CN117629057A - Device and method for measuring anti-disturbance environmental signals based on white light interference - Google Patents

Device and method for measuring anti-disturbance environmental signals based on white light interference Download PDF

Info

Publication number
CN117629057A
CN117629057A CN202410112574.1A CN202410112574A CN117629057A CN 117629057 A CN117629057 A CN 117629057A CN 202410112574 A CN202410112574 A CN 202410112574A CN 117629057 A CN117629057 A CN 117629057A
Authority
CN
China
Prior art keywords
interference
signal
light
frequency
time domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202410112574.1A
Other languages
Chinese (zh)
Other versions
CN117629057B (en
Inventor
郭瑞利
叶阳
刘晓平
温永强
张晓磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Haoheng Technology Co ltd
Wuhan Institute of Technology
Original Assignee
Wuhan Haoheng Technology Co ltd
Wuhan Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Haoheng Technology Co ltd, Wuhan Institute of Technology filed Critical Wuhan Haoheng Technology Co ltd
Priority to CN202410112574.1A priority Critical patent/CN117629057B/en
Publication of CN117629057A publication Critical patent/CN117629057A/en
Application granted granted Critical
Publication of CN117629057B publication Critical patent/CN117629057B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02032Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/14Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02083Interferometers characterised by particular signal processing and presentation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02083Interferometers characterised by particular signal processing and presentation
    • G01B9/02084Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0295Constructional arrangements for removing other types of optical noise or for performing calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

本发明公开了一种基于白光干涉测量抗扰动环境信号的装置及方法,包括以下步骤:S1、调节参考臂中的参考光,使其与经过待测事件点的信号光发生拍频干涉;S2、调节参考光的偏振态,得到一定偏振方向夹角下的时域干涉信号;S3、对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;再进行傅里叶逆变换,归一化后得到干涉峰;S4、重复多次测量,调节参考光偏振态的角度覆盖一个完整周期;S5、将多次干涉峰做卷积;S6、对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除环境扰动的信号。本发明可消除在杂乱的扰动环境下,白光干涉系统测量信号的峰值“劈裂”,“锯齿类变形”等现象,还能消除因环境扰动带来的其他低频噪声。

The invention discloses a device and method for measuring anti-disturbance environmental signals based on white light interference, which includes the following steps: S1. Adjust the reference light in the reference arm to cause beat frequency interference with the signal light passing through the event point to be measured; S2 , adjust the polarization state of the reference light to obtain a time domain interference signal under a certain polarization direction angle; S3. Perform Fourier transform on the time domain interference signal to obtain a frequency domain signal, and perform low-frequency filtering; then perform inverse Fourier transform , obtain the interference peak after normalization; S4, repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle; S5, convolve the multiple interference peaks; S6, perform the convolution result of the time domain interference peak Lorenz curve fitting is used to obtain the signal that ultimately eliminates environmental disturbances. The invention can eliminate phenomena such as peak "splitting" and "sawtooth-like deformation" of the white light interference system measurement signal in a cluttered disturbance environment, and can also eliminate other low-frequency noise caused by environmental disturbance.

Description

基于白光干涉测量抗扰动环境信号的装置及方法Device and method for measuring anti-disturbance environmental signals based on white light interference

技术领域Technical field

本发明涉及光学测量领域,尤其涉及一种基于白光干涉测量抗扰动环境信号的装置及方法。The invention relates to the field of optical measurement, and in particular to a device and method for measuring anti-disturbance environmental signals based on white light interference.

背景技术Background technique

白光干涉技术是测量光学微弱信号的有效手段和方案。利用白光极短的相干长度,可实现极弱信号的强度检测和距离定位。White light interference technology is an effective method and solution for measuring weak optical signals. Utilizing the extremely short coherence length of white light, intensity detection and distance positioning of extremely weak signals can be achieved.

但目前几乎所有的白光干涉检测设备均只能在静态环境中测量,需要设备本身不能有大的或快速的扰动,待测点所处的环境同样必须为稳定的静态环境。而一旦设备本身有晃动或待测品处于复杂的扰动环境中,环境的扰动不仅会引入更多的低频噪声,还会改变测试样品的光纤形状,进而影响光在其中的偏振态变化,这些情况会导致测量得到的曲线将会有更厚的基底噪声,同时原本单个平滑的干涉峰会变形为多个尖峰,导致测量结果复杂难以识别,距离精度难以判定,且因偏振态快速连续变化,信号强度也将大范围跳动,测量误差急剧变大。However, almost all current white light interference detection equipment can only measure in a static environment. The equipment itself must not have large or rapid disturbances, and the environment where the point to be measured must also be a stable static environment. Once the equipment itself shakes or the product to be tested is in a complex disturbance environment, the environmental disturbance will not only introduce more low-frequency noise, but also change the shape of the optical fiber of the test sample, thereby affecting the change of the polarization state of the light in it. These situations This will cause the measured curve to have thicker background noise, and at the same time, the original single smooth interference peak will be deformed into multiple sharp peaks, making the measurement results complex and difficult to identify, the distance accuracy difficult to determine, and due to the rapid and continuous changes in polarization state, the signal strength will decrease. It will also jump in a large range, and the measurement error will increase sharply.

发明内容Contents of the invention

本发明主要目的在于提供一种基于白光干涉测量抗扰动环境信号的装置及方法,实现动态环境下的最终测试结果信噪比大幅提高,真实且准确的还原待测点的干涉峰情况。The main purpose of the present invention is to provide a device and method for measuring anti-disturbance environmental signals based on white light interference, so as to significantly improve the signal-to-noise ratio of the final test results in a dynamic environment and truly and accurately restore the interference peak situation of the point to be measured.

本发明所采用的技术方案是:The technical solution adopted by the present invention is:

提供一种基于白光干涉测量抗扰动环境信号的方法,包括以下步骤:A method for measuring anti-disturbance environmental signals based on white light interferometry is provided, including the following steps:

S1、调节参考臂中的参考光,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;S1. Adjust the reference light in the reference arm to cause beat frequency interference between the reference light and the signal light passing through the event point to be measured, generating a time domain interference signal; the reference light and signal light are split from the broad spectrum light emitted by the white light source;

S2、调节参考光偏振态的角度,得到一定偏振方向夹角下的时域干涉信号;S2. Adjust the angle of the polarization state of the reference light to obtain the time domain interference signal at a certain angle between the polarization directions;

S3、对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;S3. Perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transform on the filtered frequency domain signal to obtain the time domain interference spectrum, and obtain the amplitude of the time domain interference spectrum. After normalization, the interference peak is obtained;

S4、重复多次测量,调节参考光偏振态的角度覆盖一个完整周期,得到N次拍频干涉的信号,相应得到N次干涉峰,N为整数;S4. Repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle, and obtain N beat frequency interference signals, correspondingly obtaining N interference peaks, where N is an integer;

S5、将N次干涉峰做卷积,得到时域干涉峰卷积结果;S5. Convolve N interference peaks to obtain the time domain interference peak convolution result;

S6、对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除环境扰动的信号。S6. Perform Lorentz curve fitting on the time domain interference peak convolution results to obtain the signal that ultimately eliminates environmental disturbance.

接上述技术方案,步骤S6中进行洛伦兹曲线拟合时,具体将N次干涉峰的最高幅值作为拟合曲线的峰值点,取N次干涉峰中值点的平均值作为拟合曲线的中点,并将N次干涉峰的半高宽度的均值作为拟合曲线的半高宽度。Following the above technical solution, when performing Lorentz curve fitting in step S6, specifically the highest amplitude of the N interference peaks is taken as the peak point of the fitting curve, and the average value of the median point of the N interference peaks is taken as the fitting curve. The midpoint of , and the average of the half-height widths of N interference peaks is taken as the half-height width of the fitting curve.

接上述技术方案,步骤S1中调节参考臂中的参考光包括:通过控制参考臂中光纤延迟线的方式连续调节参考光的光程,当参考光的光程与测量臂中经过待测事件点的信号光的光程相等时,发生拍频干涉。Following the above technical solution, adjusting the reference light in the reference arm in step S1 includes: continuously adjusting the optical path of the reference light by controlling the optical fiber delay line in the reference arm. When the optical path of the reference light is consistent with the measurement arm and passes through the event point to be measured, When the optical paths of the signal lights are equal, beat frequency interference occurs.

接上述技术方案,光纤延迟线具体通过移动内部反射镜位置,连续改变光通过其中的光程,进而连续改变参考臂臂长。Following the above technical solution, the optical fiber delay line continuously changes the optical path of light passing through it by moving the position of the internal reflector, thereby continuously changing the arm length of the reference arm.

接上述技术方案,步骤S1中调节参考臂中的参考光包括移频,具体将参考光向上或向下移动固定频率。Following the above technical solution, adjusting the reference light in the reference arm in step S1 includes frequency shifting, specifically moving the reference light up or down by a fixed frequency.

本发明还提供一种基于白光干涉测量抗扰动环境信号的系统,包括:The invention also provides a system for measuring anti-disturbance environmental signals based on white light interference, including:

参考臂调节模块,用于调节参考臂中的参考光,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;The reference arm adjustment module is used to adjust the reference light in the reference arm so that the reference light interferes with the signal light passing through the event point to be measured to generate a time domain interference signal; the reference light and signal light are broad spectrum emitted by the white light source. Light is formed by splitting;

偏振态调节模块,用于调节参考光偏振态的角度,得到一定偏振方向夹角下的时域干涉信号;The polarization adjustment module is used to adjust the angle of the polarization state of the reference light to obtain a time domain interference signal at a certain angle between the polarization directions;

频域变换模块,用于对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;The frequency domain transformation module is used to perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transformation on the filtered frequency domain signal to obtain the time domain interference spectrum, and perform low-frequency filtering on the time domain interference signal. The interference peak is obtained after amplitude normalization of the interference spectrum;

卷积模块,用于将重复多次测量,调节参考光偏振态的角度覆盖一个完整周期,将得到的N次拍频干涉的信号中的N次干涉峰做卷积,得到时域干涉峰卷积结果,N为整数;The convolution module is used to repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle, and convolve the N interference peaks in the obtained N beat frequency interference signals to obtain the time domain interference peak volume. Product result, N is an integer;

曲线拟合模块,用于对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除环境扰动的信号。The curve fitting module is used to perform Lorentz curve fitting on the time domain interference peak convolution results to obtain a signal that ultimately eliminates environmental disturbances.

本发明还提供一种基于白光干涉测量抗扰动环境信号的装置,包括:The invention also provides a device for measuring anti-disturbance environmental signals based on white light interference, including:

白光光源;White light source;

第一光纤耦合器,将白光光源发出的宽谱光分成两束,一束信号光进入测量臂,另一束参考光进入参考臂;The first optical fiber coupler divides the broad-spectrum light emitted by the white light source into two beams, one beam of signal light enters the measurement arm, and the other beam of reference light enters the reference arm;

测量臂,待测事件点设置在该测量臂中,信号光经待测事件点后反射回来进入第二光纤耦合器;A measuring arm, in which the event point to be measured is set, and the signal light is reflected back through the event point to be measured and enters the second optical fiber coupler;

参考臂,用于调节参考光,使其经过该参考臂后进入第二光纤耦合器与信号光发生拍频干涉;该参考臂还用于在每次拍频干涉过程中调节参考光的偏振态;The reference arm is used to adjust the reference light, so that after passing through the reference arm, it enters the second optical fiber coupler and causes beat frequency interference with the signal light; the reference arm is also used to adjust the polarization state of the reference light during each beat frequency interference process. ;

第二光纤耦合器,入射的测量臂的信号光和参考臂的参考光在该第二光纤耦合器耦合;a second optical fiber coupler, at which the incident signal light of the measurement arm and the reference light of the reference arm are coupled;

控制及信号采集模块,用于采集拍频干涉信号;Control and signal acquisition module, used to collect beat frequency interference signals;

信号处理器,用于采用权利要求1所述的基于白光干涉测量抗扰动环境信号的方法进行信号处理,得到最终的消除环境扰动的信号。A signal processor, configured to perform signal processing using the method of measuring anti-disturbance environmental signals based on white light interference as claimed in claim 1, to obtain a final signal that eliminates environmental disturbances.

接上述技术方案,参考臂包括光纤延时线,通过控制光纤延迟线的方式连续调节参考光的光程,当参考光的光程与测量臂中经过待测事件点的信号光的光程相等时,发生拍频干涉。Following the above technical solution, the reference arm includes an optical fiber delay line, and the optical path of the reference light is continuously adjusted by controlling the optical fiber delay line. When the optical path of the reference light is equal to the optical path of the signal light passing through the event point to be measured in the measurement arm, When, beat frequency interference occurs.

接上述技术方案,参考臂包括电动偏振控制器,用于随机变动参考光的偏振态。Following the above technical solution, the reference arm includes an electric polarization controller for randomly changing the polarization state of the reference light.

接上述技术方案,该参考臂还包括频移器,用于将参考光向上或向下移动固定频率。Following the above technical solution, the reference arm also includes a frequency shifter for moving the reference light up or down at a fixed frequency.

本发明还提供了一种计算机存储介质,其内存储有可被处理器执行的计算机程序,该计算机程序执行上述技术方案所述的基于白光干涉测量抗扰动环境信号的方法。The present invention also provides a computer storage medium, which stores a computer program that can be executed by a processor. The computer program executes the method for measuring anti-disturbance environmental signals based on white light interference described in the above technical solution.

本发明产生的有益效果是:利用偏振态在拍频干涉过程中的快速多个变化,得到多组数据,每次得到调节一定偏振角度的干涉结果,通过调偏避免了偏振对干涉强度的影响,同时提高了测量的精准度;此外,通过多次测量的方式,将得到的信号通过低频滤波、频域变换、卷积、归一化和曲线拟合替换的方式,完全消除了扰动环境下,白光干涉系统测量信号结果曲线的峰值“劈裂”,“锯齿类变形”等现象,还能消除因环境扰动带来的其他低频噪声,使最终测试结果在动态变化的测量环境中也能有非常漂亮的峰值曲线和极好的信噪比。The beneficial effects produced by this invention are: by utilizing the rapid multiple changes of polarization state during the beat frequency interference process, multiple sets of data are obtained, and the interference results of adjusting a certain polarization angle are obtained each time, and the impact of polarization on the interference intensity is avoided through polarization adjustment. , while improving the accuracy of measurement; in addition, through multiple measurements, the obtained signal is replaced by low-frequency filtering, frequency domain transformation, convolution, normalization and curve fitting, completely eliminating the problem of interference in a disturbed environment. The peak "splitting" and "saw-like deformation" of the white light interference system measurement signal result curve can also eliminate other low-frequency noise caused by environmental disturbance, so that the final test results can also be accurate in a dynamically changing measurement environment. Very nice peak curve and excellent signal to noise ratio.

进一步地,通过光纤延迟线移动内部反射镜位置,连续改变光通过其中的光程,进而连续改变参考臂臂长,从而实现测量对应长度信号臂的待测范围。Furthermore, the position of the internal reflector is moved through the optical fiber delay line, and the optical path of the light passing through it is continuously changed, thereby continuously changing the length of the reference arm, thereby achieving measurement of the range to be measured of the signal arm of the corresponding length.

进一步地,因为扰动或者环境噪声一般都是低频,比如几十kHz或者几百khz,通过将参考光的移频,可以更易将信号拍频与低频扰动隔开,便于信号采集。Furthermore, because disturbances or environmental noise are generally low-frequency, such as tens of kHz or hundreds of khz, by shifting the frequency of the reference light, the signal beat frequency can be more easily separated from the low-frequency disturbance, which facilitates signal collection.

当然,实施本发明的任一产品并不一定需要同时达到以上所述的所有优点。Of course, any product implementing the present invention does not necessarily need to achieve all the above-mentioned advantages at the same time.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting creative efforts.

图1A是本发明一实施例基于白光干涉测量抗扰动环境信号的方法流程图;Figure 1A is a flow chart of a method for measuring anti-disturbance environmental signals based on white light interference according to an embodiment of the present invention;

图1B是本发明一实施例基于白光干涉测量抗扰动环境信号的系统结构示意图;1B is a schematic structural diagram of a system for measuring anti-disturbance environmental signals based on white light interferometry according to an embodiment of the present invention;

图1C是本发明一实施例基于白光干涉测量抗扰动环境信号的装置结构示意图;Figure 1C is a schematic structural diagram of a device for measuring anti-disturbance environmental signals based on white light interference according to an embodiment of the present invention;

图2为白光干涉系统在稳定状态和扰动状态下拍频信号对比示意图;Figure 2 is a schematic diagram comparing the beat frequency signals of the white light interference system in the stable state and the disturbed state;

图3为时域干涉信号经傅里叶变换后得到频谱并滤掉低频噪声后反傅里叶变换得到时域信号示意图;Figure 3 is a schematic diagram of the time domain signal obtained by Fourier transformation of the time domain interference signal and filtering out the low frequency noise and then inverse Fourier transformation;

图4为白光干涉系统在稳定状态和扰动状态下拍频信号幅值归一化后干涉峰对比示意图;Figure 4 is a schematic diagram showing the comparison of the interference peaks after normalizing the amplitude of the beat signal in the white light interference system in the stable state and the disturbed state;

图5为变换处理后的干涉信号逐一卷积后的曲线效果图;Figure 5 is a curve effect diagram after convolution of the transformed interference signals one by one;

图6为拟合后曲线替换原时域干涉峰示意图;Figure 6 is a schematic diagram of replacing the original time domain interference peak with the fitted curve;

图1C中:1为白光光源、2为第一光纤耦合器、3为移频器、4为光纤延迟线、5为电动偏振控制器、6为环形器、7为待测点DUT、8为第二光纤耦合器、9为控制及采集模块、10为信号处理器、11为信号臂、12为参考臂。In Figure 1C: 1 is the white light source, 2 is the first fiber coupler, 3 is the frequency shifter, 4 is the fiber delay line, 5 is the electric polarization controller, 6 is the circulator, 7 is the point under test DUT, 8 is The second optical fiber coupler, 9 is the control and acquisition module, 10 is the signal processor, 11 is the signal arm, and 12 is the reference arm.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention and are not intended to limit the present invention.

需要说明的是,本发明实施例中所提供的图示仅以示意方式说明本发明的基本构想,因此图式中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,且其组件布局型态也可能更为复杂。It should be noted that the diagrams provided in the embodiments of the present invention only illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show the components related to the present invention rather than the number and shape of the components in actual implementation. And size drawing, in actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complex.

在本发明中,还需要说明的是,如出现术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等,其所指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,如出现术语“第一”、“第二”仅用于描述和区分目的,而不能理解为指示或暗示相对重要性。In the present invention, it should also be noted that if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner" and "outer" appear etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, Constructed and operated in a specific orientation and therefore should not be construed as limiting this application. In addition, the terms "first" and "second", if they appear, are for descriptive and distinguishing purposes only and are not to be understood as indicating or implying relative importance.

本发明主要用于有效消除扰动环境中,干涉信号的低频扰动噪声以及偏振态的动态变化导致待测点信号强度随机跳动的情况,高信噪比的恢复原信号峰形状,信号更加稳定,定位更加精准。This invention is mainly used to effectively eliminate the situation where the low-frequency disturbance noise of the interference signal and the dynamic change of the polarization state in the disturbance environment cause the signal intensity of the point to be measured to jump randomly. The high signal-to-noise ratio restores the original signal peak shape, making the signal more stable and positioning. More precise.

实施例1Example 1

如图1A所示,该实施例的基于白光干涉测量抗扰动环境信号的方法包括以下步骤:As shown in Figure 1A, the method of measuring anti-disturbance environmental signals based on white light interference in this embodiment includes the following steps:

S1、调节参考臂中参考光的光程,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;S1. Adjust the optical path of the reference light in the reference arm so that the reference light and the signal light passing through the event point to be measured occur beat frequency interference to generate a time domain interference signal; the reference light and signal light are split from the broad spectrum light emitted by the white light source. become;

S2、调节参考光的偏振态,得到一定偏振方向夹角下的时域干涉信号;S2. Adjust the polarization state of the reference light to obtain the time domain interference signal at a certain angle between the polarization directions;

S3、对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;S3. Perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transform on the filtered frequency domain signal to obtain the time domain interference spectrum, and obtain the amplitude of the time domain interference spectrum. After normalization, the interference peak is obtained;

S4、重复多次测量,调节参考光偏振态的角度覆盖一个完整周期,得到N次拍频干涉的信号,相应得到N次干涉峰;S4. Repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle, and obtain N times of beat frequency interference signals, correspondingly obtaining N times of interference peaks;

S5、将N次干涉峰做卷积,得到时域干涉峰卷积结果;S5. Convolve N interference peaks to obtain the time domain interference peak convolution result;

S6、对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除了环境抗扰动的信号。S6. Perform Lorentz curve fitting on the time domain interference peak convolution results to obtain a signal that finally eliminates environmental anti-disturbance.

其中,步骤S2中,在一次拍频干涉中,可随机变动参考光的偏振态,每开始调节一次偏振态,均对待测点扫描一次测量结果,调节K次偏振态则测量K次结果,取所有次干涉峰的最大值作为最终峰值的测量结果。偏振态的调节方式为:可在每次拍频干涉中所有偏振方向全部调节一遍,即360°遍历快速扫描;也可固定在某一方向,等待下次测量前调节到另一不同的固定方向,多次测量后遍历360°。每调节一次偏振态即对应两条臂以当前的偏振夹角发生干涉一次,而多次测量后,两偏振夹角较小的概率也越大,此时,选取所有次干涉峰的最大值则对应两路光的偏振态夹角最小,夹角为0时,即为同向,此时最逼近待测事件点真实反射强度,测量次数越多,同向几率越大,则测量信号越准确、越稳定。Among them, in step S2, in a beat frequency interference, the polarization state of the reference light can be randomly changed. Each time the polarization state is adjusted, the measurement result is scanned once at the point to be measured. When the polarization state is adjusted K times, the results are measured K times. Take The maximum value of all sub-interference peaks is used as the measurement result of the final peak. The polarization state adjustment method is: all polarization directions can be adjusted in each beat frequency interference, that is, 360° traversal and rapid scanning; it can also be fixed in a certain direction and adjusted to a different fixed direction before the next measurement. , traversing 360° after multiple measurements. Each time the polarization state is adjusted, the two arms interfere once at the current polarization angle. After multiple measurements, the probability of a smaller angle between the two polarizations increases. At this time, selecting the maximum value of all interference peaks is The angle between the polarization states of the two lights is the smallest. When the angle is 0, it is in the same direction. At this time, it is closest to the true reflection intensity of the event point to be measured. The more measurements are taken, the greater the probability of being in the same direction, and the more accurate the measurement signal is. , the more stable it is.

进一步地,因白光为宽谱光,其相干长度极短(一般为um到几十um量级,可以近似认为当参考臂和测量臂的长度完全相等时发生相干。因此,在步骤S1中克通过控制参考臂中光纤延迟线的方式连续调节参考光的光程,当参考光的光程与测量臂中经过待测事件点的信号光的光程相等时,发生拍频干涉。Furthermore, because white light is broad spectrum light and its coherence length is extremely short (generally on the order of um to tens of um), it can be approximately considered that coherence occurs when the lengths of the reference arm and the measurement arm are completely equal. Therefore, in step S1 The optical path of the reference light is continuously adjusted by controlling the fiber delay line in the reference arm. When the optical path of the reference light is equal to the optical path of the signal light passing through the event point to be measured in the measurement arm, beat frequency interference occurs.

进一步地,步骤S6中进行洛伦兹曲线拟合时,具体将N次干涉峰的最高幅值作为拟合曲线的峰值点,取N次干涉峰中值点的平均值作为拟合曲线的中点,并将N次干涉峰的半高宽度的均值作为拟合曲线的半高宽度。因待测事件点位置不变,且每次延迟线扫描和数据采集均同步,理论上每次干涉峰的宽度、中心点位置完全相同,所以峰的半高宽度和中心位置取平均值更能减小系统误差,提高精度。Further, when performing Lorentz curve fitting in step S6, the highest amplitude of the N interference peaks is specifically taken as the peak point of the fitting curve, and the average value of the median point of the N interference peaks is taken as the center of the fitting curve. point, and the average value of the half-height width of N interference peaks is taken as the half-height width of the fitting curve. Since the position of the event point to be measured remains unchanged, and each delay line scan and data collection are synchronized, theoretically the width and center point position of each interference peak are exactly the same, so it is more accurate to average the half-height width and center position of the peak. Reduce system errors and improve accuracy.

本发明的一个实施例中,光纤延迟线可通过控制扫描改变光经过其中的光程,进而改变整个参考臂臂长(光程)。如光纤延迟线具体通过移动内部反射镜位置,连续改变光通过其中的光程,进而连续改变参考臂臂长。In one embodiment of the present invention, the optical fiber delay line can change the optical path of light passing through it by controlling scanning, thereby changing the entire reference arm arm length (optical path). For example, the optical fiber delay line continuously changes the optical path of light passing through it by moving the position of the internal reflector, thereby continuously changing the length of the reference arm.

图2为白光干涉系统在稳定状态和扰动状态下拍频信号对比示意图;因为扰动或者环境噪声一般都是低频,比如几十kHz或者几百khz,而光频一般在THz量级的范围,所以差频探测是主流的信号检测手段,前文中提到的拍频即是信号的差频项部分,无论光信号本身是单一频率还是一定范围的宽谱,对拍频干涉后的差频均不影响,最终频率相减后成为移动的固定频率,从而可以更容易将信号拍频与低频扰动隔开,便于信号采集。参考光移动的固定频率Δf就是拍频,从而Δf的大小决定了信号的检测和解调。如将固定频率Δf移到几十MHz或者几百MHz,既方便信号检测滤波,也隔开了环境扰动。Figure 2 is a schematic diagram comparing the beat frequency signals of the white light interference system in the steady state and the disturbed state; because the disturbance or environmental noise is generally low frequency, such as tens of kHz or hundreds of khz, and the optical frequency is generally in the THz range, so Difference frequency detection is the mainstream signal detection method. The beat frequency mentioned above is the difference frequency part of the signal. Regardless of whether the optical signal itself is a single frequency or a wide spectrum within a certain range, the difference frequency after beat frequency interference is not affected. The final frequency is subtracted and becomes a moving fixed frequency, which makes it easier to isolate the signal beat frequency from low-frequency disturbances and facilitate signal collection. The fixed frequency Δf at which the reference light moves is the beat frequency, so the size of Δf determines the detection and demodulation of the signal. For example, moving the fixed frequency Δf to tens of MHz or hundreds of MHz not only facilitates signal detection and filtering, but also isolates environmental disturbances.

可见,该实施例通过调节偏振态、频域变换、卷积和曲线拟合替换等方式,完全消除了扰动环境下,白光干涉系统测量信号结果曲线的峰值“劈裂”,“锯齿类变形”等现象,还能消除因环境扰动带来的其他低频噪声。使最终测试结果在动态变化的测量环境中也能有非常漂亮的峰值曲线和极好的信噪比。在保证定位精度不变和峰值高度更加准确和稳定的情况下,完美的解决了原白光干涉系统只能在静态环境中测量才能得到稳定的测试结果的限制,极大拓宽了白光干涉技术的应用场景。It can be seen that this embodiment completely eliminates the peak "splitting" and "sawtooth-like deformation" of the white light interference system measurement signal result curve in a disturbed environment by adjusting the polarization state, frequency domain transformation, convolution, and curve fitting replacement. It can also eliminate other low-frequency noise caused by environmental disturbances. The final test result can also have a very beautiful peak curve and excellent signal-to-noise ratio in a dynamically changing measurement environment. While ensuring that the positioning accuracy remains unchanged and the peak height is more accurate and stable, it perfectly solves the limitation that the original white light interference system can only obtain stable test results by measuring in a static environment, greatly broadening the application of white light interference technology. Scenes.

实施例2Example 2

该实施例基于实施例1,主要为实现实施例1的方法的系统实施例。This embodiment is based on Embodiment 1 and is mainly a system embodiment for implementing the method of Embodiment 1.

如图1B所示,该实施例基于白光干涉测量抗扰动环境信号的系统主要包括:As shown in Figure 1B, this embodiment's system for measuring anti-disturbance environmental signals based on white light interferometry mainly includes:

参考臂调节模块,用于调节参考臂中的参考光,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;The reference arm adjustment module is used to adjust the reference light in the reference arm so that the reference light interferes with the signal light passing through the event point to be measured to generate a time domain interference signal; the reference light and signal light are broad spectrum emitted by the white light source. Light is formed by splitting;

偏振态调节模块,用于调节参考光的偏振态,得到一定偏振方向夹角下的时域干涉信号;The polarization adjustment module is used to adjust the polarization state of the reference light to obtain a time domain interference signal under a certain polarization direction angle;

频域变换模块,用于对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;The frequency domain transformation module is used to perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transformation on the filtered frequency domain signal to obtain the time domain interference spectrum, and perform low-frequency filtering on the time domain interference signal. The interference peak is obtained after amplitude normalization of the interference spectrum;

卷积模块,用于将重复多次测量,使调节参考光偏振态的角度覆盖一个完整周期,将得到的N次拍频干涉的信号中的N次干涉峰做卷积,得到时域干涉峰卷积结果;The convolution module is used to repeat multiple measurements so that the angle of adjusting the polarization state of the reference light covers a complete cycle, and convolves the N interference peaks in the obtained N beat frequency interference signals to obtain the time domain interference peak. convolution result;

曲线拟合模块,用于对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除了环境抗扰动的信号。The curve fitting module is used to perform Lorentz curve fitting on the time domain interference peak convolution results to obtain a signal that ultimately eliminates environmental anti-disturbance.

通过实现方法实施例,该系统可以具备方法实施例的功能。该系统可以完全避免了在杂乱的扰动环境下,白光干涉系统测量信号结果曲线的峰值“劈裂”,“锯齿类变形”等现象,还能消除因环境扰动带来的其他低频噪声,使最终测试结果在动态变化的测量环境中也能有非常漂亮的峰值曲线和极好的信噪比。定位精度和峰值高度均不会随着原始信号的变形而变化。By implementing the method embodiments, the system may have the functions of the method embodiments. This system can completely avoid phenomena such as peak "splitting" and "saw-tooth deformation" of the white light interference system measurement signal result curve in a cluttered and disturbed environment. It can also eliminate other low-frequency noise caused by environmental disturbance, so that the final The test results can also have very beautiful peak curves and excellent signal-to-noise ratio in dynamically changing measurement environments. Neither positioning accuracy nor peak height changes as the original signal is deformed.

实施例3Example 3

该实施例基于实施例1,主要为实现实施例1的方法的装置。This embodiment is based on Embodiment 1 and is mainly a device for implementing the method of Embodiment 1.

如图1C所示,该实施例基于白光干涉测量抗扰动环境信号的装置包括:As shown in Figure 1C, the device for measuring anti-disturbance environmental signals based on white light interference in this embodiment includes:

白光光源1,用于发出白光,该白光为宽谱光;White light source 1 is used to emit white light, which is broad spectrum light;

第一光纤耦合器2,将白光光源发出的宽谱光分成两束,一束信号光进入测量臂,另一束参考光进入参考臂;The first optical fiber coupler 2 divides the broad spectrum light emitted by the white light source into two beams, one beam of signal light enters the measurement arm, and the other beam of reference light enters the reference arm;

测量臂11,待测事件点设置在该测量臂中,信号光经待测事件点后反射回来进入第二光纤耦合器;Measuring arm 11, the event point to be measured is set in the measurement arm, and the signal light is reflected back into the second optical fiber coupler after passing through the event point to be measured;

参考臂12,用于调节参考光(主要调节光程和频率),使其经过该参考臂后进入第二光纤耦合器与信号光发生拍频干涉;该参考臂还用于在每次拍频干涉过程中随机变动参考光的偏振态,得到随机偏振方向夹角下的时域干涉信号;The reference arm 12 is used to adjust the reference light (mainly adjusting the optical path and frequency), so that after passing through the reference arm, it enters the second optical fiber coupler and causes beat frequency interference with the signal light; the reference arm is also used to adjust the beat frequency at each beat frequency. During the interference process, the polarization state of the reference light is randomly changed to obtain a time domain interference signal at an angle between random polarization directions;

第二光纤耦合器8,入射的测量臂的信号光和参考臂的参考光在该第二光纤耦合器耦合,发生拍频干涉;The second optical fiber coupler 8, the incident signal light of the measurement arm and the reference light of the reference arm are coupled at the second optical fiber coupler, and beat frequency interference occurs;

控制及信号采集模块9,用于控制采集拍频干涉信号;The control and signal acquisition module 9 is used to control the acquisition of beat frequency interference signals;

信号处理器10,用于采用上述技术方案所述的基于白光干涉测量抗扰动环境信号的方法进行信号处理,得到最终的抗扰动环境信号。信号处理器10可为计算机。The signal processor 10 is used to perform signal processing using the method of measuring anti-disturbance environmental signals based on white light interference described in the above technical solution to obtain the final anti-disturbance environmental signal. Signal processor 10 may be a computer.

如图1C所示,具体地,该基于白光干涉测量扰动环境下信号的装置的测量臂11与参考臂12并联在与第一光纤耦合器1和第二光纤耦合器8之间,该测量臂11包括光纤环形器6,参考臂12包括顺次连接的移频器3、光纤延迟线4、电动偏振控制器5。移频器3可通过某种调制手段,使光的频率向上或向下移动某个固定频率。光纤延迟线4可通过控制扫描改变光经过其中的光程,进而改变整个参考臂臂长(光程)。电动偏振控制器5通过改变光纤形状随机改变光的偏振态为任一方向。控制及信号采集模块还可控制光纤延迟线4、移频器3及电动偏振控制器5运行及工作,并采集拍频干涉后的信号数据。As shown in Figure 1C, specifically, the measurement arm 11 and the reference arm 12 of the device for measuring signals in a disturbed environment based on white light interferometry are connected in parallel between the first fiber coupler 1 and the second fiber coupler 8. The measurement arm 11 includes an optical fiber circulator 6, and the reference arm 12 includes a frequency shifter 3, an optical fiber delay line 4, and an electric polarization controller 5 that are connected in sequence. The frequency shifter 3 can move the frequency of light upward or downward to a fixed frequency through some modulation method. The optical fiber delay line 4 can change the optical path of light passing through it by controlling scanning, thereby changing the entire reference arm arm length (optical path). The electric polarization controller 5 randomly changes the polarization state of light to any direction by changing the shape of the optical fiber. The control and signal acquisition module can also control the operation and work of the optical fiber delay line 4, frequency shifter 3 and electric polarization controller 5, and collect signal data after beat frequency interference.

进一步地,白光光源的偏振类型可为单模,白光光源波长可为O波段(波长范围为1530nm至1565nm)、C波段(波长范围为1530nm至1565nm)或L波段(波长范围为1530nm至1565nm)等范围。Further, the polarization type of the white light source can be single mode, and the wavelength of the white light source can be O band (wavelength range is 1530nm to 1565nm), C band (wavelength range is 1530nm to 1565nm) or L band (wavelength range is 1530nm to 1565nm) etc range.

白光光源1的输出端连接第一光纤耦合器2输入端,第一光纤耦合器2输出端其中一路作为信号光,连接光纤环形器6输入端,另一路作为参考光连接移频器3,移频器3输出端之后,顺次连接光纤延迟线4及电动偏振控制器5,最后连接第二光纤耦合器8;信号臂(即测量臂)中光纤环形器6第二端口接待测品(及待测事件点DUT,Design Under Test),第3端口连接第二光纤耦合器8。The output end of the white light source 1 is connected to the input end of the first optical fiber coupler 2. One of the output ends of the first optical fiber coupler 2 is used as a signal light and connected to the input end of the optical fiber circulator 6. The other one is used as a reference light and connected to the frequency shifter 3. After the output end of the frequency converter 3, connect the optical fiber delay line 4 and the electric polarization controller 5 in sequence, and finally connect the second optical fiber coupler 8; the second port of the optical fiber circulator 6 in the signal arm (i.e., the measurement arm) receives the test product (and The event point to be tested is DUT (Design Under Test), and the third port is connected to the second optical fiber coupler 8.

白光光源1发出宽谱光,经由第一光纤耦合器2分为两路,一路作为信号光进入光纤环形器6,经过第2端口待测事件点DUT反射后从第3端口出来进入第二光纤耦合器8,另一路作为参考光经过移频器3使参考光移频△f,之后进入光纤延迟线4,连续调节参考光走的光程,最后进入电动偏振控制器5,随机改变参考光的偏振态,参考光最后同样进入第二光纤耦合器8。并与DUT反射回的信号光在此处发生拍频干涉。因白光为宽谱光,其相干长度极短(一般为um到几十um量级,可以近似认为当两条臂臂长完全相等时发生相干)。The white light source 1 emits broad-spectrum light, which is divided into two paths through the first optical fiber coupler 2. One path enters the optical fiber circulator 6 as signal light. After being reflected by the DUT of the event point to be measured at the second port, it comes out of the third port and enters the second optical fiber. Coupler 8, the other channel serves as the reference light and passes through the frequency shifter 3 to shift the frequency of the reference light by Δf, then enters the fiber delay line 4, continuously adjusts the optical path of the reference light, and finally enters the electric polarization controller 5 to randomly change the reference light polarization state, the reference light finally also enters the second optical fiber coupler 8. And beat frequency interference occurs here with the signal light reflected back from the DUT. Because white light is broad-spectrum light, its coherence length is extremely short (generally on the order of um to tens of um, and it can be approximately considered that coherence occurs when the two arm lengths are completely equal).

光纤延迟线4、移频器3及电动偏振控制器5均由控制及信号采集模块9控制运行及工作。The operation and work of the optical fiber delay line 4, the frequency shifter 3 and the electric polarization controller 5 are all controlled by the control and signal acquisition module 9.

由信号处理器10在软件上控制数据采集时间与光纤延迟线扫描时间同步,并把采集到的扫描干涉数据读取到上位机。搭建干涉结构时,控制待测样品的反射光总光程落在延迟线扫描的参考臂总光程范围内。The signal processor 10 controls the data acquisition time to be synchronized with the optical fiber delay line scanning time on the software, and reads the collected scanning interference data to the host computer. When building the interference structure, control the total optical path length of the reflected light of the sample to be measured to fall within the total optical path range of the reference arm of the delay line scan.

调节电动偏振控制器,每转动一次偏振态,均对待测点扫描一次测量结果,调节N次偏振态则测量N次结果,取所有次干涉峰的最大值作为最终峰值的测量结果。Adjust the electric polarization controller. Each time the polarization state is rotated, the measurement result is scanned once at the point to be measured. If the polarization state is adjusted N times, the results are measured N times. The maximum value of all interference peaks is taken as the final peak measurement result.

每测量一次即对应两条臂以当前的偏振夹角发生干涉一次,而多次测量后,两偏振夹角较小的概率也越大(此时,选取所有干涉峰的最大值对应两路光的偏振态夹角最小,夹角为0时,即同向;此时最逼近待测点真实反射强度,测量次数越多,同向几率越大,强度测量越准确和稳定)。Each measurement corresponds to the interference of the two arms at the current polarization angle. After multiple measurements, the probability that the angle between the two polarizations is smaller becomes greater (at this time, the maximum value of all interference peaks is selected to correspond to the two paths of light. The angle between the polarization states is the smallest, and when the angle is 0, it is in the same direction; at this time, it is closest to the true reflection intensity of the point to be measured. The more measurements are taken, the greater the probability of being in the same direction, and the more accurate and stable the intensity measurement is.)

因事件点位置不变,且每次延迟线扫描和数据采集均同步,理论上每次干涉峰的宽度、中心点位置完全相同,所以峰的半高宽度和中心位置取平均值更能减小系统误差,提高精度。Since the position of the event point remains unchanged, and each delay line scan and data collection are synchronized, theoretically the width and center point position of each interference peak are exactly the same, so averaging the half-height width and center position of the peak can further reduce System errors and improved accuracy.

静态干涉信号符合谱线均匀展宽类型,采用洛伦兹曲线拟合,符合实际干涉谱线情况,取所有组结果中干涉峰的最高幅值作为拟合曲线的峰值点A,取所有组干涉峰中值点的平均值作为拟合信号的中点x0,并把所有峰的半高宽度取平均,整个拍频干涉峰使用洛伦兹曲线拟合;其中/>The static interference signal conforms to the type of uniform broadening of the spectral line. Lorentz curve fitting is used, which is consistent with the actual interference spectral line situation. The highest amplitude of the interference peak in all sets of results is taken as the peak point A of the fitting curve, and all sets of interference peaks are taken. The average of the median points is taken as the midpoint x 0 of the fitted signal, and the half-maximum width of all peaks Taking the average, the entire beat frequency interference peak is fitted using the Lorentz curve; where/> .

扫描结果曲线中基底噪声因FFT变换滤噪再反FFT变换回来,噪声厚度将大幅降低,同时对多组数据作卷积,不仅消除了环境和系统噪声,还能大幅提高信噪比。The base noise in the scanning result curve is filtered by FFT and then inversely FFT transformed back. The noise thickness will be greatly reduced. Convolution of multiple sets of data at the same time not only eliminates environmental and system noise, but also greatly improves the signal-to-noise ratio.

该装置实现消除白光干涉仪测量抗扰动信号的方法具体包括以下步骤:The device's method of eliminating white light interferometer measurement of anti-disturbance signals specifically includes the following steps:

S1、白光光源发出的光经过第一光纤耦合器后,光源信号分成两路分别进入测量臂和参考臂。通过扫描光纤延迟线,当两臂光程相等时,两路光在第二光纤耦合器发生测量信号拍频干涉,由第二光纤耦合器输出带有DUT反射强度信息的扰动拍频信号,即时域干涉信号;S1. After the light emitted by the white light source passes through the first optical fiber coupler, the light source signal is divided into two channels and enters the measurement arm and the reference arm respectively. By scanning the optical fiber delay line, when the optical paths of the two arms are equal, the two optical fibers interfere with the measurement signal beat frequency at the second optical fiber coupler, and the second optical fiber coupler outputs a perturbation beat frequency signal with DUT reflection intensity information, instantly domain interference signal;

S2、对得到的时域干涉信号作傅里叶变换得到频域信号,滤除频谱中的所有低频项只保留拍频项并作反傅里叶变换得到纯净的时域干涉谱,对干涉谱取幅值后归一化得到干涉峰;如图3所示,为时域干涉信号经傅里叶变换后得到频谱并滤掉低频噪声后反傅里叶变换得到时域信号示意图;S2. Perform Fourier transform on the obtained time domain interference signal to obtain the frequency domain signal. Filter out all low frequency items in the spectrum and only retain the beat frequency items and perform inverse Fourier transform to obtain a pure time domain interference spectrum. For the interference spectrum After taking the amplitude and normalizing it, the interference peak is obtained; as shown in Figure 3, it is a schematic diagram of the time domain interference signal obtained by Fourier transform to obtain the spectrum, filtering out the low-frequency noise and then inverse Fourier transform to obtain the time domain signal;

S3、通过电动偏振控制器随机变动参考臂偏振态并扫描光纤延迟线,按照S1、S2步骤,得到N组反傅里叶变换后的归一化干涉峰结果;如图4所示,为白光干涉系统在稳定状态和扰动状态下拍频信号幅值归一化后干涉峰对比示意图;S3. Use the electric polarization controller to randomly change the polarization state of the reference arm and scan the fiber delay line. Follow steps S1 and S2 to obtain N sets of normalized interference peak results after inverse Fourier transformation; as shown in Figure 4, it is white light Schematic diagram of the comparison of interference peaks after normalizing the amplitude of the beat frequency signal of the interference system in the stable state and the disturbed state;

S4、每组结果顺次做卷积,得到最终高信噪比时域干涉峰结果;如图5所示,为变换处理后的干涉信号逐一卷积后的曲线效果图;S4. Each set of results is convolved sequentially to obtain the final high signal-to-noise ratio time domain interference peak result; as shown in Figure 5, it is the curve effect diagram after convolution of the transformed interference signals one by one;

S5、取所有组结果中干涉峰的最高幅值作为拟合曲线的峰值点A,取所有组干涉峰中值点的平均值作为拟合信号的中点x0,并把所有峰的半高宽度取平均值作为拟合信号的半高宽度,整个拍频干涉峰使用洛伦兹曲线拟合;其中/>S5. Take the highest amplitude of the interference peak in all groups of results as the peak point A of the fitting curve, take the average of the median points of the interference peaks in all groups as the midpoint x 0 of the fitting signal, and take the half-height of all peaks The width is averaged as the half-height width of the fitted signal , the entire beat frequency interference peak is fitted using the Lorentz curve; where/> ;

S6、拟合后的曲线替换原始卷积后的时域干涉峰,得到最终信号处理后的结果,如图6所示,为拟合后曲线替换原时域干涉峰示意图。S6. The fitted curve replaces the original time domain interference peak after convolution, and the final signal processing result is obtained, as shown in Figure 6, which is a schematic diagram of the fitted curve replacing the original time domain interference peak.

本实施例中提到的光源、光纤延迟线、移频器、偏振控制器、光纤耦合器的工作波段、偏振性、分光比、电动或手动等并不限定为实施例中所提到的,本专业人员可根据此装置或方法灵活选用不同指标及性能的器件完成相似效果。The working band, polarization, splitting ratio, electric or manual operation of the light source, fiber delay line, frequency shifter, polarization controller, fiber coupler mentioned in this embodiment are not limited to those mentioned in the embodiment. Professionals can flexibly select devices with different indicators and performance based on this device or method to achieve similar effects.

综上,本发明有效实现了通过使用本装置和方法,使得白光系统测量动态环境下的待测点反射信号的测试结果信噪比提高,且能真实和准确的还原待测点的干涉峰情况,消除了因扰动带来的干涉峰变形“劈裂”导致信号强度难以准确测量、事件点位置定位精度变差的现象。In summary, the present invention effectively realizes that by using the device and method, the signal-to-noise ratio of the test results of the white light system measuring the reflection signal of the point to be measured in a dynamic environment is improved, and the interference peak situation of the point to be measured can be truly and accurately restored. , eliminating the phenomenon of "splitting" of interference peak deformation caused by disturbance, which makes it difficult to accurately measure the signal intensity and worsens the positioning accuracy of the event point position.

实施例4Example 4

本申请还提供一种计算机可读存储介质,如闪存、硬盘、多媒体卡、卡型存储器(例如,SD或DX存储器等)、随机访问存储器(RAM)、静态随机访问存储器(SRAM)、只读存储器(ROM)、电可擦除可编程只读存储器(EEPROM)、可编程只读存储器(PROM)、磁性存储器、磁盘、光盘、服务器、App应用商城等等,其上存储有计算机程序,程序被处理器执行时实现相应功能。本实施例的计算机可读存储介质被处理器执行时实现方法实施例的基于白光干涉测量抗扰动环境信号的方法。This application also provides a computer-readable storage medium, such as flash memory, hard disk, multimedia card, card-type memory (for example, SD or DX memory, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory Memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memory, magnetic disks, optical disks, servers, App application malls, etc., on which computer programs and programs are stored The corresponding function is implemented when executed by the processor. When the computer-readable storage medium of this embodiment is executed by a processor, the method of measuring anti-disturbance environmental signals based on white light interferometry of the method embodiment is implemented.

需要指出,根据实施的需要,可将本申请中描述的各个步骤/部件拆分为更多步骤/部件,也可将两个或多个步骤/部件或者步骤/部件的部分操作组合成新的步骤/部件,以实现本发明的目的。It should be pointed out that according to the needs of implementation, each step/component described in this application can be split into more steps/components, or two or more steps/components or partial operations of steps/components can be combined into new ones. steps/components to achieve the objectives of the invention.

上述实施例中各步骤的序号的大小并不意味着执行顺序的先后,各过程的执行顺序应以其功能和内在逻辑确定,而不应对本申请实施例的实施过程构成任何限定。The sequence number of each step in the above embodiment does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application.

应当理解的是,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,而所有这些改进和变换都应属于本发明所附权利要求的保护范围。It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the protection scope of the appended claims of the present invention.

Claims (10)

1.一种基于白光干涉测量抗扰动环境信号的方法,其特征在于,包括以下步骤:1. A method for measuring anti-disturbance environmental signals based on white light interference, which is characterized by including the following steps: S1、调节参考臂中的参考光,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;S1. Adjust the reference light in the reference arm to cause beat frequency interference between the reference light and the signal light passing through the event point to be measured, generating a time domain interference signal; the reference light and signal light are split from the broad spectrum light emitted by the white light source; S2、调节参考光偏振态的角度,得到一定偏振方向夹角下的时域干涉信号;S2. Adjust the angle of the polarization state of the reference light to obtain the time domain interference signal at a certain angle between the polarization directions; S3、对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;S3. Perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transform on the filtered frequency domain signal to obtain the time domain interference spectrum, and obtain the amplitude of the time domain interference spectrum. After normalization, the interference peak is obtained; S4、重复多次测量,调节参考光偏振态的角度覆盖一个完整周期,得到N次拍频干涉的信号,相应得到N次干涉峰,N为整数;S4. Repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle, and obtain N beat frequency interference signals, correspondingly obtaining N interference peaks, where N is an integer; S5、将N次干涉峰做卷积,得到时域干涉峰卷积结果;S5. Convolve N interference peaks to obtain the time domain interference peak convolution result; S6、对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除环境扰动的信号。S6. Perform Lorentz curve fitting on the time domain interference peak convolution results to obtain the signal that ultimately eliminates environmental disturbance. 2.根据权利要求1所述的基于白光干涉测量抗扰动环境信号的方法,其特征在于,步骤S6中进行洛伦兹曲线拟合时,具体将N次干涉峰的最高幅值作为拟合曲线的峰值点,取N次干涉峰中值点的平均值作为拟合曲线的中点,并将N次干涉峰的半高宽度的均值作为拟合曲线的半高宽度。2. The method for measuring anti-disturbance environmental signals based on white light interference according to claim 1, characterized in that when performing Lorentz curve fitting in step S6, the highest amplitude of the N interference peaks is specifically used as the fitting curve. of the peak points, take the average of the median points of the N interference peaks as the midpoint of the fitting curve, and take the average of the half-height widths of the N interference peaks as the half-height width of the fitting curve. 3.根据权利要求1所述的基于白光干涉测量抗扰动环境信号的方法,其特征在于,步骤S1中调节参考臂中的参考光包括:通过控制参考臂中光纤延迟线的方式连续调节参考光的光程,当参考光的光程与测量臂中经过待测事件点的信号光的光程相等时,发生拍频干涉。3. The method of measuring anti-disturbance environmental signals based on white light interference according to claim 1, characterized in that, in step S1, adjusting the reference light in the reference arm includes: continuously adjusting the reference light by controlling the optical fiber delay line in the reference arm. When the optical path of the reference light is equal to the optical path of the signal light passing through the event point to be measured in the measurement arm, beat frequency interference occurs. 4.根据权利要求3所述的基于白光干涉测量抗扰动环境信号的方法,其特征在于,光纤延迟线具体通过移动内部反射镜位置,连续改变光通过其中的光程,进而连续改变参考臂臂长。4. The method of measuring anti-disturbance environmental signals based on white light interference according to claim 3, characterized in that the optical fiber delay line continuously changes the optical path of light passing through it by moving the position of the internal reflector, and then continuously changes the reference arm arm. long. 5.根据权利要求1所述的基于白光干涉测量抗扰动环境信号的方法,其特征在于,步骤S1中调节参考臂中的参考光包括移频,具体将参考光向上或向下移动固定频率。5. The method for measuring anti-disturbance environmental signals based on white light interference according to claim 1, characterized in that, in step S1, adjusting the reference light in the reference arm includes frequency shifting, specifically moving the reference light upward or downward at a fixed frequency. 6.一种基于白光干涉测量抗扰动环境信号的系统,其特征在于,包括:6. A system based on white light interferometry to measure anti-disturbance environmental signals, which is characterized by including: 参考臂调节模块,用于调节参考臂中的参考光,使参考光与经过待测事件点的信号光发生拍频干涉,产生时域干涉信号;参考光和信号光为白光光源发出的宽谱光分光而成;The reference arm adjustment module is used to adjust the reference light in the reference arm so that the reference light interferes with the signal light passing through the event point to be measured to generate a time domain interference signal; the reference light and signal light are broad spectrum emitted by the white light source. Light is formed by splitting; 偏振态调节模块,用于调节参考光偏振态的角度,得到一定偏振方向夹角下的时域干涉信号;The polarization adjustment module is used to adjust the angle of the polarization state of the reference light to obtain a time domain interference signal at a certain angle between the polarization directions; 频域变换模块,用于对时域干涉信号进行傅里叶变换得到频域信号,并进行低频滤波;对滤波后的频域信号进行傅里叶逆变换,得到时域干涉谱,对时域干涉谱取幅值归一化后得到干涉峰;The frequency domain transformation module is used to perform Fourier transform on the time domain interference signal to obtain the frequency domain signal, and perform low-frequency filtering; perform inverse Fourier transformation on the filtered frequency domain signal to obtain the time domain interference spectrum, and perform low-frequency filtering on the time domain interference signal. The interference peak is obtained after amplitude normalization of the interference spectrum; 卷积模块,用于将重复多次测量,调节参考光偏振态的角度覆盖一个完整周期,将得到的N次拍频干涉的信号中的N次干涉峰做卷积,得到时域干涉峰卷积结果,N为整数;The convolution module is used to repeat multiple measurements, adjust the angle of the polarization state of the reference light to cover a complete cycle, and convolve the N interference peaks in the obtained N beat frequency interference signals to obtain the time domain interference peak volume. Product result, N is an integer; 曲线拟合模块,用于对时域干涉峰卷积结果进行洛伦兹曲线拟合,得到最终消除环境扰动的信号。The curve fitting module is used to perform Lorentz curve fitting on the time domain interference peak convolution results to obtain a signal that ultimately eliminates environmental disturbances. 7.一种基于白光干涉测量抗扰动环境信号的装置,其特征在于,包括:7. A device for measuring anti-disturbance environmental signals based on white light interference, which is characterized by including: 白光光源;white light source; 第一光纤耦合器,将白光光源发出的宽谱光分成两束,一束信号光进入测量臂,另一束参考光进入参考臂;The first optical fiber coupler divides the broad spectrum light emitted by the white light source into two beams, one beam of signal light enters the measurement arm, and the other beam of reference light enters the reference arm; 测量臂,待测事件点设置在该测量臂中,信号光经待测事件点后反射回来进入第二光纤耦合器;A measuring arm, in which the event point to be measured is set, and the signal light is reflected back through the event point to be measured and enters the second optical fiber coupler; 参考臂,用于调节参考光,使其经过该参考臂后进入第二光纤耦合器与信号光发生拍频干涉;该参考臂还用于在每次拍频干涉过程中调节参考光的偏振态;The reference arm is used to adjust the reference light, so that after passing through the reference arm, it enters the second optical fiber coupler and causes beat frequency interference with the signal light; the reference arm is also used to adjust the polarization state of the reference light during each beat frequency interference process. ; 第二光纤耦合器,入射的测量臂的信号光和参考臂的参考光在该第二光纤耦合器耦合;a second optical fiber coupler, at which the incident signal light of the measurement arm and the reference light of the reference arm are coupled; 控制及信号采集模块,用于采集拍频干涉信号;Control and signal acquisition module, used to collect beat frequency interference signals; 信号处理器,用于采用权利要求1所述的基于白光干涉测量抗扰动环境信号的方法进行信号处理,得到最终的消除环境扰动的信号。A signal processor, configured to perform signal processing using the method of measuring anti-disturbance environmental signals based on white light interference as claimed in claim 1, to obtain a final signal that eliminates environmental disturbances. 8.根据权利要求7所述的基于白光干涉测量抗扰动环境信号的装置,其特征在于,参考臂包括光纤延时线,通过控制光纤延迟线的方式连续调节参考光的光程,当参考光的光程与测量臂中经过待测事件点的信号光的光程相等时,发生拍频干涉。8. The device for measuring anti-disturbance environmental signals based on white light interference according to claim 7, characterized in that the reference arm includes an optical fiber delay line, and the optical path of the reference light is continuously adjusted by controlling the optical fiber delay line. When the reference light When the optical path of the signal light in the measuring arm is equal to the optical path of the signal light passing through the event point to be measured, beat frequency interference occurs. 9.根据权利要求7所述的基于白光干涉测量抗扰动环境信号的装置,其特征在于,参考臂包括电动偏振控制器,用于随机变动参考光的偏振态。9. The device for measuring anti-disturbance environmental signals based on white light interference according to claim 7, characterized in that the reference arm includes an electric polarization controller for randomly changing the polarization state of the reference light. 10.根据权利要求7所述的基于白光干涉测量抗扰动环境信号的装置,其特征在于,该参考臂还包括频移器,用于将参考光向上或向下移动固定频率。10. The device for measuring anti-disturbance environmental signals based on white light interferometry according to claim 7, characterized in that the reference arm further includes a frequency shifter for moving the reference light upward or downward at a fixed frequency.
CN202410112574.1A 2024-01-26 2024-01-26 Device and method for measuring anti-disturbance environmental signals based on white light interference Active CN117629057B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410112574.1A CN117629057B (en) 2024-01-26 2024-01-26 Device and method for measuring anti-disturbance environmental signals based on white light interference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410112574.1A CN117629057B (en) 2024-01-26 2024-01-26 Device and method for measuring anti-disturbance environmental signals based on white light interference

Publications (2)

Publication Number Publication Date
CN117629057A true CN117629057A (en) 2024-03-01
CN117629057B CN117629057B (en) 2024-03-29

Family

ID=90016764

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410112574.1A Active CN117629057B (en) 2024-01-26 2024-01-26 Device and method for measuring anti-disturbance environmental signals based on white light interference

Country Status (1)

Country Link
CN (1) CN117629057B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1746384A2 (en) * 2005-07-21 2007-01-24 Mitutoyo Corporation Phase shift interferometer
CN102322880A (en) * 2011-08-18 2012-01-18 天津大学 Polarization sensitive distributive optical frequency domain reflection disturbance sensor and demodulation method
WO2012100213A2 (en) * 2011-01-21 2012-07-26 Duke University Systems and methods for complex conjugate artifact resolved optical coherence tomography
CN102840909A (en) * 2012-08-21 2012-12-26 天津大学 Optical frequency domain reflection-distributed vibration frequency sensing and locating device and demodulation method
US20140115022A1 (en) * 2011-07-12 2014-04-24 University Of Tsukuba Program for correcting data measured by ps-oct and ps-oct system equipped with the program
CN103940588A (en) * 2014-03-21 2014-07-23 哈尔滨工程大学 Polarization fading restraining device and method for optical coherence polarization measurement
AU2020103491A4 (en) * 2020-11-17 2021-01-28 Harbin Engineering University A twin array Michelson fiber optic white light interferometry strain gauge
CN113503901A (en) * 2021-09-08 2021-10-15 武汉昊衡科技有限公司 Device and method for eliminating measurement signal jitter of white light interferometer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1746384A2 (en) * 2005-07-21 2007-01-24 Mitutoyo Corporation Phase shift interferometer
WO2012100213A2 (en) * 2011-01-21 2012-07-26 Duke University Systems and methods for complex conjugate artifact resolved optical coherence tomography
US20140115022A1 (en) * 2011-07-12 2014-04-24 University Of Tsukuba Program for correcting data measured by ps-oct and ps-oct system equipped with the program
CN102322880A (en) * 2011-08-18 2012-01-18 天津大学 Polarization sensitive distributive optical frequency domain reflection disturbance sensor and demodulation method
CN102840909A (en) * 2012-08-21 2012-12-26 天津大学 Optical frequency domain reflection-distributed vibration frequency sensing and locating device and demodulation method
CN103940588A (en) * 2014-03-21 2014-07-23 哈尔滨工程大学 Polarization fading restraining device and method for optical coherence polarization measurement
AU2020103491A4 (en) * 2020-11-17 2021-01-28 Harbin Engineering University A twin array Michelson fiber optic white light interferometry strain gauge
CN113503901A (en) * 2021-09-08 2021-10-15 武汉昊衡科技有限公司 Device and method for eliminating measurement signal jitter of white light interferometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
李传生;张春熹;王夏霄;李立京;于佳;冯秀娟;: "钛扩散LiNbO_3相位调制器尾纤偏振串音的白光干涉测量方法", 中国激光, no. 05, 10 May 2013 (2013-05-10), pages 198 - 202 *
汝洪武 等: "白光干涉垂直扫描测量算法综述", 激光与红外, 31 August 2020 (2020-08-31), pages 899 - 906 *

Also Published As

Publication number Publication date
CN117629057B (en) 2024-03-29

Similar Documents

Publication Publication Date Title
CN104296698A (en) Method for measuring evenness of optical surface with ultrahigh precision
CN112923960A (en) Optical fiber parameter measuring device for correcting nonlinear tuning effect
CN118129621B (en) Wafer epitaxial layer thickness measuring and calculating method, device, computer equipment and storage medium
CN113503901B (en) Device and method for eliminating measurement signal jitter of white light interferometer
CN112683495A (en) Optical device frequency response measuring method and device with time domain analysis capability
CN114460377A (en) Broadband wireless signal receiving method based on Reedberg atoms
CN110376213B (en) Optical detection system and method
CN101660998A (en) Method for measuring group delay by using wavelet transformation
CN117629057A (en) Device and method for measuring anti-disturbance environmental signals based on white light interference
CN114812889B (en) A large-aperture optical element stress detection device and detection method thereof
JPS60256079A (en) Minute displacement measuring apparatus using semiconductor laser
CN114861777A (en) Local spectrum matching method and device based on optical frequency reflection technology and storage medium
US11512941B2 (en) Analysis apparatus, analysis method, and interference measurement system
CN112684462A (en) Amplified area array sweep frequency measuring device and method
CN113587844B (en) Phase-shifting interferometric measurement system and measurement method
CN117743736A (en) Demodulation method, device and system for optical fiber F-P sensor and storage medium
CN117128877A (en) Film thickness detection method, computer and system
CN112711029B (en) Area array sweep frequency measuring device and method
JP6380943B1 (en) Reflected light measuring device
US20220018656A1 (en) System and method of measuring surface topography
CN112034475A (en) FMCW laser radar frequency-sweep light source mode hopping compensation method
CN116202994A (en) High-speed sweep-frequency optical coherence tomography wave number linearization system and method
CN115327515A (en) Double-sweep frequency interference dynamic measurement system and method based on phase transmission
CN113514178A (en) Photoelastic stress measurement system and method based on three-wavelength illumination light source
CN115325932B (en) An equivalent test device for detection errors caused by optical power and contrast changes of heterodyne laser interferometer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant