CN117512524B - High intelligent vacuum coating machine - Google Patents
High intelligent vacuum coating machine Download PDFInfo
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- CN117512524B CN117512524B CN202410023648.4A CN202410023648A CN117512524B CN 117512524 B CN117512524 B CN 117512524B CN 202410023648 A CN202410023648 A CN 202410023648A CN 117512524 B CN117512524 B CN 117512524B
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- belt
- coating machine
- vacuum coating
- coating
- screw rod
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 70
- 239000011248 coating agent Substances 0.000 claims abstract description 108
- 238000000576 coating method Methods 0.000 claims abstract description 108
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 42
- 239000007789 gas Substances 0.000 claims description 33
- 238000000605 extraction Methods 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 28
- 230000005540 biological transmission Effects 0.000 claims description 18
- 239000002912 waste gas Substances 0.000 claims description 14
- 238000000746 purification Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 239000000284 extract Substances 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000009347 mechanical transmission Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 238000000151 deposition Methods 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 239000007888 film coating Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 210000002489 tectorial membrane Anatomy 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
Abstract
The invention discloses a high-intelligent vacuum coating machine, which relates to the technical field of vacuum coating and comprises a vacuum coating machine body and an intelligent feeding part arranged on the inner side of the vacuum coating machine body, wherein the top end of the intelligent feeding part can position a coating workpiece and extend into a coating cavity in the vacuum coating machine body, the side surface of the vacuum coating machine body is provided with an exhaust box, and the top of the exhaust box is connected with a heating box through a pipeline; according to the invention, when coating, the workpiece to be coated can be moved into the coating cavity in the vacuum coating machine body in a mechanical transmission mode, the workpiece entering the coating cavity is automatically subjected to coating operation in a steam coating mode, and after the coating operation is finished, heat is dissipated when the workpiece is moved out, so that the subsequent coating is convenient to complete the disassembly and reinstallation of the workpiece, the efficiency of coating the workpiece is improved, and the device is relatively more intelligent.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a high-intelligent vacuum coating machine.
Background
The vacuum coating machine mainly refers to a type of coating which needs to be performed under a higher vacuum degree, and particularly comprises various types, wherein one of the various types of evaporation coating is generally to heat a target material to evaporate surface components in an atomic group or ion form, and the surface components are settled on the surface of a substrate to form a film through a film forming process (scattered point-island structure-vagal structure-layered growth).
The prior Chinese patent with the publication number of CN110629172B discloses a vacuum coating machine for processing a metallized film of a capacitor, which comprises a base, a vacuum machine, a conveying device, a sealing device, a coating box, a cathode, a target, an anode and an argon ion machine, wherein the bottom of the coating box is connected with the base; according to the invention, the coating box can be sealed by matching the switch of the sealing device with the conveying belt, and the workpiece can be continuously conveyed by the conveying belt, so that the downtime can be reduced and the working efficiency can be improved compared with the action of adding and placing the workpiece in a superimposed manner.
The prior Chinese patent with the publication number of CN108048802B discloses a vacuum coating machine for depositing a thin film solar cell absorption layer by a large-area thermal evaporation method, which comprises a vacuum chamber, a continuous feeding mechanism, a transverse conveying mechanism, an evaporation deposition mechanism and a longitudinal moving mechanism; adopting a continuous feeding mechanism to carry out continuous swinging feeding of the powder material, enabling the powder material to be fully gasified and deposited by an evaporation and deposition mechanism, and finally spraying out by small holes of a deposition nozzle to form shower-like airflow to be uniformly deposited on a substrate; the invention adopts the transverse conveying mechanism and the longitudinal moving mechanism to control the horizontal transverse movement of the substrate in the vacuum chamber and the horizontal longitudinal movement of the evaporation and deposition mechanism relative to the substrate, and completes the full-plane coating of the deposition nozzle of the evaporation and deposition mechanism relative to the substrate. Has the advantages of strong controllability, good uniformity of film thickness, compact structure and high working efficiency.
However, this vacuum coater has the following drawbacks when it is specifically used:
1. when the existing vacuum coating machine is used for coating a workpiece in an evaporation coating mode, the workpiece to be coated is required to be placed in the vacuum coating machine, and when coating operation is carried out, because the surface film of the workpiece is covered by high-temperature steam, when the processing is finished, the inside of the workpiece can continuously keep a long high temperature, and at the moment, the workpiece subjected to coating is inconvenient to take out, so that the efficiency of coating the workpiece is reduced;
2. when the existing vacuum coating machine is used for coating the workpieces in an evaporation coating mode, high-temperature gas for coating is sprayed out through a single group or a plurality of groups of jet pipelines, at the moment, the efficiency gap between the part of the workpiece far away from the exhaust pipeline and the surface coating of the part of the workpiece close to the exhaust pipeline is large, so that when a large number of workpieces are actually coated, the coated workpiece is relatively complete (thick), and the other side of the coated workpiece is relatively thin (relative to the required thickness), so that the quality of the workpiece is affected.
Disclosure of Invention
The invention aims to provide a high-intelligent vacuum coating machine so as to solve the problems in the prior art.
In order to achieve the aim of the invention, the invention adopts the following technical scheme:
the invention provides a high intelligent vacuum coating machine, which comprises a vacuum coating machine body and an intelligent feeding component arranged on the inner side of the vacuum coating machine body, wherein the top end of the intelligent feeding component can position a coating workpiece and extend into a coating cavity in the vacuum coating machine body, the side surface of the vacuum coating machine body is provided with an extraction box, the top of the extraction box is connected with a heating box through a pipeline, the heating box extends into the coating cavity through a hot gas discharge pipeline, the back surface of the vacuum coating machine body is provided with a vacuum pump connected through a pipeline, and the intelligent feeding component further comprises:
the belt transmission assembly is arranged on the side surface of the bottom of the vacuum coating machine body, is positioned on one side of the bottom of the vacuum coating machine body and extends to the inner side of the sliding rail, and the sliding rail is arranged on the inner side of the vacuum coating machine body through a connecting block on the outer side of the sliding rail;
the screw rod feeding assembly is arranged in the sliding rail and driven by the belt transmission assembly, and a connecting disc is arranged on the inner side of the screw rod feeding assembly;
the telescopic rotating assembly is arranged on the side face of the connecting disc and can extend to the inside of the coating cavity, the diameter of the telescopic rotating assembly is larger than that of a through hole formed in the inner bottom of the coating cavity, and the top of the telescopic rotating assembly is connected with and positioned with a coating workpiece through a plurality of rotating mechanisms;
the inner wall of the coating cavity is also provided with a temperature control module and a film monitoring module, and a coating sealing plate is arranged at the front opening of the coating cavity.
As a preferable scheme of the invention, an activated carbon purifying box is also arranged on the side surface of the vacuum coating machine body, and the top gas transmission end of the activated carbon purifying box is connected with a suction pump through a pipeline;
the extraction pump is arranged at the top of the activated carbon purifying box, the extraction end of the extraction pump is connected with an extraction pipeline, the extraction pipeline is arranged on the side surface of the support frame, and the support frame is arranged at the top of the vacuum coating machine body;
and the suction nozzle is arranged at the inner bottom of the supporting frame through a pipeline and extends to the inside of the coating cavity.
As a preferable scheme of the invention, an active carbon purifying layer for purifying the waste gas of the coating film is arranged in the active carbon purifying box, and the structural shape of the supporting frame is concave;
the exhaust nozzle and the pipeline matched with the exhaust nozzle are provided with a plurality of exhaust pipelines, the exhaust nozzle and the pipeline are communicated with the exhaust pipeline, and the exhaust nozzle is used for extracting exhaust gas generated by coating.
As a preferable scheme of the invention, the air extracting box extracts external air through the air extracting opening, and the heating box heats the air extracted by the air extracting box;
the hot gas exhaust pipeline can transmit high-temperature gas and enable target materials on the surface of a workpiece to be coated to be settled to form a film through the high-temperature gas.
As a preferred embodiment of the present invention, the belt transmission assembly includes:
the first motor is arranged on the side face of the vacuum coating machine body, a group of belt pulleys are arranged on the outer side of the output end of the first motor, and a first belt is arranged on the outer side of each belt pulley;
the outer side of one end of the first screw rod is provided with another group of belt pulleys, the other group of belt pulleys are driven by a first belt, and the first screw rod extends to the inside of one group of sliding rails;
the second belt is arranged on the side face of the first belt and is connected with the first screw rod through a belt pulley, and the inner side of the second belt is also connected with the second screw rod through the belt pulley;
the second screw rod extends to the inside of the other group of sliding rails.
As a preferable scheme of the invention, the first screw rod and the second screw rod are both rotationally connected with the sliding rail, and screw rod feeding assemblies are arranged on the outer sides of the first screw rod and the second screw rod;
in addition, two groups of belt pulleys are arranged on the inner sides of the first belt and the second belt, and two groups of belt pulleys arranged on the outer side of the first screw rod are respectively connected with the first belt and the second belt;
the length of the first wire rod is greater than that of the second wire rod.
As a preferable scheme of the invention, the screw feeding assembly comprises:
the sliding seat is connected to the outer sides of the first screw rod and the second screw rod respectively through balls, and is in sliding connection with the sliding rail;
the mounting bracket, it is installed the side of sliding seat and structural shape be "concave", the inboard installation of mounting bracket is fixed with the connection pad.
As a preferred embodiment of the present invention, the telescopic rotating assembly includes:
the lifting cylinder is arranged at the bottom of the connecting disc, the output end of the lifting cylinder penetrates through the connecting disc, the top of the lifting cylinder is provided with a placing disc, and the placing disc is matched with a through hole formed in the bottom of the coating cavity in size;
the second motor is arranged on the front surface of the connecting disc, a first conical gear is arranged on the outer side of the output end of the second motor, and a second conical gear is connected with the side surface of the bottom of the first conical gear in a meshed mode;
the cylinder is arranged at the top of the second bevel gear and extends to the outer side of the connecting disc, a connecting rod extending to the outer side of the connecting rod is connected in a sliding manner in the cylinder, and the top of the connecting rod penetrates through the disc and is provided with a first rotating gear;
the first rotating gear is rotationally connected with the placing disc, and a rotating mechanism positioned at the center of the placing disc is arranged on the side face of the first rotating gear.
As a preferable scheme of the invention, the second conical gear and the first conical gear are both movably connected with the connecting disc, and four groups of positioning grooves are formed in the cylinder at equal intervals in an annular shape;
the convex rods are arranged and fixed on the outer sides of the connecting rods and extend into the positioning grooves, and the convex rods correspond to the positioning grooves one by one;
the length of the protruding rod is greater than that of the positioning groove, and the length of the connecting rod is greater than that of the cylinder.
As a preferred embodiment of the present invention, the rotating mechanism includes a second rotating gear which is engaged with and coupled to a side surface of the first rotating gear and a rotating shaft of a central portion of the protruding rod is rotatably coupled to a top center of the placement disc; the eccentric part of the top of the second rotating gear is provided with a tooth part which is in meshed connection with a third rotating gear arranged on the top of the second rotating gear; the third rotating gears are in annular shape and are equidistantly provided with three groups, and the central parts of the three groups of third rotating gears are connected with the side surfaces of the rotating shaft rod through a central shaft; the clamp connecting rod is arranged at the center of the side face of the rotating shaft rod, and the side face of the clamp connecting rod positions the coated workpiece through the corresponding clamping head.
Compared with the prior art, the above technical scheme has the following beneficial effects:
1. in order to perform coating on a large number of workpieces and ensure the coating efficiency, the high-intelligent vacuum coating machine adopts a mode of matching a belt transmission assembly, a screw rod feeding assembly and a telescopic rotating assembly, when the coating is performed, the workpieces to be coated can be moved into a coating cavity in a vacuum coating machine body in a mechanical transmission mode, gas (mainly nitrogen) is heated and transmitted through an extraction box, a heating box and the like, the workpieces entering the coating cavity are automatically subjected to coating operation in a steam coating mode, after the coating operation is finished, the coated workpieces can be removed from the coating cavity, and in the process of removal, the workpieces are radiated, so that the subsequent disassembly and reinstallation of the coated workpieces are facilitated, the process is completed through machinery, the coating efficiency of the workpieces is improved, and the high-intelligent vacuum coating machine is relatively more intelligent;
2. in order to further improve the quality and efficiency of the workpiece in coating, the high-intelligent vacuum coating machine is further provided with a plurality of rotating mechanisms (for mounting and positioning the workpiece), when the workpiece moves into a coating cavity for coating, the telescopic rotating assembly can drive internal parts of the rotating mechanisms to operate, so that the workpiece can continuously rotate, and through the rotation of the workpiece, all parts of the workpiece can be close to one side sprayed by heating gas, and further, when the workpiece is actually coated, all parts of the workpiece can be uniformly covered with a film, and the quality of coating of the workpiece is ensured;
3. this high intelligent vacuum coating machine, in order to handle the waste gas that produces when carrying out the coating film to the work piece that above-mentioned (mainly nitrogen gas coating film waste gas), still be provided with parts such as active carbon purifying box, after accomplishing the work piece tectorial membrane (when not shifting out the work piece), extract the waste gas that the coating film produced, and remove waste gas to active carbon purifying box inside, purify waste gas through active carbon purifying box inside active carbon purifying layer, avoid the direct emission of waste gas, the pollution that causes the environment, when extracting the purification to waste gas simultaneously, this part time can be regarded as the cooling time of coating film work piece above-mentioned scheme, further promote the time that is used for work piece cooling.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
Furthermore, the terms "mounted," "configured," "provided," "connected," "coupled," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
FIG. 1 is a schematic view of the front face of the present invention;
FIG. 2 is a schematic view of the structure of the back side of the present invention;
FIG. 3 is a schematic view of the vacuum coater body according to the present invention in an open state;
FIG. 4 is a schematic view of the connection of the belt drive assembly and the lead screw feed assembly of the present invention;
FIG. 5 is a schematic view of the belt drive assembly of the present invention;
FIG. 6 is a schematic view of the first lead screw and connection pad connection of the present invention;
FIG. 7 is a schematic view of the connection disc and the rotation mechanism of the present invention;
FIG. 8 is a schematic diagram of the connection of a second motor to a second rotating gear of the present invention;
FIG. 9 is a schematic illustration of the connection of the second bevel gear and the first rotating gear of the present invention;
FIG. 10 is a schematic view of the connection structure of the rotary mechanism of the present invention;
FIG. 11 is a schematic view of the connection structure of the activated carbon purification tank and the air suction nozzle of the present invention;
in the figure:
10. a vacuum coating machine body; 10i, a film coating cavity;
10a, an activated carbon purifying box; 10b, an air pump; 10c, an air extraction pipeline; 10d, supporting frames; 10e, an air suction nozzle;
20. an intelligent feeding component;
30. an exhaust box;
40. a heating box; 40i, hot gas exhaust duct;
50. a vacuum pump;
60. a belt drive assembly; 60i, sliding rails;
601. a first motor; 602. a belt pulley; 603. a first belt; 604. a first screw rod; 605. a second belt; 606. a second screw rod;
70. a screw rod feeding assembly; 70i, connecting disc;
701. a sliding seat; 702. a mounting frame;
80. a telescoping rotation assembly;
801. lifting a cylinder; 802. placing a disc; 803. a second motor; 804. a first bevel gear; 805. a second bevel gear; 806. a cylinder;
806a, a positioning groove; 806b, a male rod;
807. a connecting rod; 808. a first rotating gear;
a rotation mechanism;
901. a second rotating gear; 902. rotating the shaft lever; 903. tooth parts; 904. a third rotary gear; 905. a clamp link; 906. a chuck;
100. and (5) coating a sealing plate.
Detailed Description
In order to make the present application solution better understood by those skilled in the art, the following description will be made in detail and with reference to the accompanying drawings in the embodiments of the present application, it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, shall fall within the scope of the present application.
Referring to fig. 1-11, the highly intelligent vacuum coating machine comprises a vacuum coating machine body 10 and an intelligent feeding component 20 arranged at the inner side of the vacuum coating machine body 10, wherein the top end of the intelligent feeding component 20 can position a coated workpiece and extend into a coating cavity 10i in the vacuum coating machine body 10, an exhaust box 30 is arranged at the side surface of the vacuum coating machine body 10, the top of the exhaust box 30 is connected with a heating box 40 through a pipeline, the heating box 40 extends into the coating cavity 10i through a hot gas discharge pipeline 40i, a vacuum pump 50 connected through a pipeline is arranged at the back surface of the vacuum coating machine body 10 (the inside of the coating cavity 10i is in vacuum through the vacuum pump 50 so as to facilitate the coating of a subsequent workpiece), the intelligent feeding component 20 also comprises a belt transmission assembly 60 which is arranged at the side surface of the bottom of the vacuum coating machine body 10, the belt transmission assembly 60 is positioned at one side of the bottom of the vacuum coating machine body 10 and extends to the inner side of a slide rail 60i, and the slide rail 60i is arranged at the inner side of the vacuum coating machine body 10 through a connecting block at the outer side of the slide rail 60 i; the screw feeding assembly 70 is arranged in the sliding rail 60i and driven by the belt transmission assembly 60, and a connecting disc 70i is arranged on the inner side of the screw feeding assembly 70; the telescopic rotating assembly 80 is arranged on the side surface of the connecting disc 70i and can extend into the coating cavity 10i, the diameter of the telescopic rotating assembly 80 is larger than that of a through hole formed in the inner bottom of the coating cavity 10i, and the top of the telescopic rotating assembly 80 is connected with and positioned with a coating workpiece through a plurality of rotating mechanisms 90 (only one group of rotating mechanisms 90 are shown in the drawings in the specification); the inner wall of the coating cavity 10i is also provided with a temperature control module and a film monitoring module, and the front opening of the coating cavity 10i is provided with a coating sealing plate 100.
The working principle is as follows: when a certain number of workpieces are coated, firstly, the workpieces to be coated are mounted on a rotating mechanism 90, then a belt transmission assembly 60 is started through a control console, the belt transmission assembly 60 is driven to operate internal components, a screw rod feeding assembly 70 is further driven to operate, the mounted and positioned workpieces are driven to move (Y-axis), after the workpieces move to corresponding positions (the through holes in a coating cavity 10 i), through a PLC program which is arranged in advance, the first motor 601 driving the belt transmission assembly 60 is stopped to operate, the telescopic rotating assembly 80 is started to operate, the workpieces can enter the coating cavity 10i through the through holes of the coating cavity 10i, the coating cavity 10i is in a sealing state, at the moment, a vacuum pump 50 is used for extracting gas in the coating cavity 10i, the coating cavity 10i is in vacuum, the gas is pumped by the pumping box 30 (mainly nitrogen) and is transmitted to the inside of the heating box 40, the gas is heated by the heating box 40 and is discharged into the coating cavity 10i through the hot gas discharge pipeline 40i, the workpiece entering the inside of the coating cavity 10i is subjected to steam coating, and when the workpiece is coated, the rotating mechanism 90 for supporting the workpiece can rotate, so that when the workpiece is coated, the corresponding coating operation can be completed through rotation, the quality of the workpiece is improved, the workpiece subjected to coating can be simultaneously lifted, a plurality of coated workpieces can be discharged from the coating cavity 10i through the reverse operation of the telescopic rotating assembly 80, the screw feeding assembly 70 and the belt transmission assembly 60, simultaneously, the workpiece is subjected to heat dissipation in the process of moving out, the workpiece is conveniently reinstalled for coating, and the efficiency of overall film coating on the workpiece is improved.
Referring specifically to fig. 1, 2, 3 and 11, in order to treat exhaust gas generated by vacuum coating, an activated carbon purifying tank 10a is further installed on a side surface of the vacuum coating machine body 10, and a top gas delivery end of the activated carbon purifying tank 10a is connected with an air extracting pump 10b through a pipeline; wherein, the air pump 10b is arranged at the top of the activated carbon purifying box 10a, the air extraction end of the air pump is connected with an air extraction pipeline 10c, the air extraction pipeline 10c is arranged at the side surface of the support frame 10d, and the support frame 10d is arranged at the top of the vacuum coating machine body 10; a suction nozzle 10e which is installed at the inner bottom of the support frame 10d through a pipe and extends to the inside of the coating chamber 10i, an activated carbon purification layer which purifies the coating exhaust gas being provided in the inside of the activated carbon purification tank 10a, the structural shape of the support frame 10d being a 'concave'; the air extraction nozzles 10e and the matched pipelines are provided with a plurality of air extraction nozzles 10e, the air extraction nozzles 10e and the pipelines are communicated with the air extraction pipeline 10c, and the air extraction nozzles 10e extract waste gas generated by coating.
When the high-intelligent vacuum coating machine disclosed by the invention is used for coating a workpiece with steam (through nitrogen), certain coating waste gas can be generated, at the moment, after the coating of the workpiece is finished, the waste gas in the coating cavity 10i can be extracted by the extraction nozzle 10e through the power generated by the extraction pump 10b and is transmitted to the inside of the activated carbon purification box 10a through the extraction pipeline 10c, at the moment, the waste gas can be purified through the activated carbon purification layer of the activated carbon purification box 10a, and the purified gas is stored or discharged, so that the pollution of the waste gas to the environment is reduced.
Referring specifically to fig. 1, 2 and 3, in order to coat a workpiece, the gas extraction tank 30 extracts external gas through the gas extraction port, and the heating tank 40 heats the gas extracted by the gas extraction tank 30; the hot gas exhaust pipe 40i can transmit high-temperature gas and enable the target material on the surface of the workpiece to be coated to be settled to form a film through the high-temperature gas.
The high intelligent vacuum coating machine can enable the target material on the surface of the workpiece to be settled through the steam coating (nitrogen), and form a film on the surface of the workpiece, wherein the specific mode for forming the film is as follows: scattered spots-island structure-vagal structure-lamellar growth.
Referring specifically to fig. 1, 2, 3, 4, 5 and 6, in order to drive the workpiece to be coated to move (Y-axis), the belt transmission assembly 60 includes a first motor 601 mounted on a side of the vacuum coater body 10, a set of pulleys 602 mounted on an outer side of an output end of the first motor 601, and a first belt 603 mounted on an outer side of the pulleys 602; a first screw 604, one end of which is provided with another set of pulleys 602 on the outer side, and the other set of pulleys 602 is driven by a first belt 603, the first screw 604 extending to the inside of the set of slide rails 60 i; a second belt 605 mounted on the side of the first belt 603 and connected to the first screw rod 604 via a pulley 602, and a second screw rod 606 connected to the inner side of the second belt 605 via the pulley 602; the second screw rod 606 extends to the inside of the other group of sliding rails 60i, the first screw rod 604 and the second screw rod 606 are both rotationally connected with the sliding rails 60i, and screw rod feeding assemblies 70 are respectively arranged on the outer sides of the first screw rod 604 and the second screw rod 606; in addition, two groups of belt pulleys 602 are arranged on the inner sides of the first belt 603 and the second belt 605, and two groups of belt pulleys 602 arranged on the outer side of the first screw rod 604 are connected with the first belt 603 and the second belt 605 respectively; the length of the first lead screw 604 is greater than the length of the second lead screw 606.
When a workpiece is coated, a first motor 601 is started through a control console to drive a belt pulley 602 connected with the output end of the first motor 601 to rotate, at the moment, a first belt 603 outside the belt pulley 602 enables a first screw 604 connected with the first belt 603 through the belt pulley 602 to rotate, the rotation of the first screw 604 drives another group of belt pulleys 602 on the side face of the first screw 604 to rotate, and under the transmission of a second belt 605, a second screw 606 connected with the inner side of the second belt 605 through the belt pulley 602 rotates, and then the first screw 604 and the second screw 606 rotate (synchronously and identically) under the driving of the first motor 601.
Referring specifically to fig. 1, 2, 3, 4 and 6, in order to convert the rotational force into the conveying force, the screw feeding assembly 70 includes a sliding seat 701, which is respectively connected to the outer sides of the first screw 604 and the second screw 606 by balls, and the sliding seat 701 is slidably connected to the sliding rail 60 i; and a mounting bracket 702 mounted on a side surface of the slide base 701 and having a concave shape, wherein a connection plate 70i is mounted and fixed on an inner side of the mounting bracket 702.
In the highly intelligent vacuum coating machine, when the first screw rod 604 and the second screw rod 606 rotate, the two groups of sliding seats 701 and the mounting frame 702 which are connected with the outside of the first screw rod 604 and the second screw rod 606 through balls are driven to move (Y axis), and then the connecting disc 70i arranged on the inner side of the mounting frame 702 is driven to move.
Referring specifically to fig. 1, 2, 3, 7, 8, 9 and 10, in order to facilitate moving the workpiece to the inside of the plating chamber 10i, the telescopic rotating assembly 80 includes a lifting cylinder 801 installed at the bottom of the connection disc 70i, an output end of the lifting cylinder 801 penetrates through the connection disc 70i and a placing disc 802 is installed at the top thereof, and the placing disc 802 is matched with a through hole formed at the bottom inside the plating chamber 10i in size; the second motor 803 is arranged on the front surface of the connecting disc 70i, a first conical gear 804 is arranged on the outer side of the output end of the second motor 803, and a second conical gear 805 is connected to the side surface of the bottom of the first conical gear 804 in a meshed manner; a cylinder 806 mounted on the top of the second bevel gear 805 and extending to the outside of the connection disc 70i, a link 807 extending to the outside thereof being slidably connected to the inside of the cylinder 806, the top of the link 807 penetrating the placement disc 802 and being mounted with a first rotation gear 808; the first rotating gear 808 is rotatably connected to the placing disk 802, and a rotating mechanism 90 located at the center of the placing disk 802 is provided on the side of the first rotating gear 808.
According to the high-intelligent vacuum coating machine, when the connecting disc 70i moves to the position right below a through hole in the bottom of the coating cavity 10i, the operation of the first motor 601 is stopped, the lifting cylinder 801 is started to operate, the placing disc 802 arranged at the output end of the lifting cylinder is driven to move, a workpiece positioned at the top of the placing disc 802 is driven to move to the inside of the coating cavity 10i, the placing disc 802 can seal the through hole, and when the placing disc 802 moves, the connecting rod 807 at the eccentric position of the placing disc can slide in the inside of the cylinder 806 to synchronously move in the vertical direction.
Referring specifically to fig. 5, 9 and 10, in order to drive the workpiece to rotate and improve the quality of coating the workpiece, the second conical gear 805 and the first conical gear 804 are movably connected with the connecting disc 70i, and four groups of positioning grooves 806a are formed in the cylinder 806 at equal intervals in an annular shape; a boss 806b installed and fixed at the outer side of the link 807 and extending to the inside of the positioning groove 806a, the boss 806b being in one-to-one correspondence with the positioning groove 806a; wherein the length of the boss 806b is greater than the length of the detent 806a and the length of the link 807 is greater than the length of the cylinder 806.
When a workpiece is required to be driven to rotate to complete film coating, the high intelligent vacuum film plating machine starts the second motor 803 to drive the first conical gear 804 arranged at the output end of the second motor 803 to rotate, simultaneously drives the second conical gear 805 meshed with the bottom of the first conical gear 804 to rotate, and the rotation of the second conical gear 805 enables the cylinder 806 arranged at the top of the second motor to rotate, at the moment, the inside of the cylinder 806 is connected with the connecting rod 807 through the positioning groove 806a and the protruding rod 806b which are correspondingly arranged, and when the cylinder 806 rotates, the connecting rod 807 is driven to rotate, finally the first rotating gear 808 arranged at the top of the connecting rod 807 rotates, and meanwhile, the rotation does not conflict with the movement of the connecting rod 807.
Referring specifically to fig. 1, 2, 3, 7 and 10, in order to drive a plurality of groups of workpieces to rotate and to improve coating efficiency while improving coating quality, the rotating mechanism 90 includes a second rotating gear 901 which is engaged with and connected to a side surface of the first rotating gear 808 and a rotating shaft 902 of a central portion of the protruding rod is rotatably connected to a top center of the placing disc 802; a tooth part 903 is arranged at the top eccentric position of the second rotating gear 901, and the tooth part 903 is in meshed connection with a third rotating gear 904 arranged at the top of the second rotating gear 901; the third rotating gears 904 are arranged in an annular shape at equal intervals, and the central parts of the three groups of third rotating gears 904 are connected with the side surfaces of the rotating shaft lever 902 through a central shaft; a clamp link 905 is installed at the center of the side face of the rotating shaft 902, and the side face of the clamp link 905 positions the coated workpiece through a corresponding chuck 906.
According to the high-intelligent vacuum coating machine, when the first rotating gear 808 rotates, the second rotating gear 901 which is in meshed connection with the side surface of the first rotating gear is driven to rotate, the second rotating gear 901 rotates to enable the tooth part 903 arranged at the eccentric position of the top of the second rotating gear to rotate, the third rotating gears 904 which are in meshed connection with the side surface of the tooth part 903 are driven to rotate, when the third rotating gear 904 rotates, the central shaft arranged at the central part of the third rotating gear 904 is connected with the rotating shaft 902 which is connected with the second rotating gear 901, only the tooth part 903 rotates during specific rotation, and further the side surface of the tooth part 903 is driven to rotate through the clamp connecting rod 905 and the clamp 906 to be connected with a positioned coating workpiece, so that coating operation is performed, wherein the top of the rotating shaft 902 can be detachably provided with a plurality of rotating mechanisms 90 through threads, and the clamp 906 can be correspondingly adjusted and replaced according to the types of the coating workpiece.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (6)
1. The utility model provides a high intelligent vacuum coating machine, includes vacuum coating machine organism (10) and sets up intelligent feeding part (20) inboard at vacuum coating machine organism (10), the top of intelligent feeding part (20) can fix a position the coating film work piece and extend to in vacuum coating machine organism (10) inside coating film chamber (10 i), the side of vacuum coating machine organism (10) is provided with extraction box (30), there is heating cabinet (40) at the top of extraction box (30) through the pipe connection, heating cabinet (40) extend to in coating film chamber (10 i) through hot gas exhaust pipe (40 i), the back of vacuum coating machine organism (10) is provided with vacuum pump (50) through pipe connection, its characterized in that: the intelligent feeding component (20) further comprises:
the belt transmission assembly (60) is arranged on the side surface of the bottom of the vacuum coating machine body (10), the belt transmission assembly (60) is positioned on one side of the bottom of the vacuum coating machine body (10) and extends to the inner side of the sliding rail (60 i), and the sliding rail (60 i) is arranged on the inner side of the vacuum coating machine body (10) through a connecting block on the outer side of the sliding rail;
the belt drive assembly (60) includes:
the first motor (601) is arranged on the side face of the vacuum coating machine body (10), a group of belt pulleys (602) are arranged on the outer side of the output end of the first motor (601), and a first belt (603) is arranged on the outer side of each belt pulley (602);
a first screw (604), one end of which is provided with another group of belt pulleys (602), and the other group of belt pulleys (602) are driven by a first belt (603), and the first screw (604) extends to the inside of one group of sliding rails (60 i);
a second belt (605) which is mounted on the side surface of the first belt (603) and is connected with the first screw rod (604) through a belt pulley (602), and the inner side of the second belt (605) is also connected with a second screw rod (606) through the belt pulley (602);
the second screw rod (606) extends to the inside of the other group of sliding rails (60 i);
the first screw rod (604) and the second screw rod (606) are both rotationally connected with the sliding rail (60 i), and screw rod feeding assemblies (70) are respectively arranged on the outer sides of the first screw rod (604) and the second screw rod (606);
two groups of belt pulleys (602) are arranged on the inner sides of the first belt (603) and the second belt (605), and two groups of belt pulleys (602) arranged on the outer side of the first screw rod (604) are connected with the first belt (603) and the second belt (605) respectively;
the length of the first screw rod (604) is longer than that of the second screw rod (606);
the screw rod feeding assembly (70) is arranged in the sliding rail (60 i) and driven by the belt transmission assembly (60), and a connecting disc (70 i) is arranged on the inner side of the screw rod feeding assembly (70);
the screw feeding assembly (70) comprises:
the sliding seat (701) is respectively connected to the outer sides of the first screw rod (604) and the second screw rod (606) through balls, and the sliding seat (701) is in sliding connection with the sliding rail (60 i);
the mounting frame (702) is mounted on the side face of the sliding seat (701) and is concave in structural shape, and a connecting disc (70 i) is mounted and fixed on the inner side of the mounting frame (702);
the telescopic rotating assembly (80) is arranged on the side face of the connecting disc (70 i) and can extend to the inside of the coating cavity (10 i), the diameter of the telescopic rotating assembly (80) is larger than that of a through hole formed in the inner bottom of the coating cavity (10 i), and a coating workpiece is connected and positioned at the top of the telescopic rotating assembly (80) through a plurality of rotating mechanisms (90);
the telescopic rotating assembly (80) comprises:
the lifting cylinder (801) is arranged at the bottom of the connecting disc (70 i), the output end of the lifting cylinder (801) penetrates through the connecting disc (70 i), a placing disc (802) is arranged at the top of the lifting cylinder, and the placing disc (802) is matched with a through hole formed in the inner bottom of the coating cavity (10 i) in size;
the second motor (803) is arranged on the front surface of the connecting disc (70 i), a first conical gear (804) is arranged on the outer side of the output end of the second motor (803), and a second conical gear (805) is connected to the side surface of the bottom of the first conical gear (804) in a meshed mode;
a cylinder (806) mounted on top of the second bevel gear (805) and extending to the outside of the connection disc (70 i), a connecting rod (807) extending to the outside of the cylinder (806) being slidably connected to the inside of the cylinder, the top of the connecting rod (807) penetrating through the placement disc (802) and being mounted with a first rotation gear (808);
the first rotating gear (808) is rotationally connected with the placing disc (802), and a rotating mechanism (90) positioned at the center of the placing disc (802) is arranged on the side surface of the first rotating gear (808);
the inner wall of the coating cavity (10 i) is also provided with a temperature control module and a film monitoring module, and a coating sealing plate (100) is arranged at the front opening of the coating cavity (10 i).
2. The highly intelligent vacuum coating machine according to claim 1, wherein: an activated carbon purifying box (10 a) is further arranged on the side face of the vacuum coating machine body (10), and the top gas transmission end of the activated carbon purifying box (10 a) is connected with an air extracting pump (10 b) through a pipeline;
the extraction pump (10 b) is arranged at the top of the activated carbon purifying box (10 a) and the extraction end of the extraction pump is connected with an extraction pipeline (10 c), the extraction pipeline (10 c) is arranged on the side surface of the support frame (10 d), and the support frame (10 d) is arranged at the top of the vacuum coating machine body (10);
and the suction nozzle (10 e) is arranged at the inner bottom of the supporting frame (10 d) through a pipeline and extends to the inside of the coating cavity (10 i).
3. The highly intelligent vacuum coating machine according to claim 2, wherein: an activated carbon purification layer for purifying the waste gas of the plating film is arranged in the activated carbon purification box (10 a), and the structural shape of the support frame (10 d) is concave;
the exhaust nozzle (10 e) and the matched pipelines are provided with a plurality of exhaust nozzles, the exhaust nozzle (10 e) and the pipelines are communicated with the exhaust pipeline (10 c), and the exhaust nozzle (10 e) is used for extracting exhaust gas generated by coating.
4. The highly intelligent vacuum coating machine according to claim 1, wherein: the air extracting box (30) extracts external air through an air extracting hole, and the heating box (40) heats the air extracted by the air extracting box (30);
the hot gas exhaust pipeline (40 i) can transmit high-temperature gas and enable a target on the surface of a workpiece to be coated to be settled to form a film through the high-temperature gas.
5. The highly intelligent vacuum coating machine according to claim 1, wherein: the second conical gear (805) and the first conical gear (804) are both movably connected with the connecting disc (70 i), and four groups of positioning grooves (806 a) are formed in the cylinder (806) at equal intervals in an annular shape;
a protruding rod (806 b) which is installed and fixed on the outer side of the connecting rod (807) and extends to the inside of the positioning groove (806 a), wherein the protruding rod (806 b) corresponds to the positioning groove (806 a) one by one;
wherein the length of the protruding rod (806 b) is greater than the length of the positioning groove (806 a), and the length of the connecting rod (807) is greater than the length of the cylinder (806).
6. The highly intelligent vacuum coating machine according to claim 1, wherein: the rotating mechanism (90) comprises a second rotating gear (901), wherein the second rotating gear is connected to the side surface of the first rotating gear (808) in a meshing way, and a rotating shaft lever (902) of the central part of the protruding rod is connected to the top center of the placing disc (802) in a rotating way; a tooth part (903) is arranged at the top eccentric position of the second rotating gear (901), and the tooth part (903) is in meshed connection with a third rotating gear (904) arranged at the top of the second rotating gear (901); the third rotating gears (904) are annularly and equidistantly provided with three groups, and the central parts of the three groups of third rotating gears (904) are connected with the side surfaces of the rotating shaft rod (902) through a central shaft; a clamp connecting rod (905) is arranged at the center of the side face of the rotating shaft rod (902), and the side face of the clamp connecting rod (905) is used for positioning a coated workpiece through a corresponding clamping head (906).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410023648.4A CN117512524B (en) | 2024-01-08 | 2024-01-08 | High intelligent vacuum coating machine |
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| CN202410023648.4A CN117512524B (en) | 2024-01-08 | 2024-01-08 | High intelligent vacuum coating machine |
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| CN117512524B true CN117512524B (en) | 2024-03-29 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113621920A (en) * | 2021-10-12 | 2021-11-09 | 江苏晋誉达半导体股份有限公司 | Vacuum coating method of vacuum coating machine |
| CN114059034A (en) * | 2021-10-20 | 2022-02-18 | 北京中科科美科技股份有限公司 | Special vacuum continuous beat type coating system |
| CN218989387U (en) * | 2022-12-26 | 2023-05-09 | 南阳瑞阳光电科技有限公司 | Lens coating device for optical lens processing |
| CN116356277A (en) * | 2023-03-27 | 2023-06-30 | 维达力实业(深圳)有限公司 | Coating method and apparatus |
| CN116770230A (en) * | 2023-06-21 | 2023-09-19 | 温州大学 | Vacuum coating box equipment capable of automatically feeding and discharging and application method thereof |
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- 2024-01-08 CN CN202410023648.4A patent/CN117512524B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113621920A (en) * | 2021-10-12 | 2021-11-09 | 江苏晋誉达半导体股份有限公司 | Vacuum coating method of vacuum coating machine |
| CN114059034A (en) * | 2021-10-20 | 2022-02-18 | 北京中科科美科技股份有限公司 | Special vacuum continuous beat type coating system |
| CN218989387U (en) * | 2022-12-26 | 2023-05-09 | 南阳瑞阳光电科技有限公司 | Lens coating device for optical lens processing |
| CN116356277A (en) * | 2023-03-27 | 2023-06-30 | 维达力实业(深圳)有限公司 | Coating method and apparatus |
| CN116770230A (en) * | 2023-06-21 | 2023-09-19 | 温州大学 | Vacuum coating box equipment capable of automatically feeding and discharging and application method thereof |
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