CN117665008A - Phase deflection detection system and method for transparent and high-reflectivity sample surface detection - Google Patents
Phase deflection detection system and method for transparent and high-reflectivity sample surface detection Download PDFInfo
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Abstract
The application relates to the technical field of defect detection, in particular to surface defect detection of transparent and high-reflectivity materials, and specifically relates to a phase deflection detection system and a phase deflection detection method for detecting the surface of a transparent and high-reflectivity sample, wherein the system comprises a sample stage, a projection light source assembly, a detection camera and a processing system; the detection method comprises the following steps: projecting incident light to the surface of the sample through the projection light source assembly, and collecting reflected light of the incident light on the sample through the detection camera; acquiring a coding fringe pattern on the surface of a sample, and acquiring the position relationship among a light source, the sample and a detection camera; and calculating defect characteristics and surface type characteristics of the surfaces of the high-reflection sample and the transparent sample according to the coding fringe pattern and the position relation among the light source, the sample and the detection camera. The system is used for detecting the defects of the high-reflection sample and the transparent sample, and three-dimensional point cloud data of the sample can be obtained through system calibration while the defects of the sample are detected through one-time imaging.
Description
Technical Field
The application relates to the technical field of defect detection, in particular to surface defect detection of transparent and high-reflectivity materials, and specifically relates to a phase deflection detection system and a phase deflection detection method for transparent and high-reflectivity sample surface detection.
Background
With the advancement of technology, the quality requirements of high-quality optical devices in the industries of precise instruments, biomedical and consumer electronics are higher and higher, and the surface shape of the optical devices is from a simple plane surface, a spherical surface to a non-spherical free surface which is more and more complex to meet the requirements of more complex imaging functions. This also places high demands on the high-precision area detection of the optical lens.
The surface defect detection of the high-reflection spare and accessory parts is an important field in the field of industrial detection, such as 3C-type high-reflection spare and accessory parts, automobile interior parts, automobile spraying surfaces, wafers and silicon wafers in the semiconductor industry, reflectors and the like. The greatest detection difficulty of the sample is the problem of local overexposure, and the technology which can carry out high-back detection exists in the market at present comprises a time flight method, traditional machine vision, a laser scanner, a confocal laser interferometer and the like.
Phase deflection (phase deflection) is an effective, flexible and high-robustness technology suitable for complex high-reverse detection, and is realized by projecting grating fringes onto a sample surface, acquiring deformation fringes modulated by the sample surface by a camera, and extracting the deformation of the fringes to detect defects and reconstruct the surface of the sample surface. However, in practical projects, detection of many transparent components is encountered, and a great problem in transparent sample detection is that reflection and refraction occur on the upper and lower surfaces of the sample, and the captured deformed stripes have a problem of superposition, so that correct phase information cannot be extracted for defect detection and face reconstruction. Thus, the defect detection accuracy of the transparent sample is lower, and the effect of the surface reconstruction is poorer.
Disclosure of Invention
The invention aims to solve the technical problems that: the existing detection technology for detecting the surface type of the high-reflection sample has the defects of lower detection accuracy and poorer surface type reconstruction effect when the transparent sample is detected.
To this end, the present invention provides a phase shift detection system and method for transparent and highly reflective sample surface detection.
The technical scheme adopted for solving the technical problems is as follows:
a phase deflection detection system for transparent and highly reflective sample surface detection, comprising:
the sample stage is used for placing a sample and is provided with a reflecting film;
the light source in the projection light source assembly is a specially-made planar array structure light source, and the brightness, the contrast and the projection pattern of the light source are adjustable;
the detection camera is used for collecting reflected light of incident light on the sample;
and the processing system is used for calculating the defects and the surface shape of the sample according to the data acquired by the detection camera.
Through adopting above-mentioned technical scheme, through setting up the reflectance coating on the sample platform to place transparent sample on the reflectance coating, the light projection that the light source sent is on the reflectance coating, forms the mirror image of light source in the reflectance coating, and the light that the light source sent in the mirror image sees through transparent sample's upper surface and forms refraction light, and refraction light sees through sample surface and reaches the detection camera, thereby detects the refraction light of camera detection upper surface. The camera collects the deformed stripes due to the appearance of the sample surface, and the defect information of the sample surface is obtained by extracting the optical information of different channels of the deformed stripes.
Furthermore, the projection light source component and the detection camera adopt large aperture low distortion lenses, and an optical filter is arranged in front of the acquisition system lens.
By adopting the technical scheme, the light intensity information with higher contrast and low noise can be obtained, and the influence of the ambient light on the collected light signals can be reduced by arranging the optical filter on the collecting system lens.
A phase deflection detection method for detecting the surface of transparent and high-reflection sample comprises the following steps,
projecting incident light to the surface of the sample through the projection light source assembly, and collecting reflected light of the incident light on the sample through the detection camera;
acquiring a coding fringe pattern on the surface of a sample, and acquiring the position relationship among a light source, the sample and a detection camera;
and calculating defect characteristics and surface type characteristics of the surfaces of the high-reflection sample and the transparent sample according to the coding fringe pattern and the position relation among the light source, the sample and the detection camera.
By adopting the technical scheme, the projection light source component in the system can switch the projection pattern, so that the acquisition of the coding fringe pattern can be realized, and the projection of the calibration pattern can be realized to obtain the position relationship among the light source, the sample and the detection camera.
Further, the projection pattern of the projection light source assembly is switched, so that the pattern projected by the projection light source assembly is a stripe pattern, and the detection camera acquires a deformed coding stripe pattern after the reflection of the sample.
Further, the projection pattern of the projection light source assembly is switched, so that the projection light source assembly projects a calibration pattern, a detection camera collects a virtual image of the calibration pattern in a high-reflection sample or a reflection film, the sample is moved for a plurality of times, and calibration patterns of a plurality of positions are obtained, so that a rotation translation matrix of the light source assembly under a camera coordinate system is calculated.
Further, the calibration pattern is a circular calibration pattern.
By adopting the technical scheme, because the phase deviation imaging process camera collects the virtual image of the light source on the sample, if the calibration pattern is too complex, the defocus effect exists, the ghost image appears to cause the detection camera to be difficult to capture an effective point position, the problem can be well avoided by a round shape, and even though the defocus is carried out, the position of the circle center can be accurately extracted.
Further, before the light source projection, the sample imaging parameters are debugged to obtain working parameters matched with the reflectivity of the sample
Further, a film-coated reflecting mirror with reflectivity close to 1 is used as a standard sample, the test parameters of the standard sample are initial test parameters of the system, data acquisition of samples with different reflectivities is carried out according to the initial system parameters, and whether the light intensity acquired by a camera is suitable for the detection requirement of the sample is judged through multiple iterations according to the acquired light intensity and the light intensity ratio of the light intensity of the standard sample.
Further, detecting a sample defect by a phase shift coding technology, and for n-step phase shift, detecting a deformed stripe of a pixel point (x, y) shot by the camera 1 in a kth stripe image according to the formula: wherein A (x, y) represents the background light intensity; b (x, y) represents a modulation amplitude; />Representing the wrapping phase; />Representing the translational phase.
Further, according to the simultaneous n coding stripe formulas, obtaining the surface defects of the sample, wherein A (x, y) represents the false defects of dirt, dust and the like on the surface of the sample; b (x, y) represents a defect of contrast difference;the defects of pits, bulges and the like on the surface of the sample are reflected.
The invention has the beneficial effects that the system can realize the defect detection of the surface of the high-reflection sample and the defect detection of the surface and the inside of the transparent sample by arranging the reflecting film. By placing a transparent sample on a sample stage provided with a reflective film, light is reflected by the reflective film, whereby an image free from ghost images can be obtained. The system can obtain the gradient of the surface of the sample to be detected through system calibration while carrying out one-time imaging on the sample by switching the projection pattern, and the three-dimensional point cloud data of the sample is obtained through gradient integration. The system is simple to debug, an operator can obtain the most system parameters of the sample test by clicking a debugging key, and the defect detection of the sample can be finished by clicking a testing key.
Drawings
The invention will be further described with reference to the drawings and examples.
Fig. 1 is a schematic diagram of a phase deviation detecting system according to the present invention.
FIG. 2 is a flow chart of the imaging parameter tuning of the present invention.
FIG. 3 is a schematic diagram of the detection of a highly inverted sample in the present invention.
FIG. 4 is a schematic diagram of the detection of a transparent sample in the present invention.
In the figure: 1. detecting a camera; 2. a projection light source assembly; 3. a sample stage; 4. a sample; 5. a processing system.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the invention and therefore show only the structures which are relevant to the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
A phase deflection detection system for detecting the surface of a transparent and high-reflectivity sample 4 comprises a sample stage 3, an illumination system, a detection system and a processing system 5, wherein the illumination system comprises a projection light source assembly 2, and the detection system comprises a detection camera 1.
The light emitted by the projection light source assembly 2 is projected onto the surface of the sample 4, the incident light is reflected, and the reflected signal reaches the detection camera 1. The detection camera 1 acquires the stripes deformed due to the surface morphology of the sample 4, and acquires the defect information of the surface of the sample 4 by extracting the optical information of different channels of the deformed stripes.
The sample stage 3 is used for placing a sample 4 to be tested, a reflecting film is paved on the sample stage 3, so that when the transparent sample 4 is placed on the sample stage 3, light emitted by the light source assembly 1 is projected on the reflecting film, a mirror image of a light source is formed in the reflecting film, light reflected by the reflecting film penetrates through the transparent sample 4, refraction light is formed on the upper surface of the sample 4, the refraction light is reflected out of the surface of the sample 4 to reach the detection camera 1, the detection camera 1 detects refraction light on the upper surface, the detection camera 1 can also collect stripes deformed due to the surface morphology of the sample 4, and defect information of the surface of the sample 4 is obtained by extracting optical information of different channels of the deformed stripes.
The projection light source component 2 is a specially-made planar array structured light source, the brightness, contrast and projection pattern of the light source are adjustable, and the projection light source component 2 is used for projecting coding signals, and can adjust illumination intensity and angle according to the material and surface shape of the sample 4. The detection camera 1 is generally a camera, in this application, in order to obtain light intensity information with high contrast and low noise, the projection light source component 2 and the detection camera 1 are all large aperture low distortion lenses, and an optical filter is installed in front of the detection camera 1, so as to reduce influence of ambient light on signals.
A phase deviation detection method for detecting the surface of a transparent and highly reflective sample 4, comprising the steps of:
step one: imaging acquisition
1.1 imaging parameter tuning
The light emitted by the projection light source component 2 is projected onto the surface of the sample 4, if the surface of the sample 4 is a high reflection surface (mirror surface), the incident light is reflected on the surface of the sample 4, the reflected signal reaches the detection camera 1, if the sample 4 is a transparent sample 4, the light is projected on the reflection film to form reflected light, the reflected light is refracted out from the inside of the transparent sample 4 to form refracted light, and the detection camera 1 collects the refracted light.
The light emitted by the projection light source component 2 is the input light of the system, and the input light intensity information is I n (x, y), the incident light is reflected by the sample and then enters the light intensity I of the detection camera 1 c (x,y)，I c (x, y) is mainly related to the reflectivity R (x, y) of each location on the surface of the sample 4. The reflectivity of the surface of the sample 4 is high, so that the light intensity collected by the detection camera 1 is high, the reflectivity of the surface of the sample 4 is low, and the light intensity collected by the detection camera 1 is low.
According to the characteristics, a test method with simple operation is designed, a coated reflecting mirror with reflectivity close to 1 is used as a standard sample, and the test parameters of the standard sample are initial test parameters of the system. The data acquisition of the samples 4 with different reflectivities is carried out according to the initial system parameters, the light intensity acquired by the detection camera 1 is compared with the light intensity of the standard sample, the surface reflection characteristic of the sample 4 to be detected can be obtained preliminarily, and whether the light intensity acquired by the detection camera 1 is suitable for the detection requirement of the sample 4 is judged through multiple iterations according to the light intensity ratio.
1.2 imaging position data acquisition
The imaging position data acquisition is carried out by adopting a method of jointly calibrating the light source and the detection camera 1, and the calibration aims at solving the coordinate position relation of the detection camera 1, the internal reference and the light source and the detection camera 1, so as to carry out ray tracing on incident light and reflected light, solve gradient information of a to-be-detected point and solve height information through gradient integration.
The pattern projected by the projection light source module 2 is switched, and a virtual image of the light source pattern in the mirror surface (the highly reflective sample 4 or the transparent sample 4 and the reflective film) is collected. Firstly, a calibration pattern is generated, a circular calibration chart is adopted in the calibration process, the phase deviation imaging process detects that a virtual image of a light source in a mirror surface is acquired by the camera 1, and a defocusing effect exists, so that if the checkerboard calibration chart is adopted, the sub-pixel coordinates of the corner points are difficult to accurately extract after the corner points of the checkerboard are defocused, the problem can be well avoided by adopting the circular calibration chart, and even if the corner points are defocused, the position of the circle center can be accurately extracted.
The light source projects on the circular calibration chart, and then the position of the plane mirror (the high reflection sample 4 or the transparent sample 4 and the reflecting film) is freely moved, so that the virtual image of the calibration plate in the mirror surface is within the visual field range of the detection camera 1. And moving the plane mirror 10 times to obtain virtual images of the calibration plates at 10 positions in the plane mirror. And processing the acquired image, establishing a coordinate system by taking the center of a first circle at the upper left corner of the image as an origin, and extracting the coordinate value of the standard point in the image. And calibrating the detection camera 1 according to a Zhang Zhengyou camera calibration method, and calculating a rotation translation matrix of the virtual light source image under a camera coordinate system. Because the virtual image of the calibration plate and the calibration plate image displayed by the light source are mirrored about the plane mirror, the rotation translation matrix of the light source assembly under the camera coordinate system can be calculated, and the incident light ray and the reflected light ray vectors are transferred to the camera coordinate system for expression.
1.3 code fringe pattern acquisition
The projection pattern of the projection light source component 2 is switched, so that the pattern projected by the projection light source component 2 is a stripe pattern, and the detection camera 1 acquires a deformed coding stripe pattern after reflection of the sample 4.
Generally, in the phase shift encoding technique, for n-step phase shift, the formula for detecting deformed fringes of a pixel (x, y) in a camera coordinate system captured by the camera 1 in the kth fringe image is:
wherein A (x, y) represents the background light intensity; b (x, y) represents a modulation amplitude;representing the wrapping phase (relative phase); />Representing the translational phase.
Based on the above encoded fringe expression, the relationship between the light intensity and the reflectivity of sample 4 in step 1.1 is:
step two: image and data processing
2.1 Defect analysis
And (3) carrying out image noise reduction processing on the deformation fringe pattern acquired by the detection camera 1 in the step (1.1), and solving the background light intensity, modulation degree and phase information through four equations in the simultaneous light intensity expression.
According to the light intensity data acquired in the first step, the application adopts a four-step phase shift coding technology, the phase shift of four grating images is respectively 0, pi/2, pi and 3 pi/2, the light intensity expression is as follows,
wherein A (x, y) represents background light intensity, and mainly represents false defects such as dirt, dust and the like on the surface of the sample 4; b (x, y) represents the modulation amplitude, mainly representing defects with contrast differences;the wrapping phase (relative phase) is mainly represented by defects such as pits and bulges on the surface of the sample 4, and A (x, y), B (x, y) and _ can be obtained by combining the four formulas>So that surface defects of the sample 4 can be obtained.
2.2 surface analysis
The phases obtained by the four equations in the simultaneous light intensity expression are wrapped in [ -pi, pi ], and the problem that different pixel positions of the camera correspond to the same phase value occurs, so that the wrapped phases are required to be unfolded, and one pixel position corresponds to one phase value.
And adding 2pi×T at the position of phase mutation to realize phase expansion. T represents the number of phase mutation positions found.
Through the combined calibration of the light source and the detection camera 1 in the step 1.2, the position relationship of the light source and the detection camera 1 is obtained, so that the incident light and the reflected light at the point to be detected can be tracked according to the equal relationship between the phase of the fringe pattern projected on the light source and the phase acquired by the detection camera 1. Taking the highly reflective and specular-like reflective sample 4 as an example, as shown in fig. 2, the light emitted by the projection light source assembly 2 is incident light I, the starting point of the incident light is a, the position of a light spot formed by projecting the incident light onto the sample 4 is point O, the incident light can also be expressed as AC, the position of the reflected light r received by the detection camera 1 is C, the reflected light can also be expressed as OC, the direction of the normal vector n at the point O is the Z axis, the direction in the horizontal plane at the point O toward the detection camera 1 is the Y axis, and a three-dimensional coordinate system is established, where the normal vector n at the point O can be expressed as:
n＝[n x ,n y ,n z ] T ＝r-I＝[r x -I x ,r y -I y ,r z -I z ] T
the gradient in the XY direction between the point to be measured and the point O can be expressed as
Wherein d c2o Represents the distance from point C to point O, d A2o Represents the distance from point A to point O, r x ，r y ，r z X, y and z components of the reflected light vector, respectively, I x I y And I z X, y and z components of the incident light vector, respectively; the coordinates of the incident point a in the camera coordinate system are (x A ，y A ，z A ) The coordinates of the reflection point C in the camera coordinate system are (x c ，y c ，z c ) According to the formula, the coordinate of the point to be measured O can be calculated to be (x o ，y o )。
Finally, integrating the gradient at the point to be measured by using the existing regional wavefront reconstruction algorithm, wherein a gradient integration formula is as follows: z= ≡g x dx+g y dy, therebyObtaining three-dimensional point cloud data of the to-be-measured point O of the to-be-measured sample 4, namely obtaining three-dimensional coordinates (x o ，y o ，z o ) The obtained three-dimensional point cloud data is compared with the surface shape of the standard sample 4, so that the surface shape of the sample 4 can be evaluated.
In summary, the system can realize defect detection of the surface of the high-reflectivity sample and detect defects of the surface and the inside of the transparent sample by arranging the reflecting film. By placing a transparent sample on a sample stage provided with a reflective film, light is reflected by the reflective film, whereby an image free from ghost images can be obtained.
The system can obtain three-dimensional point cloud data of the sample through system calibration while performing defect detection on the sample through one-time imaging by switching the projection pattern.
The system is simple to debug, an operator can obtain the most system parameters of the sample test by clicking a debugging key, and the defect detection of the sample can be finished by clicking a testing key.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined as the scope of the claims.
Claims (10)
1. A phase deflection detection system for transparent and highly reflective sample surface detection, comprising:
a sample stage (3) for placing a sample (4), the sample stage (3) being provided with a reflective film;
the light source device comprises a projection light source assembly (2), wherein the projection light source assembly (2) is used for projecting a light source to a sample (4), the light source in the projection light source assembly (2) is an area array structure light source, and the brightness, contrast and projection pattern of the light source are adjustable;
a detection camera (1), the detection camera (1) being adapted to collect reflected light on the sample (4) for incident light;
and the processing system (5) is used for calculating the defects and the surface shape of the sample (4) according to the data acquired by the detection camera (1).
2. The phase deviation detection system for transparent and highly reflective sample surface detection according to claim 1, wherein the projection light source assembly (2) and the detection camera (1) use a large aperture low distortion lens, and a filter is installed in front of the detection camera (1).
3. A phase deviation detecting method based on the phase deviation detecting system for transparent and highly reflective sample surface detection as claimed in claim 1 or 2, characterized by comprising the steps of,
incident light is projected to the surface of the sample (4) through the projection light source assembly (2), and reflected light of the incident light on the sample (4) is collected through the detection camera (1);
acquiring a coding fringe pattern on the surface of a sample (4), and acquiring the position relationship among a light source, the sample (4) and a detection camera (1);
and calculating defect characteristics and surface type characteristics of the surfaces of the high-reflection sample (4) and the transparent sample (4) according to the coded fringe pattern and the position relation among the light source, the sample (4) and the detection camera (1).
4. A phase deviation detecting method according to claim 3, wherein the projection pattern of the projection light source assembly (2) is switched such that the pattern projected by the projection light source assembly (2) is a stripe pattern, and the detecting camera (1) collects the deformed code stripe pattern after reflection of the sample (4).
5. The phase deviation detecting method according to claim 3, wherein the projection pattern of the projection light source assembly (2) is switched so that the projection light source assembly (2) projects a calibration pattern, the detection camera (1) collects a virtual image of the calibration pattern in the highly reflective sample (4) or the reflective film, and the sample (4) is moved for a plurality of times to obtain calibration patterns at a plurality of positions, so that a rotation translation matrix of the light source assembly under a camera coordinate system is calculated.
6. The method of claim 5, wherein the calibration pattern is a circular calibration pattern.
7. A phase deviation detecting method according to claim 3, wherein the imaging parameters of the sample (4) are adjusted to obtain the working parameters adapted to the reflectivity of the sample (4) before the light source projection is performed
8. The phase deviation detection method according to claim 7, wherein a coated reflecting mirror with reflectivity close to 1 is used as a standard sample (4), the test parameters of the standard sample (4) are initial test parameters of a system, data acquisition of samples (4) with different reflectivities is performed according to the initial system parameters, and whether the light intensity acquired by a camera is suitable for the detection requirement of the sample (4) is judged through multiple iterations according to the acquired light intensity and the light intensity ratio of the light intensity of the standard sample (4).
9. The phase deviation detecting method according to claim 3, wherein in the phase shift encoding technique, the sample defect is detected by the phase shift encoding technique, and for the n-step phase shift, the formula for detecting the deformed stripe of the pixel point (x, y) photographed by the camera 1 in the kth stripe image is: wherein A (x, y) represents the background light intensity; b (x, y) represents a modulation amplitude; />Representing the wrapping phase; />Representing the translational phase.
10. The phase deviation detecting method according to claim 9, wherein the surface defects of the sample (4) are obtained according to simultaneous n code stripe formulas, wherein a (x, y) represents false defects such as dirt, dust and the like on the surface of the sample (4); b (x, y) represents a defect of contrast difference;the defects of pits, bulges and the like on the surface of the sample (4) are reflected.
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