CN117687232A - High-efficiency electro-optic modulator and method based on thin film lithium niobate - Google Patents
High-efficiency electro-optic modulator and method based on thin film lithium niobate Download PDFInfo
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 title claims abstract description 42
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
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Abstract
The invention discloses a high-efficiency electro-optic modulator based on film lithium niobate, which comprises: a light wave input end; the first Mach-Zehnder electro-optic modulator comprises a first light-splitting coupler, a first ground electrode, a first signal electrode and a second ground electrode which are arranged from top to bottom, wherein the electrodes of the first output coupler are comb electrodes, comb teeth of adjacent comb electrodes are oppositely arranged, optical waveguides made of thin film lithium niobate are respectively penetrated between the comb teeth of adjacent comb electrodes, and two ends of the two optical waveguides are respectively connected with the first light-splitting coupler and the first output coupler; when light waves enter the light waveguide between the adjacent comb electrodes through the light wave input end, a local surface plasmon effect is excited, and the electro-optical coupling efficiency is enhanced; the second Mach-Zehnder electro-optic modulator has the same structure as the first Mach-Zehnder electro-optic modulator, is arranged in parallel and shares a second ground electrode; and the optical wave output end is connected with output couplers of the two Mach-Zehnder electro-optic modulators. The invention can improve the modulation efficiency and reduce the loss.
Description
Technical Field
The invention relates to the field of electro-optic modulators, in particular to a high-efficiency electro-optic modulator based on thin film lithium niobate.
Background
An electro-optic modulator is one of the most central devices in an optical communication system. With the wide application of multimedia such as 5G, internet of things, ARVR, etc., demands for data transmission efficiency, capacity, reliability, etc., are increasingly improved. Therefore, the design and development of high-performance electro-optic modulators with high modulation efficiency, high modulation bandwidth, low loss, etc. are current hot spots and difficulties.
Lithium niobate crystals are one of the preferred materials for electro-optic modulators because of their high electro-optic coefficient. In recent years, electro-optical modulators based on lithium niobate materials have been developed to a great extent and realize large-scale commercial popularization and application, and at present, 40 GHz and 60 GHz lithium niobate modulators are mature and have smaller insertion loss, but the conventional modulators have high half-wave voltage generally and the device size is very difficult to meet the miniaturization and integration requirements of the current information technology field on photoelectric devices; in addition, in general, the effective refractive index difference between the bulk lithium niobate waveguide and the silicon oxide material with the outer cladding structure is small, and the loss is increased due to the partial pressure of the silicon oxide material with the cladding structure under the action of an electric field, so that the modulation efficiency of the device is reduced. If the electrode length is increased to achieve high modulation efficiency, the device size is increased, and the requirements of miniaturization and high integration of the device cannot be met.
However, with the continuous maturity of etching technology and integration technology, the thin film lithium niobate waveguide structure is generated, and the thin film lithium niobate waveguide not only has the high electro-optic coefficient of lithium niobate, can greatly reduce the size of a device, has larger waveguide effective refractive index difference, and is easy for enhancing photoelectric coupling by light field limitation. Therefore, the invention provides a novel structure design of the thin film lithium niobate electro-optical modulator, which lays a foundation for improving the modulation efficiency of the electro-optical modulator and promoting the integration and miniaturization development of the photoelectric device.
Disclosure of Invention
The invention mainly aims to provide a high-efficiency electro-optical modulator based on film lithium niobate and a method thereof, which can reduce the volume of the modulator, reduce loss and improve modulation efficiency.
The technical scheme adopted by the invention is as follows:
the invention provides a high-efficiency electro-optic modulator based on thin film lithium niobate, which comprises:
a light wave input end;
the first Mach-Zehnder electro-optic modulator comprises a first light splitting coupler, a first ground electrode, a first signal electrode and a second ground electrode which are arranged from top to bottom, and a first output coupler; the first light-splitting coupler is connected with the light wave input end, the first ground electrode comprises a single-row comb electrode, the first signal electrode and the second ground electrode both comprise fish-bone-shaped double-row comb electrodes, comb teeth of adjacent comb electrodes are oppositely arranged, light waveguides made of thin film lithium niobate are respectively penetrated between the comb teeth, and two ends of the two light waveguides are respectively connected with the first light-splitting coupler and the first output coupler; when light waves enter the light waveguide between the adjacent comb electrodes through the light wave input end, a local surface plasmon effect is excited, and the electro-optical coupling efficiency is enhanced;
the second Mach-Zehnder electro-optic modulator has the same structure as the first Mach-Zehnder electro-optic modulator, is arranged in parallel and shares a second ground electrode, and also excites a local surface plasmon effect between adjacent comb electrodes;
and the optical wave output end is connected with output couplers of the two Mach-Zehnder electro-optic modulators.
According to the technical scheme, the first ground electrode, the first signal electrode and the second ground electrode are arranged in parallel, and the comb teeth are aligned left and right in space.
By adopting the technical scheme, the optical wave input end comprises an input coupler, the optical wave enters the input coupler through the optical waveguide and then is split into light, and the light enters the split couplers of the two Mach-Zehnder electro-optic modulators respectively.
The optical wave output end comprises an output coupling electrode and a combined output coupler, and optical waveguides connected with the output ends of the output couplers of the two Mach-Zehnder electro-optical modulators respectively penetrate through the output coupling electrode and are finally connected with the combined output coupler.
According to the technical scheme, the output coupling electrode comprises a first output electrode, an output signal electrode and a second output electrode which are arranged from top to bottom, wherein the first output electrode and the second output electrode both comprise single-row comb electrodes, the output signal electrode comprises double-row comb electrodes which are in a fishbone shape, comb teeth of adjacent comb electrodes are oppositely arranged, optical waveguides are respectively penetrated between the comb electrodes, and when the optical waves enter the optical waveguides between the comb electrodes, local surface plasmon effect is excited.
By adopting the technical scheme, the light wave input end and the light wave output end are positioned on the same horizontal line.
By adopting the technical scheme, all the comb electrodes are of periodic structures, and the intervals among the comb teeth are smaller than or equal to the widths of the comb teeth.
By adopting the technical scheme, all comb-shaped electrodes are of metal nano structures.
The invention also provides a modulation method of the high-efficiency electro-optic modulator based on the thin-film lithium niobate, which is based on the high-efficiency electro-optic modulator based on the thin-film lithium niobate and comprises the following steps:
the light wave is split after passing through the optical waveguide, one beam enters the first Mach-Zehnder electro-optic modulator, and the other beam enters the second Mach-Zehnder electro-optic modulator;
when the light waves are at adjacent comb electrodes of the two Mach-Zehnder electro-optic modulators, under the action of the signal electrodes and the ground electrodes, the light fields are localized between the comb teeth of the adjacent comb electrodes, and the local surface plasmon effect is excited, so that the electro-optic coupling efficiency is enhanced;
the light wave is modulated by two Mach-Zehnder electro-optical modulators and then is coupled in a combined way.
By adopting the technical scheme, the wavelength of the incident light wave is matched with the resonance frequency of the plasmon effect.
The invention has the beneficial effects that: the invention skillfully designs the ground electrode and the signal electrode in the Herzehnder electro-optic modulator as the comb electrode, and the incident light wave with specific wavelength can excite the local surface plasmon effect on the comb electrode, so that the light field is localized between the comb structures, and the coupling degree of the light field and the electric field can be improved, the modulation efficiency is improved, and the loss is reduced when the electric field acts; in addition, the upper Mach-Zehnder electro-optic modulator and the lower Mach-Zehnder electro-optic modulator share one middle ground electrode, so that the size of the device can be reduced, and the integration level can be improved.
Further, adjacent upper and lower electrodes in the Hezehnder electro-optic modulator are arranged in parallel, and are aligned in left and right space, so that the size of the device is further reduced, and the integration level is improved.
Furthermore, the input coupler of the light wave input end and the combined output coupler of the light wave output end are positioned on the same horizontal line, so that the loss can be avoided from being increased by bending the connected waveguide for a plurality of times.
Furthermore, the output coupling electrode of the light wave output end also adopts a comb-shaped electrode structure, the ground electrode and the signal electrode are arranged in parallel, the space is aligned left and right, the arrangement dislocation can be avoided, and the size of the device is reduced.
Of course, it is not necessary for any one product to practice the invention to achieve all of the advantages set forth above at the same time.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a high efficiency electro-optic modulator based on thin film lithium niobate in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a high efficiency electro-optic modulator based on thin film lithium niobate in accordance with another embodiment of the present invention
FIG. 3 is a cross-sectional structural view of portion B of FIG. 1;
fig. 4 is a schematic diagram of a specific structure of the portion B in fig. 1.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It should be noted that the illustrations provided in the embodiments of the invention are merely schematic illustrations of the basic concepts of the invention, and thus only the components related to the invention are shown in the drawings, rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of each component in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
In the present invention, it should also be noted that, as terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are used, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, only for convenience of description and simplification of the description, and does not indicate or imply that the indicated apparatus or element must have a specific orientation, be configured and operated in the specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, as used herein, are used for descriptive and distinguishing purposes only and are not to be construed as indicating or implying a relative importance.
The localized surface plasmon effect is an optical effect that occurs on the surface of a nano-scale metal structure. Plasmons are quantum states of interactions of electrons and light fields, which are coupling modes between free electrons and photons in metals. Localized surface plasmon effects occur when the size and shape of the metal nanostructure is such that the plasmon resonance matches the frequency of the incident light wave. Localized surface plasmon effects are generated due to the characteristics of the optical resonator present on the surface of the metal nanostructure.
According to the invention, the electrode in the Mach-Zehnder electro-optic modulator is designed as the comb electrode, the comb electrode is utilized to excite the local surface plasmon effect, the optical field is localized between the comb structures, and when the electric field acts, the coupling degree of the optical field and the electric field can be improved, the modulation efficiency is improved, and the loss is reduced. The high-efficiency electro-optic modulator based on the film lithium niobate has the advantages of smaller volume, lower loss and high modulation efficiency.
As shown in fig. 1, the high-efficiency electro-optic modulator based on thin film lithium niobate according to the embodiment of the present invention includes:
a light wave input end A;
the first Mach-Zehnder electro-optic modulator B comprises a first optical splitting coupler 21, a first ground electrode 22, a first signal electrode 23 and a second ground electrode 24 which are arranged from top to bottom, and a first output coupler 25; the first light-splitting coupler 21 is connected with the light wave input end A, the first ground electrode 22 comprises a single-row comb electrode, the first signal electrode 23 and the second ground electrode 24 comprise fish-bone-shaped double-row comb electrodes, the comb teeth of the adjacent comb electrodes are oppositely arranged, light waveguides made of thin film lithium niobate are respectively penetrated between the comb teeth, and two ends of the two light waveguides are respectively connected with the first light-splitting coupler 21 and the first output coupler 25; when light waves enter the light waveguide between the adjacent comb electrodes through the light wave input end A, a local surface plasmon effect is excited, and the electro-optical coupling efficiency is enhanced;
the second mach-zehnder electro-optic modulator C has the same structure as the first mach-zehnder electro-optic modulator and is arranged in parallel and shares the second ground electrode. Specifically, the second mach-zehnder electro-optic modulator C includes a first optical splitting coupler 21, a first ground electrode 32, a first signal electrode 33, and a second ground electrode 34 arranged from top to bottom, and a first output coupler 35; the first optical splitting coupler 31 is connected to the optical wave input end a, the first ground electrode 32 includes a single row of comb electrodes, the first signal electrode 33 and the second ground electrode 34 each include a double row comb electrode having a fishbone shape, comb teeth of adjacent comb electrodes are disposed opposite to each other, and optical waveguides made of thin film lithium niobate are respectively penetrated therebetween, and two ends of the two optical waveguides are respectively connected to the first optical splitting coupler 31 and the first output coupler 35. The second Mach-Zehnder electro-optic modulator also excites a local surface plasmon effect between adjacent comb electrodes;
the optical wave output terminal D is connected to the output couplers 25, 35 of the two mach-zehnder electro-optic modulators.
The electro-optical modulator of the embodiment of the invention is a double-parallel Mach-Zehnder modulator integrated device based on thin film lithium niobate, and has smaller volume; the electrode part adopts a comb-shaped design, so that the coupling strength of an electric field and an optical field is enhanced, the loss is reduced, and the modulation efficiency is improved.
According to the technical scheme, the first ground electrode 32, the first signal electrode 33 and the second ground electrode 34 are arranged in parallel, and the comb teeth are aligned left and right in space, so that compared with staggered arrangement, the electro-optic coupling energy can be more concentrated while saving space.
As shown in fig. 1, the optical wave input terminal a includes an input coupler 10, and the optical wave enters the input coupler 10 through an optical waveguide and then is split into light beams, and the light beams enter the split couplers of the two mach-zehnder electro-optic modulators respectively.
The lightwave output D includes an output coupling electrode including a ground electrode 41, a signal electrode 42, and a ground electrode 43, and a combined output coupler 44. The optical waveguides connected to the output ends of the output couplers of the two mach-zehnder electro-optic modulators pass through the output coupling electrodes (i.e., one of the optical waveguides passes between the ground electrode 41 and the signal electrode 42, and the other optical waveguide passes between the signal electrode 42 and the ground electrode 43), respectively, and are all connected to the combining output coupler 44.
Specifically, in another embodiment of the present invention, as shown in fig. 2, the output coupling electrode includes a first output ground electrode 41, an output signal electrode 42 and a second output ground electrode 43 arranged from top to bottom, where the first output ground electrode 41 and the second output ground electrode 43 each include a single row of comb-shaped electrodes, the output signal electrode 42 includes a double row of comb-shaped electrodes in a fishbone shape, comb teeth of adjacent comb-shaped electrodes are oppositely arranged, and optical waveguides are respectively penetrated therebetween, and when an optical wave enters the optical waveguide between the comb-shaped electrodes, a local surface plasmon effect is excited.
The first output ground electrode 41, the output signal electrode 42 and the second output ground electrode 43 are all arranged in parallel, and the comb teeth are aligned left and right in space.
The embodiment is based on a thin film lithium niobate integrated device adopting a double parallel Mach-Zehnder modulator, wherein the electrode is of a periodic comb structure, and SPP (localized surface plasmon effect) is excited when light waves pass through the comb electrode, so that the electro-optical coupling efficiency can be enhanced, and the modulation efficiency of the device can be improved. The upper electrode and the lower electrode are arranged in parallel, the space is aligned left and right, and the upper Mach-Zehnder electro-optical modulator and the lower Mach-Zehnder electro-optical modulator share one middle ground electrode, so that the size of the device can be reduced, and the integration level can be improved.
In the above embodiment, the optical wave input end and the optical wave output end are on the same horizontal line, so that the loss of the connecting waveguide caused by dislocation arrangement can be avoided. All the comb electrodes are of periodic structures, the intervals among the comb teeth are smaller than or equal to the widths of the comb teeth, and all the comb electrodes are of metal nano structures. The choice of material for the metal nanostructures also plays an important role in the generation of localized surface plasmon effects. Metals generally have the characteristics of high conductivity and free electrons, and can support the formation of plasmons, and the optical properties of different metals can affect the characteristics of plasmonic modes.
FIG. 3 is a schematic cross-sectional structure of a Mach-Zehnder electro-optic modulator according to an embodiment of the present invention, wherein the substrate is made of Si material, but is not limited to Si material, and the thickness h1 is 1-5 μm; the buried layer is made of SiO2 material, but is not limited to SiO2 material, and the thickness h2 is 1-10 micrometers; the input/output optical waveguide, the coupler and the transmission optical waveguide are made of thin film lithium niobate materials and are positioned in the middle of the electrode, wherein the thickness h3 of the slab waveguide structure is 0.05-1 micron, the thickness h4 of the ridge waveguide structure is 0.05-1 micron, the top width w0 is 0.5-3 micron, the inclination angle theta is 60-75 degrees (factors such as process limitation, the inclination angle is usually less than 75 degrees); the electrode parts are made of Au/Ag materials but are not limited to Au/Ag materials, the thickness is 0.5-2 microns, the comb-shaped electrode (shown in figure 4) is 1-20 mm in total length of the periodic structure, the width of the interval part is P1, the width of the filling part is P2, P1 is less than or equal to P2, the width is 10-200 microns, the period p=p1+p2, the electrode width w1=w8=w9 is 10-100 microns, w2=w3=w4=w5=w6 is 0.1-100 microns, the electrode spacing w7=w10 and the width is 0.1-10 microns. The second mach-zehnder electro-optic modulator C is identical in structure to the first mach-zehnder electro-optic modulator B. D is an output coupler, the width of the ground electrode is 10-200 micrometers, the width of the signal electrode is 10-150 micrometers, and the length is 1-10 micrometers. The coupler section is a Y-shaped waveguide structure but is not limited to a Y-shaped structure.
When light waves (500-2000 nm) enter the first light splitting coupler 21 and the second light splitting coupler 31 from the input light waveguide and enter the upper arm and the lower arm, the light field is localized between the sparse teeth of the electrodes under the action of the comb-shaped signal electrodes and the ground electrodes with certain sizes, so that the electro-optical overlapping degree is increased, and the modulation efficiency is improved. The substrate is silica, glass, etc., and the refractive index is usually around 1.5, and the upper thin film material such as lithium niobate (refractive index around 2) etc.
The invention also provides a modulation method of the high-efficiency electro-optic modulator based on the thin-film lithium niobate, which is based on the high-efficiency electro-optic modulator based on the thin-film lithium niobate and comprises the following steps:
the light wave is split after passing through the optical waveguide, one beam enters the first Mach-Zehnder electro-optic modulator, and the other beam enters the second Mach-Zehnder electro-optic modulator;
when the light waves are at adjacent comb electrodes of the two Mach-Zehnder electro-optic modulators, under the action of the signal electrodes and the ground electrodes, the light fields are localized between the comb teeth of the adjacent comb electrodes, and the local surface plasmon effect is excited, so that the electro-optic coupling efficiency is enhanced;
the light wave is modulated by two Mach-Zehnder electro-optical modulators and then is coupled in a combined way.
By adopting the technical scheme, the wavelength of the incident light wave is matched with the resonance frequency of the plasmon effect.
In summary, the invention skillfully designs the ground electrode and the signal electrode in the Mach-Zehnder electro-optic modulator as comb electrodes, and the incident light wave with specific wavelength can excite the local surface plasmon effect on the comb electrodes, so that the light field is localized between comb structures, and the coupling degree of the light field and the electric field can be improved, the modulation efficiency is improved, and the loss is reduced when the electric field acts; in addition, the upper Mach-Zehnder electro-optic modulator and the lower Mach-Zehnder electro-optic modulator share one middle ground electrode, so that the size of the device can be reduced, and the integration level can be improved.
It should be noted that each step/component described in the present application may be split into more steps/components, or two or more steps/components or part of the operations of the steps/components may be combined into new steps/components, as needed for implementation, to achieve the object of the present invention.
The sequence numbers of the steps in the above embodiments do not mean the order of execution, and the execution order of the processes should be determined by the functions and the internal logic, and should not be construed as limiting the implementation process of the embodiments of the present application.
It will be understood that modifications and variations will be apparent to those skilled in the art from the foregoing description, and it is intended that all such modifications and variations be included within the scope of the following claims.
Claims (10)
1. A thin film lithium niobate-based high efficiency electro-optic modulator comprising:
a light wave input end;
the first Mach-Zehnder electro-optic modulator comprises a first light splitting coupler, a first ground electrode, a first signal electrode and a second ground electrode which are arranged from top to bottom, and a first output coupler; the first light-splitting coupler is connected with the light wave input end, the first ground electrode comprises a single-row comb electrode, the first signal electrode and the second ground electrode both comprise fish-bone-shaped double-row comb electrodes, comb teeth of adjacent comb electrodes are oppositely arranged, light waveguides made of thin film lithium niobate are respectively penetrated between the comb teeth, and two ends of the two light waveguides are respectively connected with the first light-splitting coupler and the first output coupler; when light waves enter the light waveguide between the adjacent comb electrodes through the light wave input end, a local surface plasmon effect is excited, and the electro-optical coupling efficiency is enhanced;
the second Mach-Zehnder electro-optic modulator has the same structure as the first Mach-Zehnder electro-optic modulator, is arranged in parallel and shares a second ground electrode, and also excites a local surface plasmon effect between adjacent comb electrodes;
and the optical wave output end is connected with output couplers of the two Mach-Zehnder electro-optic modulators.
2. The thin film lithium niobate-based high efficiency electro-optic modulator of claim 1, wherein the first ground electrode, the first signal electrode, and the second ground electrode are disposed in parallel and aligned spatially with respect to the comb teeth.
3. The thin film lithium niobate based high efficiency electro-optic modulator of claim 1, wherein the optical wave input comprises an input coupler, the optical wave is split into light after entering the input coupler through the optical waveguide, and the light enters the split couplers of the two mach-zehnder electro-optic modulators respectively.
4. The high-efficiency electro-optical modulator based on the thin film lithium niobate according to claim 1, wherein the light wave output end comprises an output coupling electrode and a combined output coupler, and the optical waveguides connected with the output ends of the output couplers of the two mach-zehnder electro-optical modulators respectively pass through the output coupling electrode and are finally connected with the combined output coupler.
5. The high-efficiency electro-optic modulator based on thin film lithium niobate according to claim 4, wherein the output coupling electrode comprises a first output ground electrode, an output signal electrode and a second output ground electrode which are arranged from top to bottom, the first output ground electrode and the second output ground electrode both comprise single-row comb electrodes, the output signal electrode comprises double-row comb electrodes which are in a fishbone shape, comb teeth of adjacent comb electrodes are oppositely arranged, optical waveguides are respectively penetrated between the comb electrodes, and when the optical waves enter the optical waveguides between the comb electrodes, the local surface plasmon effect is excited.
6. A thin film lithium niobate based high efficiency electro-optic modulator according to claim 1, wherein the optical wave input and the optical wave output are on the same horizontal line.
7. The thin film lithium niobate-based high efficiency electro-optic modulator of claim 1, wherein all comb electrodes are of periodic structure, and the spacing between the comb teeth is equal to or less than the width of the comb teeth.
8. A thin film lithium niobate-based high efficiency electro-optic modulator according to claim 1, wherein all comb electrodes are metallic nanostructures.
9. A method of modulating a thin film lithium niobate-based high efficiency electro-optic modulator, the method being based on a thin film lithium niobate-based high efficiency electro-optic modulator of any of claims 1-7, comprising the steps of:
the light wave enters the optical waveguide and then is split, one beam enters the first Mach-Zehnder electro-optic modulator, and the other beam enters the second Mach-Zehnder electro-optic modulator, wherein the wavelength of the incident light wave is matched with the resonance frequency of the plasmon effect of the comb-shaped electrode;
when light waves are at adjacent comb electrodes of two Mach-Zehnder electro-optic modulators, under the action of an electric field of a signal electrode and a ground electrode, a local surface plasmon effect is excited, an optical field is localized between comb teeth of the adjacent comb electrodes, and the electro-optic coupling efficiency is enhanced;
the light wave is modulated by two Mach-Zehnder electro-optical modulators and then is coupled in a combined way.
10. The method of modulating a thin film lithium niobate-based electro-optic modulator of claim 8, wherein the wavelength of the incident light wave matches the resonance frequency of the plasmon effect of the comb electrode.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158671A (en) * | 1994-09-09 | 1997-09-03 | 狄肯研究公司 | Laser with electrically-controlled grating reflector |
| CN114019703A (en) * | 2021-11-22 | 2022-02-08 | 东南大学 | Thin-film lithium niobate double-parallel electro-optical modulator integrated chip |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158671A (en) * | 1994-09-09 | 1997-09-03 | 狄肯研究公司 | Laser with electrically-controlled grating reflector |
| CN114019703A (en) * | 2021-11-22 | 2022-02-08 | 东南大学 | Thin-film lithium niobate double-parallel electro-optical modulator integrated chip |
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