CN117705072A - Real-time automatic mode matching control system of resonant ring micro-electromechanical gyro - Google Patents
Real-time automatic mode matching control system of resonant ring micro-electromechanical gyro Download PDFInfo
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Abstract
The application provides a real-time automatic mode matching control system of resonant ring micro-electromechanical gyro, including: the device comprises a resonant ring micro-electromechanical gyroscope, a detection module, a first phase-sensitive demodulator, a first low-pass filter, a first controller, an angular rate modulation module, a second low-pass filter, a second controller, a mode matching calibration signal generation module and a mode matching control signal generation module, wherein: the mode matching calibration signal generating module generates two independent paths of calibration signals S 1 And S is 2 The subsequent detection module, the first phase-sensitive demodulator and the modal matching control signal generation module sequentially perform S 1 And S is 2 Amplitude response signals after passing through the resonant ring micro-electromechanical gyroscope are subjected to detection, demodulation, low-pass filtering and control calculation processing, and finally are fed back to a gyroscope tuning electrode to realize real-time automatic mode matching closed-loop control of the gyroscope。
Description
Technical Field
The invention belongs to a closed-loop control technology of a resonant ring micro-electromechanical gyro, and provides a real-time automatic mode matching method of the resonant ring micro-electromechanical gyro.
Background
The micro-electromechanical gyroscope is used for measuring the rotating speed or angle, has the advantages of low cost, small volume, light weight, low power consumption, particular suitability for mass production and the like, and is widely applied to the fields of navigation, vehicle stability, industrial control, consumer electronics and the like. The resonant ring micro electromechanical gyro is used as a special micro electromechanical gyro, and has the general advantages of the micro electromechanical gyro, and the outstanding advantages of natural axisymmetric structural attribute and insensitivity to external vibration and acceleration interference.
The resonance frequencies of all vibration directions of the ideal resonance ring micro-electromechanical gyroscope are completely consistent, so that the gyroscope driving mode and the detection mode are completely matched, frequency splitting does not exist, the mechanical sensitivity of the gyroscope is maximum, and the measurement accuracy of the gyroscope can be greatly improved. However, the existing processing technology of the resonator of the micro-electromechanical gyroscope with the resonant ring is imperfect, so that the processed resonator has inconsistent quality and rigidity in all directions, frequency splitting is caused, the driving mode and the detecting mode of the gyroscope are mismatched, and at the moment, the mechanical sensitivity of the gyroscope is reduced, and the measuring precision is reduced.
The mode matching has very important significance for mechanical sensitivity, zero bias stability improvement and the like of the resonant ring micro-electromechanical gyroscope. At present, the mode matching frequency tuning means mainly comprise mechanical adjustment and electrostatic adjustment. However, the existing mode matching method has the defects of complex structure, high debugging difficulty, easiness in being influenced by environmental factors, difficulty in maintaining a matching state when the gyroscope works, and the like.
Disclosure of Invention
The invention aims to provide a real-time automatic mode matching method for a resonant ring micro-electromechanical gyroscope, which can realize real-time automatic mode matching control of the resonant ring micro-electromechanical gyroscope, furthest reduce the influence on normal working loops such as a gyroscope angular rate closed loop and an orthogonal compensation closed loop, and effectively improve the mechanical detection sensitivity and measurement accuracy of the resonant ring micro-electromechanical gyroscope detection mode.
In order to achieve the above object, the technical scheme for realizing the invention is as follows:
a real-time automatic mode matching control system for a resonant ring microelectromechanical gyroscope, comprising:
the device comprises a resonant ring micro-electromechanical gyroscope, a detection module, a first phase-sensitive demodulator, a first low-pass filter, a first controller, an angular rate modulation module, a second low-pass filter, a second controller, a mode matching calibration signal generation module and a mode matching control signal generation module, wherein:
the detection module picks up the detection electrode signal of the resonant ring micro-electromechanical gyro, carries out in-phase demodulation and first low-pass filtering treatment by the first phase-sensitive demodulator, and feeds back to the gyro force feedback electrode after treatment by the first controller and the angular rate modulation module so as to realize gyro angular rate closed-loop control;
the detection module picks up the detection electrode signal of the resonance ring micro-electromechanical gyroscope, carries out quadrature demodulation through the first phase-sensitive demodulator, carries out second low-pass filtering treatment, and then feeds back to the gyroscope quadrature electrode through the second controller to realize gyroscope quadrature compensation closed-loop control;
the mode matching calibration signal generating module generates two independent paths of calibration signals S 1 And S is 2 The subsequent detection module, the first phase-sensitive demodulator and the modal matching control signal generation module sequentially perform S 1 And S is 2 The amplitude response signal after passing through the resonance ring micro-electromechanical gyroscope is subjected to detection, demodulation, low-pass filtering and control calculation processing, and finally is fed back to the gyroscope tuning electrode to realize real-time automatic mode matching closed-loop control of the gyroscope.
Specifically, the demodulation processing of the first phase-sensitive demodulator comprises in-phase demodulation and quadrature demodulation, and the demodulation reference signal is a gyro-driving mode excitation signal or a detection signal.
Specifically, the mode matching calibration signal generating module is configured to generate two independent mode matching calibration signals S 1 And S is 2 Wherein the mode matches the calibration signal S 1 Has an amplitude of A 1 At a frequency of omega d -ω p The method comprises the steps of carrying out a first treatment on the surface of the Modal matching calibration signal S 2 Has an amplitude of A 2 At a frequency of omega d +ω p Wherein ω is d Is the top driving mode resonant frequency omega p For a certain fixed positive frequency selected.
Specifically, the mode matching calibration signal generation module comprises a first gain module, a second gain module, a first signal generator and a second signal generator,
two modes match the calibration signal S 1 And S is 2 The amplitude of (2) satisfies the proportional relation
A 1 /A 2 ＝(2ω d -ω p )/(2ω d +ω p ) The proportional relationship is realized by a first gain module and a second gain module.
Specifically, the two modes match the calibration signal S 1 And S is 2 In the form of signals of sine, cosine or alternating square wave, and omega p And not less than five times the gyro angular rate measurement bandwidth.
Specifically, the mode matching control signal generating module includes a third signal generator, a second phase sensitive demodulator, a third low-pass filter and a third controller, where the third controller generally adopts a proportional-integral control mode.
Specifically, the third signal generator generates a reference signal required for demodulation by the second phase-sensitive demodulator, the reference signal including a frequency ω p Cosine signal cos (omega) p t)。
Specifically, the second phase-sensitive demodulator performs secondary demodulation processing on the demodulation signal output by the first phase-sensitive demodulator, and the processed signal is filtered by the third low-pass filter and then calculated by the third controller to generate the modal matching feedback control quantity.
Compared with the prior art, the method has the remarkable advantages that:
(1) The control system for carrying out real-time automatic mode matching based on the response amplitude difference of the two independent mode matching calibration signals adopts the response amplitude gain pre-compensation, so that the absolute zero of the response amplitude difference during mode matching of the resonant ring micro-electromechanical gyroscope is ensured, and the mode matching error caused by the asymmetry of the response amplitude and the mismatch of a subsequent detection processing circuit is avoided;
(2) The real-time automatic mode matching control system for realizing the detection mode of the resonant ring micro-electromechanical gyroscope provided by the invention has the advantages that the angular rate closed loop, the orthogonal compensation closed loop and the mode matching closed loop control circuit of the detection circuit work simultaneously in real time, and the automatic mode matching is realized on the premise of not influencing the normal measurement of the gyroscope. Modal matching calibration signal S 1 And S is 2 The amplitude and the frequency of the gyroscope can be adjusted in real time according to the change of the resonant frequency of the gyroscope, and even if the resonant frequency of the gyroscope drifts due to factors such as external environment temperature, the control system can still ensure that the mode has a good matching effect, and the resonant ring micro-electromechanical gyroscope has high measurement accuracy.
Drawings
FIG. 1 is a functional block diagram of a real-time automatic mode matching control system for realizing the detection mode of a resonant ring micro-electromechanical gyro.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples.
Referring to fig. 1, the real-time automatic mode matching control system of the resonant ring micro-electromechanical gyro provided by the invention comprises a resonant ring micro-electromechanical gyro 01, a detection module 02, a first phase-sensitive demodulator 03, a first low-pass filter 04, a first controller 05, an angular rate modulation module 06, a second low-pass filter 07, a second controller 08, a mode matching calibration signal generation module 09 and a mode matching control signal generation module 10,
wherein the mode matching calibration signal generation module 09 further comprises a first signal generator 11 and a first gain module 12 for generating a mode matching calibration signal S 1 There is also a second signal generator 13, a second gain module 14 for generating a mode matching calibration signal S 2 ；
The mode matching control signal generation module 10 further comprises a third signal generator 15, a second phase sensitive demodulator 16, a third low pass filter 17 and a third controller 18. The third signal generator 15 is used to generate a reference signal required for the demodulation process of the second phase sensitive demodulator 16. The third controller 18 is usually implemented by proportional-integral control, but may be implemented by other control methods that ensure stable operation of the system with small steady-state deviations.
The mode matching calibration signal S generated by the mode matching calibration signal generation module 09 1 And S is 2 The amplitude response signal deviation after passing through the resonant ring micro-electromechanical gyroscope 01 contains the mode mismatch information of the detection mode relative to the driving mode, the amplitude response signal deviation is processed by a subsequent detection module 02 and a first phase-sensitive demodulator 03 and is further processed by a second phase-sensitive demodulator 16 and a third low-pass filter 17 in a mode matching control signal generation module 10 and then is output to a third controller 18, and the third controller 18 calculates the required mode matching control quantity according to the input amplitude response signal deviation and applies the required mode matching control quantity to a tuning electrode of the resonant ring micro-electromechanical gyroscope 01 to realize the real-time automatic closed-loop control of mode matching.
The demodulation processing of the first phase-sensitive demodulator 03 comprises in-phase demodulation and quadrature demodulation, and a demodulation reference signal is a gyro drive mode excitation signal or a detection signal;
the detection module 02 picks up a detection electrode signal of the resonant ring micro-electromechanical gyroscope 01, carries out in-phase demodulation through the first phase-sensitive demodulator 03, processes the detection electrode signal through the first low-pass filter 04, and feeds back the detection electrode signal to a force feedback electrode of the resonant ring micro-electromechanical gyroscope 01 after processing the detection electrode signal through the first controller 05 and the angular rate modulation module 06 so as to realize gyroscope angular rate closed-loop control;
the detection module 02 picks up a detection electrode signal of the resonance ring micro-electromechanical gyro 01, carries out quadrature demodulation through the first phase-sensitive demodulator 03, processes the detection electrode signal through the second low-pass filter 07, and then feeds back the detection electrode signal to the resonance ring micro-electromechanical gyro 01 through the second controller 08 to realize gyro quadrature compensation closed-loop control;
the mode matching calibration signal generation module 09 is used for generating two independent mode matching calibration signals, namely, the amplitude is A 1 At a frequency of omega d -ω p Is matched with the mode of the calibration signal S 1 And an amplitude of A 2 At a frequency of omega d +ω p Is matched with the mode of the calibration signal S 2 Wherein ω is d Is the top driving mode resonant frequency omega p For a certain fixed positive frequency selected;
the amplitude of the two mode matching calibration signals should satisfy the proportional relation
A 1 /A 2 ＝(2ω d -ω p )/(2ω d +ω p ) The proportional relationship may be implemented by two gain modules, namely a first gain module 12 and a second gain module 14;
the mode matching control signal generation module 10 comprises a third signal generator 15, a second phase sensitive demodulator 16, a third low pass filter 17 and a third controller 18;
the third signal generator 15 is used for generating a reference signal, i.e. frequency omega, required for demodulation by the second phase sensitive demodulator 16 p Cosine signal cos (omega) p t)；
Modal matching calibration signal S 1 And S is 2 Together with the angular rate force balance feedback signal, the feedback signal is injected onto the gyro force feedback electrode, and the following detection module 02, the first phase-sensitive demodulator 03, the second phase-sensitive demodulator 16 and the third low-pass filter 17 sequentially perform S-phase compensation 1 And S is 2 The amplitude response signals after passing through the resonant ring micro-electromechanical gyroscope 01 are subjected to detection, primary demodulation, secondary demodulation and low-pass filtering treatment, and finally, a third controller 18 calculates control quantity according to the deviation of the two amplitude response signals and feeds the control quantity back to a tuning electrode of the resonant ring micro-electromechanical gyroscope 01 to realize real-time automatic mode matching closed-loop control of the gyroscope.
As a preferred embodiment of the present invention, the two independent modal matching calibration signals generated by the modal matching calibration signal generation module 09 are sinusoidal signals, i.e
S 1 ＝A 1 sin(ω d t-ω p t)，S 2 ＝A 2 sin(ω d t+ω p t)；
As a preferred embodiment of the present invention, the two independent modal matching calibration signals generated by the modal matching calibration signal generation module 09 use cosine signals, i.e
S 1 ＝A 1 cos(ω d t-ω p t)，S 2 ＝A 2 cos(ω d t+ω p t)；
As a preferable aspect of the present inventionThe two independent mode matching calibration signals S generated by the mode matching calibration signal generation module 09 1 And S is 2 The alternating square wave form is adopted, so that more resource saving is realized;
as a preferred embodiment of the invention, the selected mode matches the calibration signal S 1 And S is 2 In omega p And not less than five times the gyro angular rate measurement bandwidth.
In summary, the invention discloses a real-time automatic mode matching control system of a resonant ring micro-electromechanical gyroscope, which applies independent double-frequency shaking signals on a force feedback electrode of the resonant ring micro-electromechanical gyroscope 01, utilizes the characteristic that detection mode response signals of double-frequency shaking have the same amplitude and have 180-degree phase difference when in mode matching, obtains response amplitude difference information by carrying out twice phase-sensitive demodulation on the double-frequency response signals, and then outputs tuning voltage to a tuning electrode of the resonant ring micro-electromechanical gyroscope 01 through a controller to tune the detection mode resonance frequency in real time so as to enable the amplitude difference of the double-frequency response signals to be zero, thereby realizing the real-time automatic mode matching of the gyroscope. The invention can effectively improve the mechanical sensitivity of the resonant ring micro-electromechanical gyroscope, improve the gyroscope precision and reduce the influence of the environmental temperature on the gyroscope precision.
Example 1
Further description will be given below with reference to fig. 1, by way of example, in accordance with the above-described embodiments.
As an embodiment of the present invention, the first signal generator 11 generates a source signal sin (ω d t-ω p t) after passing through the first gain module 12, a mode matching calibration signal S is generated 1 ＝A 1 sin(ω d t-ω p t), the second signal generator 13 generates a source signal sin (ω) d t+ω p t) after passing through the second gain module 14, a mode matching calibration signal S is generated 2 ＝A 2 sin(ω d t+ω p t)。A 1 Taking k (2ω) d -ω p )，A 2 Taking k (2ω) d +ω p ) Wherein k is an adjustable amount. The detection module 02 detects that the responses of the modal matching calibration signals are S 'respectively' 1 ＝A' 1 sin(ω d t-ω p t)，S' 2 ＝-A' 2 sin(ω d t+ω p t). Through the first phase sensitive demodulator 03, the demodulation reference is sin (ω d t) demodulation outputs S' 1 ＝(A' 1 /2)cos(ω p t)-(A' 1 /2)cos(2ω d t-ω p t)，S' 2 '＝-(A' 1 /2)cos(ω p t)+(A' 2 /2)cos(2ω d t-ω p t). Then passes through a second phase sensitive demodulator 16 and a third low-pass filter 17 in the mode matching control signal generating module 10, and the demodulation reference is cos (omega p t), low-pass filtering to remove high-frequency components, and outputting a sum signal S '' 1 +S”' 2 ≈(A' 1 -A' 2 ) And/4, as response gain compensation is performed in advance, the output signal is zero to represent that the modes are completely matched, and the third controller 18 can realize real-time automatic closed-loop control of gyro mode matching by calculating and outputting proper feedback quantity to enable the signal to be zero.
Example two
As another embodiment of the present invention, the first signal generator 11 generates the source signal cos (ω d t-ω p t) after passing through the first gain module 12, a mode matching calibration signal S is generated 1 ＝A 1 cos(ω d t-ω p t), the second signal generator 13 generates a source signal cos (ω) d t+ω p t) after passing through the second gain module 14, a mode matching calibration signal S is generated 2 ＝A 2 cos(ω d t+ω p t)。A 1 Taking k (2ω) d -ω p )，A 2 Taking k (2ω) d +ω p ) Wherein k is an adjustable amount. The detection module 02 detects that the responses of the modal matching calibration signals are S 'respectively' 1 ＝A' 1 cos(ω d t-ω p t)，S' 2 ＝-A' 2 cos(ω d t+ω p t). Through the first phase sensitive demodulator 03, the demodulation reference is cos (ω d t) demodulation outputs S' 1 ＝(A' 1 /2)cos(ω p t)+(A' 1 /2)cos(2ω d t-ω p t)，S” 2 ＝-(A' 1 /2)cos(ω p t)-(A' 2 /2)cos(2ω d t-ω p t). Then passes through a second phase sensitive demodulator 16 and a third low-pass filter 17 in the mode matching control signal generating module 10, and the demodulation reference is cos (omega p t), low-pass filtering to remove high-frequency components, and outputting sum signal S' 1 +S” 2 ≈(A' 1 -A' 2 ) And/4, as response gain compensation is performed in advance, the output signal is zero to represent that the modes are completely matched, and the third controller 18 can realize real-time automatic closed-loop control of gyro mode matching by calculating and outputting proper feedback quantity to enable the signal to be zero.
Claims (8)
1. The real-time automatic mode matching control system of the resonant ring micro-electromechanical gyro is characterized by comprising:
the device comprises a resonant ring micro-electromechanical gyroscope, a detection module, a first phase-sensitive demodulator, a first low-pass filter, a first controller, an angular rate modulation module, a second low-pass filter, a second controller, a mode matching calibration signal generation module and a mode matching control signal generation module, wherein:
the detection module picks up the detection electrode signal of the resonant ring micro-electromechanical gyro, carries out in-phase demodulation and first low-pass filtering treatment by the first phase-sensitive demodulator, and feeds back to the gyro force feedback electrode after treatment by the first controller and the angular rate modulation module so as to realize gyro angular rate closed-loop control;
the detection module picks up the detection electrode signal of the resonance ring micro-electromechanical gyroscope, carries out quadrature demodulation through the first phase-sensitive demodulator, carries out second low-pass filtering treatment, and then feeds back to the gyroscope quadrature electrode through the second controller to realize gyroscope quadrature compensation closed-loop control;
the mode matching calibration signal generating module generates two independent paths of calibration signals S 1 And S is 2 The subsequent detection module, the first phase-sensitive demodulator and the modal matching control signal generation module sequentially perform S 1 And S is 2 Amplitude response signals after passing through the resonant ring micro-electromechanical gyroscope are detected, demodulated, low-pass filtered and controlled and calculated, and finally the amplitude response signals are fed back to a gyroscope tuning electrode to realize real-time automatic mode matching of the gyroscopeAnd (5) closed loop control.
2. The system of claim 1, wherein the demodulation process of the first phase sensitive demodulator comprises in-phase demodulation and quadrature demodulation, and the demodulation reference signal is a gyro-driven modal excitation signal or a detection signal.
3. The real-time automatic mode matching control system of a resonant ring microelectromechanical gyroscope of claim 1, wherein the mode matching calibration signal generation module is configured to generate two independent mode matching calibration signals S 1 And S is 2 Wherein the mode matches the calibration signal S 1 Has an amplitude of A 1 At a frequency of omega d -ω p The method comprises the steps of carrying out a first treatment on the surface of the Modal matching calibration signal S 2 Has an amplitude of A 2 At a frequency of omega d +ω p Wherein ω is d Is the top driving mode resonant frequency omega p For a certain fixed positive frequency selected.
4. The system of claim 3, wherein the mode matching calibration signal generation module comprises a first gain module, a second gain module, a first signal generator and a second signal generator,
two modes match the calibration signal S 1 And S is 2 The amplitude of (2) satisfies the proportional relation
A 1 /A 2 ＝(2ω d -ω p )/(2ω d +ω p ) The proportional relationship is realized by a first gain module and a second gain module.
5. The real-time automatic mode matching control system of a resonant ring microelectromechanical gyroscope of claim 3, characterized in that the two modes match the calibration signal S 1 And S is 2 In the form of signals of sine, cosine or alternating square wave, and omega p And not less than five times the gyro angular rate measurement bandwidth.
6. The system of claim 2, wherein the mode matching control signal generation module comprises a third signal generator, a second phase sensitive demodulator, a third low-pass filter and a third controller, wherein the third controller generally adopts a proportional-integral control mode.
7. The system of claim 6, wherein the third signal generator generates a reference signal for demodulation by the second phase sensitive demodulator, the reference signal comprising a frequency ω p Cosine signal cos (omega) p t)。
8. The system of claim 6, wherein the second phase sensitive demodulator performs a second demodulation process on the demodulated signal output by the first phase sensitive demodulator, and the processed signal is filtered by the third low-pass filter and then calculated by the third controller to generate the modal matching feedback control quantity.
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