CN117672916A - Cooling device, cooling converging device and processing method of cooling converging device - Google Patents

Abstract

The disclosure provides a cooling device, a cooling converging device and a processing method thereof, and relates to the technical field of heat dissipation and cooling. The cooling confluence device comprises a main body and more than two flow channels which are not communicated with each other and are arranged in the main body, wherein at least two flow channels in the more than two flow channels which are not communicated with each other are distributed at different levels of the main body; the main body is also provided with more than one group of first branch flow interfaces, and the first branch flow interfaces are used for communicating cooling branch flows at the cooling assembly; the first branch interfaces comprise branch inlets and branch outlets, the branch inlets and the branch outlets of the same group of first branch interfaces are communicated with flow channels at different levels, and when the more than one group of first branch interfaces are respectively connected with cooling branches of corresponding cooling assemblies, the more than two flow channels which are not communicated with each other can form a communication flow field with the cooling branches at each cooling assembly; the main body is also provided with a runner inlet and a runner outlet.

Description

Cooling device, cooling converging device and processing method of cooling converging device

Technical Field

The present disclosure relates to the field of heat dissipation and cooling technologies, and in particular, to a cooling device, a cooling convergence device, and a processing method thereof.

Background

Vacuum equipment refers to equipment used or operated in a vacuum environment, such as electron beam lithography machines, wafer inspection equipment, and the like, involved in semiconductor manufacturing. Vacuum equipment has heat dissipation requirements, for example, an actuator of the vacuum equipment can generate heat in a high-precision movement process, the heat can irreversibly damage the actuator due to long-term accumulation, and for example, the vacuum equipment is provided with components extremely sensitive to temperature, and the normal operation of the components can be influenced by the accumulation of the heat. In a vacuum environment, gas molecules are rarefaction, heat radiation and heat convection are extremely low in heat radiation efficiency, and heat radiation is generally carried out in a heat conduction mode.

Disclosure of Invention

Some embodiments of the present disclosure provide a cooling manifold device with multiple layers of flow channels and a cooling device based on the cooling manifold device, which aim to improve cooling and heat dissipation efficiency of vacuum equipment in a vacuum environment.

One or more embodiments of the present disclosure provide a cooling manifold device including a main body and two or more flow channels disposed within the main body that are not in communication with each other, at least two of the two or more flow channels that are not in communication with each other being distributed at different levels of the main body; the main body is also provided with more than one group of first branch flow interfaces, and the first branch flow interfaces are used for communicating cooling branch flows at the cooling assembly; the first branch interfaces comprise branch inlets and branch outlets, the branch inlets and the branch outlets of the same group of first branch interfaces are communicated with flow channels at different levels, and when the more than one group of first branch interfaces are respectively connected with cooling branches of corresponding cooling assemblies, the more than two flow channels which are not communicated with each other can form a communication flow field with the cooling branches at each cooling assembly; the main body is also provided with a flow passage inlet and a flow passage outlet so as to become the inlet and the outlet of the communication flow field when the communication flow field is formed.

According to one or more embodiments of the present disclosure, the cooling manifold device is obtained by dividing the main body by the different layers in the height direction or by dividing the main body by the different layers in the radial direction, and at least includes a first layer of flow channels and a second layer of flow channels, where the two or more flow channels that are not in communication with each other include a first layer of flow channels located at the first layer of flow channels and a second layer of flow channels located at the second layer of flow channels; the flow channel inlet is communicated with the first layer of flow channel or the second layer of flow channel, and the flow channel outlet is communicated with the second layer of flow channel or the first layer of flow channel correspondingly.

According to one or more embodiments of the present disclosure, there is provided a cooling manifold device, when the different horizons are obtained by dividing the main body in the height direction: the first layer flow channel comprises a first converging flow field and more than two first flow channel sections, and the second layer flow channel comprises a second converging flow field and more than two second flow channel sections; the two or more first runner segments are communicated with the first converging domain, and the two or more second runner segments are communicated with the second converging domain; the flow channel inlet and the branch inlet of at least one group of the more than one group of the first branch interfaces are arranged on different first flow channel sections or on different second flow channel sections, and the flow channel outlet and the branch outlet of at least one group of the more than one group of the first branch interfaces are correspondingly arranged on different second flow channel sections or on different first flow channel sections; the inner diameter of the converging flow field is larger than the inner diameter of the flow passage section.

According to one or more embodiments of the present disclosure, the cooling confluence device is provided, where the confluence domain is a fully-connected annular channel or a semi-connected annular channel; the runner section is a straight channel.

According to the cooling converging device provided by one or more embodiments of the present disclosure, the first converging basin is formed by sealing a first converging groove formed in the upper surface of the main body and an upper cover plate covering the first converging groove, and the second converging basin is formed by sealing a second converging groove formed in the lower surface of the main body and a lower cover plate covering the second converging groove.

A cooling manifold device according to one or more embodiments of the present disclosure provides, for a same set of first tributary interfaces: the tributary inlet of the flow channel is communicated with one of the first channel sections of the first layer of flow channels, and the tributary outlet of the flow channel is communicated with one of the second channel sections of the second layer of flow channels.

According to one or more embodiments of the present disclosure, the different levels further include an intermediate level between the first level and the second level, and the two or more flow channels that are not in communication with each other further include one or more flow channel segments that are in the intermediate level, and when the flow channel segments are two or more, the flow channel segments are not in communication with each other; the tributary inlet of the first tributary interface corresponding to the cooling tributary at the first cooling module is communicated with one of the first channel sections of the first layer of channels, the tributary outlet of the first tributary interface corresponding to the cooling tributary at the second cooling module is communicated with one of the second channel sections of the second layer of channels, and the tributary outlet of the first tributary interface corresponding to the cooling tributary at the first cooling module and the tributary inlet of the first tributary interface corresponding to the cooling tributary at the second cooling module are communicated through one of the channel sections at the intermediate level.

According to one or more embodiments of the present disclosure, there is provided a cooling manifold device, wherein the length or flow area of the cooling branch flow at the first cooling assembly is greater than the length or flow area of the cooling branch flow at the second cooling assembly; the flow channel inlet is communicated with the first layer of flow channel, and the flow channel outlet is communicated with the second layer of flow channel.

According to one or more embodiments of the present disclosure, there is provided a cooling manifold device, when the different levels divide the body in a radial direction: the first layer flow path comprises a first sink basin, and the second layer flow path comprises a second sink basin; the different horizons further comprise an intermediate horizon between the first horizon and the second horizon, the two or more flow channels that are not in communication with each other further comprise one or more flow channel segments that are positioned at the intermediate horizon, and when the flow channel segments are two or more, the flow channel segments are not in communication with each other; a tributary inlet of a first tributary interface corresponding to a cooling tributary at a first cooling module communicates with the first converging region through a third flow passage section at the intermediate level, a tributary outlet of a first tributary interface corresponding to a cooling tributary at a second cooling module communicates with the second converging region through a fourth flow passage section at the intermediate level, and a tributary outlet of a first tributary interface corresponding to a cooling tributary at a first cooling module communicates with a tributary inlet of a first tributary interface corresponding to a cooling tributary at a second cooling module through a fifth flow passage section at the intermediate level; the inner diameter of the converging flow field is larger than the inner diameter of the flow passage section.

According to one or more embodiments of the present disclosure, there is provided a cooling manifold device, the body comprising a metal plate; the main body also comprises a first mounting piece for fixing the cooling assembly and a second mounting piece for fixing the main body.

One or more embodiments of the present disclosure further provide a cooling device, including the foregoing cooling manifold device and one or more cooling assemblies, where a cooling tributary is provided to cool an object to be cooled, and the cooling tributary at the cooling assembly is in communication with a first tributary interface of the cooling manifold device.

According to one or more embodiments of the present disclosure, there is provided a cooling device, the cooling assembly including a first cooling plate group, a second cooling plate group, and a cooling plate group compact; the first cooling plate group and the second cooling plate group are pressed into blocks through the cooling plate group at intervals and are fixedly connected with each other so as to form a containing space for placing an object to be cooled; the first cooling plate group is provided with a first cooling plate circulation domain, the second cooling plate group is internally provided with a second cooling plate circulation domain, a first briquetting flow passage and a second briquetting flow passage are arranged in the cooling plate group briquetting, the first briquetting flow passage is sequentially communicated with a first opening of the first cooling plate circulation domain and a first opening of the second cooling plate circulation domain, the second briquetting flow passage is sequentially communicated with a second opening of the first cooling plate circulation domain and a second opening of the second cooling plate circulation domain, and the first cooling plate circulation domain, the second cooling plate circulation domain, the first briquetting flow passage and the second briquetting flow passage form cooling branch flow; a second branch port is arranged on the cooling plate group pressing block, a branch inlet of the second branch port communicates the first pressing block flow channel with a branch outlet of the first branch port of the cooling converging device, and a branch outlet of the second branch port communicates the second pressing block flow channel with a branch inlet of the first branch port of the cooling converging device; the cooling plate group pressing block is fixed on the cooling converging device through a third mounting piece.

According to one or more embodiments of the present disclosure, there is provided a cooling device, wherein the cooling plate group pressing block includes a first block, a second block, and a third block; the first partition, the first cooling plate group, the second partition, the second cooling plate group and the third partition are abutted against and sealed and fixedly connected in sequence; a first section of the first briquetting flow passage and a first section of the second briquetting flow passage are arranged in the first partition in a penetrating manner; an opening of one end of the first section of the first briquetting flow passage on the first partition is a tributary inlet of the second tributary interface, and an opening of one end of the first section of the second briquetting flow passage on the first partition is a tributary outlet of the second tributary interface; a second section of the first briquetting flow passage and a second section of the second briquetting flow passage are arranged in the second partition in a penetrating manner; the opening of one end of the second section of the first briquetting flow channel on the second partition, the opening of the other end of the first section of the first briquetting flow channel on the first partition and the first opening of the first cooling plate group flow domain are aligned and communicated; an opening of one end of the second section of the second briquetting flow channel on the second partition, an opening of the other end of the first section of the second briquetting flow channel on the first partition and a second opening of the first cooling plate group flow domain are aligned and communicated; the opening of the other end of the second section of the first briquetting flow passage on the second partition is aligned with and communicated with the first opening of the second cooling plate group flow region; the opening of the other end of the second section of the second briquetting flow passage on the second partition is aligned with and communicated with the second opening of the second cooling plate group flow region; or, a third section of the first briquetting flow passage and a third section of the second briquetting flow passage are arranged in the third partition in a semi-penetrating manner; an opening of one end of a third section of the first briquetting flow channel on the third partition, an opening of the other end of a second section of the first briquetting flow channel on the second partition and a first opening of the second cooling plate group flow domain are aligned and communicated; an opening of one end of a third section of the second briquetting flow channel on the third partition, an opening of the other end of the second section of the second briquetting flow channel on the second partition and a second opening of the second cooling plate group flow domain are aligned and communicated; the bottom of the third block is provided with the third mounting piece.

One or more embodiments of the present disclosure further provide a processing method of a cooling and converging device, which is applied to the cooling and converging device, and includes: an inner channel is opened inwards at the side surface of the main body of the cooling confluence device, and the opened inner channel is blocked near the port of the side surface, so that more than one flow channel section in the cooling confluence device is obtained.

Possible benefits of embodiments of the present description include, but are not limited to: (1) The branch inlet and the branch outlet of the first branch interface in the cooling converging device are communicated with different sub-flow areas, so that the cooling efficiency is improved; (2) The flow channels in the cooling confluence device are distributed at different positions, the flow channels at different positions are effectively avoided in space, the bending corners of the flow channels are reduced, the fluid in the flow channels has smaller flow resistance, and the cooling efficiency is better; (3) The cooling converging device is connected with more than one cooling assembly through more than one group of first branch flow interfaces, and a flow channel is arranged in the cooling converging device so as to reduce the number of joints of a flow channel inlet and a flow channel outlet, realize higher integration degree and greatly reduce the whole space of the cooling device; (4) The first branch flow interface in the cooling converging device can realize the series connection of a cooling component for cooling an object to be cooled with larger heating power and a cooling component for cooling an object to be cooled with smaller heating power, and then the cooling component is connected between the first layer flow channel and the second layer flow channel, so that the cooling effect is balanced, and the damage of the object to be cooled with large power caused by heat accumulation is avoided; (5) According to the cooling device provided by some embodiments of the specification, the cooling converging device and the drainage basin in the cooling assembly can be communicated in a machining mode, and the cooling device is sealed in a mode of combining welding and a mechanical stationary phase, so that the overall vacuum leakage rate of the cooling device is effectively reduced, and the vacuum adaptability of the cooling device is improved. It should be noted that, the advantages that may be generated by different embodiments may be different, and in different embodiments, the advantages that may be generated may be any one or a combination of several of the above, or any other possible advantages that may be obtained.

Drawings

The present specification will be further elucidated by way of example embodiments, which will be described in detail by means of the accompanying drawings. Like numbers in the figures refer to like structures or steps.

FIG. 1 is an A-plane isometric view of a cooling manifold device according to some embodiments of the present disclosure.

FIG. 2 is a B-side isometric view of a cooling manifold device according to some embodiments of the present disclosure.

Fig. 3 is an isometric view of a (up/down) cover plate according to some embodiments of the present description.

FIG. 4 is a z-sectional view of a cooling manifold device according to some embodiments of the present disclosure.

Fig. 5 is a partial enlarged view of the region D shown in fig. 4.

Fig. 6 is a side view of a cooling manifold device according to some embodiments of the present description.

Fig. 7 is a cross-sectional view of layer a of a cooling manifold device according to some embodiments of the present disclosure.

Fig. 8 is a B-layer cross-sectional view of a cooling manifold device according to some embodiments of the present disclosure.

Fig. 9 is a C-layer cross-sectional view of a cooling manifold device according to some embodiments of the present disclosure.

Fig. 10 is a schematic view of a flow path inside a cooling device according to some embodiments of the present disclosure.

Fig. 11 is a schematic flow diagram of the fluid in the flow channel of fig. 10.

Fig. 12 is a schematic view of a flow path inside a cooling device according to other embodiments of the present disclosure.

Fig. 13 is an isometric view of a cooling device according to some embodiments of the present disclosure.

FIG. 14 is a schematic three-dimensional structure of a cooling assembly according to some embodiments of the present disclosure.

FIG. 15 is a cross-sectional view of a cooling assembly according to some embodiments of the present description.

Fig. 16 is an isometric view of a cooling device according to still other embodiments of the present description.

Fig. 17 is an isometric view of the cooling device of fig. 16 from another perspective.

Fig. 18 is an isometric view of a cooling device according to still other embodiments of the present description.

Fig. 19 is a schematic view of a flow path inside the cooling device shown in fig. 18.

Fig. 20 is an isometric view of a cooling device according to still other embodiments of the present description.

Fig. 21 is an isometric view of a cooling device according to still other embodiments of the present description.

Fig. 22 is a schematic view of a flow path inside the cooling device shown in fig. 21.

Fig. 23 is an isometric view of a cooling device according to still other embodiments of the present description.

Fig. 24 is a schematic view of a flow path inside the cooling device shown in fig. 23.

The marks in the figure: 1a cooling device; 10 a main body; 11 cover plates; 12 flow channel inlet/outlet fittings; 13. 14 cooling the assembly; 15a first sink basin; 15b a second sink; 16. 17 cooling the substream; 18a first sink; 18b a second sink; 101 flow channel inlet/outlet; 101a flow channel inlet; 101b flow channel outlet; 102 a first tributary interface; 103a first sink; 103b a second sink; 104 a first mount; 105 a second mount; 106. 106-1, 106-2 first flow path segment; 107 a runner segment of the intermediate horizon; 107' -1, 107' -2, 107' -3; 108. 108-1, 108-2 second flow path section; 109 columns; 131 cooling plate groups; 131a first cooling plate group; 131a-1 first openings of the first cooling plate flow field; 131b second cooling plate group; 131b-1 second cooling plate flow field first opening; 132 the object to be cooled; 133 cooling plate group pressing blocks; 133-1 first partitioning; 133-2 second partitioning; 133-3 third partition; 134 a second tributary interface; 135 a third mount; 136 a first briquette flow passage; 136-1 a first segment of a first briquette flow passage; 136-2 a second section of the first briquette flow passage; 2 a cooling device; a main body 20; 21 runner transfer tubes; 3a cooling device; a body 30; 31 cover plates; 35a first sink; 35b second sink-basin; 301a flow channel inlet; 301b flow channel outlet; 306 a first flow path segment; 307 a runner section of the intermediate horizon; 308 a second flow path segment; 4 a cooling device; a body 40; 409 boss; 5a cooling device; a body 50; a 51 cover plate; 55a first sink; 55b a second sink; 501a flow channel inlet; 501b flow channel outlet; 506 a first flow path segment; 507 a runner section of the intermediate level; 508 a second flow path segment; 509 bosses; 6 a cooling device; 60 a body; 61 cover plates; 65a first sink basin; 65b second sink basin; 601a flow channel inlet; 601b flow channel outlet; 606 a first flow path segment; 607 a runner segment of the intermediate level; 608 a second flow path segment.

Detailed Description

In order to more clearly describe the technical solutions of the embodiments of the present specification, the embodiments will be described in detail below with reference to the accompanying drawings. It should be apparent that the following descriptions are some examples or embodiments of the present specification, and it is possible for those skilled in the art to apply the technical solution or means disclosed in the present specification to other situations according to the technical contents without inventive effort.

It should be appreciated that the terms "system," "apparatus," "unit," and/or "module" as used herein are one method for distinguishing between different components, elements, parts, portions, or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

Unless otherwise indicated, the technical terms used to describe components, elements, etc. in this specification do not denote a singular number but may include a plural number. In general, the terms "comprises," "comprising," and the like, are intended to only cover a specifically identified step, element, or component, but do not constitute an exclusive list, as the described method or apparatus may include other steps or components.

Flowcharts are used in this specification to describe the steps of operations performed by an apparatus or system of related embodiments, but the order in which the steps are described should not be construed as a limitation on the order in which the steps are performed unless otherwise indicated. One of ordinary skill in the art may adjust the order of execution of the steps based on knowledge information conveyed by embodiments of the present description, including, but not limited to, exchange of precedence relationships, merging of multiple steps, and splitting of a step.

In certain industries, it is desirable to use the apparatus in a vacuum environment. Vacuum environment refers to an environment without pressure or near non-pressure, which can be achieved by a vacuum pump. Some embodiments of the present specification refer to devices that are used or operate in a vacuum environment as vacuum devices. For example, electron beam lithography and wafer inspection equipment for semiconductor manufacturing, film plating equipment for film plating process, plasma chemical precipitation apparatus, induction furnace for smelting process, single crystal furnace, etc. In some application scenarios, the vacuum device has heat dissipation requirements. For example, an electron beam lithography machine includes an actuator that moves with high precision, and the interior of the actuator assembly generates heat due to the generation of force or torque. For example, these actuators are typically linear motors, voice coil motors, piezo-ceramic motors, or the like, which generate heat during actuation of the actuator to achieve high precision motion, which can cause irreversible damage to the actuator if accumulated over time. In addition, vacuum equipment has components that are extremely temperature sensitive, and the accumulation of heat can also affect the proper operation of these components, such as the actuator assembly or its surrounding components being relatively heat sensitive. Therefore, there is a need to dissipate heat and cool vacuum equipment in a vacuum environment, such as to reduce the impact of heat generated by the actuator assembly on the environment, itself, or other components. Specifically, an actuator of the vacuum apparatus or a part of the actuator, such as a heat generating component, may be used as the object to be cooled.

In a vacuum environment, gas molecules are rarer, heat radiation and heat convection are extremely low in heat radiation efficiency, and heat radiation is generally required in a heat conduction mode. Thus, in some embodiments, a cooling device may be used to dissipate heat from the vacuum apparatus. The cooling device has a flow passage therein having a flow passage inlet and a flow passage outlet, which may be in communication with a source of cooling medium, an exemplary source of cooling medium may include a pump that may deliver cooling medium in the form of a fluid (e.g., liquid or gas) into and circulate the flow passage of the cooling device. In some embodiments, the cooling medium source may be disposed outside the vacuum environment, and the flow passage inlet and the flow passage outlet may be in communication with the cooling medium source outside the vacuum environment through a conduit. The cooling device can be closely attached to the vacuum equipment or the heating part thereof, heat generated by the vacuum equipment is transmitted to the cooling device, and a cooling medium in the cooling device circularly flows, so that the heat is emitted or transmitted to the outside of the vacuum environment. Exemplary cooling media may include deoxygenated water, inert gas, high purity nitrogen, CO ₂ Etc.

However, if the cooling device is not efficient in heat dissipation, normal operation or work of the vacuum apparatus is still affected. Specifically, if the cooling device cannot efficiently and uniformly dissipate heat, the heat accumulation can cause the local temperature of the vacuum equipment to be too high, so that on one hand, the actuator generates heat deformation difference to influence the overall motion precision of the equipment, and on the other hand, the generated heat accumulation can influence and even burn out the actuator assembly along with the time.

In some applications, the cooling medium inside the cooling device is a gas, or the flow path inside the cooling device communicates with a device outside the vacuum environment, such as a pump, which may cause air to be mixed in the flow path of the cooling device. If the air tightness of the cooling device is insufficient, the vacuum leakage rate (the rate of entering air relative to the negative pressure closed space) of the vacuum environment is easy to rise, and the normal operation of the vacuum equipment is influenced.

On the other hand, the cost and volume of the vacuum environment (such as the volume of the cavity with the vacuum environment) are exponentially related, and the space occupied by the cooling device in the vacuum environment and the integration level also directly affect the cost and the cost of the vacuum environment.

In view of the foregoing, some embodiments of the present disclosure provide a cooling manifold device with multiple flow channels, which has the characteristics of high cooling efficiency, high integration, and low vacuum leakage rate, is suitable for a vacuum environment, and can effectively solve the above problems.

The cooling manifold device may be considered as part of a cooling device that is removably connected to the cooling assembly to achieve a complete cooling function. The cooling assembly may be a component provided at the object to be cooled, capable of directly exchanging heat with the object to be cooled. Specifically, the cooling assembly is also provided with a flow passage therein, which may be referred to as a cooling tributary. In some embodiments, the number of cooling components may be more than one, which corresponds to more than one object to be cooled (such as an actuator or a part of an actuator) of the vacuum apparatus, and the cooling medium in the cooling branch flow may take away heat generated by the heat generating component, so as to perform an effective cooling treatment on the heat generating component. The cooling converging device can be communicated with more than one cooling branch flow, cooling media in the cooling branch flows are further branched and collected, specifically, the cooling converging device can be used for distributing cooling media with lower heat from a cooling media source to each cooling branch flow, the cooling media are subjected to heat exchange with an object to be cooled in each cooling branch flow and are converted into cooling media with higher heat, the cooling converging device collects the cooling media, and finally the cooling converging device outputs the cooling media with higher heat to the cooling media source and sequentially and circularly reciprocates.

The cooling confluence device according to some embodiments of the present disclosure includes a main body and two or more flow channels disposed in the main body, at least two of the two or more flow channels not communicating with each other being distributed at different levels of the main body. The main body may have a block structure or a plate structure, and two or more of the flow passages may be opened inside the main body or on the surface of the main body. In some embodiments, the different horizons may be obtained by dividing the body in the height direction, and in particular may include two or more horizons having a relative upper-lower relationship. The height direction may be the direction from the lower surface of the body to the upper surface thereof (or vice versa). In other embodiments, the different horizons may be obtained by dividing the body in a radial direction, in particular it may comprise more than two horizons having a relative internal and external relationship. Radial refers to a direction in a radial plane that coincides with the axis. Taking the plate-like structure as an example, the radial direction may be the direction in which a straight line passing through the center of a plane having a large area is located in the plane.

The main body is also provided with more than one set of first tributary interfaces for communicating cooling tributaries at the cooling assembly. The first tributary interface further comprises a tributary inlet and a tributary outlet, and the tributary inlets and the tributary outlets of the same group of the first tributary interface are communicated with the flow channels at different layers. The arrangement can make the cooling medium flowing into the cooling branch flow and the cooling medium flowing out of the cooling branch flow come from and go to different sub-flow areas in the cooling converging device respectively, and the cooling medium of the different sub-flow areas can have larger temperature difference, so that the cooling efficiency is improved.

Although the two or more flow passages on the main body are not in communication with each other, when one or more sets of the first branch flow interfaces on the main body are respectively connected with the cooling branch flows of the corresponding cooling modules, the two or more flow passages not in communication with each other can form a communication flow field with the cooling branch flows at the respective cooling modules. This means that the flow channels in the cooling manifold and the cooling branches in the cooling modules form a communicating flow space in which the cooling medium can flow in a coherent manner.

The main body is also provided with a flow passage inlet and a flow passage outlet so as to become the inlet and the outlet of the communication flow field when the communication flow field is formed. The flow channel inlet and the flow channel outlet may also be regarded as flow channel inlet and flow channel outlet of the cooling device, which may be connected to the outlet and inlet of the cooling medium source, respectively, by means of pipes. In some embodiments, only one flow channel inlet and flow channel outlet is provided for one communication flow field. For the case of larger communication flow fields, a plurality of flow channel inlets and flow channel outlets can be arranged, the plurality of flow channel inlets can be arranged at different positions of the communication flow fields, the plurality of flow channel outlets can be arranged at different positions of the communication flow fields, the plurality of flow channel inlets can be converged outside the cooling converging device and connected to the outlet of the cooling medium source, and the plurality of flow channel outlets can be converged outside the cooling converging device and connected to the inlet of the cooling medium source. In still other embodiments, the plurality of flow channel inlets and the plurality of flow channel outlets may be correspondingly combined to form a plurality of sets of flow channel interfaces, each connected to a different source of cooling medium.

It should be noted that, in this specification, the outlet and the inlet are both with respect to the flow direction of the cooling medium relative to the component where the outlet and the inlet are located, for example, the outlet and the inlet of P are the interface where the cooling medium is far away from P and the interface where the cooling medium is close to P, respectively, where P may be a cooling medium source, a pump, a main body, a flow channel in the main body, a cooling assembly, a cooling tributary, or the like.

The different horizons may include at least a first horizon and a second horizon, the first horizon may be a horizon near the upper surface of the body (may also be referred to as an upper horizon) when dividing along the height direction of the body, and the second horizon may be a horizon near the lower surface of the body (may also be referred to as a lower horizon), or vice versa; when divided radially along the body, the first level may be a level close to the central axis of the body (also called inner level) and the second level may be a level close to the lateral side of the body (also called outer level), or vice versa. Accordingly, the two or more flow channels not communicating with each other may include a first layer of flow channels located at the first level and a second layer of flow channels located at the second level. In some embodiments, the different horizons may further include a third horizon, a fourth horizon, etc., and the different horizons may be sequentially distributed along the height direction of the body or the radial direction of the body. In some embodiments, the third layer is, the fourth layer may be laid out between the first layer and the second layer, which may also be referred to as an intermediate layer.

The flow channel inlet may be in communication with the first layer of flow channel, and the flow channel outlet may be in communication with the second layer of flow channel, and the flow channel inlet may be in communication with the second layer of flow channel, and the flow channel outlet may be in communication with the first layer of flow channel. In some embodiments, the first layer of channels and the second layer of channels may each comprise only one flow channel, i.e. the first layer of channels is one independent communicating sub-field and the second layer of channels is one independent communicating sub-field. At this time, the runner inlet may be opened or connected to any position of the first layer runner, or opened or connected to any position of the second layer runner, and the runner outlet may be opened or connected to any position of the second layer runner, or opened or connected to any position of the first layer runner. The runner inlet and the runner outlet are communicated with the runners at different layers, so that the temperature difference of different sub-flow areas (such as the sub-flow areas where the branch inlet and the branch outlet of the first branch interface are respectively communicated) is increased, and the cooling efficiency is further improved.

The following description will be given mainly of the case where the flow channel inlet communicates with the first layer flow channel, and the flow channel outlet communicates with the second layer flow channel, but this should not be construed as limiting the embodiments related to the present description, and on the basis of this, the specific case where the flow channel inlet communicates with the second layer flow channel, and the flow channel outlet communicates with the first layer flow channel can be reasonably expected.

The cooling manifold device provided in some embodiments of the present disclosure will be described in detail with reference to the distribution of the different layers in the height direction. Fig. 1 and 2 are an a-side and B-side isometric view, respectively, of a cooling manifold device according to some embodiments of the present disclosure. As shown in fig. 1 and 2, the cooling manifold device body has a plate-like structure, and the a-plane or the B-plane thereof is parallel to the xoy plane in the three-dimensional coordinates shown in the drawing, and the height direction of the plate-like body is the z-axis direction. In some embodiments, the material of the main body 10 may be metal, and specifically, a metal material with low outgassing rate and relatively high thermal conductivity, such as aluminum alloy, titanium alloy, stainless steel, oxygen-free copper, etc., may be selected. The material of the cooling confluence device has lower air release rate, so that the vacuum leakage rate of the vacuum environment can be further reduced, and the cooling efficiency can be improved due to higher heat conductivity. The surface a of the main body may be an upward surface, i.e., an upper surface, when the cooling manifold device is in use, and in conjunction with fig. 1, the surface a of the main body is provided with a flow channel inlet/outlet 101 and a first tributary interface 102 from the external view. In some embodiments, the flow channel inlet, the flow channel outlet, the tributary inlet of the first tributary interface, and the tributary outlet may be connected to the lower layer flow channel, but may still be formed on the upper surface of the main body. For example, the ports may have a depth such that one end communicates with the lower level flow passage and the other end opens into the upper surface of the body. The main body shown in fig. 1 is further provided with a first mounting member 104, and the first mounting member 104 may cooperate with a third mounting member on the cooling assembly to enable the cooling assembly to be fixed to the main body while the cooling branch of the cooling assembly is communicated to the first branch port 102 on the main body. As an example, the first mounting member 104 may be a screw hole penetrating through the metal plate of the main body, and the third mounting member may be a screw hole, and the first mounting member 104 and the third mounting member are fixed together by screws after being aligned. The B-side of the body may be the side of the cooling manifold that faces downward in use, i.e., the lower surface, and with reference to fig. 2, the B-side of the body may see the first mount 104 through the metal plate of the body. The body shown in fig. 2 is further provided with a second mounting member 105, the second mounting member 105 being adapted to secure the body itself. As described above, in some embodiments, the cooling manifold is used in conjunction with the cooling assembly to cool and dissipate heat from the actuator or a portion thereof of the vacuum apparatus, and these components require high precision movement or displacement along a predetermined path during the work process, so that in order to avoid the vibration of the cooling manifold affecting the normal operation of the actuator, the cooling manifold needs to be fixed, and the second mounting member 105 may fix the main body on the table surface, reducing the vibration of the apparatus. By way of example, the second mount 105 may be a screw hole and a mating screw may secure the body to a countertop or other device. In some embodiments, the second mount 105 may be distributed 3 or more along the circumference of the body to increase stability.

In some embodiments, the first layer of flow channels and the second layer of flow channels may comprise a sink basin and two or more flow channel segments, respectively. Referring to fig. 1, a first converging groove 103a is formed on the upper surface of the main body, and the first converging groove 103a is shown as a fully communicated hexagonal annular channel. Fig. 3 shows a cover plate 11 according to some embodiments of the present disclosure, where the cover plate 11 has a shape matching the converging channel, but is slightly larger in size to cover the converging channel to form a closed converging channel. For example, the (upper) cover plate 11 may cover the first confluence groove 103a, forming a first confluence region in the first layer flow passage. Wherein the (upper) cover plate 11 may be fixed to the upper surface of the main body by welding. Referring to fig. 2, a second confluence groove 103b is formed on the lower surface of the main body, the second confluence groove 103b is illustrated as a channel having the same or similar shape as the first confluence groove 103a, and the second confluence groove 103b is covered with a (lower) cover plate 11 to form a second confluence region in the second-layer flow channel. The (lower) cover plate may be fixed to the lower surface of the main body by welding. In some embodiments, in order to ensure the high vacuum applicability and low vacuum leakage rate of the cooling device, a soft metal sealing strip with a corresponding shape may be disposed between the contact surfaces of the cover plate 11 and the upper/lower surface of the main body before the cover plate 11 is welded, and the soft metal sealing strip may be made of a metal material with low hardness and suitable for vacuum, such as indium.

Fig. 4 is a z-sectional view of a cooling manifold device according to some embodiments of the present disclosure, and fig. 5 is an enlarged partial view of region D of fig. 4. As shown in fig. 4 and 5, the upper and lower surfaces of the main body 10 are provided with a first confluence groove 103a and a second confluence groove 103b which are positioned at different levels and are not directly communicated with each other, and the first confluence groove 103a and the second confluence groove 103b are respectively covered with a cover plate 11. Two connectors 12 are connected to the pipes leading from the flow channel inlet and the flow channel outlet, respectively. As an example, the joint 12 may be connected to the flow channel inlet/outlet by welding or mechanical fastening, which may further be by bonding or clamping, depending on the vacuum leak rate requirements of the cooling device. Wherein the welding method can meet the lower vacuum leakage rate index, and the joint 12 is preferably made of the same material as the main body 10. In other embodiments, the type and materials of the fitting 12 may be varied depending on the material differences between the conduits connecting the flow channel inlet and the flow channel outlet. The purpose of the connectors 12 is to connect the flow channels in the cooling manifold to the external flow fields, such as by interfacing with the conduits that communicate with the outlets and inlets of the cooling medium sources, and the number of connectors 12 may be based on the internal flow channel design of the body 10, such as the number of connectors 12 may be the same as the number of flow channel inlets and flow channel outlets of the body 10, two or more. The number of the joints 12 is preferably two, and fewer joints are arranged, so that the vacuum leakage rate of the cooling device is reduced.

Two or more flow passage sections in the first layer flow passage may also be referred to as first flow passage sections, which are both in communication with the first converging region, and two or more flow passage sections in the second layer flow passage may be referred to as second flow passage sections, which are both in communication with the second converging region. In some embodiments, the flow channel inlet and the tributary inlet of at least one set of the one or more first tributary interfaces are in communication with the first laminar flow channel. Specifically, the flow channel inlets and the tributary inlets are respectively arranged on different first flow channel sections. Correspondingly, the flow channel outlet and the tributary outlet of at least one group of tributary interfaces in the more than one group of first tributary interfaces are communicated with the second layer flow channel. Specifically, the flow channel outlets and the tributary outlets are respectively arranged on different second flow channel sections.

In some embodiments, only the first layer of flow channels and the second layer of flow channels are provided in the body in the height direction, i.e. no flow channels of the intermediate layer are arranged between the two. At this time, the tributary inlets of more than one group of the first tributary interfaces in the main body are respectively communicated with different first runner sections of the first layer of runners, and the tributary outlets of more than one group of the first tributary interfaces are respectively communicated with different second runner sections of the second layer of runners. This applies to the case of a single first tributary interface or to the case where the heat obtained from the object to be cooled by the cooling assemblies respectively corresponding to the plurality of first tributary interfaces is not very different. The case of a single first tributary interface refers in particular to the case where only one set of first tributary interfaces is provided on the main body, and only a single cooling module is connected. The case of a plurality of first tributary interfaces is particularly a case that a plurality of groups of first tributary interfaces are arranged on the main body, and as the case that 6 groups of first tributary interfaces are arranged on the main body, the first tributary interfaces can be communicated with 6 cooling assemblies at the same time to cool 6 objects to be cooled. In either case, the flow path for any one of the first set of tributary interfaces is as follows: flow channel inlet-first flow channel Duan first converging region-first flow channel Duan first tributary inlet-tributary outlet of first tributary interface-second flow channel Duandi second converging region-second flow channel section-flow channel outlet. When the first branch interfaces are in a plurality of groups, the first branch interfaces are in a parallel connection relationship, and after the cooling branches are connected, the cooling branches are also in a parallel connection relationship, namely, low-heat cooling medium from a cooling medium source can be split through the cooling converging device and can cool objects to be cooled at the cooling assembly relatively independently, so that the cooling efficiency is effectively improved, the cooling effect is relatively balanced, and the situation of local accumulation of heat is effectively avoided.

In some embodiments, the flow passage section may be a straight passage with the converging region having a larger inner diameter relative to the flow passage section. The straight runner section reduces the bending corner in the runner, so that the cooling medium in the runner has good fluid flow efficiency, small flow resistance and good cooling efficiency. The converging region with the larger inner diameter can enable the pressure distribution of the cooling medium in the flow channel to be uniform, and the uniform distribution of the pressure of the cooling medium can enable the flow resistance difference of cooling branch flows in each cooling assembly to be reduced. When the heating power of each object to be cooled is consistent, the temperature difference of the object to be cooled is also smaller, and the whole thermal deformation difference of the vacuum equipment is also smaller.

In some embodiments, more than three runners distributed along the height direction are arranged in the main body, that is, in addition to the first layer of runners and the second layer of runners, one or more middle layers of runners are arranged between the first layer of runners and the second layer of runners, and the three-layer runners are taken as a main example.

When three layers of flow channels are arranged in the main body, different layers in the main body further comprise an intermediate layer between the first layer and the second layer, more than two flow channels which are not communicated with each other in the main body further comprise more than one flow channel section positioned at the intermediate layer, and when more than two flow channel sections are arranged, all flow channel sections are not communicated with each other.

Fig. 6 is a side view of a cooling manifold device according to some embodiments of the present description. When the cooling manifold device has the flow passages of the upper, middle and lower three levels, the cooling manifold device is "cut" from the layers a, B and C shown in fig. 6, respectively, and the layer a, the layer B and the layer C shown in fig. 7 to 9 can be obtained in this order.

The cross-sectional view of layer a shows a cross-section of a first layer of flow channel, see fig. 7, comprising a first converging region formed by a first converging channel 103a, 1 first channel segment 106-1 and 3 first channel segments 106-2. Each first runner section is communicated with the first converging region, and a runner inlet or a tributary inlet of a part of first tributary interfaces is formed in each first runner section so as to communicate the interfaces with the first converging region. When the main body is provided with three layers of flow channels, the tributary inlets of part of the first tributary interfaces can be directly communicated with the first layer of flow channels, and the tributary inlets of other first tributary interfaces can be formed on the flow channels of other layers, such as an intermediate layer, as will be described in detail later. For distinction, the first flow path segment that connects the flow path inlet and the first junction field may be referred to as a first main flow path segment, such as the first flow path segment 106-1 in fig. 7, on which the flow path inlet 101a is opened; the first flow path segment that connects the tributary inlet of the first tributary interface with the first converging area is called a first tributary flow path segment, such as the first flow path segment 106-2 in fig. 7, and a part of the first tributary interface 102, which may be specifically a tributary inlet, is formed on each of the first flow path segments. In some cases where a subdivision description is not required, the first flow path segment 106-1 and the first flow path segment 106-2 may also be collectively referred to as the first flow path segment 106.

The cross-section of layer B shows a cross-section of an intermediate layer flow channel, see fig. 8, comprising three flow channel sections 107 which do not communicate with each other. The flow path segment 107 shown in fig. 8 is an L-shaped channel, and a single flow path segment 107 may be considered to be formed from a combination of more than two straight channels, and in some alternative embodiments, the flow path segment 107 may also be a straight channel. The flow channel section 107 may be provided with a tributary inlet and a tributary outlet, and the tributary inlet and the tributary outlet may belong to different first tributary interfaces. In other words, the runner segments 107 at the intermediate level serve to "connect in series" different cooling branches.

The cross-section of layer C shows the cross-section of the lower flow channel, see fig. 9, and the second layer of flow comprises a second converging region formed by the second converging channel 103b, 1 second flow channel segment 108-1 and 3 second flow channel segments 108-2. Each second runner section is communicated with the second converging region, and each second runner section is provided with a runner outlet or a tributary outlet of a part of the first tributary interfaces, so that the interfaces are communicated with the second converging region. Similarly to the upper layer flow path, the tributary outlets of some of the first tributary interfaces may be directly connected to the second layer flow path, and the tributary outlets of other first tributary interfaces may be provided in the flow path of other layers, such as the middle layer. For distinction, the second flow path segment that connects the flow path outlet and the second junction field may be referred to as a second main flow path segment, such as the second flow path segment 108-1 in fig. 9, on which the flow path outlet 101b is opened; the second flow path segment that connects the tributary outlet of the first tributary port and the second converging area is called a second tributary flow path segment, such as the second flow path segment 108-2 in fig. 9, and a part of the first tributary port 102, specifically, the tributary outlet is formed on the second flow path segment. In some cases where a subdivision description is not required, the second flow path segment 108-1 and the second flow path segment 108-2 may also be collectively referred to as the second flow path segment 108.

Fig. 10 is a schematic view of a flow path inside a cooling device according to some embodiments of the present disclosure. The cooling converging device with more than three layers of flow channels is suitable for the situation that the difference of the heating efficiency of the object to be cooled at the cooling assembly is large, and can not only assume that the difference of the heating efficiency of the object to be cooled at the first cooling assembly is large, but also assume that the difference of the heating efficiency of the object to be cooled at the second cooling assembly is large. At this time, the cooling branches at the cooling module may be connected in the manner shown in fig. 10.

As shown in fig. 10, the first cooling module has a cooling branch flow 17, the second cooling module has a cooling branch flow 16, a branch flow inlet of a first branch flow interface corresponding to the cooling branch flow 17 at the first cooling module communicates with one of the first flow path segments (e.g., first flow path segment 106-2) of the first layer flow path, a branch flow outlet of a first branch flow interface corresponding to the cooling branch flow 16 at the second cooling module communicates with one of the second flow path segments (e.g., second flow path segment 108-2) of the second layer flow path, and a branch flow outlet of a first branch flow interface corresponding to the cooling branch flow at the first cooling module communicates with a branch flow inlet of a first branch flow interface corresponding to the cooling branch flow at the second cooling module through one of the flow path segments (e.g., intermediate layer flow path segment 107) at the intermediate layer.

Fig. 11 is a schematic flow diagram of the fluid in the flow channel of fig. 10. Referring to fig. 10 and 11, for the first tributary interface corresponding to the first cooling module and the second tributary interface corresponding to the second cooling module, the flow path is as follows: the flow channel inlet 101a→the first flow channel section 106-1→the first converging flow field 15a→the first flow channel section 106-2→the tributary inlet of the first tributary interface corresponding to the first cooling module (-cooling tributary 17) →the tributary outlet of the first tributary interface corresponding to the first cooling module→the flow channel section 107 of the intermediate layer→the tributary inlet of the first tributary interface corresponding to the second cooling module (-cooling tributary 16) →the tributary outlet of the first tributary interface corresponding to the second cooling module→the second flow channel section 108-2→the second converging flow field 15b→the second flow channel section 108-1→the flow channel outlet 101b. So connect, can at first carry out the heat with the coolant in two cooling tributaries that the heat difference is great and balance, again with first converging flow field and second converging flow field intercommunication, can further balance cooling effect, avoid the heat gathering to make high-power device (the higher device of heating efficiency) damage.

In some embodiments, the first cooling assembly is used for cooling an object to be cooled with greater heat generation efficiency, the cooling branches thereof have a greater length or flow field area, and the second cooling assembly is used for cooling an object to be cooled with lesser heat generation efficiency, the cooling branches thereof have a smaller length or flow field area. Wherein the flow field area may refer to the total area of the area where the cooling tributary intersects with the plane of flow of the cooling medium inside (i.e. the plane parallel to the direction of flow of the cooling medium). The cooling tributary 17 as in fig. 10 has more "serpentine" channels (with 5 turns) and is greater in length and flow area than the cooling tributary 16 with fewer "serpentine" channels (with 3 turns). In fig. 10, the flow channel inlet 101a is communicated with the first layer of flow channel, and the flow channel outlet 101b is communicated with the second layer of flow channel, so that the first cooling component is positioned in front of the second cooling component, and the arrangement is such that the cooling medium with lower heat can firstly exchange heat with the object to be cooled with higher heating efficiency, and the heat at the object to be cooled with higher difference in heating efficiency can be balanced better.

The cooling module shown in fig. 10 has 6 cooling modules, 3 of which are used for cooling objects to be cooled having a large heat generating efficiency, and the other 3 of which are used for cooling objects to be cooled having a small heat generating efficiency. The 6 cooling assemblies can be combined into a group according to a mode of 'big one small' and are respectively communicated with the cooling converging device in the mode, and then the 6 cooling assemblies are communicated together in a mode of 'series connection' and 'parallel connection'. In some embodiments, the tributary inlet and the tributary outlet of part of the first tributary interfaces are respectively communicated with the first layer flow channel and the second layer flow channel, the tributary inlet of part of the first tributary interfaces is communicated with the flow channel section of the middle layer, the tributary outlet of the part of the first tributary interfaces is communicated with the second layer flow channel, the tributary inlet of the rest of the first tributary interfaces is communicated with the first layer flow channel, and the tributary outlet of the rest of the first tributary interfaces is communicated with the flow channel section of the middle layer, so that a plurality of cooling assemblies can be connected to the cooling converging device in a parallel connection mode and a serial connection and parallel connection mode.

In some embodiments, four or more layers of flow channels may be further provided in the body along the height direction, specifically, an intermediate layer between the first layer and the second layer may be further subdivided into a third layer and a fourth layer having a relative upper-lower relationship, and two or more flow channel sections not communicating with each other may be provided in the third layer and the fourth layer in a dispersed manner.

In some embodiments, the different levels in the cooling manifold may be distributed radially, particularly with reference to the flow path schematic inside the cooling device shown in fig. 12. As shown in fig. 12, the inside of the main body is divided into a first horizon, an intermediate horizon, and a second horizon from inside to outside in the radial direction indicated by the arrow. The first laminar flow at the first level comprises a first converging flow field 18a, the second laminar flow at the second level comprises a second converging flow field 18b, and in the intermediate level, more than one flow channel section is arranged, and when the intermediate level is provided with more than two flow channel sections, the more than two flow channel sections are not communicated with each other, such as flow channel section 107' -1, flow channel section 107' -2, flow channel section 107' -3 and the like.

The main body may be provided with more than one set of first tributary interfaces. As shown in fig. 12, 6 groups of first branch flow interfaces are arranged on the main body, wherein 3 of the first branch flow interfaces are used for cooling objects to be cooled with larger heating efficiency, and the other 3 of the first branch flow interfaces are used for cooling objects to be cooled with smaller heating efficiency. Similar to fig. 10, the 6 cooling modules of fig. 12 can be grouped into a group of two cooling modules according to "one large and one small". For any group of cooling modules, the branch inlet of the first branch interface corresponding to the cooling branch at the first cooling module communicates with the first converging basin 18a through a third flow passage section at the intermediate level, such as flow passage section 107' -1, and the branch outlet of the first branch interface corresponding to the cooling branch at the second cooling module communicates with the second converging basin 18b through a fourth flow passage section at the intermediate level, such as flow passage section 107' -2, and the branch outlet of the first branch interface corresponding to the cooling branch at the first cooling module communicates with the branch inlet of the first branch interface corresponding to the cooling branch at the second cooling module through a fifth flow passage section at the intermediate level, such as flow passage section 107' -3. For a cooling manifold and any set of cooling modules connected thereto, the flow path inside it may be: runner inlet→first converging flow field 18a→runner section 107' -1→branch inlet of first branch flow interface corresponding to first cooling module (-cooling branch flow 17), -branch flow outlet of first branch flow interface corresponding to first cooling module→runner section 107' -3→branch flow inlet of first branch flow interface corresponding to second cooling module (-cooling branch flow 16), -branch flow outlet of first branch flow interface corresponding to second cooling module→runner section 107' -2→second converging flow field 18b→runner outlet. Alternatively, the flow channel inlet may be provided directly on the first converging portion 18a or communicate with the first converging portion 18a via another flow channel section. The further flow channel section may be located at the first level or at an inner level radially closer to the central axis of the cooling manifold body than the first level, so as to lead the flow channel inlet from the inner side of the first manifold 18 a. Similarly, the flow channel outlet can also be provided directly on the second junction 18b or can communicate with the second junction 18b via a further flow channel section. The further flow channel section may be located at the second level or pass sequentially through the intermediate level, the first level and the inner level so as to simultaneously lead the flow channel outlet from the inside of the first converging basin 18 a.

The connection manner of the first tributary interface shown in fig. 12 may be modified to obtain the internal flow path structure of the cooling manifold device according to still other embodiments of the present disclosure. Specifically, any group of first tributary interfaces on the main body can be communicated with the first converging domain through the runner section of the middle layer, and the tributary outlets can be communicated with the second converging domain through the other runner section of the middle layer. When the cooling modules are connected with the first branch flow interface on the main body, the cooling branches in each cooling module are in parallel connection.

Some embodiments of the present disclosure also provide a cooling device comprising the aforementioned cooling manifold device and one or more cooling modules, where a cooling branch is provided to cool an object to be cooled, the cooling branch at the cooling module being in communication with a first branch interface of the cooling manifold device.

Fig. 13 is an isometric view of a cooling device according to some embodiments of the present disclosure. The cooling header device body 10 of the cooling device 1 shown in fig. 13 is provided with 6 sets of first tributary interfaces, each of which is connected to one cooling module 13. The flow channel inlet and the flow channel outlet in fig. 13 lead out from the upper surface area of the body 10 inside the hexagonal annular first converging basin, to which connectors 12 are connected, respectively. The flow path inside the cooling device shown in fig. 13 is the flow path described in the related description of fig. 11, and will not be described again here.

Fig. 14 is a schematic three-dimensional structure of a cooling assembly according to some embodiments of the present description, and as shown in fig. 14, the cooling assembly may include a cooling plate group 131 and a cooling plate group compact 133. The cooling plate set pressing block 133 and the cooling plate assembly 131 may be matched for use, for example, the cooling plate set pressing block 133 may be distributed on the outer side of the cooling plate set 131 as a fixedly installed adaptor, and meanwhile, a flow passage is provided inside the cooling plate set pressing block 133 to form a part of cooling branches in the cooling assembly. Fig. 15 is a cross-sectional view of the cooling assembly shown in fig. 14, and as shown in fig. 15, the cooling plate assembly 133 may further include a first cooling plate group 131a and a second cooling plate group 131b. The first cooling plate group 131a and the second cooling plate group 131b are spaced and fixedly connected by the cooling plate group pressing blocks 133, and a receiving space for receiving the object 132 to be cooled is formed between the cooling plate groups. In some embodiments, the first cooling plate set 131a, the second cooling plate set 131b, and the cooling plate set compact 133 may be made of a material having a low outgassing rate and a relatively high thermal conductivity, such as aluminum alloy, titanium alloy, stainless steel, oxygen-free copper, and the like.

The first cooling plate group 131a is provided with a first cooling plate circulation domain, and the second cooling plate group 131b is provided with a second cooling plate circulation domain. As an example, a "serpentine" channel may be provided in the first cooling plate set 131a, forming the first cooling plate flow field, with an inlet and an outlet, being a first opening and a second opening of the first cooling plate flow field, respectively. The second cooling plate flow field in the second cooling plate set 131b may also have similarly shaped channels, as well as first and second openings. In some embodiments, the first and/or second cooling plate flow fields of different cooling assemblies may have different lengths or flow field areas. A cooling module with a cooling plate flow field of greater length or flow field area is more suitable for cooling objects to be cooled that generate greater heat.

In some embodiments, the cooling plate set of pressing blocks 133 are provided therein with a first pressing block flow channel 136 and a second pressing block flow channel (not shown in fig. 15), the second pressing block flow channel overlaps 1 the first pressing block flow channel 136 in the viewing direction of fig. 15, the first pressing block flow channel 136 is in communication with the first opening 131a-1 of the first cooling plate flow domain and the first opening 131b-1 of the second cooling plate flow domain in sequence, the second pressing block flow channel is in communication with the second opening of the first cooling plate flow domain (not shown in fig. 15, the second opening of the first cooling plate flow domain overlaps 131a-1 in the viewing direction of fig. 15) and the second opening of the second cooling plate flow domain (not shown in fig. 15), the second opening of the second cooling plate flow domain overlaps 131b-1 in the viewing direction of fig. 15, and the first cooling plate flow domain, the second pressing block flow channel 136 and the second pressing block flow channel form the cooling plate. When the cooling medium circulates in the cooling branch, heat generated by the object 132 to be cooled placed in the container space can be taken away. In some embodiments, the size structure of the cooling plate set pressing block 133 is adjusted, so that after the object 132 to be cooled is placed in the accommodating space, the two cooling plate sets can be attached to two sides of the object 132 to be cooled, so that good heat conduction is formed between the cooling plate sets and the object to be cooled, and the cooling efficiency is improved.

In some embodiments, the cooling plate set pressing block is provided with a second tributary interface, and the bottom of the cooling plate set pressing block 133 in fig. 14 and 15 is provided with the second tributary interface 134. The second tributary interface is adapted to the first tributary interface on the cooling header, thereby communicating the cooling tributary with the first tributary interface. In particular, the second tributary interface may also comprise a tributary inlet and a tributary outlet, wherein the tributary inlet of the second tributary interface communicates the first briquetting flow channel with the tributary outlet of the first tributary interface of the cooling header, and the tributary outlet of the second tributary interface communicates the second briquetting flow channel with the tributary inlet of the first tributary interface of the cooling header. The cooling module may have an internal flow path of a tributary inlet of the second tributary port, a first briquetting flow path, a first (second) cooling plate flow region, a second briquetting flow path, and a tributary outlet of the second tributary port. As shown in fig. 14 and 15, a third mounting member 135 is further provided at the bottom of the cooling plate assembly block 133, and the third mounting member 135 can be cooperatively connected with the first mounting member 104 on the cooling manifold main body to fixedly mount the cooling assembly on the cooling manifold.

With continued reference to fig. 15, the cooling plate assembly pressing block 133 may further include a first sub-block 133-1, a second sub-block 133-2, and a third sub-block 133-3, where the first sub-block 133-1, the first cooling plate assembly 131a, the second sub-block 133-2, the second cooling plate assembly 131b, and the third sub-block 133-3 are sequentially abutted against and sealed and fixed, for example, may be bonded, or mounting holes aligned with each other are formed in the first sub-block 133-1, the first cooling plate assembly 131a, the second sub-block 133-2, the second cooling plate assembly 131b, and the third sub-block 133-3 along the arrangement direction thereof, and the five parts are fixedly connected together by using bolts through the respective mounting holes, and then the joints are sealed by using a sealant.

A first segment 136-1 of the first briquette flow passage and a first segment (not shown in fig. 15) of the second briquette flow passage are provided penetrating the first block 133-1. The opening of the first section 136-1 of the first briquetting flow channel on the first sub-block 133-1 is the second tributary interface 134, which may be specifically a tributary inlet, and the opening of the first section of the second briquetting flow channel on the first sub-block is a tributary outlet of the second tributary interface.

A second segment 136-2 of the first briquette flow passage and a second segment of the second briquette flow passage are provided in the second block 136-2. The opening of one end of the second segment 136-2 of the first briquetting flow channel on the second sub-block 133-2, the opening of the other end of the first segment 136-1 of the first briquetting flow channel on the first sub-block 133-1, and the first opening 131a-1 of the first cooling plate group flow region are aligned and communicated. The opening of the second section of the second briquetting flow channel on the second block 133-2, the opening of the other end of the first section of the second briquetting flow channel on the first block 133-1 and the second opening of the first cooling plate group flow region are aligned and communicated.

The opening of the other end of the second segment 136-2 of the first briquetting flow channel on the second partition 133-2 is aligned with and communicated with the first opening of the second cooling plate set flow region, and the opening of the other end of the second segment of the second briquetting flow channel on the second partition 133-2 is aligned with and communicated with the second opening of the second cooling plate set flow region. In some alternative embodiments, the third segment 133-3 is internally semi-perforated with a third section of the first briquette flow passage and a third section of the second briquette flow passage; an opening of one end of a third section of the first briquetting flow channel on the third partition, an opening of the other end of a second section of the first briquetting flow channel on the second partition and a first opening of the second cooling plate group flow domain are aligned and communicated; and an opening of one end of the third section of the second briquetting flow passage on the third partition, an opening of the other end of the second section of the second briquetting flow passage on the second partition and a second opening of the second cooling plate group flow domain are aligned and communicated.

It should be noted that fig. 14 and 15 are only a specific example of the cooling assembly, and the flat plate shape of the cooling plate assembly should not be construed as a limitation of the cooling assembly, and in other embodiments, the cooling plate assembly may be replaced by an assembly having other shapes such as a circular arc shape, a cylindrical shape, or the like.

Fig. 16 is an isometric view of a cooling device according to still further embodiments of the present disclosure, and fig. 17 is an isometric view of the cooling device of fig. 16 from another perspective. The difference between the cooling device 2 shown in fig. 16 and the cooling device 1 shown in fig. 13 is mainly that the cooling converging device, specifically, the flow channel inlet and the flow channel outlet of the cooling converging device 2 in fig. 16 are led out of the cooling converging device by using the flow channel transfer pipes 21, so that the maintenance of the cooling converging device is more convenient, and the reliability of the cooling converging device is improved. Specifically, the flow passage switching 21 may be a hard pipe made of the same material as the main body 20, and is led out after being bent according to a preset angle by a tool, and the joint 12 is welded at the tail end of the pipe 21. The flow path inside the cooling device shown in fig. 16 can be found elsewhere in this specification, such as the flow path described in the description related to fig. 11, and will not be described here again.

Fig. 18 is an isometric view of a cooling device according to further embodiments of the present disclosure, and fig. 19 is a schematic view of a flow path inside the cooling device shown in fig. 18. The difference of the cooling device 3 shown in fig. 18 from the cooling device 1 shown in fig. 13 is that the first converging channel 35a and the second converging channel 35b on the cooling converging device main body 30 are both in a "C" channel, that is, the first converging channel and the second converging channel on the main body are respectively in a semi-communication state with the inner flow channel sealed by the cover plate 31, so as to reduce the difference of the length and the flow resistance of the flow channel flowing through each cooling component 13/14 as much as possible, further reduce the temperature difference between each cooling component 13/14, reduce the thermal deformation of the object to be cooled, and improve the overall motion performance of the vacuum equipment. The flow path inside the cooling device shown in fig. 19 can be found elsewhere in this specification, such as the flow path described in the description related to fig. 11, and will not be described here again.

Fig. 20 is an isometric view of a cooling device according to still other embodiments of the present description. The difference between the cooling device 4 shown in fig. 20 and the cooling device 3 shown in fig. 18 is that the flow channel inlet and the flow channel outlet on the main body 40 of the cooling confluence device are arranged on the outer edge of the main body 40, specifically on the boss 409 protruding laterally of the main body 40, so that the maintenance of the cooling confluence device is more convenient, such as the replacement of the joint 12 on the flow channel inlet and the flow channel outlet is more convenient, and the reliability of the cooling confluence device is improved. The flow path inside the cooling device shown in fig. 20 can be found elsewhere in this specification, such as the flow path described in the description related to fig. 11, and will not be described here again.

Fig. 21 is an isometric view of a cooling device according to still further embodiments of the present disclosure, and fig. 22 is a schematic view of a flow path inside the cooling device shown in fig. 21. The cooling device 5 shown in fig. 21 is different from the cooling device 1 shown in fig. 13 in that the flow passage inlet and the flow passage outlet are provided on a boss 509 at the outer edge of the main body 50. The first and second converging reservoirs 55a and 55b are arranged as full-flow "back" channels to reduce the flow resistance of the cooling medium inside the converging reservoirs and further improve the overall cooling efficiency of the cooling device 5. The flow path inside the cooling device shown in fig. 22 can be found elsewhere in this specification, such as the flow path described in the description related to fig. 11, and will not be described here again.

Fig. 23 is an isometric view of a cooling device according to further embodiments of the present disclosure, and fig. 24 is a schematic view of a flow path inside the cooling device shown in fig. 23. The cooling device 6 shown in fig. 23 is different from the cooling device 1 shown in fig. 13 in that the first and second sink fields 65a and 65b are replaced with fully-connected hexagonal annular channels with semi-connected annular (e.g., C-shaped) channels, and the first and second sink fields 65a and 65b may not completely overlap.

The flow path inside the cooling device shown in fig. 24 can be found elsewhere in this specification, such as the flow path described in the description related to fig. 11, and will not be described here again.

Some embodiments of the present disclosure further provide a method for processing a cooling and converging device, which is mainly used for forming a flow passage section, such as a first flow passage section, a second flow passage section or a flow passage section at an intermediate layer, on the cooling and converging device provided in some embodiments of the present disclosure, and the method includes: an inner channel is inwards formed in the side face of the main body of the cooling confluence device, more than two linear channels are formed in different layers and different directions of the main body of the cooling confluence device in a punching mode, and then ports, close to the side face of the main body, of the formed inner channel are blocked, so that more than one flow channel section in the cooling confluence device is obtained. In some embodiments, a number of holes of different depths (where the depth direction may be parallel to the xoy plane in fig. 7-9) may be formed inwardly along the circumferential side of the body, depending on the type and number of objects to be cooled, the size and depth of the holes may depend on the size of the body and the layout of the cooling assembly, for example, the inner diameter of the holes may be larger when the body is thicker, and the corresponding holes may be deeper if the cooling assembly is to be mounted on a region of the body near the center or center.

In the using and running stage of the vacuum equipment, the conditions of the reduced air tightness of the equipment and the increased total leak rate often occur, which is a main reason for influencing the normal operation of the vacuum equipment, and the welding is one of sealing schemes which are relatively friendly to the leak rate, so that the welding is simple in technological operation and can meet the extremely low vacuum leak rate index. Thus, in some embodiments, a cylinder (e.g., cylinder 109 in fig. 7-9) having a diameter equal to or slightly less than the inner diameter of the inner channel and a length may be plugged into the inner channel from the port in the side of the body, and then the cylinder may be sealed to the inner channel wall, thereby plugging the port. The processing mode is simple, the number of middle holes in the processing process is small, one end of the processed inner channel is plugged through the matching of the cylinder and the welding mode, and the vacuum leakage rate of the use environment of the cooling converging device can be effectively reduced.

In some embodiments, through holes with different depths may be formed in the main body along the height direction of the main body, one ends of the through holes are opened on the upper surface of the main body, and the other ends of the through holes are opened on the more than one flow channel sections, so as to form a flow channel inlet, a flow channel outlet, a tributary inlet, a tributary outlet of the first tributary interface, and the like. Wherein, when the first branch port is communicated with the cooling branch of the cooling assembly, more than one flow passage section in the main body can be communicated with the cooling branch in the cooling assembly in space so as to form an integral flow field of the cooling device.

While the basic concepts have been described above, it will be apparent to those skilled in the art that the foregoing detailed disclosure is by way of example only and is not intended to be limiting. Although not explicitly described herein, various modifications, improvements, and adaptations to the present disclosure may occur to one skilled in the art. Such modifications, improvements, and modifications are taught within this specification and are therefore within the spirit and scope of the exemplary embodiments of this description.

Claims (14)

1. The cooling confluence device is characterized by comprising a main body and more than two flow passages which are not communicated with each other and are arranged in the main body, wherein at least two flow passages in the more than two flow passages which are not communicated with each other are distributed at different layers of the main body;

the main body is also provided with more than one group of first branch flow interfaces, and the first branch flow interfaces are used for communicating cooling branch flows at the cooling assembly; the first branch interfaces comprise branch inlets and branch outlets, the branch inlets and the branch outlets of the same group of first branch interfaces are communicated with flow channels at different levels, and when the more than one group of first branch interfaces are respectively connected with cooling branches of corresponding cooling assemblies, the more than two flow channels which are not communicated with each other can form a communication flow field with the cooling branches at each cooling assembly;

The main body is also provided with a flow passage inlet and a flow passage outlet so as to become the inlet and the outlet of the communication flow field when the communication flow field is formed.

2. The cooling manifold device according to claim 1, wherein the different levels are obtained by dividing the main body in a height direction or the different levels are obtained by dividing the main body in a radial direction, and at least include a first level and a second level, wherein the two or more flow passages that do not communicate with each other include a first level flow passage located at the first level and a second level flow passage located at the second level;

the flow channel inlet is communicated with the first layer of flow channel or the second layer of flow channel, and the flow channel outlet is communicated with the second layer of flow channel or the first layer of flow channel correspondingly.

3. The cooling manifold device according to claim 2, wherein when the different horizons are obtained by dividing the main body in the height direction:

the first layer flow channel comprises a first converging flow field and more than two first flow channel sections, and the second layer flow channel comprises a second converging flow field and more than two second flow channel sections; the two or more first runner segments are communicated with the first converging domain, and the two or more second runner segments are communicated with the second converging domain;

The flow channel inlet and the branch inlet of at least one group of the more than one group of the first branch interfaces are arranged on different first flow channel sections or on different second flow channel sections, and the flow channel outlet and the branch outlet of at least one group of the more than one group of the first branch interfaces are correspondingly arranged on different second flow channel sections or on different first flow channel sections; the inner diameter of the converging flow field is larger than the inner diameter of the flow passage section.

4. A cooling manifold as claimed in claim 3, wherein the manifold region is in the form of a fully or semi-communicating annular channel; the runner section is a straight channel.

5. The cooling manifold as recited in claim 3, wherein the first manifold is formed by a first manifold opening on the upper surface of the main body and an upper cover plate covering the first manifold, and the second manifold is formed by a second manifold opening on the lower surface of the main body and a lower cover plate covering the second manifold.

6. A cooling manifold as claimed in claim 3, wherein for the same set of first tributary interfaces: the tributary inlet of the flow channel is communicated with one of the first channel sections of the first layer of flow channels, and the tributary outlet of the flow channel is communicated with one of the second channel sections of the second layer of flow channels.

7. The cooling manifold of claim 3, wherein the different levels further comprise an intermediate level between the first level and the second level, the two or more flow passages that are not in communication with each other further comprising one or more flow passage segments at the intermediate level, each flow passage segment being not in communication with each other when the flow passage segments are two or more;

the tributary inlet of the first tributary interface corresponding to the cooling tributary at the first cooling module is communicated with one of the first channel sections of the first layer of channels, the tributary outlet of the first tributary interface corresponding to the cooling tributary at the second cooling module is communicated with one of the second channel sections of the second layer of channels, and the tributary outlet of the first tributary interface corresponding to the cooling tributary at the first cooling module and the tributary inlet of the first tributary interface corresponding to the cooling tributary at the second cooling module are communicated through one of the channel sections at the intermediate level.

8. The cooling manifold device of claim 7, wherein a length or a flow area of the cooling branch at the first cooling assembly is greater than a length or a flow area of the cooling branch at the second cooling assembly; the flow channel inlet is communicated with the first layer of flow channel, and the flow channel outlet is communicated with the second layer of flow channel.

9. The cooling manifold device of claim 2, wherein when the different horizons radially divide the body:

the first layer flow path comprises a first sink basin, and the second layer flow path comprises a second sink basin;

the different horizons further comprise an intermediate horizon between the first horizon and the second horizon, the two or more flow channels that are not in communication with each other further comprise one or more flow channel segments that are positioned at the intermediate horizon, and when the flow channel segments are two or more, the flow channel segments are not in communication with each other;

a tributary inlet of a first tributary interface corresponding to a cooling tributary at a first cooling module communicates with the first converging region through a third flow passage section at the intermediate level, a tributary outlet of a first tributary interface corresponding to a cooling tributary at a second cooling module communicates with the second converging region through a fourth flow passage section at the intermediate level, and a tributary outlet of a first tributary interface corresponding to a cooling tributary at a first cooling module communicates with a tributary inlet of a first tributary interface corresponding to a cooling tributary at a second cooling module through a fifth flow passage section at the intermediate level;

The inner diameter of the converging flow field is larger than the inner diameter of the flow passage section.

10. The cooling manifold device of claim 1, wherein the body comprises a metal plate;

the main body also comprises a first mounting piece for fixing the cooling assembly and a second mounting piece for fixing the main body.

11. A cooling device comprising a cooling manifold device according to any one of claims 1 to 10 and one or more cooling modules, wherein a cooling branch is provided at the cooling module for cooling an object to be cooled, and wherein the cooling branch at the cooling module communicates with a first branch interface of the cooling manifold device.

12. The cooling device of claim 11, wherein the cooling assembly comprises a first cooling plate set, a second cooling plate set, and a cooling plate set compact;

the first cooling plate group and the second cooling plate group are pressed into blocks through the cooling plate group at intervals and are fixedly connected with each other so as to form a containing space for placing an object to be cooled;

the first cooling plate group is provided with a first cooling plate circulation domain, the second cooling plate group is internally provided with a second cooling plate circulation domain, a first briquetting flow passage and a second briquetting flow passage are arranged in the cooling plate group briquetting, the first briquetting flow passage is sequentially communicated with a first opening of the first cooling plate circulation domain and a first opening of the second cooling plate circulation domain, the second briquetting flow passage is sequentially communicated with a second opening of the first cooling plate circulation domain and a second opening of the second cooling plate circulation domain, and the first cooling plate circulation domain, the second cooling plate circulation domain, the first briquetting flow passage and the second briquetting flow passage form cooling branch flow;

A second branch port is arranged on the cooling plate group pressing block, a branch inlet of the second branch port communicates the first pressing block flow channel with a branch outlet of the first branch port of the cooling converging device, and a branch outlet of the second branch port communicates the second pressing block flow channel with a branch inlet of the first branch port of the cooling converging device;

the cooling plate group pressing block is fixed on the cooling converging device through a third mounting piece.

13. The cooling device of claim 12, wherein the cooling plate pack compact comprises a first segment, a second segment, and a third segment;

the first partition, the first cooling plate group, the second partition, the second cooling plate group and the third partition are abutted against and sealed and fixedly connected in sequence;

a first section of the first briquetting flow passage and a first section of the second briquetting flow passage are arranged in the first partition in a penetrating manner; an opening of one end of the first section of the first briquetting flow passage on the first partition is a tributary inlet of the second tributary interface, and an opening of one end of the first section of the second briquetting flow passage on the first partition is a tributary outlet of the second tributary interface;

A second section of the first briquetting flow passage and a second section of the second briquetting flow passage are arranged in the second partition in a penetrating manner; the opening of one end of the second section of the first briquetting flow channel on the second partition, the opening of the other end of the first section of the first briquetting flow channel on the first partition and the first opening of the first cooling plate group flow domain are aligned and communicated; an opening of one end of the second section of the second briquetting flow channel on the second partition, an opening of the other end of the first section of the second briquetting flow channel on the first partition and a second opening of the first cooling plate group flow domain are aligned and communicated;

the opening of the other end of the second section of the first briquetting flow passage on the second partition is aligned with and communicated with the first opening of the second cooling plate group flow region; the opening of the other end of the second section of the second briquetting flow passage on the second partition is aligned with and communicated with the second opening of the second cooling plate group flow region; or, a third section of the first briquetting flow passage and a third section of the second briquetting flow passage are arranged in the third partition in a semi-penetrating manner; an opening of one end of a third section of the first briquetting flow channel on the third partition, an opening of the other end of a second section of the first briquetting flow channel on the second partition and a first opening of the second cooling plate group flow domain are aligned and communicated; an opening of one end of a third section of the second briquetting flow channel on the third partition, an opening of the other end of the second section of the second briquetting flow channel on the second partition and a second opening of the second cooling plate group flow domain are aligned and communicated;

The bottom of the third block is provided with the third mounting piece.

14. A method of manufacturing a cooling manifold device according to any one of claims 1 to 10, comprising:

an inner channel is opened inwards at the side surface of the main body of the cooling confluence device, and the opened inner channel is blocked near the port of the side surface, so that more than one flow channel section in the cooling confluence device is obtained.