CN117735438A - Handling device and use method thereof - Google Patents

Abstract

The application relates to the technical field of semiconductor manufacturing process equipment, and discloses a handling device, which comprises: the first operation module comprises a base; the second operation module is detachably connected with the first operation module and comprises a supporting part, a moving part and a tool part, wherein: the supporting part is movably connected with the base through the moving part, so that the moving part drives the supporting part to move on the base along a first direction; the tool part is movably arranged on the supporting part and used for moving parts placed on the tool part along a second direction, and the first direction and the second direction are different. The device can enable the parts of the semiconductor equipment to move in a narrow space in multiple degrees of freedom in the process of carrying, and a sufficient operation space is reserved. The application also discloses a using method of the carrying device.

Description

Handling device and use method thereof

Technical Field

The present application relates to the technical field of semiconductor manufacturing process equipment, for example, to a handling device and a method for using the same.

Background

Currently, in the assembly and maintenance of semiconductor devices (e.g., atomic layer deposition devices or plasma enhanced chemical vapor deposition devices, etc.), parts are generally handled using a hand fork lift truck (e.g., a forklift), and then installed and removed by engineers.

However, because the transportation channel and the working space of the equipment workshop are generally narrow, the existing hand-operated stacking truck is difficult to move in the narrow transportation channel and the working space due to the self-size problem. Meanwhile, after the existing hand-operated stacker lifts the parts, the lifting arms of the hand-operated stacker can shield part of the structures of the parts, so that the mounting and dismounting work of engineers is complicated and inconvenient.

It should be noted that the information disclosed in the foregoing background section is only for enhancing understanding of the background of the present application and thus may include information that does not form the prior art that is already known to those of ordinary skill in the art.

Disclosure of Invention

The following presents a simplified summary in order to provide a basic understanding of some aspects of the disclosed embodiments. This summary is not an extensive overview, and is intended to neither identify key/critical elements nor delineate the scope of such embodiments, but is intended as a prelude to the more detailed description that follows.

The embodiment of the disclosure provides a handling device and a using method thereof, which can adapt to a narrow conveying passage and a working space, and meanwhile, parts can not be blocked after being handled, so that the device is convenient for engineers to install and disassemble.

In some embodiments, the shipping apparatus comprises: the first operation module comprises a base; the second operation module is detachably connected with the first operation module and comprises a supporting part, a moving part and a tool part, wherein the supporting part is movably connected with the base through the moving part, so that the moving part drives the supporting part to move on the base along a first direction; the tool part is movably arranged on the supporting part and used for moving parts placed on the tool part along a second direction, and the first direction and the second direction are different.

Optionally, the support part includes:

a lifting frame for connecting the moving part;

the guide assembly is fixedly connected with the lifting frame, and the tool part is movably arranged on the guide assembly along the second direction.

Optionally, the lifting frame includes:

the lower support is in limit connection with the moving part;

the middle layer bracket is fixedly connected with the lower layer bracket or is in limit connection with the moving part;

the upper layer support is fixedly connected with the middle layer support and used for supporting the guide assembly.

Optionally, the guide assembly includes:

the supports are distributed and arranged with the upper layer support;

and each guide shaft is respectively arranged in one support and is movably connected with the tool part.

Optionally, the moving part includes:

the first sliding block is arranged at the bottom of the lower-layer bracket in a limiting way and is connected with the base in a sliding way; or,

the universal wheel is arranged at the bottom of the middle bracket in a limiting way, and meanwhile, the base is provided with a plane for the universal wheel to roll.

Optionally, the tooling part includes:

the loading assembly is arranged on the guide shafts and used for loading parts;

and the lifting mechanism is connected with the loading assembly and used for enabling the loading assembly to move along the guide shaft or limit.

Optionally, the loading assembly comprises:

the support plate is sleeved on the guide shafts and can slide up and down along the vertical plane along the guide shafts;

the backing ring is arranged on the supporting plate and used for placing parts;

and the bushing is sleeved at the joint of the supporting plate and the guide shaft.

Optionally, the lifting mechanism includes:

the plunger assembly comprises a knob plunger and a plunger mounting seat, wherein the plunger mounting seat is connected with the supporting plate and is correspondingly arranged with the guide shaft, and the knob plunger is mounted on the plunger mounting seat and is used for limiting the supporting plate at a specific position of the guide shaft;

the handle is arranged on the supporting plate and used for controlling the plunger assembly to drive the supporting plate to move along the guide shaft.

Optionally, the base includes:

the first bracket is in sliding connection with the first sliding block, and a limiting block is arranged at the bottom of the first bracket;

the second support is fixedly connected with the first support, a second sliding block is arranged at the bottom of the second support and used for enabling the base to move along a third direction, and the first direction, the second direction and the third direction are different from each other.

In some embodiments, the method of using the handling device comprises:

aligning the carrying device with the semiconductor equipment and screwing a limiting block positioned on the base through a processing positioning groove arranged on the first operation module;

placing the parts on a supporting part of a second operation module, carrying the whole second operation module to the upper part of a first operation module, moving the supporting part to a first working position along a first direction, and limiting by using a fixing part;

the tool part is controlled to move to a second working position along a second direction so as to disassemble and assemble parts;

after the disassembly and assembly are completed, the tool part is reset, the second operation module is taken down from the first operation module, and the first operation module is disassembled.

The carrying device and the using method thereof provided by the embodiment of the disclosure can realize the following technical effects:

through the first operation module capable of moving along the first direction and the second operation module capable of moving along the second direction, the parts of the semiconductor device can move in multiple degrees of freedom in a narrow space in the process of carrying, and enough operation space is reserved. And adopt the transport of mountable module structure realization spare part, have simple structure, labour saving and time saving and easy to maintain's characteristics, also can not shelter from spare part after carrying spare part simultaneously, made things convenient for engineer's installation and dismantlement work.

The foregoing general description and the following description are exemplary and explanatory only and are not restrictive of the application.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which like reference numerals refer to similar elements, and in which:

FIG. 1 is a schematic view of a hand stacker in the related art;

FIG. 2 is a schematic view of the overall structure of a handling device according to an embodiment of the present disclosure;

FIG. 3 is a schematic diagram of a front view of a handling device according to an embodiment of the present disclosure;

FIG. 4 is a schematic side view of a handling device according to an embodiment of the present disclosure;

FIG. 5 is an isometric view of the overall structure of another handling device provided by an embodiment of the present disclosure;

FIG. 6 is a schematic diagram of a front view of another handling device according to an embodiment of the present disclosure;

FIG. 7 is a schematic side view of another handling device according to an embodiment of the present disclosure;

FIG. 8 is a flow chart of a method of using a handling device according to an embodiment of the present disclosure;

fig. 9 is an enlarged partial schematic view of a handling device according to an embodiment of the present disclosure.

Reference numerals:

100-a first operation module; 110-a base; 111-a first scaffold; 112-a second scaffold; 130-a second slider; 140-limiting blocks; 150-plane; 200-a second operation module; 210-lifting frame; 220-a guide assembly; 230-a moving part; 240-lifting mechanism; 250-loading assembly; 211-upper layer brackets; 212-middle layer support; 213-lower layer scaffold; 221-supporting seat; 222-a guide shaft; 231-a first slider; 232-universal wheels; 241-plunger assembly; 242-handle; 243-a lead screw assembly; 244-a hand wheel; 2411-a knob plunger; 2412-a plunger mount; 2431-a lead screw holder; 2432-bearing blocks; 2433-screw cap for screw; 2434-lead screw nut mount; 2435-trapezoidal screw; 251-supporting plate; 252-backing ring; 253-bushing; 300-fixing part; 400-processing the positioning groove.

Detailed Description

So that the manner in which the features and techniques of the disclosed embodiments can be understood in more detail, a more particular description of the embodiments of the disclosure, briefly summarized below, may be had by reference to the appended drawings, which are not intended to be limiting of the embodiments of the disclosure. In the following description of the technology, for purposes of explanation, numerous details are set forth in order to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may still be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawing.

The terms first, second and the like in the description and in the claims of the embodiments of the disclosure and in the above-described figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe embodiments of the present disclosure. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion.

In the embodiments of the present disclosure, the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe embodiments of the present disclosure and embodiments thereof and are not intended to limit the indicated device, element, or component to a particular orientation or to be constructed and operated in a particular orientation. Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the embodiments of the present disclosure will be understood by those of ordinary skill in the art in view of the specific circumstances.

In addition, the terms "disposed," "connected," "secured" and "affixed" are to be construed broadly. For example, "connected" may be in a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the embodiments of the present disclosure may be understood by those of ordinary skill in the art according to specific circumstances.

The term "plurality" means two or more, unless otherwise indicated.

In the embodiment of the present disclosure, the character "/" indicates that the front and rear objects are an or relationship. For example, A/B represents: a or B.

The term "and/or" is an associative relationship that describes an object, meaning that there may be three relationships. For example, a and/or B, represent: a or B, or, A and B.

It should be noted that, without conflict, the embodiments of the present disclosure and features of the embodiments may be combined with each other.

In the related art, as shown in fig. 1, most of hand-operated lifting structures adopt a hand-operated stacking cart to lift parts (such as magnetic fluid) of semiconductor equipment, and the structure occupies a large space, is not suitable for entering and exiting a narrow working environment, and can shield the parts after lifting, so that the lifting structure is inconvenient for engineers to install and detach.

In view of the above technical problems, referring to fig. 2, the disclosure provides a handling device, which includes a first operation module 100 and a second operation module 200, wherein the second operation module 200 is detachably connected with the first operation module 100, the first operation module 100 includes a base 110, and the second operation module 200 includes a supporting portion, a moving portion, and a tooling portion (not shown in the drawing). Specifically, the supporting portion is movably connected to the base 110 through the moving portion, so that the moving portion drives the supporting portion to move on the base 110 along the first direction. The tool part is movably arranged on the supporting part and used for moving the parts placed on the tool part along the second direction, and the first direction and the second direction are different. For example, the first direction may be any direction lying on a horizontal plane, and the second direction may be any direction along a vertical plane.

By adopting the carrying device provided by the embodiment of the disclosure, through the first operation module capable of moving along the first direction and the second operation module capable of moving along the second direction, the parts of the semiconductor device can move in a narrow space in the carrying process in multiple degrees of freedom, and enough operation space is reserved. And adopt the transport of mountable module structure realization spare part, have simple structure, labour saving and time saving and easy to maintain's characteristics, also can not shelter from spare part after carrying spare part simultaneously, made things convenient for engineer's installation and dismantlement work.

In one embodiment of the present application, as shown in fig. 2 to 4, the supporting portion of the present application includes a lifting frame 210 and a guiding assembly 220, where the lifting frame 210 is used for connecting the moving portion, that is, one end of the lifting frame 210 is in limiting connection with the moving portion, so that the moving portion can drive the lifting frame 210 to move on the base 110 along the first direction. One end of the guide assembly 220 is fixedly connected with the other end of the lifting frame 210, and the tool part is movably arranged at the other end of the guide assembly 220 along the second direction.

Optionally, the lifting frame 210 includes a lower bracket 213, a middle bracket 212, and an upper bracket 211, wherein the lower bracket 213 is limitedly connected with the moving part. The middle bracket 212 is fixedly connected with the lower bracket 213, or the lower bracket 213 is in limit connection with the moving part. The upper bracket 211 is fixedly connected with the middle bracket 212 and is used for supporting the guide assembly 220.

Optionally, the guide assembly 220 includes a plurality of mounts 221 and a correspondingly disposed plurality of guide shafts 222, wherein,

the plurality of supports 221 are disposed in a distributed manner with the upper support 211. The guide shafts 222 are respectively installed in one support 221, and are movably connected with the tool part.

Specifically, the lifting frame 210 may be a polyhedral structure, for example, a regular hexahedral structure, that is, the lower-layer bracket 213, the middle-layer bracket 212, and the upper-layer bracket 211 together form the edges of a polyhedron. Meanwhile, the lower support 213 may not be provided, and the lower support 213 may be directly and limitedly connected to the moving part. The plurality of holders 221 may be disposed at the apexes of the prisms formed by the upper-stage brackets 211 in a distributed manner, and the guide shafts 222 are inserted into the corresponding holders 221 to be locked.

In one embodiment of the present application, as shown in fig. 2 to 4, the moving part of the present application includes a first slider 231, and the first slider 231 is limitedly installed at the bottom of the lower bracket 213 and slidably connected to the base 110. Alternatively, the moving part of the present application may be a bullseye pulley 232, and the bullseye pulley 232 may be directly mounted at the bottom of the middle bracket 212 in a limited manner. Meanwhile, as shown in fig. 5 to 7, in case that the moving part is the bullseye's universal wheel 232, the base 110 of the first operation module 100 may be provided with a plane 150 for the universal wheel to roll.

Therefore, the base is of a plane structure, the bullseye universal wheels are arranged at the bottom of the middle-layer bracket of the lifting frame, and the multidirectional moving and carrying of parts can be realized.

In an embodiment of the present application, the tooling portion of the present application includes a loading assembly 250 and a lifting mechanism 240, wherein the loading assembly 250 is mounted on a plurality of guide shafts 222 for loading the parts. The lift mechanism 240 is coupled to the loading assembly 250 for moving or restraining the loading assembly 250 along the guide shaft 222.

Alternatively, as shown in connection with fig. 2-4, the loading assembly 250 of the present application includes a support plate 251, a backing ring 252, and a bushing 253, wherein the support plate 251 is sleeved on the plurality of guide shafts 222 and can slide up and down along the plurality of guide shafts 222 along a vertical plane. The backing ring 252 is mounted to the support plate 251 for placement of the components. The bushing 253 is sleeved at the joint of the support plate 251 and the guide shaft 222.

Alternatively, as shown in connection with fig. 2-4, the lifting mechanism 240 of the present application includes a plunger assembly 241 and a handle 242, wherein the plunger assembly 241 includes a knob plunger 2411 and a plunger mount 2412, the plunger mount 2412 is connected with the support plate 251 and is disposed corresponding to the guide shaft 222, and the knob plunger 2411 is mounted on the plunger mount 2412 for limiting the support plate 251 to a specific position of the guide shaft 222. The handle 242 is disposed on the support plate 251 for controlling the plunger assembly 241 to drive the support plate 251 to move along the guide shaft 222.

Alternatively, as shown in connection with fig. 5 to 7, the lifting mechanism 240 of the present application includes a screw assembly 243 and a hand wheel 244, wherein the screw assembly 243 includes a screw bracket 2431, a bearing seat 2432, a screw nut 2433, a screw nut mount 2434, and a trapezoidal screw 2435, one end of the screw bracket 2431 is connected with the support plate 251, and the other end is connected with the trapezoidal screw 2435. The trapezoidal screw 2435 is sequentially connected with a bearing block 2432, a screw nut 2433 and a screw nut mount 2434, and the screw nut mount 2434 is provided on the upper bracket 211. The hand wheel 244 is connected to an end of the acme screw 2435 for controlling the screw assembly 243 to move the support plate 251 along the guide shaft 222.

In the embodiment of the present application, as shown in fig. 2 to 4, the base 110 of the present application includes a first bracket 111 and a second bracket 112, where the first bracket 111 is slidably connected to the first slider 231, and a stopper 140 is disposed at the bottom of the first bracket 111. The second bracket 112 is fixedly connected with the first bracket 111, and a second slider 130 is disposed at the bottom of the second bracket 112, where the second slider 130 is used to move the base 110 along a third direction, and the first direction, the second direction and the third direction are different from each other.

Specifically, the first support 111 and the second support 112 of the present application may form a rectangular support base 110, where the first support 111 is a long side and the second support 112 is a short side. And the base 110 can slide along the third direction where the second bracket 112 is located through the second slider 130, the supporting portion can slide along the second direction where the first bracket 111 is located through the first slider 231, and the supporting plate 251 can slide along the first direction where the guiding shaft 222 is located, so that the three-axis movement (for example, the XYZ three axes in the rectangular planar coordinate system) of the component in the narrow space is realized, and the structure is simple and the use is convenient.

Optionally, as shown in fig. 3 and fig. 4, the handling device of the present application further includes a fixing portion 300 for limiting the base 110 to the supporting portion, so that the base 110 cannot move along the first direction and can only move along the second direction or the third direction. Specifically, the fixing portion 300 may be a "concave" fixing block, and two ends of the fixing block are mounted on the side wall of the first bracket 111 and the side wall of the lower bracket 213 in a limited manner, so as to prevent the base 110 from being driven when the tool portion moves.

In an actual application, referring to fig. 2 to fig. 4, the handling device of the present application is divided into a first operation module 100 and a second operation module 200 to be assembled respectively, and the process of assembling the first operation module 100 is as follows: a non-metal slider (a material may be selected from polyoxymethylene or a non-metal material of equal tensile strength in order to reduce friction and prevent generation of metal particles) is mounted on the base 110 of the first operation module 100, and the stopper 140 is not screwed. The process of assembling the second operation module 200 is: the other nonmetallic slide block is locked at the bottom of the lifting frame 210 through a special nut of the profile, a plurality of supporting seats 221 are arranged above the lifting frame 210, and a linear guide shaft 222 is inserted into each supporting seat 221 and then is locked. Then, the backing ring 252, bushing 253, knob plunger 2411, and plunger mount 2412 are mounted on the backing plate 251, and the guide shaft 222 is integrally sleeved, and the knob plunger 2411 is reset to lower the backing plate to a position close to the support 221.

Referring to fig. 8, an embodiment of the present disclosure provides a method for using a handling device, including:

step 801: through setting up in the processing constant head tank of first operation module, will aim at semiconductor device and screw up the stopper that is located the base like this application handling device.

Step 802: and placing the parts on a supporting part of the second operation module, then integrally carrying the second operation module to the upper part of the first operation module, moving the supporting part to a first working position along a first direction, and limiting by using a fixing part.

Step 803: the control tool part moves to a second working position along a second direction so as to disassemble and assemble the parts.

Step 804: after the disassembly and assembly are completed, the tooling part is reset, the second operation module is taken down from the first operation module, and the first operation module is disassembled.

In the embodiment of the present application, as shown in fig. 9, when the handling device of the present application is used, the first operation module 100 is placed at the station, the semiconductor device is aligned by the processing positioning groove 400 of the base 110 of the first operation module 100, and the tightening limiting block 140 of the first operation module 100 is aligned. The processing positioning groove 400 plays a role in alignment, and the vertical marking instrument is used for enabling the processing groove to coincide with the axis of the magnetic fluid lifting mechanism 240.

Then, the parts (such as magnetic fluid) are placed on the support plate 251 of the second operation module 200, and then the second operation module 200 is integrally mounted to the first operation module 100, and after the sliding blocks slide back and forth to the first working position, the fixing parts 300 are used to limit the first operation module 100 and the second operation module 200, so that the second operation module 200 is prevented from being driven during lifting. Then, the knob plunger 2411 is reset, and the handle 242 is held to lift the support plate 251 of the second operation module 200 until the second operation position is reached, in which the plunger is ejected, so as to detach the components. After the use is completed, the knob plunger 2411 is reset, the support plate 251 is put down, the second operation module 200 is pulled out, and the first operation module 100 is removed, so that the disassembling and assembling process of the parts is completed.

The above description and the drawings illustrate embodiments of the disclosure sufficiently to enable those skilled in the art to practice them. Other embodiments may include structural and other modifications. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the sequence of operations may vary. Portions and features of some embodiments may be included in, or substituted for, those of others. The embodiments of the present disclosure are not limited to the structures that have been described above and shown in the drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (10)

1. A handling device, comprising:

the first operation module comprises a base;

the second operation module is detachably connected with the first operation module and comprises a supporting part, a moving part and a tool part, wherein:

the supporting part is movably connected with the base through the moving part, so that the moving part drives the supporting part to move on the base along a first direction;

the tool part is movably arranged on the supporting part and used for moving parts placed on the tool part along a second direction, and the first direction and the second direction are different.

2. The handling device of claim 1, wherein the support portion comprises:

a lifting frame for connecting the moving part;

the guide assembly is fixedly connected with the lifting frame, and the tool part is movably arranged on the guide assembly along the second direction.

3. Handling device according to claim 2, wherein the lifting frame comprises:

the lower support is in limit connection with the moving part;

the middle layer bracket is fixedly connected with the lower layer bracket or is in limit connection with the moving part;

the upper layer support is fixedly connected with the middle layer support and used for supporting the guide assembly.

4. A handling device according to claim 3, wherein the guide assembly comprises:

the supports are distributed and arranged with the upper layer support;

and each guide shaft is respectively arranged in one support and is movably connected with the tool part.

5. The carrying device according to claim 4, wherein the moving portion includes:

the first sliding block is arranged at the bottom of the lower-layer bracket in a limiting way and is connected with the base in a sliding way; or,

the universal wheel is arranged at the bottom of the middle bracket in a limiting way, and meanwhile, the base is provided with a plane for the universal wheel to roll.

6. The handling device of claim 4, wherein the tooling portion comprises:

the loading assembly is arranged on the guide shafts and used for loading parts;

and the lifting mechanism is connected with the loading assembly and used for enabling the loading assembly to move along the guide shaft or limit.

7. The handling device of claim 6, wherein the loading assembly comprises:

the support plate is sleeved on the guide shafts and can slide up and down along the vertical plane along the guide shafts;

the backing ring is arranged on the supporting plate and used for placing parts;

and the bushing is sleeved at the joint of the supporting plate and the guide shaft.

8. The handling device of claim 7, wherein the lifting mechanism comprises:

the plunger assembly comprises a knob plunger and a plunger mounting seat, wherein the plunger mounting seat is connected with the supporting plate and is correspondingly arranged with the guide shaft, and the knob plunger is mounted on the plunger mounting seat and is used for limiting the supporting plate at a specific position of the guide shaft;

the handle is arranged on the supporting plate and used for controlling the plunger assembly to drive the supporting plate to move along the guide shaft.

9. The handling device of claim 5, wherein the base comprises:

the first bracket is in sliding connection with the first sliding block, and a limiting block is arranged at the bottom of the first bracket;

the second support is fixedly connected with the first support, a second sliding block is arranged at the bottom of the second support and used for enabling the base to move along a third direction, and the first direction, the second direction and the third direction are different from each other.

10. A method of using a handling device, comprising:

aligning the handling device according to any one of claims 1 to 9 to the semiconductor equipment and tightening a stopper located at the base by a processing positioning groove provided at the first operation module;

placing the parts on a supporting part of a second operation module, carrying the whole second operation module to the upper part of a first operation module, moving the supporting part to a first working position along a first direction, and limiting by using a fixing part;

the tool part is controlled to move to a second working position along a second direction so as to disassemble and assemble parts;

after the disassembly and assembly are completed, the tool part is reset, the second operation module is taken down from the first operation module, and the first operation module is disassembled.