, and the orifices are distributed in a circumferential direction.
In the intelligent static pressure air bearing device provided in at least one embodiment of the present disclosure, further includes: an air source supply system and an air pressure stabilizing system.
The air source supply system is used for supplying air to the air inlet channel; the air pressure stabilizing system is used for stabilizing the supply air pressure of the air source supply system.
The air source supply system, the air pressure stabilizing system and the air inlet channel are sequentially connected, and the air source supply system and the air pressure stabilizing system are electrically connected with the detection circuit board.
In a first aspect, the present disclosure further provides a method for detecting an intelligent static pressure air bearing device, including the steps of:
1) The detection circuit board controls the starting of the air source supply system, high-pressure air output by the air source supply system enters the air pressure stabilizing system, the air pressure stabilizing system stabilizes the air inlet pressure at a preset value, and compressed air after pressure stabilization enters the air inlet channel;
2) The first air pressure sensor detects the air pressure value of the air inlet channel in real time and feeds the air pressure value back to the detection circuit board, the detection circuit board compares the actual air pressure value with a preset pressure value, and if the error exceeds the preset pressure value, the air pressure stabilizing system is controlled to stabilize the air inlet pressure until the air inlet pressure error is smaller than the preset pressure value; if the air inlet pressure error cannot be regulated to be smaller than the preset pressure value within the set time, an error warning is sent to the outside;
the temperature sensor detects the real-time temperature of the air bearing body and feeds the real-time temperature back to the detection circuit board, and the detection circuit board judges whether the thermal deformation of the bearing body is greatly affected according to the current temperature;
the second air pressure sensor acquires air pressure at a specific position of the air film and feeds the air pressure back to the detection circuit board, and the detection circuit board calculates the thickness of the air outlet film through air pressure information, so that real-time detection of the thickness of the air film is realized.
The beneficial effects of the invention are as follows:
the air bearing based on boron nitride or PEEK engineering plastic is adopted, and is not easy to damage a fixed guide rail during accidental collision due to self-lubricity and good machining performance of the boron nitride or PEEK engineering plastic.
The design mode of the orifices is array orifices, and the bearing and rigidity characteristics of the air bearing can be controlled by adjusting the number and the aperture of the orifices, so as to meet the requirements of different application scenes.
The air bearing can self-detect and self-detect, sense the performance and the running condition of the air bearing and transmit the state of the air bearing to the outside. And the thickness of the air film is calibrated through air pressure information, so that the real-time detection of the thickness of the air film is realized, and the collision condition of the air bearing surface is obtained by combining a collision sensing algorithm.
In summary, the invention has the greatest advantage of endowing the traditional air bearing with detection capability, and upgrading the traditional mechanical structure to a mechanical-measurement-perception-intelligent system.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of the overall structure of an intelligent hydrostatic air bearing device in some embodiments.
FIG. 2 is a schematic distribution diagram of an inlet and a first air pressure detection hole in some embodiments.
FIG. 3 is a schematic diagram of the distribution of air inlets in some embodiments.
FIG. 4 is a schematic diagram of the distribution of orifices in some embodiments.
Fig. 5 is an enlarged view at a in fig. 4.
FIG. 6 is a schematic distribution diagram of a first air pressure sensor, a temperature sensor, and a second air pressure sensor in some embodiments.
Fig. 7 is a cross-sectional view of an intelligent hydrostatic air bearing device in some embodiments.
Fig. 8 is a schematic distribution diagram of a first embedded groove, a second embedded groove, and a third embedded groove in some embodiments.
Fig. 9 is a schematic diagram of the overall structure of the intelligent hydrostatic air bearing device in some embodiments.
In the figure:
10. an air bearing body; 11. an air inlet channel; 12. a first air pressure detection hole; 13. a first embedded groove; 14. a second insertion groove; 15. a third embedded groove; 16. an air inlet;
20. a throttle; 21. an orifice; 22. a second air pressure detection hole;
30. a detection circuit board;
40. a first air pressure sensor;
50. a temperature sensor;
60. a second air pressure sensor;
70. a display screen;
80. a housing.
Detailed Description
The technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments, and it is obvious that the described embodiments are only some embodiments, not all embodiments.
Examples
As shown in fig. 1 to 8, an intelligent static pressure air bearing device includes an air bearing body 10, a throttle 20, a detection circuit board 30, a first air pressure sensor 40, a temperature sensor 50, a second air pressure sensor 60, an air source supply system (not shown) and an air pressure stabilizing system (not shown). The throttle 20 is adhesively secured to the air bearing body 10.
Further, the air bearing body 10 has an air inlet channel 11 and a first air pressure detection hole 12; the throttle 20 has an orifice 21 and a second air pressure detection hole 22, one end of each of the orifice 21 and the second air pressure detection hole 22 communicates with an air film formed below the throttle 20, and the other end of each of the orifice 21 and the second air pressure detection hole 22 communicates with the intake duct 11 and the first air pressure detection hole 12, respectively.
Specifically, one end of the orifice 21 extends to the air film, and the other end extends to the air intake duct 11, so that the air in the air intake duct 11 passes through the orifice 21 and enters the air film, and high-pressure air is formed in the air film, and the moving part is suspended by the high-pressure air, so that non-contact lubrication is realized. An air inlet 16 is arranged on the air bearing body 10, and the air inlet 16 is connected with the air inlet channel 11 to realize the input of high-pressure gas.
Further, the first air pressure sensor 40 is configured to be electrically connected to the detection circuit board 30, and the first air pressure sensor 40 is used for acquiring air pressure in the air inlet 11, i.e. working air pressure of the air bearing. The temperature sensor 50 is used for acquiring the temperature of the air bearing body 10. The second air pressure sensor 60 is configured to be electrically connected to the detection circuit board 30 and is used for acquiring air pressure at a specific position of the air film.
Further, the detection circuit board 30 evaluates the use condition of the air bearing according to the information acquired by the first air pressure sensor 40, the temperature sensor 50 and the second air pressure sensor 60.
Furthermore, the plurality of orifices 21 adopts an array design mode, and the bearing capacity and rigidity of the air bearing can be adjusted by controlling parameters such as the number of small holes, the aperture and the like.
Specifically, the orifices 21 are circumferentially distributed.
Illustratively, the first air pressure sensor 40 and the second air pressure sensor 60 are both measuring strain type sensors, and the temperature sensor 50 is a thermocouple type temperature sensor.
In the present embodiment, the air bearing body 10 is provided with a first insertion groove 13 and a second insertion groove 14, and the first air pressure sensor 40 and the second air pressure sensor 60 are respectively inserted into the first insertion groove 13 and the second insertion groove 14. The air intake duct 11 communicates with the first insertion groove 13.
In this embodiment, the air bearing body 10 is provided with a third insertion groove 15, and the temperature sensor 50 is inserted into the third insertion groove 15.
In the present embodiment, the second air pressure sensor 60 and the first air pressure detecting holes 12 are configured in plural, and the first air pressure detecting holes 12 and the second air pressure sensor 60 are distributed in an annular array. The detection circuit board 30 has an AI iterative learning algorithm module (not shown).
Illustratively, the film thickness at 4 points is known from the measured air pressure values of the 4 second air pressure sensors 60. And setting a gas film thickness threshold value, comparing the gas film thickness of 4 position points with the gas film thickness threshold value, if the gas film thickness is smaller than the threshold value, considering that the air bearing surfaces at partial positions are scratched, triggering a scratch duration recording program section, recording duration of continuous scratch, and providing training data for an AI iterative learning module conveniently.
The AI iterative learning module is a neural network module, can continuously learn the air pressure values and 1 air inlet pressure of 4 position points of the air film, and the label value of the neural network is three logic or real values of boron nitride or PEEK engineering plastic damage condition, static characteristic deviation condition and air bearing replacement suggestion, wherein the damage condition and the static characteristic deviation condition of the throttle are continuous values, the air bearing replacement suggestion is logic 0 and 1, and the three label values are data accumulated by engineering actual use and are used for continuously training the AI iterative learning module, so that the air bearing is more intelligent.
The gas film collision detection is determined based on the gas film thickness, and is regarded as a collision when the gas film thickness is smaller than a set threshold value. The key point is how to obtain the thickness of the air film through the air pressure value, and the one-to-one function relationship between the air pressure value and the air film thickness is established through an experimental calibration method by utilizing the fluid flow principle of one-to-one correspondence between the air film thickness and the air pressure value. The specific calibration steps are as follows;
1) The device can continuously apply force to enable the air film to rise or fall in a translation mode, and data of the relation between the air film thickness and the air pressure are collected.
2) And (3) allowing the two air floatation surfaces to be in contact, wherein the thickness of the air film is zero, the air film is lifted up in parallel at intervals of 1 micrometer, the data relationship between the thickness of the air film and the 4 air pressure sensors is recorded, and the air film is circulated until the thickness of the air film reaches 20 micrometers.
3) Drawing a gas film thickness-gas pressure relation curve by taking the gas film thickness as an abscissa and the gas pressure value as an ordinate, obtaining a function f (x) by adopting a polynomial fitting curve, wherein the order of the polynomial depends on a fitting determination coefficient R 2 The order of the polynomial is increased until the coefficient R is determined by fitting 2 Greater than 0.98.
In this embodiment, the air supply system is used for supplying air to the air inlet channel 11; the air pressure stabilizing system is used for stabilizing the supply air pressure of the air source supply system.
The air source supply system, the air pressure stabilizing system and the air inlet channel 11 are sequentially connected, and the air source supply system and the air pressure stabilizing system are electrically connected with the detection circuit board 30.
In this embodiment, the intelligent hydrostatic air bearing device further includes a display screen 70. The display screen 70 is electrically connected with the detection circuit board 30, and the display screen 70 is used for displaying information such as the thickness of the air film, the collision condition and the temperature calculated by the detection circuit board 30.
As shown in fig. 9, in some embodiments, the intelligent hydrostatic air bearing device further includes a housing 80, the housing 80 having a receiving cavity for receiving the detection circuit board 30.
Further, the housing is configured to be fixedly connected with the air bearing body 10, and the detection circuit board 30 is located between the housing and the air bearing body 10. A window is provided in the upper surface of the housing, and the display 70 protrudes to the window.
In some embodiments, the restrictor 20 is made of a boron nitride material, which is a self-lubricating material, and is not easy to damage the air bearing surface of the air bearing and the air bearing surface of the fixed rail when the air bearing surface of the air bearing and the air bearing surface of the fixed rail collide accidentally.
In some embodiments, the material of the restrictor 20 is PEEK engineering plastic. PEEK engineering plastic is a self-lubricating material, has a low friction coefficient, can greatly reduce friction force when collision occurs, and is not easy to damage an air floating surface of a fixed guide rail.
The detection method of the intelligent static pressure air bearing device comprises the following steps:
1) The control air source supply system of the detection circuit board 30 is started, high-pressure air output by the air source supply system enters the air pressure stabilizing system, the air pressure stabilizing system stabilizes the air inlet pressure at a preset value, and compressed air after pressure stabilization enters the air inlet channel 11;
2) The first air pressure sensor 40 detects the air pressure value of the air inlet channel 11 in real time and feeds the air pressure value back to the detection circuit board 30, the detection circuit board 30 compares the acquired air pressure value with a preset pressure value, and if the error exceeds the preset pressure value, the detection circuit board 30 controls the air pressure stabilizing system to further stabilize the air inlet pressure until the air inlet pressure error is smaller than the preset pressure value; if the air inlet pressure error cannot be adjusted to be smaller than a preset pressure value within the set time, an error alarm is sent out;
the temperature sensor 50 detects the real-time temperature of the air bearing body 10 and feeds back the real-time temperature to the detection circuit board 30, and the detection circuit board 30 judges whether the thermal deformation of the bearing body is greatly affected according to the current temperature;
the second air pressure sensor 60 acquires air pressure at a specific position of the air film and feeds the air pressure back to the detection circuit board 30, and the detection circuit board 30 calibrates the thickness of the air film through air pressure information to realize real-time detection of the thickness of the air film.
Although embodiments of the present application have been shown and described above, the scope of the present invention is not limited thereto, and any changes or substitutions that do not undergo the inventive effort are intended to be included within the scope of the present invention; no element, act, or instruction used herein should be construed as critical or essential unless explicitly described as such.
Claims (10)
1. An intelligent hydrostatic air bearing device, comprising:
the air bearing body is provided with an air inlet channel and a first air pressure detection hole;
the throttle is provided with a throttle hole and a second air pressure detection hole, one end of the throttle hole and one end of the second air pressure detection hole are communicated with an air film formed below the throttle, and the other end of the throttle hole and the other end of the second air pressure detection hole are respectively communicated with the air inlet channel and the first air pressure detection hole;
a detection circuit board;
the first air pressure sensor is configured to be electrically connected with the detection circuit board and is used for acquiring air pressure in the air inlet channel;
the temperature sensor is configured to be electrically connected with the detection circuit board and is used for acquiring the temperature of the air bearing body; and
the second air pressure sensor is configured to be electrically connected with the detection circuit board and used for acquiring air pressure of a specific position of the air film;
the detection circuit board is used for judging and feeding back the service condition of the air bearing according to the information acquired by the first air pressure sensor, the second air pressure sensor and the temperature sensor.
2. The intelligent static pressure air bearing device according to claim 1, wherein the restrictor is made of one of boron nitride material and PEEK engineering plastic.
3. The intelligent hydrostatic air bearing device of claim 2, further comprising: a display screen;
the display screen is electrically connected with the detection circuit board and is used for displaying the service condition of the air bearing.
4. The intelligent hydrostatic air bearing device according to claim 3, wherein the first air pressure sensor and the second air pressure sensor are air pressure detection sensors for detecting air pressure;
the temperature sensor is a thermocouple type sensor and is used for detecting the temperature of the air bearing body.
5. An intelligent hydrostatic air bearing device according to claim 3, further comprising:
a housing having a housing cavity for housing the detection circuit board;
the shell is configured to be fixedly connected with the air bearing body, and the detection circuit board is positioned between the shell and the air bearing body;
the upper surface of the shell is provided with a window, and the display screen is arranged on the detection circuit board and protrudes to the window of the shell.
6. The intelligent static pressure air bearing device according to claim 1, wherein a first embedding groove and a second embedding groove are formed in the air bearing body, and the first air pressure sensor and the second air pressure sensor are respectively embedded in the first embedding groove and the second embedding groove;
the air inlet channel is communicated with the first embedded groove.
7. The intelligent static pressure air bearing device according to claim 1, wherein a third embedded groove is formed in the air bearing body, and the temperature sensor is embedded into the third embedded groove.
8. The intelligent hydrostatic air bearing device according to claim 7, wherein at least two of the second air pressure sensors and the first air pressure detection holes are arranged, and the first air pressure detection holes and the second air pressure sensors are distributed in an annular array.
9. The intelligent hydrostatic air bearing device of claim 1, further comprising:
the air source supply system is used for supplying air to the air inlet channel; and
the air pressure stabilizing system is used for stabilizing the supply air pressure of the air source supply system;
the air supply system, the air pressure stabilizing system and the air inlet channel are sequentially connected, and the air supply system and the air pressure stabilizing system are electrically connected with the detection circuit board.
10. A method of detecting an intelligent hydrostatic air bearing device as set forth in claim 9, comprising the steps of:
1) The detection circuit board controls the starting of the air source supply system, high-pressure air output by the air source supply system enters the air pressure stabilizing system, the air pressure stabilizing system stabilizes the air inlet pressure at a preset value, and compressed air after pressure stabilization enters the air inlet channel;
2) The first air pressure sensor detects the air pressure value of the air inlet channel in real time and feeds the air pressure value back to the detection circuit board, the detection circuit board compares the acquired air pressure value with a preset pressure value, and if the error exceeds the preset pressure value, the detection circuit board controls the air pressure stabilizing system to further stabilize the air inlet pressure until the air inlet pressure error is smaller than the preset pressure value; if the air inlet pressure error cannot be adjusted to be smaller than the preset pressure value within the set time, an error alarm is sent to an upper computer or the outside;
the temperature sensor detects the real-time temperature of the air bearing body and feeds the real-time temperature back to the detection circuit board, and the detection circuit board judges whether the thermal deformation of the bearing body is greatly affected according to the current temperature;
the second air pressure sensor acquires air pressure at a specific position of the air film and feeds the air pressure back to the detection circuit board, and the detection circuit board judges the thickness of the air film through air pressure information, so that real-time detection of the thickness of the air film is realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311827091.1A CN117803659B (en) | 2023-12-27 | 2023-12-27 | Intelligent static pressure air bearing device and detection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311827091.1A CN117803659B (en) | 2023-12-27 | 2023-12-27 | Intelligent static pressure air bearing device and detection method |
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| CN117803659A true CN117803659A (en) | 2024-04-02 |
| CN117803659B CN117803659B (en) | 2024-05-31 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030121308A1 (en) * | 2002-01-03 | 2003-07-03 | Kloeppel Klaus D. | Apparatus and method for air-contamination detection in disc drive hydrodynamic bearings |
| CN104295606A (en) * | 2014-09-23 | 2015-01-21 | 哈尔滨工程大学 | Annular belt compound throttling static-pressure air thrust bearing |
| CN204175793U (en) * | 2014-09-23 | 2015-02-25 | 哈尔滨工程大学 | Endless belt composite throttling pressurized air thrust bearing |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN117249166A (en) * | 2023-10-16 | 2023-12-19 | 哈尔滨工业大学 | Air film regulation and control and gas recovery's air bearing structure |
-
2023
- 2023-12-27 CN CN202311827091.1A patent/CN117803659B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030121308A1 (en) * | 2002-01-03 | 2003-07-03 | Kloeppel Klaus D. | Apparatus and method for air-contamination detection in disc drive hydrodynamic bearings |
| CN104295606A (en) * | 2014-09-23 | 2015-01-21 | 哈尔滨工程大学 | Annular belt compound throttling static-pressure air thrust bearing |
| CN204175793U (en) * | 2014-09-23 | 2015-02-25 | 哈尔滨工程大学 | Endless belt composite throttling pressurized air thrust bearing |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN117249166A (en) * | 2023-10-16 | 2023-12-19 | 哈尔滨工业大学 | Air film regulation and control and gas recovery's air bearing structure |
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| Publication number | Publication date |
|---|---|
| CN117803659B (en) | 2024-05-31 |
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