CN117666072A - Galvanometer mirror device and bonding method of stress-free galvanometer mirror - Google Patents
Galvanometer mirror device and bonding method of stress-free galvanometer mirror Download PDFInfo
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- CN117666072A CN117666072A CN202311759766.3A CN202311759766A CN117666072A CN 117666072 A CN117666072 A CN 117666072A CN 202311759766 A CN202311759766 A CN 202311759766A CN 117666072 A CN117666072 A CN 117666072A
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- mirror
- galvanometer
- plane
- galvanometer mirror
- frame
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000000853 adhesive Substances 0.000 claims description 18
- 230000001070 adhesive effect Effects 0.000 claims description 18
- 239000003292 glue Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 229910001374 Invar Inorganic materials 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000002241 glass-ceramic Substances 0.000 claims description 2
- 229920006335 epoxy glue Polymers 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229920006332 epoxy adhesive Polymers 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Abstract
The present disclosure provides a galvanometer mirror apparatus and a bonding method of a stress-free galvanometer mirror, wherein the galvanometer mirror apparatus includes: a driving member, a mirror mount, and a galvanometer mirror; the drive member includes a drive shaft and a housing, the drive shaft extending out of one end of the housing; the mirror bracket is fixedly connected with the driving shaft of the driving part in a cementing mode and is used for supporting the galvanometer reflector; the galvanometer reflector is fixed on the mirror bracket in a cementing mode and is used for scanning. Through this disclosure, all adopt glued mode fixed connection between mirror holder and the drive shaft, between galvanometer speculum and the mirror holder, realize the stress-free bonding.
Description
Technical Field
The present disclosure relates to the technical field of galvanometer mirrors, and in particular, to a galvanometer mirror device and a bonding method of a stress-free galvanometer mirror.
Background
High-precision ophthalmic instruments such as ophthalmic full femtosecond operation equipment and the like need to adopt a galvanometer to scan at a high speed to acquire the 3D section information of human eyes, the cutting depth is between 2 and 3 mu m during operation, the quality of focused light beams is required to be high, obvious problems of defocusing, spherical aberration, coma aberration and astigmatic aberration cannot be caused, therefore, the high requirements on the type of a galvanometer reflection mirror surface are met, and the root mean square RMS of the galvanometer reflection mirror surface needs to be smaller than 1/20 lambda. In addition, since the galvanometer mirror needs to swing at high speed and high frequency, it is difficult to fix the galvanometer mirror mechanically.
The common practice in the prior art is to adopt a single-component or double-component industrial adhesive, fix and adhere the reflecting mirror to the mirror seat through a jig, fix the mirror seat on the motor rotating shaft through a screw, and put the mirror seat into use after the adhesive is cured for 8-12 hours. However, by adopting the method, on one hand, the mounting stress of the screw leads to poor mirror surface of the vibrating mirror, which is less than 1/10 lambda; on the other hand, the common bonding tool can only meet the condition that the inclination error of the reflecting mirror and the vibrating mirror shaft is within 0.1 DEG, and the inclination error is larger.
Disclosure of Invention
In view of the drawbacks of the prior art, an object of the present disclosure is to provide a galvanometer mirror device and a method for bonding a stress-free galvanometer mirror.
According to a first aspect of the present disclosure, there is provided a galvanometer mirror apparatus comprising: a driving member, a mirror mount, and a galvanometer mirror;
the drive member includes a drive shaft and a housing, the drive shaft extending out of one end of the housing;
the mirror bracket is fixedly connected with the driving shaft of the driving part in a cementing mode and is used for supporting the galvanometer reflecting mirror;
the galvanometer reflector is fixed on the mirror bracket in the cementing mode, and is used for scanning.
Optionally, the mirror bracket and the driving shaft of the driving component are in cementing and fixing connection by adopting low-stress curing glue, and the galvanometer reflector and the mirror bracket are in cementing and fixing connection by adopting low-stress curing glue.
Optionally, the frame includes a first groove for supporting the drive shaft and a second groove for supporting the galvanometer mirror.
Optionally, the vibrating mirror reflector is made of any one of quartz glass, silicon carbide and microcrystalline glass, and the mirror frame is made of invar.
Optionally, the mirror mount and the galvanometer mirror have the same coefficient of thermal expansion.
According to a second aspect of the present disclosure, there is provided a bonding method of a stress-free galvanometer mirror, including:
inserting the drive shaft of the drive component into the first recess of the frame;
cementing and fixing the mirror frame and the driving shaft of the driving part by adopting low-stress curing adhesive, and curing the mirror frame and the driving part for a preset period of time;
mounting the eyeglass frame and the driving part on a galvanometer bonding tool part;
and installing the galvanometer reflecting mirror on the mirror bracket according to the two-dimensional plane of the galvanometer bonding tool part, wherein the two-dimensional plane of the galvanometer bonding tool part comprises a plane A and a plane B.
Optionally, the mounting the galvanometer mirror to the mirror frame according to the two-dimensional plane of the galvanometer bonding tool component includes:
uniformly arranging the low-stress curing adhesive on the glasses frame;
placing the galvanometer mirror on the plane a;
inserting the galvanometer mirror into a second groove of the mirror holder along the plane B and contacting a plane C of the second groove;
and solidifying the galvanometer reflecting mirror and the mirror frame for the preset time period.
Optionally, the plane a is perpendicular to the plane B, the plane a is perpendicular to the plane C, the plane B is perpendicular to the plane C, the plane a is used for defining a longitudinal mounting position of the galvanometer mirror, and the plane B is used for defining a transverse mounting position of the galvanometer mirror.
Optionally, the method further comprises:
and controlling concentricity of the mirror frame and the shell of the driving part to be less than 5 mu m by adopting a centering car process.
Optionally, the low-stress curing adhesive adopts epoxy adhesive 3M2216, and the adhesive layer thickness of the low-stress curing adhesive on two sides of the galvanometer reflector is 0.1mm.
Compared with the prior art, the embodiment of the disclosure has at least one of the following beneficial effects:
through above-mentioned technical scheme, adopt low stress curing glue to carry out glued fixed connection between mirror holder and the drive shaft of drive part, between galvanometer speculum and the mirror holder, avoid the screw locking to produce stress, realize stress-free bonding.
In the embodiment of the disclosure, the material of the mirror frame adopts invar with the same thermal expansion coefficient as that of the galvanometer mirror, and can be applied in a wide temperature range.
In the embodiment of the disclosure, the galvanometer reflector is installed by adopting the galvanometer bonding tool component, the galvanometer bonding tool component has a simple structure, and can reduce the inclination error between the reflector and the galvanometer shaft, so that the high-precision bonding of the galvanometer reflector is realized.
Drawings
Other features, objects and advantages of the present disclosure will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings in which:
fig. 1 is a schematic diagram of the overall structure of a galvanometer mirror apparatus according to an exemplary embodiment of the present disclosure.
Fig. 2 is a cross-sectional view of the overall structure of a galvanometer mirror apparatus according to an exemplary embodiment of the disclosure.
Fig. 3 is a flowchart of a method for bonding a stress-free galvanometer mirror according to an exemplary embodiment of the disclosure.
Fig. 4 is a front view of a bonding tool component for a galvanometer according to an exemplary embodiment of the disclosure.
Fig. 5 is a side view of a galvanometer bonding tool component provided in an exemplary embodiment of the present disclosure.
Fig. 6 is a schematic diagram of an overall structure of a galvanometer mirror bonded by a galvanometer bonding tool according to an exemplary embodiment of the disclosure.
Description of the reference numerals
100. Mirror device of vibrating mirror
101. Mirror reflector
102. Spectacle frame
103. Driving shaft
104. Outer casing
105. Vibrating mirror bonding tool part
106. Outer cylinder of driving part
Detailed Description
The present disclosure is described in detail below with reference to specific embodiments. The following examples will assist those skilled in the art in further understanding the present disclosure, but are not intended to limit the disclosure in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the spirit of the present disclosure. These are all within the scope of the present disclosure.
Fig. 1 is a schematic diagram of the overall structure of a galvanometer mirror apparatus according to an exemplary embodiment of the present disclosure. Fig. 2 is a cross-sectional view of the overall structure of a galvanometer mirror apparatus according to an exemplary embodiment of the disclosure.
As shown in fig. 1 and 2, the present disclosure provides a galvanometer mirror apparatus 100 including: a driving part, a mirror holder 102 and a galvanometer mirror 101.
The drive member includes a drive shaft 103 and a housing 104, the drive shaft 103 extending out of one end of the housing 104.
Wherein the driving member may be an electric motor and the driving shaft 103 is a motor shaft.
The lens holder 102 is fixedly connected with a driving shaft 103 of the driving part in a cementing manner, and the lens holder 102 is used for supporting the galvanometer mirror 101.
In one possible embodiment, the frame 102 can include a first recess (not shown) for supporting the drive shaft 103.
As an example, the drive shaft 103 can be inserted into the first recess prior to adhesively securing the frame 102 to the drive shaft 103 of the drive component.
The galvanometer mirror 101 is fixed on the mirror bracket 102 in a cementing mode, and the galvanometer mirror 101 is used for scanning to acquire 3D section information.
In one possible embodiment, the frame 102 further includes a second recess (not shown) for supporting the galvanometer mirror 101.
Wherein the heights of both sides of the second groove may be different, the front surface of the galvanometer mirror 101 and the back surface of the galvanometer mirror 101 can be identified by distinguishing the heights of both sides of the second groove, for example, the high side of the second groove corresponds to the front surface of the galvanometer mirror 101 and the low side of the second groove corresponds to the back surface of the galvanometer mirror 101.
As another example, the galvanometer mirror 101 is embedded in the second groove prior to adhesively securing between the galvanometer mirror 101 and the frame 102.
In one possible embodiment, the mirror mount 102 is adhesively secured to the drive shaft 103 of the drive member with a low stress curing adhesive, and the galvanometer mirror 101 is adhesively secured to the mirror mount 102 with a low stress curing adhesive.
Wherein, the low-stress curing adhesive can adopt epoxy adhesive 3M2216.
After the mirror mount 102 and the driving shaft 103 of the driving member and the galvanometer mirror 101 and the mirror mount 102 are glued and fixed, the mirror needs to be cured for 24 hours, so that the adhesion is prevented from being unstable.
In this embodiment, the mirror holder 102 is fixedly connected to the driving shaft 103 of the driving component, and the galvanometer mirror 101 is fixedly connected to the mirror holder 102 by using a low-stress curing adhesive, so that stress generated by locking the screw is avoided, and stress-free bonding is realized.
In one possible embodiment, the material of the galvanometer mirror 101 may be any of quartz glass, silicon carbide, and glass ceramic, the material of the frame 102 is invar, and the thermal expansion coefficients of the frame 102 and the galvanometer mirror 101 are the same.
The content of nickel element in the material of the mirror holder 102 and the nickel content in the material of the galvanometer mirror 101 can be adjusted to ensure that the thermal expansion coefficients of the mirror holder 102 and the galvanometer mirror 101 are the same.
During the part machining of the frame 102, the frame 102 is immersed in liquid nitrogen to ensure dimensional stability of the frame 102.
In the installation process of the galvanometer mirror 101, precise tool parts can be adopted to ensure the position accuracy of the galvanometer mirror 101.
By the above technical scheme, the material of the frame 102 is invar with the same thermal expansion coefficient as that of the galvanometer mirror 101, and can be applied in a wide temperature range.
Fig. 3 is a flowchart of a method for bonding a stress-free galvanometer mirror according to an exemplary embodiment of the disclosure. Fig. 4 is a front view of a bonding tool component for a galvanometer according to an exemplary embodiment of the disclosure. Fig. 5 is a side view of a galvanometer bonding tool component provided in an exemplary embodiment of the present disclosure. Fig. 6 is a schematic diagram of an overall structure of a galvanometer mirror bonded by a galvanometer bonding tool according to an exemplary embodiment of the disclosure.
As shown in fig. 3 and 4, the present disclosure further provides a bonding method of a stress-free galvanometer mirror, including:
s1, the driving shaft 103 of the driving component is embedded into the first groove of the frame 102.
S2, cementing and fixing the lens frame 102 and the driving shaft 103 of the driving part by adopting low-stress curing adhesive, and curing the lens frame 102 and the driving part for a preset period of time.
Wherein, the low-stress curing adhesive adopts epoxy adhesive 3M2216.
In the present disclosure, the frame 102 and the drive shaft 103 of the drive component are cured 24 hours after being adhesively secured with the epoxy 3M2216.
It will be appreciated by those skilled in the art that the predetermined length of time for curing can be adapted to the environmental factors or type of low stress curing adhesive to ensure a secure bond between the frame 102 and the drive components.
In one possible embodiment, after curing the frame 102 with the drive component for a predetermined period of time, a centering car process can be used to control concentricity of the frame 102 with the housing 104 of the drive component to less than 5 μm.
And S3, mounting the eyeglass frame 102 and the driving part on the vibrating mirror bonding tool part 105.
As shown in fig. 4, the galvanometer bonding tool part 105 is an integrated machined part, the machining precision is high, and the galvanometer mirror 101 is bonded by adopting the galvanometer bonding tool part 105, so that the inclination precision between the Galvo axis (the central axis of the driving shaft of the driving part) and the galvanometer mirror 101 can be ensured to be smaller than 0.01 degrees.
S4, the galvanometer reflecting mirror 101 is mounted on the mirror bracket 102 according to the two-dimensional plane of the galvanometer bonding tool part 105, wherein the two-dimensional plane of the galvanometer bonding tool part 105 comprises a plane A and a plane B.
Wherein plane a is used to define the longitudinal mounting position of galvanometer mirror 101 and plane B is used to define the lateral mounting position of galvanometer mirror 101.
In one possible embodiment, S4 may include S41 to S44.
S41, uniformly arranging low-stress curing glue on the glasses frame 102.
Wherein, the low-stress curing adhesive adopts epoxy adhesive 3M2216.
For example, the epoxy 3M2216 can be uniformly applied on both sides and the plane of the second groove of the frame 102.
S42, the galvanometer mirror 101 is placed on the plane a.
As shown in fig. 5, the plane a is used as a reference plane.
S43, inserting the galvanometer mirror 101 into the second groove of the frame 102 along the plane B and contacting the plane C of the second groove.
Wherein, the glue layer thickness of the low stress curing glue at the two sides of the vibrating mirror reflector 101 is 0.1mm.
As shown in fig. 4, in the present disclosure, plane a is perpendicular to plane B, plane a is perpendicular to plane C, and plane B is perpendicular to plane C.
S44, curing the galvanometer mirror 101 and the mirror bracket 102 for a preset period of time.
Wherein the preset curing time is 24 hours.
After bonding the galvanometer mirror 101 using the galvanometer bonding tool part 105, the overall effect is shown in fig. 6.
Through above-mentioned technical scheme, through adopting galvanometer bonding frock part 105 installation galvanometer reflector 101, galvanometer bonding frock part 105 simple structure can also reduce the inclination error between speculum and the galvanometer axle, realizes the high accuracy bonding of galvanometer reflector 101.
In one possible embodiment, a galvanometer mirror apparatus 100 bonded using the bonding method of a stress-free galvanometer mirror provided by the present disclosure was tested:
as shown in fig. 1, the accuracy of the Galvo spindle (i.e., the central axis of the galvanometer mirror) and the Galvo outer cylinder axis (i.e., the central axis of the outer cylinder 106 of the drive member) is less than 24": taking the Galvo outer cylinder shaft as a reference, rotating the Galvo outer cylinder shaft to test the jump of the Galvo rotating shaft, wherein the diameter of the Galvo outer cylinder shaft is 28mm, and the Galvo outer cylinder shaft is tested by adopting a dial indicator to meet the condition that the Galvo outer cylinder shaft is within 4um, namely, the angle is: 4um/28mm/1000 x 57.3 x 60 = 24".
The precision of the plane A and the Galvo outer cylinder shaft of the vibrating mirror bonding tool part 105 is less than 20%, the height of the plane A is 50mm, namely the axis parallelism of the plane A and the Galvo outer cylinder shaft is within 20/60/60/57.3×50= 0.00484 mm=4.84 um.
The mirror parallelism of the galvanometer mirror 101 is 20".
Integral inclination (RSS) =sqrt [ ], 24++20++2+20++2 () = 37.1"<40".
Therefore, the vibrating mirror reflector 101 is bonded by the vibrating mirror bonding tool part 105, high-precision bonding can be achieved, and the vibrating mirror reflector bonding tool part 105 is simple in structure and simple in operation process.
The foregoing has described specific embodiments of this disclosure. It is to be understood that the present disclosure is not limited to the particular embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the claims without affecting the spirit of the disclosure. The above-described preferred features may be used in any combination without collision.
Claims (10)
1. A galvanometer mirror apparatus, comprising: a driving member, a mirror mount, and a galvanometer mirror;
the drive member includes a drive shaft and a housing, the drive shaft extending out of one end of the housing;
the mirror bracket is fixedly connected with the driving shaft of the driving part in a cementing mode and is used for supporting the galvanometer reflecting mirror;
the galvanometer reflector is fixed on the mirror bracket in the cementing mode, and is used for scanning.
2. The galvanometer mirror assembly of claim 1, wherein the mirror mount is fixedly adhesively bonded to the drive shaft of the drive member with a low stress curing adhesive, and wherein the galvanometer mirror is fixedly adhesively bonded to the mirror mount with a low stress curing adhesive.
3. The galvanometer mirror apparatus according to claim 1, wherein said frame includes a first groove for supporting said drive shaft and a second groove for supporting said galvanometer mirror.
4. The galvanometer mirror apparatus according to claim 1, wherein a material of the galvanometer mirror is any one of quartz glass, silicon carbide, and glass ceramics, and a material of the mirror frame is invar.
5. The galvanometer mirror apparatus according to claim 1, wherein a coefficient of thermal expansion of the mirror mount and the galvanometer mirror is the same.
6. A method of bonding a stress-free galvanometer mirror, comprising:
inserting the drive shaft of the drive component into the first recess of the frame;
cementing and fixing the mirror frame and the driving shaft of the driving part by adopting low-stress curing adhesive, and curing the mirror frame and the driving part for a preset period of time;
mounting the eyeglass frame and the driving part on a galvanometer bonding tool part;
and installing the galvanometer reflecting mirror on the mirror bracket according to the two-dimensional plane of the galvanometer bonding tool part, wherein the two-dimensional plane of the galvanometer bonding tool part comprises a plane A and a plane B.
7. The method of claim 6, wherein said mounting a galvanometer mirror to the frame according to the two-dimensional plane of the galvanometer bonding tool component comprises:
uniformly arranging the low-stress curing adhesive on the glasses frame;
placing the galvanometer mirror on the plane a;
inserting the galvanometer mirror into a second groove of the mirror holder along the plane B and contacting a plane C of the second groove;
and solidifying the galvanometer reflecting mirror and the mirror frame for the preset time period.
8. The method of claim 7, wherein the plane a is perpendicular to the plane B, the plane a is perpendicular to the plane C, the plane B is perpendicular to the plane C, the plane a is used to define a longitudinal mounting position of the galvanometer mirror, and the plane B is used to define a lateral mounting position of the galvanometer mirror.
9. The method of claim 6, wherein the method further comprises:
and controlling concentricity of the mirror frame and the shell of the driving part to be less than 5 mu m by adopting a centering car process.
10. The method of claim 6, wherein the low stress curing glue is epoxy glue 3M2216 and the glue layer thickness of the low stress curing glue on both sides of the galvanometer mirror is 0.1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311759766.3A CN117666072A (en) | 2023-12-20 | 2023-12-20 | Galvanometer mirror device and bonding method of stress-free galvanometer mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311759766.3A CN117666072A (en) | 2023-12-20 | 2023-12-20 | Galvanometer mirror device and bonding method of stress-free galvanometer mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117666072A true CN117666072A (en) | 2024-03-08 |
Family
ID=90068064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311759766.3A Pending CN117666072A (en) | 2023-12-20 | 2023-12-20 | Galvanometer mirror device and bonding method of stress-free galvanometer mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117666072A (en) |
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2023
- 2023-12-20 CN CN202311759766.3A patent/CN117666072A/en active Pending
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