CN1177949C - Zone-selecting polymer film-coating method - Google Patents
Zone-selecting polymer film-coating method Download PDFInfo
- Publication number
- CN1177949C CN1177949C CNB991048210A CN99104821A CN1177949C CN 1177949 C CN1177949 C CN 1177949C CN B991048210 A CNB991048210 A CN B991048210A CN 99104821 A CN99104821 A CN 99104821A CN 1177949 C CN1177949 C CN 1177949C
- Authority
- CN
- China
- Prior art keywords
- macromolecule membrane
- coating method
- film
- constituency
- basic unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Chemically Coating (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The present invention makes a developed plastic flake with desired patterns and a standard size directly and accurately arranged in the correct position in a selected region on a macromolecular film, the developed plastic flake is made tightly attached to the macromolecular film, and then the developed plastic flake and the macromolecular film are put in a machine for coating, and in this way, the macromolecular film can be easily coated with a film of a required pattern in the selected region, and chemical agents are not used in the whole process; therefore, the macromolecular film can be entirely reserved.
Description
Technical field
The present invention relates to a kind of manufacture method of film laminate structure, be meant the photographic developer that can avoid in the gold-tinted processing procedure and the pharmaceutical chemicals in the etch process plate metal or other material to the hurtful a kind of specific region on macromolecule membrane of macromolecule membrane manufacture method especially in the manufacture of semiconductor technology.
Background technology
Press known technology, on a base material, film formed specific figure and its size of standard accurately, can utilize the coating of photograph slabstone mask, ultraviolet ray is tanned by the sun and etching technique is finished.
Known technology is in the pattern of decision film and the mode of size, system comprises that elder generation is placed in material on the substrate, allow photoresistance pass through the processing procedure of gold-tinted again, needed specific region and size are determined out, and allow photoresistance cover on it, in follow-up etch process, the zone of not wanting will be corroded.Through after each above-mentioned program, after photoresistance is removed, can obtain desired pattern and size thereof.
In above-mentioned manufacturing course, when base material changes macromolecule membrane such as dry film photoresistance into, wherein the photographic developer that uses in the gold-tinted processing procedure can cause corrosion phenomenon to the base material of dry film photoresistance, and the chemical reagent in the etch process also can cause corrosion phenomenon to the base material of dry film photoresistance equally, therefore, in the processing procedure of known technology, when using macromolecule membrane, will unavoidably understand sustain damage as base material.
Summary of the invention
Main purpose of the present invention is to overcome the deficiencies in the prior art, provides a kind of photographic developer in the gold-tinted processing procedure and pharmaceutical chemicals in the etch process avoided to the hurtful film coating method of macromolecule membrane.
Another object of the present invention system provide a kind of on the macromolecule membrane surface the accurate manufacturing method thereof of constituency plated film.
The objective of the invention is to be achieved through the following technical solutions:
Constituency, a kind of macromolecule membrane surface film coating method is characterized in, comprises following steps:
Choose a thin slice, offer the hole of predetermined pattern on it, described thin slice is sheet or vacuum adhesive tape or replaces in the shade mode;
The selection area of a macromolecule membrane basic unit is aimed in the hole of described thin slice, and described thin slice is fitted tightly on the surface of described macromolecule membrane basic unit;
Plated film one predetermined material layer is to this macromolecule membrane basic unit; And
Remove described thin slice from this macromolecule membrane basic unit, by this, the predetermined material layer of the above predetermined pattern of plated film on the selection area of macromolecule membrane basic unit.
Above-mentioned constituency, macromolecule membrane surface film coating method, wherein, the hole of described tool predetermined pattern is to utilize light shield, gold-tinted processing procedure mode to leave required pattern and size.
Above-mentioned constituency, macromolecule membrane surface film coating method, wherein, described predetermined material layer can be a metal level or stupalith.
Constituency, above-mentioned macromolecule membrane surface film coating method, wherein, thin slice can be sheet or vacuum adhesive tape or replaces in the shade mode.
In view of known technology on film during the plated film of constituency, gold-tinted processing procedure in its manufacturing method thereof and etch process will inevitably be to the hurtful shortcomings of this film, the present invention gets rid of constituency and the size of using the photoresistance incoming call to define plated film, and change by utilizing a plastic slice that sets out required pattern and size standard in advance, directly contraposition critically and place the macromolecule membrane surface, and it is fitted tightly on this film, again both are sent into plated film in the machine in the lump, so, macromolecule membrane needs on the specific constituency of plated film because do not hidden by described plastic slice, therefore can be in order to successfully plating desired thin film layer.Because film coating method of the present invention does not use any chemical agent, so can intactly keep the macromolecule membrane layer.
Below by drawings and Examples constituency, macromolecule membrane of the present invention surface film coating method is described in detail, with its advantage of further understanding and feature:
Description of drawings
Figure 1A and 1B are the synoptic diagram of the constituency film coating method of known technology.
Fig. 2 A and 2B are the synoptic diagram of Zone-selecting polymer film-coating method of the present invention.
The schema of Fig. 3 Zone-selecting polymer film-coating method of the present invention.
Embodiment
, be the method that shows known technology constituency plated film on base material at first with reference to Figure 1A and 1B.Pressing the method for known technology constituency plated film on a base material, is to comprise: (1) plates required metal level 2 or other material layer on base material 1; (2) utilize the gold-tinted processing procedure, make the photoresistance 3 can be canonical sized accurately, and need the zone of plated film in the surface coverage residence of metal level 2, to define its pattern, shown in Figure 1A; (3) utilize etch process, the zonal corrosion of photoresistance 3 on the metal level 2 beyond covering fallen, then will form the size that defines as photoresistance and the metal level 2 of pattern on the base material 1, shown in Figure 1B.Through after above-mentioned each program, remove the metal level 2 that photoresistance 3 just can obtain given pattern.
When base material 1 was a macromolecule membrane, then said procedure 2 will dissolve, corrode macromolecule membrane with the process of program 3, and therefore, known processing procedure mode also can't be finished the requirement of constituency plated film on the macromolecule membrane surface.
Please then refer to Fig. 2 A and 2B, is the synoptic diagram that shows Zone-selecting polymer film-coating method of the present invention, and cooperates the schema of the constituency film coating method of consulting Fig. 3.Can successfully finish with the macromolecule membrane according to manufacturing method thereof of the present invention is basic unit, and the requirement of constituency plated film in its surface, and main system comprises follow procedure:
(1) choose a sheet, and the perforation of offering predetermined pattern:
At first choose a plastic slice 20, and on this plastic slice 20, offer the hole 21 of required pattern and its size of standard exactly, described pattern is the figure of desiring plated film on macromolecule membrane 10, and the practice of plastic slice 20 can make or utilize light shield, gold-tinted processing procedure mode to leave required pattern and size by traditional processing mode, is beneficial to covering of plated film;
(2) aligning is bored a hole to the selection area of thin film layer, and sheet is fitted tightly on the surface:
With described plastic slice 20 critically on macromolecule membrane 10 surfaces contraposition and plastic slice 20 is fitted tightly on this macromolecule membrane 10 surfaces to selection area;
(3) plated film predetermined material layer is to described thin film layer:
The polymer thin layer 10 of applying plastic slice 20 is sent into coating equipment in the lump or electroplate in the board and carry out plated film metal level 2 or other material layer, because hole 21 contraposition accurately of plastic slice 20 selection area to the macromolecule membrane 10, so macromolecule membrane 10 surfaces need the top, zone of plated film not hidden by plastic slice 20, therefore, metal level 2 or other material layer successfully plated film to the designated area.
(4) remove sheet from thin film layer:
Through after above-mentioned each program, when plastic slice 20 after removing on macromolecule membrane 10 surfaces, can plate metal level 2 or other material layer of required pattern at the selection area on this macromolecule membrane 10, shown in Fig. 2 B.
In manufacturing method thereof of the present invention, do not use any chemical agent, therefore, can be in whole processing procedure process complete reservation macromolecule membrane layer 10.
The present invention is not limited to the embodiment of the foregoing description, and for example, sheet can replace its function by vacuum adhesive tape, shade mode.
In sum, constituency, the macromolecule membrane surface film coating method of being implemented according to the present invention, to effectively overcome in the manufacturing method thereof of known technology, the chemical agent that photographic developer that the gold-tinted processing procedure uses and etch process use is to the shortcoming that infringement caused and the drawback of macromolecule membrane, the present invention is not owing to use any chemical agent, thereby can be in manufacturing processed complete reservation macromolecule membrane and plated film metal level or other material layer on selection area accurately smoothly, obtain gratifying plated film quality.
Claims (3)
1. constituency, macromolecule membrane surface film coating method is characterized in that, comprises following steps:
Choose a thin slice, offer the hole of predetermined pattern on it, described thin slice is sheet or vacuum adhesive tape or replaces in the shade mode;
The selection area of a macromolecule membrane basic unit is aimed in the hole of described thin slice, and this thin slice is fitted tightly on the surface of this macromolecule membrane basic unit;
In the extremely described macromolecule membrane of the plated film one predetermined material layer basic unit; And
Remove described thin slice from this macromolecule membrane basic unit, by this, the predetermined material layer of the above predetermined pattern of plated film on the selection area of described macromolecule membrane basic unit.
2. constituency, macromolecule membrane as claimed in claim 1 surface film coating method is characterized in that the hole of described tool predetermined pattern is to utilize light shield, gold-tinted processing procedure mode to leave required pattern and size.
3. constituency, macromolecule membrane as claimed in claim 1 surface film coating method is characterized in that described predetermined material layer can be a metal level or stupalith.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB991048210A CN1177949C (en) | 1999-04-01 | 1999-04-01 | Zone-selecting polymer film-coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB991048210A CN1177949C (en) | 1999-04-01 | 1999-04-01 | Zone-selecting polymer film-coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1269427A CN1269427A (en) | 2000-10-11 |
| CN1177949C true CN1177949C (en) | 2004-12-01 |
Family
ID=5271837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB991048210A Expired - Fee Related CN1177949C (en) | 1999-04-01 | 1999-04-01 | Zone-selecting polymer film-coating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1177949C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175894A (en) * | 2010-12-24 | 2011-09-07 | 北京大学 | Method for preparing miniature thermocouple probe of scanning thermal microscopy |
-
1999
- 1999-04-01 CN CNB991048210A patent/CN1177949C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1269427A (en) | 2000-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR0169959B1 (en) | Patterning process and microparticles of substantially the same geometry and shape | |
| US4983252A (en) | Process for producing printed circuit board | |
| US4533624A (en) | Method of forming a low temperature multilayer photoresist lift-off pattern | |
| US4069076A (en) | Liquid lamination process | |
| DE60010531T2 (en) | STRUCTURING OF ELECTRODES IN OLED COMPONENTS | |
| US4751172A (en) | Process for forming metal images | |
| CN108541142A (en) | A kind of PCB inner line figures shifting process | |
| US4288282A (en) | Method for producing a metallic pattern upon a substrate | |
| CN1305120C (en) | Metal pattern formation | |
| CN1888978B (en) | Photoetching patterning method with micro-transfer patterned graph as mask plate | |
| CN1177949C (en) | Zone-selecting polymer film-coating method | |
| CN1147621C (en) | Figure forming method | |
| DE10260235B4 (en) | Method for patterning a resist layer and negative resist layer | |
| EP0905564B1 (en) | Dry film photoresist construction suitable for rolling up on itself | |
| US20020122649A1 (en) | Light waveguide forming method, electrolyte solution, light waveguide forming apparatus and light waveguide | |
| CN1048354C (en) | T shape grid making method for semiconductor device | |
| KR101299556B1 (en) | Method for making screen printing metal palte | |
| CN1254648A (en) | Technology for manufacturing jet piece | |
| JPH1138605A (en) | Production of relief pattern | |
| JP4479296B2 (en) | Manufacturing method of metal etching products | |
| CN1672472A (en) | Process for creating holes in polymeric substrates | |
| JPH0758435A (en) | Method for applying liquid photoresist to flat substrate surface | |
| US5578186A (en) | Method for forming an acrylic resist on a substrate and a fabrication process of an electronic apparatus | |
| CN1696786A (en) | Method for preparing insertion mould of plate for guiding light | |
| CN1580952A (en) | Light guide board module core manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |