CN117619183A

CN117619183A - Differential type mixed flow structure

Info

Publication number: CN117619183A
Application number: CN202311629057.3A
Authority: CN
Inventors: 杨亚辉
Original assignee: Hongge Semiconductor Equipment Shanghai Co ltd
Current assignee: Hongge Semiconductor Equipment Shanghai Co ltd
Priority date: 2023-11-30
Filing date: 2023-11-30
Publication date: 2024-03-01

Abstract

The invention relates to the technical field of semiconductor special gas mixing, in particular to a differential type mixed flow structure. The differential type mixed flow structure comprises an outer shell, a first vortex generator, a second vortex generator, a first flow dividing plate, a flow stabilizing plate and an air duct; the upper end of the outer shell is provided with an air inlet through hole, and the lower end is open; the flow stabilizing plate is arranged at the lower end of the outer shell, and an air outlet through hole is formed in the flow stabilizing plate; the first vortex generator, the second vortex generator and the current stabilizer are sequentially arranged in the outer shell; a first cavity, a second cavity, a third cavity and a fourth cavity are respectively formed on one side, far away from the second vortex generator, of the first vortex generator, between the first vortex generator and the second vortex generator, between the second vortex generator and the first flow dividing plate, and between the first flow dividing plate and the flow stabilizing plate through air ducts; the gas flows out of the first vortex generator and the second vortex generator are opposite in rotation direction. The invention has the advantages of modularization treatment, simple assembly, convenient installation, low cost and improved mixing effect.

Description

Differential type mixed flow structure

Technical Field

The invention relates to the technical field of semiconductor special gas mixing, in particular to a differential type mixed flow structure.

Background

In the semiconductor industry, uniformity of the mixing of the extra gases is very important to the stability of the process and the impact of the quality of the product. The mixed flow pipe is used for realizing special gas mixing, so that the uniformity of mixed gas can be improved, the same gas composition of each part is ensured, and the change of gas concentration is reduced. By adopting the mixing pipe to realize special gas mixing, the uniformity and stability of the mixed gas can be improved, and the consistency of the technological process and the stability of the product quality are ensured. This is of great importance for process control and product manufacturing in the semiconductor industry.

The mixed flow pipe commonly used in the market at present adopts the welded spiral structure in the pipeline, improves mixed flow effect through increasing the group number of spiral structure, and such structure has following problem:

1. the radial clearance between the spiral structure and the outer tube cannot be completely eliminated, so that the gas escape phenomenon is serious and the gas cannot be fully mixed;

2. the spiral structure is curved surface processing, and the processing cost is very high;

3. the increase of the number of the groups of the spiral structures is that the length of the mixed flow pipe is increased, and the mixed flow pipe does not accord with the use environment with strict space requirements.

Disclosure of Invention

The invention aims to provide a differential type mixed flow structure which is simple in structure, low in cost, saves the mounting aperture and improves the mixing effect through multiple mixing by means of module superposition.

Embodiments of the present invention are implemented as follows:

the invention provides a differential type mixed flow structure which comprises an outer shell, a first vortex generator, a second vortex generator, a first flow dividing plate, a flow stabilizing plate and an air duct, wherein the first vortex generator is arranged on the outer shell;

the outer shell is of a cylindrical structure, an air inlet through hole is formed in the upper end of the outer shell, and the lower end of the outer shell is open;

the flow stabilizing plate is arranged at the opening of the lower end of the outer shell and used for plugging the lower end of the outer shell, and an air outlet through hole is formed in the flow stabilizing plate;

the first vortex generator, the second vortex generator and the flow stabilizing plate are sequentially arranged in the outer shell;

air ducts are arranged on one side, far away from the second vortex generator, of the first vortex generator, between the first vortex generator and the second vortex generator, between the second vortex generator and the first flow dividing plate, and between the first flow dividing plate and the flow stabilizing plate;

a first cavity, a second cavity, a third cavity and a fourth cavity are respectively formed by the air guide pipe at one side of the first vortex generator far away from the second vortex generator, between the first vortex generator and the second vortex generator, between the second vortex generator and the first flow dividing plate, and between the first flow dividing plate and the flow stabilizing plate;

the gas outflow directions of the first vortex generator and the second vortex generator are opposite.

In an alternative embodiment, the first vortex generator comprises a first generator body and a second flow dividing plate;

the first generator body comprises a first separation plate and a first flow guiding part;

the first division plate is arranged at one end of the first flow guiding part, the second division plate is arranged at the other end of the first flow guiding part, and an air duct is arranged between the second division plate and the first division plate;

the second flow dividing plate, the air duct, the first flow guiding part and the first partition plate jointly enclose an annular cavity, and a flow dividing hole is formed in the second flow dividing plate and used for communicating the first cavity with the annular cavity;

the first generator body is provided with a first air outlet hole, and the first air outlet hole is arranged at one end of the first generator body, which is far away from the second flow dividing plate;

the side wall of the first flow guiding part is provided with a first side cutting hole, and the first side cutting hole is tangential with the side wall of the inner cavity of the first air outlet hole.

In an alternative embodiment, a turbulent flow cavity is arranged in the first air outlet hole, and the first side cutting hole is communicated with the turbulent flow cavity.

In an alternative embodiment, the second vortex generator comprises a second generator body and a third flow splitter plate;

the second generator body comprises a second partition plate and a second flow guiding part;

the second division plate is arranged at one end of the second flow guiding part, the third division plate is arranged at the other end of the second flow guiding part, and an air duct is arranged between the third division plate and the second division plate;

the third flow dividing plate, the second air guide pipe, the second flow guiding part and the second partition plate jointly enclose an annular cavity, and a flow dividing hole is formed in the third flow dividing plate and used for communicating the first cavity with the annular cavity;

the second generator body is provided with a second air outlet hole, and the second air outlet hole is arranged at one end of the second generator body, which is far away from the third flow dividing plate;

the side wall of the second flow guiding part is provided with a second side cutting hole, and the second side cutting hole is tangent with the side wall of the inner cavity of the second air outlet hole.

In an alternative embodiment, the tangential directions of the first side cut and the second side cut are opposite.

In an alternative embodiment, the first splitter plate, the second splitter plate and the splitter holes on the third splitter plate are in one-to-one correspondence and coaxially arranged.

In an alternative embodiment, the connection modes between the air duct and the first vortex generator, between the air duct and the second vortex generator and between the air duct and the first flow dividing plate are all welding.

In an alternative embodiment, two take over structures are also included;

wherein one of the connection pipe structures is arranged on the outer shell and is communicated with the first cavity through the air inlet through hole;

the other connecting pipe structure is arranged on the flow stabilizing plate and is communicated with the fourth cavity through the air outlet through hole.

In an alternative embodiment, the nipple structure comprises a connecting tube and a connecting nut;

one end of the connecting pipe is fixedly connected with the steady flow plate or the outer shell, and an outer baffle ring is arranged on the outer wall of the other end of the connecting pipe;

the connecting nut is sleeved on the connecting pipe, an inner baffle ring matched with the outer baffle ring is arranged on the inner wall of the connecting nut, and an inner thread is arranged on the inner wall of the connecting nut.

In an alternative embodiment, the end of the connecting tube that is arranged inside the connecting nut has a sealing washer.

The embodiment of the invention has the beneficial effects that:

carry out modularization with first vortex generator, second vortex generator, flow distribution plate, current stabilizer and air duct and handle, make its and shell body assembly simpler, simple to operate, with low costs has saved installation space, forms first cavity, second cavity, third cavity and fourth cavity in the casing simultaneously, can carry out the mixed flow in first vortex generator, second vortex generator, first cavity, second cavity, third cavity and the fourth air, has improved mixed effect.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a front view of a differential type mixed flow structure provided by an embodiment of the present invention;

FIG. 2 is a cross-sectional view A-A of FIG. 1;

fig. 3 is a schematic perspective view of a differential mixed flow structure according to an embodiment of the present invention;

fig. 4 is a front view of an outer casing of the differential type mixed flow structure according to the embodiment of the present invention;

FIG. 5 is a cross-sectional view B-B of FIG. 4;

fig. 6 is a schematic perspective view of an outer casing of a differential mixed flow structure according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a first generator body of a differential mixed flow structure according to an embodiment of the present invention;

FIG. 8 is a cross-sectional view of C-C of FIG. 7;

fig. 9 is a front view of a first generator body of a differential type mixed flow structure according to an embodiment of the present invention;

FIG. 10 is a D-D sectional view of FIG. 9;

fig. 11 is a schematic perspective view of a first generator body of a differential mixed flow structure according to an embodiment of the present invention;

fig. 12 is a schematic structural diagram of a second generator body of a differential mixed flow structure according to an embodiment of the present invention;

FIG. 13 is a sectional E-E view of FIG. 12;

fig. 14 is a front view of a second generator body of a differential type mixed flow structure according to an embodiment of the present invention;

FIG. 15 is a cross-sectional F-F view of FIG. 14;

fig. 16 is a schematic perspective view of a second generator body of a differential mixed flow structure according to an embodiment of the present invention;

fig. 17 is a schematic perspective view of a first splitter plate of a differential mixed flow structure according to an embodiment of the present invention;

fig. 18 to 20 are simulation diagrams of differential type mixed flow structures according to embodiments of the present invention.

Icon: 1-an outer shell; 2-a connection tube structure; 3-a first vortex generator; 4-a second vortex generator; 5-a first diverter plate; 6-a current stabilizer; 7-a first cavity; 8-an annular cavity; 9-a second cavity; 10-a third cavity; 11-fourth cavity; 12-an airway; 13-connecting pipes; 14-connecting nuts; 15-a sealing gasket; 16-a first divider plate; 17-a first deflector; 18-first side cutting holes; 19-a turbulence chamber; 20-a first air outlet hole; 21-a second divider; 22-a second flow guide; 23-second side cutting holes; 24-a second air outlet hole; 25-split holes.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Some embodiments of the present invention are described in detail below in conjunction with fig. 1-20. The following embodiments and features of the embodiments may be combined with each other without conflict.

The invention provides a differential type mixed flow structure, which is shown in fig. 1, 2 and 3, and comprises an outer shell 1, a first vortex generator 3, a second vortex generator 4, a first flow dividing plate 5, a flow stabilizing plate 6 and an air duct 12; the outer shell 1 is of a cylindrical structure, the upper end of the outer shell 1 is provided with an air inlet through hole, and the lower end of the outer shell is provided with an opening, as shown in fig. 4, 5 and 6; the flow stabilizing plate 6 is arranged at the opening of the lower end of the outer shell 1 and is used for plugging the lower end of the outer shell 1, and an air outlet through hole is formed in the flow stabilizing plate 6; the first vortex generator 3, the second vortex generator 4 and the current stabilizer 6 are sequentially arranged in the outer shell 1; the side of the first vortex generator 3 far away from the second vortex generator 4, the space between the first vortex generator 3 and the second vortex generator 4, the space between the second vortex generator 4 and the first flow dividing plate 5, and the space between the first flow dividing plate 5 and the flow stabilizing plate 6 are all provided with air ducts 12; a first cavity 7, a second cavity 9, a third cavity 10 and a fourth cavity 11 are respectively formed on one side of the first vortex generator 3 far away from the second vortex generator 4, between the first vortex generator 3 and the second vortex generator 4, between the second vortex generator 4 and the first flow dividing plate 5, and between the first flow dividing plate 5 and the flow stabilizing plate 6 through air ducts 12; the gas flows out of the first vortex generator 3 and the second vortex generator 4 in opposite directions.

In this embodiment, when the special gas medium enters the first cavity from the air inlet through hole, the special gas medium collides with the first vortex generator 3 to perform first mixing, then enters the first vortex generator 3, performs second mixing in the first vortex generator 3, generates vortex, the rotating gas discharged from the first vortex generator 3 enters the second cavity 9, enters the second vortex generator 4 after the third mixing in the second cavity 9, performs fourth mixing, reversely enters the third cavity 10 through the second vortex generator 4, enters the fourth cavity 11 through the split flow of the first splitter plate 5, and finally is discharged through the air outlet through hole in the flow stabilizing plate 6.

The special gas medium is subjected to multiple mixing by impacting, vortex, reverse vortex, impacting and splitting, and then laminar special gas medium is output by the flow stabilizing plate 6, so that the mixing is completed.

In this embodiment, the first vortex generator 3, the second vortex generator 4, the flow dividing plate and the flow stabilizing plate 6 are connected into a whole through the air duct 12 to form a modularized structure, and the modularized structure is directly inserted into the outer shell 1 during installation, so that the flow stabilizing plate 6 and the outer shell 1 are welded, the whole process is simple, convenient and fast, the cost is low, and the installation aperture is saved.

In an alternative embodiment, as shown in fig. 7-11, the first vortex generator 3 comprises a first generator body and a second flow dividing plate; the first generator body comprises a first partition plate 16 and a first flow guide 17; the first separation plate 16 is arranged at one end of the first flow guiding part 17, the second separation plate is arranged at the other end of the first flow guiding part 17, and the air duct 12 is arranged between the second separation plate and the first separation plate 16; the second flow dividing plate, the air duct 12, the first flow guiding part 17 and the first partition plate 16 jointly enclose an annular cavity 8, and a flow dividing hole 25 is arranged on the second flow dividing plate and is used for communicating the first cavity 7 with the annular cavity 8; the first generator body is provided with a first air outlet hole 20, and the first air outlet hole 20 is arranged at one end of the first generator body far away from the second current dividing plate; the side wall of the first flow guiding part 17 is provided with a first side cutting hole 18, and the first side cutting hole 18 is tangent with the side wall of the inner cavity of the first air outlet hole 20.

Specifically, in this embodiment, after entering the first cavity 7, the special gas medium collides with the middle part of the second flow dividing plate, then enters the annular cavity 8 through the flow dividing hole 25 on the second flow dividing plate, and enters the first air outlet hole 20 through the first side cutting hole 18. Because the first side cutting hole 18 is tangential to the first air outlet hole 20, the special air medium entering the first air outlet hole 20 forms a rotating vortex, and is discharged from the first air outlet hole 20 into the second cavity 9.

In an alternative embodiment, the first outlet aperture 20 is internally provided with a turbulent flow chamber 19, and the first side cut aperture 18 communicates with the turbulent flow chamber 19.

The diameter of the turbulent flow cavity 19 is larger than that of the first air outlet hole 20, so that the special air medium can sufficiently rotate after entering the turbulent flow cavity 19 to form vortex, and then is discharged through the first air outlet hole 20 with smaller diameter to form air flow acceleration.

In an alternative embodiment, as shown in fig. 12-16, the second vortex generator 4 comprises a second generator body and a third flow splitter plate; the second generator body comprises a second partition plate 21 and a second flow guiding part 22; the second division plate 21 is arranged at one end of the second flow guiding part 22, the third division plate is arranged at the other end of the second flow guiding part 22, and an air duct 12 is arranged between the third division plate and the second division plate 21; the third flow dividing plate, the second air guide pipe 12, the second flow guiding part 22 and the second partition plate 21 jointly enclose an annular cavity 8, and a flow dividing hole 25 is arranged on the third flow dividing plate and used for communicating the first cavity 7 with the annular cavity 8; the second generator body is provided with a second air outlet hole 24, and the second air outlet hole 24 is arranged at one end of the second generator body far away from the third flow dividing plate; the side wall of the second flow guiding part 22 is provided with a second side cutting hole 23, and the second side cutting hole 23 is tangent with the side wall of the inner cavity of the second air outlet hole 24.

After entering the second cavity 9, the rotating vortex of the special gas medium is fully rotated and mixed in the second cavity 9, enters the annular cavity 8 of the second vortex generator 4 through the third flow dividing plate, enters the second air outlet hole 24 through the second side cutting hole 23, and meanwhile, the turbulent flow cavity 19 is also arranged in the second air outlet hole 24, and enters the third air through the second air outlet hole 24 after being fully rotated in the turbulent flow cavity 19.

In an alternative embodiment, the tangential directions of the first side cut hole 18 and the second side cut hole 23 are opposite.

In this embodiment, the tangential directions of the first side cut hole 18 and the second side cut hole 23 are opposite, so that the mixing can be made more sufficient by the direction-changing manner.

In an alternative embodiment, the flow dividing holes 25 on the first, second and third flow dividing plates 5, 25 are arranged in a one-to-one and coaxial manner.

In an alternative embodiment, the connection between the air duct 12 and the first vortex generator 3, the connection between the air duct 12 and the second vortex generator 4, and the connection between the air duct 12 and the first flow dividing plate 5 are all welding.

It should be noted that the connection manner between the respective components may be welding, but is not limited to welding, and may be other fixed connection manners, so long as the fixed connection between the air duct 12, the first vortex generator 3, the second vortex initiation, the first flow dividing plate 5, and the flow stabilizing plate 6 can be achieved, so as to form an integral module.

In an alternative embodiment, two take over structures 2 are also included; wherein, a connecting pipe structure 2 is arranged on the outer shell 1 and is communicated with the first cavity 7 through an air inlet through hole; the other connecting pipe structure 2 is arranged on the steady flow plate 6 and is communicated with the fourth cavity through the air outlet through hole.

Through two upper and lower take over structure 2, can be convenient for be connected differential formula mixed flow structure and gas piping.

In an alternative embodiment, the connection tube arrangement 2 comprises a connection tube 13 and a connection nut 14; one end of the connecting pipe 13 is fixedly connected with the steady flow plate 6 or the outer shell 1, and an outer baffle ring is arranged on the outer wall of the other end of the connecting pipe 13; the connecting nut 14 is sleeved on the connecting pipe 13, an inner baffle ring matched with the outer baffle ring is arranged on the inner wall of the connecting nut 14, and an inner thread is arranged on the inner wall of the connecting nut 14.

In an alternative embodiment, the end of the connecting tube 13 that is arranged inside the connecting nut 14 has a sealing washer 15.

From the above, the present invention provides a differential mixed flow structure, which is used as follows:

1. the special gas medium enters from the air inlet through hole and then impacts the second flow dividing plate to form a hedging turbulence, and a rotating vortex is formed in the first cavity 7 for preliminary mixing; as shown in fig. 18-20, the velocity of the special gas medium after striking the second flow dividing plate is almost the same, and the special gas medium is diffused all around, so that the velocity difference is almost not generated in the same plane;

2. the preliminarily mixed special gas medium is equally divided into n parts by the second flow dividing plate through the flow dividing holes 25 (n is the number of the flow dividing holes 25 on the corresponding flow dividing plate, which is determined according to the structure, size, cost, mixing effect, etc.), and forms a rotating vortex in the annular cavity 8 of the first vortex generator 3 for mixing;

3. as shown in fig. 18 to 20, the extra gas medium is equally divided into n parts (n is the number of the split holes 25 on the corresponding split plate, which is determined according to the structure, size, cost, mixing effect, etc.) by the split holes 25 on the second split plate into the first vortex generator 3, the turbulence is formed by the opposite flushing in the first vortex generator 3, and the medium is rotated in the first vortex generator 3 due to the arrangement of the side cut holes of the first vortex generator 3, so that the vortex is formed;

4. the special gas medium flows out from the bottom of the first vortex generator 3 in a rotating way at a certain angular speed, and after being accelerated, the special gas medium impacts the middle part of the third flow dividing plate, and forms a rotating vortex in the second cavity 9 for mixing; 18-20, after the special gas medium impacts the third flow dividing plate, the velocity cloud image of the special gas medium shows a fan shape, and the velocity difference appears in the same plane and is 8 times of that of the stage 1;

5. the mixed gas is equally divided into n parts by the first flow dividing plate 5 (n is the number of flow dividing holes 25 on the corresponding flow dividing plate, which is determined according to the structure, size, cost, mixing effect, etc.), and a rotating vortex is formed in the annular cavity 8 of the second vortex generator 4 for mixing;

6. as shown in fig. 18-20, after being mixed in the annular cavity 8 of the second vortex generator 4, the extra-gas medium enters the turbulent cavity 19 of the second vortex generator 4 to form turbulence, and the extra-gas medium rotates in the second vortex generator 4 to form vortex due to the arrangement of the second side cutting holes 23 of the second vortex generator 4;

7. the special gas medium flows out from the bottom of the second vortex generator 4 in a rotating way at a certain angular speed, and after being accelerated, the special gas medium impacts the middle part of the first flow dividing plate 5, and forms a rotating vortex in a third cavity 10 formed by the first flow dividing plate 5, the second vortex generator 4 and the gas guide tube 12 for mixing; as shown in fig. 18-20, after the special gas medium impacts the first flow dividing plate 5, the velocity cloud image of the medium converges into a cross, the same plane velocity difference is obvious, the velocity difference is 73 times of the 1 st stage and 9 times of the 4 th stage, and the mixing is most intense here;

8. the extra gas medium is equally divided into n parts (n is the number of the flow dividing holes 25 on the corresponding flow dividing plate, which is determined according to the structure, the size, the cost, the mixing effect, etc.) through the flow dividing holes 25 of the first flow dividing plate 5, passes through the first flow dividing plate 5, hits the edge of the flow stabilizing plate 6, and forms a rotating vortex in the fourth cavity 11 formed by the first flow dividing plate 5, the flow stabilizing plate 6 and the gas guide tube 12 to mix. In this process, the rotation of the medium is eliminated synchronously;

9. the mixed medium forms a laminar flow state through the steady flow plate 6 and flows out of the differential type mixer through the connecting pipe structure 2.

The embodiment of the invention has the beneficial effects that:

the first vortex generator 3, the second vortex generator 4, the first splitter plate 5, the stabilizer plate 6 and the air duct 12 are subjected to modularized treatment, so that the assembly of the air duct and the outer shell 1 is simpler, the installation is convenient, the cost is low, the installation space is saved, meanwhile, the first cavity 7, the second cavity 9, the third cavity 10 and the fourth cavity 11 are formed in the shell, and the mixing flow can be carried out in the first vortex generator 3, the second vortex generator 4, the first cavity 7, the second cavity 9, the third cavity 10 and the fourth air, so that the mixing effect is improved.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The differential type mixed flow structure is characterized by comprising an outer shell, a first vortex generator, a second vortex generator, a first flow dividing plate, a flow stabilizing plate and an air duct;

2. The differential flow mixing structure of claim 1, wherein the first vortex generator comprises a first generator body and a second flow dividing plate;

3. The differential mixing flow structure according to claim 2, wherein a turbulent flow chamber is provided inside the first air outlet hole, and the first side cut hole communicates with the turbulent flow chamber.

4. The differential flow mixing structure as defined in claim 2, wherein said second vortex generator includes a second generator body and a third splitter plate;

5. The differential mixing flow structure of claim 4, wherein the tangential directions of the first and second side cut holes are opposite.

6. The differential type mixed flow structure according to claim 4, wherein the flow dividing holes on the first flow dividing plate, the second flow dividing plate and the third flow dividing plate are arranged coaxially in one-to-one correspondence.

7. The differential type mixed flow structure according to claim 1, wherein the connection modes between the air duct and the first vortex generator, between the air duct and the second vortex generator, and between the air duct and the first flow dividing plate are all welding.

8. The differential type mixed flow structure according to claim 1, further comprising two pipe connection structures;

9. The differential type mixed flow structure according to claim 8, wherein the connection pipe structure comprises a connection pipe and a connection nut;

10. The differential type mixed flow structure according to claim 9, wherein one end of the connection pipe disposed inside the connection nut has a sealing gasket.