CN117615077B - Electronic scanning direction correction method and correction device for scanning equipment and scanning equipment - Google Patents
Electronic scanning direction correction method and correction device for scanning equipment and scanning equipment Download PDFInfo
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Abstract
The present disclosure relates to an electronic scanning direction correction method of a scanning device, an electronic scanning direction correction apparatus of a scanning device, a storage medium, and a scanning device. The electronic scanning direction correction method of the scanning device comprises the steps of obtaining a raster scanning image obtained by scanning a raster standard sample by the scanning device; performing image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image; determining coil deformation parameters of a coil which controls electron beam movement during scanning of a raster standard sample by scanning equipment based on image deformation parameters of the raster scanning image; and obtaining correction coefficients according to coil deformation parameters and a coil deformation correction model of the motor driving coil, so as to correct signals of control signals for controlling the coil to move in the motor driving coil, and transmitting the correction coefficients of the motor control signals to a hardware system to finish image deformation correction, thereby being beneficial to obtaining a scanning image which correctly reflects the appearance of an actual sample.
Description
Technical Field
The present disclosure relates to the field of image scanning technologies, and in particular, to an electronic scanning direction correction method of a scanning device, an electronic scanning direction correction apparatus of a scanning device, a storage medium, and a scanning device.
Background
With the development of scanning electron microscopes, electron microscope users can conveniently make real microscopic observation on samples. However, in the imaging process, due to process deviation of the installation of a scanning coil for controlling imaging or fixation abnormality generated when the coil works, the included angle of a scanning magnetic field controlled by an x coil and a y coil deviates from a normal 90 DEG, and when the step sizes are asynchronous, the scanned image shows angle deviation and texture stretching phenomena, so that the scanned image is deformed compared with the real appearance. For this to occur, correction of the electronic scanning direction of the scanning device is required to correct the distortion generated by the image.
Disclosure of Invention
In view of this, it is desirable for the embodiments of the present disclosure to provide an electronic scanning direction correction method of a scanning apparatus, an electronic scanning direction correction device of a scanning apparatus, a storage medium, and a scanning apparatus.
The technical scheme of the present disclosure is realized as follows:
in a first aspect, the present disclosure provides a method of electronic scan direction correction for a scanning device.
The electronic scanning direction correction method of the scanning device provided by the embodiment of the disclosure comprises the following steps:
acquiring a raster scanning image obtained by scanning a raster sample by the scanning device;
performing image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image;
determining coil deformation parameters of a coil which controls the electron beam to move when the scanning device scans the raster sample based on the image deformation parameters of the raster scanning image;
and obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement during the motor driving coil movement.
In some embodiments, the performing image processing on the raster scan image to obtain an image deformation parameter of the raster scan image includes:
performing image processing on the raster scanning image to obtain a binary image corresponding to the raster scanning image;
performing inverse processing on the binary image, and performing distance transformation and image segmentation to obtain a target raster image; wherein the target raster image is a local image in the raster scan image, which can characterize the integral offset characteristic of the raster scan image;
Acquiring the included angles between two adjacent side lengths of the target raster image and a horizontal line respectively;
and taking two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line as image deformation parameters of the raster scanning image.
In some embodiments, the performing inverse processing on the binary image, performing distance transformation and image segmentation to obtain a target raster image includes:
performing inversion processing on the binary image to obtain a binary inversion image;
performing image contour search on the binary image and the binary inverted image, and screening a preset number of small grids in the binary image and the binary inverted image to obtain the average size of the preset number of small grids;
and based on the average size of the small grids, performing image segmentation on the binary reverse image after the distance transformation to obtain the target grid image.
In some embodiments, the performing image segmentation on the binary inverse image after the distance transformation based on the average size of the small grid to obtain the target grid image includes:
based on the average size of the small grids, performing image segmentation on the binary reverse phase image subjected to distance transformation to obtain a first type of grids and a second type of grids after segmentation;
Determining four first type target grids with central points connected together to form a diamond in the first type grids;
determining the second type of grid surrounded by the four first type of target grids as the target grid image.
In some embodiments, the determining, based on the image deformation parameters of the raster scan image, the coil deformation parameters of the coil that the scanning device controls the electron beam to move when scanning the raster sample includes:
determining an included angle and a scanning speed ratio between an X-direction scanning coil and a Y-direction scanning coil for controlling the movement of an electron beam based on two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line respectively;
and taking the included angle between the X-direction scanning coil and the Y-direction scanning coil and the scanning speed ratio as coil deformation parameters of a coil which is used by the scanning equipment for controlling the electron beam to move when scanning the raster sample.
In some embodiments, the angle between the X-direction scan coil and the Y-direction scan coilθThe method comprises the following steps:，
scanning speed ratio between X-direction scanning coil and Y-direction scanning coilkThe method comprises the following steps:wherein a and c are both intermediate coefficients; wherein,
，/>Width is the length of the first side of two adjacent sides, height is the length of the second side of two adjacent sides, +.>Is the included angle between the first side length and the horizontal direction, < >>Is the included angle between the second side length and the horizontal direction.
In some embodiments, the X-direction scanning coil and the Y-direction scanning coil have an included angle therebetweenθAnd a scanning speed ratiokAnd when the motor driving coil moves, the coil deformation correction model is as follows:
the method comprises the steps of carrying out a first treatment on the surface of the Wherein,A、B、C、Dare all correction coefficients of the control signal,Sxa scanning coil controls a current driving signal in the horizontal direction,SyIs a current driving signal for controlling the vertical direction of the scanning coil, < >>Scanning coil actual control signal output for motor, < >>A scanning coil theoretical control signal output by the motor;
the method for obtaining the correction coefficient according to the coil deformation parameters and the coil deformation correction model of the motor driving coil movement comprises the following steps:
based on the included angle between the X-direction scanning coil and the Y-direction scanning coilθAnd a scanning speed ratiokThe coil deformation correction model of the motor driving coil moving is used for obtaining the correction coefficient; wherein the correction coefficient includes:
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
In a second aspect, the present disclosure provides an electronic scanning direction correction apparatus of a scanning device, including:
the image acquisition module is used for acquiring a raster scanning image obtained by scanning the raster standard sample by the scanning equipment;
the image processing module is used for carrying out image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image;
the parameter determining module is used for determining coil deformation parameters of a coil which is used for controlling the electron beam to move when the scanning equipment scans the raster sample based on the image deformation parameters of the raster scanning image;
and the signal correction module is used for obtaining correction coefficients according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement during the motor driving coil movement.
In a third aspect, the present disclosure provides a computer-readable storage medium having stored thereon an electronic scanning direction correction program of a scanning device, which when executed by a processor, implements the electronic scanning direction correction method of the scanning device described in the first aspect.
In a fourth aspect, the present disclosure provides a scanning apparatus, including a memory, a processor, and an electronic scanning direction correction program of the scanning apparatus stored on the memory and executable on the processor, where the processor implements the electronic scanning direction correction method of the scanning apparatus described in the first aspect when executing the electronic scanning direction correction program of the scanning apparatus.
An electronic scanning direction correction method of a scanning device according to an embodiment of the present disclosure includes acquiring a raster scan image obtained by scanning a raster standard by the scanning device; performing image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image; determining coil deformation parameters of a coil which controls electron beam movement during scanning of a raster standard sample by scanning equipment based on image deformation parameters of the raster scanning image; and obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement during the motor driving coil movement. In the method, the raster sample is scanned by the scanning equipment to obtain a raster scanning image, the raster scanning image is subjected to image processing to obtain the image deformation parameters of the raster scanning image, the image deformation parameters are converted by the coil deformation correction model to obtain the correction coefficients of the motor control signals, and the correction coefficients are issued to the hardware system to finish image deformation correction, so that the method is favorable for obtaining a scanning image which correctly reflects the appearance of an actual sample.
Additional aspects and advantages of the disclosure will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the disclosure.
Drawings
FIG. 1 is a flow chart of a method of electronic scan direction correction for a scanning device, shown in accordance with an exemplary embodiment;
FIG. 2 is a raster scan image scanned by a scanning device, according to an exemplary embodiment;
FIG. 3 is a noise-reduced image of a raster-scanned image scanned by a scanning device, according to an exemplary embodiment;
FIG. 4 is a binary image corresponding to a raster scan image scanned by a scanning device according to an exemplary embodiment;
FIG. 5 is a binary anti-phase diagram corresponding to a raster-scanned image scanned by a scanning device, according to an exemplary embodiment;
FIG. 6 is a schematic image segmentation diagram corresponding to a raster-scanned image scanned by a scanning device, according to an exemplary embodiment;
FIG. 7 is a raster scan image after image segmentation, shown according to an exemplary embodiment;
FIG. 8 is a diagram illustrating a first type of grid and a second type of grid classification in a raster scan image after image segmentation in accordance with an exemplary embodiment;
FIG. 9 is a diagram illustrating a transformation of corresponding coordinates before and after deformation according to an exemplary embodiment;
FIG. 10 is a schematic diagram of a relative coordinate system shown according to an exemplary embodiment;
FIG. 11 is an exemplary diagram of a grid angle, according to an exemplary embodiment;
FIG. 12 is a schematic diagram of a hardware architecture shown in accordance with an exemplary embodiment;
fig. 13 is a schematic diagram showing the configuration of an electronic scanning direction correction device of the scanning apparatus according to an exemplary embodiment.
Detailed Description
Embodiments of the present disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and intended for the purpose of explaining the present disclosure and are not to be construed as limiting the present disclosure.
With the development of scanning electron microscopes, electron microscope users can conveniently make real microscopic observation on samples. However, in the imaging process, due to process deviation of the installation of a scanning coil for controlling imaging or fixation abnormality generated when the coil works, the included angle of a scanning magnetic field controlled by an x coil and a y coil deviates from a normal 90 DEG, and when the step sizes are asynchronous, the scanned image shows angle deviation and texture stretching phenomena, so that the scanned image is deformed compared with the real appearance. For this to occur, correction of the electronic scanning direction of the scanning device is required to correct the distortion generated by the image.
In view of the foregoing, the present disclosure provides an electronic scanning direction correction method of a scanning apparatus. Fig. 1 is a flowchart illustrating a method of correcting an electronic scanning direction of a scanning device according to an exemplary embodiment. As shown in fig. 1, the electronic scanning direction correction method of the scanning apparatus includes:
step 10, acquiring a raster scanning image obtained by scanning the raster standard sample by the scanning equipment;
step 11, performing image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image;
step 12, determining coil deformation parameters of a coil which controls electron beam to move during scanning of a raster standard sample by the scanning equipment based on the image deformation parameters of the raster scanning image;
and step 13, obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement of the motor driving coil.
In an exemplary embodiment, the scanning device may be a scanning electron microscope. The grating standard sample can be placed in the electron microscope, and a clear grating scanning image is shot to perform parameter calibration. Fig. 2 is a raster scan image scanned by a scanning device according to an exemplary embodiment. As shown in fig. 2, the standard sample adopted in the calibration process is a grating sample, and the grating sample comprises a large number of grids in the positive direction and black background squares, wherein one grid surrounds four black background squares. When the sample grating is placed, the side length is parallel to the x axis of the scanning coil, and the included angle of the grid side length is equivalent to the included angle of the coil. Since this position is difficult to control, the grating placement position may not be defined at the time of correction. In the calibration process, the length-width ratio of the grid in the deformation image can reflect the stretching coefficient, and the angle formed by the square grid can reflect the included angle of the coil.
And then carrying out image processing on the raster scanning image to obtain the image deformation parameters of the raster scanning image. The image deformation parameters can be used to characterize the overall image characteristics of the raster scan image. The coil deformation parameters mainly comprise the included angle between coils and the scanning speed ratio. And obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement of the motor driving coil. In the method, the raster sample is scanned by the scanning equipment to obtain a raster scanning image, the raster scanning image is subjected to image processing to obtain the image deformation parameters of the raster scanning image, and then the image deformation parameters are converted by the coil deformation correction model to obtain the correction coefficients of the motor control signals, and the correction coefficients are issued to the hardware system to finish image deformation correction, so that the method is beneficial to obtaining a scanning image which correctly reflects the appearance of an actual sample.
In some embodiments, the performing image processing on the raster scan image to obtain an image deformation parameter of the raster scan image includes:
performing image processing on the raster scanning image to obtain a binary image corresponding to the raster scanning image;
Performing inverse processing on the binary image, and performing distance transformation and image segmentation to obtain a target raster image; wherein the target raster image is a local image in the raster scan image, which can characterize the integral offset characteristic of the raster scan image;
acquiring the included angles between two adjacent side lengths of the target raster image and a horizontal line respectively;
and taking two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line as image deformation parameters of the raster scanning image.
In an exemplary embodiment, performing image processing on the raster scan image to obtain a binary image corresponding to the raster scan image, including:
performing smooth denoising treatment on the raster scanning image to obtain a denoising image;
and carrying out binarization processing on the noise reduction image to obtain a binary image corresponding to the raster scanning image. Image noise interference can be reduced by smoothing the denoising process.
Before the binary image is subjected to the inversion processing, the binary image can be subjected to open operation to remove the interference of tiny noise points, and then the binary image after noise reduction is subjected to the inversion processing to obtain a binary inversion image. Fig. 3 is a noise reduced image of a raster scan image scanned by a scanning apparatus according to an exemplary embodiment. The denoised image of the raster scan image is shown in fig. 3. Fig. 4 is a binary image corresponding to a raster scan image scanned by a scanning apparatus according to an exemplary embodiment. Fig. 4 shows a binary image corresponding to the raster scan image.
In an exemplary embodiment, the performing inverse processing on the binary image, performing distance transformation and image segmentation to obtain a target raster image includes:
performing inversion processing on the binary image to obtain a binary inversion image;
performing image contour search on the binary image and the binary inverted image, and screening a preset number of small grids in the binary image and the binary inverted image to obtain the average size of the preset number of small grids;
and based on the average size of the small grids, performing image segmentation on the binary reverse image after the distance transformation to obtain the target grid image.
In an exemplary embodiment, an image contour search is performed on the binary image and the binary inverted image, and as many small grids as possible are screened out from the binary image and the binary inverted image. The average size is determined from the size of the small grid. And based on the average size of the small grids, performing image segmentation on the binary reverse image after distance transformation to segment grids in the raster scanning image and black background grids to obtain a large number of grids with contour coordinates independently, so as to determine a target raster image in the segmented image. Wherein fig. 5 is a binary anti-phase diagram corresponding to a raster scan image scanned by a scanning apparatus according to an exemplary embodiment. And (3) performing image contour searching on the binary image of fig. 4 and the binary inverted image of fig. 5, and screening out as many small grids as possible from the binary image and the binary inverted image. The small grid here refers to a black and white grid in the drawing.
In some embodiments, the performing image segmentation on the binary inverse image after the distance transformation based on the average size of the small grid to obtain the target grid image includes:
based on the average size of the small grids, performing image segmentation on the binary reverse phase image subjected to distance transformation to obtain a first type of grids and a second type of grids after segmentation;
determining four first type target grids with central points connected together to form a diamond in the first type grids;
determining the second type of grid surrounded by the four first type of target grids as the target grid image.
In an exemplary embodiment, based on the average size of the small grids, image segmentation is performed on the binary inverse image after distance transformation to obtain a first type of grid and a second type of grid after segmentation, including:
based on the average size of the small grids, performing image segmentation on the binary reverse image subjected to distance transformation to obtain a binary segmentation image; the binary segmentation image comprises a segmented black quadrangle and a segmented white quadrangle;
performing image fitting on the black quadrangle and the white quadrangle in the binary segmentation image to obtain a raster scanning image after image segmentation;
Performing edge quadrilateral elimination processing on the raster scan image after the image segmentation to obtain a raster scan image with complete outline; wherein the raster scanning image after image segmentation comprises a first type of grid and a second type of grid after segmentation; wherein the first type of grid may be a black background grid. The second type of grid may be a white grid as shown in fig. 2. Fig. 6 is a schematic image segmentation diagram corresponding to a raster scan image scanned by a scanning apparatus according to an exemplary embodiment. As shown in fig. 6, the square background object is cut by the small grid side length, and the adhered white square is reduced to be divided. FIG. 7 is a raster scan image after image segmentation, according to an exemplary embodiment. As shown in fig. 7, the target quadrangle is fitted to obtain a raster scan image after image segmentation. FIG. 8 is a diagram illustrating a first type of grid and a second type of grid classification in a raster scan image after image segmentation in accordance with an exemplary embodiment. As shown in fig. 8, a first type grid and a second type grid classification map in the raster scan image are obtained.
In some embodiments, the determining, based on the image deformation parameters of the raster scan image, the coil deformation parameters of the coil that the scanning device controls the electron beam to move when scanning the raster sample includes:
Determining an included angle and a scanning speed ratio between an X-direction scanning coil and a Y-direction scanning coil for controlling the movement of an electron beam based on two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line respectively;
and taking the included angle between the X-direction scanning coil and the Y-direction scanning coil and the scanning speed ratio as coil deformation parameters of a coil which is used by the scanning equipment for controlling the electron beam to move when scanning the raster sample.
In an exemplary embodiment, the angle between the X-direction scan coil and the Y-direction scan coilθThe method comprises the following steps:，
scanning speed ratio between X-direction scanning coil and Y-direction scanning coilkThe method comprises the following steps:wherein a and c are both intermediate coefficients; wherein,
，/>width is the length of the first side of two adjacent sides, height is the length of the second side of two adjacent sides, +.>Is the included angle between the first side length and the horizontal direction, < >>Is the included angle between the second side length and the horizontal direction.
In an exemplary embodiment, the included angle and the scanning speed ratio between the X-direction scanning coil and the Y-direction scanning coil for controlling the movement of the electron beam are determined by combining the two adjacent side lengths of the target raster image and the included angles between the two adjacent side lengths and the horizontal line respectively through the intermediate coefficients of a and c.
In the exemplary embodiment, the deformation of the image is caused by the non-90 ° included angle of the scanning coil and the inconsistent scanning speed, and the following description is given of the principle of the derivation of the above embodiment:
fig. 9 is a diagram illustrating a transformation of corresponding coordinates before and after deformation according to an exemplary embodiment. As shown in FIG. 9, the angle formed by the offset y 'and x' isThe original square ABCD is changed into a parallelogram A 'B' C 'D' on the right side, and the edge A 'needs to be measured through an image algorithm'B ' and the edge A ' D ' and then deducing to obtain +.>。
FIG. 10 is a schematic diagram of a relative coordinate system, shown according to an example embodiment. The coordinate system before and after transformation is placed in the same field of view, as shown in FIG. 10, assuming that a point A in the coordinate system before transformation is the coordinateThe coordinates of the point A' corresponding to the transformed image coordinate system are +.>The included angle between the coordinate axes Y 'and X' is +.>And if the stretching coefficient in the Y' direction is k, the relation before and after transformation is shown in the following formula:
(one)
The method comprises the steps of carrying out a first treatment on the surface of the (II)
(1) Setting a vector，/>Theoretically, the following relationship should be set in the original coordinate system: />And (2) and. Then, a vector can be represented by two points in the original coordinate system as follows:
Then after transformation andcorresponding->It can be derived by substituting the coordinate transformation into the above formulas (one) and (two):
(III)
(2) At this time, it is assumed that the vectors of the two sides of the square are，/>， a>0 into a transformed coordinate system, then combining the two obtained by the formula (III)
(IV) the process is carried out,
(V) a fifth step;
(3) FIG. 11 is an exemplary diagram illustrating grid angles in accordance with an exemplary embodiment. As shown in fig. 11, the aspect ratio and the included angle of the grid can be obtained through an image processing algorithm, and the corresponding relationship between the length and the width of the grid is as follows:
the angle between the side length A 'B' and the horizontal lineThe angle between the side length A 'D' and the horizontal line is +.>，/>，，
(4) The coefficient a is first found, and the following equations are obtained according to the equations (IV) and (V). The solving mode is that the absolute value of the ordinate of the two transformed vectors is divided as follows:
formula (six);
(5) As above, according to formulas (IV) and (V), the two vectors are obtained by dividing the abscissa of the two vectors after coordinate transformationAs follows, wherein c is an intermediate hypothesis, let +.>Then by
In combination with the formula (six),
then there are:
；
thereby can calculate the coil contained angle and be:
；
(6) Finally, the stretching coefficient k is calculated, firstly, the assumption is made that,/>Respectively->、/>Can be expressed as:
，
；
The method is available in a comprehensive way,；
；
；
。
in some embodiments, the X-direction scanning coil and the Y-direction scanning coil have an included angle therebetweenθAnd a scanning speed ratiokAnd when the motor driving coil moves, the coil deformation correction model is as follows:
the method comprises the steps of carrying out a first treatment on the surface of the Wherein,A、B、C、Dare all correction coefficients of the control signal,Sxa scanning coil controls a current driving signal in the horizontal direction,SyIs a current driving signal for controlling the vertical direction of the scanning coil, < >>Scanning coil actual control signal output for motor, < >>Scanning for motor outputA coil theoretical control signal;
the method for obtaining the correction coefficient according to the coil deformation parameters and the coil deformation correction model of the motor driving coil movement comprises the following steps:
based on the included angle between the X-direction scanning coil and the Y-direction scanning coilθAnd a scanning speed ratiokThe coil deformation correction model of the motor driving coil moving is used for obtaining the correction coefficient; wherein the correction coefficient includes:
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
in an exemplary embodiment, fig. 12 is a schematic diagram of a hardware structure shown according to an exemplary embodiment. As shown in fig. 12, sx and Sy are current drive signals for the scanning coils in the horizontal and vertical directions, and the actual control currents Cx ', cy' are outputted after four coefficient control by a, B, C, and D. Wherein (a×sx+b×sy) =cx ', and (c×sx+d×sy) =cy', rotation and correction of the mounting scanning direction can be achieved by correction of the current drive signal by the correction coefficient.
Ideally Sx, sy should remain orthogonal and the speed ratio is 1. At this time, the output Cx 'and Cy' are equal to Sx and Sy without correction. In practical cases, sx and Sy have included angles deviating from 90 degreesAnd a speed ratio k. At this time, it is necessary to apply correction by the correction coefficient A, B, C, D so that the output Cx 'and Cy' are in agreement with the theory.
The scanning deformation occurs because the hardware scans in the x and y directions at a certain included angle. In addition to the change in angle, each step of length x, y results in either stretching or compressing in the y-direction. Let the scan in the x and y directions of the theoretical hardware be Cx and Cy, respectively, the scan directions of the hardware installed be Sx and Sy, and the scan directions actually output be Cx 'and Cy'. If no correction is made, then
；
At this time, the outputs Cx 'and Cy' are not orthogonal, and there is a speed difference, and the reaction is deformed on the image.
If the correction is to be made so that Cx and Cy' are identical to Cx and Cy, the image is not deformed.
The derivation process can be briefly illustrated by a legend:
the upper graph is assumed to represent the true position, and the true scan direction is the direction indicated by lines Sx, sy in the graph, and has an included angle ofAnd Sx has a velocity k times that of Sy. Let the side length L of square
From Pb- > Pa, sx need to run L length, sy does not need to run;
from Pa- > Pc, sx is taken-L tan (α), and Sy is taken L/cos (α).
Similarly, it will be appreciated that if (x, y) is to be scanned from (0, 0), sx, sy need to be walked (x-y tan (α), y/cos (α)), respectively. Since Sx has a step size k times that of Sy, it is necessary to walk (x-y tan), k*y/cos(/>)）；
According to the deviation angle of Sx, syAnd the velocity ratio k, can be deduced
Obtaining the product
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
The electronic scanning direction correction method of the scanning equipment can automatically complete the deformation problem caused by the scanning coil, and the correction process is simple, quick and accurate. Meanwhile, the parameter detection algorithm is quick and accurate, and can accurately detect required parameters for images with different qualities.
The present disclosure provides an electronic scanning direction correction device of a scanning apparatus. Fig. 13 is a schematic diagram showing the configuration of an electronic scanning direction correction device of the scanning apparatus according to an exemplary embodiment. As shown in fig. 13, the electronic scanning direction correction device of the scanning apparatus includes:
an image acquisition module 20 for acquiring a raster scan image obtained by scanning a raster sample by the scanning apparatus;
an image processing module 21, configured to perform image processing on the raster scan image to obtain an image deformation parameter of the raster scan image;
A parameter determining module 22, configured to determine, based on the image deformation parameter of the raster scan image, a coil deformation parameter of a coil that the scanning device controls the electron beam to move when scanning the raster sample;
the signal correction module 23 is configured to obtain a correction coefficient according to the coil deformation parameter and a coil deformation correction model of the motor driving coil movement, so as to perform signal correction on a control signal for controlling the coil movement in the motor driving coil.
In an exemplary embodiment, the scanning device may be a scanning electron microscope. The grating standard sample can be placed in the electron microscope, and a clear grating scanning image is shot to perform parameter calibration. As shown in fig. 2, the standard sample adopted in the calibration process is a grating sample, and the grating sample comprises a large number of grids in the positive direction and black background squares, wherein one grid surrounds four black background squares. When the sample grating is placed, the side length is parallel to the x axis of the scanning coil, and the included angle of the grid side length is equivalent to the included angle of the coil. Since this position is difficult to control, the grating placement position may not be defined at the time of correction. In the calibration process, the length-width ratio of the grid in the deformation image can reflect the stretching coefficient, and the angle formed by the square grid can reflect the included angle of the coil.
And then carrying out image processing on the raster scanning image to obtain the image deformation parameters of the raster scanning image. The image deformation parameters can be used to characterize the overall image characteristics of the raster scan image. The coil deformation parameters mainly comprise the included angle between coils and the scanning speed ratio. And obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement of the motor driving coil. In the method, the raster sample is scanned by the scanning equipment to obtain a raster scanning image, the raster scanning image is subjected to image processing to obtain the image deformation parameters of the raster scanning image, the image deformation parameters are converted by the coil deformation correction model to obtain the correction coefficients of the motor control signals, and the correction coefficients are issued to the hardware system to finish image deformation correction, so that the method is favorable for obtaining a scanning image which correctly reflects the appearance of an actual sample.
In some embodiments, the image processing module 21 is configured to
Performing image processing on the raster scanning image to obtain a binary image corresponding to the raster scanning image;
performing inverse processing on the binary image, and performing distance transformation and image segmentation to obtain a target raster image; wherein the target raster image is a local image in the raster scan image, which can characterize the integral offset characteristic of the raster scan image;
Acquiring the included angles between two adjacent side lengths of the target raster image and a horizontal line respectively;
and taking two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line as image deformation parameters of the raster scanning image.
In an exemplary embodiment, performing image processing on the raster scan image to obtain a binary image corresponding to the raster scan image, including:
performing smooth denoising treatment on the raster scanning image to obtain a denoising image;
and carrying out binarization processing on the noise reduction image to obtain a binary image corresponding to the raster scanning image. Image noise interference can be reduced by smoothing the denoising process.
Before the binary image is subjected to the inversion processing, the binary image can be subjected to open operation to remove the interference of tiny noise points, and then the binary image after noise reduction is subjected to the inversion processing to obtain a binary inversion image. The denoised image of the raster scan image is shown in fig. 3. Fig. 4 shows a binary image corresponding to the raster scan image.
In an exemplary embodiment, the image processing module 21 is configured to
Performing inversion processing on the binary image to obtain a binary inversion image;
Performing image contour search on the binary image and the binary inverted image, and screening a preset number of small grids in the binary image and the binary inverted image to obtain the average size of the preset number of small grids;
and based on the average size of the small grids, performing image segmentation on the binary reverse image after the distance transformation to obtain the target grid image.
In an exemplary embodiment, an image contour search is performed on the binary image and the binary inverted image, and as many small grids as possible are screened out from the binary image and the binary inverted image. The average size is determined from the size of the small grid. And based on the average size of the small grids, performing image segmentation on the binary reverse image after distance transformation to segment grids in the raster scanning image and black background grids to obtain a large number of grids with contour coordinates independently, so as to determine a target raster image in the segmented image. The binary image of fig. 4 and the binary inverted image of fig. 5 are subjected to image contour searching, and as many small grids as possible are screened out of the binary image and the binary inverted image. The small grid here refers to a black and white grid in the drawing.
In some embodiments, the image processing module 21 is configured to
Based on the average size of the small grids, performing image segmentation on the binary reverse phase image subjected to distance transformation to obtain a first type of grids and a second type of grids after segmentation;
determining four first type target grids with central points connected together to form a diamond in the first type grids;
determining the second type of grid surrounded by the four first type of target grids as the target grid image.
In an exemplary embodiment, based on the average size of the small grids, image segmentation is performed on the binary inverse image after distance transformation to obtain a first type of grid and a second type of grid after segmentation, including:
based on the average size of the small grids, performing image segmentation on the binary reverse image subjected to distance transformation to obtain a binary segmentation image; the binary segmentation image comprises a segmented black quadrangle and a segmented white quadrangle;
performing image fitting on the black quadrangle and the white quadrangle in the binary segmentation image to obtain a raster scanning image after image segmentation;
performing edge quadrilateral elimination processing on the raster scan image after the image segmentation to obtain a raster scan image with complete outline; wherein the raster scanning image after image segmentation comprises a first type of grid and a second type of grid after segmentation; wherein the first type of grid may be a black background grid. The second type of grid may be a white grid as shown in fig. 2. As shown in fig. 6, the square background object is cut by the small grid side length, and the adhered white square is reduced to be divided. As shown in fig. 7, the target quadrangle is fitted to obtain a raster scan image after image segmentation. As shown in fig. 8, a first type grid and a second type grid classification map in the raster scan image are obtained.
In some embodiments, the parameter determination module 22 is configured to
Determining an included angle and a scanning speed ratio between an X-direction scanning coil and a Y-direction scanning coil for controlling the movement of an electron beam based on two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line respectively;
and taking the included angle between the X-direction scanning coil and the Y-direction scanning coil and the scanning speed ratio as coil deformation parameters of a coil which is used by the scanning equipment for controlling the electron beam to move when scanning the raster sample.
In an exemplary embodiment, the angle between the X-direction scan coil and the Y-direction scan coilθThe method comprises the following steps:，
scanning speed ratio between X-direction scanning coil and Y-direction scanning coilkThe method comprises the following steps:wherein a and c are both intermediate coefficients; wherein,
，/>width is the length of the first side of two adjacent sides, height is the length of the second side of two adjacent sides, +.>Is the included angle between the first side length and the horizontal direction, < >>Is the included angle between the second side length and the horizontal direction.
In an exemplary embodiment, the included angle and the scanning speed ratio between the X-direction scanning coil and the Y-direction scanning coil for controlling the movement of the electron beam are determined by combining the two adjacent side lengths of the target raster image and the included angles between the two adjacent side lengths and the horizontal line respectively through the intermediate coefficients of a and c.
In the exemplary embodiment, the deformation of the image is caused by the non-90 ° included angle of the scanning coil and the inconsistent scanning speed, and the following description is given of the principle of the derivation of the above embodiment:
as shown in FIG. 9, the angle formed by the offset y 'and x' isThe original square ABCD is changed into a parallelogram A 'B' C 'D' on the right side, the included angle between the side A 'B' and the side A 'D' is measured through an image algorithm, and then the included angle is obtained through reasoning。
The coordinate system before and after transformation is placed in the same field of view, as shown in FIG. 10, assuming that a point A in the coordinate system before transformation is the coordinateThe coordinates of the point A' corresponding to the transformed image coordinate system are +.>The included angle between the coordinate axes Y 'and X' isAnd if the stretching coefficient in the Y' direction is k, the relation before and after transformation is shown in the following formula:
(one)
The method comprises the steps of carrying out a first treatment on the surface of the (II)
(1) Setting a vector，/>Theoretically, the following relationship should be set in the original coordinate system: />And (2) and. Then, a vector can be represented by two points in the original coordinate system as follows:
then after transformation andcorresponding->It can be derived by substituting the coordinate transformation into the above formulas (one) and (two):
(III)
(2) At this time, it is assumed that the vectors of the two sides of the square are ，/>， a>0 into a transformed coordinate system, then combining the two obtained by the formula (III)
(IV) the process is carried out,
(V) a fifth step;
(3) As shown in fig. 11, the aspect ratio and the included angle of the grid can be obtained through an image processing algorithm, and the corresponding relationship between the length and the width of the grid is as follows:
the angle between the side length A 'B' and the horizontal lineThe angle between the side length A 'D' and the horizontal line is +.>，/>，，
(4) The coefficient a is first found, and the following equations are obtained according to the equations (IV) and (V). The solving mode is that the absolute value of the ordinate of the two transformed vectors is divided as follows:
formula (six);
(5) As above, according to formulas (IV) and (V), the two vectors are obtained by dividing the abscissa of the two vectors after coordinate transformationAs follows, wherein c is an intermediate hypothesis, let +.>Then by
In combination with the formula (six),
then there are:
；
thereby can calculate the coil contained angle and be:
；
(6) Finally, the stretching coefficient k is calculated, firstly, the assumption is made that,/>Respectively->、/>Can be expressed as:
，
；
the method is available in a comprehensive way,；
；
；
。
in some embodiments, the X-direction scanning coil and the Y-direction scanning coil have an included angle therebetweenθAnd a scanning speed ratiokAnd when the motor driving coil moves, the coil deformation correction model is as follows:
the method comprises the steps of carrying out a first treatment on the surface of the Wherein,A、B、C、Dare all correction coefficients of the control signal, SxA scanning coil controls a current driving signal in the horizontal direction,SyIs a current driving signal for controlling the vertical direction of the scanning coil, < >>Scanning coil actual control signal output for motor, < >>A scanning coil theoretical control signal output by the motor;
the signal correction module 23 is used for
Based on the included angle between the X-direction scanning coil and the Y-direction scanning coilθAnd a scanning speed ratiokThe coil deformation correction model of the motor driving coil moving is used for obtaining the correction coefficient; wherein the correction coefficient includes:
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
in an exemplary embodiment, as shown in fig. 12, sx and Sy are current driving signals for controlling horizontal and vertical directions of the scanning coil, and actual control currents Cx ', cy' are outputted after four coefficient control of a, B, C, and D. Wherein (a×sx+b×sy) =cx ', and (c×sx+d×sy) =cy', rotation and correction of the mounting scanning direction can be achieved by correction of the current drive signal by the correction coefficient.
Ideally Sx, sy should remain orthogonal and the speed ratio is 1. At this time, the output Cx 'and Cy' are equal to Sx and Sy without correction. In practical cases, sx and Sy have included angles deviating from 90 degrees And a speed ratio k. At this time, it is necessary to apply correction by the correction coefficient A, B, C, D so that the output Cx 'and Cy' are in agreement with the theory.
The scanning deformation occurs because the hardware scans in the x and y directions at a certain included angle. In addition to the change in angle, each step of length x, y results in either stretching or compressing in the y-direction. Let the scan in the x and y directions of the theoretical hardware be Cx and Cy, respectively, the scan directions of the hardware installed be Sx and Sy, and the scan directions actually output be Cx 'and Cy'. If no correction is made, then
；
At this time, the outputs Cx 'and Cy' are not orthogonal, and there is a speed difference, and the reaction is deformed on the image.
If the correction is to be made so that Cx and Cy' are identical to Cx and Cy, the image is not deformed.
The derivation process can be briefly illustrated by a legend:
the upper graph is assumed to represent the true position, and the true scan direction is the direction indicated by lines Sx, sy in the graph, and has an included angle ofAnd Sx has a velocity k times that of Sy. Let the side length L of square
From Pb- > Pa, sx need to run L length, sy does not need to run;
from Pa- > Pc, sx is taken-L tan (α), and Sy is taken L/cos (α).
Similarly, it will be appreciated that if (x, y) is to be scanned from (0, 0), sx, sy need to be walked (x-y tan (α), y/cos (α)), respectively. Since Sx has a step size k times that of Sy, it is necessary to walk (x-y tan ), k*y/cos(/>)）；
According to the deviation angle of Sx, syAnd the velocity ratio k, can be deduced
Obtaining the product
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
The present disclosure provides a computer-readable storage medium having stored thereon an electronic scanning direction correction program of a scanning device, which when executed by a processor, implements the electronic scanning direction correction method of the scanning device described in the above embodiments.
The present disclosure provides a scanning device, including a memory, a processor, and an electronic scanning direction correction program of the scanning device stored in the memory and capable of running on the processor, where the electronic scanning direction correction method of the scanning device described in the above embodiments is implemented when the processor executes the electronic scanning direction correction program of the scanning device.
It should be noted that the logic and/or steps represented in the flowcharts or otherwise described herein, for example, may be considered as a ordered listing of executable instructions for implementing logical functions, and may be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium may even be paper or other suitable medium upon which the program is printed, as the program may be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.
It should be understood that portions of the present disclosure may be implemented in hardware, software, firmware, or a combination thereof. In the above-described embodiments, the various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, may be implemented using any one or combination of the following techniques, as is well known in the art: discrete logic circuits having logic gates for implementing logic functions on data signals, application specific integrated circuits having suitable combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), and the like.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In the description of the present disclosure, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present disclosure.
Furthermore, the terms "first," "second," and the like, as used in embodiments of the present disclosure, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated in the present embodiment. Thus, a feature of an embodiment of the present disclosure that is defined by terms such as "first," "second," and the like may explicitly or implicitly indicate that at least one such feature is included in the embodiment. In the description of the present disclosure, the word "plurality" means at least two or more, for example, two, three, four, etc., unless explicitly specified otherwise in the examples.
In this disclosure, unless expressly specified or limited otherwise in the examples, the terms "mounted," "connected," and "secured" and the like as used in the examples are intended to be broadly construed, as for example, the connection may be a fixed connection, may be a removable connection, or may be integral, and as may be a mechanical connection, an electrical connection, or the like; of course, it may be directly connected, or indirectly connected through an intermediate medium, or may be in communication with each other, or in interaction with each other. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art depending on the specific implementation.
In this disclosure, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Although embodiments of the present disclosure have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the present disclosure, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the present disclosure.
Claims (7)
1. An electronic scanning direction correction method of a scanning apparatus, comprising:
acquiring a raster scanning image obtained by scanning a raster sample by the scanning device;
performing image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image; the image processing of the raster scan image to obtain an image deformation parameter of the raster scan image includes: performing image processing on the raster scanning image to obtain a binary image corresponding to the raster scanning image; performing inverse processing on the binary image, and performing distance transformation and image segmentation to obtain a target raster image; wherein the target raster image is a local image in the raster scan image, which can characterize the integral offset characteristic of the raster scan image; acquiring the included angles between two adjacent side lengths of the target raster image and a horizontal line respectively; taking two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line as image deformation parameters of the raster scanning image;
Determining coil deformation parameters of a coil which controls the electron beam to move when the scanning device scans the raster sample based on the image deformation parameters of the raster scanning image; the determining, based on the image deformation parameters of the raster scan image, coil deformation parameters of a coil of the scanning device for controlling electron beam movement during scanning of raster standards includes: based on the two adjacent side lengths of the target raster image and the included angles between the two adjacent side lengths and the horizontal line, determining an X-direction scanning coil and a Y-direction for controlling the movement of the electron beamAn included angle between the scanning coils and a scanning speed ratio; taking the included angle between the X-direction scanning coil and the Y-direction scanning coil and the scanning speed ratio as coil deformation parameters of a coil which is used by the scanning equipment for controlling the electron beam to move when scanning the grating standard sample; wherein, the included angle between the X-direction scanning coil and the Y-direction scanning coilθThe method comprises the following steps:scanning speed ratio between X-direction scanning coil and Y-direction scanning coilkThe method comprises the following steps: />Wherein a and c are both intermediate coefficients; wherein,， />width is the length of the first side of two adjacent sides, height is the length of the second side of two adjacent sides, +. >Is the included angle between the first side length and the horizontal direction, < >>Is the included angle between the second side length and the horizontal direction;
and obtaining a correction coefficient according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement during the motor driving coil movement.
2. The method for correcting an electronic scanning direction of a scanning apparatus according to claim 1, wherein the performing inverse processing on the binary image, performing distance conversion and image segmentation, and obtaining a target raster image comprises:
performing inversion processing on the binary image to obtain a binary inversion image;
performing image contour search on the binary image and the binary inverted image, and screening a preset number of small grids in the binary image and the binary inverted image to obtain the average size of the preset number of small grids;
and based on the average size of the small grids, performing image segmentation on the binary reverse image after the distance transformation to obtain the target grid image.
3. The method for correcting an electronic scanning direction of a scanning apparatus according to claim 2, wherein said performing image segmentation on the binary inverse image after the distance conversion based on the average size of the small grid to obtain the target grid image comprises:
Based on the average size of the small grids, performing image segmentation on the binary reverse phase image subjected to distance transformation to obtain a first type of grids and a second type of grids after segmentation;
determining four first type target grids with central points connected together to form a diamond in the first type grids;
determining the second type of grid surrounded by the four first type of target grids as the target grid image.
4. The method for correcting an electronic scanning direction of a scanning apparatus according to claim 3, wherein when said X-direction scanning coil and said Y-direction scanning coil have an included angle therebetweenθAnd a scanning speed ratiokAnd when the motor driving coil moves, the coil deformation correction model is as follows:
the method comprises the steps of carrying out a first treatment on the surface of the Wherein,A、B、C、Dare all correction coefficients of the control signal,Sxa scanning coil controls a current driving signal in the horizontal direction,SyIs a current driving signal for controlling the vertical direction of the scanning coil, < >>Scanning coil actual control signal output for motor, < >>A scanning coil theoretical control signal output by the motor;
the method for obtaining the correction coefficient according to the coil deformation parameters and the coil deformation correction model of the motor driving coil movement comprises the following steps:
Based on the included angle between the X-direction scanning coil and the Y-direction scanning coilθAnd a scanning speed ratiokThe coil deformation correction model of the motor driving coil moving is used for obtaining the correction coefficient; wherein the correction coefficient includes:
A=1；
B=-tan(θ)；
C=0；
D=k/cos(θ)。
5. an electronic scanning direction correction device of a scanning apparatus, characterized by comprising:
the image acquisition module is used for acquiring a raster scanning image obtained by scanning the raster standard sample by the scanning equipment;
the image processing module is used for carrying out image processing on the raster scanning image to obtain image deformation parameters of the raster scanning image; the image processing of the raster scan image to obtain an image deformation parameter of the raster scan image includes: performing image processing on the raster scanning image to obtain a binary image corresponding to the raster scanning image; performing inverse processing on the binary image, and performing distance transformation and image segmentation to obtain a target raster image; wherein the target raster image is a local image in the raster scan image, which can characterize the integral offset characteristic of the raster scan image; acquiring the included angles between two adjacent side lengths of the target raster image and a horizontal line respectively; taking two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line as image deformation parameters of the raster scanning image;
The parameter determining module is used for determining coil deformation parameters of a coil which is used for controlling the electron beam to move when the scanning equipment scans the raster sample based on the image deformation parameters of the raster scanning image; the determining, based on the image deformation parameters of the raster scan image, coil deformation parameters of a coil of the scanning device for controlling electron beam movement during scanning of raster standards includes: determining an included angle and a scanning speed ratio between an X-direction scanning coil and a Y-direction scanning coil for controlling the movement of an electron beam based on two adjacent side lengths of the target raster image and included angles between the two adjacent side lengths and a horizontal line respectively; taking the included angle between the X-direction scanning coil and the Y-direction scanning coil and the scanning speed ratio as coil deformation parameters of a coil which is used by the scanning equipment for controlling the electron beam to move when scanning the grating standard sample; wherein, the included angle between the X-direction scanning coil and the Y-direction scanning coilθThe method comprises the following steps:scanning speed ratio between X-direction scanning coil and Y-direction scanning coilkThe method comprises the following steps: />Wherein a and c are both intermediate coefficients; wherein (1)>， />Width is the length of the first side of two adjacent sides, height is the length of the second side of two adjacent sides, +. >Is the included angle between the first side length and the horizontal direction, < >>Is the included angle between the second side length and the horizontal direction;
and the signal correction module is used for obtaining correction coefficients according to the coil deformation parameters and a coil deformation correction model of the motor driving coil movement so as to perform signal correction on a control signal for controlling the coil movement during the motor driving coil movement.
6. A computer-readable storage medium, characterized in that an electronic scanning direction correction program of a scanning device is stored thereon, which, when executed by a processor, implements the electronic scanning direction correction method of a scanning device of any one of claims 1-4.
7. A scanning device comprising a memory, a processor and an electronic scan direction correction program of the scanning device stored on the memory and executable on the processor, the processor implementing the electronic scan direction correction method of the scanning device of any of claims 1-4 when executing the electronic scan direction correction program of the scanning device.
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| CN115931941A (en) * | 2022-11-25 | 2023-04-07 | 国标（北京）检验认证有限公司 | Reference sample for calibrating scanning electron microscope and energy spectrometer and preparation method |
| CN116071272A (en) * | 2023-03-07 | 2023-05-05 | 上海聚跃检测技术有限公司 | Image correction method and device, electronic equipment and storage medium thereof |
| CN116013754A (en) * | 2023-03-20 | 2023-04-25 | 苏州矽视科技有限公司 | Raster scanning method for electron beam imaging, image data reconstruction method and scanning electron beam imaging device |
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