CN117555206A - Motion platform acceleration safety protection method and device - Google Patents
Motion platform acceleration safety protection method and device Download PDFInfo
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- 230000001133 acceleration Effects 0.000 title claims abstract description 305
- 238000000034 method Methods 0.000 title claims abstract description 46
- 230000008569 process Effects 0.000 claims description 15
- 230000002459 sustained effect Effects 0.000 claims description 10
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000001259 photo etching Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 102100021641 Acetyl-CoA carboxylase 2 Human genes 0.000 description 2
- 101000677540 Homo sapiens Acetyl-CoA carboxylase 2 Proteins 0.000 description 2
- 101000894929 Homo sapiens Bcl-2-related protein A1 Proteins 0.000 description 2
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
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Abstract
The invention provides a motion platform acceleration safety protection method and a motion platform acceleration safety protection device, wherein the method comprises the following steps: acquiring vertical acceleration data and height data of a motion platform; according to the vertical acceleration data and the altitude data, determining whether the following limiting conditions are met at the same time: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation; if yes, triggering the acceleration protection of the moving table. The invention ensures the reliability of the acceleration detector while ensuring the protection sensitivity of the acceleration, reduces the possibility of false triggering and provides necessary conditions for the safe and stable operation of the photoetching machine.
Description
Technical Field
The invention relates to the technical field of a moving table of a photoetching machine, in particular to a method and a device for protecting acceleration safety of the moving table.
Background
The vertical movement speed of the double workpiece tables of the immersion lithography machine is relatively small, but the stroke is extremely limited. For example, when the silicon wafer is exposed, the distance between the nominal focal plane of the silicon wafer and the immersion head is only 100 mu m, and the distance between the nominal focal plane of the silicon wafer and the planar grating plate is 10mm, if the motion platform is slightly pitching or deforming, scratch and rubbing with other components above the motion platform can occur, so that equipment or materials are damaged, normal production can be influenced, and great economic loss can be caused. Therefore, the design of vertical safety protection of the motion platform is very important.
If the motor driver has some faults, the current change rate is suddenly changed, the acceleration of the moving table is instantaneously increased, the acceleration exceeds the normal movement index of the moving table, even the moving table obtains a larger upward movement speed, and the moving table collides with an upper component. The collision is most likely to occur at the four vertex angles of the moving platform, so the existing acceleration protection method is mainly used for monitoring the vertical acceleration of the four vertex angles of the moving platform, and when the vertical acceleration of any vertex angle exceeds an acceleration threshold value, an acceleration fault is triggered to control the moving platform to stop.
The acceleration protection method of the existing motion platform has two objective defects: (1) the noise effects of the accelerometer sensor itself cause false triggers. Due to noise influence, burrs appear on acceleration data accidentally, and the acceleration data exceeds an acceleration threshold value to cause false triggering, so that normal operation of the motion platform is influenced; (2) the acceleration protection checking function is not turned on at all times. For example, when the motion platform is not fully floated in the initialization process, some jitter may occur, and a large instantaneous acceleration is generated, at this time, if the acceleration protection is in an on state, a fault is misreported, which hinders the normal initialization of the motion platform, so that the acceleration protection checking function is temporarily interrupted due to the temporary closing of the acceleration checker switch, and the software initialization logic is further complicated.
Disclosure of Invention
The invention aims to solve the problems of false triggering and incapability of opening at any time existing in the acceleration protection method of the existing motion platform.
In order to solve the above problems, the present invention provides a motion platform acceleration safety protection method, which includes: acquiring vertical acceleration data and height data of a motion platform; according to the vertical acceleration data and the altitude data, determining whether the following limiting conditions are met at the same time: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation; if yes, triggering the acceleration protection of the moving table.
Optionally, the continuous acceleration limit condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time length is larger than a duration threshold value; the absolute acceleration limit condition is: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold; the height constraint conditions are: the height of the motion stage is greater than a height threshold.
Optionally, the determining whether the continuous acceleration limitation condition is met according to the vertical acceleration data includes: when the vertical acceleration of any vertex angle of the motion platform is larger than the continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing; in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, timing is cleared; and when the time length of the timing is greater than the time length threshold value, determining that the vertical acceleration data of the vertex angle meets the continuous acceleration limiting condition.
Optionally, the determining whether the absolute acceleration limitation condition is met according to the vertical acceleration data includes: if the vertical acceleration of any vertex angle of the motion platform is larger than the absolute acceleration threshold, determining that the vertical acceleration data of the vertex angle meets the absolute acceleration limiting condition.
Optionally, the determining whether the height limitation condition is met according to the height data includes: and if the height of any vertex angle of the motion platform is larger than the height threshold value, determining that the height data of the vertex angle meets the height limiting condition.
Optionally, the vertical acceleration data of the motion stage includes vertical acceleration data of at least one vertex angle of the motion stage; the acceleration direction corresponding to the vertical acceleration data is vertical horizontal surface upward; the height data of the motion stage includes height data of at least one vertex angle of the motion stage.
Optionally, the continuous acceleration threshold para_intacc is determined in the following manner: para_intacc=function_acc+|noise_acc|; the absolute acceleration threshold para_MAXACC is determined in the following manner: para_maxacc=1.25 function_acc; the function_acc is a functional acceleration, and is the maximum value of the ideal vertical acceleration of the motion platform, that is, the actual vertical acceleration value of the motion platform does not exceed the maximum value. noise_acc is acceleration noise.
The invention provides a motion platform acceleration safety protection device, which comprises: the acquisition module is used for acquiring vertical acceleration data and height data of the motion platform; the judging module is used for determining whether the following limiting conditions are met simultaneously according to the vertical acceleration data and the height data: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation; and the protection module is used for triggering the acceleration protection of the moving platform if the movement platform is in the normal state.
Optionally, the continuous acceleration limit condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time length is larger than a duration threshold value; the absolute acceleration limit condition is: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold; the height constraint conditions are: the height of the motion stage is greater than a height threshold.
Optionally, the judging module is specifically configured to: when the vertical acceleration of any vertex angle of the motion platform is larger than the continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing; in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, timing is cleared; and when the time length of the timing is greater than the time length threshold value, determining that the vertical acceleration data of the vertex angle meets the continuous acceleration limiting condition.
Optionally, the judging module is specifically configured to: if the vertical acceleration of any vertex angle of the motion platform is larger than the absolute acceleration threshold, determining that the vertical acceleration data of the vertex angle meets the absolute acceleration limiting condition.
The embodiment of the invention sets three limiting conditions: the continuous acceleration limiting condition, the absolute acceleration limiting condition and the height limiting condition trigger the acceleration protection of the moving table under the condition that the continuous acceleration limiting condition, the absolute acceleration limiting condition and the height limiting condition are simultaneously met, the reliability of the acceleration detector is ensured while the sensitivity of the acceleration protection is ensured, the possibility of false triggering is reduced, and necessary conditions are provided for the safe and stable operation of the photoetching machine.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of a method for protecting acceleration safety of a moving platform according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a time-dependent acceleration curve of a motion platform according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing acceleration of another exercise platform according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a working flow of a motion stage acceleration safety protection method according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of an acceleration safety protection device for a motion platform according to an embodiment of the present invention.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Based on the objective defects of the existing acceleration protection method of the motion platform, the embodiment of the invention provides the acceleration safety protection method capable of avoiding false triggering and protection interruption in the normal working flow of the motion platform.
Fig. 1 is a schematic flow chart of a motion platform acceleration safety protection method according to an embodiment of the present invention, where the motion platform acceleration safety protection method includes the following steps:
s102, acquiring vertical acceleration data and height data of the motion platform.
Because the collision part with other components above the motion platform is most likely at the four vertex angles of the motion platform in the vertical upward running process of the motion platform, the vertical acceleration and the height of the four vertex angles of the motion platform can be monitored. Based on this, the vertical acceleration data of the motion stage may include vertical acceleration data of at least one top corner of the motion stage and the height data of the motion stage may include height data of at least one top corner of the motion stage. The acceleration direction corresponding to the vertical acceleration data is vertical horizontal plane upwards. Illustratively, an acceleration in which the acceleration direction is vertical-horizontal upward is positive, and an acceleration in which the acceleration direction is vertical-horizontal downward is negative.
S104, determining whether the following limiting conditions are met simultaneously according to the vertical acceleration data and the height data: continuous acceleration limit, absolute acceleration limit, and altitude limit. If yes, executing S106; if not, S108 is performed.
Wherein, the continuous acceleration limit condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time is longer than a duration threshold value; the absolute acceleration limit conditions are: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold; the height constraints are: the height of the motion stage is greater than a height threshold.
The continuous acceleration of the motion platform is limited, and the false triggering phenomenon caused by exceeding an acceleration threshold value due to sporadic burrs and jumps of the acceleration counter can be avoided.
The absolute acceleration of the moving table is limited, so that collision possibly caused by the fact that the acceleration of the moving table is larger than the acceleration threshold value can be avoided. The continuous acceleration threshold value adopted by the continuous acceleration limitation is smaller than the absolute acceleration threshold value adopted by the absolute acceleration limitation, so that the problem that the acceleration protection sensitivity is reduced due to the fact that the acceleration threshold value adopted by the absolute acceleration limitation is singly improved is avoided, and the problem of false triggering caused by accidental errors of the accelerometer data can be solved.
The height limitation of the motion platform can avoid the false triggering phenomenon caused by shaking or larger instantaneous acceleration generated by vibration due to other reasons before the motion platform is completely floated in the initialization process. The acceleration protection function of the moving table is not required to be temporarily closed in the initialization process, continuous uninterrupted monitoring can be realized, and software initialization logic can be simplified.
Optionally, the continuous acceleration threshold para_intacc is determined as follows:
para_INTACC＝function_ACC+|noise_ACC|；
the absolute acceleration threshold para_maxacc is determined as follows:
para_MAXACC＝1.25*function_ACC；
wherein function_acc is the functional acceleration and noise_acc is the acceleration noise.
The function_ACC is a function acceleration index of the vertical acceleration of the moving platform, and is the maximum value of the ideal vertical acceleration of the moving platform, namely the actual vertical acceleration value of the moving platform cannot exceed the maximum value. noise_acc is acceleration noise. Referring to the schematic diagram of the motion platform acceleration over time shown in fig. 2, functions_acc, noise_acc, true_acc, para_intacc, and para_maxacc are shown, with functions_acc=1g, noise_acc= ±0.08g, for example.
In order to ensure that the motion platform can meet the normal vertical motion requirement, and considering the existence of accelerometer noise, the method can be as follows: para_intacc=function_acc+|noise_acc|. Considering the 1.25 times of the margin design requirement, it is possible to obtain: para_maxacc=1.25 function_acc.
S106, triggering the acceleration protection of the motion platform.
If the three above-mentioned limitations are satisfied at the same time, i.e. the motion stage exceeds the continuous acceleration limit, the absolute acceleration limit and the height limit at the same time, it means that the motion stage may obtain a larger upward motion speed, and there is a larger risk of collision with the upper component. In this case, the motion stage acceleration protection is triggered, motion failure information of the motion stage is output, and the motion stage is controlled to stop running.
S108, continuing operation.
The motion platform acceleration safety protection method provided by the embodiment of the invention sets three limiting conditions: the continuous acceleration limiting condition, the absolute acceleration limiting condition and the height limiting condition trigger the acceleration protection of the moving table under the condition that the continuous acceleration limiting condition, the absolute acceleration limiting condition and the height limiting condition are simultaneously met, the reliability of the acceleration detector is ensured while the sensitivity of the acceleration protection is ensured, the possibility of false triggering is reduced, and necessary conditions are provided for the safe and stable operation of the photoetching machine.
Each limitation will be described in detail below.
Condition1: the motion stage continues to be acceleration limited.
Referring to the schematic diagram of the acceleration versus time curve of the motion platform shown in fig. 3, two acceleration versus time curves ACC1 and ACC2 are shown. In the figure, the situation that the absolute acceleration para_maxacc is greater than the absolute acceleration para_maxacc (straight line 1 in fig. 2) exists in the area a 1 and the area ACC2, because the burrs generated by noise or vibration are always greater than the threshold value when the acceleration gradually approaches the threshold value, and the burrs belong to the normal phenomenon, and no collision risk exists, if the false triggering is avoided by only increasing the value of the absolute acceleration para_maxacc, the protection effect is greatly reduced, and the contradiction can be well solved by the Condition1, which is as follows:
firstly, when the vertical acceleration of any vertex angle of the motion platform is larger than a continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing; secondly, in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, the timing is cleared; then, when the timing time is longer than the time threshold T, it is determined that the vertical acceleration data of the vertex angle satisfies the continuous acceleration limit condition. Once the acceleration value is smaller than the continuous acceleration threshold para_intacc (straight line 2 in fig. 2) during the timing process, the timing is cleared, and when the timing time is longer than the duration threshold T, namely, condition1 of the vertex angle is satisfied. The duration threshold T can be comprehensively determined according to vibration characteristics of the motion platform and noise of the accelerometer so as to distinguish burrs generated by noise or vibration and actual exceeding of acceleration.
Condition2: absolute acceleration limitation of the motion stage.
If the vertical acceleration of any vertex angle of the motion platform is larger than the absolute acceleration threshold value, determining that the vertical acceleration data of the vertex angle meets the absolute acceleration limiting condition. When the acceleration value of a certain vertex angle of the motion platform is larger than the absolute acceleration threshold para_MAXACC, namely Condition2 of the vertex angle is met. As shown in fig. 3, the absolute acceleration threshold para_maxacc is slightly greater than the continuous acceleration threshold para_intacc, and the specific values of the absolute acceleration threshold para_maxacc and the continuous acceleration threshold para_intacc and the difference therebetween may be comprehensively determined according to the movement range of the movement table and the safety distance between the movement table and the upper component, which is not limited in this embodiment.
The region B shown in fig. 3 shows a case where the acceleration value is greater than the continuous acceleration threshold para_intacc, the duration time is greater than the duration time threshold T, and the acceleration value is greater than the absolute acceleration threshold para_maxacc, that is, conditions 1 and 2 of the vertex angle are both satisfied.
Condition3: the motion stage opens a high limit for acceleration protection.
If the height of any vertex angle of the motion platform is larger than the height threshold value, determining that the height data of the vertex angle meets the height limiting condition. When the height of any vertex angle of the motion platform is larger than the height threshold para_POSACC of the acceleration protection, namely Condition3 of the vertex angle is satisfied. The height threshold may be determined in conjunction with the height reached by the motion stage at the completion of the initialization process.
In summary, the method for protecting the acceleration safety of the moving platform can ensure the acceleration monitoring sensitivity and can not influence the normal working flow of the moving platform.
Fig. 4 is a schematic workflow diagram of a motion platform acceleration safety protection method according to an embodiment of the present invention, including the following steps:
s401, acquiring the vertical acceleration and the height of the motion platform.
S402, starting a timer when the vertical acceleration is larger than the continuous acceleration threshold value.
S403, if the vertical acceleration is smaller than the continuous acceleration threshold once, resetting the timer;
s404, judging whether the timing duration of the timer is greater than a duration threshold. If not, executing S407; if yes, then execution proceeds to S408.
S405, judging whether the vertical acceleration is larger than an absolute acceleration threshold. If not, executing S407; if yes, then execution proceeds to S408.
S406, judging whether the height is larger than a height threshold. If not, executing S407; if yes, then execution proceeds to S408.
S407, continuing operation.
S408, judging whether the continuous acceleration, the absolute acceleration and the altitude limit are met at the same time. If not, executing S407; if yes, S409 is performed.
S409, outputting movement fault information of the movement table, and controlling the movement table to stop running.
The acceleration protection logic provided by the embodiment of the invention can avoid objective defects in the prior art, ensures the reliability of an acceleration detector and reduces the possibility of false triggering while ensuring the acceleration protection sensitivity, and provides necessary conditions for safe and stable operation of the immersion lithography machine.
Fig. 5 is a schematic structural diagram of a motion platform acceleration safety protection device according to an embodiment of the present invention, where the device includes:
the acquisition module 501 is used for acquiring vertical acceleration data and height data of the motion platform;
the judging module 502 is configured to determine, according to the vertical acceleration data and the altitude data, whether the following limiting conditions are satisfied at the same time: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation;
and the protection module 503 is configured to trigger the motion stage acceleration protection if the limiting conditions are simultaneously satisfied.
As a possible embodiment, the continuous acceleration limitation condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time length is larger than a duration threshold value; the absolute acceleration limit condition is: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold; the height constraint conditions are: the height of the motion stage is greater than a height threshold.
As a possible implementation manner, the judging module is specifically configured to: when the vertical acceleration of any vertex angle of the motion platform is larger than the continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing; in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, timing is cleared; and when the time length of the timing is greater than the time length threshold value, determining that the vertical acceleration data of the vertex angle meets the continuous acceleration limiting condition.
As a possible implementation manner, the judging module is specifically configured to: if the vertical acceleration of any vertex angle of the motion platform is larger than the absolute acceleration threshold, determining that the vertical acceleration data of the vertex angle meets the absolute acceleration limiting condition.
As a possible implementation manner, the judging module is specifically configured to: and if the height of any vertex angle of the motion platform is larger than the height threshold value, determining that the height data of the vertex angle meets the height limiting condition.
As a possible implementation manner, the vertical acceleration data of the motion stage includes vertical acceleration data of at least one vertex angle of the motion stage; the acceleration direction corresponding to the vertical acceleration data is vertical horizontal surface upward; the height data of the motion stage includes height data of at least one vertex angle of the motion stage.
As a possible implementation, the continuous acceleration threshold para_intacc is determined as follows: para_intacc=function_acc+|noise_acc|; the absolute acceleration threshold para_MAXACC is determined in the following manner: para_maxacc=1.25 function_acc; the function_acc is a functional acceleration, and is the maximum value of the ideal vertical acceleration of the motion platform, that is, the actual vertical acceleration value of the motion platform does not exceed the maximum value. noise_acc is acceleration noise.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention should be assessed accordingly to that of the appended claims.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. The motion platform acceleration safety protection device disclosed by the embodiment corresponds to the motion platform acceleration safety protection method disclosed by the embodiment, so that the description is simpler, and relevant parts only need to be referred to the description of the method part.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A method for protecting the acceleration safety of a sports table, comprising the steps of:
acquiring vertical acceleration data and height data of a motion platform;
according to the vertical acceleration data and the altitude data, determining whether the following limiting conditions are met at the same time: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation;
if yes, triggering the acceleration protection of the moving table.
2. The method of claim 1, wherein the sustained acceleration limit condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time length is larger than a duration threshold value;
the absolute acceleration limit condition is: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold;
the height constraint conditions are: the height of the motion stage is greater than a height threshold.
3. The method of claim 2, wherein said determining whether a sustained acceleration constraint is met based on said vertical acceleration data comprises:
when the vertical acceleration of any vertex angle of the motion platform is larger than the continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing;
in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, timing is cleared;
and when the time length of the timing is greater than the time length threshold value, determining that the vertical acceleration data of the vertex angle meets the continuous acceleration limiting condition.
4. The method of claim 2, wherein said determining whether an absolute acceleration limit is met based on said vertical acceleration data comprises:
if the vertical acceleration of any vertex angle of the motion platform is larger than the absolute acceleration threshold, determining that the vertical acceleration data of the vertex angle meets the absolute acceleration limiting condition.
5. The method of claim 2, wherein said determining whether a height constraint is met based on said height data comprises:
and if the height of any vertex angle of the motion platform is larger than the height threshold value, determining that the height data of the vertex angle meets the height limiting condition.
6. The method of any one of claims 1-5, wherein the vertical acceleration data of the motion stage comprises vertical acceleration data of at least one apex angle of the motion stage; the acceleration direction corresponding to the vertical acceleration data is vertical horizontal surface upward;
the height data of the motion stage includes height data of at least one vertex angle of the motion stage.
7. The method according to any one of claims 2-5, characterized in that the sustained acceleration threshold para_intacc is determined in the following way:
para_INTACC＝function_ACC+|noise_ACC|；
the absolute acceleration threshold para_MAXACC is determined in the following manner:
para_MAXACC＝1.25*function_ACC；
wherein function_acc is the functional acceleration and noise_acc is the acceleration noise.
8. A motion stage acceleration safety protection device, the device comprising:
the acquisition module is used for acquiring vertical acceleration data and height data of the motion platform;
the judging module is used for determining whether the following limiting conditions are met simultaneously according to the vertical acceleration data and the height data: continuous acceleration limitation, absolute acceleration limitation, and altitude limitation;
and the protection module is used for triggering the acceleration protection of the moving platform if the limiting conditions are met at the same time.
9. The apparatus of claim 8, wherein the sustained acceleration limit condition is: the acceleration of the motion platform is larger than a continuous acceleration threshold value, and the continuous time length is larger than a duration threshold value;
the absolute acceleration limit condition is: the acceleration of the motion platform is larger than an absolute acceleration threshold; the absolute acceleration threshold is greater than the sustained acceleration threshold;
the height constraint conditions are: the height of the motion stage is greater than a height threshold.
10. The apparatus of claim 9, wherein the determining module is specifically configured to:
when the vertical acceleration of any vertex angle of the motion platform is larger than the continuous acceleration threshold value, starting a corresponding vertex angle timer to start timing;
in the timing process, if the vertical acceleration value is smaller than the continuous acceleration threshold value, timing is cleared;
and when the time length of the timing is greater than the time length threshold value, determining that the vertical acceleration data of the vertex angle meets the continuous acceleration limiting condition.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210925878.0A CN117555206A (en) | 2022-08-03 | 2022-08-03 | Motion platform acceleration safety protection method and device |
| PCT/CN2022/115026 WO2024026952A1 (en) | 2022-08-03 | 2022-08-26 | Motion table acceleration safety protection method, and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210925878.0A CN117555206A (en) | 2022-08-03 | 2022-08-03 | Motion platform acceleration safety protection method and device |
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| CN117555206A true CN117555206A (en) | 2024-02-13 |
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| CN202210925878.0A Pending CN117555206A (en) | 2022-08-03 | 2022-08-03 | Motion platform acceleration safety protection method and device |
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| Country | Link |
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| CN (1) | CN117555206A (en) |
| WO (1) | WO2024026952A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2860623B2 (en) * | 1992-10-13 | 1999-02-24 | キヤノン株式会社 | Control device for anti-vibration table |
| JP2005273904A (en) * | 2004-02-24 | 2005-10-06 | Ebara Corp | Vibration-preventing system |
| CN105739245B (en) * | 2014-12-12 | 2018-12-14 | 上海微电子装备（集团）股份有限公司 | A kind of immersion lithographic machine submergence unit collision prevention device and method |
| CN107290932B (en) * | 2016-03-30 | 2020-04-10 | 上海微电子装备（集团）股份有限公司 | Motion platform measurement system and method and motion platform |
| CN210922986U (en) * | 2019-10-08 | 2020-07-03 | 北京艾能控制技术有限公司 | Pressure measuring device with abnormal vibration detection function |
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