CN117798019A

CN117798019A - Ink-dripping marking device

Info

Publication number: CN117798019A
Application number: CN202410037411.1A
Authority: CN
Inventors: 罗炜桓; 罗建华; 刘佳华; 龙志斌; 李刁龙
Original assignee: Shenzhen Huatuo Semiconductor Technology Co ltd
Current assignee: Shenzhen Huatuo Semiconductor Technology Co ltd
Priority date: 2024-01-10
Filing date: 2024-01-10
Publication date: 2024-04-02

Abstract

The invention belongs to the technical field of semiconductor chip production, and relates to an ink-dripping marking device. The ink-dripping marking device comprises an ink head assembly, wherein the ink head assembly comprises an ink-dripping bracket, a needle head, an ink needle and an ink box, the ink needle and the ink box are respectively arranged on the ink-dripping bracket, the needle head is connected with the ink box, a needle hole is formed in the needle head, and the ink box is used for supplying ink into the needle hole of the needle head; the ink needle is provided with a preparation position and an ink-dripping position; when the ink needle is positioned at the preparation position, the first end of the ink needle extends into the needle hole to be infiltrated with ink; when the ink needle is positioned at the ink-dispensing position, the first end of the ink needle passes through the needle hole and protrudes out of the needle hole to dispense ink. The ink-jet marking device can be used for marking a tiny marking workpiece (such as a chip).

Description

Ink-dripping marking device

Technical Field

The invention belongs to the technical field of semiconductor chip production, and particularly relates to an ink-dripping marking device.

Background

In the production process of the semiconductor chip, the chip with the bad detection needs to be marked so as to facilitate the subsequent process to quickly position the bad chip, reject the corresponding bad products or carry out recheck and confirm the bad products of the high-value chip. The existing marking modes mainly comprise the following steps:

(1) Laser marking, namely heating the surface of a material by high-energy laser to enable the material to be instantaneously melted or gasified to form an etching mark. A great deal of smoke dust is generated in the laser marking process. However, even if the fume cleaning apparatus is used, contamination of products and dust-free environment cannot be avoided.

(2) The principle of the ink-jet mark is similar to that of a printer, and the ink is ejected from micropores by using a piezoelectric ceramic or resistance heating expansion mode, and drops on the marked surface to form ink points. However, the ink dots marked in this way are too large to be used to mark the tiny chips, and the ink falls off to the marked surface at intervals, which risks contaminating the surrounding products.

(3) And (3) marking by dispensing, pushing ink to extrude a drop of ink from the needle tube by using a dispensing valve and a needle valve, and enabling the needle head to approach the chip, so that the ink drop contacts the marked surface to infiltrate into an ink dot. However, the ink dots marked in this manner are large and are not suitable for marking of a microchip. In addition, if the viscosity of the ink is low, the ink can directly flow out from the needle tube opening to form liquid drops, and the liquid drops drop into the equipment to cause pollution; if the viscosity of the ink is high, the ink can block the needle tube after standing for a period of time, and the maintenance cost is high.

Disclosure of Invention

The technical problems to be solved by the invention are as follows: aiming at the technical problem that the existing marking mode is not suitable for marking of a microchip, the ink-dripping marking device is provided.

In order to solve the technical problems, in one aspect, an embodiment of the present invention provides an ink-dispensing marking device, including an ink-dispensing head assembly, where the ink-dispensing head assembly includes an ink-dispensing bracket, a needle, an ink needle and an ink cartridge, the ink needle and the ink cartridge are respectively mounted on the ink-dispensing bracket, the needle is connected with the ink cartridge, a needle hole is provided on the needle, and the ink cartridge is used for supplying ink into the needle hole of the needle; the ink needle is provided with a preparation position and an ink-dripping position;

when the ink needle is positioned at the preparation position, the first end of the ink needle extends into the needle hole to be infiltrated with ink;

when the ink needle is positioned at the ink-dispensing position, the first end of the ink needle passes through the needle hole and protrudes out of the needle hole to dispense ink.

According to the ink-dripping marking device provided by the embodiment of the invention, ink is supplied into the needle hole of the needle head through the ink box, when ink dripping is prepared, the first end of the ink needle extends into the needle hole to be immersed in the ink, and when the ink dripping is needed, the first end of the ink needle penetrates through the needle hole and extends out of the needle hole, so that the ink dripping work is completed. The ink spot marking device adopts a marking mode that the end part of the ink needle contacts ink spots, can realize the marking of a tiny marking workpiece (such as a chip), is easy to operate and has stable marked ink spot size. In addition, because the relative motion exists between the needle hole of the needle head and the ink needle, the needle hole can be continuously and reciprocally dredged in the ink-dripping process, the condition of needle head blockage can be avoided, and the maintenance is easy.

Optionally, a slit is formed between the first end of the ink needle and the wall of the pinhole, and the ink cannot drip from the slit.

Optionally, the pinhole includes a reservoir Mo Kongduan, an ink guiding Kong Duanyi and an ink outlet section, the ink guiding section is communicated between the Chu Mokong section and the ink outlet section, the aperture of the reservoir Mo Kongduan is larger than the aperture of the ink outlet section, and the aperture of the ink guiding section gradually decreases from the side close to the aperture of the reservoir Mo Kongduan to the side close to the ink outlet section;

the reservoir Mo Kongduan being in communication with the ink cartridge;

when the ink needle is positioned at the preparation position, the first end of the ink needle penetrates through the storage Mo Kongduan and the ink guide hole section and stretches into the ink outlet hole section;

the slit is formed between the first end of the ink needle and the hole wall of the ink outlet hole section.

Optionally, an ink cavity and an ink outlet communicated with the ink cavity are arranged on the ink box, the needle head is installed at the ink outlet of the ink box, and the needle hole of the needle head is communicated with the ink outlet.

Optionally, the needle portion is inserted into the ink outlet.

Optionally, the ink needle is disposed through the ink chamber and the ink outlet.

Optionally, the ink head assembly further comprises an actuator, the actuator is mounted on the ink dispensing support, the second end of the ink needle is connected with the actuator, and the actuator is used for driving the ink needle to reciprocate between the preparation position and the ink dispensing position.

Optionally, the needle is detachably connected to the ink cartridge, and the second end of the ink needle is detachably connected to the actuator.

Optionally, the ink dot marking device further comprises a height adjustment assembly, the ink head assembly being mounted on the height adjustment assembly, the height adjustment assembly being for adjusting the height of the ink head assembly.

Optionally, the ink-dispensing marking device further comprises an avoidance assembly, the ink head assembly is mounted on the avoidance assembly, and the avoidance assembly is used for driving the ink head assembly to reciprocate between an ink-dispensing position and an avoidance position;

at the inking position, the ink head assembly can be inked;

in the clear position, the ink head assembly is remote from the marking workpiece.

Drawings

FIG. 1 is a schematic view of an ink-dispensing marking device according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of the ink head assembly of FIG. 1 with the ink needle in a ready position;

FIG. 3 is a cross-sectional view of the ink head assembly of FIG. 1 with the ink needle in the ink-firing position.

Reference numerals in the specification are as follows:

10. an ink head assembly;

1. an inking bracket; 2. a needle; 21. a pinhole; 211. a store Mo Kongduan; 212. an ink guiding hole section; 213. an ink outlet section; 3. an ink needle; 4. an ink cartridge; 41. an ink chamber; 42. an ink outlet; 5. an actuator;

20. a height adjustment assembly;

30. avoidance of the assembly.

Detailed Description

In order to make the technical problems, technical schemes and beneficial effects solved by the invention more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.

As shown in fig. 1 to 3, the ink-dispensing marking device provided by the embodiment of the invention comprises an ink-dispensing head assembly 10, wherein the ink-dispensing head assembly 10 comprises an ink-dispensing bracket 1, a needle head 2, an ink needle 3 and an ink box 4, the ink needle 3 and the ink box 4 are respectively arranged on the ink-dispensing bracket 1, the needle head 2 is connected with the ink box 4, a needle hole 21 is arranged on the needle head 2, and the ink box 4 is used for supplying ink into the needle hole 21 of the needle head 2. The ink needle 3 is provided with a preparation position and an ink-dispensing position.

When the ink needle 3 is in the ready position (as shown in fig. 2), the first end of the ink needle 3 extends into the needle hole 21 for ink infiltration.

When the ink needle 3 is positioned at the ink-dispensing position (as shown in fig. 3), the first end of the ink needle 3 passes through the needle hole 21 and protrudes outside the needle hole 21 to dispense ink.

According to the ink-dripping marking device provided by the embodiment of the invention, ink is supplied into the needle hole 21 of the needle head 2 through the ink box 4, when ink dripping is prepared, the first end of the ink needle 3 stretches into the needle hole 21 to be immersed in the ink, and when ink dripping is needed, the first end of the ink needle 3 passes through the needle hole 21 and stretches out of the needle hole 21, so that ink dripping is finished. The ink spot marking device adopts a marking mode that the end part of the ink needle 3 contacts with ink spots, can realize the marking of a tiny marking workpiece (such as a chip), is easy to operate and has stable marked ink spot size. In addition, due to the relative movement between the ink needle 3 and the needle hole 21 of the needle head 2, the needle hole 21 can be continuously and reciprocally dredged in the ink-dripping process, the condition that the needle head 2 is blocked can be avoided, and the maintenance is easy.

In one embodiment, as shown in fig. 2 and 3, a slit is formed between the first end of the ink needle 3 and the wall of the pinhole 21, and the ink cannot drop from the slit.

The first end of the ink needle 3 and the ink needle 3 are provided with a slit, the gap is small, the ink needle 3 can pass through the slit, and the ink can enter the slit to infiltrate the ink needle 3 through the capillary effect. At the same time of infiltration, ink cannot leak out from the slit due to the surface tension of the liquid, so that no pollution is caused by excessive ink dripping. The width of the slit may be set according to the material of the ink needle 3 and the type of ink, so long as the width is ensured not to drop the ink from the slit.

In one embodiment, the ink needle 3 may be made of a material such as stainless steel, molybdenum wire, or the like, which is difficult to penetrate ink therein. Because the ink needle 3 is difficult to penetrate into ink, at this time, when the ink needle 3 is immersed, the ink stays on the surface of the ink needle 3, and in the subsequent ink-dripping process, the ink needle 3 only can drip ink on the surface of the ink needle onto a marked workpiece, so that the ink-dripping amount is reduced, and the size of the ink dots is further reduced, so that the ink-dripping marking device can realize marking of a tiny marked workpiece (such as a chip) and simultaneously ensure the stability of the size of the ink dots. Preferably, the surface of the first end of the ink needle 3 may be a smooth surface, and compared with a rough surface, the smooth surface may further reduce the ink carried on the surface when the ink needle 3 is used for inking, so as to ensure the stability of the ink dot size, and at the same time, the marked surface of the marked workpiece is not damaged.

In the embodiment shown in fig. 2 and 3, the ink needle 3 is made of stainless steel, the ink is UV ink, and the slit width is 0.05mm.

In an embodiment, as shown in fig. 2 and 3, the pinhole 21 includes a reservoir Mo Kongduan, an ink guiding hole segment 212 and an ink outlet hole segment 213, the ink guiding hole segment 212 is communicated between the Chu Mokong segment 211 and the ink outlet hole segment 213, the aperture of the reservoir Mo Kongduan is larger than the aperture of the ink outlet hole segment 213, and the aperture of the ink guiding hole segment 212 is gradually reduced from the side close to the aperture of the reservoir Mo Kongduan to the side close to the ink outlet hole segment 213. The reservoir Mo Kongduan 211 communicates with the ink cartridge 4.

When the ink needle 3 is in the ready position, the first end of the ink needle 3 extends into the ink outlet hole segment 213 through the reservoir Mo Kongduan and the ink guiding hole segment 212.

The slit is formed between the first end of the ink needle 3 and the wall of the ink outlet hole 213.

By designing the shape of the pinhole 21, the ink in the pinhole 21 can flow, so that the ink can flow from the reservoir Mo Kongduan 211 to the ink outlet section 213, and the ink needle 3 can infiltrate into the pinhole 21.

In an embodiment, as shown in fig. 2 and 3, the ink cartridge 4 is provided with an ink chamber 41 and an ink outlet 42 communicating with the ink chamber 41, the needle 2 is mounted at the ink outlet 42 of the ink cartridge 4, and the needle hole 21 of the needle 2 communicates with the ink outlet 42, so as to supply ink to the needle 2 from the ink cartridge 4.

Preferably, the ink chamber 41 of the ink cartridge 4 is designed with a small diameter and a deep hole, so as to ensure that the ink stored in the ink cartridge 4 does not flow out to cause pollution during high-speed operation and high acceleration and deceleration of the ink head assembly 10.

In one embodiment, as shown in fig. 2 and 3, the needle 2 is partially inserted into the ink outlet 42, so as to implement the installation of the needle 2.

In an embodiment, as shown in fig. 2 and 3, when the needle 2 is partially inserted into the ink outlet 42, the ink needle 3 may pass through the ink chamber 41 and the ink outlet 42 to ensure infiltration.

In an embodiment, the ink cartridge 4 is further provided with an ink injection port communicated with the ink cavity 41, and when ink needs to be added into the ink cavity 41, ink can be optionally added into the ink cavity 41 or replenished through the ink injection port by using a syringe or the like, so that the operation is simple.

In one embodiment, as shown in fig. 1, the ink head assembly 10 further includes an actuator 5, the actuator 5 is mounted on the ink dispensing stand 1, the second end of the ink needle 3 is connected to the actuator 5, and the actuator 5 is used for driving the ink needle 3 to reciprocate between the preparation position and the ink dispensing position.

When the ink needle 3 is required to move from the ink dispensing position to the preparation position (for example, when the ink dispensing is completed), the actuator 5 drives the ink needle 3 to ascend, so that the first end of the ink needle 3 is immersed in the ink.

When the ink needle 3 is required to move from the preparation position to the ink-dispensing position, the actuator 5 drives the ink needle 3 to descend, the first end of the ink needle 3 extends out of the needle head 2 to contact with the marked surface of the marked workpiece, and the ink needle 3 forms ink dots from the surface-infiltrated ink dots to the marked surface.

Preferably, the ink cartridge 4 and the ink outlet section 213 are coaxially disposed with the actuator 5 to ensure the movement direction of the ink needle 3 so that the ink needle 3 can smoothly move relative to the needle head 2.

In an embodiment, the actuator 5 may be an electromagnet, a cylinder, a coil, a linear motor, a voice coil motor, or the like, to implement a driving function thereof.

In an embodiment, the needle head 2 is detachably connected with the ink box 4, and the second end of the ink needle 3 is detachably connected with the actuator 5, so that the needle head 2 and the ink needle 3 can be replaced according to the requirement, and the universality of the ink-spot marking device is improved.

In a specific embodiment, the second end of the ink needle 3 may be mounted at the movable end of the actuator 5 through a rubber sleeve, so as to more conveniently replace the ink needle 3, thereby realizing a tool-free quick-change operation.

The needle head 2 can be replaced with different aperture specifications to match the ink needle 3 with corresponding thickness, so as to realize marks with different ink dot sizes.

In an embodiment, as shown in fig. 1, the ink dispensing marking device further includes a height adjustment assembly 20, the ink head assembly 10 is mounted on the height adjustment assembly 20, the height adjustment assembly 20 is used for adjusting the height of the ink head assembly 10, so as to control the ink head assembly 10 to be lifted to different heights, thereby matching marked surfaces of marked workpieces with different heights, completing ink dispensing actions, and enabling the ink dispensing marking device to be compatible with thickness changes of different marked workpieces, and having high universality. Preferably, the height adjustment assembly 20 is used to fine tune the height of the ink head assembly 10.

In an embodiment, the height adjusting assembly 20 may be a screw motor module, a belt motor module, a linear motor module, a voice coil motor module, or the like, so as to implement an adjusting function thereof.

In one embodiment, as shown in FIG. 1, the ink drop marking device further includes a bypass assembly 30, and the height adjustment assembly 20 is mounted on the bypass assembly 30 to indirectly mount the ink head assembly 10 on the bypass assembly 30.

The avoidance assembly 30 is configured to drive the height adjustment assembly 20 to move so that the ink head assembly 10 reciprocates between an ink-dispensing position and an avoidance position. In the inking position, the ink head assembly 10 can be inked. In the space-free position, the ink head assembly 10 is far away from the marking workpiece (such as a chip), so that collision with other moving structures or products is avoided, the whole structure of the ink-jet marking device is more compact, the occupation of the internal space of the equipment machine is reduced, the ink-jet marking device is conveniently mounted at different positions of the equipment, and the ink-jet marking device is suitable for the scheme construction of integrated equipment.

In one embodiment, the avoidance assembly 30 may be a cylinder assembly, an electromagnet assembly, or the like, to perform its driving function.

The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims

1. The ink-dripping marking device is characterized by comprising an ink head assembly, wherein the ink head assembly comprises an ink-dripping bracket, a needle head, an ink needle and an ink box, the ink needle and the ink box are respectively arranged on the ink-dripping bracket, the needle head is connected with the ink box, a needle hole is formed in the needle head, and the ink box is used for supplying ink into the needle hole of the needle head; the ink needle is provided with a preparation position and an ink-dripping position;

2. The inking marking device as defined in claim 1, wherein a slit is formed between the first end of the ink needle and the wall of the pinhole, the ink being unable to drip from the slit.

3. The inking marking device as defined in claim 2, wherein the pinhole comprises a reservoir Mo Kongduan, an ink guide Kong Duanyi and an ink outlet orifice section, the ink guide orifice section being in communication between the Chu Mokong section and the ink outlet orifice section, the reservoir Mo Kongduan having a larger pore diameter than the ink outlet orifice section, the ink guide orifice section having a pore diameter that decreases gradually from a side of the pore diameter near the reservoir Mo Kongduan to a side near the ink outlet orifice section;

the reservoir Mo Kongduan being in communication with the ink cartridge;

4. The spot ink marking apparatus as claimed in claim 1, wherein an ink chamber and an ink outlet communicating with the ink chamber are provided on the ink cartridge, the needle is installed at the ink outlet of the ink cartridge, and a pinhole of the needle communicates with the ink outlet.

5. The inking marking device according to claim 4, wherein the needle portion is inserted into the ink outlet.

6. The spot ink marking apparatus according to claim 4 wherein the ink needle is disposed through the ink chamber and the ink outlet.

7. The inking marker device of claim 1, wherein the ink head assembly further comprises an actuator mounted on the inking carriage, the second end of the ink needle being connected to the actuator, the actuator for driving the ink needle to reciprocate between the ready position and the inking position.

8. The ink marking device of claim 7, wherein the needle is removably connected to the ink cartridge and the second end of the ink needle is removably connected to the actuator.

9. The ink marking device of claim 1, further comprising a height adjustment assembly, the ink head assembly being mounted on the height adjustment assembly, the height adjustment assembly for adjusting the height of the ink head assembly.

10. The inking marking apparatus according to claim 1, further comprising an avoidance assembly on which the ink head assembly is mounted, the avoidance assembly for driving the ink head assembly to reciprocate between an inking position and an avoidance position;

at the inking position, the ink head assembly can be inked;