CN117631332A - Reconfigurable and bidirectionally enhanced Fano resonator and optoelectronic device - Google Patents
Reconfigurable and bidirectionally enhanced Fano resonator and optoelectronic device Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
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- 230000002457 bidirectional effect Effects 0.000 description 4
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Abstract
The invention provides a reconfigurable and bi-directionally reinforced Fano resonator comprising: the device comprises a first transmission waveguide, a split coupler, an upper and lower voice channel micro-ring resonator of an embedded Mach-Zehnder interferometer, a second transmission waveguide, a third transmission waveguide and a waveguide upper thermode, wherein the waveguide upper thermode is arranged above the third transmission waveguide; the first transmission waveguide, the second transmission waveguide and the third transmission waveguide are used for transmitting optical signals in the forward direction or the reverse direction; the one-to-two coupler is used for splitting the optical signal during forward transmission or combining the optical signal during reverse transmission; the upper thermode of the waveguide is used for carrying out phase adjustment on the optical signal transmitted in the forward direction or the reverse direction of the third transmission waveguide and providing an asymmetric phase spectrum required by Fano resonance; the upper and lower voice channel micro-ring resonators of the embedded Mach-Zehnder interferometer are used for generating Fano resonance and regulating Fano resonance spectrum for forward transmission optical signals or reverse transmission optical signals. The Fano resonator realizes fine regulation and control of the bi-directional Fano resonance spectrum line, and the reconfigurable dimension is increased.
Description
Technical Field
The invention relates to the field of silicon-based optoelectronics, in particular to a reconfigurable and bidirectionally reinforced Fano resonator.
Background
One particular phenomenon in optical resonance is the Fano resonance, which generally occurs when discrete local states interfere with continuous states in a coupled manner, where the classical Lorentz symmetry line is broken. The Fano resonance spectral line has obvious asymmetry and tends to show a very steep shape, and the wavelength difference between the highest power point and the lowest power point of the spectral line is very small, i.e. the slope of the spectral line is very large. Due to the steep characteristic of the Fano resonance spectrum line, the method has great potential to be applied to various scenes such as ultra-low power consumption optical switches, high-sensitivity optical sensing, microwave frequency real-time monitoring, optical time domain micro-control and the like.
In recent years, the phenomenon of Fano resonance based on various structures such as photonic crystals, plasmon nanostructures, slot waveguides, grating-assisted micro-rings, cascade micro-rings, and the like has been reported. However, the resonance lines of the Fano resonators cannot be accurately regulated and adjusted, and the manufacturing process of structures such as photonic crystals is complex, so that a resonant cavity with a very high quality factor is difficult to form, and a steep line with a relatively large slope is difficult to form. Therefore, how to realize fine tuning and reconfiguration of the Fano resonance line and how to provide multidirectional enhanced Fano resonance line in a single device is important to research and improve the performance of the Fano resonator, and is a research hot spot in the current academia and industry.
Disclosure of Invention
The invention provides a reconfigurable and bidirectionally enhanced Fano resonator which can realize fine adjustment and reconfiguration of Fano resonance lines and provide bidirectionally enhanced Fano resonance lines in a single device.
Embodiments of the present invention provide a reconfigurable and bi-directionally reinforced Fano resonator comprising: the device comprises a first transmission waveguide, a split coupler, an upper and lower voice channel micro-ring resonator of an embedded Mach-Zehnder interferometer, a second transmission waveguide, a third transmission waveguide and a waveguide upper thermode, wherein the waveguide upper thermode is arranged above the third transmission waveguide; the first transmission waveguide, the second transmission waveguide and the third transmission waveguide are configured to forward or reverse transmit optical signals; the one-to-two coupler is configured to split the optical signal during forward transmission or combine the optical signal during reverse transmission; the upper thermode of the waveguide is configured to perform phase adjustment on the optical signal transmitted in the forward direction or the reverse direction by the third transmission waveguide, and provide an asymmetric phase spectrum required by Fano resonance; the upper and lower voice path micro-ring resonators of the embedded Mach-Zehnder interferometer are configured to generate a Fano resonance for a forward transmitted optical signal or a reverse transmitted optical signal and to regulate the shape, parameters and resonant wavelength of the Fano resonance spectrum.
According to an embodiment of the invention, in the case of forward transmission: the first transmission waveguide is configured to input an off-chip optical signal; the one-to-two coupler is configured to split the off-chip optical signal into a first optical signal and a second optical signal; the upper thermode of the waveguide is configured to perform phase adjustment on the second optical signal to obtain a third optical signal; the upper and lower voice path micro-ring resonators of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the first optical signal and the third optical signal to obtain a first path of Fano resonance spectral line and a second path of Fano resonance spectral line; the second transmission waveguide is configured to output a first road Fano resonance line; the third transmission waveguide is configured to output a second road Fano resonance line; in the case of reverse transmission: the second transmission waveguide or the third transmission waveguide is configured to input an off-chip optical signal; the upper and lower voice channel micro-ring resonators of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the off-chip optical signals to obtain fourth optical signals and fifth optical signals; the upper thermode of the waveguide is configured to perform phase adjustment on the fifth optical signal to obtain a sixth optical signal; the one-to-two coupler is configured to combine the fourth optical signal and the sixth optical signal to obtain a third Fano resonance spectral line; the first transmission waveguide is configured to output a third-way Fano resonance line.
According to an embodiment of the present invention, an upper and lower session microring resonator of an embedded mach-zehnder interferometer includes: annular waveguide, ring-on-ring thermodes and Mach-Zehnder interferometer; the ring-mounted thermode is arranged above the annular waveguide; the Mach-Zehnder interferometer is embedded in the annular waveguide and connected with the annular waveguide; the annular waveguide is configured to achieve optical field resonance and Fano resonance under dual beam interference; the ring-on thermode is configured to change the resonant wavelength position of the upper and lower voice path microring resonators of the embedded mach-zehnder interferometer; the mach-zehnder interferometer is configured to turn on or off the optical field resonance and the fano resonance states.
According to an embodiment of the present invention, a Mach-Zehnder interferometer comprises two waveguide coupling regions, a Mach-Zehnder interferometer arm having a thermode disposed above the Mach-Zehnder interferometer arm, and a Mach-Zehnder interferometer arm having a thermode; the two waveguide coupling regions are configured for evanescent coupling in optical field propagation; the mach-zehnder interferometer arms are configured for optical field propagation; the thermode on the mach-zehnder interferometer arm is configured to regulate at least one of extinction ratio, slope, and shape of a fano resonance line in combination with the thermode on the waveguide, the fano resonance line comprising a first, second, or third fano resonance line.
According to an embodiment of the invention, the mach-zehnder interferometer arm is formed of two equal length waveguides with the thermode arranged on the mach-zehnder interferometer arm above one of the waveguides.
According to an embodiment of the invention, the preparation of the reconfigurable and bi-directionally reinforced Fano resonator is based on silicon, silicon dioxide or silicon nitride as core layer material.
According to an embodiment of the present invention, the first transmission waveguide, the second transmission waveguide, the third transmission waveguide can be connected to a grating coupler or an end-face coupler; the on-chip optical signal can be coupled into the first or second or third transmission waveguide by a grating coupler or an end-face coupler.
The embodiment of the invention also provides an optoelectronic device comprising the reconfigurable and bi-directionally reinforced Fano resonator as described above.
According to the reconfigurable and bidirectionally reinforced Fano resonator provided by the embodiment of the invention, at least the following technical effects can be realized:
a reconfigurable and bidirectional enhanced Fano resonator is constructed based on a micro-ring resonator of an embedded Mach-Zehnder interferometer, and fine regulation and control of Fano resonance spectral lines can be realized by combining regulation and control of thermodes. Meanwhile, no matter the optical signal is input from the positive transmission direction or the reverse transmission direction, the Fano resonator can realize the Fano resonance spectrum with adjustable shape and parameters, the reconfigurable dimension of the Fano resonance device is increased, and the bidirectional enhanced Fano resonance spectrum can be provided, so that the Fano resonator can be widely applied to various scenes such as optical switches, optical sensing, microwave frequency monitoring, optical time domain micro-organisms and the like, and has important application value.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the present invention with reference to the accompanying drawings, in which:
FIG. 1 schematically illustrates a block diagram of a reconfigurable and bi-directionally reinforced Fano resonator in accordance with an embodiment of the present invention;
FIG. 2 schematically illustrates a schematic diagram of a reconfigurable and bi-directionally reinforced Fano resonator in forward transmission according to an embodiment of the present invention;
FIG. 3 schematically illustrates a schematic diagram of a reconfigurable and bi-directionally reinforced Fano resonator in reverse transmission according to an embodiment of the present invention;
FIG. 4 schematically illustrates a graph of the change in resonant line of two output ports as a function of the phase difference on the waveguide arm for a reconfigurable and bi-directionally enhanced Fano resonator in accordance with an embodiment of the present invention;
FIG. 5 schematically illustrates a graph of the change in resonant line of two output ports as a function of the phase difference on the in-loop Mach-Zehnder interferometer arms for a reconfigurable and bi-directionally enhanced Fano resonator in forward output in accordance with an embodiment of the present invention;
FIG. 6 schematically illustrates a graph of the change in the resonant line of a single output port with the change in the phase difference on the waveguide arm and its change in the resonant line with the change in the phase difference on the in-loop Mach-Zehnder interferometer arm for a reconfigurable and bi-directionally enhanced Fano resonator in accordance with an embodiment of the present invention;
reference numerals illustrate:
1. a first transmission waveguide; 2. a split-two coupler; 3. upper and lower voice path microring resonators embedded with mach-zehnder interferometers; 4. a second transmission waveguide; 5. a third transmission waveguide; 6. a hot electrode on the waveguide; 7. an annular waveguide; 8. a ring-on hot electrode; 9. mach-zehnder interferometers; 10. two waveguide coupling regions; 11. Mach-Zehnder interferometer arms; 12. a thermode on the mach zehnder interferometer arm; 2a, a first port of the one-to-two coupler; 2b, a second port of the one-to-two coupler; 2c, a third port of the one-to-two coupler; a1, a first optical signal; b1, a second optical signal; c1, a third optical signal; a2, a fourth optical signal; b2, a fifth optical signal; c2, sixth optical signal.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. In the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Where expressions like at least one of "A, B and C, etc. are used, the expressions should generally be interpreted in accordance with the meaning as commonly understood by those skilled in the art (e.g.," a system having at least one of A, B and C "shall include, but not be limited to, a system having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.).
Fig. 1 schematically shows a block diagram of a reconfigurable and bi-directionally reinforced fano resonator according to an embodiment of the present invention.
As shown in fig. 1, the reconfigurable and bi-directionally reinforced farno resonator of this embodiment may include: the device comprises a first transmission waveguide 1, a split coupler 2, an upper and lower voice channel micro-ring resonator 3 of an embedded Mach-Zehnder interferometer, a second transmission waveguide 4, a third transmission waveguide 5 and a waveguide upper thermode 6.
The one-to-two coupler 2 includes a first port 2a, a second port 2b, and a third port 2c, the first port 2a being connected to the first transmission waveguide 1, the second port 2b being connected to the second transmission waveguide 4, and the third port 2c being connected to the third transmission waveguide 5. The upper hot electrode 6 is arranged above the third transmission waveguide 5.
The first transmission waveguide 1, the second transmission waveguide 4, and the third transmission waveguide 5 are configured to transmit an optical signal in the forward direction or in the reverse direction.
The one-to-two coupler 2 is configured to split the optical signal in the forward direction or to combine the optical signal in the reverse direction.
The on-waveguide thermode 6 is configured to phase adjust the optical signal transmitted in either the forward or reverse direction by the third transmission waveguide 5 to provide the asymmetric phase spectrum required for the farno resonance.
The upper and lower session microring resonators 3 of the embedded mach-zehnder interferometer are configured to generate a fano resonance for a forward-transmitted optical signal or a reverse-transmitted optical signal, and to regulate the shape, parameters, and resonant wavelengths of the fano resonance spectrum.
Fig. 2 schematically shows a schematic diagram of a reconfigurable and bi-directionally reinforced fano resonator in forward transmission according to an embodiment of the present invention.
As shown in fig. 2, in the case of forward transmission:
the first transmission waveguide 1 is configured to input an off-chip optical signal. The one-to-two coupler 2 is configured to split the off-chip optical signal into a first optical signal a1 and a second optical signal b1. The upper hot electrode 6 of the waveguide is configured to perform phase adjustment on the second optical signal b1 to obtain a third optical signal c1. The upper and lower voice path micro-ring resonators 3 of the embedded mach-zehnder interferometer are configured to perform a fano resonance on the first optical signal a1 and the third optical signal c1 to obtain a first path fano resonance spectral line and a second path fano resonance spectral line. The second transmission waveguide 4 is configured to output a first road-Fano resonance line. The third transmission waveguide 5 is configured to output a second road of Fano resonance lines.
Fig. 3 schematically shows a schematic diagram of a reconfigurable and bi-directionally reinforced fano resonator in reverse transmission according to an embodiment of the present invention.
As shown in fig. 3, in the case of reverse transmission:
the second transmission waveguide 4 or the third transmission waveguide 5 is configured to input an off-chip optical signal, that is, an off-chip optical signal may be input from any one of the second transmission waveguide 4 or the third transmission waveguide 5. The upper and lower session microring resonators 3 of the embedded mach-zehnder interferometer are configured to perform fano resonance on the off-chip optical signals to obtain fourth optical signals a2 and fifth optical signals b2. The on-waveguide thermode 6 is configured to phase adjust the fifth optical signal b2 to obtain a sixth optical signal c2. The split-two coupler 2 is configured to combine the fourth optical signal a2 and the sixth optical signal c2 to obtain a third fano resonance line. The first transmission waveguide 1 is configured to output a third-way fano resonance line.
With continued reference to fig. 1-3, in some embodiments, the in-line mach-zehnder interferometer upper and lower voice-path microring resonator 3 comprises: a ring waveguide 7, an on-ring thermode 8 and a mach-zehnder interferometer 9. The ring-on thermode 8 is arranged above the annular waveguide 7, and the mach-zehnder interferometer 9 is embedded in the annular waveguide 7 and connected to the annular waveguide 7.
The annular waveguide 7 is configured to achieve optical field resonance and to achieve Fano resonance under dual beam interference. The ring-on thermode 8 is configured to change the resonance wavelength position of the upper and lower voice path microring resonator 3 of the embedded mach-zehnder interferometer. The mach-zehnder interferometer 9 is configured to turn on or off the optical field resonance and the fano resonance states.
In some embodiments, the mach-zehnder interferometer 9 comprises two waveguide coupling regions 10, a mach-zehnder interferometer arm 11, and a mach-zehnder interferometer arm upper thermode 12, the mach-zehnder interferometer arm upper thermode 12 being disposed above the mach-zehnder interferometer arm 11. The two waveguide coupling regions 10 are configured as evanescent coupling in optical field propagation, the mach-zehnder interferometer arms 11 are configured as optical field propagation, and the mach-zehnder interferometer arms upper thermodes 12 are configured to regulate at least one of extinction ratio, slope and shape of the fano resonance lines in combination with the upper thermodes 6 of the waveguides, wherein the fano resonance lines comprise a first, a second or a third fano resonance line.
Further, the mach-zehnder interferometer arm 11 is formed by two equal length waveguides, and the thermode 12 on the mach-zehnder interferometer arm is arranged above one of the waveguides, i.e. the embedded mach-zehnder interferometer 9 is formed by two waveguide coupling regions 10 cascaded with two equal length waveguides. The two equal length waveguides are configured to propagate in an optical field with equidistant transmission, and provide an operating bandwidth for the mach-zehnder interferometer 9 that is greater than a preset threshold, where the operating bandwidth of the preset threshold is determined according to an actual application scenario.
In some embodiments, the first transmission waveguide 1, the second transmission waveguide 4 and the third transmission waveguide 5 can be connected with a grating coupler or an end-face coupler, through which on-chip optical signals are coupled into the first transmission waveguide 1, the second transmission waveguide 4 and the third transmission waveguide 5.
In some embodiments, the fabrication of the reconfigurable and bi-directionally reinforced Fano resonator is based on silicon, silicon dioxide, or silicon nitride as the core layer material.
In order to more clearly describe the reconfigurable and bi-directionally reinforced Fano resonator provided by the present invention, a specific example is described below.
In this example, a silicon nanowire optical waveguide based on silicon-on-insulator (SOI) material is selected to prepare a fabry-perot resonator based on an embedded mach-zehnder interferometer upper and lower voice-path microring resonator 3, the core layer of which is silicon material, has a thickness of 220nm, a refractive index of 3.4744, and a waveguide width of 500nm, and the thermo-optical effect is used to effect waveguide phase change.
Selecting 50: the 50-splitting-ratio one-to-two coupler 2 is used for splitting and combining beams, the radius of the upper and lower voice channel micro-ring resonators 3 of the embedded Mach-Zehnder interferometer is 30um, and the waveguide coupling area 10 in the embedded Mach-Zehnder interferometer 9 is designed as 50:50, the mach-zehnder interferometer arms are made up of 10um radius rings with an arm length of 94.25um. The coupling interval between the silicon-based straight waveguide and the silicon-based curved waveguide is 240nm, and the interval between the waveguide coupling regions 10 in the embedded mach-zehnder interferometer 9 is 240nm.
Fig. 4 schematically shows a graph of the change in resonance line of two output ports with a change in phase difference on the waveguide arm for a reconfigurable and bi-directionally reinforced fano resonator in accordance with an embodiment of the present invention.
As shown in fig. 4, when the phase change on the arm of the fixed embedded mach-zehnder interferometer 9 is pi, the phase change introduced by the thermode 6 on the waveguide is changed, so that the phase difference of two paths of light beams entering the upper and lower micro-ring resonators 3 of the embedded mach-zehnder interferometer can be changed, and the extinction ratio, slope and shape of the Fano resonance spectrum can be adjusted, and meanwhile, the two ends of the second transmission waveguide 4 and the third transmission waveguide 5 are both finely adjustable Fano resonance spectrum.
Fig. 5 schematically illustrates a graph of the change in resonant line of two output ports as a function of the phase difference on the in-loop mach-zender interferometer arm for a reconfigurable and bi-directionally enhanced fabry-perot resonator in forward output according to an embodiment of the present invention.
As shown in fig. 5, when the phase change introduced by the thermode 6 on the fixed waveguide is 0.5 pi, the phase change on the arm of the embedded mach-zehnder interferometer 9 is changed, and the on-off switching of the internal states of the upper and lower voice path micro-ring resonators 3 of the embedded mach-zehnder interferometer can be changed, so that the extinction ratio, the slope and the shape of the Fano resonance spectrum can be adjusted, and meanwhile, the two ends of the second transmission waveguide 4 and the third transmission waveguide 5 are also fine-adjustable Fano resonance spectrum.
Fig. 6 schematically illustrates a graph of the change in the resonant line of a single output port with the change in the phase difference on the waveguide arm and its change in the resonant line with the change in the phase difference on the in-loop mach-zehnder interferometer arm for a reconfigurable and bi-directionally enhanced fano resonator in accordance with an embodiment of the present invention.
As shown in fig. 6, the reconfigurable and bi-directionally reinforced fabry-perot resonator of this example can also achieve multi-dimensional fine tuning of the fabry-perot resonance line by thermode combination tuning at the reverse input.
As can be seen from fig. 4 to 6, the control of the thermode combination in the Fano resonator of this example can realize multi-dimensional fine control of the Fano resonance spectrum. Therefore, the Fano resonator based on the embedded Mach-Zehnder interferometer micro-ring resonator provided by the embodiment of the invention can realize fine regulation and control of the Fano resonance spectral line by combining and controlling the thermodes; meanwhile, the Fano resonator can realize a Fano resonance spectrum with adjustable shape and parameters no matter the light is input from the positive transmission direction or the light is input from the reverse transmission direction. In addition, the reconfigurable dimension of the Fano resonance device is increased, the bidirectional enhanced Fano resonance spectrum is provided, and meanwhile, the device has the advantages of simple design, convenience in preparation, compact structure and the like, and can be produced in a large scale.
Based on the same inventive concept, embodiments of the present invention also provide an optoelectronic device comprising a reconfigurable and bi-directionally reinforced Fano resonator as described above.
It should be noted that, the implementation details and the technical effects of the embodiment part of the optoelectronic device are the same or similar to those of the embodiment part of the reconfigurable and bidirectional enhanced Fano resonator, and are not repeated here.
While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive.
Those skilled in the art will appreciate that the features recited in the various embodiments of the invention and/or in the claims can be combined in a wide variety of ways and/or combinations, even if such combinations or combinations are not explicitly recited in the present invention. In particular, the features recited in the various embodiments of the invention and/or in the claims can be combined in various combinations and/or combinations without departing from the spirit and teachings of the invention. All such combinations and/or combinations fall within the scope of the invention.
While the present invention has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims and their equivalents. The scope of the invention should, therefore, be determined not with reference to the above-described embodiments, but instead should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.
Claims (8)
1. A reconfigurable and bi-directionally reinforced fabry-perot resonator comprising:
the device comprises a first transmission waveguide (1), a split coupler (2), an upper and lower voice channel micro-ring resonator (3) of an embedded Mach-Zehnder interferometer, a second transmission waveguide (4), a third transmission waveguide (5) and a waveguide upper thermode (6), wherein the waveguide upper thermode (6) is arranged above the third transmission waveguide (5);
-the first transmission waveguide (1), the second transmission waveguide (4), the third transmission waveguide (5) are configured to transmit optical signals in forward or reverse direction;
the one-to-two coupler (2) is configured to split the optical signal in forward transmission or combine the optical signal in reverse transmission;
the upper thermode (6) is configured to phase-adjust the optical signal transmitted in the forward or reverse direction by the third transmission waveguide (5), providing an asymmetric phase spectrum required for the Fano resonance;
the upper and lower voice channel micro-ring resonators (3) of the embedded Mach-Zehnder interferometer are configured to generate Fano resonance on forward transmission optical signals or reverse transmission optical signals, and regulate and control the shape, parameters and resonance wavelength of the Fano resonance spectrum.
2. The reconfigurable and bi-directionally reinforced farno resonator of claim 1, wherein in the case of forward transmission:
the first transmission waveguide (1) is configured to input an off-chip optical signal;
the one-to-two coupler (2) is configured to split the off-chip optical signal into a first optical signal (a 1) and a second optical signal (b 1);
the upper thermode (6) is configured to phase-adjust the second optical signal (b 1) to obtain a third optical signal (c 1);
the upper and lower voice path micro-ring resonators (3) of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the first optical signal (a 1) and the third optical signal (c 1) to obtain a first path of Fano resonance spectral line and a second path of Fano resonance spectral line;
the second transmission waveguide (4) is configured to output the first road-Fano resonance line;
-the third transmission waveguide (5) is configured to output the second road-fano resonance line;
in the case of reverse transmission:
-the second transmission waveguide (4) or the third transmission waveguide (5) is configured to input the off-chip optical signal;
the upper and lower voice path micro-ring resonator (3) of the embedded Mach-Zehnder interferometer is configured to perform Fano resonance on the off-chip optical signal to obtain a fourth optical signal (a 2) and a fifth optical signal (b 2);
the upper thermode (6) is configured to phase-adjust the fifth optical signal (b 2) to obtain a sixth optical signal (c 2);
the one-to-two coupler (2) is configured to combine the fourth optical signal (a 2) and the sixth optical signal (c 2) to obtain a third Fano resonance spectrum line;
the first transmission waveguide (1) is configured to output the third-way Fano resonance line.
3. Reconfigurable and bi-directionally reinforced fabry-perot resonator according to claim 1 or 2, characterized in that the upper and lower session microring resonator (3) of the embedded mach-zehnder interferometer comprises:
a ring waveguide (7), an on-ring thermode (8) and a Mach-Zehnder interferometer (9); the ring-shaped thermode (8) is arranged above the annular waveguide (7); the Mach-Zehnder interferometer (9) is embedded in the annular waveguide (7) and is connected with the annular waveguide (7);
-the annular waveguide (7) is configured to achieve optical field resonance and to achieve fano resonance under dual beam interference;
-the ring-on thermode (8) is configured to change the resonance wavelength position of the upper and lower session microring resonator (3) of the embedded mach-zehnder interferometer;
the Mach-Zehnder interferometer (9) is configured to turn on or off optical field resonance and Fano resonance states.
4. A reconfigurable and bi-directionally reinforced fabry-perot resonator according to claim 3, characterized in that the mach-zehnder interferometer (9) comprises two waveguide coupling regions (10), a mach-zehnder interferometer double arm (11) and a mach-zehnder on-arm thermode (12), the mach-zehnder on-arm thermode (12) being arranged above the mach-zehnder interferometer arm (11);
the two waveguide coupling regions (10) are configured as evanescent coupling in optical field propagation;
-the mach-zehnder interferometer arms (11) are configured for optical field propagation;
the mach-zehnder interferometer arm upper thermode (12) is configured to regulate at least one of extinction ratio, slope and shape of a fano resonance line including the first, second or third fano resonance line in combination with the waveguide upper thermode (6).
5. Reconfigurable and bi-directionally reinforced fabry-perot resonator according to claim 4, characterized in that the mach-zehnder interferometer arm (11) is composed of two equal length waveguides, with the thermode (12) on the mach-zehnder interferometer arm being arranged above one of the waveguides.
6. The reconfigurable and bi-directionally reinforced foreno resonator of claim 1, wherein the preparation of the reconfigurable and bi-directionally reinforced foreno resonator is based on silicon, silicon dioxide, or silicon nitride as a core material.
7. The reconfigurable and bi-directionally reinforced fabry-perot resonator according to claim 2, characterized in that the first transmission waveguide (1), the second transmission waveguide (4), the third transmission waveguide (5) are connectable with a grating coupler or an end-face coupler; the on-chip optical signal can be coupled into the first transmission waveguide (1), the second transmission waveguide (4) or the third transmission waveguide (5) by means of a grating coupler or an end-face coupler.
8. An optoelectronic device comprising a reconfigurable and bi-directionally reinforced fabry perot resonator as claimed in any one of claims 1 to 7.
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