CN117761864A - Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change - Google Patents

Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change Download PDF

Info

Publication number
CN117761864A
CN117761864A CN202311639507.7A CN202311639507A CN117761864A CN 117761864 A CN117761864 A CN 117761864A CN 202311639507 A CN202311639507 A CN 202311639507A CN 117761864 A CN117761864 A CN 117761864A
Authority
CN
China
Prior art keywords
secondary mirror
mirror
adjustment
focal plane
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311639507.7A
Other languages
Chinese (zh)
Inventor
陶春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Simite Optical Instruments Co ltd
Original Assignee
Nanjing Simite Optical Instruments Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Simite Optical Instruments Co ltd filed Critical Nanjing Simite Optical Instruments Co ltd
Priority to CN202311639507.7A priority Critical patent/CN117761864A/en
Publication of CN117761864A publication Critical patent/CN117761864A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention discloses a self-adaptive compensation micro-adjusting device and a method for a focal plane of a collimator along with temperature change, wherein the device comprises a main mirror structure and a secondary mirror structure, the main mirror structure and the secondary mirror structure are independently arranged on a bottom platform, collimator imaging exists between the main mirror structure and the secondary mirror structure, the secondary mirror structure has six degrees of freedom monitoring of pitching, azimuth rotation, self-rotation and three-dimensional translation, an actual translational value of a secondary mirror and an actual value of an angle of the secondary mirror are monitored through a grating ruler, data feedback is carried out, and compensation micro-adjustment to an ideal focal plane position is finally realized at a position with six-dimensional electric adjustment focal plane through error analysis of actual data and theoretical calculated values. In the method, in a collimator two-mirror system, a main mirror is fixed as a reference after adjustment, a secondary mirror is monitored in real time relative to the main mirror on the basis of a structure for temperature compensation in a certain temperature range, actual numerical values are fed back to software for analysis, and then a focusing surface is automatically controlled to move to the position of the optimal image surface.

Description

Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change
Technical Field
The invention belongs to the field of image quality debugging of collimator-two-mirror optical systems, and particularly relates to a device and a method for adaptively compensating micro-adjustment of focal plane of a collimator along with temperature change.
Background
The image quality of the collimator-two-mirror optical system is debugged by using a 4D dynamic interferometer and a standard plane mirror to perform auto-collimation detection. When the system is usually debugged, the main mirror is independently debugged to meet the image quality which can enable the image quality of the system to meet the requirement, the main mirror is used as a system reference to be fixed, and the multi-dimensional adjustment of the secondary mirror is matched with the main mirror to achieve that the image quality of the system meets the index requirement.
In the current collimator-two-mirror system, the main and secondary mirror structures are respectively designed into separate mirror chamber structures, and are connected to a frame or platform with good enough rigidity to form a collimator main body, the main body affects the distance between the main and secondary mirrors of the two-mirror system to the greatest extent when the temperature changes, and the focal plane position change is affected to the greatest extent.
The coaxial collimator-two-mirror system is generally considered axisymmetric, other directions are uniformly changed, the translational and pitching effects are synchronous, and the effects can be ignored; the off-axis collimator-two-mirror system is also because the length of other structural changes, except for mirror spacing, is small in the compensated temperature requirement range, which is considered to have little effect; however, after the system image quality is adjusted, when the temperature is changed, the primary mirror position is considered as a reference, but the secondary mirror position is not ideal relative to the primary mirror position change along with the temperature change, and is not actually monitored, because theoretical analysis is material idealized, the focal plane center view field position is not the focal plane position of the initial theoretical analysis, and thus the error affecting the off-axis view field image quality at the focal plane is possibly increased, and even the index requirement cannot be met.
The invention provides a self-adaptive compensation micro-adjusting device and a self-adaptive compensation micro-adjusting method for the focal plane of a collimator along with temperature change based on the fact that errors of actual values and theoretical compensation calculated values are inconsistent when the collimator-two-mirror optical system is changed in a certain temperature compensation range.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art and provides a device and a method for adaptively compensating micro-adjustment of the focal plane of a collimator along with temperature change.
In order to achieve the above object, the present invention provides the following technical solutions.
The self-adaptive compensation fine adjustment device for the focal plane of the collimator along with the temperature change comprises a main mirror structure and a secondary mirror structure, wherein the main mirror structure and the secondary mirror structure are independently arranged on a base platform, a two-mirror optical system is formed by combining an off-axis collimator, and a temperature compensation mechanism is arranged in the two-mirror optical system;
the secondary mirror has six degrees of freedom monitoring of pitching, azimuth rotation, self-rotation and three-dimensional translation, the actual translation value of the secondary mirror is monitored through the grating ruler, the actual value of the angle of the secondary mirror is monitored through the encoder, data feedback is carried out, and finally compensation fine adjustment to an ideal focal plane position is realized at the position with a six-dimensional electric adjustment focal plane through error analysis of actual data and theoretical calculated values.
Further, the adjusting of the secondary mirror structure includes:
the self-rotation adjusting structure realizes self-rotation adjustment of the secondary mirror through a self-rotation shaft;
the left-right adjusting structure realizes the left-right adjustment of the secondary mirror through the ball screw sleeve;
the height adjusting structure is used for realizing the height adjustment of the secondary mirror in the vertical direction through the lifting device;
the pitching adjusting structure realizes pitching adjustment of the secondary mirror through the pitching rotating shaft;
the front-back adjusting structure realizes the front-back adjustment of the secondary mirror through the sliding component;
the azimuth rotation adjusting structure is used for adjusting the reflecting angle of the secondary mirror relative to the primary mirror through the azimuth rotation shaft.
In the device, encoders are arranged on the self-rotation adjusting structure, the pitching adjusting structure and the azimuth rotation adjusting structure of the secondary mirror, the encoders are communicated with a PLC control unit through Modbus-RS485, and the PLC control unit obtains secondary mirror adjusting data measured by an absolute value encoder.
Furthermore, the encoder is an absolute value encoder, and the absolute value encoder at each position is independently used for receiving and transmitting data with the PLC control unit.
The device is characterized in that the left-right, height-height and front-back adjusting structure of the secondary mirror comprises the ball screw which is used for adjusting, and the measuring and monitoring are carried out through the grating ruler. The grating ruler is a syntek digital display grating ruler and comprises a displacement sensor with resolution of 1 mu m and a stroke of 50mm.
In the device, the secondary mirror structure comprises a base, a height adjusting structure is arranged on the base, the height adjusting structure controls the base to lift up and down, and a lifting device is arranged, wherein the lifting device comprises an electric screw rod lifter or servo-driven lifting equipment;
the left-right adjusting structure and the front-back adjusting structure are arranged on a platform of the base and comprise overlapped layered arrangement or same-layer arrangement, and the left-right adjusting structure and the front-back adjusting structure are independent, and the implementation mode comprises a ball screw sleeve or a sliding component;
the secondary mirror installation body is arranged on the left-right adjusting structure or the front-back adjusting structure through the azimuth rotating shaft, the pitching lug is arranged at the top of the secondary mirror installation body and used for fixing the pitching rotating shaft, and the secondary mirror is installed through the self-rotating shaft.
The rotary adjustment and the linear adjustment of the secondary mirror in the device are realized through a PLC control unit; the rotary type rotary adjusting device is provided with a rotary workbench, wherein the rotary workbench is driven by a motor, is driven by a worm gear or a gear, and feeds back rotary angle data through an encoder; the linear adjustment of the secondary mirror is realized by sending an instruction to a stepping motor through a PLC control unit, controlling a screw rod to rotate by the stepping motor, further realizing movement through a ball screw combination, acquiring the moving distance through a grating ruler, and feeding back to the PLC control unit to compare data with the instruction, thereby realizing high-precision control.
The method for using the self-adaptive compensation fine adjustment device based on the temperature change of the focal plane of the collimator comprises the following steps of installing a target plate at the focal plane on an electric control six-dimensional adjustment table, automatically adjusting the target plate to an ideal focal plane according to an error value, and operating the device:
s1, installing a secondary mirror structure of a collimator-two-mirror system according to the device to realize six-dimensional adjustment of a secondary mirror, wherein the six-dimensional adjustment comprises spin adjustment, left-right adjustment, height adjustment, pitching adjustment, front-back adjustment and azimuth rotation adjustment;
s2, based on the six-dimensional adjusting structure of the secondary mirror and the main mirror adjusting system, the collimator-two-mirror optical system performs auto-collimation detection under a 4D dynamic interferometer and a standard plane mirror, so that the image quality of the collimator-two-mirror optical system meets the quality change requirement;
s3, setting the positions of all the translation grating scales as zero positions by adjusting and based on the PLC control unit, and setting the positions of all the rotating shafts as zero positions;
and S4, when the temperature changes, actually measured displacement data of six degrees of freedom of the secondary mirror and an angle change value are fed back to the PLC control system, and after the actually measured data and a theoretical calculation value of the PLC control system are subjected to difference, the focal plane is automatically controlled to move to an ideal position.
Based on the method, the focal length of the collimator is set as F, and the caliber of the main mirror is set as D 1 Secondary mirror caliber D 2 The radius of the primary mirror is R, the distance between the primary mirror and the secondary mirror is d, and the rear intercept is d 1 Off-axis amount L of primary mirror 1 Secondary mirror off-axis amount L 2 The height direction is h, and is characterized in that the method is regulated as follows:
when the error of the front and back mirror distance is + -Deltad, the focal plane position adjustment amount is D= ±{ [ (2F/R) 2 +1]* (±Δd) } wherein the sign movement direction is opposite;
when the off-axis quantity direction error is changed to +/-delta L, the focal plane position does not need to be adjusted, but if delta L is within the scope of the outer edge margin of the aperture of the off-axis vision field corresponding to the secondary mirror, the full vision field can be tested;
if DeltaL is outside the margin range of the outer edge of the aperture of the outer field of view corresponding to the secondary mirror, the outer field of view possibly blocks light; therefore, the secondary mirror is required to leave extra caliber allowance;
when the error in the height direction is + -Deltah, the micro-variation corresponds to a small angle of rotation of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -arctg [ Deltah/(L) 1 -L 2 )]At the same time, the pitch angle is regulated to +/-arctg [ delta h/(L) 1 -L 2 )];
When the pitch angle error varies to ±Δα, the focal plane movement amount is ±tg (Δα) ×d+d 1 ) Simultaneously, the pitching angle is adjusted to +/-delta alpha, wherein the symbol moving directions are opposite;
when the azimuth rotation angle error is changed to + -Deltaβ, the focal plane movement amount is + -tg (Deltaβ) (d+d) 1 ) Simultaneously, the pitching angle is regulated to +/-delta beta, wherein the symbol moving directions are opposite;
when the self-rotation angle error is changed to + -Deltay, the micro-change corresponds to the rotation angle of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -tg (Deltay) (D 2 And/2) while the pitch angle is adjusted to + -arctg { [ tg (Δγ) ((D) 2 /2)]/L 1 -L 2 ) And sign movement direction is opposite.
The beneficial effects are that: compared with the prior art, the invention has the following remarkable effects:
(1) The device provided by the invention can realize six-dimensional free adjustment, and realize high-precision control adjustment in the coordination of an absolute value encoder, a ball screw and a grating ruler;
(2) When the parallel light tube is debugged, the relative position data between the primary mirror and the secondary mirror is acquired in real time, and the focal plane is automatically adjusted to the ideal image plane position by the electric control according to the change error, so that the possibility that the off-axis image quality cannot meet the requirement due to the fact that the focal plane position deviates from the central view field is avoided, and the accuracy of the focal plane position of the parallel light tube is improved.
Drawings
FIG. 1 is a schematic diagram of an off-axis collimator-two-mirror optical system;
FIG. 2 is a schematic diagram of off-axis collimator-two-mirror optical system detection;
FIG. 3 is a schematic view of the application of the device of the present invention to a collimator;
FIG. 4 is a front view of the secondary mirror structure assembly structure;
FIG. 5 is a side view of the secondary mirror structure assembly structure;
FIG. 6 is a schematic diagram including azimuthal rotation axis mounting;
FIG. 7 is one of the base mounting arrangements of the secondary mirror structure assembly;
FIG. 8 is a schematic diagram of the structure of a secondary mirror mounted grating scale at the fore-and-aft translational adjustment;
FIG. 9 is a schematic illustration of the mounting of a grating scale at the secondary mirror height translational adjustment and the left-right translational adjustment.
Detailed Description
For a detailed description of the disclosed technical solutions, the following description is further made with reference to the accompanying drawings.
Fig. 1 and 2 are schematic diagrams of image quality debugging of a collimator-two-mirror optical system, and fig. 3 shows an auto-collimation detection debugging application by a 4D dynamic interferometer + standard plane mirror.
In the collimator two-mirror (primary mirror and secondary mirror) system, the primary mirror is fixed as a reference after adjustment, the secondary mirror is monitored relative to the primary mirror in real time on the basis of a structure for temperature compensation in a certain temperature range, actual numerical values are fed back to software for analysis, and then a focusing surface is automatically controlled to move to the position of the optimal image surface. The system secondary mirror structure is provided with six degrees of freedom monitoring of pitching, azimuth rotation, self-rotation and three-dimensional translation, the actual translation value of the secondary mirror is monitored through the grating ruler, the actual value of the angle of the secondary mirror is monitored through the encoder, data feedback is carried out, and finally compensation fine adjustment to an ideal focal plane position is realized at the position with a six-dimensional electric adjustment focal plane through error analysis of actual data and theoretical calculated values.
The secondary mirror structure has six-freedom-degree manual limiting adjustment of pitching, azimuth rotation, self-rotation three-dimensional rotation and front-back, left-right and high-low three-dimensional translation. The structure is divided into an upper part for rotation adjustment and a lower part for displacement adjustment, so that an encoder and a grating ruler are installed without interference, and a secondary mirror structure assembly is shown in fig. 4-7. The base frame of the secondary mirror is shown in fig. 8 and 9.
In the device, the secondary mirror structure comprises a base, the base is provided with a height adjusting structure 3, the height adjusting structure 3 controls the base to lift up and down, the base is divided into an upper part and a lower part, the middle part is connected through the lifting device, the lifting device comprises a base platform which adopts a manual screw rod to drive the upper end to lift, and the secondary mirror structure also comprises lifting equipment which adopts an electric type, such as an electric type screw rod lifter or servo transmission, and the two equipment can realize high-precision control. The high-low detection grating ruler 31 for detecting the lifting height is arranged on the same side of lifting, the high-low detection grating ruler 31 feeds collected data back to the PLC control unit, the PLC control unit can compare the data with instruction data issued by a motor and the like according to the collected data, so that multiple groups of test data can be realized, for example, under the condition that other parameters are unchanged, influence data of accurate high-low positions can be obtained, and fault discovery and positioning can be realized.
The base is provided with a front-back adjusting structure 5 and a left-right adjusting structure 2, the control of precision is automatic, the control can be realized by adopting a motor to drive a ball screw, the ball screw rotates under the drive of a motor, a sliding seat sleeved on the ball screw can horizontally move and is applied to the front-back adjusting structure 5 or the left-right adjusting structure 2, further, the front-back adjusting structure 5 and the left-right adjusting structure 2 can be arranged on the same layer, namely, the layout of a 'field' shape, and can also be arranged in a layered manner, namely, the front-back adjusting structure 5 is arranged on one layer, the left-right adjusting structure 2 is arranged on the first layer, then the secondary mirror mounting body is taken as a whole, the whole moves on the front-back adjusting structure 5, and the whole front-back adjusting structure 5 horizontally moves on the left-right adjusting structure 2. The horizontal movement may be performed in the same manner as the height adjustment structure, or may be manually slid or electrically driven, or may be pneumatically driven or hydraulically driven. The manual operation can also be a simple sliding assembly, and the sliding assembly can be realized by comprising a sliding rail and a sliding seat. The left-right detection grating ruler 21 and the front-rear adjustment detection grating ruler 51 are arranged on the outer sides of the left-right adjustment structure 2 and the front-rear adjustment structure 5.
The secondary mirror mounting body is arranged on the left-right adjusting structure 2 or the front-back adjusting structure 5 through an azimuth rotation shaft, the azimuth rotation adjusting structure 6 is provided with an azimuth rotation detecting encoder 61 at the azimuth rotation shaft, and the top of the secondary mirror mounting body is provided with a pitching lug for fixing the pitching rotation shaft, and the secondary mirror is mounted through a self-rotation shaft. The self-rotation adjusting structure 1 is provided with a self-rotation detecting encoder 11 at a self-rotation shaft. Similarly, in connection with fig. 4, a pitch detection encoder 41 is provided at the rotation position of the pitch adjustment structure 4 of the sub-mirror.
The rotary workbench is driven by a motor, worm and gear or gear transmission, and the rotary workbench is used for feeding back the rotating angle data through encoders, and the encoders are respectively arranged on the self-rotating shaft, the pitching shaft and the azimuth rotating shaft to measure the actual rotation value of the secondary mirror.
In order to feed back the pitching angle of the equipment more accurately, a set of high-precision absolute value encoder is additionally arranged on the pitching trunnion of the equipment, and the encoder is selected according to the precision of 24-bit single circle (measurement precision=360 degrees/2-24), and the precision is about 0.08'; the encoder communicates with the PLC through Modbus-RS485, so that data interference on physical factors is reduced to the greatest extent. The position of the lifting device is monitored in real time by connecting a position sensor (such as an encoder) to the PLC control unit. The PLC control unit can control the movement of the lifting device (dc motor) according to the difference between the set target position and the current position to achieve accurate position control.
Furthermore, the method is a use method of the self-adaptive compensation fine adjustment device based on the temperature change of the focal plane of the collimator, wherein the target plate at the focal plane is arranged on an electric control six-dimensional adjustment table, and is automatically adjusted to an ideal focal plane according to an error value. The specific steps are as follows.
1) The secondary mirror structure of the collimator-two-mirror system is changed to a six-dimensional manual adjusting mechanism in the structural form.
2) The secondary mirror six-dimensional adjusting mechanism and the main mirror adjusting system are used for meeting the quality change requirement;
3) Setting all the positions of the translational grating ruler as zero positions by electric control, and setting all the positions of the rotating shafts as zero positions;
4) When the temperature changes, the six-degree-of-freedom actually measured displacement and the angle change value of the secondary mirror are fed back to the control system;
5) And after the actual measurement data and the theoretical calculation value of the PLC control unit are different, automatically controlling the focal plane to move to an ideal position.
Parameter control and analysis aspects: the focal length of the collimator is assumed to be F, the caliber of the primary mirror D1, the caliber of the secondary mirror D2, the radius of the primary mirror R, the distance between the primary mirror and the secondary mirror D, the rear intercept D1, the off-axis quantity of the primary mirror L1, the off-axis quantity of the secondary mirror L2 and the height direction h.
When the error before and after the lens distance is changed to +/-delta D, the focal plane position adjustment quantity is D= ±{ [ (2F/R) 2+1] (±delta D) } (the sign moving direction is opposite);
when the off-axis quantity direction error is changed to +/-delta L, the focal plane position does not need to be adjusted, but if delta L is within the scope of the outer edge margin of the aperture of the off-axis vision field corresponding to the secondary mirror, the full vision field can be tested; if DeltaL is outside the margin range of the outer edge of the aperture of the outer field of view corresponding to the secondary mirror, the outer field of view possibly blocks light; so that the secondary mirror is required to leave extra caliber allowance.
When the height direction error is changed to + -Deltah, the micro-change corresponds to a small angle of rotation of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -arctg [ Deltah/(L1-L2) ], and the pitch angle is adjusted to + -arctg [ Deltah/(L1-L2) ].
When the pitch angle error varies to ±Δα, the focal plane movement amount is ±tg (Δα) ×d+d1, and the pitch angle is adjusted to ±Δα (opposite sign movement direction).
When the azimuth rotation angle error is changed to ±Δβ, the focal plane movement amount is ±tg (Δβ) ×d+d1 (opposite sign movement direction), and the pitch angle is adjusted to ±Δβ.
When the self-rotation angle error is changed to + -Deltay, the micro-change corresponds to a small angle of rotation of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -tg (Deltay) (D2/2) (sign movement direction is opposite), and the pitch angle is adjusted to + -arctg { tg (Deltay) (D2/2) ]/(L1-L2).
Finally, the device and the method provided by the invention have better effect in the research on the influence of the temperature in the two-mirror system, can realize more comprehensive detection of the optical element through six-dimensional movement, have an assistant to form more perfect parameter data, and can feed back the influence of each position on the image quality of the optical element based on the parameter data, so that the device and the method have more objectivity and high efficiency compared with the traditional manual free adjustment for searching the focal plane position.

Claims (10)

1. The self-adaptive compensation fine adjustment device for the focal plane of the collimator along with the temperature change comprises a main mirror structure and a secondary mirror structure, and is characterized in that the main mirror structure and the secondary mirror structure are independently arranged on a base platform, a two-mirror optical system is formed by combining an off-axis collimator, and a temperature compensation mechanism is arranged in the two-mirror optical system;
the secondary mirror is provided with six degrees of freedom monitoring of pitching, azimuth rotation, self-rotation and three-dimensional translation, the actual translation value of the secondary mirror is monitored through the grating ruler, the actual value of the angle of the secondary mirror is monitored through the encoder, data are fed back to the PLC control unit, and compensation fine adjustment to an ideal focal plane position is finally realized at a focal plane position with six-dimensional electric adjustment through error analysis of actual data and theoretical calculation values.
2. The collimator focal plane adaptive compensation fine adjustment apparatus according to claim 1, wherein the adjustment of the secondary mirror structure comprises:
the self-rotation adjusting structure realizes self-rotation adjustment of the secondary mirror through a self-rotation shaft;
the left-right adjusting structure realizes the left-right adjustment of the secondary mirror through the ball screw sleeve;
the height adjusting structure is used for realizing the height adjustment of the secondary mirror in the vertical direction through the lifting device;
the pitching adjusting structure realizes pitching adjustment of the secondary mirror through the pitching rotating shaft;
the front-back adjusting structure realizes the front-back adjustment of the secondary mirror through the sliding component;
the azimuth rotation adjusting structure is used for adjusting the reflecting angle of the secondary mirror relative to the primary mirror through the azimuth rotation shaft.
3. The adaptive compensation fine adjustment device for the focal plane of the collimator according to the temperature change of claim 2 is characterized in that encoders are arranged on a spin adjusting structure, a pitch adjusting structure and a azimuth rotation adjusting structure of the secondary mirror, the encoders are communicated with a PLC (programmable logic controller) control unit through Modbus-RS485, and the PLC control unit obtains secondary mirror adjusting data measured by an absolute value encoder.
4. The adaptive compensation fine adjustment device for the focal plane of the collimator according to the temperature change of claim 3, wherein the encoder is an absolute value encoder, and the absolute value encoder at each position is independently used for receiving and transmitting data with the PLC control unit.
5. The collimator focal plane self-adaptive compensation fine adjustment device according to claim 2, wherein the left-right, height-front and rear adjustment structure of the secondary mirror comprises adjustment by a ball screw, and measurement and monitoring are performed by a grating ruler.
6. The adaptive compensation fine adjustment device for the focal plane of the collimator according to the temperature change of claim 5, wherein the grating scale is a syntek digital display grating scale, and comprises a displacement sensor with a resolution of 1 μm and a travel of 50mm.
7. The self-adaptive compensation fine adjustment device for the focal plane of the collimator according to the temperature change of claim 1, wherein the secondary mirror structure comprises a base, a height adjustment structure is arranged on the base, the height adjustment structure is used for controlling the base to lift up and down, a lifting device is arranged, and the lifting device comprises an electric screw rod lifter or a servo-driven lifting device;
the left-right adjusting structure and the front-back adjusting structure are arranged on a platform of the base and are overlapped and layered or arranged on the same layer, and the left-right adjusting structure and the front-back adjusting structure are independent, and the implementation mode comprises a ball screw sleeve or a sliding component;
the secondary mirror mounting body is arranged on the left-right adjusting structure or the front-back adjusting structure through a rotating shaft, a pitching lug is arranged at the top of the secondary mirror mounting body and used for fixing a pitching rotating shaft, and the secondary mirror is mounted through a self-rotating shaft.
8. The collimator focal plane adaptive compensation fine adjustment device according to claim 1, wherein the rotary adjustment and the linear adjustment of the secondary mirror are realized by a PLC control unit; the rotary type rotary adjusting device is provided with a rotary workbench, wherein the rotary workbench is driven by a motor, is driven by a worm gear or a gear, and feeds back rotary angle data through an encoder; the linear adjustment of the secondary mirror is realized by sending an instruction to a stepping motor through a PLC control unit, controlling a screw rod to rotate by the stepping motor, further realizing movement through a ball screw combination, acquiring the moving distance through a grating ruler, and feeding back to the PLC control unit to compare data with the instruction, thereby realizing precision control.
9. The application method of the self-adaptive compensation fine adjustment device based on the temperature change of the focal plane of the collimator is characterized in that a target plate at the focal plane is arranged on an electric control six-dimensional adjustment table, and is automatically adjusted to an ideal focal plane according to an error value, and the operation comprises the following steps:
s1, installing a secondary mirror structure of a collimator-two-mirror system according to the device to realize six-dimensional adjustment of a secondary mirror, wherein the six-dimensional adjustment comprises spin adjustment, left-right adjustment, height adjustment, pitching adjustment, front-back adjustment and azimuth rotation adjustment;
s2, based on the six-dimensional adjusting structure of the secondary mirror and the main mirror adjusting system, the collimator-two-mirror optical system performs auto-collimation detection under a 4D dynamic interferometer and a standard plane mirror, so that the image quality of the collimator-two-mirror optical system meets the quality change requirement;
s3, setting the positions of all the translation grating scales as zero positions by adjusting and based on the PLC control unit, and setting the positions of all the rotating shafts as zero positions;
and S4, when the temperature changes, actually measured displacement data of six degrees of freedom of the secondary mirror and an angle change value are fed back to the PLC control system, and after the actually measured data and a theoretical calculation value of the PLC control system are subjected to difference, the focal plane is automatically controlled to move to an ideal position.
10. A flat-based according to claim 9Using method of self-adaptive compensation micro-adjusting device for focal plane of collimator along with temperature change, setting focal length of collimator as F and caliber D of main mirror 1 Secondary mirror caliber D 2 The radius of the primary mirror is R, the distance between the primary mirror and the secondary mirror is d, and the rear intercept is d 1 Off-axis amount L of primary mirror 1 Secondary mirror off-axis amount L 2 The height direction is h, and is characterized in that the method is regulated as follows:
when the error of the front and back mirror distance is + -Deltad, the focal plane position adjustment amount is D= ±{ [ (2F/R) 2 +1]* (±Δd) } wherein the sign movement direction is opposite;
when the off-axis quantity direction error is changed to +/-delta L, the focal plane position does not need to be adjusted, but if delta L is within the scope of the outer edge margin of the aperture of the off-axis vision field corresponding to the secondary mirror, the full vision field can be tested;
if DeltaL is outside the margin range of the outer edge of the aperture of the outer field of view corresponding to the secondary mirror, the outer field of view possibly blocks light; therefore, the secondary mirror is required to leave extra caliber allowance;
when the error in the height direction is + -Deltah, the micro-variation corresponds to a small angle of rotation of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -arctg [ Deltah/(L) 1 -L 2 )]At the same time, the pitch angle is regulated to +/-arctg [ delta h/(L) 1 -L 2 )];
When the pitch angle error varies to ±Δα, the focal plane movement amount is ±tg (Δα) ×d+d 1 ) Simultaneously, the pitching angle is adjusted to +/-delta alpha, wherein the symbol moving directions are opposite;
when the azimuth rotation angle error is changed to + -Deltaβ, the focal plane movement amount is + -tg (Deltaβ) (d+d) 1 ) Simultaneously, the pitching angle is regulated to +/-delta beta, wherein the symbol moving directions are opposite;
when the self-rotation angle error is changed to + -Deltay, the micro-change corresponds to the rotation angle of the primary and secondary mirror optical system along the optical axis direction, the focal plane movement amount is + -tg (Deltay) (D 2 And/2) while the pitch angle is adjusted to + -arctg { [ tg (Δγ) ((D) 2 /2)]/L 1 -L 2 ) And sign movement direction is opposite.
CN202311639507.7A 2023-12-04 2023-12-04 Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change Pending CN117761864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311639507.7A CN117761864A (en) 2023-12-04 2023-12-04 Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311639507.7A CN117761864A (en) 2023-12-04 2023-12-04 Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change

Publications (1)

Publication Number Publication Date
CN117761864A true CN117761864A (en) 2024-03-26

Family

ID=90324733

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311639507.7A Pending CN117761864A (en) 2023-12-04 2023-12-04 Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change

Country Status (1)

Country Link
CN (1) CN117761864A (en)

Similar Documents

Publication Publication Date Title
DE4335249A1 (en) Measurement of surface contour of object - displacing detector wrt object in measurement surface according to data generated using external contour similar to object profile
CN104316001B (en) Non-reference hole coaxiality error measurement system and measurement method thereof
US5633676A (en) Apparatus and method for mounting printing plates and proofing
CN113917669B (en) Off-axis reflection type telescopic system and installation and adjustment detection device and method thereof
CN110514127B (en) Automatic light beam direction calibration method based on section line method
CN114061459B (en) Non-contact photographic hole measurement calibration device and method
CN102699733A (en) Method and device for measuring movement locus of automatic tool changing mechanical arm
CN112629435B (en) Gear measuring system and method based on multi-line structured light
CN110095101B (en) Coordinate system calibration device and method for columnar part measuring instrument
CN112747783B (en) Zero setting device and zero setting method for driving mechanism
CN113375559B (en) Online measurement centering device, system and method based on multi-source sensing
CN117761864A (en) Self-adaptive compensation micro-adjusting device and method for focal plane of collimator along with temperature change
CN117470070A (en) High-precision reflector angle measurement equipment and measurement method
CN111288933B (en) Automatic centering method for spherical or rotationally symmetric aspheric optical element
US5107132A (en) Apparatus for the verification of corrected surfaces or in the process of correction
CN100401014C (en) Wire width measuring device
CN116794641A (en) Novel target
CN116878415A (en) Four-axis precision detection platform based on 3D line laser sensor and calibration method thereof
CN108709509B (en) Contour camera, matched oversized-diameter revolving body workpiece non-contact caliper and non-contact revolving body measuring method
CN207622709U (en) Mobile phone curved surface housing profile measuring apparatus based on Spectral Confocal technology
CN114543673B (en) Visual measurement platform for aircraft landing gear and measurement method thereof
CN115774254A (en) Laser radar testing device and method
CN116099720A (en) Active alignment equipment, active alignment method and calibration method for AR glasses
CN115371824A (en) Thermal infrared imager flyback compensation component zero position detection calibration system and calibration method
CN108534621A (en) A kind of glass linear scale self-checking device based on machine vision

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination