CN117672941B

CN117672941B - Angle adjusting device and wafer detecting system

Info

Publication number: CN117672941B
Application number: CN202410132005.3A
Authority: CN
Inventors: 刘世文
Original assignee: Shenzhen Senmei Xieer Technology Co ltd
Current assignee: Shenzhen Senmei Xieer Technology Co ltd
Priority date: 2024-01-31
Filing date: 2024-01-31
Publication date: 2024-04-30
Anticipated expiration: 2044-01-31
Also published as: CN117672941A

Abstract

The application relates to an angle adjusting device and a wafer detecting system. The angle adjusting device includes: the device comprises a rotating shaft, a bearing piece, a connecting piece, a transmission mechanism and a mounting seat, wherein the bearing piece is rotationally connected with the rotating shaft and bears a target object; the connecting piece is fixedly connected with the bearing piece and drives the bearing piece to rotate around the rotating shaft; the transmission mechanism comprises a first transmission assembly and a second transmission assembly, and the first transmission assembly is movably connected with the connecting piece and is in sliding connection with the second transmission assembly along a first direction; the mounting seat is used for mounting the transmission mechanism, the second transmission assembly is connected with the mounting seat in a sliding manner along the second direction, the first direction is intersected with the second direction, when the second transmission assembly slides along the second direction, the first transmission assembly is driven to slide along the second direction and push the connecting piece to drive the bearing piece to rotate relative to the rotating shaft, and the first transmission assembly also moves along the direction close to or away from the bearing piece along the first direction relative to the second transmission assembly. The angle adjusting device has lower processing difficulty and lower assembly process requirement.

Description

Angle adjusting device and wafer detecting system

Technical Field

The application relates to the technical field of wafer detection, in particular to an angle adjusting device and a wafer detection system.

Background

In the semiconductor industry, wafer inspection systems are commonly used to inspect the quality and performance of wafers. Before the wafer is inspected, an angle adjusting device is often required to adjust the angle of the wafer so that the wafer rotates to a test position corresponding to the probe, and the probe assembly is convenient for inspecting the wafer. However, how to convert the linear motion into the change of the wafer angle so as to simplify the manufacturing difficulty of the angle adjusting device is a problem to be solved at present.

Disclosure of Invention

In view of this, the present application provides an angle adjusting device and a wafer detecting system, where the requirements of the angle adjusting device for processing difficulty and assembly process are low.

The present application provides an angle adjusting device, comprising: the device comprises a rotating shaft, a bearing piece, a connecting piece, a transmission mechanism and a mounting seat, wherein the bearing piece is rotationally connected with the rotating shaft and is used for bearing a target object; one end of the connecting piece is fixedly connected with the bearing piece and used for driving the bearing piece to rotate around the rotating shaft; the transmission mechanism comprises a first transmission assembly and a second transmission assembly, the first transmission assembly is movably connected with one end of the connecting piece far away from the bearing piece, the first transmission assembly is in sliding connection with the second transmission assembly along a first direction, the second transmission assembly is slidable along a second direction, the first direction is intersected with the second direction, and the first direction is the arrangement direction of the bearing piece, the connecting piece and the transmission mechanism; the mounting seat is used for mounting the transmission mechanism, the second transmission assembly is slidably connected with the mounting seat along a second direction, when the second transmission assembly slides along the second direction, the first transmission assembly is driven to slide along the second direction and push the connecting piece to drive the bearing piece to rotate relative to the rotating shaft, and when the second transmission assembly slides along the second direction, the first transmission assembly also moves relative to the second transmission assembly along a direction of approaching or deviating from the bearing piece along a first direction.

Further, the angle adjusting device further comprises a driving mechanism, the driving mechanism comprises a driving piece, a first guiding piece and a first sliding piece, the driving piece is connected with the first guiding piece and used for driving the first guiding piece to rotate, the first guiding piece extends along a second direction, the first guiding piece is sleeved with the first sliding piece and is in threaded connection with the first sliding piece, and the first sliding piece is connected with the second transmission assembly; when the first guide piece rotates under the drive of the driving piece, the first sliding piece is driven to slide along the second direction, so that the second transmission assembly is driven to slide along the second direction.

Further, the first transmission assembly comprises a rotating base, a plurality of rotating wheels and a ring piece, the rotating base is arranged on one side, deviating from the mounting seat, of the second transmission assembly and is slidably connected with the second transmission assembly along a first direction, the rotating wheels are arranged on one side, deviating from the second transmission assembly, of the rotating base at intervals, each rotating wheel is respectively and rotatably connected with the rotating base, the rotating wheels encircle to form a mounting space, the ring piece is mounted in the mounting space, the rotating wheels respectively support against the ring piece, so that the ring piece is mounted on the rotating base, and one side, deviating from the rotating base, of the ring piece is fixedly connected with one end, deviating from the bearing piece, of the connecting piece; when the second transmission assembly moves along the second direction, the rotating base is driven to move along the second direction, so that the connecting piece is pushed to drive the bearing piece to rotate, the ring piece rotates relative to the rotating base, the rotating wheels are driven to rotate relative to the rotating base, and the rotating base also moves along the first direction relative to the second transmission assembly.

Further, the rotating base is provided with a plurality of penetrating holes, the first transmission assembly further comprises a plurality of penetrating pieces, each penetrating piece is respectively penetrated in one penetrating hole and partially protrudes out of one side of the rotating base, which is away from the second transmission assembly, each rotating wheel is respectively rotatably sleeved on one penetrating piece, and different rotating wheels are rotatably sleeved on different penetrating pieces.

Further, the rotating base comprises a first part, a second part and a connecting part which are oppositely arranged, the first part comprises a first end and a second end which are oppositely arranged, the second part comprises a third end and a fourth end which are oppositely arranged, the first end is oppositely arranged with the third end, the second end is oppositely arranged with the fourth end, the connecting part is positioned between the first part and the second part and is respectively connected with the first part and the second part, the connecting part is positioned between the first end and the second end, and the connecting part is also positioned between the third end and the fourth end; the number of the rotating wheels is four, and the four rotating wheels are respectively arranged at the first end, the second end, the third end and the fourth end; the first transmission assembly further comprises a first locking piece and a second locking piece, the first locking piece is respectively connected with the first end and the third end and used for adjusting the distance between the first end and the third end, the second locking piece is respectively connected with the second end and the fourth end and used for adjusting the distance between the second end and the fourth end, and the distance between the rotating wheels is adjusted by the cooperation of the first locking piece and the second locking piece, so that the size of the installation space enclosed by the rotating wheels is adjusted, and the rotating wheels are made to be tightly attached to the ring piece.

Further, the first transmission assembly further comprises a second sliding piece, and the second sliding piece is arranged on one side, away from the circular ring piece, of the rotating base; the second transmission assembly comprises a second guide piece, a connecting piece and a third sliding piece which are sequentially connected, the second guide piece is arranged on one side, facing the rotating base, of the connecting piece, the second guide piece extends along a first direction, and the connecting piece is connected with the first sliding piece; the third sliding piece is arranged on one side of the connecting piece facing the mounting seat, and the second sliding piece is connected with the second guide piece in a sliding manner along the first direction; the mounting seat is provided with a third guide piece, the third guide piece extends along the second direction and is arranged at intervals with the first guide piece, and the third sliding piece is connected with the third guide piece in a sliding mode along the second direction.

Further, the angle adjusting device further comprises a belt wheel assembly, the belt wheel assembly comprises a first belt wheel, a second belt wheel and a synchronous belt, the first belt wheel is sleeved on the periphery of the output shaft of the driving piece, the second belt wheel is sleeved on the periphery of the first guiding piece, and the synchronous belt is sleeved on the first belt wheel and the second belt wheel respectively; when the driving piece is started, the first belt wheel is driven to rotate, so that the synchronous belt is driven to drive the second belt wheel to rotate, and the first guide piece is driven to rotate; wherein the diameter of the first pulley is smaller than the diameter of the second pulley.

Further, the diameter of the first belt pulley is D1, and the diameter of the second belt pulley is D2, and then the relation is satisfied: D1/D2 is more than or equal to 0.2 and less than 1.

Further, the angle adjusting device further comprises a sensing assembly, wherein the sensing assembly comprises a plurality of sensors and sensing pieces, and the plurality of sensors are arranged at intervals along the second direction; the sensing piece is arranged on the first sliding piece, and the plurality of sensors are matched with the sensing piece to detect the relative position of the first sliding piece along the second direction.

The application also provides a wafer detection system, which comprises: the bearing piece of the angle adjusting device is used for bearing a target object; the probe assembly is used for detecting the target object.

In the application, the mounting seat is used for bearing the transmission mechanism and is arranged at intervals with the rotating shaft, the bearing piece and the connecting piece, when the opposite two ends of the connecting piece are respectively connected with the bearing piece and the transmission mechanism, the connecting piece can drive the bearing piece to rotate around the rotating shaft under the drive of the transmission mechanism, so that the angle of a target object borne on the bearing piece is adjusted. Specifically, when the second transmission component slides along the second direction, the first transmission component moves along the second direction under the drive of the second transmission component, in the angle adjusting device provided by the application, the positions of the rotating shaft and the mounting seat are fixed, so that the first transmission component moves along the second direction and is in sliding connection with the second transmission component along the first direction under the restriction of the rotating shaft and the mounting seat, and in addition, the first transmission component can push the connecting piece to drive the bearing piece to rotate relative to the rotating shaft, so that the angle of the bearing piece is adjusted, and finally the angle of a target object borne on the bearing piece is adjusted. Further, in the process that the second transmission assembly slides along the second direction, the included angle between the first direction and the second direction is continuously changed. When the included angle between the first direction and the second direction is a right angle, the distance between the first transmission component and the bearing piece is the largest. When the included angle between the first direction and the second direction is an acute angle and is continuously increased, the first transmission assembly moves towards the direction approaching to the bearing piece along the first direction relative to the second transmission assembly; when the included angle between the first direction and the second direction is an acute angle and continuously decreases, the first transmission assembly moves along the first direction towards the direction away from the bearing piece relative to the second transmission assembly. According to the angle adjusting device provided by the application, through the movement of the second transmission component in the second direction, the movement of the first transmission component in the first direction and the second direction, and the movable connection of the connecting piece and the second transmission component, the angle adjustment of the bearing piece and the target object is realized through the conversion of simple linear movement into the rotation of the bearing piece. Compared with the scheme of setting up arc track in order to realize the rotation of carrier, this scheme need not to set up arc track, angle adjusting device's the processing degree of difficulty and the requirement of assembly process are lower, correspondingly, angle adjusting device's processing cost and equipment cost are also lower.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of an angle adjusting device according to an embodiment of the application;

FIG. 2 is a schematic diagram illustrating a matching relationship between an angle adjusting device and a target object according to an embodiment of the present application;

FIG. 3 is a schematic view of an angle adjusting device according to another embodiment of the present application;

FIG. 4 is a schematic side view of an angle adjusting device according to another embodiment of the present application;

FIG. 5 is a schematic view of a first transmission assembly according to an embodiment of the present application;

FIG. 6 is a schematic diagram of an exploded view of a first transmission assembly according to an embodiment of the present application;

FIG. 7 is a schematic view of a partially exploded view of a first transmission assembly according to an embodiment of the present application;

FIG. 8 is a schematic view of a rotating base according to an embodiment of the present application;

FIG. 9 is an exploded view of an angle adjusting device according to an embodiment of the present application

FIG. 10 is an enlarged view of the dashed box B in FIG. 9;

FIG. 11 is an enlarged view of the dashed box of FIG. 2A;

Fig. 12 is a schematic diagram illustrating an assembly structure of a wafer inspection system and a target object according to an embodiment of the application.

Reference numerals illustrate:

100-angle adjusting device, 110-rotating shaft, 120-bearing member, 130-connecting member, 140-transmission mechanism, 150-first transmission component, 151-rotating base, 1511-penetrating hole, 1512-first portion, 15121-first end, 15122-second end, 15123-first screw hole, 15124-second screw hole, 1513-second portion, 15131-third end, 15132-fourth end, 15133-third screw hole, 15134-fourth screw hole, 1514-connecting portion, 1515-first through groove, 1516-second through groove, 152-rotating wheel, 153-circular ring member, 154-installation space, 155-penetrating member, 156-first locking member, 157-second locking member, 158-second sliding member, 160-second transmission assembly, 161-second guide member, 162-engagement member, 163-third sliding member, 170-mount, 171-third guide member, 180-drive mechanism, 181-drive member, 182-first guide member, 183-first sliding member, 190-pulley assembly, 191-first pulley, 192-second pulley, 193-timing belt, 210-sensing assembly, 211-sensor, 212-sensing plate, 300-wafer inspection system, 310-probe assembly, 400-target object.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without any inventive effort, are intended to be within the scope of the application.

The terms first, second and the like in the description and in the claims and in the above-described figures are used for distinguishing between different objects and not necessarily for describing a sequential or chronological order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" or "implementation" means that a particular feature, structure, or characteristic described in connection with the embodiment or implementation may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

A wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular in shape; various circuit element structures can be fabricated on silicon wafers to become electronic devices with specific electrical functions. In the semiconductor industry, wafer inspection systems are commonly used to inspect the quality and performance of wafers. Before the wafer is inspected, an angle adjusting device is often required to adjust the angle of the wafer so that the wafer rotates to a test position corresponding to the probe, and the probe assembly is convenient for inspecting the wafer. However, how to convert the linear motion into the change of the wafer angle so as to simplify the manufacturing difficulty of the angle adjusting device is a problem to be solved at present.

In addition, in the angle adjusting device, a bearing is often used to achieve rotation, but a clearance must exist between the bearing outer race and the inner balls. In some schemes, the swing arm is connected with a turntable for bearing the wafer, the screw rod is in linear motion to drive the swing arm to rotate, if a bearing is adopted by the rotation center, the screw rod is in linear motion to directly run through a gap of the bearing at first, and then the swing arm is driven to rotate, so that the turntable cannot rotate to a target position, namely the wafer cannot be accurately rotated to the target position, and then the angle adjusting device has lower accuracy in angle adjustment of the wafer.

Referring to fig. 1 to 4, an embodiment of the present application provides an angle adjusting device 100, where the angle adjusting device 100 includes: the device comprises a rotating shaft 110, a bearing piece 120, a connecting piece 130, a transmission mechanism 140 and a mounting seat 170, wherein the bearing piece 120 is rotationally connected with the rotating shaft 110 and is used for bearing a target object 400; one end of the connecting piece 130 is fixedly connected to the bearing piece 120, and is used for driving the bearing piece 120 to rotate around the rotating shaft 110; the transmission mechanism 140 includes a first transmission assembly 150 and a second transmission assembly 160, the first transmission assembly 150 is movably connected to one end of the connecting member 130 away from the carrier 120, the first transmission assembly 150 is slidably connected to the second transmission assembly 160 along a first direction (as shown in an X direction in fig. 1), the second transmission assembly 160 is slidably connected along a second direction (as shown in a Y direction in fig. 1), wherein the first direction intersects with the second direction, and the first direction is an arrangement direction of the carrier 120, the connecting member 130 and the transmission mechanism 140; the mounting seat 170 is used for mounting the transmission mechanism 140, the second transmission assembly 160 is slidably connected with the mounting seat 170 along a second direction, when the second transmission assembly 160 slides along the second direction, the first transmission assembly 150 is driven to slide along the second direction and the connecting piece 130 is pushed to drive the bearing piece 120 to rotate relative to the rotating shaft 110, and when the second transmission assembly 160 slides along the second direction, the first transmission assembly 150 also moves relative to the second transmission assembly 160 along a first direction towards a direction approaching or departing from the bearing piece 120.

Optionally, in some embodiments, the target object 400 is a wafer.

It will be appreciated that the position of the shaft 110 and the mounting base 170 is fixed.

It may be appreciated that the carrier 120 is rotatably connected to the rotating shaft 110, and the carrier 120 may rotate around the rotating shaft 110 to rotate the target object 400 supported by the carrier 120.

It will be appreciated that opposite ends of the connecting member 130 are respectively connected to the carrier 120 and the first transmission assembly 150.

It may be appreciated that the first transmission assembly 150 is movably connected to the end of the connecting member 130 away from the carrier 120, and the relative position between the end of the connecting member 130 away from the carrier 120 and the first transmission assembly 150 may be changed to accommodate the rotation of the carrier 120 relative to the rotating shaft 110.

As can be appreciated, the first direction is the arrangement direction of the carrier 120, the connecting member 130 and the transmission mechanism 140, and the first direction is unchanged during the movement of the transmission mechanism 140; the second direction is the direction in which the second transmission assembly 160 is slidably connected to the mounting seat 170, and the position of the mounting seat 170 is fixed, so that the second direction is unchanged during the movement of the transmission mechanism 140.

Optionally, in some embodiments, the first direction is perpendicular to the second direction.

In this embodiment, the mounting seat 170 is configured to carry the driving mechanism 140 and is disposed at intervals with the rotating shaft 110, the carrying member 120, and the connecting member 130, and when opposite ends of the connecting member 130 are respectively connected to the carrying member 120 and the driving mechanism 140, the connecting member 130 may drive the carrying member 120 to rotate around the rotating shaft 110 under the driving of the driving mechanism 140, so as to implement adjustment of an angle of the target object 400 carried on the carrying member 120. Specifically, when the second transmission assembly 160 slides along the second direction, the first transmission assembly 150 is driven by the second transmission assembly 160 to move along the second direction, in the angle adjusting device 100 of the present application, the positions of the rotating shaft 110 and the mounting seat 170 are fixed, so that the first transmission assembly 150 moves along the second direction while being slidingly connected with the second transmission assembly 160 along the first direction under the restriction of the rotating shaft 110 and the mounting seat 170, and in addition, the first transmission assembly 150 pushes the connecting member 130 to drive the bearing member 120 to rotate relative to the rotating shaft 110, so as to adjust the angle of the bearing member 120, and finally, adjust the angle of the target object 400 borne on the bearing member 120. Further, during the sliding of the second transmission assembly 160 along the second direction, the angle between the extending direction of the connecting member 130 and the second direction is continuously changed. When the extending direction of the connecting member 130 is at a right angle to the second direction, in other words, the extending direction of the connecting member 130 is parallel to the first direction; the distance between the first transmission assembly 150 and the carrier 120 is maximized in the first direction. When the included angle between the extending direction of the connecting member 130 and the second direction is an acute angle and increases continuously, the first transmission assembly 150 moves along the first direction toward the direction approaching the carrier 120 relative to the second transmission assembly 160; when the angle between the extending direction of the connecting member 130 and the second direction is acute and decreases continuously, the first transmission assembly 150 moves relative to the second transmission assembly 160 along the first direction toward the direction away from the carrier 120. In the angle adjusting device 100 provided in the embodiment of the present application, the movement of the second transmission assembly 160 in the second direction, the movement of the first transmission assembly 150 in the first direction and the second direction, and the movable connection between the connecting piece 130 and the second transmission assembly 160 are converted into the rotation of the carrier 120 through simple linear movement, so that the angle adjustment of the carrier 120 and the target object 400 is realized. Compared with the scheme of setting the arc track to realize the rotation of the bearing member 120, the scheme does not need to set the arc track, the requirements of the angle adjusting device 100 on the processing difficulty and the assembly process are lower, and correspondingly, the processing cost and the assembly cost of the angle adjusting device 100 are lower.

It can be understood that the embodiment of fig. 1, the embodiment of fig. 3, and the embodiment of fig. 4 of the present application are schematic views of the angle adjusting device 100 adjusting the carrier 120 to different angles.

Optionally, an angle between the extending direction of the connecting member 130 and the first direction is less than or equal to 6 °. In other words, by moving the second transmission assembly 160 in the second direction, the first transmission assembly 150 moves in the first direction and the second direction, and the connecting member 130 is movably connected with the second transmission assembly 160, an angle of rotating the carrier 120 clockwise with respect to the rotating shaft 110 is less than or equal to 6 ° or an angle of rotating counterclockwise with respect to the rotating shaft 110 is less than or equal to 6 °.

In some embodiments, the angle adjusting device 100 further includes a driving mechanism 180, where the driving mechanism 180 includes a driving member 181, a first guiding member 182, and a first sliding member 183, where the driving member 181 is connected to the first guiding member 182 and is used to drive the first guiding member 182 to rotate, the first guiding member 182 extends along a second direction, and the first guiding member 182 is sleeved with the first sliding member 183 and is in threaded connection with the first sliding member 183, and the first sliding member 183 is connected to the second transmission assembly 160; when the first guiding element 182 is driven by the driving element 181 to rotate, the first sliding element 183 is driven to slide along the second direction, so as to drive the second transmission assembly 160 to slide along the second direction.

It will be appreciated that the first guide 182 is threadedly coupled to the first slider 183, and that the first guide 182 may have external threads and the first slider 183 may have internal threads, and that the external threads and the internal threads may engage with each other when the first guide 182 is rotated by the driving member 181, so as to enable the first slider 183 to move in a second direction relative to the first guide 182.

In this embodiment, the driving member 181 provides power to the first guiding member 182, so that the first guiding member 182 rotates, and the first sliding member 183 sleeved on the first guiding member 182 slides along the second direction, so as to drive the second transmission assembly 160 to move along the second direction. Further, due to the limitation of the rotating shaft 110 and the mounting seat 170, the second transmission assembly 160 is slidably connected with the second transmission assembly 160 along the first direction while moving along the second direction, and in addition, the first transmission assembly 150 pushes the connecting member 130 to drive the bearing member 120 to rotate relative to the rotating shaft 110, so as to adjust the angle of the bearing member 120, and finally, adjust the angle of the target object 400 borne on the bearing member 120. The driving member 181 of the present embodiment provides power for the sliding of the first sliding member 183, the movement of the first transmission assembly 150 and the second transmission assembly 160, and finally pushes the carrier 120 to rotate relative to the rotating shaft 110. The first guiding member 182 provided by the application extends along the second direction, and the first sliding member 183 and the second transmission assembly 160 can move along the second direction, which is beneficial to simplifying the processing difficulty of the first guiding member 182 and the processing difficulty of the movement track of the second transmission assembly 160, thereby reducing the processing cost and the assembly cost of the angle adjusting device 100.

Referring to fig. 5 to 7, in some embodiments, the first transmission assembly 150 includes a rotation base 151, a plurality of rotation wheels 152 and a ring member 153, the rotation base 151 is disposed on a side of the second transmission assembly 160 away from the mounting base 170 and is slidably connected to the second transmission assembly 160 along a first direction, the plurality of rotation wheels 152 are disposed on a side of the rotation base 151 away from the second transmission assembly 160 at intervals, each rotation wheel 152 is respectively rotatably connected with the rotation base 151, the plurality of rotation wheels 152 enclose a mounting space 154, the mounting space 154 is used for mounting the ring member 153, the plurality of rotation wheels 152 respectively support the ring member 153, so that the ring member 153 is mounted on the rotation base 151, and a side of the ring member 153 away from the rotation base 151 is fixedly connected with an end of the connecting member 130 away from the bearing member 120; when the second transmission assembly 160 moves along the second direction, the rotating base 151 is driven to move along the second direction, so as to push the connecting member 130 to drive the bearing member 120 to rotate, and the ring member 153 rotates relative to the rotating base 151, and drives the plurality of rotating wheels 152 to rotate relative to the rotating base 151, and the rotating base 151 also moves along the first direction relative to the second transmission assembly 160.

It can be appreciated that in the angle adjusting device 100 provided by the present application, the rotating wheel 152, the rotating base 151, the second transmission assembly 160 and the mounting seat 170 are sequentially disposed.

As can be appreciated, the plurality of rotating wheels 152 enclose an installation space 154, and the installation space 154 is provided with the ring member 153, the ring member 153 may be disposed between the plurality of rotating wheels 152 and respectively abutted against the plurality of rotating wheels 152, so that the ring member 153 is installed on the rotating base 151; it is also possible that a plurality of the rotating wheels 152 are disposed around the outer circumference of the ring member 153, and each of the rotating wheels 152 abuts against a different position of the ring member 153.

In this embodiment, when the second transmission assembly 160 moves along the second direction, the rotating base 151, the rotating wheel 152 and the ring member 153 are driven by the second transmission assembly 160 to move along the second direction, and the rotating base 151 also drives the rotating wheel 152 and the ring member 153 to move along the first direction relative to the second transmission assembly 160 under the limitation of the positions of the rotating shaft 110 and the mounting seat 170, and meanwhile, the connecting member 130 drives the bearing member 120 to rotate relative to the rotating shaft 110, so as to realize the adjustment of the angle of the target object 400 borne on the bearing member 120. When the bearing member 120 rotates relative to the rotating shaft 110, the ring member 153 rotates relative to the rotating base 151 under the driving of the connecting member 130, and rotates relative to the plurality of rotating wheels 152 abutting against the outer periphery of the ring member 153, so as to reduce friction force of the ring member 153 in the rotating process, thereby facilitating to slow down the rotation of the ring member 153 by the rotating wheels 152, avoiding affecting the rotation of the connecting member 130 and the bearing member 120, and further improving the precision of the angle adjustment of the bearing member 120 by the angle adjustment device 100, so as to achieve precise adjustment of the target object 400 to the target position. In this embodiment, compared with directly threading a post on the rotating base 151 to support the ring member 153, the rotating wheel 152 can rotate relative to the rotating base 151, and can rotate relative to the ring member 153 when the ring member 153 rotates, thereby greatly reducing the friction force between the ring member 153 and the connecting member 130 during rotation.

Optionally, the ring member 153 is spaced from the rotating base 151. In other words, in the arrangement direction of the ring 153 and the rotating base 151, a gap exists between the ring 153 and the rotating base 151.

In this embodiment, the ring member 153 is spaced from the rotating base 151, so that the ring member 153 is not in direct contact with the rotating base 151. The ring member 153 is mounted in the mounting space 154 under the supporting action of the rotating wheels 152, and is capable of rotating relative to the rotating wheels 152, when the connecting member 130 drives the bearing member 120 to rotate relative to the rotating shaft 110, the ring member 153 can rotate with the rotating wheels 152 and cannot slide with the rotating base 151 in the process, so that interference of the rotating base 151 to the rotation of the ring member 153 is avoided, the rotation amplitude of the bearing member 120 driven by the connecting member 130 is reduced, and the precision of angle adjustment of the bearing member 120 and the target object 400 borne on the bearing member 120 by the angle adjusting device 100 is improved.

Referring to fig. 7 and 8, in some embodiments, the rotating base 151 has a plurality of through holes 1511, the first transmission assembly 150 further includes a plurality of through members 155, each through member 155 is respectively disposed through one of the through holes 1511 and partially protrudes out of a side of the rotating base 151 facing away from the second transmission assembly 160, each rotating wheel 152 is respectively rotatably disposed on one of the through members 155, and different rotating wheels 152 are rotatably disposed on different through members 155.

It may be appreciated that each penetrating member 155 is respectively disposed through one penetrating hole 1511, and one penetrating hole 1511 may be used to penetrate one penetrating member 155, where the penetrating holes 1511 are in one-to-one correspondence with the penetrating members 155.

It may be appreciated that each of the rotating wheels 152 may be rotatably sleeved on one of the penetrating members 155, and one of the rotating wheels 152 may be sleeved on an outer periphery of one of the penetrating members 155, where the rotating wheels 152 are in one-to-one correspondence with the penetrating members 155.

It will be appreciated that the penetrating member 155 is fixedly coupled to the rotating base 151.

In this embodiment, the penetrating members 155 are in one-to-one correspondence with the penetrating holes 1511, the rotating wheels 152 are in one-to-one correspondence with the penetrating members 155, and when the penetrating members 155 are penetrated in the penetrating holes 1511 and partially protrude out of one side of the rotating base 151 away from the second transmission assembly 160, each penetrating member 155 can serve as an axis of rotation of the rotating wheels 152, so that the rotating wheels 152 can rotate along with the rotation of the ring member 153, the rotation of the rotating wheels 152 to the rotation of the ring member 153 can be slowed down to interfere, so as to avoid affecting the rotation of the connecting member 130 and the bearing member 120, and then the accuracy of the angle adjustment of the bearing member 120 by the angle adjustment device 100 is improved, so as to accurately adjust the target object 400 to the target position. In addition, although there is a certain gap between the rotating wheel 152 and the penetrating member 155, the rotating wheel 152 abuts against the ring member 153, in other words, the ring member 153 abuts against the rotating wheel 152, so that the rotating wheel 152 can also abut against the penetrating member 155. Compared with the solution that the bearing is disposed on the side of the ring member 153 facing the rotating base 151, in the present application, the ring member 153 is tightly abutted against the rotating wheel 152, so as to reduce the gap between the rotating wheel 152 and the penetrating member 155, when the second transmission assembly 160 drives the first transmission assembly 150 to move and push the connecting member 130 to drive the bearing member 120 to rotate relative to the rotating shaft 110, the rotating wheel 152 can immediately rotate relative to the ring member 153 without running through the gap between the rotating wheel 152 and the penetrating member 155, in other words, the reverse gap between the rotating wheel 152 and the penetrating member 155 is substantially eliminated, so that the rotating wheel 152 can respond in time and rotate relative to the ring member 153, thereby improving the accuracy of adjusting the angle of the bearing member 120.

In some embodiments, the rotating base 151 includes a first portion 1512, a second portion 1513 and a connecting portion 1514 disposed opposite to each other, the first portion 1512 includes a first end 15121 and a second end 15122 disposed opposite to each other, the second portion 1513 includes a third end 15131 and a fourth end 15132 disposed opposite to each other, the first end 15121 is disposed opposite to the third end 15131, the second end 15122 is disposed opposite to the fourth end 15132, the connecting portion 1514 is disposed between the first portion 1512 and the second portion 1513 and connects the first portion 1512 and the second portion 1513, respectively, the connecting portion 1514 is disposed between the first end 15121 and the second end 15122, and the connecting portion 1514 is also disposed between the third end 15131 and the fourth end 15132; the number of the rotating wheels 152 is four, and the four rotating wheels 152 are respectively disposed at the first end 15121, the second end 15122, the third end 15131, and the fourth end 15132; the first transmission assembly 150 further includes a first locking member 156 and a second locking member 157, where the first locking member 156 is respectively connected to the first end 15121 and the third end 15131, and is used for adjusting a distance between the first end 15121 and the third end 15131, and the second locking member 157 is respectively connected to the second end 15122 and the fourth end 15132, and is used for adjusting a distance between the second end 15122 and the fourth end 15132, and by matching the first locking member 156 with the second locking member 157, the distance between the four rotating wheels 152 is adjusted, so that the size of the installation space 154 enclosed by the four rotating wheels 152 is adjusted, and the four rotating wheels 152 are all tightly attached to the ring member 153.

It is to be appreciated that the first end 15121 and the third end 15131 are disposed on the same side of the connection portion 1514, and the second end 15122 and the fourth end 15132 are disposed on the same side of the connection portion 1514 away from the first end 15121.

It will be appreciated that the first locking member 156 is configured to adjust the distance between the first end 15121 and the third end 15131, and that the first locking member 156 may be configured to adjust the distance between the rotating wheel 152 disposed through the first end 15121 and the rotating wheel 152 disposed through the third end 15131.

It will be appreciated that the second locking member 157 is configured to adjust the distance between the second end 15122 and the fourth end 15132, and the second locking member 157 may be configured to adjust the distance between the rotating wheel 152 passing through the second end 15122 and the rotating wheel 152 passing through the fourth end 15132.

In this embodiment, the number of the rotating wheels 152 is four, and the four rotating wheels 152 are respectively disposed through the first end 15121, the second end 15122, the third end 15131 and the fourth end 15132, and the first locking member 156 can adjust the distance between the first end 15121 and the third end 15131, so that the first locking member 156 can adjust the distance between the rotating wheel 152 disposed through the first end 15121 and the rotating wheel 152 disposed through the third end 15131; the second locking member 157 may adjust the distance between the second end 15122 and the fourth end 15132, so that the second locking member 157 may adjust the distance between the rotating wheel 152 passing through the second end 15122 and the rotating wheel 152 passing through the fourth end 15132. In the assembly process of the angle adjusting device 100, the rotating wheel 152 is inserted through the rotating base 151, and then the ring member 153 is mounted in the mounting space 154 surrounded by the rotating wheel 152, further, the distance between the first end 15121 and the third end 15131 is shortened by the first locking member 156, and the distance between the second end 15122 and the fourth end 15132 is shortened by the second locking member 157, so that the size of the mounting space 154 surrounded by the four rotating wheels 152 is reduced, and therefore, the four rotating wheels 152 respectively support the ring member 153 from different areas, so that the rotating wheels 152 are all closely attached to the ring member 153. In this embodiment, on the one hand, the size of the installation space 154 enclosed by the four rotating wheels 152 is adjustable, so that the assembly of the ring member 153 and the rotating base 151 is facilitated, thereby reducing the assembly difficulty of the angle adjusting device 100. On the other hand, by the mutual cooperation of the first locking member 156, the second locking member 157 and the rotating base 151, the size of the installation space 154 enclosed by the four rotating wheels 152 is reduced, so that the rotating wheels 152 are tightly attached to the ring member 153, and then the rotating wheels 152 are tightly attached to the penetrating member 155. When the connecting member 130 drives the carrier 120 to rotate relative to the rotating shaft 110, the rotating wheel 152 can immediately rotate relative to the ring member 153 without having to walk through the gap between the rotating wheel 152 and the penetrating member 155, in other words, the reverse gap between the rotating wheel 152 and the penetrating member 155 is substantially eliminated, so that the rotating wheel 152 can respond in time and rotate relative to the ring member 153, thereby improving the accuracy of adjusting the angle of the carrier 120.

Optionally, the first end 15121, the connecting portion 1514, and the third end 15131 enclose a first through slot 1515, and the first through slot 1515 penetrates through the surface of the rotating base 151 facing the ring member 153 and the surface facing away from the ring member 153; the second end 15122, the connecting portion 1514 and the fourth end 15132 are surrounded by a second through groove 1516, and the second through groove 1516 penetrates through the surface of the rotating base 151 facing the ring member 153 and the surface facing away from the ring member 153.

In this embodiment, the first end 15121, the connecting portion 1514 and the third end 15131 are surrounded to form the first through groove 1515, and the second end 15122, the connecting portion 1514 and the fourth end 15132 are surrounded to form the second through groove 1516, in other words, a first through groove 1515 and a second through groove 1516 are disposed between the first portion 1512 and the second portion 1513 at intervals. The first through groove 1515 enables the distance between the first end 15121 and the third end 15131 to be adjustable, and the second through groove 1516 enables the distance between the second end 15122 and the fourth end 15132 to be adjustable, so as to adjust the size of the installation space 154 surrounded by the rotating wheel 152. Further, under the cooperation of the first locking member 156 and the second locking member 157, the rotating wheel 152 and the ring member 153 may be tightly attached to each other, so as to reduce the gap between the rotating wheel 152 and the penetrating member 155, and then substantially eliminate the reverse gap between the rotating wheel 152 and the penetrating member 155 during rotation, which is beneficial to improving the accuracy of the angle adjustment of the bearing member 120 by the angle adjustment device 100.

Optionally, in some embodiments, the first locking member 156 and the second locking member 157 are screws, in the arrangement direction of the first portion 1512 and the second portion 1513, the first portion 1512 has a first screw hole 15123 penetrating the first end 15121 and a second screw hole 15124 penetrating the second end 15122, a surface of the second portion 1513 facing the first portion 1512 has a third screw hole 15133 and a fourth screw hole 15134, the first screw hole 15123 is communicated with the third screw hole 15133, the first locking member 156 sequentially penetrates through the first screw hole 15123 and the third screw hole 15133, and when the screws are screwed in a direction approaching to the second portion 1513, a distance between the first end 15121 and the third end 15131 can be reduced; the second screw hole 15124 is communicated with the fourth screw hole 15134, the second locking member 157 sequentially penetrates through the second screw hole 15124 and the fourth screw hole 15134, when the screw is screwed down towards the direction close to the second portion 1513, the distance between the second end 15122 and the fourth end 15132 can be reduced, and finally, the adjustment of the installation space 154 surrounded by the rotating wheel 152 is realized.

Optionally, in some embodiments, the material of the rotating base 151 is selected from 304 stainless steel, and the rotating base 151 has a certain elasticity.

Referring to fig. 9 and 10, in some embodiments, the first transmission assembly 150 further includes a second sliding member 158, where the second sliding member 158 is disposed on a side of the rotating base 151 facing away from the ring member 153; the second transmission assembly 160 includes a second guiding member 161, a linking member 162 and a third sliding member 163 connected in sequence, where the second guiding member 161 is disposed on a side of the linking member 162 facing the rotating base 151, and the second guiding member 161 extends along a first direction, and the linking member 162 is connected to the first sliding member 183; the third sliding member 163 is disposed on a side of the engaging member 162 facing the mounting seat 170, and the second sliding member 158 is slidably connected to the second guiding member 161 along the first direction; the mounting seat 170 has a third guide member 171, the third guide member 171 extends along the second direction and is spaced from the first guide member 182, and the third slider 163 is slidably connected to the third guide member 171 along the second direction.

It may be appreciated that the second sliding member 158 is disposed on a side of the rotating base 151 away from the ring member 153, and the second sliding member 158 may be disposed before the second transmission assembly 160 and the rotating base 151, where the rotating base 151 is slidably connected to the second transmission assembly 160 through the second sliding member 158.

As can be appreciated, in the angle adjusting device 100, the ring member 153, the rotating base 151, the second sliding member 158, the second guiding member 161, the engaging member 162, the third sliding member 163, the third guiding member 171, and the mounting seat 170 are sequentially arranged.

In this embodiment, when the driving member 181 drives the first sliding member 183 to slidingly connect with the first guiding member 182 along the second direction, the engaging member 162 is connected with the first sliding member 183 and drives the third sliding member 163 to slidingly connect with the third guiding member 171 along the second direction under the driving of the first sliding member 183, so as to drive the second transmission assembly 160 to move along the second direction. Under the limitation of the rotating shaft 110 and the mounting seat 170, the mounting base is slidably connected with the second guide member 161 along the first direction through the second slide member 158, so as to realize the movement of the mounting base in the first direction, and simultaneously drive the rotation of the ring member 153 and the rotation wheel 152, so as to realize the adjustment of the angles of the bearing member 120 and the target object 400 borne on the bearing member 120. In the embodiment of the present application, the first direction is a straight direction, the second direction is a straight direction, and by moving the second transmission assembly 160 in the second direction, the first transmission assembly 150 moves in the first direction and the second direction, and the ring member 153 rotates with the rotating wheel 152, the bearing member 120 rotates relative to the rotating shaft 110, and finally, the angle of the target object 400 borne on the bearing member 120 is adjusted. Compared with the scheme of arranging the arc-shaped track to realize the rotation of the bearing piece 120, the scheme does not need to arrange the arc-shaped track, which is favorable for reducing the processing difficulty of the angle adjusting device 100 and the requirement of the assembly process, thereby reducing the processing cost and the assembly cost of the angle adjusting device 100.

In some embodiments, the angle adjusting device 100 further includes a pulley assembly 190, the pulley assembly 190 includes a first pulley 191, a second pulley 192, and a timing belt 193, the first pulley 191 is sleeved on the outer circumference of the output shaft of the driving member 181, the second pulley 192 is sleeved on the outer circumference of the first guiding member 182, and the timing belt 193 is sleeved on the first pulley 191 and the second pulley 192, respectively; when the driving member 181 is turned on, the first pulley 191 is driven to rotate, so as to drive the synchronous belt 193 to drive the second pulley 192 to rotate, and further drive the first guiding member 182 to rotate; wherein the diameter of the first pulley 191 is smaller than the diameter of the second pulley 192.

As can be appreciated, the timing belt 193 is respectively sleeved on a part of the outer circumference of the first pulley 191 and a part of the outer circumference of the second pulley 192.

In this embodiment, the pulley assembly 190 includes a first pulley 191, a second pulley 192, and a timing belt 193, and the first pulley 191 is sleeved on the outer periphery of the output shaft of the driving member 181, so that the first pulley 191 is driven to rotate when the driving member 181 is driven. Further, the first pulley 191 and the timing belt 193 generate sliding friction, so that the timing belt 193 moves relative to the first pulley 191, and then drives the second pulley 192 to rotate. Still further, the second pulley 192 is sleeved on the outer periphery of the first guide member 182, and then the second pulley 192 drives the first guide member 182 to rotate, so as to finally realize the sliding of the first sliding member 183, the second transmission assembly 160 and the first transmission assembly 150 along the second direction. If the first guiding element 182 is directly disposed on the power output shaft of the driving element 181, when the driving element 181 drives the first guiding element 182 to rotate one turn, the distance that the first transmission assembly 150 and the second transmission assembly 160 move along the second direction is L1, the distance that the second transmission assembly 160 moves relative to the first transmission assembly 150 in the first direction is L2, and then the rotation angle of the bearing element 120 relative to the rotating shaft 110 is α. In the embodiment of the present application, the first guide 182 rotates synchronously with the second pulley 192, and the diameter of the first pulley 191 is smaller than the diameter of the second pulley 192. When the driving member 181 drives the first pulley 191 to rotate one turn, the number of turns of the second pulley 192 driven by the timing belt 193 is smaller than one turn, the distance between the first transmission assembly 150 and the second transmission assembly 160 moving along the second direction is smaller than L1, the distance between the second transmission assembly 160 moving along the first direction relative to the first transmission assembly 150 is smaller than L2, and then the rotation angle of the carrier 120 relative to the rotating shaft 110 is smaller than α. By providing the pulley assembly 190, the minimum rotation angle of the carrier 120 relative to the rotating shaft 110 may be reduced, so that when the angle of the target object 400 needs to be finely adjusted, the angles of the carrier 120 and the target object 400 may be slightly adjusted, and then the precision of the angle adjustment device 100 for adjusting the angles of the carrier 120 and the target object 400 carried on the carrier 120 may be improved.

It will be appreciated that L1, L2 and α are certain specific values. The present disclosure recites L1, L2, and α to illustrate the difference between the placement of the pulley assembly 190 and the absence of the pulley assembly 190 to adjust the rotational angle of the carrier 120 relative to the shaft 110, under otherwise identical conditions.

Optionally, in some embodiments, the value of L1 satisfies the range: l1 is less than or equal to 1.5mm and less than or equal to 3mm. Specifically, the value of L1 may be, but is not limited to, 1.5mm、1.55mm、1.6mm、1.65mm、1.7mm、1.75mm、1.8mm、1.85mm、1.9mm、1.95mm、2mm、2.05mm、2.1mm、2.15mm、2.2mm、2.25mm and 3mm, etc.

Optionally, in some embodiments, the value of L2 satisfies the range: l1 is more than or equal to 0.08mm and less than or equal to 0.12mm. Specifically, the value of L2 may be, but is not limited to, 0.08mm, 0.085mm, 0.09mm, 0.095mm, 0.1mm, 0.105mm, 0.11mm, 0.115mm, 0.12mm, and the like.

Optionally, in some embodiments, the value of α satisfies the range: alpha is more than or equal to 0.40 degrees and less than or equal to 0.55 degrees. Specifically, the value of L1 may be, but is not limited to, 0.40 °, 0.405 °, 0.41 °, 0.42 °, 0.43 °, 0.44 °, 0.45 °, 0.46 °, 0.47 °, 0.48 °, 0.49 °, 0.5 °, 0.51 °, 0.52 °, 0.53 °, 0.54 °, 0.55 °, and the like.

Optionally, in a specific embodiment, when the extending direction of the connecting member 130 is parallel to the first direction, an angle between the extending direction of the connecting member 130 and the second direction is a right angle, and the angle of the carrier 120 is set to be 0 °; when the included angle between the extending direction of the connecting member 130 and the second direction is an acute angle and continuously decreases, the first transmission assembly 150 and the second transmission assembly 160 move along the second direction, and the first transmission assembly 150 moves along the first direction relative to the second transmission assembly 160. When the first transmission assembly 150 and the second transmission assembly 160 move from one end to the other end of the first guide 182, the angle between the extending direction of the connecting member 130 and the second direction increases and decreases, and during the whole process, the first transmission assembly 150 and the second transmission assembly 160 move 49.96mm along the second direction, the first transmission assembly 150 moves 1.31mm along the first direction relative to the second transmission assembly 160, and the angle of the bearing member 120 increases from-6 ° to 0 °, and then continues to increase to 6 °. In other words, when the first transmission assembly 150 and the second transmission assembly 160 are located at two opposite ends of the first guide 182, the angle of the carrier 120 is-6 ° and 6 °, respectively.

Referring to fig. 11, in some embodiments, the first pulley 191 has a diameter D1, and the second pulley 192 has a diameter D2, and then the relationship is satisfied: D1/D2 is more than or equal to 0.2 and less than 1.

Specifically, the value of D1/D2 may be, but is not limited to, 0.2, 0.25, 0.3, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.8, 0.85, 0.9, 0.94, 0.98, etc.

In the present embodiment, when the diameters of the first pulley 191 and the second pulley 192 satisfy the relation 0.2. Ltoreq.D1/D2 < 1, the diameters of the first pulley 191 and the second pulley 192 are within a reasonable range. When the driving member 181 drives the first belt pulley 191 to rotate, the second belt pulley 192 is driven by the synchronous belt 193 to rotate at an angle smaller than that of the first belt pulley 191 and within a reasonable range, which is beneficial to reducing the minimum rotation angle of the bearing member 120 relative to the rotating shaft 110, and improving the precision of the angle adjustment device 100 in adjusting the bearing member 120 and the target object 400 borne by the bearing member 120; it is also possible to avoid the diameter of the second pulley 192 from being too large to reduce the efficiency of the angle adjustment of the carrier 120 and the target object 400, in other words, the angle adjustment device 100 has high accuracy and high efficiency of the angle adjustment of the target object 400. When the value of D1/D2 is greater than or equal to 1, then the diameter of the first sheave 191 is greater than or equal to the diameter of the second sheave 192. On the one hand, when the driving member 181 drives the first pulley 191 to rotate, the second pulley 192 rotates by a large angle under the driving of the timing belt 193, so that the minimum angle for rotating the carrier 120 relative to the rotating shaft 110 is increased, and the accuracy of adjusting the angle of the carrier 120 and the target object 400 carried on the carrier 120 by the angle adjusting device 100 is reduced. When the value of D1/D2 is smaller than 0.2, the diameter of the first pulley 191 is too small or the diameter of the second pulley 192 is too large, on the one hand, when the driving member 181 drives the first pulley 191 to rotate, the angle of rotation of the second pulley 192 driven by the synchronous belt 193 is small, so that the moving range of the first sliding member 183, the second transmission assembly 160 and the first transmission assembly 150 in the second direction is small, and then the moving distance of the second transmission assembly 160 in the first direction and the rotating angle of the bearing member 120 and the target object 400 relative to the rotating shaft 110 are reduced, which reduces the efficiency of the angle adjusting device 100 for adjusting the target object 400. On the other hand, the second pulley 192 having an excessively large diameter occupies an excessively large space of the angle adjusting device 100, which is disadvantageous in a miniaturized design of the angle adjusting device 100.

Preferably, the D1/D2 satisfies the range of 0.2.ltoreq.D1/D2.ltoreq.0.5. When D1/D2 satisfies the range 0.2-D1/D2-0.5, the diameter of the first pulley 191 and the diameter of the second pulley 192 are within a preferred range, and when the driving member 181 drives the first pulley 191 to rotate, the angle of rotation of the second pulley 192 driven by the synchronous belt 193 is smaller than the angle of rotation of the first pulley 191 and within a preferred range, which is not only beneficial to reducing the minimum angle of rotation of the carrier 120 relative to the rotating shaft 110, but also greatly improves the precision of the angle adjustment device 100 for adjusting the angle of the carrier 120 and the target object 400 carried on the carrier 120; it is also possible to avoid that the diameter of the second pulley 192 is too large to reduce the efficiency of the angle adjustment of the carrier 120 and the target object 400, in other words, the angle adjustment device 100 has high accuracy and high efficiency of the angle adjustment of the target object 400.

Alternatively, the diameter D1 of the first pulley 191 may range from: d1 is more than or equal to 13.4mm and less than or equal to 47.8mm. Specifically, the diameter D1 of the first pulley 191 may be, but is not limited to, 13.4mm、16mm、18mm、20mm、22.25mm、24mm、26mm、28mm、29mm、30mm、34mm、36mm、37mm、38mm、40mm、42mm、43mm、45mm、46mm、47mm mm, 47.8mm, etc.

Optionally, the diameter D2 of the second pulley 192 ranges from: d2 is less than or equal to 26.7mm and less than or equal to 238mm. Specifically, the diameter D2 of the second pulley 192 may have a value of, but not limited to 26.7mm、28mm、32mm、36mm、48mm、55mm、65mm、78mm、80mm、95mm、108mm、115mm、145mm、165mm、187mm、188mm、195mm、200mm、210mm、220mm、230mm、235mm and 238mm.

In some embodiments, the angle adjustment device 100 further includes a sensing assembly 210, where the sensing assembly 210 includes a plurality of sensors 211 and a sensing piece 212, and the plurality of sensors 211 are spaced along the second direction; the sensing piece 212 is disposed on the first slider 183, and the plurality of sensors 211 are matched with the sensing piece 212 to detect the relative position of the first slider 183 along the second direction.

In this embodiment, the plurality of sensors 211 are disposed at intervals along the second direction, and the sensing piece 212 is disposed on the first slider 183, when the first slider 183 slides along the second direction, the sensing piece 212 is driven to move along the second direction, so that the plurality of sensors 211 can cooperate with each other to detect the relative position of the first slider 183 along the second direction, thereby realizing measurement of the moving distance of the second transmission assembly 160 and the first transmission assembly 150 in the second direction, and finally realizing detection of the rotating angle of the carrier 120, so that an operator can control the sliding distance of the first slider 183 and the rotating angle of the carrier 120.

Optionally, the adjustment error value of the angle adjustment device 100 on the rotation angle of the carrier 120 relative to the rotation shaft 110 is less than 0.0001 °. In other words, the angle adjusting device 100 has high accuracy in adjusting the rotation angle of the carrier 120 relative to the rotating shaft 110.

Referring to fig. 12, an embodiment of the present application further provides a wafer inspection system 300, where the wafer inspection system 300 includes: the application provides an angle adjusting device 100 and a probe assembly 310, wherein a bearing piece 120 of the angle adjusting device 100 is used for bearing a target object 400; the probe assembly 310 is used to detect the target object 400.

Optionally, in some embodiments, the target object 400 is a wafer.

In this embodiment, the angle adjusting device 100 does not need to provide an arc track, so that the carrier 120 can rotate relative to the rotating shaft 110, and the requirements of the angle adjusting device 100 on processing difficulty and assembly process are low, and accordingly, the processing cost and assembly cost of the angle adjusting device 100 are low, so that when the angle adjusting device 100 is applied to the wafer detecting system 300, the assembly cost and the processing cost of the wafer detecting system 300 are reduced. In addition, the angle adjusting device 100 has higher accuracy in adjusting the angles of the carrier 120 and the target object 400 carried on the carrier 120, which is favorable for accurately adjusting the target object 400 to a target position, thereby realizing the detection of the target object 400 by the probe assembly 310 and improving the accuracy of the detection of the target object 400 by the probe assembly 310.

Optionally, the wafer inspection system 300 includes a control/test device (not shown), a stage (Chuck) control device (not shown), a vision/optics assembly (not shown), a shielding assembly, and a shock isolation device (not shown). Optionally, the Wafer inspection system 300 may perform I-V, C-V, optical signal, RF,/F noise, etc. characterization on wafers (Wafer) or other components.

Specifically, in the working process of the wafer inspection system 300, pins (pads) of a wafer sample can be measured through probes or probe card points in the probe assembly 310, electrical signals are loaded and measured through a connection test instrument, the electrical signals are controlled, judged and stored at a software end, judgment information is fed back to an ink-jet system, and defective grains (die) on a wafer are marked by points. After the test of one defective grain (die) is finished, the stage (Chuck) mechanical platform is moved to the next grain (die) to be tested through the software control system, and the cyclic test is sequentially carried out.

The wafer inspection system 300 may be, but is not limited to, inspecting wafers of dimensions in inches, or other dimensions. Optionally, the wafer inspection system 300 may also perform performance testing on chips made of various materials such as silicon (Si), gallium nitride (GaN), and silicon carbide (SiC).

The wafer inspection system 300 may be, but is not limited to, suitable for inspection of wafers, or Micro-Electro-MECHANICAL SYSTEM, MEMS, or biological structures, or optoelectronic devices, or light emitting diodes (LIGHT EMITTING Diode), or Liquid crystal display (Liquid CRYSTAL DISPLAY, LCD), or solar cells.

Optionally, the wafer inspection system 300 operates at a temperature of-60 ℃ to 300 ℃. Further alternatively, the wafer inspection system 300 may also be loaded with a temperature control system to meet performance testing requirements in high and low temperature environments.

Optionally, in some embodiments, the probe assembly 310 includes a probe holder, a probe arm, and a probe, where the probe holder is configured to carry the probe arm and the probe, the probe is connected to the probe arm and is electrically connected to an external power source, and the probe is configured to apply a current to the target object 400 and detect the target object 400.

In other embodiments, the probe assembly 310 includes a probe holder and a probe card, wherein the probe card is disposed on the probe holder, and the probe card includes a plurality of probes arranged in an array to detect the target object 400.

Reference in the specification to "an embodiment," "implementation" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the described embodiments of the application may be combined with other embodiments. Furthermore, it should be understood that the features, structures or characteristics described in the embodiments of the present application may be combined arbitrarily without any conflict with each other, to form yet another embodiment without departing from the spirit and scope of the present application.

Finally, it should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present application and not for limiting the same, and although the present application has been described in detail with reference to the above-mentioned preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present application without departing from the spirit and scope of the technical solution of the present application.

Claims

1. An angle adjustment device, characterized in that the angle adjustment device comprises:

A rotating shaft;

The bearing piece is rotationally connected with the rotating shaft and is used for bearing a target object;

One end of the connecting piece is fixedly connected with the bearing piece and used for driving the bearing piece to rotate around the rotating shaft;

The transmission mechanism comprises a first transmission component and a second transmission component, the first transmission component is movably connected with one end of the connecting piece far away from the bearing piece, the first transmission component is in sliding connection with the second transmission component along a first direction, the second transmission component is slidable along a second direction, the first direction is intersected with the second direction, and the first direction is the arrangement direction of the bearing piece, the connecting piece and the transmission mechanism; and

The mounting seat is used for mounting the transmission mechanism, the second transmission assembly is slidably connected with the mounting seat along a second direction, when the second transmission assembly slides along the second direction, the first transmission assembly is driven to slide along the second direction and the connecting piece is pushed to drive the bearing piece to rotate relative to the rotating shaft, and when the second transmission assembly slides along the second direction, the first transmission assembly also moves relative to the second transmission assembly along a first direction towards a direction approaching or deviating from the bearing piece;

the first transmission assembly comprises a rotating base, a plurality of rotating wheels and a circular ring piece, wherein the rotating base is arranged on one side, deviating from the mounting seat, of the second transmission assembly and is slidably connected with the second transmission assembly along a first direction, the rotating wheels are arranged on one side, deviating from the second transmission assembly, of the rotating base at intervals, each rotating wheel is respectively and rotatably connected with the rotating base, the rotating wheels are enclosed into a mounting space, the circular ring piece is mounted in the mounting space, the rotating wheels respectively support against the circular ring piece, so that the circular ring piece is mounted on the rotating base, and one side, deviating from the rotating base, of the circular ring piece is fixedly connected with one end, far from the bearing piece, of the connecting piece; when the second transmission assembly moves along the second direction, the rotating base is driven to move along the second direction, so that the connecting piece is pushed to drive the bearing piece to rotate, the ring piece rotates relative to the rotating base and drives the rotating wheels to rotate relative to the rotating base, the rotating base also moves along the first direction relative to the second transmission assembly, and the ring piece and the rotating base are arranged at intervals.

2. The angle adjustment device of claim 1, further comprising a drive mechanism including a drive member, a first guide member, and a first slide member, the drive member coupled to the first guide member for driving the first guide member in rotation, the first guide member extending in a second direction, the first guide member being nested with and threadably coupled to the first slide member, the first slide member coupled to the second transmission assembly; when the first guide piece rotates under the drive of the driving piece, the first sliding piece is driven to slide along the second direction, so that the second transmission assembly is driven to slide along the second direction.

3. The angle adjusting device according to claim 2, wherein the rotating base has a plurality of through holes, the first transmission assembly further includes a plurality of through members, each of the through members is disposed through one of the through holes and partially protrudes out of a side of the rotating base away from the second transmission assembly, each of the rotating wheels is disposed through one of the through members in a rotatable manner, and different ones of the rotating wheels are disposed through different ones of the through members in a rotatable manner.

4. The angle adjusting device according to claim 2, wherein the rotating base includes a first portion, a second portion and a connecting portion that are disposed opposite to each other, the first portion includes a first end and a second end that are disposed opposite to each other, the second portion includes a third end and a fourth end that are disposed opposite to each other, the first end is disposed opposite to the third end, the second end is disposed opposite to the fourth end, the connecting portion is disposed between the first portion and the second portion and connects the first portion and the second portion, respectively, the connecting portion is disposed between the first end and the second end, and the connecting portion is further disposed between the third end and the fourth end; the number of the rotating wheels is four, and the four rotating wheels are respectively arranged at the first end, the second end, the third end and the fourth end; the first transmission assembly further comprises a first locking piece and a second locking piece, the first locking piece is respectively connected with the first end and the third end and used for adjusting the distance between the first end and the third end, the second locking piece is respectively connected with the second end and the fourth end and used for adjusting the distance between the second end and the fourth end, and the distance between the rotating wheels is adjusted by the cooperation of the first locking piece and the second locking piece, so that the size of the installation space enclosed by the rotating wheels is adjusted, and the rotating wheels are made to be tightly attached to the ring piece.

5. The angle adjustment device of claim 2, wherein the first transmission assembly further comprises a second slider disposed on a side of the rotating base facing away from the ring member; the second transmission assembly comprises a second guide piece, a connecting piece and a third sliding piece which are sequentially connected, the second guide piece is arranged on one side, facing the rotating base, of the connecting piece, the second guide piece extends along a first direction, and the connecting piece is connected with the first sliding piece; the third sliding piece is arranged on one side of the connecting piece facing the mounting seat, and the second sliding piece is connected with the second guide piece in a sliding manner along the first direction; the mounting seat is provided with a third guide piece, the third guide piece extends along the second direction and is arranged at intervals with the first guide piece, and the third sliding piece is connected with the third guide piece in a sliding mode along the second direction.

6. The angle adjustment device of any one of claims 2 to 5, further comprising a pulley assembly including a first pulley, a second pulley, and a timing belt, the first pulley being sleeved on the outer periphery of the output shaft of the driving member, the second pulley being sleeved on the outer periphery of the first guide member, the timing belt being sleeved on the first pulley and the second pulley, respectively; when the driving piece is started, the first belt wheel is driven to rotate, so that the synchronous belt is driven to drive the second belt wheel to rotate, and the first guide piece is driven to rotate; wherein the diameter of the first pulley is smaller than the diameter of the second pulley.

7. The angle adjustment device of claim 6, wherein the first pulley has a diameter D1 and the second pulley has a diameter D2, satisfying the relationship: D1/D2 is more than or equal to 0.2 and less than 1.

8. The angle adjustment device of claim 6, further comprising a sensing assembly comprising a plurality of sensors and sensing tabs, the plurality of sensors being spaced apart along the second direction; the sensing piece is arranged on the first sliding piece, and the plurality of sensors are matched with the sensing piece to detect the relative position of the first sliding piece along the second direction.

9. A wafer inspection system, the wafer inspection system comprising:

The angle adjustment device of any one of claims 1 to 8, the carrier of the angle adjustment device for carrying a target object; and

And the probe assembly is used for detecting the target object.