CN117629946A - Optical sensor based on photonic crystal coupling structure and optical detection method - Google Patents
Optical sensor based on photonic crystal coupling structure and optical detection method Download PDFInfo
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- CN117629946A CN117629946A CN202311596874.3A CN202311596874A CN117629946A CN 117629946 A CN117629946 A CN 117629946A CN 202311596874 A CN202311596874 A CN 202311596874A CN 117629946 A CN117629946 A CN 117629946A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 53
- 239000004038 photonic crystal Substances 0.000 title claims abstract description 46
- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 230000008878 coupling Effects 0.000 title claims abstract description 21
- 238000010168 coupling process Methods 0.000 title claims abstract description 21
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 21
- 230000000737 periodic effect Effects 0.000 claims abstract description 34
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 13
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 13
- 230000008859 change Effects 0.000 claims description 8
- 239000005083 Zinc sulfide Substances 0.000 claims description 7
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 7
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical group [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 238000001228 spectrum Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000011898 label-free detection Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000985 reflectance spectrum Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000004001 molecular interaction Effects 0.000 description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001917 fluorescence detection Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention discloses an optical sensor based on a photonic crystal coupling structure and an optical detection method, wherein the optical sensor comprises: a buffer layer, a periodic photonic crystal structure, and a prism unit laminated in this order; the buffer layer is contacted with the solution to be tested; the periodic photonic crystal structure is a periodic structure formed by alternately arranging zinc selenide layers and germanium layers. The periodic photonic crystal structure is utilized to excite the Roche surface wave, and the unmarked detection of the solution to be detected is realized by detecting the offset of the formant position, so that the influence of the marked detection on the solution to be detected is avoided, and the sensing sensitivity and the quality factor are improved.
Description
Technical Field
The embodiment of the invention relates to the technical field of optical sensing, in particular to an optical sensor based on a photonic crystal coupling structure and an optical detection method.
Background
With the continued development of optics, it has been found that by arranging natural materials in a variety of microstructures, the light transmission characteristics can be flexibly controlled. Various photon artificial microstructures are continuously proposed and widely applied to the design of novel optical, optoelectronic, optical sensing and other devices. The optical sensor based on the microstructure has wide potential application in various fields such as clinical diagnosis, environmental monitoring, MEMS, biomedicine and the like, and has the advantages of electromagnetic interference resistance, multipath detection, remote sensing and the like.
The prior art optical gas sensor is based on the principle of surface plasmon resonance (surface plasmon resonance, SPR), which is a physical optical effect based on surface plasmon waves (surface plasmon wave, SPW), usually generated between a metal layer and a dielectric layer, when the wave vector of incident light matches with that of SPW, free electrons in a metal film are induced to resonate, but SPW is not arbitrarily regulated due to the nature of metal, and a lot of absorption loss is generated due to the nature of metal, which also limits further improvement of the performance of the SPR sensor.
Disclosure of Invention
The invention provides an optical sensor based on a photonic crystal coupling structure and an optical detection method, which reduce the influence of mark detection on a solution to be detected and improve the sensing sensitivity and quality factor.
In a first aspect, an embodiment of the present invention provides an optical sensor based on a photonic crystal coupling structure, including: a buffer layer, a periodic photonic crystal structure, and a prism unit laminated in this order; the buffer layer is contacted with the solution to be tested; the periodic photonic crystal structure is a periodic structure formed by alternately arranging zinc selenide layers and germanium layers.
Optionally, the periodic structure in the periodic photonic crystal structure has a period number of 6.
Optionally, the refractive index of the zinc selenide layer is 2.46, and the thickness is 93nm.
Optionally, the refractive index of the germanium layer is 4.3, and the thickness is 163nm.
Optionally, the buffer layer is a zinc sulfide layer.
Optionally, the refractive index of the zinc sulfide layer is 2.28, and the thickness is 615nm.
Optionally, the prism unit is a quartz glass prism, and the refractive index of the quartz glass prism is 1.445.
In a second aspect, embodiments of the present invention provide an optical detection method measured by an optical sensor based on a photonic crystal coupling structure, the optical sensor comprising: a buffer layer, a periodic photonic crystal structure, and a prism unit laminated in this order;
the method comprises the following steps:
injecting detection light from the prism unit at a preset incidence angle;
and measuring the reflected signal light of the prism unit, and analyzing the sensing parameters of the solution to be measured according to the change of the reflected signal light.
Optionally, the preset incident angle is 67.5deg.
Optionally, the wavelength range of the detection light is 1485nm-1500nm.
According to the embodiment of the invention, the Roche surface wave is excited by the periodic photonic crystal structure through the buffer layer, the periodic photonic crystal structure and the prism unit which are sequentially laminated, and the Roche surface wave shows a sharp resonance peak in a reflected spectrum. Solutions to be detected with different concentrations are placed on one side of the buffer layer, so that high-sensitivity detection and analysis can be realized. The refractive indexes of different solutions or the same solution with different concentrations are slightly different, and the slight change of the refractive index of the solution to be measured causes larger shift of the resonance position of the resonance peak of the reflection spectrum due to the strong locality of the Buloch surface wave. Therefore, by exploring the relation between the spectrums of the detection light and the reflected signal light, namely, the response of the sharp formants in the reflected spectrums to the solution to be detected, the unmarked detection of the solution to be detected is realized by detecting the offset of the formant positions, so that the influence of the marked detection on the solution to be detected is avoided, and the sensing sensitivity and the quality factor are improved.
Drawings
Fig. 1 is a schematic structural diagram of an optical sensor based on a photonic crystal coupling structure according to an embodiment of the present invention;
FIG. 2 is a graph showing the reflectance spectrum and interfacial impedance contrast for an optical sensor according to an embodiment of the present invention at an incident angle θ=67.5 deg;
FIG. 3 is a schematic diagram of the electric field intensity distribution at the interface of an optical sensor when the optical sensor senses an excited surface wave;
FIG. 4 is a graph showing formant shift characteristics;
fig. 5 is a flowchart of an optical detection method according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Although the SPR technology has wide application in life, it has some disadvantages, and in view of the above technical problems, the present invention provides an optical sensor based on a photonic crystal coupling structure, which includes a buffer layer, a periodic photonic crystal structure, and a prism unit sequentially stacked, and excites BSW through the periodic photonic crystal structure, and forms a sufficiently strong electric field at an interface between the sensor and an analyte to be measured, and shows a sharp resonance peak in a reflectance spectrum. When the refractive index of the solution to be measured is slightly changed due to the change of the components of the solution to be measured, the resonance condition of the sensing signal is changed and is represented as the shift of the formants in the reflection spectrum, and the dynamic detection and qualitative analysis of the refractive index of the solution to be measured 140 are realized by detecting the shift of the formant wavelengths. The sensor provided by the invention is simple to manufacture, and has high sensitivity and high quality factor.
Fig. 1 is a schematic structural diagram of an optical sensor based on a photonic crystal coupling structure according to an embodiment of the present invention, referring to fig. 1, including: a buffer layer 110, a periodic photonic crystal structure 120, and a prism unit 130, which are sequentially stacked; the buffer layer 110 is in contact with the solution to be measured; the periodic photonic crystal structure 120 is an alternating periodic structure composed of zinc selenide layers 121 and germanium layers 122.
Specifically, the periodic photonic crystal structure 120 is disposed under the prism unit 130, and then the buffer layer 110 is disposed on the surface of the periodic photonic crystal structure 120 away from the prism unit 130, where the buffer layer 110 contacts the solution 140 to be measured, and the buffer layer 110 may be made of zinc sulfide material. The periodic photonic crystal structure 120 is alternately arranged in the stacking direction Y by a high refractive index material and a low refractive index material to form a periodic arrangement. Preferably, the high refractive index material is germanium and the low refractive index material is zinc selenide. The zinc selenide layer 121 and the germanium layer 122 can be prepared by magnetron sputtering, electron beam evaporation and other processes, and the unmarked detection is realized based on the bloch surface wave (bloch surface wave, BSW) by utilizing optical resonance generated by attenuated total internal reflection of medium interfaces with different refractive indexes of the zinc selenide layer 121 and the germanium layer 122. Since there is no metal in the periodic dielectric, the dielectric loss of BSW is much smaller than that of SPR, so that formants narrower and deeper than that of SPR can be obtained, which is superior to the SPR sensor in terms of sensor sensitivity.
The optical sensor based on the photonic crystal coupling structure can excite BSW under the condition of specific parameters, and the embodiment of the invention utilizes the periodic photonic crystal structure to excite the Roche surface wave through the buffer layer, the periodic photonic crystal structure and the prism unit which are sequentially laminated, so that the Roche surface wave appears as a sharp formant in a reflected spectrum. Solutions to be detected with different concentrations are placed on one side of the buffer layer, so that high-sensitivity detection and analysis can be realized. The refractive indexes of different solutions or the same solution with different concentrations are slightly different, and the slight change of the refractive index of the solution to be measured causes larger shift of the resonance position of the resonance peak of the reflection spectrum due to the strong locality of the Buloch surface wave. Therefore, by exploring the relation between the spectrums of the detection light and the reflected signal light, namely, the response of the sharp formants in the reflected spectrums to the solution to be detected, the unmarked detection of the solution to be detected is realized by detecting the offset of the formant positions, so that the influence of the marked detection on the solution to be detected is avoided, and the sensing sensitivity and the quality factor are improved.
The excitation of the BSW is determined by the impedance matching of the system, and the system needs to be optimized according to the detected solution 140 to be tested, that is, the sensor structure needs to be further optimized after the BSW is excited. The sensitivity of the optical signal to the object to be measured is derived from the refractive index of the object to be measured, so the design of the sensor is specific. Optical sensors based on photonic crystal coupling structures can excite BSW under certain parameters, which exhibit a sharp formant in the reflectance spectrum. And detecting the offset of the formant position to realize label-free detection of the object to be detected. The label-free detection process is simple, has low cost and is beneficial to industrialization, and more importantly, the label-free detection process can also realize quantification and kinetic measurement of molecular interaction. Some label-free detection mechanisms measure the refractive index change induced by molecular interactions, which is related to the sample concentration or surface density, and are not limited to the volume of the sample to be measured. When the volume of the sample to be detected reaches the nano-scale, the fluorescence detection with the detection effect of the label-free detection ratio depending on the total amount of the sample to be detected has obvious advantages.
An embodiment of the present invention provides an optimized optical sensor structure, in which a periodic photonic crystal structure 120 is formed by alternately arranging zinc selenide layers 121 and germanium layers 122 to form a one-dimensional photonic crystal. The periodic number of the periodic structure formed by the zinc selenide layer 121 and the germanium layer 122 is set to 6, and fig. 2 is a graph comparing the reflection spectrum and the interfacial impedance of the optical sensor at the incident angle θ=67.5 deg in the embodiment of the invention. Wherein the solid black line is the reflectance spectrum of the structure and the dashed line is the impedance function at the surface of the structure. It can be seen from fig. 2 that there is a distinct reflection valley at the incident wavelength λ=1456nm, and that this reflection valley happens to occur at a location where the surface impedance of the structure is zero, which will provide a basis for the design of the structure. Fig. 3 is a schematic diagram of electric field intensity distribution at an interface when an optical sensor excites a surface wave to perform sensing, and referring to fig. 3, a local area with strong electric field intensity is located at the interface between the optical sensor and a solution to be measured, and the electric field decays exponentially after the optical sensor is far away from the interface, so that the strong local field property obtained by the invention is a key of high-performance sensing.
In order to further improve the performance of the sensor, the embodiment of the present invention further optimizes the sensor structure, and in the embodiment of the present invention, the refractive index of the zinc selenide layer 121 is set to 2.46, and the thickness is 93nm. The refractive index of the germanium layer 122 was 4.3 and the thickness was 163nm. The buffer layer 110 is a zinc sulfide layer. The refractive index of the zinc sulfide layer was 2.28 and the thickness was 615nm. The prism unit 130 is a quartz glass prism having a refractive index of 1.445. In the embodiment of the invention, the refractive index of the solution 140 to be measured is n_1=1.329, n_2=1.330, n_3=1.331 and n_4=1.332, and the incident signal wavelength range is 1485nm-1500nm, so as to obtain a formant offset characteristic schematic diagram shown in fig. 4, and the sensitivity of the optical sensor is s=1570 nm/RIU according to a calculation formula, and the sensing performance is as high as fom=1869/RIU.
Based on the above embodiments, fig. 5 is a flowchart of an optical detection method according to an embodiment of the present invention, where the optical sensor based on a photonic crystal coupling structure performs measurement, and the method includes:
s110, injecting the detection light from the prism unit at a preset incidence angle;
specifically, the detection light reaches the buffer layer through the periodic photonic crystal structure, and an incident angle of the detection light can be set to 67.5deg, the wavelength range of an incident signal is 1485nm-1500nm, and the high-sensitivity detection analysis of the detection light can be realized by utilizing optical resonance generated by attenuated total internal reflection of medium interfaces with different refractive indexes of the zinc selenide layer and the germanium layer and placing solutions to be detected with different concentrations on one side of the buffer layer.
S120, measuring the reflected signal light of the prism unit, and analyzing the sensing parameters of the solution to be measured according to the change of the reflected signal light.
Specifically, the change of the formants in the wavelength domain is observed, and the relationship between the spectrum of the detection light and the spectrum of the reflected signal light is explored, namely, the response of the sharp formants in the reflected spectrum to the solution to be detected is detected, and the unmarked detection of the solution to be detected is realized by detecting the offset of the formant positions, so that the influence of marked detection on the solution to be detected is avoided, and the high-precision measurement of the solution to be detected is realized.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. An optical sensor based on photonic crystal coupling structure, comprising: a buffer layer, a periodic photonic crystal structure, and a prism unit laminated in this order; the buffer layer is contacted with the solution to be tested; the periodic photonic crystal structure is a periodic structure formed by alternately arranging zinc selenide layers and germanium layers.
2. The photonic crystal coupling structure based optical sensor of claim 1, wherein the number of periods of the periodic structure in the periodic photonic crystal structure is 6.
3. The photonic crystal coupling structure based optical sensor of claim 1, wherein the zinc selenide layer has a refractive index of 2.46 and a thickness of 93nm.
4. The photonic crystal coupling structure based optical sensor of claim 1, wherein the germanium layer has a refractive index of 4.3 and a thickness of 163nm.
5. The photonic crystal coupling structure based optical sensor of claim 1, wherein the buffer layer is a zinc sulfide layer.
6. The photonic crystal coupling structure based optical sensor of claim 5, wherein the zinc sulfide layer has a refractive index of 2.28 and a thickness of 615nm.
7. The photonic crystal coupling structure based optical sensor of claim 1, wherein the prism unit is a quartz glass prism having a refractive index of 1.445.
8. An optical detection method measured by an optical sensor based on a photonic crystal coupling structure, the optical sensor comprising: a buffer layer, a periodic photonic crystal structure, and a prism unit laminated in this order;
the method comprises the following steps:
injecting detection light from the prism unit at a preset incidence angle;
and measuring the reflected signal light of the prism unit, and analyzing the sensing parameters of the solution to be measured according to the change of the reflected signal light.
9. The optical detection method according to claim 8, wherein the preset incident angle is 67.5deg.
10. The optical detection method according to claim 8, wherein the wavelength of the probe light is in a range of 1485nm to 1500nm.
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