CN114057386A - Processing device system and surface processing method for obtaining specified geometric dimension energy transmission optical fiber preform - Google Patents
Processing device system and surface processing method for obtaining specified geometric dimension energy transmission optical fiber preform Download PDFInfo
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- CN114057386A CN114057386A CN202111611918.6A CN202111611918A CN114057386A CN 114057386 A CN114057386 A CN 114057386A CN 202111611918 A CN202111611918 A CN 202111611918A CN 114057386 A CN114057386 A CN 114057386A
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- fiber preform
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01225—Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing
- C03B37/01257—Heating devices therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01225—Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing
- C03B37/01228—Removal of preform material
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Abstract
The invention provides a processing device system and a surface processing method for obtaining an energy transmission optical fiber perform rod with a specified geometric dimension, wherein the device system comprises a machine tool processing unit and an optical fiber perform rod to-be-processed unit; the unit to be processed of the optical fiber preform rod comprises a preform rod combined sleeve and a three-jaw sleeve sealing ring combined device; the machine tool machining unit comprises a glass machining lathe, a diameter control device and a tail gas exhaust device. The device system provided by the invention can solve the problem of poor uniformity of the geometric dimension of the existing grinding treatment technology by carrying out sectional quantitative treatment on the surface of the optical fiber perform; the problem of cracking is solved without applying stress to the rod body; the control precision is improved by monitoring the outer diameter of the preform on line, and meanwhile, solid waste is not generated.
Description
Technical Field
The invention belongs to the field of energy transmission optical fiber perform production equipment, relates to a device system for processing an energy transmission optical fiber perform, and particularly relates to a processing device system and a surface processing method for obtaining an energy transmission optical fiber perform with a specified geometric dimension.
Background
The optical fiber has the characteristics of strong anti-interference capability, low loss, large information capacity and the like, is generally regarded in the fields of military and civil communication and sensing, and is widely applied.
The energy transmission optical fiber with the large core diameter can flexibly and safely transmit high-power laser in a three-dimensional complex space, and can transmit higher laser energy under the condition of ensuring that the optical fiber is not damaged, so that the application requirement is met. The laser has the advantages of high conversion efficiency, large gain coefficient, large output power and the like, is widely applied to the industrial processing fields of material surface heat treatment, welding, cutting and the like, and also is widely applied to the medical and sanitary fields of ophthalmology, dermatology operation, internal operation and the like. The development of energy-transmitting optical fibers for transmitting high-power optical radiation lasers is therefore becoming increasingly important.
The strength and the loss of the optical fiber are main performance parameters, and the quality of the strength of the optical fiber directly influences the reliability of a system where the optical fiber is located; especially when the optical fiber is used in military field, the optical fiber has severe working environment, large bearing stress, long storage period and severe requirement on the strength of the optical fiber, so that the high-strength optical fiber is required to be selected and used in the application occasions of wired guidance, military submarine cables, field optical cables and the like which work in special environment and severe condition. To realize optical fiber communication and optical fiber laser or amplification, the loss of the optical fiber needs to be reduced as much as possible, and the level of the loss of the optical fiber directly affects the distance of transmission distance or relay station spacing distance in communication application and the laser efficiency in laser application. Therefore, the loss of the optical fiber is reduced, and the important practical significance is achieved.
The optical fiber preform is the core raw material for manufacturing the quartz optical fiber, the diameter of the preform is generally several millimeters to several tens of millimeters, the internal structure of the optical fiber is formed in the preform, the manufacture of the preform is the most important part in the optical fiber process, and the research and the improvement on the manufacturing technology of the optical fiber preform never have been interrupted since the optical fiber is produced in a large scale from the end of the 70 s of the 20 th century.
There are various methods for manufacturing the light bar, and the commonly used manufacturing process is a gas phase oxidation method. In the vapor phase oxidation process, high purity metal halide vapor and oxygen react to form oxide particles which are deposited on the surface of a glass or quartz body (or the inner wall of a tubular body) and then sintered to form a transparent glass rod.
CN 205528425U discloses an optical fiber preform processing apparatus, the apparatus includes a lathe platform, two ends of the lathe platform are respectively provided with a seat frame, at least one seat frame is a movable seat frame, the inner sides of the two seat frames are respectively provided with a coaxial rotary chuck correspondingly, the lathe platform is provided with a movable sliding table, the movable sliding table is provided with a combustion blowtorch, and the lathe platform or the movable sliding table is provided with a correction device. The device can carry out axial correction and surface polishing on the optical fiber preform, and improve the strength and the strength stability of the optical fiber preform.
CN 103663988A discloses a mixed acid for surface treatment of optical fiber preform and a treatment method, the adopted surface treatment method is: firstly, processing a depressed layer and a microcrack layer on the surface of a finely ground preform by using mixed acid within a certain temperature range, then polishing the preform, and finally processing the polished preform by using diluted mixed acid. The treatment method can remove micro-cracks and impurity ions on the surface of the optical fiber preform.
CN 109553295a discloses a large-size low-loss optical fiber preform and a manufacturing method thereof, the manufacturing method comprises: preparing an optical fiber core rod by using a VAD (vapor deposition) process, wherein a core layer and an inner cladding layer are sequentially arranged inside and outside the optical fiber core rod; depositing a barrier layer loose body outside the optical fiber core rod by using an OVD (optical vapor deposition) process, and then sintering to obtain a synthetic core rod; and combining the synthesis core rod and the melting sleeve into a large-size low-loss optical fiber preform by using an RIC process.
The above method deals with the strength and the loss resistance of the optical fiber preform, but a method for preparing energy-transmitting optical fiber preforms of various sizes is not proposed.
In order to obtain an energy-transmitting optical fiber preform with a specified energy-transmitting geometric size, the outer surface of the preform is usually ground, and the grinding treatment is usually accompanied with the defects of poor grinding uniformity, inconsistent grinding quantity uniformity at different positions of the preform, easy eccentricity and the like, so that the uniformity of the core diameter of a drawn optical fiber is poor, and even an optical fiber with an unqualified core diameter is generated to bring direct loss; the possibility of cracking; the precision control is difficult, and the precision of the grinding control cannot reach the control level of 10 micrometers; on-line monitoring is difficult, and real-time monitoring of the geometric dimension of the outer surface in the treatment process is complicated because the grinding process can simultaneously generate quartz waste.
Therefore, it is an object of the present invention to provide a method for processing a preform, which overcomes the above-mentioned shortcomings and solves the problems of the prior art, such as poor uniformity of the outer surface geometry of the preform, possible crack, difficult precision control, and difficult on-line monitoring, and generation of solid waste quartz.
Disclosure of Invention
The invention aims to provide a processing device system and a surface processing method for obtaining an energy transmission optical fiber preform with a specified geometric dimension. The problem of poor geometric size uniformity of the existing grinding treatment technology can be solved by carrying out sectional quantitative treatment on the surface of the optical fiber preform; the problem of cracking is solved without applying stress to the rod body; the control precision is improved by monitoring the outer diameter of the preform on line, and meanwhile, solid waste is not generated.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a processing device system for obtaining an energy transmission optical fiber preform with a specified geometric dimension, which comprises a machine tool processing unit and an optical fiber preform to-be-processed unit;
the unit to be processed of the optical fiber preform rod comprises a preform rod combined sleeve and a three-jaw sleeve sealing ring combined device;
the machine tool machining unit comprises a glass machining lathe, a diameter control device and a tail gas exhaust device.
The device system realizes the surface quantitative etching treatment of the optical fiber preform by designing a combined system which consists of a three-jaw sleeve sealing ring combined fixing device, a glass base tube, a glass processing lathe, a diameter control system comprising a heating electric furnace and an industrial camera, and a tail gas exhaust system device.
Preferably, the preform assembly sleeve comprises an optical fiber preform and a glass substrate tube.
Preferably, the glass-based tube is looped around the outside of the optical fiber preform.
Preferably, the material of the glass substrate tube comprises quartz.
The glass base tube of the invention adopts a high temperature resistant thick-wall transparent quartz sleeve, and can be used as a sealing main material and an etching reaction cavity.
Preferably, the three-jaw sleeve sealing ring combination device is arranged at two ends of the preform combination sleeve.
Preferably, the three-jaw sleeve sealing ring combination device is used for fixing a preform combination sleeve.
Preferably, the three-jaw sleeve sealing ring combination device comprises a three-jaw sleeve and a sealing ring.
Preferably, the three-jaw sleeve is arranged between the optical fiber preform and the sealing ring.
Preferably, the sealing ring is arranged between the three-jaw sleeve and the glass base tube.
Preferably, the material of the sealing ring comprises polytetrafluoroethylene or perfluoroether rubber.
The optical fiber preform and the glass base tube are combined into a whole through a three-jaw sleeve sealing ring combination device. The optical fiber perform rod and the glass base tube can realize coaxial and synchronous rotation.
Preferably, a rail is arranged at the middle position of the glass processing lathe.
Preferably, a sliding table is arranged on the track.
Preferably, a diameter control device is arranged on the sliding table.
Preferably, the diameter control means comprises a heating furnace and an industrial camera.
Preferably, the heating electric furnace comprises a resistance furnace.
Preferably, the industrial camera is disposed on a mounting platform of the electric heating furnace.
The diameter control device reciprocates through the sliding table and is positioned above a machine tool, the diameter control system receives and processes monitoring data of an industrial camera to realize online monitoring of the outer surface size of the prefabricated rod, and the temperature and the traveling speed of the electric heating furnace are manually adjusted through monitoring values to realize segmented quantitative etching of the outer surface of the prefabricated rod.
Preferably, the two ends of the glass processing lathe are respectively provided with a chuck.
Preferably, the chuck is used to fix the optical fiber preform treating unit.
Preferably, the tail gas exhaust device is arranged at the tail part of the glass processing lathe.
Preferably, the tail gas updraft ventilator is including tail pressure table, filter and updraft ventilator of installing the setting in proper order.
The tail pressure gauge is used for detecting the pressure inside the unit to be processed of the optical fiber preform rod, and the filter is used for filtering waste materials, so that harmful waste materials are prevented from being discharged outside without being processed, and the body health of operators is prevented from being influenced.
In a second aspect, the present invention provides a method for surface treatment using the apparatus system provided in the first aspect, the method for surface treatment comprising the steps of:
(1) mounting an optical fiber preform rod to-be-processed unit on a glass processing lathe, and rotating and heating to obtain a processed optical fiber preform rod;
(2) etching the optical fiber preform obtained by the step (1) to obtain an energy transfer optical fiber preform with a specified geometric size and reaction waste gas;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
Before the surface treatment, the invention also comprises the process of cleaning and drying the optical fiber perform so as to avoid the deterioration of etching precision and uniformity and the influence on the surface cleanliness of the perform.
Preferably, the rotation speed of the rotation in step (1) is 10-20r/min, such as 10r/min, 11r/min, 12r/min, 13r/min, 14r/min, 15r/min, 16r/min, 17r/min, 18r/min, 19r/min or 20r/min, but not limited to the enumerated values, and other unrecited values in the numerical range are also applicable.
Preferably, the heating temperature in step (1) is 800-1100 ℃, for example 800 ℃, 850 ℃, 930 ℃, 1000 ℃, 1060 ℃ or 1100 ℃, but not limited to the recited values, and other values not recited in the numerical range are equally applicable.
Preferably, the gas used in the etching process in step (2) includes a mixed gas of a fluorine-containing gas and oxygen.
Preferably, the fluorine-containing gas comprises any one of or a combination of at least two of carbon tetrafluoride, hexafluoroethane or trifluoromethane, typical but non-limiting combinations include a combination of carbon tetrafluoride and hexafluoroethane, a combination of hexafluoroethane and trifluoromethane, a combination of carbon tetrafluoride and trifluoromethane, or a combination of carbon tetrafluoride, hexafluoroethane and trifluoromethane.
Preferably, the fluorine-containing gas has a gas flow rate of 30-50sccm, such as 30sccm, 32sccm, 34sccm, 36sccm, 38sccm, 40sccm, 42sccm, 44sccm, 46sccm, 48sccm, or 50sccm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the oxygen gas has a gas flow rate of 30-60sccm, such as 30sccm, 33sccm, 36sccm, 39sccm, 41sccm, 44sccm, 47sccm, 50sccm, 53sccm, 56sccm, or 60sccm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the pressure during the etching process is-10 to-5 Pa, and may be, for example, -10Pa, -9Pa, -8Pa, -7Pa, -6Pa or-5 Pa, but is not limited to the recited values, and other values not recited within the range of values are equally applicable.
The etching pressure is-10 to-5 Pa, too high pressure can cause too high pumping force in the tube and poor rod out-of-roundness, and too low pressure can cause waste material accumulation to influence the etching precision and uniformity.
Preferably, the method further comprises removing the reaction off-gas using an off-gas draft.
As a preferable aspect of the surface treatment method according to the second aspect of the present invention, the surface treatment method according to the present invention includes the steps of:
(1) installing a unit to be processed of the optical fiber preform on a glass processing lathe, rotating at the rotating speed of 10-20r/min and heating to 800-;
(2) etching the optical fiber preform obtained by the step (1) under the pressure of-10 to-5 Pa to obtain an energy transmission optical fiber preform with a specified geometric size and reaction waste gas; the gas adopted in the etching process comprises a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30-50 sccm; the gas flow rate of the oxygen is 30-60 sccm;
(3) removing reaction waste gas by using a tail gas exhaust device;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
The recitation of numerical ranges herein includes not only the above-recited numerical values, but also any numerical values between non-recited numerical ranges, and is not intended to be exhaustive or to limit the invention to the precise numerical values encompassed within the range for brevity and clarity.
Compared with the prior art, the invention has the following beneficial effects:
(1) the surface treatment method provided by the invention adopts a chemical vapor etching method to realize the surface sectional quantitative treatment of the energy-transfer optical fiber perform;
(2) the device system provided by the invention adopts a diameter control system with an industrial camera to realize the online monitoring of the outer diameter of the energy-transfer optical fiber preform;
(3) the device system provided by the invention adopts the high-temperature-resistant thick-wall transparent sleeve as the sealing main material and the reaction cavity, so that the external air is not polluted, and the body health of operators is not influenced;
(4) the invention adopts the resistance furnace as the temperature control heat source, can provide uniform and stable heating temperature and is easy to control the temperature.
Drawings
FIG. 1 is a side view of a unit for treating an optical fiber preform according to example 1 of the present invention;
FIG. 2 is a sectional view of a unit for treating an optical fiber preform according to example 1 of the present invention;
fig. 3 is a schematic structural diagram of a machine tool processing unit according to embodiment 1 of the present invention.
Wherein, 1 is a three-jaw sleeve, 2 is an optical fiber perform, and 3 is a seal ring; 4 is a glass parent tube, 5 is a glass processing lathe, 6 is an industrial camera, 7 is a heating electric furnace, 8 is a tail pressure gauge, 9 is a filter and 10 is an air draft device.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
Example 1
The embodiment provides a processing device system for obtaining an energy transmission optical fiber preform with a specified geometric dimension, which comprises a machine tool processing unit and an optical fiber preform to-be-processed unit, wherein the machine tool processing unit is shown in FIG. 3; the unit to be processed of the optical fiber preform rod comprises a preform rod combined sleeve and a three-jaw sleeve sealing ring combined device; the machine tool machining unit comprises a glass machining lathe 5, a diameter control device and a tail gas exhaust device.
The unit for treating an optical fiber preform is shown in fig. 1 in a side view and in fig. 2 in a sectional view.
The prefabricated rod combined sleeve comprises an optical fiber prefabricated rod 2 and a glass base tube 4; the glass base tube 4 is sleeved outside the optical fiber perform 2; the glass base tube is made of quartz.
The three-jaw sleeve sealing ring combination device is arranged at two ends of the prefabricated rod combination sleeve; the three-jaw sleeve sealing ring combination device is used for fixing a prefabricated rod combination sleeve.
The three-jaw sleeve sealing ring combination device comprises a three-jaw sleeve 1 and a sealing ring 3; the three-jaw sleeve 1 is arranged between the optical fiber perform 2 and the sealing ring 3; the sealing ring 3 is arranged between the three-jaw sleeve 1 and the glass base tube 4; the sealing ring 3 is made of polytetrafluoroethylene.
A track is arranged at the middle position of the glass processing lathe 5; a sliding table is arranged on the track; and a diameter control device is arranged on the sliding table.
The diameter control device comprises a heating electric furnace 7 and an industrial camera 6; the electric heating furnace 7 is a resistance furnace; the industrial camera 6 is arranged on a mounting platform of the electric heating furnace 7.
The two ends of the glass processing lathe 5 are respectively provided with a chuck; the chuck is used for fixing the optical fiber preform rod unit to be processed.
The tail gas exhaust device is arranged at the tail part of the glass processing lathe 5; the tail gas exhaust device comprises a tail pressure gauge 8, a filter 9 and an exhaust device 10 which are sequentially arranged.
Example 2
This example provides a processing apparatus system for obtaining an energy-transmitting optical fiber preform of a given geometry, which is the same as that of example 1 except that an exhaust gas draft device is provided at the head of a glass processing lathe 5.
Example 3
This example provides a processing apparatus system for obtaining an energy-transmitting optical fiber preform of a given geometry, which is the same as that of example 1 except that the filter 9 is omitted.
Application example 1
The present application example provides a method for performing surface treatment by using the treatment apparatus system for obtaining an energy transmission optical fiber preform with a specified geometric dimension provided in example 1, wherein the surface treatment method comprises the following steps:
(1) installing a unit to be processed of the optical fiber preform on a glass processing lathe, rotating at the rotating speed of 15r/min and heating to 960 ℃, and then obtaining a processed optical fiber preform;
(2) etching the optical fiber preform obtained by the step (1) under the pressure of-7 Pa to obtain an energy transfer optical fiber preform with a specified geometric size and reaction waste gas; the gas adopted in the etching process comprises a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 40 sccm; the gas flow rate of the oxygen gas is 50 sccm;
(3) removing reaction waste gas by using a tail gas exhaust device;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
Application example 2
The present application example provides a method for performing surface treatment by using the treatment apparatus system for obtaining an energy transmission optical fiber preform with a specified geometric dimension provided in example 1, wherein the surface treatment method comprises the following steps:
(1) installing a unit to be processed of the optical fiber preform on a glass processing lathe, rotating at the rotating speed of 10r/min and heating to 800 ℃ to obtain a processed optical fiber preform;
(2) etching the optical fiber preform obtained in the step (1) under the pressure of-5 Pa to obtain an energy transfer optical fiber preform with a specified geometric size and reaction waste gas; the gas adopted in the etching process comprises a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30 sccm; the gas flow rate of the oxygen gas is 30 sccm;
(3) removing reaction waste gas by using a tail gas exhaust device;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
Application example 3
The present application example provides a method for performing surface treatment by using the treatment apparatus system for obtaining an energy transmission optical fiber preform with a specified geometric dimension provided in example 1, wherein the surface treatment method comprises the following steps:
(1) installing a unit to be processed of the optical fiber preform on a glass processing lathe, rotating at the rotating speed of 20r/min and heating to 1100 ℃, and then obtaining a processed optical fiber preform;
(2) etching the optical fiber preform obtained in the step (1) under the pressure of-10 Pa to obtain an energy transfer optical fiber preform with a specified geometric size and reaction waste gas; the gas adopted in the etching process comprises a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 50 sccm; the gas flow rate of the oxygen gas is 60 sccm;
(3) removing reaction waste gas by using a tail gas exhaust device;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
Application example 4
The application example provides a method for performing surface treatment by adopting the treatment device system for obtaining the energy-transmitting optical fiber preform with the specified geometric dimension, which is provided by the embodiment 1, wherein the surface treatment method is the same as the application example 1 except that the heating temperature in the step (1) is changed to 1200 ℃.
By adopting the method of the application example to carry out surface treatment, the diameter of the obtained energy transmission optical fiber preform with the specified geometric dimension is thinner than the required diameter, so that the increase of the heating temperature can increase the etching amount in unit time, deteriorate the etching precision and increase the control difficulty.
Application example 5
The application example provides a method for performing surface treatment by adopting the treatment device system for obtaining the energy-transmitting optical fiber preform with the specified geometric dimension, which is provided by the embodiment 1, wherein the surface treatment method is the same as the application example 1 except that the heating temperature in the step (1) is changed to 750 ℃.
By adopting the method of the application example to carry out surface treatment, the processing time of the energy transmission optical fiber preform with the specified geometric dimension is increased, so that the time required by the etching reaction is increased and the reaction efficiency is reduced due to the reduction of the heating temperature.
Application example 6
The application example provides a method for performing surface treatment by adopting the treatment device system for obtaining the energy transmission optical fiber preform with the specified geometric dimension, which is provided by the embodiment 1, wherein the surface treatment method is the same as the application example 1 except that the etching pressure in the step (2) is changed into-2 Pa.
By adopting the method of the application example to carry out surface treatment, the obtained energy transmission optical fiber preform with the specified geometric dimension has larger deviation than the specified dimension, the reasons are that the reaction waste is accumulated to result in larger diameter detection error due to insufficient draft, and the etching uniformity is poor due to uneven distribution of the waste in the tube, so that the etching precision and uniformity are poor due to the improvement of the etching pressure.
Application example 7
The application example provides a method for performing surface treatment by adopting the treatment device system for obtaining the energy transmission optical fiber preform with the specified geometric dimension, which is provided by the embodiment 1, wherein the surface treatment method is the same as the application example 1 except that the etching pressure in the step (2) is changed to-20 Pa.
By adopting the method of the application example to carry out surface treatment, the out-of-roundness of the outer diameter of the energy transmission optical fiber preform with the specified geometric dimension is poor, so that the drawing force is increased by reducing the etching pressure, and the out-of-roundness of the diameter of the energy transmission optical fiber preform is poor.
Application example 8
The present application example provides a method for performing surface treatment using the treatment apparatus system for obtaining an energy-transmitting optical fiber preform with a specified geometric dimension, provided in example 2, which is the same as in application example 1.
Compare with application example 1, set up tail gas updraft ventilator at the head of glass processing lathe 5 and can make etching gas let in volume unstable, influence the sculpture degree of consistency.
Application example 9
The present application example provides a method of surface treatment using the system of the treatment apparatus for obtaining an energy-transmitting optical fiber preform having a given geometry as provided in example 3, which is the same as in application example 1.
Compared with the application example 1, the omission of the filter 9 can cause the waste to be directly discharged into the outside air without being filtered, pollute the air and influence the physical health of operators.
In summary, the processing device system for obtaining the specified geometric dimension energy-transfer optical fiber perform provided by the invention realizes the surface quantitative etching treatment of the optical fiber perform by designing a combined system consisting of a three-jaw sleeve sealing ring combined fixing device, a glass base tube, a glass processing lathe, a diameter control system comprising a heating electric furnace and an industrial camera, and a tail gas exhaust system device, so as to obtain the specified geometric dimension energy-transfer optical fiber perform. The device system provided by the invention can solve the problem of poor uniformity of the geometric dimension of the existing grinding treatment technology by carrying out sectional quantitative treatment on the surface of the optical fiber perform; the problem of cracking is solved without applying stress to the rod body; the control precision is improved by monitoring the outer diameter of the preform on line, and meanwhile, solid waste is not generated, so that the method has an industrial application prospect.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. A processing device system for obtaining an energy transmission optical fiber preform with a specified geometric dimension is characterized by comprising a machine tool processing unit and an optical fiber preform to-be-processed unit;
the unit to be processed of the optical fiber preform rod comprises a preform rod combined sleeve and a three-jaw sleeve sealing ring combined device;
the machine tool machining unit comprises a glass machining lathe, a diameter control device and a tail gas exhaust device.
2. The apparatus system of claim 1, wherein the preform assembly sleeve comprises an optical fiber preform and a glass substrate tube;
preferably, the glass-based tube is sleeved outside the optical fiber preform;
preferably, the material of the glass substrate tube comprises quartz.
3. The apparatus system according to claim 1 or 2, wherein the three-jaw sleeve gasket assembly is disposed at both ends of the preform assembly sleeve;
preferably, the three-jaw sleeve sealing ring combination device is used for fixing a preform combination sleeve;
preferably, the three-jaw sleeve sealing ring combination device comprises a three-jaw sleeve and a sealing ring;
preferably, the three-jaw sleeve is arranged between the optical fiber preform and the sealing ring;
preferably, the sealing ring is arranged between the three-jaw sleeve and the glass base tube;
preferably, the material of the sealing ring comprises polytetrafluoroethylene or perfluoroether rubber.
4. The apparatus system according to any one of claims 1 to 3, wherein a rail is provided at an intermediate position of the glass processing lathe;
preferably, a sliding table is arranged on the track;
preferably, a diameter control device is arranged on the sliding table;
preferably, the diameter control device comprises a heating electric furnace and an industrial camera;
preferably, the heating electric furnace comprises a resistance furnace;
preferably, the industrial camera is arranged on a mounting platform of the heating electric furnace;
preferably, two ends of the glass processing lathe are respectively provided with a chuck;
preferably, the chuck is used to fix the optical fiber preform treating unit.
5. The apparatus system of any one of claims 1-4, wherein the exhaust gas draft device is disposed at an end of a glass processing lathe;
preferably, the tail gas updraft ventilator is including tail pressure table, filter and updraft ventilator of installing the setting in proper order.
6. A surface treatment method using the apparatus system according to any one of claims 1 to 5, characterized in that the surface treatment method comprises the steps of:
(1) mounting an optical fiber preform rod to-be-processed unit on a glass processing lathe, and rotating and heating to obtain a processed optical fiber preform rod;
(2) etching the optical fiber preform obtained by the step (1) to obtain an energy transfer optical fiber preform with a specified geometric size and reaction waste gas;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
7. The surface treatment method according to claim 6, wherein the rotation speed of the step (1) is 10 to 20 r/min;
preferably, the temperature of the heating in the step (1) is 800-1100 ℃.
8. The surface treatment method according to claim 6 or 7, wherein the gas used in the etching process in the step (2) comprises a mixed gas of a fluorine-containing gas and oxygen;
preferably, the fluorine-containing gas comprises any one of carbon tetrafluoride, hexafluoroethane, trifluoromethane or a combination of at least two of the above;
preferably, the gas flow rate of the fluorine-containing gas is 30-50 sccm;
preferably, the gas flow rate of the oxygen gas is 30-60 sccm;
preferably, the pressure during the etching is-10 to-5 Pa.
9. A surface treatment process according to any one of claims 6 to 8, further comprising removing reaction off-gases using an off-gas draft.
10. A surface treatment method according to any one of claims 6 to 9, characterized in that the surface treatment method comprises the steps of:
(1) installing a unit to be processed of the optical fiber preform on a glass processing lathe, rotating at the rotating speed of 10-20r/min and heating to 800-;
(2) etching the optical fiber preform obtained by the step (1) under the pressure of-10 to-5 Pa to obtain an energy transmission optical fiber preform with a specified geometric size and reaction waste gas; the gas adopted in the etching process comprises a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30-50 sccm; the gas flow rate of the oxygen is 30-60 sccm;
(3) removing reaction waste gas by using a tail gas exhaust device;
and adopting an industrial camera to carry out real-time monitoring on the outer diameter of the processed optical fiber preform in the etching process.
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