CN117517785A

CN117517785A - Impedance detection circuit, impedance detection device, and impedance detection method

Info

Publication number: CN117517785A
Application number: CN202410021543.5A
Authority: CN
Inventors: 王树晓; 陈亚梯
Original assignee: SHENZHEN HANQIANG TECHNOLOGY CO LTD
Current assignee: SHENZHEN HANQIANG TECHNOLOGY CO LTD
Priority date: 2024-01-08
Filing date: 2024-01-08
Publication date: 2024-02-06
Anticipated expiration: 2044-01-08
Also published as: CN117517785B

Abstract

The application provides an impedance detection circuit, impedance detection equipment and an impedance detection method, wherein the impedance detection circuit comprises an adjustable reactance unit, a resistance unit and an adjusting unit, wherein the adjustable reactance unit is connected in an output path of a radio frequency circuit and has an adjustable reactance value; the resistor unit is connected in the output path of the radio frequency circuit; the adjusting unit is at least used for adjusting the reactance value of the adjustable reactance unit; the adjusting unit is used for adjusting the reactance value of the adjustable reactance unit, and when the current of the impedance detection circuit reaches a peak value, the adjusting unit stops adjusting the reactance value of the adjustable reactance unit, and the reactance value of the adjustable reactance unit when the current of the impedance detection circuit reaches the peak value is used for obtaining the reactance value of the impedance detection circuit when the current of the impedance detection circuit reaches the peak value, so that the reactance value of the impedance detection circuit corresponds to the reactance value of the circuit of the radio frequency circuit when the current of the impedance detection circuit reaches the peak value, and the reactance value of the circuit of the radio frequency circuit is obtained. The method and the device can dynamically detect the circuit reactance value Xs of the radio frequency circuit.

Description

Impedance detection circuit, impedance detection device, and impedance detection method

Technical Field

The present disclosure relates to the field of radio frequency technologies, and in particular, to an impedance detection circuit, an impedance detection device, and an impedance detection method.

Background

Currently, with the popularization of Radio Frequency (RF) applications, RF circuits are increasingly used in various fields. After the radio frequency circuit is built, dynamic parameters of the radio frequency circuit are often detected, so that the radio frequency circuit is regulated. However, the existing detection method cannot detect the dynamic parameters of the radio frequency circuit under the static condition of the radio frequency circuit, especially the reactance value Xs of the radio frequency circuit, so that the radio frequency circuit is difficult to adjust, and the damage of the radio frequency circuit is easy to cause. Therefore, how to dynamically detect the circuit reactance value Xs of the radio frequency circuit when the radio frequency circuit is in operation becomes a problem to be considered.

Disclosure of Invention

The application provides an impedance detection circuit, impedance detection equipment and an impedance detection method, which can dynamically detect a circuit reactance value Xs of a radio frequency circuit when the radio frequency circuit works.

In a first aspect, an impedance detection circuit is provided, at least for detecting a circuit reactance value Xs of a radio frequency circuit, where the impedance detection circuit includes an adjustable reactance unit, a resistance unit, and an adjustment unit, where the adjustable reactance unit is connected to an output path of the radio frequency circuit and has an adjustable reactance value; the resistance unit is connected to the output path of the radio frequency circuit and is used for consuming at least part of the electric energy input to the impedance detection circuit; the adjusting unit is at least used for adjusting the reactance value of the adjustable reactance unit; the adjusting unit is used for adjusting the reactance value of the adjustable reactance unit, when the current of the impedance detection circuit reaches a peak value, the adjusting unit stops adjusting the reactance value of the adjustable reactance unit, the reactance value of the adjustable reactance unit is used for obtaining the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, so that the circuit reactance value Xs of the radio frequency circuit is obtained through the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, and the reactance value of the impedance detection circuit is conjugated with the circuit reactance value Xs of the radio frequency circuit when the impedance detection circuit is at the current peak value.

In one possible implementation manner, at least part of the adjustable reactance unit is connected in parallel with the resistance unit, the impedance detection circuit is equal to the reactance value of the impedance detection circuit and the total reactance value of the adjustable reactance unit and the resistance unit at the time of current peak, and the reactance value of the impedance detection circuit at the time of current peak is the circuit reactance value Xs of the radio frequency circuit obtained by the impedance detection circuit and the total reactance value of the adjustable reactance unit and the resistance unit at the time of current peak.

In a possible embodiment, the adjustable reactance unit comprises a first adjustable inductance, a first adjustable capacitance and a first matching capacitance, the first adjustable inductance, the first adjustable capacitance and the resistance unit are connected in series, the first matching capacitance is connected in parallel with the resistance unit, and the adjustable reactance value comprises an adjustable inductance value and/or capacitance value.

In one possible implementation manner, the adjustable reactance unit is connected in series with the resistance unit, and the reactance value of the adjustable reactance unit is equal to the reactance value of the impedance detection circuit at the time of a current peak, where the reactance value of the impedance detection circuit at the time of the current peak is obtained by the reactance value of the adjustable reactance unit at the time of the current peak.

In a possible embodiment, the adjustable reactance unit comprises a first adjustable inductance and a first adjustable capacitance, the first adjustable inductance, the first adjustable capacitance and the resistance unit being connected in series, the adjustable reactance value comprising an adjustable inductance value and/or capacitance value.

In one possible embodiment, the adjustment unit comprises a first adjustment module and a second adjustment module, the adjustment amplitude of each adjustment of the first adjustment module being greater than the adjustment amplitude of each adjustment of the second adjustment module.

In a possible implementation manner, in the process of adjusting the reactance value of the adjustable reactance unit by the adjusting unit, the reactance value of the adjustable reactance unit is adjusted by the first adjusting module, and then the reactance value of the adjustable reactance unit is further adjusted by the second adjusting module, so as to obtain the current peak value of the impedance detection circuit.

In a second aspect, there is also provided an impedance detection apparatus including the above impedance detection circuit, the impedance detection apparatus further including a detection unit for detecting a current value of the impedance detection circuit, and a control unit; the control unit is used for controlling the adjusting unit to adjust the reactance value of the adjustable reactance unit firstly, controlling the adjusting unit to stop adjusting the reactance value of the adjustable reactance unit when the current of the impedance detection circuit reaches a peak value, obtaining the reactance value of the impedance detection circuit when the current of the impedance detection circuit is at the peak value based on the reactance value of the adjustable reactance unit when the current of the impedance detection circuit is at the peak value, and obtaining the circuit reactance value Xs of the radio frequency circuit based on the reactance value of the impedance detection circuit when the current of the impedance detection circuit is at the peak value, wherein the reactance value of the impedance detection circuit is conjugated with the circuit reactance value Xs of the radio frequency circuit. The impedance detection circuit comprises an adjustable reactance unit, a resistance unit and an adjusting unit, wherein the adjustable reactance unit is connected in an output path of the radio frequency circuit and has an adjustable reactance value; the resistance unit is connected to the output path of the radio frequency circuit and is used for consuming at least part of the electric energy input to the impedance detection circuit; the adjusting unit is at least used for adjusting the reactance value of the adjustable reactance unit; the adjusting unit is used for adjusting the reactance value of the adjustable reactance unit, when the current of the impedance detection circuit reaches a peak value, the adjusting unit stops adjusting the reactance value of the adjustable reactance unit, the reactance value of the adjustable reactance unit is used for obtaining the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, so that the circuit reactance value Xs of the radio frequency circuit is obtained through the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, and the reactance value of the impedance detection circuit is conjugated with the circuit reactance value Xs of the radio frequency circuit when the impedance detection circuit is at the current peak value.

In a possible embodiment, the detection unit comprises at least a current detection module, which is connected in a current path of the impedance detection circuit for detecting a current value of the impedance detection circuit.

In a third aspect, an impedance detection method is provided, which is applied to the impedance detection device and is at least used for detecting a circuit reactance value Xs of the radio frequency circuit, and the impedance detection method includes:

the control and adjustment unit is used for adjusting the reactance value of the adjustable reactance unit and detecting the current value of the impedance detection circuit through the detection unit;

when the current of the impedance detection circuit reaches a peak value, the control and adjustment unit stops adjusting the reactance value of the adjustable reactance unit;

the reactance value of the impedance detection circuit at the current peak value is obtained based on the reactance value of the adjustable reactance unit of the impedance detection circuit at the current peak value, and the circuit reactance value Xs of the radio frequency circuit is obtained based on the reactance value of the impedance detection circuit at the current peak value, wherein the reactance value of the impedance detection circuit at the current peak value is conjugated with the circuit reactance value Xs of the radio frequency circuit.

The impedance detection device comprises the impedance detection circuit, a detection unit and a control unit, wherein the detection unit is used for detecting the current value of the impedance detection circuit; the control unit is used for controlling the adjusting unit to adjust the reactance value of the adjustable reactance unit firstly, controlling the adjusting unit to stop adjusting the reactance value of the adjustable reactance unit when the current of the impedance detection circuit reaches a peak value, obtaining the reactance value of the impedance detection circuit when the current of the impedance detection circuit is at the peak value based on the reactance value of the adjustable reactance unit when the current of the impedance detection circuit is at the peak value, and obtaining the circuit reactance value Xs of the radio frequency circuit based on the reactance value of the impedance detection circuit when the current of the impedance detection circuit is at the peak value, wherein the reactance value of the impedance detection circuit is conjugated with the circuit reactance value Xs of the radio frequency circuit.

According to the impedance detection circuit, the impedance detection equipment and the impedance detection method, the reactance value of the impedance detection circuit when the current peaks can be correspondingly obtained according to the reactance value of the adjustable reactance unit when the current peaks of the impedance detection circuit by the adjustable reactance unit connected to the output path of the radio frequency circuit and by adjusting the reactance value of the adjustable reactance unit, so that the circuit reactance value Xs of the radio frequency circuit can be correspondingly obtained according to the reactance value of the impedance detection circuit when the current peaks of the impedance detection circuit, and the circuit reactance value Xs of the radio frequency circuit can be dynamically detected when the radio frequency circuit works.

Drawings

In order to more clearly describe the technical solutions in the embodiments or the background of the present application, the following description will describe the drawings that are required to be used in the embodiments or the background of the present application.

Fig. 1 is a schematic diagram of an impedance detection circuit according to an embodiment of the present application.

Fig. 2 is a circuit schematic diagram of an impedance detection circuit according to an embodiment of the present application.

Fig. 3 is a schematic circuit diagram of an adjustable reactance unit according to an embodiment of the present application.

Fig. 4 is a circuit schematic diagram of an impedance detection circuit according to another embodiment of the present application.

Fig. 5 is a circuit schematic diagram of a tunable reactance unit in a further embodiment of the present application.

Fig. 6 is a circuit schematic diagram of the first resistor of the impedance detection circuit shown in fig. 4.

Fig. 7 is a schematic circuit diagram of a resistor unit according to an embodiment of the present application.

Fig. 8 is a schematic structural view of an adjusting unit in an embodiment of the present application.

Fig. 9 is a circuit schematic diagram of an impedance detecting apparatus according to an embodiment of the present application.

Fig. 10 is a schematic structural diagram of a detection unit in an embodiment of the present application.

Fig. 11 is a circuit schematic diagram of an impedance detecting apparatus in a further embodiment of the present application.

Fig. 12 is a flowchart of an impedance detection method according to an embodiment of the present application.

Fig. 13 is a flowchart of an impedance detection method according to another embodiment of the present application.

Fig. 14 is a flowchart of an impedance detection method according to another embodiment of the present application.

Reference numerals illustrate: 1. impedance detection device 10, impedance detection circuit, I0, current value, U0, voltage value, P0, power value, 100, adjustable reactance unit, L1, first adjustable inductance, C1, first adjustable capacitance, cp1, first matching capacitance, cp2, second matching capacitance, L2, second adjustable inductance, C2, second adjustable capacitance, 200, resistance unit, RH1, first resistance, RH2, second resistance, 300, adjustment unit, 310, first adjustment module, 320, second adjustment module, 400, detection unit, 410, current detection module, 420, voltage detection module, 430, power detection module, 500, control unit, 20, radio frequency circuit.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without undue burden, are within the scope of the present application.

In the description of the embodiments of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

In the description of the embodiments of the present application, it should be noted that the terms "first," "second," and "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or an implicit indication of the number of technical features being indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.

In describing embodiments of the present application, it should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above-described drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or otherwise described herein.

Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or server that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or apparatus, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

Referring to fig. 1, fig. 1 is a schematic diagram of an impedance detection circuit according to an embodiment of the present application. As shown in fig. 1, the present application provides an impedance detection circuit 10 at least for detecting a circuit reactance value Xs of a radio frequency circuit 20, where the impedance detection circuit 10 includes an adjustable reactance unit 100, a resistance unit 200, and an adjusting unit 300, and the adjustable reactance unit 100 is connected to an output path of the radio frequency circuit 20 and has an adjustable reactance value; the resistor unit 200 is connected to the output path of the radio frequency circuit 20, and is used for consuming at least part of the electric energy input to the impedance detection circuit 10; the adjusting unit 300 is at least used for adjusting the reactance value of the adjustable reactance unit 100; wherein the adjusting unit 300 adjusts the reactance value of the adjustable reactance unit 100, when the current of the impedance detecting circuit 10 reaches the peak value, the adjusting unit 300 stops adjusting the reactance value of the adjustable reactance unit 100, and the reactance value of the adjustable reactance unit 100 at the time of the peak current of the impedance detecting circuit 10 is used for obtaining the reactance value of the impedance detecting circuit 10 at the time of the peak current of the impedance detecting circuit 10, so as to obtain the circuit reactance value Xs of the radio frequency circuit 20 through the reactance value correspondence of the impedance detecting circuit 10 at the time of the peak current of the impedance detecting circuit 10, wherein the reactance value at the time of the peak current of the impedance detecting circuit 10 is conjugated with the circuit reactance value Xs of the radio frequency circuit 20.

Thus, in the impedance detection circuit 10 of the present application, by the adjustable reactance unit 100 connected to the output path of the radio frequency circuit 20 and by adjusting the reactance value of the adjustable reactance unit 100, the reactance value of the impedance detection circuit 10 at the peak current can be correspondingly obtained according to the reactance value of the adjustable reactance unit 100 at the peak current of the impedance detection circuit 10, and the circuit reactance value Xs of the radio frequency circuit 20 can be correspondingly obtained according to the reactance value of the impedance detection circuit 10 at the peak current of the impedance detection circuit 10, so as to dynamically detect the circuit reactance value Xs of the radio frequency circuit 20 when the radio frequency circuit 20 is in operation.

In one or more embodiments, the radio frequency circuit 20 may include only a radio frequency power supply, only a radio frequency power supply and an impedance matching network, and may further include other components such as a radio frequency power supply, an impedance matching network, and a load, where the impedance detection circuit 10 of the present application may dynamically detect the circuit reactance value Xs of the radio frequency circuit 20 when the radio frequency circuit 20 is in operation.

In one or more embodiments, the adjustment unit 300 may be a rotation motor, a rotation shaft of which is connected to the adjustable reactance unit 100, and a reactance value of the adjustable reactance unit 100 connected to the rotation shaft of the rotation motor increases or decreases when the rotation motor rotates.

Wherein, the rotation direction of the rotation motor includes a first direction and a second direction, the first direction is opposite to the second direction, when the rotation motor rotates in the first direction, the reactance value of the adjustable reactance unit 100 connected with the rotation shaft of the rotation motor can be increased, and correspondingly, when the rotation motor rotates in the second direction, the reactance value of the adjustable reactance unit 100 connected with the rotation shaft of the rotation motor is decreased. In addition, when the rotating motor rotates in the first direction, the reactance value of the adjustable reactance unit 100 connected to the rotating shaft of the rotating motor may also be reduced, and correspondingly, when the rotating motor rotates in the second direction, the reactance value of the adjustable reactance unit 100 connected to the rotating shaft of the rotating motor increases.

In one or more embodiments, one end of the resistor unit 200 is connected to the adjustable reactance unit 100, the other end of the resistor unit 200 may be connected to the ground terminal of the radio frequency circuit 20, the other end of the resistor unit 200 may also be grounded, and the other end of the resistor unit 200 may also be connected to the ground terminal of the radio frequency circuit 20 and ground, respectively.

In one or more embodiments, at least a portion of the tunable reactance unit 100 is connected in parallel with the resistance unit 200, and the overall reactance value of the tunable reactance unit 100 and the resistance unit 200 at the time of the current peak by the impedance detection circuit 10 is equal to the reactance value of the impedance detection circuit 10, and the reactance value of the impedance detection circuit 10 at the time of the current peak is the circuit reactance value Xs corresponding to the overall reactance value of the tunable reactance unit 100 and the resistance unit 200 at the time of the current peak by the impedance detection circuit 10.

Specifically, the circuit reactance value xs= -Xt of the radio frequency circuit 20, where Xt is the total reactance value of the adjustable reactance unit 100 and the resistance unit 200 when the impedance detection circuit 10 is at the peak current.

Thus, when the current of the impedance detection circuit 10 reaches the peak value, it indicates that the rf circuit 20 and the impedance detection circuit 10 are resonating together, and the total reactance value Xt of the adjustable reactance unit 100 and the resistance unit 200 is conjugated with the circuit reactance value Xs of the rf circuit 20, so that the circuit reactance value Xs of the rf circuit 20 can be obtained by using the resonance point of the rf circuit 20 and the impedance detection circuit 10 together.

In one or more embodiments, the adjustable reactance unit 100 is connected in series with the resistance unit 200, and the reactance value of the adjustable reactance unit 100 at the peak of the current of the impedance detection circuit 10 is equal to the reactance value of the impedance detection circuit 10, and the reactance value of the impedance detection circuit 10 at the peak of the current is obtained by the reactance value of the adjustable reactance unit 100 at the peak of the current of the impedance detection circuit 10.

Specifically, the circuit reactance value xs= -Xr of the radio frequency circuit 20, where Xr is the reactance value of the adjustable reactance unit 100 when the impedance detection circuit 10 is at the current peak.

Therefore, when the current of the impedance detection circuit 10 reaches the peak value, it indicates that the rf circuit 20 and the impedance detection circuit 10 are resonating together, the reactance value Xr of the adjustable reactance unit 100 is conjugated with the circuit reactance value Xs of the rf circuit 20, and the circuit reactance value Xs of the rf circuit 20 can be obtained by using the resonance point of the rf circuit 20 and the impedance detection circuit 10 together.

It should be noted that, compared to the impedance detection circuit 10 in which at least a portion of the adjustable reactance unit 100 is connected in parallel with the resistor unit 200, the impedance detection circuit 10 in which the adjustable reactance unit 100 is connected in series with the resistor unit 200 may directly obtain the circuit reactance value Xs of the radio frequency circuit 20 by the reactance value Xr of the adjustable reactance unit 100 when the impedance detection circuit 10 is in the peak current, but the impedance detection circuit 10 in which at least a portion of the adjustable reactance unit 100 is connected in parallel with the resistor unit 200 may better obtain the current peak value of the impedance detection circuit 10.

It should be noted that, the rf circuit 20 and the impedance detecting circuit 10 are integrally resonant, the reactance value of the impedance detecting circuit 10 is conjugated with the circuit reactance value Xs of the rf circuit 20, and in the impedance detecting circuit 10 shown in fig. 2, the impedance detecting circuit 10 only includes the adjustable reactance unit 100 connected in series in the output path of the rf circuit 20, and the reactance value of the impedance detecting circuit 10 is equal to the reactance value of the adjustable reactance unit 100 when the current peaks, so as to be convenient for indicating and calculating the circuit reactance value Xs of the rf circuit 20.

In one or more embodiments, the adjustment unit 300 adjusts the reactance value of the adjustable reactance unit 100, and when the current of the impedance detection circuit 10 increases, the circuit reactance value Xs > -Xr of the radio frequency circuit 20 is determined, and the adjustment unit 300 further adjusts the reactance value of the adjustable reactance unit 100. The adjusting unit 300 adjusts the reactance value of the adjustable reactance unit 100, determines that the circuit reactance value Xs of the radio frequency circuit 20 is < -Xr when the current of the impedance detecting circuit 10 decreases, and the adjusting unit 300 adjusts the reactance value of the adjustable reactance unit 100.

Thus, according to the change of the current of the impedance detection circuit 10, the adjustment of the reactance value of the adjustable reactance unit 100 by the adjustment unit 300 is simple, so that the current of the impedance detection circuit 10 reaches the peak value.

Referring to fig. 2, fig. 2 is a schematic circuit diagram of an impedance detection circuit according to an embodiment of the present application. As shown in fig. 2, the tunable reactance unit 100 includes a first tunable inductor L1 and a first tunable capacitor C1, where the first tunable inductor L1, the first tunable capacitor C1, and the resistor unit 200 are connected in series, and the tunable reactance value includes a tunable inductance value and/or a capacitance value.

Thus, the adjustable reactance unit 100 includes the first adjustable inductance L1 and the first adjustable capacitance C1, so as to implement adjustment of the reactance value of the adjustable reactance unit 100.

Specifically, the first tunable inductor L1, the first tunable capacitor C1, and the resistor unit 200 are connected in series, so that the tunable reactance unit 100 and the resistor unit 200 are connected in series, and the reactance value Xr of the tunable reactance unit 100 at the time of the current peak by the impedance detection circuit 10 can be correspondingly obtained as the circuit reactance value Xs of the radio frequency circuit 20.

In one or more embodiments, the adjusting unit 300 is configured to adjust at least an inductance value of the first tunable inductance L1 and/or a capacitance value of the first tunable capacitance C1 to adjust a reactance value of the tunable reactance unit 100.

Thus, the adjusting unit 300 adjusts the inductance value of the first tunable inductance L1 and/or the capacitance value of the first tunable capacitor C1 to achieve the adjustment of the reactance value of the tunable reactance unit 100.

According to the foregoing, when the reactance value Xs of the radio frequency circuit 20 and the reactance value Xr of the adjustable reactance unit 100 are conjugated, the current of the impedance detection circuit 10 reaches a peak value, the reactance value of the radio frequency circuit 20 and the impedance detection circuit 10 is zero, and the reactance properties of the radio frequency circuit 20 and the impedance detection circuit 10 are inductive or capacitive, which results in a decrease of the current value I0 of the impedance detection circuit 10. Thus, in one or more embodiments, for the adjustment of the first tunable inductance L1, the adjustment unit 300 increases the inductance value of the first tunable inductance L1, determines that the reactance property of the radio frequency circuit 20 and the whole impedance detection circuit 10 is capacitive when the current of the impedance detection circuit 10 increases, and the adjustment unit 300 further increases the inductance value of the first tunable inductance L1, determines that the reactance property of the radio frequency circuit 20 and the whole impedance detection circuit 10 is inductive when the current of the impedance detection circuit 10 decreases, and the adjustment unit 300 decreases the inductance value of the first tunable inductance L1. For the adjustment of the first adjustable capacitor C1, the adjusting unit 300 adjusts the capacitance value of the first adjustable capacitor C1, when the current of the impedance detection circuit 10 increases, it is determined that the reactance attribute of the radio frequency circuit 20 and the whole impedance detection circuit 10 is capacitive, the adjusting unit 300 further adjusts the capacitance value of the first adjustable capacitor C1, when the current of the impedance detection circuit 10 decreases, it is determined that the reactance attribute of the radio frequency circuit 20 and the whole impedance detection circuit 10 is capacitive, and the adjusting unit 300 adjusts the capacitance value of the first adjustable capacitor C1.

As shown in fig. 2, the resistor unit 200 includes at least a first resistor RH1, and the first resistor RH1 is configured to consume at least a portion of the electrical energy input to the impedance detection circuit 10.

Therefore, the first resistor RH1 consumes electric energy, so as to avoid generating larger reflected power in the impedance detection circuit 10, and further influence the constituent units of the rf power supply in the rf circuit 20.

Referring to fig. 3, fig. 3 is a schematic circuit diagram of an adjustable reactance unit according to an embodiment of the present application. As shown in fig. 2 and 3, the adjustable reactance unit 100 further includes a second adjustable inductor L2 and a second adjustable capacitor C2, where the second adjustable inductor L2 and the second adjustable capacitor C2 are connected in series with the first adjustable capacitor C1, and the second adjustable inductor L2 and the first adjustable inductor L1 have different variation precision, and the second adjustable capacitor C2 and the first adjustable capacitor C1 have different variation precision, where the variation precision is that the adjusting unit 300 adjusts the inductance variation values of the first adjustable inductor L1 and the second adjustable inductor L2 or adjusts the capacitance variation values of the first adjustable capacitor C1 and the second adjustable capacitor C2 once.

Therefore, when the adjusting unit 300 adjusts the reactance value of the adjustable reactance unit 100 through the second adjustable inductance L2 with different accuracy of the first adjustable inductance L1 and through the second adjustable capacitance C2 with different accuracy of the first adjustable capacitance C1, the reactance value of the adjustable reactance unit 100 can be adjusted with different accuracy of the change, and the reactance value of the adjustable reactance unit 100 can be adjusted with different accuracy of the change according to specific needs, so as to avoid missing the current peak value of the impedance detection circuit 10.

Specifically, the higher the variation accuracy, the smaller the inductance variation value of the first adjustable inductance L1 and the second adjustable inductance L2 is adjusted once or the capacitance variation value of the first adjustable capacitance C1 and the second adjustable capacitance C2 is adjusted once. Conversely, the lower the variation accuracy is, the larger the inductance variation value of the first adjustable inductance L1 and the second adjustable inductance L2 is adjusted once or the capacitance variation value of the first adjustable capacitance C1 and the second adjustable capacitance C2 is adjusted once.

In one or more embodiments, the variation accuracy of the second adjustable inductance L2 is greater than the variation accuracy of the first adjustable inductance L1, the variation accuracy of the second adjustable capacitance C2 is greater than the variation accuracy of the first adjustable capacitance C1, the inductance value of the first adjustable inductance L1 and/or the capacitance value of the first adjustable capacitance C1 are adjusted by the adjusting unit 300, and the inductance value of the second adjustable inductance L2 and/or the capacitance value of the second adjustable capacitance C2 are further adjusted to obtain the current peak value of the impedance detecting circuit 10.

Therefore, the adjusting unit 300 adjusts the inductance value of the first adjustable inductor L1 and/or the capacitance value of the first adjustable capacitor C1, and further adjusts the inductance value of the second adjustable inductor L2 and/or the capacitance value of the second adjustable capacitor C2, so that the reactance value of the adjustable reactance unit 100 can be coarsely adjusted, and further fine adjustment is performed on the reactance value of the adjustable reactance unit 100, so that the situation that the accuracy of change is overlarge and the current peak value of the impedance detection circuit 10 is missed is avoided.

In one or more embodiments, the inductance value of the second tunable inductor L2 is different from that of the first tunable inductor L1, so that the accuracy of the change of the second tunable inductor L2 is different from that of the first tunable inductor L1, and the capacitance value of the second tunable capacitor C2 is different from that of the first tunable capacitor C1, so that the accuracy of the change of the second tunable capacitor C2 is different from that of the first tunable capacitor C1.

When the inductance value of the second adjustable inductor L2 is smaller than the inductance value of the first adjustable inductor L1, the variation accuracy of the second adjustable inductor L2 is greater than the variation accuracy of the first adjustable inductor L1, and when the capacitance value of the second adjustable capacitor C2 is smaller than the capacitance value of the first adjustable capacitor C1, the variation accuracy of the second adjustable capacitor C2 is greater than the variation accuracy of the first adjustable capacitor C1.

Referring to fig. 4 together, fig. 4 is a schematic circuit diagram of an impedance detection circuit according to another embodiment of the present application. As shown in fig. 4, the adjustable reactance unit 100 includes a first adjustable inductance L1, a first adjustable capacitance C1, and a first matching capacitance Cp1, where the first adjustable inductance L1, the first adjustable capacitance C1, and the resistance unit 200 are connected in series, and the first matching capacitance Cp1 is connected in parallel with the resistance unit 200, and the adjustable reactance value includes an adjustable inductance value and/or a capacitance value.

Thus, the reactance value of the adjustable reactance unit 100 is adjusted by the first matching capacitor Cp1 to better acquire the current peak value of the impedance detecting circuit 10.

Specifically, the first tunable inductor L1, the first tunable capacitor C1, and the resistor unit 200 are connected in series, and the first matching capacitor Cp1 is connected in parallel with the resistor unit 200, so that at least a portion of the tunable reactance unit 100 is connected in parallel with the resistor unit 200, and the total reactance value Xt of the tunable reactance unit 100 and the resistor unit 200 at the time of the current peak of the impedance detection circuit 10 can correspondingly obtain the circuit reactance value Xs of the radio frequency circuit 20.

In one or more embodiments, the adjusting unit 300 is further configured to adjust the capacitance value of the first matching capacitance Cp1 to adjust the reactance value of the adjustable reactance unit 100.

Thus, the adjusting unit 300 adjusts the capacitance value of the first matching capacitance Cp1 to achieve the adjustment of the reactance value of the adjustable reactance unit 100.

It should be noted that, according to the above description, the rf circuit 20 and the impedance detecting circuit 10 are integrally resonant, the reactance value of the impedance detecting circuit 10 is conjugated with the circuit reactance value Xs of the rf circuit 20, and compared with the impedance detecting circuit 10 shown in fig. 2, in the impedance detecting circuit 10 shown in fig. 4, the impedance detecting circuit 10 includes not only the first adjustable inductance L1 and the first adjustable capacitance C1 connected in series in the output path of the rf circuit 20, but also the first matching capacitance Cp1 connected in parallel in the output path of the rf circuit 20, and the reactance value of the impedance detecting circuit 10 is not equal to the reactance value of the adjustable reactance unit 100.

In one or more embodiments, as in the impedance detection circuit 10 shown in fig. 4, the reactance value of the adjustable reactance unit 100 and the resistance value of the resistance unit 200 at the peak of the current of the impedance detection circuit 10 are used to correspondingly obtain the circuit reactance value Xs of the radio frequency circuit 20.

Specifically, the circuit reactance value xs= -Xt of the radio frequency circuit 20, where Xt is not only the overall reactance value of the adjustable reactance unit 100 and the resistance unit 200 of the impedance detection circuit 10 at the current peak, but also the reactance value of the impedance detection circuit 10 at the current peak.

Specifically, the impedance value of the impedance detection circuit 10 is Z1, including a reactance portion and a resistance portion, the reactance value Xt of the impedance detection circuit 10 at the peak of the current of the impedance detection circuit 10 is the reactance portion of the impedance value Z1 of the impedance detection circuit 10, and the adjustable reactance unit 100 includes a first adjustable inductance L1, a first adjustable capacitance C1, and a first matching capacitance Cp1, the resistance unit 200 includes a first resistance RH1 as an example, and the impedance value Z1 of the impedance detection circuit 10 satisfies the following relational expression:

z1=xl+xc+rh1// Xp, where XL is the reactance value of the first adjustable inductor L1, XC is the reactance value of the first adjustable capacitor C1, RH1 is the resistance value of the first resistor RH1, and Xp is the reactance value of the first matching capacitor Cp 1.

According to the admittance calculation formula, the impedance values of the first matching capacitor Cp1 and the first resistor RH1 connected in parallel also satisfy the following relational expression:

RH1//Xp=1/[1/RH1+1/(Xp×j)]=[(RH1×Xp ² )-RH1 ² ×Xp×j]/[RH1 ² +Xp ² ]where j is an imaginary unit.

Splitting the reactance part and the resistance part in the above relational expression, and connecting the first matching capacitor Cp1 and the first resistor RH1 in parallel to each other to obtain the impedance value RH1// Xp=RH 1 Xp ² /(RH1 ² +Xp ² )-RH1 ² ×Xp×j/(RH1 ² +Xp ² )。

Therefore, the reactance value xt=xl+xc-RH 1 of the impedance detection circuit 10 ² ×Xp×j/(RH1 ² +Xp ² ) The jetThe circuit reactance value xs= -XL-xc+rh1 of the frequency circuit 20 ² ×Xp×j/(RH1 ² +Xp ² )。

In one or more embodiments, when the resistance value of the resistance unit 200 is equal to the resistance value of the rf circuit 20, the impedance value Z1 of the impedance detection circuit 10 is also conjugated to the impedance value of the rf circuit 20.

Therefore, according to the impedance value of the impedance detection circuit 10 when the impedance detection circuit 10 is at the peak value of the current, the impedance value of the radio frequency circuit 20 can be directly obtained, so as to dynamically detect the impedance value of the radio frequency circuit 20 when the radio frequency circuit 20 is in operation.

For example, the resistance of the resistor unit 200 and the resistance of the rf circuit 20 may be both 50 ohm standard resistance to achieve matching of the resistors, and 50 ohm standard resistance is also a matching resistance commonly used in rf circuits.

Referring to fig. 5, fig. 5 is a schematic circuit diagram of an adjustable reactance unit according to another embodiment of the present application. As shown in fig. 4 and fig. 5, the adjustable reactance unit 100 further includes a second matching capacitor Cp2, where the second matching capacitor Cp2 is connected in series with the first matching capacitor Cp1, and the second matching capacitor Cp2 and the first matching capacitor Cp1 have different variation accuracy, where the variation accuracy is that the adjusting unit 300 adjusts the inductance variation values of the first matching capacitor Cp1 and the second matching capacitor Cp2 at a time.

The more specific relationship between the second matching capacitor Cp2 and the first matching capacitor Cp1 can be referred to the relationship between the second adjustable inductor L2 and the first adjustable inductor L1 or the relationship between the second adjustable capacitor C2 and the first adjustable capacitor C1 in any of the above embodiments, which are not described herein.

Referring to fig. 6, fig. 6 is a circuit schematic diagram of the first resistor of the impedance detection circuit shown in fig. 4. As shown in fig. 6, the impedance value of the radio frequency circuit 20 further includes a circuit resistance value Rs, the adjusting unit 300 is further configured to adjust the resistance value of the resistance unit 200, where when the current of the impedance detecting circuit 10 reaches a peak value, the adjusting unit 300 stops adjusting the reactance value of the adjustable reactance unit 100, and further adjusts the resistance value of the resistance unit 200, so that the resistance units 200 are respectively at different resistance values, and further, the voltages of the resistance units 200 are respectively at different voltage values U0, and each resistance value U0 of the resistance units 200 and each voltage value U0 of the adjustable reactance unit 100 when the resistance units 200 are at each resistance value are used to calculate the obtained circuit resistance value Rs of the radio frequency circuit 20.

Thus, the resistance value Rs of the rf circuit 20 can be obtained by adjusting the resistance value of the resistance unit 200 by the adjusting unit 300 and according to each resistance value of the resistance unit 200 and each voltage value U0 of the adjustable reactance unit 100 when the resistance unit 200 is at each resistance value, so as to dynamically detect the circuit resistance value Rs of the rf circuit 20 when the rf circuit 20 is operating. Meanwhile, based on the circuit reactance value Xs and the circuit resistance value Rs of the radio frequency circuit 20, the impedance value of the radio frequency circuit 20 can be obtained, so that the impedance value of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works.

The first resistor RH1 of the resistor unit 200 is an adjustable resistor, and the adjusting unit 300 adjusts the resistance value of the resistor unit 200, that is, adjusts the resistance value of the first resistor RH 1.

In one or more embodiments, when the current of the impedance detecting circuit 10 reaches a peak value, the adjusting unit 300 adjusts the resistance value of the resistance unit 200 at least once, so that the resistance unit 200 is at least at the first resistance value R1 and the second resistance value R2, respectively, and the circuit resistance value Rs of the radio frequency circuit 20 is calculated based on the first resistance value R1, the second resistance value R2, and the voltage value U0 of the adjustable reactance unit 100 when the resistance unit 200 is at the first resistance value R1 and the second resistance value R2, respectively.

Therefore, the circuit resistance Rs of the radio frequency circuit 20 can be calculated by only performing one-time adjustment on the resistance value of the resistance unit 200 and by the first resistance value R1, the second resistance value R2 and the voltage value U0 of the adjustable reactance unit 100 when the resistance unit 200 is respectively at the first resistance value R1 and the second resistance value R2, so that the adjustment is simple and convenient, and the calculation is simple.

In one or more embodiments, the circuit resistance Rs of the radio frequency circuit 20 is calculated based on the first resistance R1, the second resistance R2, the voltage U0 of the adjustable reactance unit 100 when the resistance unit 200 is at the first resistance R1 and the second resistance R2, respectively, and the following relational expressions: u1/u2= (rs+r2)/(rs+r1), where U1 is a first voltage value of the adjustable reactance unit 100 when the resistance unit 200 is at the first resistance value R1, and U2 is a second voltage value of the adjustable reactance unit 100 when the resistance unit 200 is at the second resistance value R2.

Thus, by the relational expression U1/u2= (rs+r2)/(rs+r1), the first resistance value R1, the second resistance value R2, the first voltage value U1, and the second voltage value U2 are all known, and the circuit resistance value Rs of the radio frequency circuit 20 can be calculated.

Specifically, when the current of the impedance detecting circuit 10 reaches the peak value, the adjusting unit 300 adjusts the resistance value of the resistor unit 200 at least once, so that the resistor unit 200 is at least at the first resistance value R1 and the second resistance value R2, respectively, and the first voltage value U1 of the adjustable reactance unit 100 when the resistor unit 200 is at the first resistance value R1 and the second voltage value U2 of the adjustable reactance unit 100 when the resistor unit 200 is at the second resistance value R2 satisfy the following relational expression:

U1=U×X/(Rs+R1)；U2=U×X/(Rs+R2)。

Where U is the total voltage value of the radio frequency circuit 20 and the impedance detection circuit 10, and X is the total reactance value of the radio frequency circuit 20 and the impedance detection circuit 10.

Therefore, U1/u2= (rs+r2)/(rs+r1), the total voltage value U of the radio frequency circuit 20 and the impedance detection circuit 10 as a whole, and the total reactance value X of the radio frequency circuit 20 and the impedance detection circuit 10 as a whole need not be obtained, and the circuit resistance value Rs of the radio frequency circuit 20 can be calculated by only the first resistance value R1, the second resistance value R2, the first voltage value U1, and the second voltage value U2 of the impedance detection circuit 10. In one or more embodiments, when the current of the impedance detecting circuit 10 reaches a peak value, the adjusting unit 300 stops adjusting the reactance value of the adjustable reactance unit 100 and further adjusts the resistance value of the resistance unit 200, or when the power of the resistance unit 200 reaches a peak value, the resistance value of the resistance unit 200 may be used to obtain the circuit resistance value Rs of the radio frequency circuit 20 correspondingly.

Therefore, according to the resistance value of the resistor unit 200 when the power of the resistor unit 200 reaches the peak value, the circuit resistance value Rs of the radio frequency circuit 20 can be obtained, so that the circuit resistance value Rs of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works, and compared with the resistance value of the resistor unit 200 is adjusted, the circuit resistance value Rs of the radio frequency circuit 20 can be determined according to the resistance value of the resistor unit 200 when the power of the resistor unit 200 reaches the peak value without calculation when the resistor unit 200 is respectively at different resistance values. Meanwhile, based on the circuit reactance value Xs and the circuit resistance value Rs of the radio frequency circuit 20, the impedance value of the radio frequency circuit 20 can be obtained, so that the impedance value of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works.

In one or more embodiments, the circuit resistance value rs=rm of the radio frequency circuit 20, where Rm is the resistance value of the resistance unit 200 at the peak of power of the resistance unit 200.

Therefore, when the power of the resistance unit 200 reaches the peak value, it indicates that the rf circuit 20 is impedance-matched with the entire impedance detection circuit 10, and the resistance value Rm of the adjustable reactance unit 100 is equal to the circuit resistance value Rs of the rf circuit 20, and the circuit resistance value Rs of the rf circuit 20 can be obtained correspondingly by using the time when the impedance of the rf circuit 20 and the entire impedance detection circuit 10 is matched.

In one or more embodiments, the adjustment unit 300 adjusts the resistance value of the resistance unit 200, and when the power of the resistance unit 200 increases, it is determined that the circuit resistance value Rs > Rm of the radio frequency circuit 20, and the adjustment unit 300 further adjusts the resistance value of the resistance unit 200. The adjusting unit 300 adjusts the resistance value of the resistance unit 200, determines that the circuit resistance value Rs < Rm of the radio frequency circuit 20 when the power of the resistance unit 200 decreases, and the adjusting unit 300 adjusts the resistance value of the resistance unit 200.

Thus, according to the change of the power of the resistance unit 200, the adjustment of the reactance value of the resistance unit 200 by the adjustment unit 300 is adjusted, and the adjustment is simple, so that the power of the resistance unit 200 reaches the peak value.

Referring to fig. 7, fig. 7 is a schematic circuit diagram of a resistor unit according to an embodiment of the present application. As shown in fig. 6 and 7, the resistor unit 200 further includes a second resistor RH2, the second resistor RH2 is an adjustable resistor, the second resistor RH2 is connected in series with the first resistor RH1, and the second resistor RH2 and the first resistor RH1 have different variation precision, where the variation precision is that the adjusting unit 300 adjusts the resistance variation values of the first resistor RH1 and the second resistor RH2 at a single time.

Thus, when the adjusting unit 300 adjusts the resistance value of the resistance unit 200 by the second resistance RH2 having a different accuracy from the first resistance RH1, the resistance value of the resistance unit 200 can be adjusted with a different accuracy according to specific needs.

The more specific relationship between the second resistor RH2 and the first resistor RH1 can be referred to the relationship between the second adjustable inductor L2 and the first adjustable inductor L1 or the relationship between the second adjustable capacitor C2 and the first adjustable capacitor C1 in any of the above embodiments, which are not described herein.

Referring to fig. 8, fig. 8 is a schematic structural diagram of an adjusting unit according to an embodiment of the present application. As shown in fig. 2, 6 and 8, the adjusting unit 300 includes a first adjusting module 310 and a second adjusting module 320, and an adjusting amplitude of each adjustment of the first adjusting module 310 is greater than an adjusting amplitude of each adjustment of the second adjusting module 320.

Therefore, the adjustment amplitude of each adjustment of the first adjustment module 310 is larger than that of each adjustment of the second adjustment module 320, so that when the adjustment unit 300 adjusts the reactance value of the adjustable reactance unit 100, the reactance value of the adjustable reactance unit 100 can be adjusted with different adjustment amplitudes, and the current peak value of the impedance detection circuit 10 is prevented from being missed. And so that the resistance value of the resistance unit 200 can be adjusted with different adjustment amplitudes when the resistance value of the resistance unit 200 is adjusted by the adjustment unit 300, and the resistance value of the resistance unit 200 can be adjusted with different variation accuracies according to specific needs.

In one or more embodiments, in the process of adjusting the reactance value of the adjustable reactance unit 100 by the adjusting unit 300, to adjust the reactance value of the adjustable reactance unit 100 by the first adjusting module 310, then further adjust the reactance value of the adjustable reactance unit 100 by the second adjusting module 320, to obtain the current peak value of the impedance detecting circuit 10.

Therefore, the reactance value of the adjustable reactance unit 100 is adjusted by the first adjusting module 310, the reactance value of the adjustable reactance unit 100 can be coarse-adjusted first, and then the reactance value of the adjustable reactance unit 100 is further fine-adjusted by the second adjusting module 320, so that the condition that the adjustment amplitude is too large and the current peak value of the impedance detection circuit 10 is missed is avoided.

In one or more embodiments, the first adjustment module 310 and the second adjustment module 320 may each be a rotating motor.

In one or more embodiments, the impedance detecting circuit 10 may include the first tunable inductor L1, the first tunable capacitor C1, the second tunable inductor L2, the second tunable capacitor C2, the first matching capacitor Cp1 and the second matching capacitor Cp2 as shown in fig. 5, and the first adjusting module 310 and the second adjusting module 320 as shown in fig. 8, and the impedance detecting circuit 10 may also include only a portion.

Therefore, the reactance value of the adjustable reactance unit 100 can be finely adjusted by having a plurality of adjustment modes, different change accuracies and different adjustment amplitudes, and the current peak value of the impedance detection circuit 10 is prevented from being missed.

According to the impedance detection circuit 10, through the structure, the reactance value of the adjustable reactance unit 100 can be adjusted with different change precision and adjustment amplitude, the current peak value of the impedance detection circuit 10 is avoided from being missed, and the circuit reactance value Xs of the radio frequency circuit 20 can be obtained at least according to the reactance value of the adjustable reactance unit 100 when the impedance detection circuit 10 is in the current peak value, so that the circuit reactance value Xs of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works.

Referring to fig. 9, fig. 9 is a circuit schematic diagram of an impedance detecting apparatus according to an embodiment of the present application. As shown in fig. 9, the present application further provides an impedance detecting apparatus 1, the impedance detecting apparatus 1 including the impedance detecting circuit 10 in any of the foregoing embodiments, the impedance detecting apparatus 1 further including a detecting unit 400 and a control unit 500, the detecting unit 400 being configured to detect at least a current value I0 of the impedance detecting circuit 10; the control unit 500 is configured to control the adjusting unit 300 to adjust the reactance value of the adjustable reactance unit 100 at least first, and when the current of the impedance detecting circuit 10 reaches a peak value, control the adjusting unit 300 to stop adjusting the reactance value of the adjustable reactance unit 100, obtain the reactance value of the impedance detecting circuit 10 at the peak current value based on the reactance value of the adjustable reactance unit 100 at the peak current value of the impedance detecting circuit 10, and obtain the circuit reactance value Xs of the radio frequency circuit 20 based on the reactance value of the impedance detecting circuit 10 at the peak current value, where the reactance value of the impedance detecting circuit 10 at the peak current value is conjugated with the circuit reactance value Xs of the radio frequency circuit 20.

The impedance detection circuit 10 includes an adjustable reactance unit 100, a resistance unit 200, and an adjustment unit 300, where the adjustable reactance unit 100 is connected to the output path of the radio frequency circuit 20 and has an adjustable reactance value; the resistor unit 200 is connected to the output path of the radio frequency circuit 20, and is used for consuming at least part of the electric energy input to the impedance detection circuit 10; the adjusting unit 300 is at least used for adjusting the reactance value of the adjustable reactance unit 100; wherein the adjusting unit 300 adjusts the reactance value of the adjustable reactance unit 100, when the current of the impedance detecting circuit 10 reaches the peak value, the adjusting unit 300 stops adjusting the reactance value of the adjustable reactance unit 100, and the reactance value of the adjustable reactance unit 100 at the time of the peak current of the impedance detecting circuit 10 is used for obtaining the reactance value of the impedance detecting circuit 10 at the time of the peak current of the impedance detecting circuit 10, so as to obtain the circuit reactance value Xs of the radio frequency circuit 20 through the reactance value correspondence of the impedance detecting circuit 10 at the time of the peak current of the impedance detecting circuit 10, wherein the reactance value at the time of the peak current of the impedance detecting circuit 10 is conjugated with the circuit reactance value Xs of the radio frequency circuit 20.

The more specific structure of the impedance detection circuit 10 can be seen in any of the above embodiments, and the details of the impedance detection circuit 10 are not described herein.

Accordingly, the current value I0 of the impedance detection circuit 10 is detected by the detection unit 400, and the reactance value of the adjustable reactance unit 100 is adjusted by the control unit 500 to control the adjustment unit 300, so that the reactance value of the impedance detection circuit 10 at the peak of the current can be correspondingly obtained according to the reactance value of the adjustable reactance unit 100 at the peak of the current of the impedance detection circuit 10, and the circuit reactance value Xs of the radio frequency circuit 20 can be correspondingly obtained according to the reactance value of the impedance detection circuit 10 at the peak of the current of the impedance detection circuit 10, so as to dynamically detect the circuit reactance value Xs of the radio frequency circuit 20 when the radio frequency circuit 20 is operated.

In particular, the detection unit 400 may be used as a part of the impedance detection circuit 10 to detect the current value I0 of the impedance detection circuit 10.

Specifically, the control unit 500 adjusts the reactance value of the adjustable reactance unit 100 by controlling the adjusting unit 300 to obtain the reactance value of the adjustable reactance unit 100 when the impedance detecting circuit 10 is at the peak current, so as to obtain the circuit reactance value Xs of the radio frequency circuit 20 correspondingly.

In one or more embodiments, the control unit 500 is further configured to control the adjusting unit 300 to stop adjusting the reactance value of the adjustable reactance unit 100 and further adjust the resistance value of the resistance unit 200 when the current of the impedance detecting circuit 10 reaches a peak value, and calculate the circuit resistance value Rs of the radio frequency circuit 20 based on the reactance value of the adjustable reactance unit 100 when the current of the impedance detecting circuit 10 reaches the peak value, the respective resistance value of the resistance unit 200, and the respective voltage value U0 when the adjustable reactance unit 100 reaches the respective resistance value of the resistance unit 200.

In one or more embodiments, the control unit 500 is further configured to control the adjusting unit 300 to stop adjusting the reactance value of the adjustable reactance unit 100 and further adjust the resistance value of the resistance unit 200 when the current of the impedance detection circuit 10 reaches a peak value, and correspondingly obtain the circuit resistance value Rs of the radio frequency circuit 20 based on the reactance value of the adjustable reactance unit 100 when the current of the impedance detection circuit 10 reaches the peak value and the resistance value of the resistance unit 200 when the power of the resistance unit 200 reaches the peak value.

In one or more embodiments, when the adjustment unit 300 is a rotating motor, the control unit 500 adjusts the reactance value of the adjustable reactance unit 100 and the resistance value of the resistance unit 200 connected to the rotating shaft of the rotating motor by controlling the rotating direction and the number of rotations or a specific rotation angle of the rotating motor.

In one or more embodiments, the control unit 500 is further configured to control the adjusting unit 300 to increase the reactance value of the adjustable reactance unit 100, and detect, by the detecting unit 400, the current value I0 of the impedance detecting circuit 10, and when the current of the impedance detecting circuit 10 increases, control the adjusting unit 300 to further increase the reactance value of the adjustable reactance unit 100, and when the current of the impedance detecting circuit 10 decreases, control the adjusting unit 300 to decrease the reactance value of the adjustable reactance unit 100.

In one or more embodiments, the control unit 500 may be a general-purpose processor such as a central processing unit (Central Processing Unit, CPU), a digital signal processor (Digital Signal Processor, DSP), an application specific integrated circuit (Application Specific Integrated Circuit, ASIC), a Field programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic device, a discrete gate logic device, a logic control device such as a transistor logic device, or a microprocessor such as a micro control unit (Micro Control Unit, MCU).

Referring to fig. 10, fig. 10 is a schematic structural diagram of a detection unit according to an embodiment of the present application. As shown in fig. 9 and 10, the detection unit 400 includes at least a current detection module 410, and the current detection module 410 is configured to detect a current value I0 of the impedance detection circuit 10.

Thus, the current value I0 of the impedance detection circuit 10 is detected by the current detection module 410.

As shown in fig. 10, the detecting unit 400 further includes a voltage detecting module 420 and a power detecting module 430, the voltage detecting module 420 is configured to detect each voltage value U0 when the adjustable reactance unit 100 is at each resistance value, and the power detecting module 430 is configured to detect the power value P0 of the resistance unit 200.

Referring to fig. 11 together, fig. 11 is a schematic circuit diagram of an impedance detecting apparatus according to another embodiment of the present application. As shown in fig. 9, 10 and 11, the current detection module 410 is connected to the output path of the radio frequency circuit 20, the voltage detection module 420 is connected to two ends of the adjustable reactance unit 100 in parallel, the power detection module 430 is connected to two ends of the resistance unit 200 in parallel, wherein the current detection module 410 is an ammeter, the voltage detection module 420 is a voltmeter, and the power detection module 430 is a power meter.

Thus, the current detection module 410 is an ammeter, the voltage detection module 420 is a voltmeter, and the power detection module 430 is a power meter to detect the current value I0 of the impedance detection circuit 10, the voltage values U0 when the adjustable reactance unit 100 is at the respective resistance values, and the power value P0 of the resistance unit 200 in real time.

According to the impedance detection circuit 10 and the impedance detection device 1, through the structure, the current value I0 of the impedance detection circuit 10 is detected through the detection unit 400, the reactance value of the adjustable reactance unit 100 is firstly adjusted through the control unit 500 by controlling the adjusting unit 300, the reactance value of the adjustable reactance unit 100 can be adjusted with different change precision and adjustment amplitude, the current peak value of the impedance detection circuit 10 is avoided, the reactance value of the adjustable reactance unit 100 at the current peak value according to at least the impedance detection circuit 10 can be correspondingly obtained, the reactance value of the impedance detection circuit 10 at the current peak value can be correspondingly obtained, and the circuit reactance value Xs of the radio frequency circuit 20 can be correspondingly obtained according to the reactance value of the impedance detection circuit 10 at the current peak value, so that the circuit reactance value Xs of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works.

Referring to fig. 12, fig. 12 is a flowchart of an impedance detection method according to an embodiment of the present application. As shown in fig. 9 and 12, the present application further provides an impedance detection method, which is applied to the impedance detection apparatus 1 in any of the foregoing embodiments, and is at least used for detecting a circuit reactance value Xs of the radio frequency circuit 20, where the impedance detection method includes:

Step S100: the control and adjustment unit is used for adjusting the reactance value of the adjustable reactance unit and detecting the current value of the impedance detection circuit through the detection unit;

step S200: when the current of the impedance detection circuit reaches a peak value, the control and adjustment unit stops adjusting the reactance value of the adjustable reactance unit;

step S300: the reactance value of the impedance detection circuit at the current peak value is obtained based on the reactance value of the adjustable reactance unit of the impedance detection circuit at the current peak value, and the circuit reactance value Xs of the radio frequency circuit is obtained based on the reactance value of the impedance detection circuit at the current peak value, wherein the reactance value of the impedance detection circuit at the current peak value is conjugated with the circuit reactance value Xs of the radio frequency circuit.

As shown in fig. 9, the impedance detecting apparatus 1 includes the impedance detecting circuit 10 in any of the foregoing embodiments, the impedance detecting apparatus 1 further includes a detecting unit 400 and a control unit 500, the detecting unit 400 being configured to detect at least a current value I0 of the impedance detecting circuit 10; the control unit 500 is configured to control the adjusting unit 300 to adjust the reactance value of the adjustable reactance unit 100 at least first, and when the current of the impedance detecting circuit 10 reaches a peak value, control the adjusting unit 300 to stop adjusting the reactance value of the adjustable reactance unit 100, obtain the reactance value of the impedance detecting circuit 10 at the peak current value based on the reactance value of the adjustable reactance unit 100 at the peak current value of the impedance detecting circuit 10, and obtain the circuit reactance value Xs of the radio frequency circuit 20 based on the reactance value of the impedance detecting circuit 10 at the peak current value, where the reactance value of the impedance detecting circuit 10 at the peak current value is conjugated with the circuit reactance value Xs of the radio frequency circuit 20.

Thus, the reactance value of the reactance unit 100 is adjusted according to the current peak of the impedance detection circuit 10 to dynamically detect the impedance value of the radio frequency circuit 20 while the radio frequency circuit 20 is operating.

Referring to fig. 13 together, fig. 13 is a flowchart of an impedance detection method according to another embodiment of the present application. As shown in fig. 12 and 13, the adjusting unit 300 is further configured to adjust a resistance value of the resistance unit 200, and the impedance detection method is further configured to detect a circuit reactance value Xs of the radio frequency circuit, and step S300: obtaining the reactance value of the impedance detection circuit when the current is peak based on the reactance value of the adjustable reactance unit when the current is peak, and obtaining the circuit reactance value Xs of the radio frequency circuit based on the reactance value of the impedance detection circuit when the current is peak, wherein the reactance value of the impedance detection circuit when the current is peak is conjugate with the circuit reactance value Xs of the radio frequency circuit, and the method further comprises:

step S310: the control and adjustment unit is used for further adjusting the resistance value of the resistance unit and detecting each voltage value of the adjustable reactance unit when the resistance unit is at each resistance value through the detection unit;

step S311: and calculating the circuit reactance value Xs of the radio frequency circuit based on each resistance value of the resistance unit and each voltage value of the adjustable reactance unit when the resistance unit is at each resistance value.

Therefore, the circuit resistance value Rs of the radio frequency circuit 20 is calculated by the respective resistance values of the resistor unit 200 and the respective voltage values U0 of the adjustable reactance unit 100 when the resistor unit 200 is at the respective resistance values, and the impedance value of the radio frequency circuit 20 can be obtained based on the circuit resistance value Xs and the circuit resistance value Rs of the radio frequency circuit 20, so as to dynamically detect the impedance value of the radio frequency circuit 20 when the radio frequency circuit 20 is in operation.

Referring to fig. 14 together, fig. 14 is a flowchart of an impedance detection method according to another embodiment of the present application. As shown in fig. 12 and 14, in one or more embodiments, step S300: obtaining the reactance value of the impedance detection circuit when the current is peak based on the reactance value of the adjustable reactance unit when the current is peak, and obtaining the circuit reactance value Xs of the radio frequency circuit based on the reactance value of the impedance detection circuit when the current is peak, wherein the reactance value of the impedance detection circuit when the current is peak is conjugate with the circuit reactance value Xs of the radio frequency circuit, and the method further comprises the following steps:

step S320: the control and regulation unit is used for further regulating the resistance value of the resistance unit and detecting the power value of the resistance unit through the detection unit;

Step S321: and correspondingly obtaining a circuit reactance value Xs of the radio frequency circuit based on the resistance value of the resistance unit when the power of the resistance unit reaches the peak value.

Therefore, the circuit resistance Rs of the rf circuit 20 is obtained by the resistance value of the resistor unit when the power of the resistor unit reaches the peak value, and the impedance value of the rf circuit 20 can be obtained based on the circuit reactance Xs and the circuit resistance Rs of the rf circuit 20, so as to dynamically detect the impedance value of the rf circuit 20 when the rf circuit 20 works.

The more specific step of detecting the circuit reactance value Xs of the radio frequency circuit can refer to the manner of obtaining the circuit reactance value Xs of the radio frequency circuit in any of the above embodiments, which is not described herein again.

According to the impedance detection circuit 10, the impedance detection device 1 and the impedance detection method, through the structure and the method, the reactance value of the adjustable reactance unit 100 can be adjusted with different change precision and adjustment amplitude, the current peak value of the impedance detection circuit 10 is avoided from being missed, the reactance value of the impedance detection circuit 10 at the current peak value can be correspondingly obtained according to the reactance value of the adjustable reactance unit 100 of the impedance detection circuit 10 at the current peak value, and the circuit reactance value Xs of the radio frequency circuit 20 can be correspondingly obtained according to the reactance value of the impedance detection circuit 10 at the current peak value, so that the circuit reactance value Xs of the radio frequency circuit 20 can be dynamically detected when the radio frequency circuit 20 works.

The foregoing description is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and should be covered in the scope of the present application; embodiments of the present application and features of embodiments may be combined with each other without conflict. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An impedance detection circuit for detecting at least a circuit reactance value Xs of a radio frequency circuit, comprising:

the adjustable reactance unit is connected in the output path of the radio frequency circuit and has an adjustable reactance value;

a resistor unit connected to the output path of the radio frequency circuit for consuming at least part of the electric energy input to the impedance detection circuit;

the adjusting unit is at least used for adjusting the reactance value of the adjustable reactance unit;

the adjusting unit is used for adjusting the reactance value of the adjustable reactance unit, when the current of the impedance detection circuit reaches a peak value, the adjusting unit stops adjusting the reactance value of the adjustable reactance unit, the reactance value of the adjustable reactance unit is used for obtaining the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, so that the circuit reactance value Xs of the radio frequency circuit is obtained through the reactance value of the impedance detection circuit when the impedance detection circuit is at the current peak value, and the reactance value of the impedance detection circuit is conjugated with the circuit reactance value Xs of the radio frequency circuit when the impedance detection circuit is at the current peak value.

2. The impedance detection circuit according to claim 1, wherein at least part of the adjustable reactance unit is connected in parallel with the resistance unit, the impedance detection circuit having an overall reactance value of the adjustable reactance unit and the resistance unit at a peak current value equal to that of the impedance detection circuit, the reactance value of the impedance detection circuit at the peak current value corresponding to the overall reactance value of the adjustable reactance unit and the resistance unit at the peak current value by the impedance detection circuit to obtain the circuit reactance value Xs of the radio frequency circuit.

3. Impedance detection circuit according to claim 2, wherein the adjustable reactance unit comprises a first adjustable inductance, a first adjustable capacitance and a first matching capacitance, the first adjustable inductance, the first adjustable capacitance and the resistance unit being connected in series, the first matching capacitance being connected in parallel with the resistance unit, the adjustable reactance value comprising an adjustable inductance value and/or capacitance value.

4. The impedance detecting circuit according to claim 1, wherein the adjustable reactance unit is connected in series with the resistance unit, and the reactance value of the adjustable reactance unit is equal to the reactance value of the impedance detecting circuit at the peak of the current, the reactance value of the impedance detecting circuit at the peak of the current being obtained by the reactance value of the adjustable reactance unit at the peak of the current by the impedance detecting circuit.

5. The impedance detection circuit of claim 4, wherein the adjustable reactance unit comprises a first adjustable inductance and a first adjustable capacitance, the first adjustable inductance, the first adjustable capacitance, and the resistance unit being connected in series, the adjustable reactance value comprising an adjustable inductance value and/or capacitance value.

6. The impedance detection circuit of claim 1, wherein the adjustment unit comprises a first adjustment module and a second adjustment module, the adjustment amplitude of each adjustment of the first adjustment module being greater than the adjustment amplitude of each adjustment of the second adjustment module.

7. The impedance detecting circuit according to claim 6, wherein in the process of adjusting the reactance value of the adjustable reactance unit by the adjusting unit, the reactance value of the adjustable reactance unit is adjusted first by the first adjusting module, and then the reactance value of the adjustable reactance unit is further adjusted by the second adjusting module, so as to obtain the current peak value of the impedance detecting circuit.

8. An impedance detecting device comprising the impedance detecting circuit of any one of claims 1-7, the impedance detecting device further comprising:

A detection unit for detecting at least a current value of the impedance detection circuit;

and the control unit is at least used for controlling the adjusting unit to firstly adjust the reactance value of the adjustable reactance unit, controlling the adjusting unit to stop adjusting the reactance value of the adjustable reactance unit when the current of the impedance detection circuit reaches a peak value, obtaining the reactance value of the impedance detection circuit when the current of the impedance detection circuit reaches the peak value based on the reactance value of the adjustable reactance unit when the current of the impedance detection circuit reaches the peak value, and obtaining the circuit reactance value Xs of the radio frequency circuit based on the reactance value of the impedance detection circuit when the current of the impedance detection circuit reaches the peak value, wherein the reactance value of the impedance detection circuit when the current reaches the peak value is conjugated with the circuit reactance value Xs of the radio frequency circuit.

9. The impedance detecting apparatus according to claim 8, wherein the detecting unit comprises at least a current detecting module connected in a current path of the impedance detecting circuit for detecting a current value of the impedance detecting circuit.

10. An impedance detection method for use in an impedance detection device according to claim 8 or 9, at least for detecting a circuit reactance value Xs of the radio frequency circuit, the impedance detection method comprising: