CN117604619A - Crystal lifting and rotating mechanism of single crystal furnace - Google Patents
Crystal lifting and rotating mechanism of single crystal furnace Download PDFInfo
- Publication number
- CN117604619A CN117604619A CN202311332901.6A CN202311332901A CN117604619A CN 117604619 A CN117604619 A CN 117604619A CN 202311332901 A CN202311332901 A CN 202311332901A CN 117604619 A CN117604619 A CN 117604619A
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- roller
- rubbing block
- rubbing
- single crystal
- bracket
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- 239000013078 crystal Substances 0.000 title claims abstract description 73
- 230000007246 mechanism Effects 0.000 title claims abstract description 48
- 230000005540 biological transmission Effects 0.000 claims abstract description 46
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 37
- 239000011147 inorganic material Substances 0.000 claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 abstract description 15
- 238000005096 rolling process Methods 0.000 abstract 2
- 230000033001 locomotion Effects 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B27/00—Single-crystal growth under a protective fluid
- C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a crystal lifting and rotating mechanism of a single crystal furnace, which relates to the field of single crystal furnace equipment, and comprises a bracket and further comprises the following components: and (3) a roller: the device is rotationally connected to the bracket; a rubbing block: the device is arranged in the roller, the rubbing block swings relative to the roller, and the rubbing block is provided with a position for rubbing inorganic materials such as metal, silicon and the like to form seed crystals; a transmission mechanism: the device is arranged on the bracket, and the transmission mechanism is used for driving the roller to rotate and driving the rubbing block to swing; the transmission mechanism drives the rolling drum to rotate, and the rubbing block is driven to rotate in the process of driving the rolling drum to rub inorganic materials such as metal, silicon and the like downwards to form seed crystals. According to the crystal lifting and rotating mechanism of the single crystal furnace, the transmission assembly drives the roller to rotate, so that the roller rotates and drives the rubbing block to swing in the roller, the rubbing block turns over metal, silicon and other inorganic materials in the roller and drives the rubbing block to move downwards, and then the melted metal, silicon and other inorganic materials are rubbed to form seed crystals.
Description
Technical Field
The invention relates to the technical field of single crystal furnace equipment, in particular to a single crystal furnace crystal lifting and rotating mechanism.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas (nitrogen and helium are mainly) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like.
In publication No.: CN116024651a, publication date: 2023-04-28, entitled "Single Crystal lifting mechanism for Single Crystal furnace and Single Crystal furnace", in the present application, comprises: the crystal transition assembly, the crystal lifting assembly and the fixed pulley assembly are connected with each other at the top of the crystal transition assembly, and the fixed pulley assembly is arranged on the crystal lifting assembly. The crystal lifting assembly comprises a connecting chassis, a box body, a wire winding structure and a wire pressing structure. The winding structure can wind a plurality of turns of winding ropes and can wind and unwind the winding ropes through rotation. The line ball structure sets up in the one side of reel structure, and when the condition of wire jumper appears in the reel rope, the line ball structure can compress tightly the reel rope towards one side of reel structure to make reel rope and reel structure offset again. The fixed pulley component is arranged on the crystal lifting component and is used for converting rotation of the wire winding rope into up-down lifting. Through setting up the line ball structure in one side of reel structure, when the phenomenon of rope skipping appears in the reel rope, when reel rope and line ball mechanism contact, line ball mechanism can compress tightly the reel rope towards one side of reel structure, prevents the reel rope and breaks away from the phenomenon of winding groove.
In the prior art including the above patent, after the process of melting the inorganic material such as metal, silicon, etc. into a liquid by the single crystal furnace, the situation such as fracture occurs during the drawing process due to the fluidity thereof and the poor toughness thereof during the drawing process.
Disclosure of Invention
The invention aims to provide a crystal lifting and rotating mechanism of a single crystal furnace, which aims to solve the defects in the prior art.
In order to achieve the above object, the present invention provides the following technical solutions:
the utility model provides a single crystal growing furnace crystal promotes rotary mechanism, includes the support, still includes: and (3) a roller: the device is rotationally connected to the bracket; a rubbing block: the device is arranged in the roller, the rubbing block swings relative to the roller, and the rubbing block is provided with a position for rubbing inorganic materials such as metal, silicon and the like to form seed crystals; a transmission mechanism: the transmission mechanism is arranged on the bracket and is used for driving the roller to rotate and driving the rubbing block to swing; and the transmission mechanism drives the rubbing block to rotate in the rotating stroke of the roller, so that the rubbing block rubs inorganic materials such as metal, silicon and the like downwards to form seed crystals.
Preferably, the two opposite sides of the bracket are fixedly connected with supports, each support is located on the end face of the roller respectively, and each support is connected with the roller in a rotating mode.
Preferably, the transmission mechanism comprises a first driving component and a second driving component, the first driving component is used for driving the roller to rotate, and the second driving component is used for rotating the rubbing block and rubbing inorganic materials such as metal, silicon and the like to form seed crystals.
Preferably, the first driving assembly comprises a first gear coaxially and fixedly arranged on the roller and a second gear rotatably connected to the bracket, the first gear is meshed with the second gear, and the second gear is driven by the motor.
Preferably, the second driving assembly comprises a first executing unit and a second executing unit, the first executing unit is used for driving the rubbing block to swing, and the second executing unit is used for driving the rubbing block to move downwards to rub inorganic materials such as metal and silicon so as to improve toughness of the rubbing block.
Preferably, the first executing unit comprises two conveying wheels and a connecting belt sleeved on each conveying wheel, wherein one conveying wheel rotates to be connected to the connecting bracket, and the other conveying wheel rotates to be fixedly connected with the second gear coaxially.
Preferably, the first executing unit further comprises two turntables, each turntable is rotatably connected to each bracket, and one of the turntables is fixedly connected with the transmission wheel which is rotatably connected to the connecting bracket in a coaxial manner.
Preferably, the second executing unit is hinged with the telescopic parts on the brackets, the end parts of the telescopic parts are fixedly connected with the rubbing blocks, and the telescopic parts are driven by the rotating discs correspondingly arranged.
Preferably, each telescopic piece comprises a first swing rod with an end hinged on a bracket corresponding to the telescopic piece and a second swing rod with an end fixedly connected on the rubbing block, and the first swing rod is in sliding connection with the second swing rod.
Preferably, each second swing rod is fixedly connected with a transmission pin, and each support is provided with a connecting groove matched with the transmission pin.
In the technical scheme, the crystal lifting and rotating mechanism of the single crystal furnace provided by the invention drives the roller to rotate through the transmission component, so that the roller rotates and drives the rubbing block to swing in the roller, the rubbing block turns over inorganic materials such as metal and silicon in the roller and drives the rubbing block to move downwards, and the melted inorganic materials such as metal and silicon are rubbed to form seed crystals.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings may be obtained according to these drawings for a person having ordinary skill in the art.
Fig. 1-1b are schematic views of the overall structure of a sterilization apparatus according to an embodiment of the present invention;
fig. 2 is a schematic view of an internal structure of a drum according to an embodiment of the present invention;
FIG. 2a is an enlarged schematic view of a part of the structure of FIG. 2A according to an embodiment of the present invention;
fig. 3 is a schematic view of an installation structure of an ultraviolet lamp tube according to an embodiment of the present invention;
FIG. 3a is a schematic diagram of an installation structure of a turntable according to an embodiment of the present invention;
fig. 4 is a schematic structural view of a second swing rod according to an embodiment of the present invention
FIG. 4a is an enlarged schematic view of the structure shown in FIG. 4B according to an embodiment of the present invention;
FIG. 5 is a schematic view of an installation structure of a rub block according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a rub block according to an embodiment of the present invention.
Reference numerals illustrate:
1. a bracket; 1.1, a roller; 1.10, a first gear; 1.11, sealing cover; 1.2, a support; 1.200, a connecting groove; 1.201, connecting pins; 1.20, a transfer wheel; 1.21, connecting bands; 1.23, a turntable; 1.230, connecting shaft; 1.24, a first swing rod; 1.240, waist-shaped grooves; 1.25, a second swing rod; 1.250, drive pins; 1.26, a rubbing block; 1.260, pressing teeth; 1.27, graphite heating lamp tube; 1.3, a motor; 1.4, a second gear.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings.
Referring to fig. 1-6, the invention provides a crystal lifting and rotating mechanism of a single crystal furnace, which comprises a bracket 1 and further comprises: roller 1.1: which is rotatably connected to the bracket 1;
pickup block 1.26: the device is arranged in a roller 1.1, a rubbing block 1.26 swings relative to the roller 1.1, and the rubbing block 1.26 is provided with a position for rubbing inorganic materials such as metal, silicon and the like to form seed crystals;
a transmission mechanism: the device is arranged on a bracket 1, and a transmission mechanism is used for driving a roller 1.1 to rotate and driving a rubbing block 1.26 to swing;
and when the transmission mechanism drives the roller 1.1 to rotate, the rubbing block 1.26 is also driven to rotate, so that the rubbing block 1.26 rubs inorganic materials such as metal, silicon and the like downwards to form seed crystals.
Specifically, as shown in fig. 1 and 4, the bracket 1 is fixedly connected with two connecting seats, each connecting seat is provided with an annular groove, the positions of the circumferential side of the roller 1.1 corresponding to each annular groove are respectively provided with an annular bulge, so that the annular bulges are correspondingly arranged in each annular groove, the roller 1.1 rotates on the bracket 1, the circumferential side of the roller 1.1 is provided with a feed inlet, and the positions of the circumferential side of the roller 1.1 corresponding to the feed inlet are provided with a sealing cover 1.11 which is rotationally connected with the sealing cover; the sealing cover 1.11 is connected with the roller 1.1 through a locking piece (not shown in the figure), the sealing cover 1.11 is limited, the roller 1.1 is of a hollow cylindrical structure with two ends penetrating, a space for containing inorganic materials such as metal and silicon is formed in the roller 1.1, a rubbing block 1.26 is arranged in the roller 1.1, the rubbing block 1.26 is of an arc structure, and the inorganic materials such as metal and silicon are turned over in the process of rotating in the roller 1.1 by the rubbing block 1.26, so that the inorganic materials such as metal and silicon are rubbed to form seed crystals.
The transmission mechanism is arranged on the bracket 1, and drives the rubbing block 1.26 to swing in the process of driving the roller 1.1 to rotate clockwise or anticlockwise, and when the rubbing block 1.26 moves to a position vertical to the horizontal plane, the rubbing block has a downward movement trend, so that the rubbing block 1.26 rubs liquid inorganic materials such as metal and silicon in the roller 1.1, the toughness of the rubbing block is improved, and the situation of fracture in the lifting process is avoided. Therefore, in this embodiment, the transmission mechanism has three different transmission paths, the first path is to drive the drum 1.1 to rotate clockwise or anticlockwise on the bracket 1, the second path is to drive the rubbing block 1.26 to swing reciprocally in the radial direction of the drum 1.1, so as to realize the turning of metal, silicon and other inorganic materials in the drum 1.1, and the third path is to have a downward moving trend when the rubbing block 1.26 moves to a position perpendicular to the horizontal plane, so that the rubbing block 1.26 rubs the liquid metal, silicon and other inorganic materials in the drum 1.1, thereby improving the toughness of the rubbing block and avoiding the fracture in the pulling process. In this embodiment, the transmission mechanism is a component for converting circular motion into circular motion in the first path, such as a gear transmission component, a crank-rocker component or other mechanisms capable of converting circular motion into circular motion are suitable for use in the present embodiment; the transmission mechanism is a motion mechanism for converting circular motion into swing in the second path, such as a crank rocker mechanism, a swing follower cam mechanism or other transmission mechanisms are applicable to the embodiment; the third path of the transmission mechanism can limit the swinging path of the rubbing block 1.26 by arranging a telescopic piece in the swinging process of the rubbing block 1.26, so that the rubbing block 1.26 has a downward movement trend when moving to a state position vertical to the horizontal, and the position of the rubbing block 1.26 can be limited by a structure such as a groove.
During the use process, metal, silicon and other inorganic materials are added into the roller 1.1, and then the transmission assembly is started to move, so that the transmission assembly drives the roller 1.1 to rotate clockwise or anticlockwise and further drives the rubbing block 1.26 to swing, when the rubbing block 1.26 moves to a position vertical to the horizontal plane, the rubbing block has a downward moving trend, and further the rubbing block 1.26 extrudes the metal, silicon and other inorganic materials in the roller 1.1, and further kneads the melted metal, silicon and other inorganic materials to form seed crystals.
According to the crystal lifting and rotating mechanism of the single crystal furnace, the roller 1.1 is driven to rotate through the transmission component, so that the roller 1.1 rotates and simultaneously drives the rubbing block 1.26 to swing in the roller 1.1, the rubbing block 1.26 is enabled to flip metal, silicon and other inorganic materials in the roller 1.1 and simultaneously drives the rubbing block 1.26 to move downwards, and then molten metal, silicon and other inorganic materials are rubbed to form seed crystals.
Referring to fig. 1-3, in another embodiment of the present invention, two opposite sides of a support 1 are fixedly connected with supports 1.2, each support 1.2 is located at an end surface of a roller 1.1, each support 1.2 is rotatably connected with the roller 1.1, and a discharge port is formed in one support 1.2 for drawing seed crystals.
Specifically, nitrogen or other inert gases are required to be filled into the roller in the process of heating organic material materials such as metal and silicon, so that sealing is carried out between each support 1.2 and the roller 1.1 through a rubber ring, a discharge opening is formed in one support, a valve (not shown in the figure) is arranged on the discharge opening, seed crystals are discharged from the discharge opening and are further drawn, the supports 1.2 are fixedly connected to two opposite sides of the support 1, a plurality of graphite heating pipes 1.27 are fixedly connected to each support 1.2 at the same level, the graphite heating pipes 1.27 and the support heating pipes are sequentially arranged in a crossing mode, and the graphite heating pipes 1.27 melt inorganic materials such as metal and silicon to form the seed crystals and further realize drawing.
Referring to fig. 1, in still another embodiment of the present invention, the transmission mechanism includes a first driving component for driving the drum 1.1 to rotate, and a second driving component for rotating the rubbing block 1.26 and rubbing the inorganic materials such as metal, silicon, etc. to form seed crystals.
The first driving assembly comprises a first gear 1.10 coaxially and fixedly mounted on the roller 1.1 and a second gear 1.4 rotatably connected to the bracket 1, the first gear 1.10 is meshed with the second gear 1.4, and the second gear 1.4 is driven by the motor 1.3.
Specifically, as shown in fig. 1, a motor 1.3 is fixedly installed on a bracket 1, an output end of the motor 1.3 is fixedly connected with a second gear 1.4 coaxially with the second gear 1.4, a roller 1.1 is positioned on an end face of the second gear 1.4 and is fixedly connected with a first gear 1.10 coaxially, the first gear 1.10 is meshed with the second gear 1.4 mutually, the second gear 1.4 is driven to rotate by the motor 1.3, the second gear 1.4 drives the first gear 1.10 to rotate, and then the first gear 1.10 drives the roller 1.1 to do reciprocating circular motion to perform preliminary turning on inorganic materials such as metal, silicon and the like.
Referring to fig. 2-6, in yet another embodiment of the present invention, the second driving assembly includes a first executing unit and a second executing unit, the first executing unit is used for driving the rubbing block 1.26 to swing, and the second executing unit is used for driving the rubbing block 1.26 to move downwards to rub and improve toughness of inorganic materials such as metal, silicon, etc.
The first execution unit comprises two transmission wheels 1.20 and a connecting belt 1.21 sleeved on each transmission wheel 1.20, wherein one transmission wheel 1.20 is rotationally connected to the connecting bracket 1, and the other transmission wheel 1.20 is rotationally and fixedly connected with the second gear 1.4 in a coaxial way.
The first execution unit further comprises two turntables 1.23, wherein each turntable 1.23 is respectively and rotatably connected to each bracket 1, and one turntable 1.23 is fixedly connected with a transmission wheel 1.20 which is rotatably connected to the connecting bracket 1 in a coaxial way.
The second executing unit is hinged with the telescopic parts on the brackets 1, the end parts of the telescopic parts are fixedly connected with the rubbing blocks 1.26, and the telescopic parts are driven by the rotating discs 1.23 correspondingly arranged.
Each telescopic piece comprises a first swing rod 1.24 with the end part hinged on the bracket 1 corresponding to the telescopic piece and a second swing rod 1.25 with the end part fixedly connected on the rubbing block 1.26, and the first swing rod 1.24 is in sliding connection with the second swing rod 1.25.
A transmission pin is fixedly connected to each second swing rod 1.25, and a connecting groove 1.200 matched with the transmission pin is formed in each support 1.2.
Specifically, the rotary tables 1.23 are rotationally connected to the inside of the roller 1.1 on each support 1.2, a connecting shaft 1.230 is fixedly connected to the eccentric position of the opposite end faces of each rotary table 1.23, a first swing rod 1.24 is hinged to the circle center position of each support 1.2, a connecting pin 1.201 is arranged at the circle center position of each support 1.2 and used for hinging the end parts of each first swing rod 1.24, a waist-shaped groove 1.240 matched with the connecting shaft 1.230 is connected to the end faces of each first swing rod 1.24 in a penetrating way, the connecting shaft 1.230 is connected to the inside of each waist-shaped groove 1.240 in a sliding way, a second swing rod 1.25 is sleeved outside each first swing rod 1.24, and therefore the first swing rods 1.24 and the second swing rods 1.25 can be connected in a sliding way, the end parts of the second swinging rods 1.25 are respectively and fixedly connected with the rubbing blocks 1.26, the rubbing blocks 1.26 are of arc structures, the bottom ends of the rubbing blocks 1.26 are in linear equidistant fixed connection with a plurality of pressing teeth 1.260, each support 1.2 is provided with a connecting groove 1.200, each connecting groove 1.200 takes the center of each support 1.2 as the center of a circle and takes the vertical direction as the long axis, the horizontal direction is the track of the connecting groove 1.200 on the ellipse with the short axis, the two ends of the connecting groove 1.200 coincide with the movement track of the swinging rods (as shown in figures 3-5), a transmission pin 1.250 matched with the connecting groove 1.200 is fixedly connected to each second swinging rod 1.25, and the transmission pin 1.250 slides in the connecting groove 1.200; the rotary table 1.23 near one side of the second gear 1.4 is coaxially and fixedly connected with a transmission wheel 1.20, the other transmission wheel 1.20 is coaxially and fixedly connected with one rotary table 1.23, and a connecting belt 1.21 is sleeved between the two transmission wheels 1.20.
In the use process, firstly, metal, silicon and other inorganic materials are added into the roller 1.1, then, the motor 1.3 is started, the motor 1.3 drives the second gear 1.4 to rotate, and then, the second gear 1.4 drives the first gear 1.10 to rotate in the rotating process, and simultaneously drives the two conveying wheels 1.20 to rotate, and then, the conveying wheels 1.20 drive the rotary table 1.23 which is coaxially and fixedly connected with the conveying wheels to rotate, and further, the connecting shaft 1.230 on the rotary table 1.23 slides in the waist-shaped groove 1.240 on the first swing rod 1.24, so that the first swing rod 1.24 drives the second swing rod 1.25 to swing, and as the first swing rod 1.24 is in sliding connection with the second swing rod 1.25, the driving pin 1.250 on the second swing rod 1.25 slides in the connecting groove 1.200, and the second swing rod 1.25 drives the material block 1.26 to swing in the sliding process at the moment, so that the metal, the silicon and other inorganic materials are turned over, and when the second swing rod 1.25 moves to the position which is perpendicular to the horizontal plane, the inorganic material is positioned at the bottom end of the silicon and the most, and the toughness of the inorganic material is further improved.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that modifications may be made to the described embodiments in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive of the scope of the invention, which is defined by the appended claims.
Claims (10)
1. The utility model provides a single crystal growing furnace crystal promotes rotary mechanism, includes support (1), its characterized in that still includes: roller (1.1): the device is rotationally connected to the bracket (1);
pickup block (1.26): the device is arranged in a roller (1.1), a rubbing block (1.26) swings relative to the roller (1.1), and the rubbing block (1.26) is provided with a position for rubbing inorganic materials such as metal, silicon and the like to form seed crystals;
a transmission mechanism: the device is arranged on a bracket (1), and the transmission mechanism is used for driving the roller (1.1) to rotate and driving the rubbing block (1.26) to swing at the same time;
and when the transmission mechanism drives the roller (1.1) to rotate, the rubbing block (1.26) is driven to rotate, so that the rubbing block (1.26) rubs inorganic materials such as metal, silicon and the like downwards to form seed crystals.
2. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 1, wherein supports (1.2) are fixedly connected to two opposite sides of the support (1), each support (1.2) is located on the end face of the roller (1.1) respectively, and each support (1.2) is rotationally connected with the roller (1.1).
3. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 2, wherein the transmission mechanism comprises a first driving component and a second driving component, the first driving component is used for driving the roller (1.1) to rotate, and the second driving component is used for rotating the rubbing block (1.26) and rubbing inorganic materials such as metal, silicon and the like to form seed crystals.
4. A single crystal furnace crystal lifting and rotating mechanism according to claim 3, characterized in that the first driving assembly comprises a first gear (1.10) coaxially and fixedly mounted on the roller (1.1) and a second gear (1.4) rotatably connected on the bracket (1), the first gear (1.10) is meshed with the second gear (1.4), and the second gear (1.4) is driven by the motor (1.3).
5. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 4, wherein the second driving assembly comprises a first executing unit and a second executing unit, the first executing unit is used for driving the rubbing block (1.26) to swing, and the second executing unit is used for driving the rubbing block (1.26) to move downwards to rub inorganic materials such as metal and silicon so as to improve toughness of the inorganic materials.
6. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 5, wherein the first executing unit comprises two conveying wheels (1.20) and a connecting belt (1.21) sleeved on each conveying wheel (1.20), one conveying wheel (1.20) is rotatably connected to the connecting bracket (1), and the other conveying wheel (1.20) is rotatably and fixedly connected with the second gear (1.4) coaxially.
7. The crystal lifting and rotating mechanism of a single crystal furnace according to claim 6, wherein the first executing unit further comprises two turntables (1.23), each turntable (1.23) is rotatably connected to each bracket (1), and one turntable (1.23) is fixedly connected coaxially with a transmission wheel (1.20) rotatably connected to the connecting bracket (1).
8. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 7, wherein the second executing unit is hinged to telescopic pieces on each bracket (1), the end parts of the telescopic pieces are fixedly connected with the rubbing blocks (1.26), and each telescopic piece is driven by a turntable (1.23) correspondingly arranged.
9. The crystal lifting and rotating mechanism of a single crystal furnace according to claim 8, wherein each telescopic piece comprises a first swing rod (1.24) with an end hinged on a bracket (1) corresponding to the telescopic piece and a second swing rod (1.25) with an end fixedly connected on a rubbing block (1.26), and the first swing rod (1.24) is in sliding connection with the second swing rod (1.25).
10. The crystal lifting and rotating mechanism of the single crystal furnace according to claim 9, wherein a transmission pin (1.250) is fixedly connected to each second swing rod (1.25), and a connecting groove (1.200) matched with the transmission pin (1.250) is formed in each support (1.2).
Priority Applications (1)
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| CN202311332901.6A CN117604619A (en) | 2023-10-16 | 2023-10-16 | Crystal lifting and rotating mechanism of single crystal furnace |
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| CN202311332901.6A CN117604619A (en) | 2023-10-16 | 2023-10-16 | Crystal lifting and rotating mechanism of single crystal furnace |
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| CN102220635A (en) * | 2011-07-13 | 2011-10-19 | 温州永泰电器有限公司 | Seed crystal lifting device for Czochralski monocrystal furnace |
| CN112442733A (en) * | 2020-12-09 | 2021-03-05 | 连城凯克斯科技有限公司 | Seed crystal lifting device without unbalance loading |
| US20220170177A1 (en) * | 2020-11-30 | 2022-06-02 | Jinko Solar Co., Ltd. | Single Crystal Furnace |
| CN114836824A (en) * | 2022-03-29 | 2022-08-02 | 徐州鑫晶半导体科技有限公司 | Seed crystal pulling device, crystal growth equipment and seed crystal pulling method |
| WO2023016436A1 (en) * | 2021-08-12 | 2023-02-16 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning device and wafer turning apparatus thereof |
| CN115821382A (en) * | 2022-12-02 | 2023-03-21 | 衢州晶哲电子材料有限公司 | Production process and equipment of single crystal rod |
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2023
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102220635A (en) * | 2011-07-13 | 2011-10-19 | 温州永泰电器有限公司 | Seed crystal lifting device for Czochralski monocrystal furnace |
| US20220170177A1 (en) * | 2020-11-30 | 2022-06-02 | Jinko Solar Co., Ltd. | Single Crystal Furnace |
| CN112442733A (en) * | 2020-12-09 | 2021-03-05 | 连城凯克斯科技有限公司 | Seed crystal lifting device without unbalance loading |
| WO2023016436A1 (en) * | 2021-08-12 | 2023-02-16 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning device and wafer turning apparatus thereof |
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