CN117769102A - Online real-time self-judging three-probe measuring system and method - Google Patents
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Abstract
The invention discloses an online real-time self-judging three-probe measuring system and method, which relate to the technical field of plasma diagnosis, wherein after the first scanning probe, the second scanning probe and a suspension probe are deployed, scanning is controlled through a control device and a scanning power supply; in the scanning process, acquiring voltage parameters through a first voltage measuring instrument, a second voltage measuring instrument and a third voltage measuring instrument, and acquiring current parameters through a current measuring instrument; according to the voltage parameter and the current parameter, a measurement result is obtained, and a validity verification result of the measurement result is obtained, so that the measurement result can be detected and judged on line in real time, and the problems that whether the three-probe measurement condition is met and whether the measured plasma parameter is correct and valid cannot be monitored in real time in the prior art are solved.
Description
Technical Field
The invention relates to the technical field of plasma diagnosis, in particular to an online real-time self-judging three-probe measuring system and method.
Background
Since 20 th century 20 s Langmuir measured plasma parameters using electrostatic probes, probe diagnostics has accumulated a wealth of results in theory and experimentation, and probe measurement methods have been varied, such as classical scanning single and double probes, and direct current biased probes, suspended probes, triple probes, and the like.
The electrostatic probe can be used for measuring parameters such as electron temperature, density, ion saturation flow, suspension potential, plasma space potential and the like of the plasma. The scanning single probe is to apply scanning voltage to the probe so as to change the plasma current flowing through the probe, record the voltage applied to the probe and the current flowing through the probe at the same time, obtain a voltage-current curve, and calculate parameters such as electron temperature, saturated ion flow, suspension point position, space potential and the like of the plasma by carrying out data analysis on the curve. The scanning double-probe is characterized in that a power supply grounding end is changed into be connected with another probe on the basis of scanning a single probe, the shape and the size of the two probes are generally the same as those of the single probe, scanning voltage is applied to the double probes, voltage change between the two probes and current flowing through the probes are recorded, a voltage-current curve is obtained, and electron temperature and ion saturation current can be obtained through analysis. The three probes are improved according to a single probe and a double probe, and voltage which is higher than 3 times of electron temperature is applied to the two probes, wherein one probe is in an ion current saturation state, the other probe is used for measuring a suspension potential, and the electron temperature and the ion saturation current parameters can be obtained quickly through calculation. Typically, the time resolution of the measured plasma parameters is low because the probe sweep power frequency is low and the frequency of the sweep single and double probes is not too high due to the line impedance. The output of the three-probe power supply is DC bias, the limitation of scanning frequency is avoided, and a measuring result with high time resolution can be obtained.
In practical measurement applications, it is generally assumed that the applied voltage is greater than 3 times the electron temperature and that the three probes are in a uniform plasma, ignoring the problem of plasma non-uniformity.
Disclosure of Invention
The invention aims to provide an online real-time self-judging three-probe measuring system and method, which solve the problems in the prior art.
The invention is realized by the following technical scheme:
in one aspect, the invention provides an online real-time self-judging three-probe measuring system, which comprises a first scanning probe, a second scanning probe, a suspension probe, a current measuring instrument, a first voltage measuring instrument, a second voltage measuring instrument, a third voltage measuring instrument, a scanning power supply and control equipment;
the first scanning probe and the second scanning probe are respectively connected with the positive output end and the negative output end of the scanning power supply to form a scanning probe loop; the suspension probe is used for measuring a suspension potential; the current measuring instrument is arranged on the scanning probe loop and is used for measuring the current on the scanning probe loop; the first voltage measuring instrument is used for measuring the voltage between the first scanning probe and the second scanning probe, and the second voltage measuring instrument is used for measuring the voltage to ground of the first scanning probe; the third voltage measuring instrument is used for measuring the voltage to ground of the suspension probe; the current measuring instrument, the first voltage measuring instrument, the second voltage measuring instrument, the third voltage measuring instrument and the scanning power supply are electrically connected with the control equipment.
On the other hand, the invention provides an online real-time self-judging three-probe measuring method, which comprises the following steps:
after the first scanning probe, the second scanning probe and the suspension probe are deployed, scanning is controlled by a control device and a scanning power supply;
in the scanning process, acquiring voltage parameters through a first voltage measuring instrument, a second voltage measuring instrument and a third voltage measuring instrument, and acquiring current parameters through a current measuring instrument;
according to the voltage parameter and the current parameter, obtaining a measurement result and obtaining a validity verification result of the measurement result; the validity verification result comprises validity or invalidity;
when the validity verification result is valid, reserving a measurement result and continuing to measure; and when the validity verification result is invalid, the scanning state is adjusted through the control equipment and the scanning power supply so as to change the validity verification result into valid.
In one possible embodiment, controlling the scanning by the control device and the scanning power supply includes:
reading a preset power supply output scanning waveform through control equipment;
and outputting a scanning waveform according to the preset power supply, and controlling the scanning power supply to work so as to realize scanning.
In one possible embodiment, the obtaining of the voltage parameter by the first voltage meter, the second voltage meter and the third voltage meter comprises:
measuring a loop voltage V1 of a scanning probe loop by a first voltage measuring instrument;
measuring the voltage V2 to ground of the first scanning probe through a second voltage measuring instrument;
measuring the voltage V3 to ground of the suspension probe by a third voltage measuring instrument;
and obtaining voltage parameters according to the loop voltage V1, the ground voltage V2 and the ground voltage V3.
In one possible embodiment, the current parameter is obtained by a current meter, comprising: the loop current A1 of the scanning probe loop is measured by a current meter.
In one possible embodiment, obtaining a measurement result according to the voltage parameter and the current parameter includes:
according to the ground voltage V2 and the loop current A1 of the first scanning probe, a first volt-ampere characteristic curve corresponding to the first scanning probe is obtained;
acquiring a second voltammetric characteristic curve corresponding to the second scanning probe according to the loop voltage V1 of the scanning probe loop, the ground voltage V2 of the first scanning probe and the loop current A1;
and obtaining a measurement result based on the first volt-ampere characteristic curve, the second volt-ampere characteristic curve and the ground voltage V3.
In one possible implementation manner, obtaining the validity verification result of the measurement result includes:
and judging whether the first volt-ampere characteristic curve is consistent with the second volt-ampere characteristic curve, if so, judging that the measurement result is effective, and obtaining an effectiveness verification result of the measurement result, otherwise, further judging according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve, and obtaining the effectiveness verification result of the measurement result.
In one possible implementation manner, further judgment is performed according to the first voltammetric characteristic curve and the second voltammetric characteristic curve, and a validity verification result of the measurement result is obtained, including:
fitting according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve to obtain the plasma electron temperature;
judging whether the bias voltage is less than three times of the electron temperature of the plasma, if so, judging that the measurement result is invalid to obtain a validity verification result of the measurement result, otherwise, judging that the measurement result is valid to obtain the validity verification result of the measurement result;
wherein the bias voltage is used for representing the output voltage of the scanning power supply.
In one possible embodiment, the fitting to obtain the plasma electron temperature from the first voltammetric characteristic curve and the second voltammetric characteristic curve comprises: and respectively obtaining plasma electron temperatures corresponding to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve by using an exponential fitting method.
In one possible embodiment, adjusting the scan state by the control device and the scan power supply includes: the output voltage of the scanning power supply is controlled to be more than or equal to three times of the plasma electron temperature through the control device.
According to the online real-time self-judging three-probe measuring system and method provided by the invention, after the first scanning probe, the second scanning probe and the suspension probe are deployed, scanning is controlled through the control equipment and the scanning power supply; in the scanning process, acquiring voltage parameters through a first voltage measuring instrument, a second voltage measuring instrument and a third voltage measuring instrument, and acquiring current parameters through a current measuring instrument; according to the voltage parameter and the current parameter, a measurement result is obtained, and a validity verification result of the measurement result is obtained, so that the measurement result can be detected and judged on line in real time, and the problems that whether the three-probe measurement condition is met and whether the measured plasma parameter is correct and valid cannot be monitored in real time in the prior art are solved.
Drawings
In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the drawings that are needed in the examples will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and that other related drawings may be obtained from these drawings without inventive effort for a person skilled in the art. In the drawings:
fig. 1 is a schematic structural diagram of an online real-time self-judging three-probe measurement system according to an embodiment of the present invention.
Fig. 2 is a flowchart of an online real-time self-judging three-probe measurement method according to an embodiment of the present invention.
Fig. 3 is a special scan waveform diagram of a scan power output according to an embodiment of the present invention.
In the drawings, the reference numerals and corresponding part names:
1-first scanning probe, 2-second scanning probe, 3-suspension probe, 4-current measuring instrument, 5-first voltage measuring instrument, 6-second voltage measuring instrument, 7-third voltage measuring instrument, 8-scanning power supply and 9-control equipment.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention.
Example 1
As shown in fig. 1, an embodiment of the present invention provides an online real-time self-determination three-probe measurement system, which includes a first scanning probe 1, a second scanning probe 2, a suspension probe 3, a current measuring instrument 4, a first voltage measuring instrument 5, a second voltage measuring instrument 6, a third voltage measuring instrument 7, a scanning power supply 8 and a control device 9;
the first scanning probe 1 and the second scanning probe 2 are respectively connected with positive and negative output ends of a scanning power supply 8 to form a scanning probe loop; the suspension probe 3 is used for measuring a suspension potential; the current measuring instrument 4 is arranged on the scanning probe loop and is used for measuring the current on the scanning probe loop; the first voltage measuring instrument 5 is used for measuring the voltage between the first scanning probe 1 and the second scanning probe 2, and the second voltage measuring instrument 6 is used for measuring the voltage to ground of the first scanning probe 1; the third voltage measuring instrument 7 is used for measuring the voltage to ground of the suspension probe 3; the current measuring instrument 4, the first voltage measuring instrument 5, the second voltage measuring instrument 6, the third voltage measuring instrument 7 and the scanning power supply 8 are all electrically connected with the control device 9.
The measurement effectiveness of the three probes can be verified through the control device 9, and the scanning power supply 8 is regulated and controlled through the control device 9, so that the measurement result meets the regulation.
Example 2
As shown in fig. 2, an embodiment of the present invention provides an online real-time self-determination three-probe measurement method, including:
s1, after the first scanning probe 1, the second scanning probe 2 and the suspension probe 3 are deployed, scanning is controlled through the control device 9 and the scanning power supply 8.
S2, in the scanning process, voltage parameters are acquired through the first voltage measuring instrument 5, the second voltage measuring instrument 6 and the third voltage measuring instrument 7, and current parameters are acquired through the current measuring instrument 4.
S3, according to the voltage parameter and the current parameter, a measurement result is obtained, and a validity verification result of the measurement result is obtained. The validity verification result includes validity or invalidity.
And S4, when the validity verification result is valid, reserving a measurement result and continuing to measure. When the validity verification result is invalid, the scanning state is adjusted by the control device 9 and the scanning power supply 8 so as to change the validity verification result into valid.
In a possible embodiment, the control of the scanning by the control device 9 and the scanning power supply 8 comprises:
the preset power output scan waveform is read by the control device 9.
And outputting a scanning waveform according to the preset power supply, and controlling the scanning power supply 8 to work so as to realize scanning.
In one possible embodiment, the acquisition of the voltage parameter by the first voltage measuring device 5, the second voltage measuring device 6 and the third voltage measuring device 7 comprises:
the loop voltage V1 of the scanning probe loop is measured by a first voltage measuring device 5.
The voltage V2 to ground of the first scanning probe 1 is measured by the second voltage measuring instrument 6.
Measuring the voltage V3 to ground of the suspension probe 3 by a third voltage measuring instrument 7;
and obtaining voltage parameters according to the loop voltage V1, the ground voltage V2 and the ground voltage V3.
In one possible embodiment, the current parameter is obtained by the current meter 4, comprising: the loop current A1 of the scanning probe loop is measured by a current meter 4.
In one possible embodiment, obtaining a measurement result according to the voltage parameter and the current parameter includes:
according to the voltage V2 to the ground and the loop current A1 of the first scanning probe 1, a first volt-ampere characteristic curve corresponding to the first scanning probe 1 is obtained.
And acquiring a second volt-ampere characteristic curve corresponding to the second scanning probe 2 according to the loop voltage V1 of the scanning probe loop, the ground voltage V2 of the first scanning probe 1 and the loop current A1.
And obtaining a measurement result based on the first volt-ampere characteristic curve, the second volt-ampere characteristic curve and the ground voltage V3.
In one possible implementation manner, obtaining the validity verification result of the measurement result includes:
and judging whether the first volt-ampere characteristic curve is consistent with the second volt-ampere characteristic curve, if so, judging that the measurement result is effective, and obtaining an effectiveness verification result of the measurement result, otherwise, further judging according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve, and obtaining the effectiveness verification result of the measurement result.
In one possible implementation manner, further judgment is performed according to the first voltammetric characteristic curve and the second voltammetric characteristic curve, and a validity verification result of the measurement result is obtained, including:
and fitting according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve to obtain the plasma electron temperature.
And judging whether the bias voltage is less than three times of the electron temperature of the plasma, if so, judging that the measurement result is invalid to obtain a validity verification result of the measurement result, and if not, judging that the measurement result is valid to obtain the validity verification result of the measurement result.
Wherein the bias voltage is used to characterize the output voltage of the scan power supply 8.
In one possible embodiment, the fitting to obtain the plasma electron temperature from the first voltammetric characteristic curve and the second voltammetric characteristic curve comprises: and respectively obtaining plasma electron temperatures corresponding to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve by using an exponential fitting method.
When the plasma electron temperature obtained by the first volt-ampere characteristic curve fitting is inconsistent with the plasma electron temperature obtained by the second volt-ampere characteristic curve fitting, the measurement result can be directly judged to be invalid, the validity verification result of the measurement result is obtained, and if not, whether the bias voltage is less than three times of the plasma electron temperature is judged.
In a possible embodiment, the adjustment of the scanning state by the control device 9 and the scanning power supply 8 comprises: the output voltage of the scanning power supply 8 is controlled by the control device 9 to be greater than or equal to three times the plasma electron temperature.
According to the online real-time self-judging three-probe measuring method provided by the invention, after the first scanning probe, the second scanning probe and the suspension probe are deployed, scanning is controlled through the control equipment and the scanning power supply; in the scanning process, acquiring voltage parameters through a first voltage measuring instrument, a second voltage measuring instrument and a third voltage measuring instrument, and acquiring current parameters through a current measuring instrument; according to the voltage parameter and the current parameter, a measurement result is obtained, and a validity verification result of the measurement result is obtained, so that the measurement result can be detected and judged on line in real time, and the problems that whether the three-probe measurement condition is met and whether the measured plasma parameter is correct and valid cannot be monitored in real time in the prior art are solved
Example 3
This embodiment is a further example made on the basis of embodiment 1 and embodiment 2, and the specific principle is as follows.
As shown in fig. 1, the embodiment provides an online real-time self-judging three-probe measurement system, which comprises three probes, three signal conditioning units, a scanning power supply and a set of measurement and control system. The three-probe circuit of the embodiment is the same as a common three-probe measuring circuit, but the connected power supply is changed into a controllable scanning power supply, and a measuring and controlling system is used for processing data in real time and sending out control signals. Firstly, three probes with the same shape and size are selected, one probe is used for measuring the suspension potential, and the other two probes are connected with a scanning power supply. Next, a special scan waveform as shown in fig. 1 is applied between the two scan probes, the power supply output is in a constant bias state for a long time, in a voltage scan state for a short time, and the scan voltage output is greater than 3 times of the plasma electron temperature, and the output voltage adjustment is performed according to the plasma electron temperature measurement result. And finally, carrying out data processing on the measurement results of the two probes applying the scanning voltage through a measurement and control system to obtain two volt-ampere characteristic curves, comparing, if the two curves are consistent, then the measurement conditions of the three probes are met, further calculating the electron temperature of the plasma by using a volt-ampere characteristic curve fitting method, and if the bias voltage is greater than 3 times of the electron temperature, then the measurement conditions of the three probes are met, and judging that the measurement results are effective. Otherwise, if the bias voltage is smaller than 3 times of electron temperature, the three-probe measurement condition is not satisfied, and in addition, if the two curves are inconsistent, the three-probe measurement condition is not satisfied, and the measurement result can be judged to be invalid.
Wherein the probe 3 measures the floating potential V3 to ground. The probe 1 and the probe 2 form a scanning probe loop. The scan power supply 7 outputs a special scan waveform as shown in fig. 3, and simultaneously measures the probe loop current A1 while measuring the voltage V2 to ground and the voltage output voltage V1 of the probe 1. The voltage to ground of probe 2 was calculated using V1 and V2. The voltammetric characteristic curves of probe 1 and probe 2 were plotted.
And comparing the two volt-ampere characteristic curves, if the two volt-ampere characteristic curves are inconsistent, the measurement conditions are not satisfied, and the measurement result is judged to be invalid.
Comparing the two volt-ampere characteristic curves, if the two volt-ampere characteristic curves are consistent, further calculating the electron temperature of the plasma by using a volt-ampere characteristic curve fitting method, if the bias voltage is smaller than 3 times of the electron temperature of the plasma, determining that the measurement result is invalid if the three-probe measurement condition is not met, and simultaneously increasing the power supply output voltage by more than 3 times of the electron temperature of the plasma through a measurement and control system so as to meet the three-probe measurement condition. If the bias voltage is more than 3 times of the electron temperature of the plasma, the measurement condition is satisfied, namely the measurement result is judged to be correct and effective, and the measurement is continued.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the scope of the invention, but to limit the invention to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. An online real-time self-judging three-probe measuring system is characterized by comprising a first scanning probe (1), a second scanning probe (2), a suspension probe (3), a current measuring instrument (4), a first voltage measuring instrument (5), a second voltage measuring instrument (6), a third voltage measuring instrument (7), a scanning power supply (8) and a control device (9);
the first scanning probe (1) and the second scanning probe (2) are respectively connected with positive and negative output ends of a scanning power supply (8) to form a scanning probe loop; the suspension probe (3) is used for measuring a suspension potential; the current measuring instrument (4) is arranged on the scanning probe loop and is used for measuring the current on the scanning probe loop; the first voltage measuring instrument (5) is used for measuring the voltage between the first scanning probe (1) and the second scanning probe (2), and the second voltage measuring instrument (6) is used for measuring the voltage to ground of the first scanning probe (1); the third voltage measuring instrument (7) is used for measuring the voltage to ground of the suspension probe (3); the current measuring instrument (4), the first voltage measuring instrument (5), the second voltage measuring instrument (6), the third voltage measuring instrument (7) and the scanning power supply (8) are electrically connected with the control equipment (9).
2. An online real-time self-judging three-probe measurement method based on the system of claim 1, comprising:
after the first scanning probe (1), the second scanning probe (2) and the suspension probe (3) are deployed, scanning is controlled by a control device (9) and a scanning power supply (8);
in the scanning process, acquiring voltage parameters through a first voltage measuring instrument (5), a second voltage measuring instrument (6) and a third voltage measuring instrument (7), and acquiring current parameters through a current measuring instrument (4);
according to the voltage parameter and the current parameter, obtaining a measurement result and obtaining a validity verification result of the measurement result; the validity verification result comprises validity or invalidity;
when the validity verification result is valid, reserving a measurement result and continuing to measure; when the validity verification result is invalid, the scanning state is adjusted through the control device (9) and the scanning power supply (8) so that the validity verification result is changed into valid.
3. The online real-time self-judging three-probe measurement method according to claim 2, characterized by controlling scanning by a control device (9) and a scanning power supply (8), comprising:
reading a preset power supply output scanning waveform through a control device (9);
and outputting a scanning waveform according to the preset power supply, and controlling the scanning power supply (8) to work so as to realize scanning.
4. The online real-time self-determination three-probe measurement method according to claim 2, wherein acquiring voltage parameters by the first voltage measuring instrument (5), the second voltage measuring instrument (6) and the third voltage measuring instrument (7) comprises:
measuring a loop voltage V1 of a scanning probe loop by a first voltage measuring instrument (5);
measuring the voltage V2 to ground of the first scanning probe (1) by a second voltage measuring instrument (6);
measuring the voltage V3 to ground of the suspension probe (3) by a third voltage measuring instrument (7);
and obtaining voltage parameters according to the loop voltage V1, the ground voltage V2 and the ground voltage V3.
5. The online real-time self-judging three-probe measurement method according to claim 4, wherein the current parameter is obtained by a current measuring instrument (4), comprising: the loop current A1 of the scanning probe loop is measured by a current measuring instrument (4).
6. The online real-time self-determination three-probe measurement method according to claim 5, wherein obtaining a measurement result according to the voltage parameter and the current parameter comprises:
according to the ground voltage V2 and the loop current A1 of the first scanning probe (1), a first volt-ampere characteristic curve corresponding to the first scanning probe (1) is obtained;
acquiring a second voltammetry characteristic curve corresponding to the second scanning probe (2) according to the loop voltage V1 of the scanning probe loop, the ground voltage V2 of the first scanning probe (1) and the loop current A1;
and obtaining a measurement result based on the first volt-ampere characteristic curve, the second volt-ampere characteristic curve and the ground voltage V3.
7. The online real-time self-judging three-probe measurement method according to claim 6, wherein obtaining the validity verification result of the measurement result comprises:
and judging whether the first volt-ampere characteristic curve is consistent with the second volt-ampere characteristic curve, if so, judging that the measurement result is effective, and obtaining an effectiveness verification result of the measurement result, otherwise, further judging according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve, and obtaining the effectiveness verification result of the measurement result.
8. The online real-time self-judging three-probe measurement method according to claim 7, wherein the further judging according to the first voltammetric characteristic curve and the second voltammetric characteristic curve, obtaining the validity verification result of the measurement result, comprises:
fitting according to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve to obtain the plasma electron temperature;
judging whether the bias voltage is less than three times of the electron temperature of the plasma, if so, judging that the measurement result is invalid to obtain a validity verification result of the measurement result, otherwise, judging that the measurement result is valid to obtain the validity verification result of the measurement result;
wherein the bias voltage is used to characterize the output voltage of the scan power supply (8).
9. The online real-time self-determination three-probe measurement method according to claim 8, wherein the fitting to obtain the plasma electron temperature according to the first voltammetric characteristic curve and the second voltammetric characteristic curve comprises:
and respectively obtaining plasma electron temperatures corresponding to the first volt-ampere characteristic curve and the second volt-ampere characteristic curve by using an exponential fitting method.
10. The on-line real-time self-judging three-probe measuring method according to claim 7, characterized in that the adjustment of the scanning state by the control device (9) and the scanning power supply (8) comprises: the output voltage of the scanning power supply (8) is controlled to be more than or equal to three times of the plasma electron temperature through the control device (9).
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