CN117548988A - Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film - Google Patents
Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film Download PDFInfo
- Publication number
- CN117548988A CN117548988A CN202311402733.3A CN202311402733A CN117548988A CN 117548988 A CN117548988 A CN 117548988A CN 202311402733 A CN202311402733 A CN 202311402733A CN 117548988 A CN117548988 A CN 117548988A
- Authority
- CN
- China
- Prior art keywords
- light guide
- tool
- hollow
- tubular
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 238000002360 preparation method Methods 0.000 claims abstract description 22
- 238000012545 processing Methods 0.000 claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- 239000002994 raw material Substances 0.000 claims abstract description 12
- 238000002329 infrared spectrum Methods 0.000 claims abstract description 11
- 230000001105 regulatory effect Effects 0.000 claims abstract description 11
- 238000002834 transmittance Methods 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims abstract description 7
- 238000007747 plating Methods 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 35
- 230000008569 process Effects 0.000 claims description 34
- 230000007704 transition Effects 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 239000010453 quartz Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 11
- 230000001427 coherent effect Effects 0.000 claims description 9
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000005554 pickling Methods 0.000 claims description 4
- 230000001276 controlling effect Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 116
- 238000003466 welding Methods 0.000 description 10
- 238000000151 deposition Methods 0.000 description 8
- 239000002131 composite material Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000002253 acid Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910001234 light alloy Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011185 multilayer composite material Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
The invention discloses a preparation process of a tubular tool with large length-diameter ratio for conducting annular light guide films, which comprises the following steps: s100: the mixed gas with high infrared spectrum transmittance is used as a raw material to prepare the hollow tool main pipe. S200: and softening and shrinking the hollow tool main pipe in a negative pressure environment to obtain the target hollow tool main pipe. S300: and performing pressure maintaining drawing on the target hollow tool parent tube, feeding back the inner diameter and the outer diameter of the hollow tubular light guide tube obtained by pressure maintaining drawing through real-time online measurement, regulating and controlling drawing pressure in real time, and finally obtaining a hollow tubular light guide tube finished product with the target size. S400: and (3) plating a metal layer on the inner wall of the hollow tubular light-conducting pipe finished product, and processing an optical outlet structure on the end face of the hollow tubular light-conducting pipe finished product, thereby obtaining the tubular tool with large length-diameter ratio. The invention can prepare the tubular tool with large length-diameter ratio, which is conductive, of the annular light guide film with target size, and the size of the tubular tool with large length-diameter ratio can be quantitatively controlled and is not easy to crack in the preparation process.
Description
Technical Field
The invention relates to the technical field of special processing, in particular to a process for preparing a tubular tool with large length-diameter ratio by conducting an annular light guide film.
Background
The light alloy, the high-temperature alloy and the composite material are widely applied to the fields of medical appliances, aerospace, automobile industry and the like, and the requirements for efficient and nondestructive processing of deep small-hole groove structures on key components of the light alloy, the high-temperature alloy and the composite material are increasing. The laser electrolytic composite processing is based on conventional laser processing, and is cooperated with other energy fields such as a coupling flow field, an electric field and the like to jointly complete the composite energy field processing process of the processed material.
The water-guided laser processing uses jet water beams with diameters below 100 mu m to guide and restrict the propagation path of laser, and is mostly used for cutting low heat affected areas of special alloy and multilayer composite materials, but deep hole and deep groove processing cannot be realized due to flow field interference. The laser electrolytic composite machining of the pipe electrode is realized by transmitting laser by the pipe electrode and introducing an electric field and a flow field to a machining gap at the end part of the pipe electrode, so that the efficient nondestructive machining of a large depth-diameter ratio structure is expected to be realized. In order to integrate a functional structure of coaxial transmission of the photoelectric liquid, the existing pipe electrode is prepared by adopting a mode of coaxial assembly of all structural components, but the deep hole groove processing with the characteristic dimension smaller than 1mm is difficult to realize at present due to the limitations of an assembly gap and a clamping mode. Therefore, the structure of the tube electrode and the preparation process thereof are key factors for limiting the laser electrolytic composite processing capability.
The existing novel tube electrode for coupling and conducting the photoelectric liquid realizes low-loss conduction of pulse laser by means of an annular light guide structure, and is suitable for laser electrolytic composite machining of a micro structure with a large depth-to-diameter ratio. However, the preparation of the multi-layer light pipe-shaped tool with large length-diameter ratio (namely the novel pipe electrode for coupling and conducting the photoelectric liquid) is difficult to realize in the prior art. Firstly, the internal and external roundness of the annular light guide structure is difficult to ensure in the drawing process; secondly, the inner diameter and the outer diameter of the annular light guide structure are difficult to quantitatively control; in addition, there are problems such as easy cracking in the production of the multilayer tubular structure.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a process for preparing a tubular tool with a large length-diameter ratio for conducting an annular light guiding film, which can prepare a tubular tool with a large length-diameter ratio for conducting an annular light guiding film with a target size, wherein the size of the tubular tool with a large length-diameter ratio can be quantitatively controlled and is not easy to crack in the preparation process.
The invention relates to a preparation process of a tubular tool with large length-diameter ratio for conducting an annular light guide film, which comprises the following steps:
s100: preparing a hollow tool main pipe with the same waveguide structural characteristics as the tubular tool with the large length-diameter ratio by taking mixed gas with high infrared spectrum transmittance as a raw material;
s200: softening and shrinking the hollow tool main pipe in a negative pressure environment to obtain a target hollow tool main pipe with low hydroxyl content;
s300: performing pressure maintaining drawing on the target hollow tool main pipe, feeding back the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide pipe obtained by pressure maintaining drawing through real-time online measurement, regulating drawing pressure in real time, and finally obtaining a hollow tubular light guide pipe finished product with a target size;
s400: and plating a metal layer on the inner wall of the hollow tubular light guide pipe finished product, and processing an optical outlet structure on the end surface of the hollow tubular light guide pipe finished product, thereby obtaining the tubular tool with large length-diameter ratio.
In summary, according to the process for preparing the tubular tool with the large length-diameter ratio by conducting the annular light guide film, firstly, the mixed gas with high infrared spectrum transmittance is used as a raw material to prepare a hollow tool main pipe with the same waveguide structural characteristics as the tubular tool with the large length-diameter ratio; then, softening and shrinking the hollow tool main pipe in a negative pressure environment, further reducing the hydroxyl content of the hollow tool main pipe and avoiding cracking; the hollow tool main pipe is softened and contracted to obtain a target hollow tool main pipe; performing pressure maintaining drawing on the target hollow tool main pipe, feeding back the inner diameter and the outer diameter of the hollow tubular light guide pipe obtained by pressure maintaining drawing through real-time online measurement, regulating drawing pressure in real time, and finally obtaining a hollow tubular light guide pipe finished product with a target size; and finally, plating a metal layer on the inner wall of the hollow tubular light guide pipe finished product, and processing an optical outlet structure on the end face of the hollow tubular light guide pipe finished product, thereby obtaining the tubular tool with the large length-diameter ratio, which is conductive by the annular light guide film, of the target size.
According to the preparation process of the annular light guide film conductive large-length-diameter-ratio tubular tool, the annular light guide film conductive large-length-diameter-ratio tubular tool with a target size can be prepared, in the preparation process of the large-length-diameter-ratio tubular tool, the inner diameter, the outer diameter and the wire diameter of the large-length-diameter-ratio tubular tool can be quantitatively controlled, the inner and outer roundness of the medium-large-length-ratio tubular tool in the pressure-keeping drawing process is ensured, and the problem that the large-length-diameter-ratio tubular tool is easy to crack in the preparation process can be avoided.
In some embodiments, in the step S100, the hollow tool mother tube includes, from outside to inside, a prefabricated protecting layer, a buffer layer, a prefabricated outer reflecting layer, a first transition layer, a prefabricated light guiding layer, a second transition layer, and a prefabricated inner reflecting layer.
In some embodiments, the prefabricated light guiding layer thickness is more than 10 times the prefabricated internal reflection layer thickness and the prefabricated external reflection layer thickness, and the prefabricated light guiding layer thickness is not less than 60% of the hollow tool parent tube side wall thickness.
In some embodiments, the prefabricated internal reflection layer has a relative refractive index ranging from-0.95% to-1.2%, the prefabricated external reflection layer has a relative refractive index ranging from-0.95% to-1.2%, and the prefabricated light guide layer has a relative refractive index ranging from 1.02% to 1.28%.
In some embodiments, the infrared spectrum is not less than 94.5% O 2 Gas, geCl 4 Gas, siCl 4 Gas and C 2 F 6 The mixed gas formed by the gases is taken as raw material, O in the mixed gas is regulated 2 Gas, geCl 4 Gas, siCl 4 Gas and C 2 F 6 The buffer layer and the buffer layer are sequentially prepared on the inner wall of the low-hydroxyl quartz base tube by using the plasma chemical vapor deposition process according to the content of the gasThe low-hydroxyl quartz base tube is used as the prefabricated protective layer.
In some embodiments, in the step S200, the negative pressure environment is vented with Cl 2 。
In some embodiments, after the step S200 and before the step S300, the target hollow tool parent pipe is further subjected to a heating straightening and acid washing drying process sequentially.
In some embodiments, in the step S300, the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide tube are visually detected by using coherent light interference, and the pressure value of the target hollow tool parent tube currently being drawn under pressure maintaining is adjusted online according to the outer diameter error and the inner diameter error of the hollow tubular light guide tube, so as to finally obtain the hollow tubular light guide tube finished product with the target size.
In some embodiments, in the step S300, the feeding speed and the drawing speed are optimized offline by comparing the outer diameter and the inner diameter of the hollow tubular light pipe obtained by drawing with the outer diameter and the inner diameter of the target hollow tool parent pipe; recording the size of the hollow tubular light guide pipe and the pressure maintaining drawing parameters to form a preparation process database.
In some embodiments, the large aspect ratio tubular tool has an outer diameter ranging from 200 to 1500 μm and the large aspect ratio tubular tool sidewall thickness comprises 50% to 80% of the tube radius.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic flow diagram of a process for preparing a large aspect ratio tubular tool according to one embodiment of the invention;
FIG. 2 is a schematic view of the structure of a hollow tool box according to one embodiment of the present invention;
FIG. 3 is a schematic illustration of a hollow tool parent tube deposition preparation process according to one embodiment of the present invention;
FIG. 4 is a schematic illustration of a deposition process of an outer reflective layer of a hollow tool master according to one embodiment of the present invention;
FIG. 5 is a schematic illustration of a hollow tool parent pipe light guiding layer deposition process according to one embodiment of the present invention;
FIG. 6 is a schematic illustration of a process for depositing a reflective layer in a hollow tool parent tube in accordance with one embodiment of the present invention;
FIG. 7 is a schematic diagram of a weld preparation process during a target hollow tool parent pipe heating and straightening process in accordance with one embodiment of the present invention;
FIG. 8 is a schematic illustration of a tailpipe welding process during a target hollow tool parent pipe heating and straightening process in accordance with one embodiment of the present invention;
FIG. 9 is a schematic diagram of a weld assembly heating and straightening process during a target hollow tool parent pipe heating and straightening process in accordance with one embodiment of the present invention;
FIG. 10 is a schematic diagram of a pressure maintaining drawing process flow of a hollow tubular light guide pipe and an on-line detection of the inner and outer diameters of the hollow tubular light guide pipe according to an embodiment of the present invention;
FIG. 11 is a schematic representation of the structure of a large aspect ratio tubular tool according to one embodiment of the invention.
Reference numerals:
a hollow tool main 100; a target hollow tool master 100a; prefabricating a protective layer 101; a buffer layer 102; prefabricating an outer reflecting layer 103; a first transition layer 104; a pre-light guiding layer 105; a second transition layer 106; a prefabricated internal reflection layer 107; o2 gas 201; siCl4 gas 202; C2F6 gas 203; geCl4 gas 204; a deposition jig 205; a microwave emitting device 206; a quartz tail tube 301; a ring-shaped torch 302; premix H 2 A valve 303; premix O 2 A valve 304; a welding assembly 305; a graphite platen 306; sealing the pressure control device 401; a dwell draw chuck 402; a drawing assembly 403; a drawing furnace 404; a coherent light source 405; a beam splitter 406; a reflecting mirror 407; a CCD camera 408; interference fringes 409; a process database 410; a pressure reducing valve 411; a metal cathode 501; an internal reflection layer 502; a light guiding layer 503; outer reflective layer504; a protective layer 505; an optical exit structure 506; an elliptical optical outlet 5061; a round optical outlet 5062; parabolic optical outlet 5063.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
The process of preparing a conductive large aspect ratio tubular tool for annular light guiding films according to embodiments of the present invention is described below with reference to fig. 1 to 11.
As shown in fig. 1, the preparation process of the annular light guide film conductive tubular tool with large length-diameter ratio in the embodiment of the invention comprises the following steps:
s100: a hollow tool master 100 having the same waveguide structural characteristics as a large aspect ratio tubular tool was prepared from a mixed gas having high infrared spectral transmittance as a raw material. Here, the high infrared spectrum transmittance means that the infrared spectrum transmittance of each component gas in the mixed gas is not less than 94.5%, and the mixed gas with high infrared spectrum transmittance is used as a raw material to prepare the waveguide structure of the hollow tool main pipe 100, so that the waveguide structure characteristics of the hollow tool main pipe 100 are the same as those of the finally prepared large-length-diameter-ratio tubular tool, and the light guiding requirement of the finally prepared large-length-diameter-ratio tubular tool is met.
S200: and softening and shrinking the hollow tool main pipe 100 in a negative pressure environment to obtain the target hollow tool main pipe 100a. This step can reduce the hydroxyl content and avoid cracking of the target hollow tool master 100a.
S300: and performing pressure maintaining drawing on the target hollow tool master tube 100a, feeding back the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide tube obtained by pressure maintaining drawing through real-time online measurement, regulating and controlling drawing pressure in real time, and finally obtaining a hollow tubular light guide tube finished product with the target size. That is, in the pressure maintaining drawing process of the target hollow tool master 100a, the argon pressure in the target hollow tool master 100a is regulated and controlled in real time according to the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide pipe obtained by the real-time online measurement feedback pressure maintaining drawing, so that the size of the hollow tubular light guide pipe in the pressure maintaining drawing process is quantitatively controlled in real time, and finally, a hollow tubular light guide pipe finished product with the target size is obtained.
S400: the inner wall of the hollow tubular light guide pipe finished product is plated with a metal layer, and the end face of the hollow tubular light guide pipe finished product is processed with an optical outlet structure 506, so that a tubular tool with a large length-diameter ratio is obtained. In the step, the hollow tubular light guide pipe can be firstly cleaned, roughened, sensitized and activated in sequence, and then a metal layer such as silver and the like is plated on the inner wall of the finished product of the hollow tubular light guide pipe to serve as a cathode electrode. And then, processing an optical outlet structure on the end face of the hollow tubular light guide pipe finished product plated with the metal layer so as to meet the light emitting requirement. In machining the optical outlet structure 506 to the end face of the tube, a five-axis precision grinding platform may be used to machine the optical outlet structure 506 to the end face of the finished hollow tubular light guide tube. The optical outlet structure 506 may be a plane, conical surface, cambered surface or the like, and the optical outlet structure 506 may be a rotary optical outlet around the axis of the hollow tubular light guide pipe processing tool, so that focusing or diverging of laser light can be realized. After the step is finished, the tubular tool with large length-diameter ratio and the target size, which is conductive, of the annular light guide film, can be obtained.
Experiments prove that the preparation process can obtain the annular light guide film conductive tubular tool with large length-diameter ratio, wherein the outer diameter range of the tubular tool with large length-diameter ratio is 200-1500 mu m, the thickness of the side wall of the tubular tool with large length-diameter ratio is 50% -80% of the radius of the tube, and the thickness of the light guide layer is not less than 50%.
In summary, in the process for preparing the tubular tool with large length-diameter ratio by conducting the annular light guide film according to the embodiment of the invention, firstly, the mixed gas with high infrared spectrum transmittance is used as a raw material to prepare the hollow tool main pipe 100 with the same waveguide structural characteristics as the tubular tool with large length-diameter ratio; then, softening and shrinking the hollow tool main pipe 100 in a negative pressure environment, further reducing the hydroxyl content of the hollow tool main pipe 100 and avoiding cracking; the hollow tool main pipe 100 is softened and contracted to obtain a target hollow tool main pipe 100a; performing pressure maintaining drawing on the target hollow tool master tube 100a, feeding back the inner diameter and the outer diameter of the hollow tubular light guide tube obtained by pressure maintaining drawing through real-time online measurement, regulating drawing pressure in real time, and finally obtaining a hollow tubular light guide tube finished product with a target size; finally, a metal layer is plated on the inner wall of the hollow tubular light guide pipe finished product, and an optical outlet structure 506 is processed on the end face of the hollow tubular light guide pipe finished product, so that the tubular tool with the large length-diameter ratio and conductive by the annular light guide film with the target size is obtained.
According to the preparation process of the annular light guide film conductive large-length-diameter-ratio tubular tool, the annular light guide film conductive large-length-diameter-ratio tubular tool with a target size can be prepared, in the preparation process of the large-length-diameter-ratio tubular tool, the inner diameter, the outer diameter and the wire diameter of the large-length-diameter-ratio tubular tool can be quantitatively controlled, the inner and outer roundness of the medium-large-length-ratio tubular tool in the pressure-keeping drawing process is ensured, and the problem that the large-length-diameter-ratio tubular tool is easy to crack in the preparation process can be avoided.
In some embodiments, in step S100, the hollow tool master 100 comprises, from outside to inside, a prefabricated protective layer 101, a buffer layer 102, a prefabricated outer reflective layer 103, a first transition layer 104, a prefabricated light guiding layer 105, a second transition layer 106, and a prefabricated inner reflective layer 107. Wherein, prefabricated protective layer 101 and buffer layer 102 can play the guard action to hollow tool parent tube 100, and prefabricated light guiding layer 105 is used for the light guide, and prefabricated outer reflection layer 103 and prefabricated internal reflection layer 107 can make light realize low-loss conduction in prefabricated light guiding layer 105, and first transition layer 104 makes prefabricated outer reflection layer 103 and prefabricated light guiding layer 105 reliably connect, and second transition layer 106 makes prefabricated internal reflection layer 107 and prefabricated light guiding layer 105 reliably connect. Thus, the hollow tool master 100 has waveguide structural features.
In some embodiments, the thickness of the pre-light guiding layer 105 is more than 10 times that of the pre-fabricated inner reflecting layer 107 and the pre-fabricated outer reflecting layer 103, and the thickness of the pre-fabricated light guiding layer 105 is not less than 60% of the thickness of the side wall of the hollow tool mother tube 100, so as to meet the light guiding requirement of the finally prepared tubular tool with large length-diameter ratio.
In some embodiments, the relative refractive index of the prefabricated inner reflective layer 107 ranges from-0.95% to-1.2%, the relative refractive index of the prefabricated outer reflective layer 103 ranges from-0.95% to-1.2%, and the relative refractive index of the prefabricated light guiding layer 105 ranges from 1.02% to 1.28%, so as to meet the light guiding requirements of the finally prepared large-length-to-diameter ratio tubular tool.
In some embodiments, with O 2 Gas 201, geCl 4 Gas 204, siCl 4 Gases 202 and C 2 F 6 The mixed gas formed by the gas 203 is taken as raw material, O in the mixed gas is regulated 2 Gas 201, geCl 4 Gas 204, siCl 4 Gases 202 and C 2 F 6 The content of the gas 203 is that a buffer layer 102, a prefabricated outer reflecting layer 103, a first transition layer 104, a prefabricated light guiding layer 105, a second transition layer 106 and a prefabricated inner reflecting layer 107 are sequentially prepared on the inner wall of a low-hydroxyl quartz substrate tube by using a plasma chemical vapor deposition process, wherein the low-hydroxyl quartz substrate tube is used as a prefabricated protecting layer 101.
Specifically, the structural arrangement of the hollow tool main pipe according to the embodiment of the present invention is described below with reference to fig. 2.
The hollow tool mother tube 100 comprises seven layers of structures from outside to inside, namely a prefabricated protection layer 101, a buffer layer 102, a prefabricated outer reflecting layer 103, a first transition layer 104, a prefabricated light guide layer 105, a second transition layer 106 and a prefabricated inner reflecting layer 107. Wherein the thickness of the pre-light guiding layer 105 is more than 10 times of the thickness of the pre-made inner and outer reflecting layers 103 and 107, and the thickness of the pre-light guiding layer 105 accounts for not less than 60% of the thickness of the side wall of the hollow tool mother tube 100. The buffer layer 102, the first transition layer 104, and the second transition layer 106 of the hollow tool mother tube 100 are used to match the viscosity difference between different doped quartz materials, so that the sediment after the reaction can be fully attached to the inner wall. The relative refractive index of the prefabricated inner and outer reflective layers 103 and 107 ranges from-0.95% to-1.2%, and the relative refractive index of the prefabricated light guide layer 105 ranges from 1.02% to 1.28%.
Referring to fig. 2 to 6, a process of manufacturing the hollow tool master 100 in the embodiment of the present invention will be described.
S101: preparation process for deposition of the hollow tool master 100.
The hollow tool main pipe 100 is prepared by taking the mixed gas of four components as a raw material and adopting a plasma chemical vapor deposition process. The four-component mixed gas comprises O 2 Gas 201, siCl 4 Gas 202, C 2 F 6 Gas 203, geCl 4 Gas 204, p O in this step 2 Gas 201, geCl 4 Gas 204, siCl 4 Gases 202 and C 2 F 6 Detecting the impurity content in the gas 203, and ensuring that the infrared spectrum transmittance of the four gases is more than 94.5%; in the subsequent plasma chemical vapor deposition processes S102, S103, and S104, the deposition fixture 205 clamps the low-hydroxyl quartz substrate tube to rotate around the axis, and the microwave emitting device 206 can reciprocate along the axis of the low-hydroxyl quartz substrate tube, so as to directly couple microwave power into the working area, and complete the reciprocating deposition of the material.
In detail, O 2 The water content in the gas 301 is less than 10ppb, the water content of the rest of the reaction gas is less than 100ppb, the hydroxyl content of the prefabricated protective layer 201 is less than 1ppm, and the heat preservation temperature area is controlled between 1020 ℃ and 1250 ℃.
S102: and (3) an external reflection layer precipitation process.
The buffer layer 102, the prefabricated outer reflection layer 103, and the first transition layer 104 are prepared by adjusting the contents of the components in the mixed gas.
First, by O 2 Gas 201, siCl 4 Gas 202, C 2 F 6 The mixed gas of the gases 203 is used as a raw material, and 30 to 60 layers are deposited on the prefabricated protection layer 101 in a reciprocating manner to form the buffer layer 102.
Then increase C 2 F 6 The flow rate of the gas 203 reduces SiCl 4 The flow of gas 202 reciprocally deposits 320-390 layers on buffer layer 102 to form prefabricated outer reflective layer 103.
Finally, firstly, reducing C 2 F 6 The flow rate of the gas 203 while maintaining SiCl 4 The flow rate of the gas 202 is such that the deposition refractive index approaches that of pure quartz, and 150 to 190 layers are reciprocally deposited on the prefabricated outer reflecting layer 103. Then simultaneously reduce C 2 F 6 Gas 203 and SiCl 4 Flow of gas 202, openGeCl 4 The feed valve for the gas 204 reciprocally deposits 25-60 layers to form the first transition layer 104.
S103: and (3) a light guide layer deposition process.
The flow rates of the respective gases in the mixed gas are adjusted to prepare the pre-light guiding layer 105.
SiCl kept low 4 Gases 202 and C 2 F 6 The flow rate of the gas 203 is kept high to keep GeCl 4 The flow rate of the gas 204 is deposited, and 2650 to 2900 layers are reciprocally deposited on the first transition layer 104, so as to obtain the pre-light guiding layer 105.
S104: and (3) an internal reflection layer deposition process.
The second transition layer 106 and the prefabricated internal reflection layer 107 are prepared by adjusting the respective gas flows in the mixed gas.
First, gradually increase SiCl 4 Gases 202 and C 2 F 6 Flow of gas 203, shut off GeCl 4 The valve of the gas 204 reduces the refractive index of the material to be consistent with that of the prefabricated outer reflecting layer 103, and the material is deposited on the prefabricated light guide layer 105 in a reciprocating manner to form 80-115 layers, so that the second transition layer 106 is obtained.
Then, siCl is enlarged 4 Gases 202 and C 2 F 6 The flow of the gas 203 is stabilized, and 200 to 230 layers are reciprocally deposited on the second transition layer 106, to obtain the prefabricated internal reflection layer 107.
The hollow tool master 100 can be obtained through the above steps.
In some embodiments, in step S200, the negative pressure environment is vented to Cl 2 The hydroxyl content in the hollow tool main pipe 100 can be further reduced, the hollow tool main pipe 100 is prevented from being cracked, and the hollow tool main pipe 100 is protected.
The negative pressure shrinking process of the hollow tool master 100 is described in detail below. And welding quartz tail pipes 301 at two ends of the hollow tool main pipe 100 obtained by the deposition in the step S100, and heating and shrinking the pipe in an electric heating furnace. Connecting the two ends of the welded integral pipe to a vacuum pumping system, and introducing Cl into the welded integral pipe 2 And a negative pressure environment is created, and meanwhile, hydroxyl in the pipe is further eliminated, so that the water peak related loss is reduced. Here, the quartz tail is weldedThe purpose of the tube 301 is to facilitate connection of the hollow tool master 100 to a vacuum system and to facilitate clamping of subsequent processes.
In some embodiments, after step S200 and before step S300, the target hollow tool master 100a is also subjected to a heating straightening and acid-washing drying process sequentially. The pickling and drying process can clean oil films on the pipe walls of the welding assembly 305, particle impurities melted on the surfaces and metal particles introduced by the metal oxyhydrogen burner, and the welding assembly is dried for standby after cleaning.
Specifically, the flow of the heating and straightening process of the target hollow tool master 100a is described below with reference to fig. 7 to 9.
And (5) a welding preparation process. And selecting a quartz tail pipe 301 with the size and specification similar to those of the inner diameter and the outer diameter of the target hollow tool main pipe 100a, measuring the runout of each end, and ensuring that the runout value is not more than 0.3mm.
And (5) tail pipe welding process. The target hollow tool box 100a quartz tail pipe 301 is welded. In the welding process, the annular blast lamp 302 is adopted, the welding end face is preheated, meanwhile, the melting end face is guaranteed to be at a softening temperature at all times, and the influence on the quality of an interface due to the fact that the blast lamp is cooled at the far end due to autorotation is avoided.
In detail, in order to avoid mutual diffusion of layers and accumulated bubbles generated on the wall of the main tube 100a of the target hollow tool, the burning time and flame size should be controlled, in this embodiment, the H is premixed 2 Valve 303 controls the large fire flow value to 120L/min and pre-mixes O 2 Valve 304 controls the high fire flow value of 60L/min.
The weld assembly 305 heats the alignment process. The graphite platen 306 is used to flatten the welded assembly 305 to ensure that no pipe diameter fluctuations are caused by turbulence in the air flow during subsequent manufacturing. Check joint run out is no greater than 0.5mm. Otherwise, the welding assembly 305 is subjected to secondary heating straightening until the runout criteria are met.
The process of acid washing and drying the welded assembly 305 is described below. The pickling and drying is to clean oil film on the pipe wall, particle impurities fused on the surface and metal particles introduced by a metal oxyhydrogen blowtorch, and the cleaning and drying are carried out for standby. The pickling process comprises the following five steps:
in a first step, the inner and outer walls of the weld assembly 305 are cleaned of floating ash impurities using deionized water.
And secondly, performing alkaline washing by using AR-level alkali liquor to remove grease films possibly adhered to the pipe walls.
And thirdly, thoroughly cleaning the alkali liquor remained in the previous step by deionized water.
Fourth step, AR grade HF and HNO are adopted 3 The mixed acid liquid of (2) is subjected to acid washing treatment to remove the particle impurities and metal particles on the shallow surface layer of the pipe wall.
Fifthly, repeatedly cleaning the residual acid liquor on the pipe wall by deionized water, and controlling the pH value to be 6.5-7.0.
The welded assembly 305 is pickled and then dried and then left to stand for the next use.
In some embodiments, in step S300, the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide tube are visually detected by using coherent light interference, so that the inner diameter and the outer diameter of the hollow tubular light guide tube drawn by pressure maintaining can be measured online, and the pressure value in the tube can be adjusted online according to the error, so as to realize the geometric dimension control of the hollow tubular light guide tube.
In some embodiments, in the step S300, the feeding speed and the drawing speed are optimized offline by comparing the outer diameter and the inner diameter of the hollow tubular light pipe obtained by drawing with the outer diameter and the inner diameter of the target hollow tool main pipe; the hollow tubular light guide tube dimensions and dwell draw parameters are recorded to form a manufacturing process database 410.
The following describes the pressure-maintaining drawing process in the preparation flow of the hollow tubular light-conducting tube in the embodiment of the invention, and the principle of online detection of the inner and outer diameters of the hollow tubular light-conducting tube during drawing, with reference to fig. 10.
First, a dry clean draw assembly 403 is held and suspended in a pressure maintaining draw chuck 402. The top of the pressure maintaining drawing chuck 402 is matched through a sealing pressure control device 401, so that the two ends are sealed. In the tube drawing process, ar gas can be blown into the tube by the pressure control device at the top of the wire drawing assembly, and constant pressure is maintained.
Next, after the drawing furnace 404 is preheated to a standby temperature k1=1400 ℃, the above components are fed into the furnace, and after the lower nozzle hovers to the hot zone of the drawing furnace 404, the temperature is raised to k2=2100 ℃.
Again, after heating for T-10 min, the melt-down cone was sheared at the lower port of draw furnace 404, while the furnace temperature was reduced to k3=2000℃.
Then, the method comprises the steps of. When the outer diameter of the material is changed to 2000 mu m, the speed control drawing is carried out, the traction speed is controlled within the range of 2-5 m/min, and the initial rod feeding speed and the traction speed are calculated and preset by comparing the outer diameter of the main pipe of the target hollow tool.
Then, the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide pipe obtained by pressure maintaining and drawing are detected in real time, the pressure value in the pipe is properly regulated by regulating the pressure reducing valve 411, and finally the hollow tubular light guide pipe finished product meeting the size requirement is obtained.
Finally, the hollow tubular light guide tube dimensions and dwell draw parameters are recorded to form a manufacturing process database 410.
In detail, in order to avoid the diameter roundness error of the hollow tubular light guide pipe caused by material stress, the furnace temperature of the drawing furnace 404 is properly reduced to 1960 ℃ to ensure that the roundness error is not more than 3%.
In detail, in this embodiment, the inner and outer diameters of the hollow tubular light guide pipe electrode are measured on line by interference fringes 409. The output laser of the coherent light source 405 is split into two beams of coherent light by the beam splitter 406, one beam of the two beams of coherent light wraps the beam splitter and passes through the hollow tubular light guide pipe, and the other beam of coherent light reflected by the reflector 407 is subjected to coherent interference. The interference fringes 409 are captured by using a CCD camera 408 and calibrated in an industrial computer to obtain the real-time inner diameter, outer diameter and wire diameter of the hollow tubular light guide pipe.
In some embodiments, the large aspect ratio tubular tool has an outer diameter ranging from 200 to 1500 μm and the large aspect ratio tubular tool sidewall thickness is 50% to 80% of the tube radius.
Specifically, the metal cathode 501 and the optical outlet structure 506 of the large aspect ratio tubular tool and the process for preparing the same in the embodiments of the present invention are described below with reference to fig. 1 and 11.
As shown in fig. 11, the tubular tool with a large length-diameter ratio is provided with a protective layer 505, an outer reflective layer 504, a light guiding layer 503, an inner reflective layer 502, and a metal cathode 501 from outside to inside. And an optical outlet structure 506 is processed at the outlet, and the longitudinal section of the optical outlet structure 506 can be a plane, a conical surface or an aspheric surface and the like, and can also be an elliptical optical outlet 5061, a circular optical outlet 5062 and a parabolic optical outlet 5063.
In detail, the metal cathode 501 of the large aspect ratio tubular tool is prepared in electroless silver plating solution to a thickness of not less than 15 μm. The outer diameter range of the tubular tool with large length-diameter ratio is 200-1500 mu m, the thickness of the side wall accounts for 50% -80% of the radius of the tube, and the thickness of the light guide layer accounts for not less than 50% of the thickness of the side wall.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. The preparation process of the annular light guide film conductive tubular tool with large length-diameter ratio is characterized by comprising the following steps of:
s100: preparing a hollow tool main pipe with the same waveguide structural characteristics as the tubular tool with the large length-diameter ratio by taking mixed gas with high infrared spectrum transmittance as a raw material;
s200: softening and shrinking the hollow tool main pipe in a negative pressure environment to obtain a target hollow tool main pipe with low hydroxyl content;
s300: performing pressure maintaining drawing on the target hollow tool main pipe, performing real-time online measurement feedback pressure maintaining drawing to obtain the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide pipe, and regulating drawing pressure in real time to finally obtain a hollow tubular light guide pipe finished product with a target size;
s400: and plating a metal layer on the inner wall of the hollow tubular light guide pipe finished product, and processing an optical outlet structure on the end surface of the hollow tubular light guide pipe finished product, thereby obtaining the tubular tool with large length-diameter ratio.
2. The process for preparing a tubular tool with a large length-diameter ratio for conducting an annular light guiding film according to claim 1, wherein in the step S100, the hollow tool main pipe comprises a prefabricated protecting layer, a buffer layer, a prefabricated outer reflecting layer, a first transition layer, a prefabricated light guiding layer, a second transition layer and a prefabricated inner reflecting layer from outside to inside.
3. The process for preparing the tubular tool with the large length-diameter ratio by conducting the annular light guide film according to claim 2, wherein the thickness of the prefabricated light guide layer is more than 10 times of the thickness of the prefabricated internal reflection layer and the thickness of the prefabricated external reflection layer, and the thickness of the prefabricated light guide layer is not less than 60% of the thickness of the side wall of the main tube of the hollow tool.
4. The process for preparing a tubular tool with a large length-diameter ratio by conducting an annular light guide film according to claim 2, wherein the relative refractive index of the prefabricated internal reflection layer ranges from-0.95% to-1.2%, the relative refractive index of the prefabricated external reflection layer ranges from-0.95% to-1.2%, and the relative refractive index of the prefabricated light guide layer ranges from 1.02% to 1.28%.
5. The process for preparing a tubular tool with a large length-diameter ratio by conducting an annular light guide film according to claim 2, wherein the O with infrared spectrum transmittance is not less than 94.5% 2 Gas, geCl 4 Gas, siCl 4 Gas and C 2 F 6 The mixed gas formed by the gases is taken as raw material, and is regulatedO in mixed gas 2 Gas, geCl 4 Gas, siCl 4 Gas and C 2 F 6 And sequentially preparing the buffer layer, the prefabricated outer reflecting layer, the first transition layer, the prefabricated light guide layer, the second transition layer and the prefabricated inner reflecting layer on the inner wall of the low-hydroxyl quartz base tube by using a plasma chemical vapor deposition process, wherein the low-hydroxyl quartz base tube is used as the prefabricated protecting layer.
6. The process for preparing a conductive tubular tool with large length-diameter ratio by using an annular light guide film according to claim 1, wherein in the step S200, cl is introduced into the negative pressure environment 2 。
7. The process for preparing a tubular tool with a large length-to-diameter ratio by conducting an annular light guide film according to claim 1, wherein the process further comprises the steps of heating, straightening, pickling and drying the target hollow tool parent tube sequentially after the step S200 and before the step S300.
8. The process for manufacturing a tubular tool with a large length-diameter ratio according to claim 1, wherein in the step S300, the inner diameter, the outer diameter and the wire diameter of the hollow tubular light guide tube are visually detected by using coherent light interference, and the pressure value of the target hollow tool parent tube currently being subjected to pressure maintaining drawing is adjusted on line according to the outer diameter error and the inner diameter error of the hollow tubular light guide tube, so as to finally obtain the hollow tubular light guide tube finished product with the target size.
9. The process for preparing a tubular tool with a large length-diameter ratio for conducting an annular light guide film according to claim 1, wherein in the step S300, the feeding speed and the drawing speed are optimized offline by comparing the outer diameter and the inner diameter of the hollow tubular light guide tube obtained by drawing with the outer diameter and the inner diameter of the main tube of the target hollow tool; recording the size of the hollow tubular light guide pipe and the pressure maintaining drawing parameters to form a preparation process database.
10. The process for preparing a tubular tool with a large length-diameter ratio for conducting annular light guide films according to any one of claims 1 to 9, wherein the tubular tool with the large length-diameter ratio has an outer diameter ranging from 200 μm to 1500 μm, and the thickness of the side wall of the tubular tool with the large length-diameter ratio accounts for 50% -80% of the radius of the tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311402733.3A CN117548988A (en) | 2023-10-26 | 2023-10-26 | Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311402733.3A CN117548988A (en) | 2023-10-26 | 2023-10-26 | Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117548988A true CN117548988A (en) | 2024-02-13 |
Family
ID=89810120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311402733.3A Pending CN117548988A (en) | 2023-10-26 | 2023-10-26 | Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117548988A (en) |
-
2023
- 2023-10-26 CN CN202311402733.3A patent/CN117548988A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6779362B2 (en) | Method of making an optical fiber preform where a second elongation is based on a mark on a glass rod | |
| CN103922579B (en) | A kind of method manufacturing optical fiber prefabricating plug with Correction and Control based on the maintenance of base tube external diameter | |
| CN109837497A (en) | A kind of central coaxial powder feeding formula supersonic speed laser spraying method | |
| CN108675626A (en) | A kind of preform casing methods reducing stick area within a jurisdiction face impurity and hydroxy radical content | |
| US6742363B1 (en) | Straightening a glass rod for use in making an optical fiber preform | |
| CN109207905B (en) | Method and device for preparing titanium alloy blade water erosion resistant layer in partition mode through laser nitridation based on scanning galvanometer | |
| CN110499503A (en) | Coaxial powder-feeding cladding head light channel structure and processing method in a kind of efficient dual-beam light | |
| CN117548988A (en) | Process for preparing tubular tool with large length-diameter ratio by conducting annular light guide film | |
| KR102318786B1 (en) | High-strength welding process for making heavy glass preforms with large cross sectional areas | |
| CN213447303U (en) | Cooling device for laser strengthening plug | |
| CN203866200U (en) | Optical fiber prefabricated mandrel manufacture device based on parent tube external diameter maintaining and correcting control | |
| CN113548796B (en) | Optical fiber perform's deposition equipment | |
| US9828279B2 (en) | Method and device for manufacturing an optical preform by means of an internal vapour deposition process, and a corresponding substrate tube assembly | |
| US20210252639A1 (en) | Methods of additive manufacturing for glass structures | |
| CN113584474A (en) | Wear-resistant alloy laser cladding method for inner hole | |
| CN101717933A (en) | Cladding head with pollution prevention function of focusing device | |
| US4601740A (en) | Methods of and apparatus for at least partially closing an end portion of an optical preform tube | |
| CN218860890U (en) | High-speed laser cladding machine tool | |
| CN116529212A (en) | Smokeless manufacturing process for preform of structured optical fiber | |
| KR100619342B1 (en) | Method of manufacturing optical fiber in mcvd | |
| CN114057386A (en) | Processing device system and surface processing method for obtaining specified geometric dimension energy transmission optical fiber preform | |
| CN111770903A (en) | Device for impact orientation of tubular preform of optical fiber body | |
| JP2005170759A (en) | Raw material gas jetting apparatus, method of holding center pipe and method of manufacturing glass particle deposited body |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |