CN117503091A - Flexible microwave sensor based on artificial surface plasmon polaritons - Google Patents
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- 239000002184 metal Substances 0.000 claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 38
- 239000011241 protective layer Substances 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000004020 conductor Substances 0.000 claims abstract description 5
- 239000002356 single layer Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 8
- 229920002799 BoPET Polymers 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 24
- 210000001519 tissue Anatomy 0.000 description 18
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- 230000002159 abnormal effect Effects 0.000 description 6
- 239000003814 drug Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 208000017520 skin disease Diseases 0.000 description 3
- 206010029098 Neoplasm skin Diseases 0.000 description 2
- 208000000453 Skin Neoplasms Diseases 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000037311 normal skin Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010006187 Breast cancer Diseases 0.000 description 1
- 208000026310 Breast neoplasm Diseases 0.000 description 1
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- 230000009286 beneficial effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
- A61B5/0507—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves using microwaves or terahertz waves
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/44—Detecting, measuring or recording for evaluating the integumentary system, e.g. skin, hair or nails
- A61B5/441—Skin evaluation, e.g. for skin disorder diagnosis
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
- A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/16—Details of sensor housings or probes; Details of structural supports for sensors
- A61B2562/164—Details of sensor housings or probes; Details of structural supports for sensors the sensor is mounted in or on a conformable substrate or carrier
Abstract
The invention discloses a flexible microwave sensor based on an artificial surface plasmon, which sequentially comprises a metal lower surface, a dielectric substrate, a metal upper surface and a protective layer from bottom to top; the sensor is formed into a structure which gradually transits from the micro-strip type SSPPs circuit at two sides to the middle single-layer conductor SSPPs circuit; a ring resonator is loaded at the middle position of the lower surface of the metal; an interdigital resonator is loaded in the middle of the upper surface of the metal at a position corresponding to the ring resonator; the ring resonator and the interdigital resonator together form a sensing unit of the sensor; the protective layer is provided with a window to expose the sensing unit of the sensor. The flexible microwave sensor based on the artificial surface plasmon polaritons has the characteristics of the flexible sensor and higher resolution, and can effectively improve the accuracy of human skin detection.
Description
Technical Field
The invention belongs to the technical field of microwave biological detection, and particularly relates to a flexible microwave sensor based on artificial surface plasmons.
Background
With the increase of working pressure and the acceleration of life rhythm in modern society, the health problem is receiving more and more attention. Skin diseases are one of the most common diseases in daily life, and it is often difficult to radically treat, for example, skin nodules taught in traditional Chinese medicine, skin bumps in Western medicine, and the like. Certain malignant skin diseases such as skin tumor and the like can even seriously threaten the life health and safety of people. Therefore, the method has very important significance for accurately and timely detecting the skin diseases.
In traditional clinical medicine, the detection of skin tissue mainly includes biopsy and pathology analysis, magnetic Resonance (MRI), computerized Tomography (CT), and B-ultrasonic detection. However, these traditional technical means are unfavorable for clinical large-scale application due to different problems of high cost, easy damage to human body, limited detection precision and the like.
In recent years, a microwave detection technology has been used as a novel biological detection technology, which has the characteristics of high penetrability and low damage. The detection problem of skin abnormal tissue can be classified into the detection problem of medium characteristics in the traditional Chinese medicine and western medicine fields. At present, the microwave detection technology has been widely studied by researchers in the fields of breast cancer, cerebral apoplexy and the like.
In the field of skin detection, a microwave probe designed by utilizing structures such as an open-ended homoshaft head, an open rectangular waveguide and the like is a microwave sensor widely used for detecting abnormal tissues of skin. However, these microwave probes can only detect two-dimensional planar structures. The surface of the human body is a three-dimensional structure, so that the traditional microwave probe is very inconvenient in actual human body detection. In addition, the existing microwave probe has lower detection resolution and is difficult to meet the precision requirement of actual detection.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a flexible microwave sensor based on artificial surface plasmons. The technical problems to be solved by the invention are realized by the following technical scheme:
a flexible microwave sensor based on artificial surface plasmons sequentially comprises the following components from bottom to top: a metal lower surface, a dielectric substrate, a metal upper surface and a protective layer; wherein,
a transition window is etched on the lower surface of the metal, so that the sensor forms a structure which gradually transits from the micro-strip type SSPPs circuits on two sides to the middle single-layer conductor SSPPs circuit;
a ring resonator is loaded at the middle position of the lower surface of the metal;
an interdigital resonator is loaded in the middle of the upper surface of the metal at a position corresponding to the ring resonator;
the ring resonator and the interdigital resonator together form a sensing unit of a sensor;
and a window is arranged on the protective layer to expose the sensing unit of the sensor.
In one embodiment of the present invention, the length of the metal lower surface, the dielectric substrate, and the metal upper surface is 90mm.
In one embodiment of the invention, the ring resonator comprises a first rectangular structure and a second rectangular structure located below the first rectangular structure; wherein,
the short side of the first rectangular structure faces upwards, and an opening is formed in the first rectangular structure;
the long side of the second rectangular structure faces upwards, an opening is formed in the second rectangular structure, and the long side of the first rectangular structure is communicated with the opening on the long side of the second rectangular structure to form an annular structure.
In one embodiment of the invention, the length g of the first rectangular structure is 1.8mm; the length h of the second rectangular structure is 2.4mm, and the width f is 1.5mm;
the seam width e of the ring resonator is 0.2mm.
In one embodiment of the invention, the width a of the interdigital resonator is 0.2mm and the width b of the entire interdigital structure is 1.1mm.
In one embodiment of the present invention, the metal upper surfaces at two sides of the interdigital resonator are also symmetrically etched with a plurality of grooves.
In one embodiment of the invention, the depth c of the groove and the distance d of the groove from the bottom of the metal upper surface are both 0.2mm, and the distance w between two adjacent grooves is 0.5mm.
In one embodiment of the invention, the material of the lower metal surface and the upper metal surface is copper, and the sum of the thicknesses is 35 μm.
In one embodiment of the present invention, the material of the dielectric substrate is polyimide, and the thickness of the material is 0.1mm.
In one embodiment of the present invention, the material of the protective layer is a PET film, and the thickness thereof is 0.3mm.
The invention has the beneficial effects that:
1. the flexible microwave sensor based on the artificial surface plasmon provided by the invention adopts the flexible substrate, so that the sensor can meet the detection requirement of the three-dimensional human body surface, and on the other hand, the interdigital resonator is combined with the novel ring resonator to form a sensing unit, so that the designed sensor has the characteristics of the flexible sensor and has higher resolution, and the detection precision of the human skin can be effectively improved;
2. the flexible microwave sensor based on the artificial surface plasmon can change the resolution ratio of the sensor by controlling the size of the interdigital sensing unit, so as to realize different measuring ranges;
3. the flexible microwave sensor based on the artificial surface plasmon polaritons can be realized by adopting a traditional PCB processing technology, has lower processing cost compared with other microwave sensors with high resolution, and is suitable for mass production;
4. the flexible microwave sensor based on the artificial surface plasmon polaritons can be expanded and designed into an array structure to form a sensor array.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic diagram of a layered structure of a flexible microwave sensor based on an artificial surface plasmon according to an embodiment of the present invention;
FIG. 2 is a top view of the flexible microwave sensor of FIG. 1 with the protective layer removed;
FIG. 3 is a bottom view of the flexible microwave sensor of FIG. 1;
FIG. 4 is a schematic diagram of a ring resonator according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of an interdigital resonator according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the operation of a flexible microwave sensor provided by an embodiment of the invention;
FIG. 7 is an equivalent circuit diagram of a flexible microwave sensor provided by an embodiment of the invention;
FIG. 8 is a graph of S-parameter simulation of a flexible microwave sensor designed in accordance with the present invention;
FIG. 9 is a dispersion curve of SSPPs of a flexible microwave sensor designed in accordance with the present invention.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but embodiments of the present invention are not limited thereto.
Example 1
Referring to fig. 1-3 in combination, fig. 1 is a schematic diagram of a layered structure of a flexible microwave sensor based on artificial surface plasmons according to an embodiment of the invention, and fig. 2 is a top view of the flexible microwave sensor in fig. 1, with a protective layer removed; fig. 3 is a bottom view of the flexible microwave sensor of fig. 1.
The flexible microwave sensor based on artificial surface plasmon polaritons provided in this embodiment includes from bottom to top in order: a metal lower surface 1, a dielectric substrate 2, a metal upper surface 3 and a protective layer 4;
wherein, the metal lower surface 1 is etched with a transition window 11 to enable the sensor to form a structure of gradually transiting from the microstrip type SSPPs circuit at two sides to the middle single-layer conductor SSPPs circuit;
a ring resonator 12 is loaded at an intermediate position of the metal lower surface 1;
an interdigital resonator 31 is loaded in the middle of the upper metal surface 3 at a position corresponding to the ring resonator 12;
the ring resonator 12 forms together with the interdigital resonator 31 a sensing unit of the sensor;
a window 41 is provided in the protective layer 4 to expose the sensing unit of the sensor.
The sensor designed by the embodiment adopts SSPPs as a basic circuit of the sensor, the two sides of the sensor adopt microstrip SSPPs structures to reduce the transmission loss of a microwave circuit and the interference of a human body on the sensor circuit to the maximum extent, and the middle of the sensor adopts a single-layer SSPPs circuit to improve the sensitivity of the sensor. Meanwhile, a novel ring resonator structure is loaded at the middle position, and the structure is overlapped with the position of the interdigital resonator at the upper layer and forms a sensing unit together. The ring resonator changes the current path, provides additional capacitance and inductance values for the upper metal resonator, further reduces the size of the sensing unit and increases the resolution of the sensor.
In addition, in order to isolate interference of non-measured part of human body to sensor circuit, a layer of PET film with thickness of 0.3mm is covered on the upper surface of the sensor to form a protective layer, and a window with a certain size is processed at the position of sensing unit on the PET film, for example, the window with size of 8×6mm can be processed 2 So that the tissue to be measured is in sufficient contact with the sensor.
In this embodiment, the length of the metal lower surface 1, the dielectric substrate 2 and the metal upper surface 3 is 90mm, thereby forming a flexible microwave sensor with an overall length of 90mm. Wherein the material of the metal lower surface 1 and the metal upper surface 3 is copper, and the total thickness is 35 μm. The dielectric substrate 2 is made of polyimide, and has a thickness of 0.1mm, a dielectric constant of 3.5, and a loss tangent angle of 0.008.
The polyimide adopted in the embodiment has higher flexibility and can meet the detection requirement of the three-dimensional human body surface.
Further, referring to fig. 4, fig. 4 is a schematic structural diagram of a ring resonator according to an embodiment of the present invention. In the present embodiment, the ring resonator 12 includes a first rectangular structure 12-1 and a second rectangular structure 12-2 located below the first rectangular structure 12-1; wherein,
the short side of the first rectangular structure 12-1 faces upwards, and an opening is formed in the first rectangular structure;
the long side of the second rectangular structure 12-2 faces upwards, and an opening is formed in the second rectangular structure, and the long side of the first rectangular structure 12-1 is communicated with the opening on the long side of the second rectangular structure 12-2 to form an annular structure.
Alternatively, as an implementation, the length g of the first rectangular structure is 1.8mm; the length h of the second rectangular structure is 2.4mm, and the width f is 1.5mm; the seam width e of the ring resonator is 0.2mm.
Further, referring to fig. 5, fig. 5 is a schematic structural diagram of an interdigital resonator according to an embodiment of the present invention. Furthermore, grooves are symmetrically etched in the metal upper surface 3 on both sides of the interdigital resonator 31.
Alternatively, the width a of the interdigital resonator 31 is 0.2mm and the width b of the entire interdigital structure is 1.1mm. The depth c of the grooves and the width m of the grooves from the bottom of the metal upper surface 3 to the distance d are both 0.2mm, and the interval w between two adjacent grooves is 0.5mm.
It will be appreciated that the present embodiment may also be used to vary the resolution of the sensor by controlling the size of the interdigital sensing element to achieve different measurement ranges.
The cross structure of the interdigital resonator adopted in the embodiment effectively increases the capacitance and inductance of the resonant unit in a certain area.
Referring to fig. 6, fig. 6 is a schematic working diagram of a flexible microwave sensor according to an embodiment of the present invention, when detecting a surface of a human body, two side ports of a sensor circuit are connected to a vector network analyzer, a protective layer of the sensor is close to the human body, and a portion to be detected is contacted with a sensing unit in the middle of the sensor during measurement. When the dielectric property of the object to be measured changes, the resonant frequency of the sensor changes, and the dielectric property of the part to be measured is judged.
Specifically, when the sensor is implemented with the above dimensions, the interdigital resonator generates a resonance frequency at 7.54GHz, which is the operating frequency of the sensor. When skin tissue to be detected is contacted with the resonator, the resonance frequency of the sensor is shifted, and the dielectric property of the medium to be detected can be detected rapidly through the shift degree of the resonance frequency. From the debye equation, the dielectric properties of biological tissues are mainly determined by the water content of biological tissues, and the higher the water content is, the higher the dielectric constant of biological tissues is. The moisture content of skin abnormal tissues such as skin tumor is generally higher than that of normal skin tissues, so that the dielectric constant is also higher than that of normal skin tissues. When the sensor is in contact with abnormal tissue, the resonant frequency shifts to a greater extent. In the range of 5-8GHz, the dielectric constant of common skin tissues is below 35, and the dielectric constant of abnormal tissues is above 40, so that the deviation degree of resonant frequencies caused by two tissues to be detected is large. The rapid detection function of the sensor can be realized by observing the change of the resonant frequency.
Further, referring to fig. 7, fig. 7 is an equivalent circuit diagram of a flexible microwave sensor according to an embodiment of the present invention; wherein, C2 and L2 are the equivalent capacitance and the equivalent inductance of the interdigital resonator, and C3 and L3 are the equivalent capacitance and the inductance of the lower surface ring resonator. The introduction of the lower surface ring resonator reduces the size of the sensing unit.
The flexible microwave sensor based on the artificial surface plasmon provided by the invention adopts the flexible substrate on one hand, so that the sensor can meet the detection requirement of the three-dimensional human body surface, and on the other hand, the interdigital resonator is combined with the novel ring resonator to form a sensing unit, so that the designed sensor has the characteristics of the flexible sensor and higher resolution, and can effectively improve the detection precision of the human skin.
In addition, the flexible microwave sensor based on the artificial surface plasmon polaritons can be realized by adopting a traditional PCB processing technology, has lower processing cost compared with other microwave sensors with high resolution, and is suitable for mass production.
In order to verify the effectiveness of the flexible microwave sensor based on the artificial surface plasmon, the invention also carries out a related simulation experiment, which is specifically as follows:
1. simulating S parameter variation conditions
PE film with thickness of 0.1mm is used for isolating the object to be detected and the sensing circuit, and the object to be detected and the sensing circuit are isolated5.8×5.4×3.9mm 3 Is loaded on the surface of the sensor to be measured to simulate the condition that the resonant frequency of the sensor changes along with the change of the dielectric property, wherein the loss tangent angle of the dielectric model is set to be 0.2. The S-parameter simulation results are shown in fig. 8. When the dielectric constants of the media are respectively 10, 13, 16, 19, 22, 25, 28, 31 and 34, the resonant frequency of the sensor shifts to a low frequency, so that the effectiveness of the sensor designed by the invention is proved.
2. Emulation of electric field energy distribution when sensor is operated at resonant frequency
When the sensor is operating at the resonant frequency, the electric field energy is concentrated at the resonator, which is also the most sensitive area of the sensor. When the medium to be measured contacts with the area, obvious disturbance can be generated on the electromagnetic field energy at the area. From the perspective of the frequency domain, the influence of the tissue to be measured on the sensing unit causes a significant shift in the resonant frequency of the sensor.
The electric field energy of the sensor was reduced to 2.21×03v/m at a depth of 2mm, and it was seen that the transmission depth of the sensor was mainly concentrated in the skin layer, and the fat and muscle tissue below the skin layer had negligible effect on the test results. Therefore, the sensor designed by the invention can reflect the characteristics of skin layer tissues more accurately.
3. Lateral detection resolution of an artificial sensor
Compared with the traditional microwave probe, the sensor designed by the invention has higher transverse detection resolution. The sensor can detect abnormal tissues with the transverse dimension of 1mm, and the detection resolution is greatly improved.
4. Dispersion curve of simulated SSPPs
Because the sensor adopts SSPPs as a basic circuit, the transmission characteristic of the sensor circuit has the characteristic of SSPPs. Referring to fig. 9, fig. 9 is a dispersion curve of SSPPs of a flexible microwave sensor according to the present invention. From this curve, it can be seen that the wave vector of SSPPs is shifted to a greater extent than light. The electromagnetic field energy on the SSPPs transmission line is bound on the surface of the conductor to propagate, so that the SSPPs are very sensitive to the change of the surrounding environment, and the sensitivity of the sensor designed by the invention is improved. On the other hand, due to the strong constraint characteristic of the SSPPs on electromagnetic field energy, the crosstalk influence among the SSPPs is greatly reduced, so that the sensor is favorably expanded into a sensor array, and detection with a larger area is realized.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (10)
1. The flexible microwave sensor based on the artificial surface plasmon is characterized by sequentially comprising a metal lower surface (1), a dielectric substrate (2), a metal upper surface (3) and a protective layer (4) from bottom to top; wherein,
the metal lower surface (1) is etched with a transition window (11) so that the sensor forms a structure which gradually transits from the microstrip type SSPPs circuit at two sides to the middle single-layer conductor SSPPs circuit;
a ring resonator (12) is loaded at the middle position of the metal lower surface (1);
an interdigital resonator (31) is loaded in the middle of the metal upper surface (3) at a position corresponding to the ring resonator (12);
the ring resonator (12) and the interdigital resonator (31) together form a sensing unit of a sensor;
a window (41) is arranged on the protective layer (4) so as to expose a sensing unit of the sensor.
2. The flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the length of the metal lower surface (1), the dielectric substrate (2) and the metal upper surface (3) is 90mm.
3. The flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the ring resonator (12) comprises a first rectangular structure (12-1) and a second rectangular structure (12-2) located below the first rectangular structure (12-1); wherein,
the short side of the first rectangular structure (12-1) faces upwards, and an opening is formed in the first rectangular structure;
the long side of the second rectangular structure (12-2) faces upwards, an opening is formed in the second rectangular structure, and the long side of the first rectangular structure (12-1) is communicated with the opening on the long side of the second rectangular structure (12-2) to form an annular structure.
4. A flexible microwave sensor based on artificial surface plasmons according to claim 3, characterized in that the length g of the first rectangular structure (12-1) is 1.8mm; the length h of the second rectangular structure (12-2) is 2.4mm, and the width f is 1.5mm;
the seam width e of the ring resonator (12) is 0.2mm.
5. Flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the width a of the interdigital resonator (31) is 0.2mm and the width b of the whole interdigital structure is 1.1mm.
6. The flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the metal upper surfaces (3) on both sides of the interdigital resonator (31) are also etched with grooves symmetrically.
7. The flexible microwave sensor based on artificial surface plasmons according to claim 6, characterized in that the depth c of the groove and the bottom distance d of the groove from the metal upper surface (3) are both 0.2mm, and the spacing w between two adjacent grooves is 0.5mm.
8. Flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the material of the metal lower surface (1) and the metal upper surface (3) is copper, the sum of the thicknesses of which is 35 μm.
9. Flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the material of the dielectric substrate (2) is polyimide with a thickness of 0.1mm.
10. Flexible microwave sensor based on artificial surface plasmons according to claim 1, characterized in that the material of the protective layer (4) is a PET film with a thickness of 0.3mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210899237.2A CN117503091A (en) | 2022-07-28 | 2022-07-28 | Flexible microwave sensor based on artificial surface plasmon polaritons |
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| CN202210899237.2A CN117503091A (en) | 2022-07-28 | 2022-07-28 | Flexible microwave sensor based on artificial surface plasmon polaritons |
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