CN117525234A - Chip and chip transfer method - Google Patents
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- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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Abstract
本发明公开一种芯片,芯片包括透光衬底以及设于透光衬底上的外延层,外延层上还设置有第一电极和第二电极,第一电极和第二电极沿芯片的长度方向布置,外延层上除第一电极和第二电极所在的区域外的其他区域上还设置有反射层,透光衬底的底部设置有倒角且倒角位于芯片宽度方向上的一侧以使得芯片具有倒角的一侧的重量小于相对的另一侧的重量。本发明实施例将芯片的第一面设置为反射层、第二面设置为透光衬底,并通过在芯片上设置倒角,从而获得相同电极朝向以及获得相同第一面朝上或第二面朝上的芯片,可通过简单高效的方式实现LED芯片的混晶,避免需要对LED芯片进行巨量的分选,大大提升LED芯片的利用率。
The invention discloses a chip. The chip includes a light-transmitting substrate and an epitaxial layer provided on the light-transmitting substrate. The epitaxial layer is also provided with a first electrode and a second electrode. The first electrode and the second electrode are along the length of the chip. direction, the epitaxial layer is also provided with a reflective layer on other areas except the area where the first electrode and the second electrode are located, the bottom of the light-transmitting substrate is provided with a chamfer, and the chamfer is located on one side in the chip width direction. Make the side of the chip that has the chamfer weigh less than the opposite side. In the embodiment of the present invention, the first side of the chip is set as a reflective layer and the second side is set as a light-transmitting substrate, and by providing chamfers on the chip, the same electrode orientation and the same first side facing upward or the second side are obtained. The upward-facing chip can realize the mixing of LED chips in a simple and efficient way, avoiding the need to sort a huge amount of LED chips and greatly improving the utilization rate of LED chips.
Description
技术领域Technical field
本发明涉及LED显示领域,尤其涉及一种芯片及芯片转移方法。The present invention relates to the field of LED display, and in particular, to a chip and a chip transfer method.
背景技术Background technique
随着室内显示应用技术不断提高,目前使用的投影、DLP(Digital LightAs indoor display application technology continues to improve, the currently used projection, DLP (Digital Light
Processing,数字光处理)、LCD(Liquid Crystal Display,液晶显示器)、PDP(Plasma Display Panel,等离子显示板)等显示应用产品己不能完全满足市场应用需求。在各方面还存在一些缺陷使其突破不了技术的发展。而LED(Light Emitting Diode,发光二极管)全彩显示技术克服了上述产品的众多缺陷,如Mini LED(LED显示屏和背光)和Micro LED,分别成为户内外显示,如指挥中心、户外广告屏、会议中心等场合的首选,以及消费类电子屏幕的主要开发目标之一。Processing, digital light processing), LCD (Liquid Crystal Display, liquid crystal display), PDP (Plasma Display Panel, plasma display panel) and other display application products can no longer fully meet market application needs. There are still some defects in various aspects that prevent it from breaking through the development of technology. LED (Light Emitting Diode, light-emitting diode) full-color display technology overcomes many shortcomings of the above-mentioned products, such as Mini LED (LED display and backlight) and Micro LED, which have become indoor and outdoor displays respectively, such as command centers, outdoor advertising screens, The first choice for conference centers and other occasions, and one of the main development targets for consumer electronic screens.
通常,受外延生长设备、工艺及芯片工艺限制,LED晶圆内芯片的波长峰值分布较宽,可达10nm。由于人眼容易识别可见光波段的波长差异,Mini LED及Micro LED显示均要求芯片发光波长分布在较窄的范围,以防止出现块状颜色差异区块而被人眼识别到。所谓块状颜色差异,指的是块内颜色,即波长一致,而块间颜色有细微差异。现有的解决方案,如在Mini LED显示中,通过分选将芯片按照波长等参量挑选出来,存在着分选量巨大,芯片利用率非常低的问题。在Micro LED显示中,更是无法分选,芯片发光波长分布宽的问题依靠常规的外延芯片工艺难以解决。Generally, due to the limitations of epitaxial growth equipment, technology and chip technology, the wavelength peak distribution of the chip in the LED wafer is wide, up to 10nm. Since the human eye can easily identify wavelength differences in the visible light band, Mini LED and Micro LED displays require the chip's emission wavelength to be distributed in a narrow range to prevent block color differences from appearing and being recognized by the human eye. The so-called block color difference refers to the color within the block, that is, the wavelength is consistent, while there are subtle differences in color between blocks. Existing solutions, such as Mini LED displays, use sorting to select chips according to wavelength and other parameters. There are problems such as huge sorting volume and very low chip utilization. In Micro LED displays, it is even more impossible to sort, and the problem of wide chip emission wavelength distribution is difficult to solve by relying on conventional epitaxial chip processes.
因此,如何实现LED芯片的混晶,以避免分选,提升芯片利用率,成为本领域技术人员亟待解决的一个重要技术问题。Therefore, how to realize mixed crystals of LED chips to avoid sorting and improve chip utilization has become an important technical issue that technicians in the field need to solve urgently.
发明内容Contents of the invention
本发明的目的在于提供一种芯片及芯片转移方法,以解决现有技术中混晶分选量巨大,芯片利用率非常低的问题。The purpose of the present invention is to provide a chip and a chip transfer method to solve the existing technology problems of huge mixed crystal sorting volume and very low chip utilization.
为了实现上述目的,第一方面,本发明提供一种芯片,所述芯片包括透光衬底以及设于所述透光衬底上的外延层,所述外延层上还设置有第一电极和第二电极,所述第一电极和第二电极沿所述芯片的长度方向布置,所述外延层上除第一电极和第二电极所在的区域外的其他区域上还设置有反射层,所述透光衬底的底部设置有倒角且所述倒角位于所述芯片宽度方向上的一侧以使得所述芯片具有倒角的一侧的重量小于相对的另一侧的重量。In order to achieve the above object, in a first aspect, the present invention provides a chip. The chip includes a light-transmitting substrate and an epitaxial layer provided on the light-transmitting substrate. The epitaxial layer is also provided with a first electrode and The second electrode, the first electrode and the second electrode are arranged along the length direction of the chip, and a reflective layer is also provided on other areas of the epitaxial layer except the area where the first electrode and the second electrode are located, so The bottom of the light-transmitting substrate is provided with a chamfer, and the chamfer is located on one side in the width direction of the chip so that the weight of the side of the chip with the chamfer is smaller than the weight of the opposite side.
优选地,所述芯片包括所述反射层所在的第一面以及与所述第一面相对的第二面,所述第二面为透光衬底的底面,所述第一面对光的反射率大于所述第二面对光的反射率。Preferably, the chip includes a first surface on which the reflective layer is located and a second surface opposite to the first surface. The second surface is the bottom surface of a light-transmitting substrate, and the first surface is light-sensitive. The reflectivity is greater than the reflectivity of the second surface to light.
优选地,所述透光衬底为蓝宝石衬底或碳化硅衬底,所述倒角沿所述芯片的长度方向延伸。Preferably, the light-transmitting substrate is a sapphire substrate or a silicon carbide substrate, and the chamfer extends along the length direction of the chip.
第二方面,本发明还提供一种芯片的转移方法,包括如下步骤:提供若干上述第一方面的芯片,所述芯片包括所述反射层所在的第一面以及与所述第一面相对的第二面,将若干所述芯片置于溶液中进行混合;提供第一筛选通道,所述第一筛选通道的长度方向上依次设有识别装置以及移除装置;将混合有所述芯片的溶液流经第一筛选通道,当所述识别装置识别到所述芯片具有指定朝向时,所述移除装置不动作,所述具有指定朝向的芯片通过所述第一筛选通道;当所述识别装置识别到所述芯片不具有指定朝向时,控制所述移除装置动作以将所述不具有指定朝向的芯片移出所述第一筛选通道;确定所述芯片的所述第一电极和所述第二电极的电极朝向;提供第二筛选通道,所述第二筛选通道的宽度大于所述芯片的宽度且小于所述芯片的长度,所述第二筛选通道在其长度方向上对应所述电极朝向在其宽度方向的一侧收缩并形成缺口以使得所述倒角靠近所述缺口的所述芯片通过所述第二筛选通道且所述倒角远离所述缺口的所述芯片在重力作用下侧翻脱离所述第二筛选通道;将经过所述第一筛选通道的所述芯片移至所述第二筛选通道以获得所需电极朝向的芯片;将经过所述第一筛选通道和所述第二筛选通道的芯片转移至转移载板上。In a second aspect, the present invention also provides a chip transfer method, which includes the following steps: providing a plurality of chips according to the first aspect, and the chips include a first surface on which the reflective layer is located and a surface opposite to the first surface. On the second side, a number of the chips are placed in the solution for mixing; a first screening channel is provided, and an identification device and a removal device are sequentially provided in the length direction of the first screening channel; the solution mixed with the chips is Flows through the first screening channel, and when the identification device recognizes that the chip has a designated orientation, the removal device does not act, and the chip with the designated orientation passes through the first screening channel; when the identification device When it is recognized that the chip does not have a designated orientation, control the action of the removal device to move the chip that does not have a designated orientation out of the first screening channel; determine the first electrode and the third electrode of the chip The electrode orientation of the two electrodes provides a second screening channel, the width of the second screening channel is greater than the width of the chip and less than the length of the chip, and the second screening channel corresponds to the electrode orientation in its length direction. One side in the width direction is shrunk and a notch is formed so that the chips whose chamfers are close to the notch pass through the second screening channel and the chips whose chamfers are far away from the notch are under the action of gravity. Turn over the second screening channel; move the chip passing through the first screening channel to the second screening channel to obtain the chip with the required electrode orientation; move the chip passing through the first screening channel and the third screening channel The chips of the second screening channel are transferred to the transfer carrier plate.
第三方面,本发明还提供一种芯片的转移方法,包括如下步骤:提供若干上述第一方面的芯片,所述芯片包括所述反射层所在的第一面以及与所述第一面相对的第二面,将若干所述芯片置于溶液中进行混合;确定所述芯片的所述第一电极和所述第二电极的电极朝向;提供第二筛选通道,所述第二筛选通道的宽度大于所述芯片的宽度且小于所述芯片的长度,所述第二筛选通道在其长度方向上对应所述电极朝向在其宽度方向的一侧收缩并形成缺口以使得所述倒角靠近所述缺口的所述芯片通过所述第二筛选通道且所述倒角远离所述缺口的所述芯片在重力作用下侧翻脱离所述第二筛选通道;将混合有所述芯片的溶液流经第二筛选通道以获得所需电极朝向的芯片;提供第一筛选通道,所述第一筛选通道的长度方向上依次设有识别装置以及移除装置;将经过所述第二筛选通道的所述芯片移至所述第一筛选通道,当所述识别装置识别到所述芯片具有指定朝向时,所述移除装置不动作,所述具有指定朝向的芯片通过所述第一筛选通道;当所述识别装置识别到所述芯片不具有指定朝向时,控制所述移除装置动作以将所述不具有指定朝向的芯片移出所述第一筛选通道;将经过所述第一筛选通道和所述第二筛选通道的芯片转移至转移载板上。In a third aspect, the present invention also provides a chip transfer method, which includes the following steps: providing a plurality of chips according to the first aspect, the chips including a first surface on which the reflective layer is located and a surface opposite to the first surface. On the second side, several chips are placed in the solution for mixing; the electrode orientations of the first electrode and the second electrode of the chip are determined; a second screening channel is provided, and the width of the second screening channel is Greater than the width of the chip and less than the length of the chip, the second screening channel shrinks in its length direction corresponding to the electrode toward one side in its width direction and forms a gap so that the chamfer is close to the The chip with the notch passes through the second screening channel and the chip with the chamfering away from the notch rolls over and escapes from the second screening channel under the action of gravity; the solution mixed with the chip flows through the second screening channel. Two screening channels are used to obtain chips with the required electrode orientation; a first screening channel is provided, and an identification device and a removal device are sequentially provided in the length direction of the first screening channel; the chips passing through the second screening channel are Moving to the first screening channel, when the identification device recognizes that the chip has a specified orientation, the removal device does not act, and the chip with the specified orientation passes through the first screening channel; when the When the identification device recognizes that the chip does not have a designated orientation, it controls the action of the removal device to move the chip that does not have a designated orientation out of the first screening channel; The chips of the second screening channel are transferred to the transfer carrier plate.
优选地,所述指定朝向为所述芯片的第一面背离所述第一筛选通道。Preferably, the designated orientation is such that the first side of the chip faces away from the first screening channel.
优选地,所述识别装置为光电二极管,所述移除装置为吹气装置,所述光电二极管通过接收所述芯片第一面反射的第一反射光以及所述芯片第二面反射的第二反射光判断所述芯片是否具有指定朝向。Preferably, the identification device is a photodiode, and the removal device is an air blowing device. The photodiode receives the first reflected light reflected from the first surface of the chip and the second reflected light reflected from the second surface of the chip. The reflected light determines whether the chip has a specified orientation.
优选地,所述识别装置为摄像头,所述摄像头通过获取所述芯片的图像以判断所述芯片是否具有指定朝向。Preferably, the identification device is a camera, and the camera determines whether the chip has a specified orientation by acquiring an image of the chip.
优选地,所述转移载板设于移动承载台上,所述移动承载台带动所述转移载板移动并承接经过所述第一筛选通道和所述第二筛选通道的具有所需朝向的芯片。Preferably, the transfer carrier plate is disposed on a mobile bearing platform, and the mobile bearing platform drives the transfer carrier plate to move and receive the chips with the required orientation that pass through the first screening channel and the second screening channel. .
优选地,所述转移载板上设有若干倒梯形槽,所述倒梯形槽包括上部的导向槽以及下部的定位槽,所述导向槽的开口大于所述定位槽的开口,所述定位槽对应所述芯片设置以容置经过所述第一筛选通道和所述第二筛选通道的芯片,将经过所述第一筛选通道和所述第二筛选通道的芯片转移至转移载板上步骤之后,还包括:将所述倒梯形槽内的所述芯片转移至蓝膜或转移至基板上。Preferably, the transfer carrier plate is provided with a plurality of inverted trapezoidal grooves. The inverted trapezoidal grooves include an upper guide groove and a lower positioning groove. The opening of the guide groove is larger than the opening of the positioning groove. The positioning groove Corresponding to the chip, it is arranged to accommodate the chip passing through the first screening channel and the second screening channel, and after the step of transferring the chip passing through the first screening channel and the second screening channel to the transfer carrier , further comprising: transferring the chip in the inverted trapezoidal groove to a blue film or onto a substrate.
与现有技术相比,本发明实施例将芯片的第一面设置为反射层、第二面设置为透光衬底,可用于筛选第一面朝上的芯片或第二面朝上的芯片,通过在芯片上设置倒角以用于筛选第一电极和第二电极的电极朝向,从而获得相同电极朝向以及获得相同第一面朝上或第二面朝上的芯片,可通过简单高效的方式实现LED芯片的混晶,避免需要对LED芯片进行巨量的分选,大大提升LED芯片的利用率。Compared with the existing technology, the embodiment of the present invention sets the first side of the chip as a reflective layer and the second side as a light-transmitting substrate, which can be used to screen chips with the first side facing up or chips with the second side facing up. By arranging chamfers on the chip to screen the electrode orientations of the first electrode and the second electrode, so as to obtain the same electrode orientation and obtain the same first side up or second side up chip, it can be achieved through simple and efficient This method realizes mixed crystal of LED chips, avoids the need for huge amounts of sorting of LED chips, and greatly improves the utilization rate of LED chips.
附图说明Description of drawings
图1为本发明芯片的侧视结构示意图。Figure 1 is a schematic side structural view of the chip of the present invention.
图2为本发明芯片的底视结构示意图。Figure 2 is a schematic bottom structural diagram of the chip of the present invention.
图3为本发明芯片的俯视结构示意图。Figure 3 is a schematic top view of the structure of the chip of the present invention.
图4为本发明芯片通过第一筛选通道的示意图。Figure 4 is a schematic diagram of the chip of the present invention passing through the first screening channel.
图5为本发明芯片通过第二筛选通道的示意图。Figure 5 is a schematic diagram of the chip of the present invention passing through the second screening channel.
图6为本发明芯片与设于承载台上的转移载板对接的结构示意图。Figure 6 is a schematic structural diagram of the docking of the chip of the present invention with the transfer carrier plate provided on the carrier platform.
图7为本发明芯片与转移载板对接后的结构示意图。Figure 7 is a schematic structural diagram of the chip of the present invention after docking with the transfer carrier board.
图8为本发明芯片转移至蓝膜后的结构示意图。Figure 8 is a schematic structural diagram of the chip of the present invention after being transferred to the blue film.
具体实施方式Detailed ways
为详细说明本发明的技术内容、构造特征、所实现的效果,以下结合实施方式并配合附图详予说明。In order to describe in detail the technical content, structural features, and achieved effects of the present invention, the following is a detailed description in combination with the embodiments and the accompanying drawings.
实施例一Embodiment 1
如图1至图3所示,本发明实施例提供一种芯片10,芯片10包括透光衬底1以及设于透光衬底1上的外延层2,外延层2上还设置有第一电极31和第二电极32,第一电极31和第二电极32沿芯片10的长度方向a布置,外延层2上除第一电极31和第二电极32所在的区域外的其他区域上还设置有反射层20,透光衬底1的底部设置有倒角11且倒角11位于芯片10宽度方向b上的一侧以使得芯片10具有倒角11的一侧的重量小于相对的另一侧的重量。As shown in Figures 1 to 3, an embodiment of the present invention provides a chip 10. The chip 10 includes a light-transmitting substrate 1 and an epitaxial layer 2 provided on the light-transmitting substrate 1. The epitaxial layer 2 is also provided with a first The electrode 31 and the second electrode 32 are arranged along the length direction a of the chip 10 . The epitaxial layer 2 is also provided in other areas except the area where the first electrode 31 and the second electrode 32 are located. There is a reflective layer 20, and the bottom of the light-transmitting substrate 1 is provided with a chamfer 11, and the chamfer 11 is located on one side of the chip 10 in the width direction b, so that the weight of the side of the chip 10 with the chamfer 11 is smaller than the opposite side. the weight of.
具体的,芯片10为LED芯片,倒角11沿芯片10的长度方向a延伸,倒角11通过激光切割形成,通过倒角11的设置可以使得芯片10受重力作用能够朝向另一侧侧翻,本发明实施例通过将芯片10的第一面101设置为反射层20、第二面102设置为透光衬底1,可用于筛选第一面101朝上的芯片10或第二面102朝上的芯片10,通过在芯片10上设置倒角11以用于筛选第一电极31和第二电极32的电极朝向,从而获得相同电极朝向以及获得相同第一面101朝上或第二面102朝上的芯片10,可通过简单高效的方式实现LED芯片10的混晶,无需对LED芯片10进行巨量的分选,大大提升LED芯片10的利用率。Specifically, the chip 10 is an LED chip, and the chamfer 11 extends along the length direction a of the chip 10. The chamfer 11 is formed by laser cutting. The setting of the chamfer 11 can enable the chip 10 to turn sideways toward the other side due to the action of gravity. In the embodiment of the present invention, by setting the first surface 101 of the chip 10 as the reflective layer 20 and the second surface 102 as the light-transmitting substrate 1, it can be used to screen the chips 10 with the first surface 101 facing upward or the second surface 102 facing upward. The chip 10 is provided with a chamfer 11 on the chip 10 to screen the electrode orientations of the first electrode 31 and the second electrode 32, thereby obtaining the same electrode orientation and the same first surface 101 facing upward or the second surface 102 facing upward. The chip 10 on the LED chip 10 can realize the mixed crystal of the LED chip 10 in a simple and efficient manner, without the need to sort a huge amount of LED chips 10, which greatly improves the utilization rate of the LED chip 10.
需要说明的是,在本发明实施例一些其他实施方式中,倒角11也可以通过其他切割方式形成,具体切割方式在此不做限制,只要是能够形成倒角11的方式均可以。It should be noted that in some other implementations of the embodiments of the present invention, the chamfer 11 can also be formed by other cutting methods. The specific cutting method is not limited here, as long as the chamfer 11 can be formed.
本发明实施例中,芯片10包括反射层所在的第一面101以及与第一面101相对的第二面102,第二面102为透光衬底1的底面,第一面101对光的反射率大于第二面102对光的反射率,具体的,透光衬底1为蓝宝石衬底,芯片10包括反射层20所在的第一面101以及与第一面101相对的第二面102,反射层20为布拉格反射层,反射层20为绝缘材质的、具有高反射率的反射膜,反射层20对光的反射率大于90%,而透光衬底1对光的反射率小于或等于30%,反射层20一方面可以提高芯片10第一面101的反射能力,另一方面可以对芯片10进行有效的保护,同时反射层20与透光衬底1的光反射率相差较大,可后续实施光电识别。In the embodiment of the present invention, the chip 10 includes a first surface 101 on which the reflective layer is located and a second surface 102 opposite to the first surface 101. The second surface 102 is the bottom surface of the light-transmitting substrate 1, and the first surface 101 is opposite to the light. The reflectivity is greater than the reflectivity of the second surface 102 to light. Specifically, the light-transmitting substrate 1 is a sapphire substrate, and the chip 10 includes a first surface 101 on which the reflective layer 20 is located and a second surface 102 opposite to the first surface 101. , the reflective layer 20 is a Bragg reflective layer, and the reflective layer 20 is a reflective film made of insulating material with high reflectivity. The reflectivity of the reflective layer 20 to light is greater than 90%, and the reflectivity of the light-transmitting substrate 1 is less than or Equal to 30%, the reflective layer 20 can improve the reflective ability of the first surface 101 of the chip 10 on the one hand, and can effectively protect the chip 10 on the other hand. At the same time, the light reflectivity of the reflective layer 20 and the light-transmitting substrate 1 is quite different. , photoelectric identification can be implemented subsequently.
需要说明的是,在本发明实施例另一些其他实施方式中,透光衬底1也可以是碳化硅等其他透光衬底,在此不做限制。It should be noted that in other implementations of the embodiments of the present invention, the light-transmitting substrate 1 can also be other light-transmitting substrates such as silicon carbide, which is not limited here.
实施例二Embodiment 2
如图1至图8所示,本发明实施例还提供一种芯片10的转移方法,包括如下步骤:As shown in Figures 1 to 8, an embodiment of the present invention also provides a method for transferring the chip 10, which includes the following steps:
S1、提供若干上述芯片10,芯片10包括反射层20所在的第一面101以及与第一面101相对的第二面102,将若干芯片10置于溶液中进行混合;具体的,将电性合格的芯片10置于溶液中充分混合,例如,可以通过搅拌的方式进行充分混合,溶液包括有机溶剂和/或助焊剂等,其中,有机溶剂包括纯净水、乙醇、丙酮及异丙醇中的一种或多种溶剂的混合物,并且,溶剂不会对LED芯片10造成损伤,所述损伤例如为腐蚀LED芯片10或造成LED芯片10短路等,溶剂为易挥发溶剂,以提高混晶效率,以解决芯片10固晶后亮度、电性集中引起的校正不佳问题。S1. Provide a plurality of the above-mentioned chips 10. The chip 10 includes a first surface 101 where the reflective layer 20 is located and a second surface 102 opposite to the first surface 101. Place several chips 10 in a solution for mixing; specifically, mix the electrical properties of the chips 10. The qualified chip 10 is placed in a solution and thoroughly mixed, for example, by stirring. The solution includes organic solvents and/or fluxes, where the organic solvents include pure water, ethanol, acetone, and isopropyl alcohol. A mixture of one or more solvents, and the solvent will not cause damage to the LED chip 10, such as corroding the LED chip 10 or causing a short circuit to the LED chip 10. The solvent is a volatile solvent to improve the mixed crystal efficiency, In order to solve the problem of poor correction caused by concentration of brightness and electrical properties of the chip 10 after solidification.
S2、提供第一筛选通道4,第一筛选通道4的长度方向上依次设有识别装置5以及移除装置6,识别装置5用于识别芯片10是否具有指定朝向;具体的,第一筛选通道4的宽度大于芯片10的宽度且小于芯片10的长度,优选第一筛选通道4的宽度略大于芯片10的宽度,通过对第一筛选通道4的宽度设置使得芯片10在其长度方向与第一筛选通道4的长度方向a一致时才可以进入第一筛选通道4,从而筛选出长度方向a与第一筛选通道4的长度方向a一致的芯片10。当然在一些其他实施方式中,第一筛选通道4的宽度也可以大于芯片10的长度。S2. Provide a first screening channel 4. An identification device 5 and a removal device 6 are provided in the length direction of the first screening channel 4. The identification device 5 is used to identify whether the chip 10 has a specified orientation; specifically, the first screening channel The width of 4 is greater than the width of chip 10 and less than the length of chip 10. Preferably, the width of first screening channel 4 is slightly greater than the width of chip 10. By setting the width of first screening channel 4, the chip 10 is aligned with the first screen in its length direction. Only when the length direction a of the screening channel 4 is consistent can the first screening channel 4 be entered, thereby screening out the chips 10 whose length direction a is consistent with the length direction a of the first screening channel 4 . Of course, in some other embodiments, the width of the first screening channel 4 may also be greater than the length of the chip 10 .
S3、将混合有芯片10的溶液流经第一筛选通道4,当识别装置5识别到芯片10具有指定朝向时,移除装置5不动作,具有指定朝向的芯片10通过第一筛选通道4;当识别装置5识别到芯片10不具有指定朝向时,控制移除装置5动作以将不具有指定朝向的芯片10移出第一筛选通道4;具体的,芯片10流到第一筛选通道4上后,会存在两种芯片10朝向情况,一种是芯片10第一面101朝向上方的情况(即芯片10的第一面101背离所述第一筛选通道4的情况),另一种是芯片10的第二面102朝向上方的情况(即芯片10的第一面101朝向所述第一筛选通道4的情况),因此,需要识别装置5识别出具有指定朝向的芯片10,例如,本发明实施例中,指定朝向为所述芯片的第一面101背离所述第一筛选通道4的方向,因此,需要识别装置5筛选识别出芯片10的第一面101背离所述第一筛选通道4的芯片10。S3. Flow the solution mixed with the chip 10 through the first screening channel 4. When the identification device 5 recognizes that the chip 10 has a designated orientation, the removal device 5 does not act, and the chip 10 with the designated orientation passes through the first screening channel 4; When the identification device 5 recognizes that the chip 10 does not have the designated orientation, it controls the removal device 5 to move the chip 10 that does not have the designated orientation out of the first screening channel 4; specifically, after the chip 10 flows onto the first screening channel 4 , there are two orientation situations of the chip 10 , one is the situation where the first surface 101 of the chip 10 is facing upward (that is, the situation where the first surface 101 of the chip 10 is away from the first screening channel 4 ), and the other is the situation where the chip 10 is facing upward. The second surface 102 of the chip 10 faces upward (that is, the first surface 101 of the chip 10 faces the first screening channel 4). Therefore, the identification device 5 needs to identify the chip 10 with a specified orientation. For example, the present invention implements In this example, the specified direction is the direction in which the first surface 101 of the chip 101 faces away from the first screening channel 4. Therefore, the identification device 5 needs to screen and identify the direction in which the first surface 101 of the chip 10 faces away from the first screening channel 4. Chip 10.
S4、确定芯片10的第一电极31和第二电极32的电极朝向;具体的,如图3所示,第一电极31和第二电极32分别为N型电极和P型电极,确定芯片10所需的电极朝向,即确定第一电极31朝向前方还是第二电极32朝向前方,这里的前方是指第一筛选通道4的传输方向,例如,本发明实施例中需要筛选第一电极31朝向前方、第二电极32朝向后方的芯片10。S4. Determine the electrode orientations of the first electrode 31 and the second electrode 32 of the chip 10; specifically, as shown in FIG. 3, the first electrode 31 and the second electrode 32 are N-type electrodes and P-type electrodes respectively. Determine the electrode orientation of the chip 10. The required electrode orientation is to determine whether the first electrode 31 faces forward or the second electrode 32 faces forward. The front here refers to the transmission direction of the first screening channel 4. For example, in the embodiment of the present invention, it is necessary to screen the first electrode 31 facing forward. The front, second electrode 32 faces the rear chip 10 .
S5、提供第二筛选通道7,第二筛选通道7的宽度大于芯片10的宽度且小于芯片10的长度,第二筛选通道7在其长度方向上对应电极朝向在其宽度方向的一侧收缩并形成缺口71以使得倒角11靠近缺口71的芯片10通过第二筛选通道7且倒角11远离缺口71的芯片10在重力作用下侧翻脱离第二筛选通道7;具体的,如图5所示,第二筛选通道7的宽度大于芯片10的宽度且小于芯片10的长度,优选第二筛选通道7的宽度略大于芯片10的宽度,通过对第二筛选通道7的宽度设置使得芯片10在其长度方向与第二筛选通道7的长度方向一致时才可以进入第二筛选通道7,从而筛选出长度方向与第二筛选通道7的长度方向一致的芯片10。此时,即使第一筛选通道4的宽度大于芯片10的长度,也能通过第二筛选通道7筛选出所需长度方向与第二筛选通道7的长度方向一致的芯片10,第二筛选通道7与第一筛选通道4连接,由于芯片10上设置的倒角11且确定了所需的电极方向,例如,需要筛选第一电极31朝向前方、第二电极32朝向后方的芯片10,因此,需要将第二电极32朝向前方、第一电极31朝向后方的芯片10去除,因此,对应于电极朝向和芯片10的倒角11,将第二筛选通道7其宽度方向b的一侧收缩并形成缺口71以使得倒角11远离缺口71的芯片10侧翻脱离第二筛选通道7并进入混合溶液中。如图5中的芯片状态11e所示,当该状态下的芯片10通过第二筛选通道7时,通道缺口71未对芯片10造成影响,此时芯片10可正常通过第二筛选通道7进入下一步工序,如图5中的芯片状态11f所示,当芯片10以该状态通过第二筛选通道7时,因通道存在缺口71,芯片10经过缺口71时会脱离第二筛选通道7再次进入混合液中。S5. Provide a second screening channel 7. The width of the second screening channel 7 is greater than the width of the chip 10 and less than the length of the chip 10. The corresponding electrode of the second screening channel 7 in its length direction shrinks toward one side in its width direction and The notch 71 is formed so that the chips 10 with the chamfer 11 close to the notch 71 pass through the second screening channel 7 and the chips 10 with the chamfer 11 far away from the notch 71 roll over and escape from the second screening channel 7 under the action of gravity; specifically, as shown in Figure 5 shows that the width of the second screening channel 7 is larger than the width of the chip 10 and smaller than the length of the chip 10. It is preferred that the width of the second screening channel 7 is slightly larger than the width of the chip 10. By setting the width of the second screening channel 7, the chip 10 is The second screening channel 7 can be entered only when its length direction is consistent with the length direction of the second screening channel 7 , thereby screening out chips 10 whose length direction is consistent with the length direction of the second screening channel 7 . At this time, even if the width of the first screening channel 4 is greater than the length of the chip 10 , the chips 10 whose required length direction is consistent with the length direction of the second screening channel 7 can be screened out through the second screening channel 7 . Connected to the first screening channel 4, due to the chamfer 11 provided on the chip 10 and the required electrode direction is determined, for example, it is necessary to screen the chip 10 with the first electrode 31 facing the front and the second electrode 32 facing the rear. Therefore, it is necessary to The chip 10 with the second electrode 32 facing the front and the first electrode 31 facing the rear is removed. Therefore, corresponding to the electrode orientation and the chamfer 11 of the chip 10 , one side of the second screening channel 7 in the width direction b is contracted and a notch is formed. 71 so that the chip 10 with the chamfer 11 away from the notch 71 is turned sideways out of the second screening channel 7 and into the mixed solution. As shown in the chip state 11e in Figure 5, when the chip 10 in this state passes through the second screening channel 7, the channel gap 71 does not affect the chip 10. At this time, the chip 10 can normally pass through the second screening channel 7 and enter the lower level. One-step process, as shown in the chip state 11f in Figure 5, when the chip 10 passes through the second screening channel 7 in this state, because there is a gap 71 in the channel, when the chip 10 passes through the gap 71, it will break away from the second screening channel 7 and enter the mixing again. liquid.
S6、将经过第一筛选通道4的芯片10移至第二筛选通道7以获得所需电极朝向的芯片。S6. Move the chip 10 that has passed through the first screening channel 4 to the second screening channel 7 to obtain the chip with the required electrode orientation.
S7、将经过第一筛选通道4和第二筛选通道7的芯片101转移至转移载板9上。具体的,通过转移载板9可以收集、排布筛选后的所需芯片10以进行后续转移或焊接工序。S7. Transfer the chips 101 that have passed through the first screening channel 4 and the second screening channel 7 to the transfer carrier plate 9 . Specifically, the required chips 10 after screening can be collected and arranged through the transfer carrier plate 9 for subsequent transfer or welding processes.
本发明实施例通过识别装置识别具有指定朝向的芯片10,并通过在芯片10上设置倒角11并配合第二筛选通道7的缺口71设置可以筛选芯片10的电极朝向,通过简单高效的方式实现LED芯片10的混晶,避免需要对LED芯片10进行巨量的分选,大大提升LED芯片10的利用率。The embodiment of the present invention uses an identification device to identify the chip 10 with a specified orientation, and by setting the chamfer 11 on the chip 10 and setting it in conjunction with the notch 71 of the second screening channel 7, the electrode orientation of the chip 10 can be screened, which is achieved in a simple and efficient manner. The mixed crystal of LED chips 10 avoids the need to sort LED chips 10 in huge quantities and greatly improves the utilization rate of LED chips 10 .
本发明实施例中,识别装置5通过接收反射层20和透光衬底1反射的不同强度的光以判断芯片10是否具有指定朝向,由于芯片10的第一面101是反射层20,第二面102是透光衬底,反射层20和透光衬底1对于光的反射率不相同,例如,本发明实施例的指定朝向为所述芯片的第一面101背离所述第一筛选通道4的方向,识别装置5不断识别经过识别装置5的芯片10,如图4中的芯片状态11d所示,当识别装置5接收到芯片10第一面101的反射光时,识别装置5不动作,芯片10通过第一筛选通道4,进入下一步工序;如图4中的芯片状态11c所示,当识别装置5接收到芯片10第二面102的反射光时,识别装置5通过发射信号以控制移除装置6动作以将芯片10移出第一筛选通道4并进入混合溶液中循环;In the embodiment of the present invention, the identification device 5 determines whether the chip 10 has a specified orientation by receiving light of different intensities reflected by the reflective layer 20 and the light-transmitting substrate 1. Since the first surface 101 of the chip 10 is the reflective layer 20, the second surface 101 of the chip 10 is the reflective layer 20. The surface 102 is a light-transmitting substrate, and the reflective layer 20 and the light-transmitting substrate 1 have different reflectivities for light. For example, the specified orientation of the embodiment of the present invention is that the first surface 101 of the chip faces away from the first screening channel. 4, the identification device 5 continuously identifies the chip 10 passing through the identification device 5. As shown in the chip state 11d in Figure 4, when the identification device 5 receives the reflected light from the first surface 101 of the chip 10, the identification device 5 does not act. , the chip 10 passes through the first screening channel 4 and enters the next step; as shown in the chip state 11c in Figure 4, when the identification device 5 receives the reflected light from the second surface 102 of the chip 10, the identification device 5 emits a signal to Control the action of the removal device 6 to move the chip 10 out of the first screening channel 4 and enter the mixed solution for circulation;
具体的,如图4所示,识别装置5为光电二极管,移除装置6为吹气装置,光电二极管通过接收芯片10第一面101反射的第一反射光以及芯片10第二面102反射的第二反射光判断芯片10是否具有指定朝向,第一反射光的强度大于第二反射光的强度,当识别装置5接收到第二反射光时,识别装置5反馈第一信号以用于控制移除装置6吹气以将芯片10吹离第一筛选通道4,当识别装置5接收到第一反射光时,识别装置5不反馈信号,移除装置6不启动,芯片10通过第一筛选通道4。具体的,第一信号可以为电压信号或电流信号,移除装置6包括设于第一筛选通道4上吹气孔61,当识别装置5反馈第一信号时,芯片10经过吹气孔61时,移除装置6通过吹气孔61吹气以将芯片10吹离第一筛选通道4,当识别装置5接收到第一反射光时,芯片10可以正常通过第一筛选通道4并进入下一道工序。Specifically, as shown in Figure 4, the identification device 5 is a photodiode, and the removal device 6 is an air blowing device. The photodiode receives the first reflected light reflected by the first surface 101 of the chip 10 and the first reflected light reflected by the second surface 102 of the chip 10. The second reflected light determines whether the chip 10 has a specified orientation. The intensity of the first reflected light is greater than the intensity of the second reflected light. When the identification device 5 receives the second reflected light, the identification device 5 feeds back a first signal for controlling the movement. The removal device 6 blows air to blow the chip 10 away from the first screening channel 4. When the identification device 5 receives the first reflected light, the identification device 5 does not feedback the signal, the removal device 6 does not start, and the chip 10 passes through the first screening passage. 4. Specifically, the first signal can be a voltage signal or a current signal. The removal device 6 includes a blowing hole 61 provided on the first screening channel 4. When the identification device 5 feeds back the first signal, the chip 10 moves through the blowing hole 61. The removal device 6 blows air through the blowing hole 61 to blow the chip 10 away from the first screening channel 4. When the identification device 5 receives the first reflected light, the chip 10 can pass through the first screening channel 4 normally and enter the next process.
需要说明的是,吹气孔61的位置不限,只要是能够将芯片10吹出第一筛选通道4的方式均可以,另外,移除装置6不限于吹气的方式,只要是能够将不满足要求的芯片10移出第一筛选通道4的方式均可以,例如,可以选择机械手结构等。It should be noted that the position of the blowing hole 61 is not limited, as long as it can blow the chip 10 out of the first screening channel 4 , in addition, the removal device 6 is not limited to the blowing method, as long as it can blow out the chip 10 that does not meet the requirements. The chip 10 can be moved out of the first screening channel 4 in any manner, for example, a robot structure can be selected.
在本发明实施例一些其他实施方式中,识别装置5也可以为摄像头,所述摄像头通过获取所述芯片10的图像以判断所述芯片10是否具有指定朝向。具体的,识别装置5不断拍摄经过识别装置5的芯片10的图像并判断芯片10是否具有指定朝向,例如,本发明实施例的指定朝向为所述芯片的第一面101背离所述第一筛选通道4的方向,当识别装置5识别到芯片10的第一面101背离所述第一筛选通道4时,识别装置5不动作,芯片10通过第一筛选通道4,进入下一步工序;如图4中的芯片状态11c所示,当识别装置5识别到芯片10的第一面101朝向所述第一筛选通道4时,识别装置5通过发射信号以控制移除装置6动作以将芯片10移出第一筛选通道4并进入混合溶液中循环。In some other implementations of the embodiment of the present invention, the identification device 5 may also be a camera, which determines whether the chip 10 has a specified orientation by acquiring an image of the chip 10 . Specifically, the identification device 5 continuously takes images of the chip 10 passing through the identification device 5 and determines whether the chip 10 has a designated orientation. For example, the designated orientation in the embodiment of the present invention is that the first side 101 of the chip deviates from the first screening. In the direction of the channel 4, when the recognition device 5 recognizes that the first side 101 of the chip 10 is away from the first screening channel 4, the recognition device 5 does not act, and the chip 10 passes through the first screening channel 4 and enters the next step; as shown in the figure As shown in the chip state 11c in 4, when the recognition device 5 recognizes that the first surface 101 of the chip 10 is facing the first screening channel 4, the recognition device 5 controls the action of the removal device 6 by transmitting a signal to remove the chip 10. The first screen channel 4 and enters the mixed solution for circulation.
本发明实施例中,转移载板9设于移动承载台8上,采用移动承载台8带动转移载板9移动并承接经过所述第一筛选通道4和第二筛选通道7上传输的具有所需朝向的芯片10。具体的,通过转移载板9可以收集、排布筛选后的所需芯片10以进行后续转移或焊接工序。In the embodiment of the present invention, the transfer carrier plate 9 is disposed on the movable bearing platform 8, and the movable bearing platform 8 is used to drive the transfer carrier plate 9 to move and receive all the materials with the properties transmitted through the first screening channel 4 and the second screening channel 7. The chip 10 needs to be oriented. Specifically, the required chips 10 after screening can be collected and arranged through the transfer carrier plate 9 for subsequent transfer or welding processes.
如图6所示,本发明实施例中,转移载板9上设有若干倒梯形槽90,倒梯形槽90包括上部的导向槽91以及下部的定位槽92,导向槽91的开口大于定位槽92的开口,定位槽92对应芯片10设置以容置由第二筛选通道7上传输的芯片10,具体的,倒梯形槽90均匀分布于转移载板9上,导向槽91设有第一槽壁911,第一槽壁911呈竖直设置,定位槽92设有第二槽壁921,第二槽壁921倾斜设置且第二槽壁921与倒角11匹配设置,第一槽壁911与第二槽壁921之间形成台阶面93。通过将导向槽91设置为包含竖直设置的第一槽壁911可以使得导向槽91接收芯片10的范围更大,对于倒梯形槽90的设计精度以及移动承载台8的运动精度要求更低,利于实际使用。As shown in Figure 6, in the embodiment of the present invention, the transfer carrier plate 9 is provided with a number of inverted trapezoidal grooves 90. The inverted trapezoidal grooves 90 include an upper guide groove 91 and a lower positioning groove 92. The opening of the guide groove 91 is larger than the positioning groove. 92 opening, the positioning groove 92 is provided corresponding to the chip 10 to accommodate the chip 10 transmitted on the second screening channel 7. Specifically, the inverted trapezoidal grooves 90 are evenly distributed on the transfer carrier plate 9, and the guide groove 91 is provided with a first groove Wall 911, the first groove wall 911 is arranged vertically, the positioning groove 92 is provided with a second groove wall 921, the second groove wall 921 is inclined, and the second groove wall 921 is matched with the chamfer 11, the first groove wall 911 and A step surface 93 is formed between the second groove walls 921 . By configuring the guide groove 91 to include the vertically disposed first groove wall 911, the range of the guide groove 91 receiving the chip 10 can be larger, and the requirements for the design accuracy of the inverted trapezoidal groove 90 and the movement accuracy of the mobile carrying platform 8 are lower. Conducive to practical use.
本发明实施例中,将承载台8于二维平面内以固定间距移动的方式承接由第二筛选通道7上传输的具有所需朝向的芯片10,并以震动的方式使芯片10落入定位槽92内。具体的,倒梯形槽90可以呈多行多列的矩阵式分布于转移载板9上,移动承载台8以固定间距移动的方式移动以承接由第二筛选通道7上传输的芯片10,固定间距可以对应相邻两倒梯形槽90中心之间的距离,通过震动可以使得芯片10均落入定位槽92内以使得芯片10的电极高度保持一致。In the embodiment of the present invention, the carrying platform 8 is moved at a fixed distance in a two-dimensional plane to receive the chips 10 with the required orientation transmitted through the second screening channel 7, and the chips 10 are vibrated to fall into position. in slot 92. Specifically, the inverted trapezoidal grooves 90 can be distributed in a matrix of multiple rows and columns on the transfer carrier plate 9, and the mobile carrier platform 8 moves at a fixed distance to receive the chips 10 transmitted on the second screening channel 7. The spacing can correspond to the distance between the centers of two adjacent inverted trapezoidal grooves 90 , and the chips 10 can all fall into the positioning grooves 92 through vibration to keep the electrode heights of the chips 10 consistent.
本发明实施例中,步骤S6,将经过第一筛选通道4和第二筛选通道7的芯片101转移至转移载板9上,之后,还包括:In the embodiment of the present invention, in step S6, the chip 101 that has passed through the first screening channel 4 and the second screening channel 7 is transferred to the transfer carrier 9. After that, it also includes:
S7、将倒梯形槽90内的芯片10转移至蓝膜100或转移至基板上。具体的,倒梯形槽90的深度与LED芯片10的高度相同或略低于LED芯片10高度,经过一定数量的芯片10的排布之后,可将芯片10转移至蓝膜100或者转移至基板进行焊接。S7. Transfer the chip 10 in the inverted trapezoidal groove 90 to the blue film 100 or to the substrate. Specifically, the depth of the inverted trapezoidal groove 90 is the same as or slightly lower than the height of the LED chip 10 . After a certain number of chips 10 are arranged, the chips 10 can be transferred to the blue film 100 or to the substrate for processing. welding.
本发明实施例芯片10的转移方法通过芯片10结构设计以及搭配两种筛选方式,在解决芯片10混晶问题的同时,将芯片10快速转移至蓝膜100或者基板,同时保持芯片10电极朝向的高度一致,设计非常巧妙。The transfer method of the chip 10 in the embodiment of the present invention solves the problem of mixed crystals of the chip 10 through two screening methods: structural design of the chip 10 and matching, while quickly transferring the chip 10 to the blue film 100 or the substrate while maintaining the orientation of the electrodes of the chip 10 Highly consistent and very cleverly designed.
实施例三Embodiment 3
本实施例与实施例二的区别在于:本实施例将混合有芯片10的溶液先流经第二筛选通道7以筛选所需的电极朝向的芯片10,再将经过第二筛选通道7的芯片10移至第一筛选通道4以筛选具有指定朝向的芯片10,具体实施方式如下。The difference between this embodiment and the second embodiment is that in this embodiment, the solution mixed with the chips 10 first flows through the second screening channel 7 to screen the chips 10 with the required electrode orientation, and then the chips 10 that have passed through the second screening channel 7 are 10 moves to the first screening channel 4 to screen the chips 10 with the specified orientation. The specific implementation is as follows.
本发明实施例还提供一种芯片10的转移方法,包括如下步骤:An embodiment of the present invention also provides a method for transferring the chip 10, which includes the following steps:
S10、提供若干上述芯片10,芯片10包括反射层20所在的第一面101以及与第一面101相对的第二面102,将若干芯片10置于溶液中进行混合;具体的,将电性合格的芯片10置于溶液中充分混合,例如,可以通过搅拌的方式进行充分混合,溶液包括有机溶剂和/或助焊剂等,其中,有机溶剂包括纯净水、乙醇、丙酮及异丙醇中的一种或多种溶剂的混合物,并且,溶剂不会对LED芯片10造成损伤,所述损伤例如为腐蚀LED芯片10或造成LED芯片10短路等,溶剂为易挥发溶剂,以提高混晶效率,以解决芯片10固晶后亮度、电性集中引起的校正不佳问题。S10. Provide a plurality of the above-mentioned chips 10. The chip 10 includes a first surface 101 where the reflective layer 20 is located and a second surface 102 opposite to the first surface 101. Place several chips 10 in the solution for mixing; specifically, the electrical properties of the chips 10 are mixed. The qualified chip 10 is placed in a solution and thoroughly mixed, for example, by stirring. The solution includes organic solvents and/or fluxes, where the organic solvents include pure water, ethanol, acetone, and isopropyl alcohol. A mixture of one or more solvents, and the solvent will not cause damage to the LED chip 10, such as corroding the LED chip 10 or causing a short circuit to the LED chip 10. The solvent is a volatile solvent to improve the mixed crystal efficiency, In order to solve the problem of poor correction caused by concentration of brightness and electrical properties of the chip 10 after solidification.
S20、确定芯片10的第一电极31和第二电极32的电极朝向;具体的,如图3所示,第一电极31和第二电极32分别为N型电极和P型电极,确定芯片10所需的电极朝向,即确定第一电极31朝向前方还是第二电极32朝向前方,这里的前方是指第一筛选通道4和第二筛选通道7的传输方向,例如,本发明实施例中需要筛选第一电极31朝向前方、第二电极32朝向后方的芯片10。S20. Determine the electrode orientations of the first electrode 31 and the second electrode 32 of the chip 10; specifically, as shown in FIG. 3, the first electrode 31 and the second electrode 32 are N-type electrodes and P-type electrodes respectively. Determine the electrode orientation of the chip 10. The required electrode orientation is to determine whether the first electrode 31 faces the front or the second electrode 32 faces the front. The front here refers to the transmission direction of the first screening channel 4 and the second screening channel 7. For example, it is required in the embodiment of the present invention. The chips 10 whose first electrode 31 faces forward and whose second electrode 32 faces rear are screened.
S30、提供第二筛选通道7,第二筛选通道7的宽度大于芯片10的宽度且小于芯片10的长度,第二筛选通道7在其长度方向上对应电极朝向在其宽度方向的一侧收缩并形成缺口71以使得倒角11靠近缺口71的芯片10通过第二筛选通道7且倒角11远离缺口71的芯片10在重力作用下侧翻脱离第二筛选通道7;具体的,如图5所示,第二筛选通道7的宽度大于芯片10的宽度且小于芯片10的长度,优选第二筛选通道7的宽度略大于芯片10的宽度,通过对第二筛选通道7的宽度设置使得芯片10在其长度方向与第二筛选通道7的长度方向一致时才可以进入第二筛选通道7,从而筛选出长度方向与筛选通道的长度方向一致的芯片10。由于芯片10上设置的倒角11且确定了所需的电极方向,例如,需要筛选第一电极31朝向前方、第二电极32朝向后方的芯片10,因此,需要将第二电极32朝向前方、第一电极31朝向后方的芯片10去除,因此,对应于电极朝向和芯片10的倒角11,将第二筛选通道7其宽度方向b的一侧收缩并形成缺口71以使得倒角11远离缺口71的芯片10侧翻脱离第二筛选通道7并进入混合溶液中。如图5中的芯片状态11e所示,当该状态下的芯片10通过第二筛选通道7时,通道缺口71未对芯片10造成影响,此时芯片10可正常通过第二筛选通道7进入下一步工序,如图5中的芯片状态11f所示,当芯片10以该状态通过第二筛选通道7时,因通道存在缺口71,芯片10经过缺口71时会脱离第二筛选通道7再次进入混合液中。S30. Provide a second screening channel 7. The width of the second screening channel 7 is greater than the width of the chip 10 and smaller than the length of the chip 10. The corresponding electrode of the second screening channel 7 in its length direction shrinks toward one side in its width direction and The notch 71 is formed so that the chips 10 with the chamfer 11 close to the notch 71 pass through the second screening channel 7 and the chips 10 with the chamfer 11 far away from the notch 71 roll over and escape from the second screening channel 7 under the action of gravity; specifically, as shown in Figure 5 shows that the width of the second screening channel 7 is larger than the width of the chip 10 and smaller than the length of the chip 10. It is preferred that the width of the second screening channel 7 is slightly larger than the width of the chip 10. By setting the width of the second screening channel 7, the chip 10 is Only when the length direction is consistent with the length direction of the second screening channel 7 can the second screening channel 7 be entered, thereby screening out the chips 10 whose length direction is consistent with the length direction of the screening channel. Since the chamfer 11 is provided on the chip 10 and the required electrode direction is determined, for example, it is necessary to screen the chip 10 with the first electrode 31 facing the front and the second electrode 32 facing the rear. Therefore, the second electrode 32 needs to face the front and the rear. The first electrode 31 is removed toward the rear chip 10. Therefore, corresponding to the electrode orientation and the chamfer 11 of the chip 10, one side of the second screening channel 7 in the width direction b is shrunk and a notch 71 is formed to keep the chamfer 11 away from the notch. The chip 10 at 71 is turned sideways out of the second screening channel 7 and enters the mixed solution. As shown in the chip state 11e in Figure 5, when the chip 10 in this state passes through the second screening channel 7, the channel gap 71 does not affect the chip 10. At this time, the chip 10 can normally pass through the second screening channel 7 and enter the lower level. One-step process, as shown in the chip state 11f in Figure 5, when the chip 10 passes through the second screening channel 7 in this state, because there is a gap 71 in the channel, when the chip 10 passes through the gap 71, it will break away from the second screening channel 7 and enter the mixing again. liquid.
S40、将混合有芯片10的溶液流经第二筛选通道7以获得所需电极朝向的芯片。S40. Flow the solution mixed with the chip 10 through the second screening channel 7 to obtain the chip with the desired electrode orientation.
S50、提供第一筛选通道4,第一筛选通道4的长度方向上依次设有识别装置5以及移除装置6,识别装置5用于识别芯片10是否具有指定朝向;具体的,第一筛选通道4的宽度大于芯片10的宽度且小于芯片10的长度,优选第一筛选通道4的宽度略大于芯片10的宽度,通过对第一筛选通道4的宽度设置使得芯片10的长度方向与第一筛选通道4的长度方向a一致时才可以进入第一筛选通道4,从而筛选出长度方向与第一筛选通道4的长度方向a一致的芯片10。S50. Provide a first screening channel 4. An identification device 5 and a removal device 6 are provided in the length direction of the first screening channel 4. The identification device 5 is used to identify whether the chip 10 has a specified orientation; specifically, the first screening channel The width of 4 is greater than the width of chip 10 and less than the length of chip 10. Preferably, the width of first screening channel 4 is slightly greater than the width of chip 10. By setting the width of first screening channel 4, the length direction of chip 10 is consistent with the first screening Only when the length direction a of the channel 4 is consistent can the first screening channel 4 be entered, thereby screening out the chips 10 whose length direction is consistent with the length direction a of the first screening channel 4 .
S60、将经过第二筛选通道7的所述芯片10移至第一筛选通道4,当识别装置5识别到芯片10具有指定朝向时,移除装置5不动作,具有指定朝向的芯片10通过第一筛选通道4;当识别装置5识别到芯片10不具有指定朝向时,控制移除装置5动作以将不具有指定朝向的芯片10移出第一筛选通道4;具体的,芯片10流到第一筛选通道4上后,会存在两种芯片10朝向情况,一种是芯片10第一面101朝向上方的情况(即芯片10的第一面101背离所述第一筛选通道4的情况),另一种是芯片10的第二面102朝向上方的情况(即芯片10的第一面101朝向所述第一筛选通道4的情况),因此,需要识别装置5识别出具有指定朝向的芯片10,例如,本发明实施例中,指定朝向为所述芯片的第一面101背离所述第一筛选通道4的方向,因此,需要识别装置5筛选识别出芯片10的第一面101背离所述第一筛选通道4的芯片10。S60. Move the chips 10 that have passed through the second screening channel 7 to the first screening channel 4. When the identification device 5 recognizes that the chip 10 has a specified orientation, the removal device 5 does not act, and the chip 10 with the specified orientation passes through the first screening channel 4. A screening channel 4; when the identification device 5 recognizes that the chip 10 does not have a designated orientation, the removal device 5 is controlled to move the chip 10 that does not have a designated orientation out of the first screening channel 4; specifically, the chip 10 flows to the first After being placed on the screening channel 4, there will be two orientation situations of the chip 10. One is the situation where the first surface 101 of the chip 10 faces upward (that is, the situation where the first surface 101 of the chip 10 is away from the first screening channel 4), and the other is the situation where the first surface 101 of the chip 10 faces upward. One is the case where the second surface 102 of the chip 10 faces upward (that is, the first surface 101 of the chip 10 faces the first screening channel 4). Therefore, the identification device 5 needs to identify the chip 10 with a specified orientation. For example, in the embodiment of the present invention, the specified direction is the direction in which the first side 101 of the chip 101 deviates from the first screening channel 4. Therefore, the identification device 5 needs to screen and identify the first side 101 of the chip 10 deviating from the first screening channel 4. A chip 10 screening channel 4.
S70、将经过第一筛选通道4和第二筛选通道7的芯片101转移至转移载板9上。具体的,通过转移载板9可以收集、排布筛选后的所需芯片10以进行后续转移或焊接工序。S70. Transfer the chips 101 that have passed through the first screening channel 4 and the second screening channel 7 to the transfer carrier plate 9. Specifically, the required chips 10 after screening can be collected and arranged through the transfer carrier plate 9 for subsequent transfer or welding processes.
本发明实施例芯片10的转移方法同样通过芯片10结构设计以及搭配两种筛选方式,在解决芯片10混晶问题的同时,将芯片10快速转移至蓝膜100或者基板,同时保持芯片10电极朝向的高度一致,设计非常巧妙。The transfer method of the chip 10 in the embodiment of the present invention also solves the problem of mixed crystals of the chip 10 through the structural design of the chip 10 and the matching of two screening methods, while quickly transferring the chip 10 to the blue film 100 or the substrate while maintaining the electrode orientation of the chip 10 The height is consistent and the design is very clever.
以上所揭露的仅为本发明的较佳实例而已,当然不能以此来限定本发明之权利范围,因此依本发明申请专利范围所作的等同变化,仍属于本发明所涵盖的范围。The above disclosures are only preferred examples of the present invention. Of course, they cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made based on the patent scope of the present invention still fall within the scope of the present invention.
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