CN117469976A - Nitriding treatment furnace and treatment method for silicon nitride ceramic piece - Google Patents
Nitriding treatment furnace and treatment method for silicon nitride ceramic piece Download PDFInfo
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- CN117469976A CN117469976A CN202311419093.7A CN202311419093A CN117469976A CN 117469976 A CN117469976 A CN 117469976A CN 202311419093 A CN202311419093 A CN 202311419093A CN 117469976 A CN117469976 A CN 117469976A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 135
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 131
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 131
- 238000005121 nitriding Methods 0.000 title claims abstract description 110
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000007921 spray Substances 0.000 claims abstract description 64
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 230000000712 assembly Effects 0.000 claims abstract description 12
- 238000000429 assembly Methods 0.000 claims abstract description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 142
- 229910052757 nitrogen Inorganic materials 0.000 claims description 64
- 230000033001 locomotion Effects 0.000 claims description 27
- 230000005540 biological transmission Effects 0.000 claims description 15
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 14
- 238000004146 energy storage Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 4
- 230000002045 lasting effect Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005507 spraying Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000003116 impacting effect Effects 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0083—Chamber type furnaces with means for circulating the atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0006—Composite supporting structures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D2005/0081—Details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
- F27D2007/023—Conduits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2001/00—Composition, conformation or state of the charge
- F27M2001/15—Composition, conformation or state of the charge characterised by the form of the articles
- F27M2001/1504—Ceramic articles
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
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- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
The invention relates to the technical field of production of silicon nitride ceramic parts, in particular to a nitriding treatment furnace and a treatment method of the silicon nitride ceramic parts, comprising the following steps: the nitriding furnace comprises a nitriding furnace body, wherein a support bracket is arranged in the nitriding furnace body; the spray head is arranged in the nitriding furnace body; the cross driving mechanism is arranged in the nitriding furnace body and comprises a rotating assembly and a plurality of groups of lifting assemblies, the lifting assemblies are connected with the spray heads, and the lifting assemblies are alternately matched with the rotating assembly, so that the spray heads can intermittently rotate along the circumferential direction of the silicon nitride ceramic piece and reciprocate along the length direction of the silicon nitride ceramic piece; the deflection assembly is connected with the lifting assembly and the spray head, and can deflect the spray head in the moving direction when the spray head moves; the support assembly is connected with the support bracket and the rotating assembly, two groups of ejector rods are connected to the support assembly, and the two groups of ejector rods can jack up the silicon nitride ceramic piece alternately when the rotating assembly acts so as to accelerate the nitriding speed and improve the nitriding effect.
Description
Technical Field
The invention relates to the technical field of production of silicon nitride ceramic parts, in particular to a nitriding treatment furnace and a treatment method of the silicon nitride ceramic parts.
Background
Silicon nitride ceramics are an important structural ceramic material. It is a superhard substance, itself having lubricity and being resistant to wear; the silicon nitride ceramic resists oxidation at high temperature, resists cold and hot impact, is heated to more than 1000 ℃ in air, is rapidly cooled and then rapidly heated, and cannot be broken. Because of the excellent properties of silicon nitride ceramics, it is often used to manufacture mechanical components such as bearings, turbine blades, mechanical seal rings, permanent molds, and the like.
In the production process of silicon nitride ceramics, nitridation treatment is required to be carried out to improve the structural strength, the nitridation treatment of the existing silicon nitride ceramics is mostly carried out by adopting a nitridation treatment furnace, but the conventional nitridation furnace generally adopts a nitrogen through mode to enable nitrogen to be filled in the furnace, and nitrogen is naturally permeated for nitridation treatment, so that the time is long.
If the ceramic piece in the nitriding furnace is nitrided by adopting a direct blowing mode, nitrogen can flow vertically reversely after meeting resistance, and air nozzles are blocked from injecting air; nitrogen in the nitriding furnace can not reach the effect of sweeping nitriding, and the nitriding effect is poor under long time.
Disclosure of Invention
The invention aims to provide a nitriding furnace for a silicon nitride ceramic piece and a nitriding method for the silicon nitride ceramic piece, so as to solve the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a nitriding furnace for a silicon nitride ceramic member, comprising:
the nitriding furnace comprises a nitriding furnace body, wherein a support bracket for supporting a silicon nitride ceramic piece is arranged in the nitriding furnace body;
the spray head is arranged in the nitriding furnace body and can blow heated nitrogen to the side part of the silicon nitride ceramic piece;
the cross driving mechanism is arranged in the nitriding furnace body and comprises a rotating assembly and a plurality of groups of lifting assemblies, the lifting assemblies are connected with the spray head, and the lifting assemblies are alternately matched with the rotating assembly, so that the spray head can intermittently rotate along the circumferential direction of the silicon nitride ceramic piece and can reciprocate along the length direction of the silicon nitride ceramic piece;
the deflection assembly is connected with the lifting assembly and the spray head, and can deflect the spray head in the movement direction when the spray head moves;
the support assembly is connected with the support bracket and the rotating assembly, two groups of ejector rods are connected to the support assembly, and the two groups of ejector rods can jack up the silicon nitride ceramic piece alternately when the rotating assembly acts.
As a further scheme of the invention: the rotating assembly comprises a rotating piece rotatably mounted on the nitriding furnace body, a rotating shaft of the rotating piece is of a hollow structure, a rotating sleeve is rotatably mounted on the rotating shaft of the rotating piece, and the supporting bracket is fixedly connected with the nitriding furnace body through a vertical shaft penetrating through the rotating sleeve;
the rotary assembly further comprises a driving device arranged at the bottom of the nitriding furnace body, the driving device is connected with the rotary sleeve through a first transmission chain, and is connected with the rotary piece through a second transmission chain.
As still further aspects of the invention: the lifting components are connected through a fourth transmission chain;
the lifting assembly comprises a vertical plate perpendicular to the rotating piece, two driving wheels are rotatably arranged on the vertical plate, and a connecting chain is sleeved between the two driving wheels;
the lifting assembly further comprises a follower arranged on the vertical plate, the follower is connected with the spray head, and the follower is connected with the connecting chain through a jogged structure;
the vertical plate is further provided with a bevel gear set, the bevel gear set is connected with one of the driving wheels, and the bevel gear set is connected with the rotary sleeve through a third driving chain.
As still further aspects of the invention: the embedded structure comprises an embedded wheel rotatably mounted on the connecting chain and an embedded groove formed on the follower, and the embedded wheel can roll in the embedded groove;
the two sides of the vertical plate are provided with sliding grooves along the length direction of the vertical plate, and the sliding blocks arranged on the follow-up piece can slide in the sliding grooves.
As still further aspects of the invention: the deflection assembly comprises a rotation shaft which is rotatably arranged on the follow-up piece and connected with the spray head, two sides of the rotation shaft are respectively provided with a deflection rod, one end of the deflection rod, which is far away from the rotation center of the deflection rod, is rotatably provided with an abutting wheel, and an upper trigger piece and a lower trigger piece which are arranged on the vertical plate can be matched with the abutting wheel so as to drive the rotation shaft to rotate;
the deflection assembly further includes an energy storage structure disposed on the follower and coupled to the rotating shaft.
As still further aspects of the invention: the energy storage structure comprises a stagnation-accommodating sleeve symmetrically arranged on the side wall of the follower, a connecting shaft is slidably arranged in the stagnation-accommodating sleeve, and a pulley is rotatably arranged at one end, far away from the stagnation-accommodating sleeve, of the connecting shaft;
a spring is further arranged in the stagnation-accommodating sleeve, one end of the spring is connected with the inner wall of the stagnation-accommodating sleeve, and the other end of the spring is connected with the connecting shaft;
the energy storage structure further includes a locking member adapted to the pulley.
As still further aspects of the invention: the locking piece is fixedly connected with the rotating shaft, two stagnation-accommodating grooves are formed in the locking piece and are connected through two inclined planes, and a protruding part is formed at one end, away from the stagnation-accommodating grooves, of each inclined plane;
when the rotating shaft rotates, the pulley can be switched from one of the containing grooves to the other containing groove through the two inclined surfaces.
As still further aspects of the invention: the inside of the rotating shaft is communicated with the spray head, and a plurality of through grooves are formed in the rotating shaft;
the rotary shaft is further provided with an annular connecting piece which covers the through groove in a sealing and rotating mode, the annular connecting piece is communicated with an inner lantern ring fixed on the vertical plate through a connecting pipe, and the inner lantern ring is connected with an outer lantern ring fixed in the nitriding furnace body in a sealing and rotating mode.
As still further aspects of the invention: the support assembly comprises an outer top ring and an inner top ring which are concentric and have different diameters, a first fan-shaped abutting piece is arranged at the bottom of the outer top ring, a second fan-shaped abutting piece is arranged at the bottom of the inner top ring, and the first fan-shaped abutting piece and the second fan-shaped abutting piece are arranged in a dislocation mode;
the support assembly further comprises a follower roller rotatably mounted on the rotating member and adapted to the first sector abutment member and the second sector abutment member.
A method for processing a silicon nitride ceramic member using the nitriding furnace, comprising the steps of:
step one: pumping external nitrogen into the equipment and connecting the equipment with the nitriding furnace body through a pipeline;
step two: lifting the upper cover of the nitriding furnace body, placing the silicon nitride ceramic piece to be treated on a support bracket, aligning the central axis of the silicon nitride ceramic piece to be treated with the key center line of the support bracket, resetting the upper cover of the nitriding furnace body, and screwing by adopting bolts to seal;
step three: starting an external nitrogen pump for equipment, and simultaneously starting a cross driving mechanism, wherein the cross driving mechanism can sequentially drive a spray head to do reciprocating motion along the vertical direction of a space and do stepping circular motion along the central axis of a silicon nitride ceramic piece to be processed when in operation, so that nitrogen is uniformly sprayed on the silicon nitride ceramic piece to be processed;
step four: when the spray head moves upwards, the spray head is in an inclined upwards state, and when the spray head moves downwards, the spray head is in an inclined downwards state, and nitrogen is sprayed to the silicon nitride ceramic piece to be treated in an inclined way;
step five: along with the movement of the rotating assembly, two groups of ejector rods on the supporting assembly can be alternatively jacked up to switch the abutting positions of the ejector rods on the silicon nitride ceramic piece to be processed;
step six: repeating the steps three to five, lasting for about 10 to 15 hours, and then taking out the silicon nitride ceramic piece to finish nitriding treatment.
Compared with the prior art, the invention has the beneficial effects that:
through the cross driving mechanism, nitrogen is directly sprayed to the surface of the silicon nitride ceramic piece to be treated, the nitrogen atmosphere concentration of the silicon nitride ceramic piece to be treated in the nitriding furnace body is improved, the nitrogen directly acts on the surface of the silicon nitride ceramic piece to be treated, the temperature loss of the nitrogen is reduced, the nitriding effect and the nitriding speed are improved, and meanwhile, the spray heads are matched with each other in a circular motion and a reciprocating motion, so that the nitrogen can be uniformly sprayed on the silicon nitride ceramic piece to be treated during nitriding treatment, and the nitriding effect is further enhanced;
through the deflection assembly, when the spray head moves, the deflection direction can be automatically switched to the movement direction, so that nitrogen can be obliquely acted on the silicon nitride ceramic piece to be treated, the silicon nitride ceramic piece to be treated is sequentially subjected to pre-nitrogen treatment and nitrogen treatment, the nitriding treatment effect is further improved, the contact area between the nitrogen and the silicon nitride ceramic piece to be treated is improved by oblique spraying of the nitrogen, the stability of the nitrogen gas flow is improved, the nitrogen is prevented from generating turbulence in the nitriding furnace body, the nitrogen is simultaneously compared with vertical spraying, the nitrogen is prevented from impacting the silicon nitride ceramic piece to be treated by oblique spraying, the air flow when the spray head moves reversely is prevented from blocking air outlet, and the load of an external nitrogen pump to equipment is reduced;
through the supporting component who sets up for when the follower is following the rotating member and is circular motion, can act on fan-shaped butt spare and fan-shaped butt spare No. two in turn, with make outer top ring and interior top ring go up and down in turn, thereby make two sets of ejector pins go up and down in turn, jack-up position when jacking up silicon nitride ceramic piece bottom with the switching, guarantee that silicon nitride ceramic piece is at the nitridation processing in-process, its bottom also can be by fine nitridation processing, compare with current nitridation processing stove, this application is when handling silicon nitride ceramic piece, the scope of handling is bigger, avoid silicon nitride ceramic piece bottom to be insufficient because shelter from.
Drawings
FIG. 1 is a schematic diagram of a nitriding furnace for a silicon nitride ceramic member.
FIG. 2 is a schematic view of another angle of the nitriding furnace for a silicon nitride ceramic member.
FIG. 3 is a schematic view showing the internal structure of a nitriding furnace body in one embodiment of a nitriding furnace for a silicon nitride ceramic member.
Fig. 4 is an enlarged view of the structure at a in fig. 3.
FIG. 5 is a schematic diagram of a cross drive mechanism in one embodiment of a nitriding furnace for silicon nitride ceramic parts.
FIG. 6 is a schematic diagram of a deflection assembly in one embodiment of a nitriding furnace for silicon nitride ceramic members.
FIG. 7 is a partial exploded view of a deflection assembly in one embodiment of a nitriding furnace for a silicon nitride ceramic member.
FIG. 8 is an exploded view of a rotary member, a rotary sleeve, and a vertical shaft in one embodiment of a nitriding furnace for silicon nitride ceramic members.
FIG. 9 is an exploded view of a support assembly in one embodiment of a nitriding furnace for silicon nitride ceramic parts.
FIG. 10 is an exploded view of a fitting structure in one embodiment of a nitriding furnace for a silicon nitride ceramic member.
FIG. 11 is an exploded view of an outer collar and an inner collar of an embodiment of a nitriding furnace for a silicon nitride ceramic member.
In the figure: 1. a nitriding furnace body; 2. a driving device; 3. a first transmission chain; 4. a second transmission chain; 5. a rotating member; 6. rotating the sleeve; 7. a vertical shaft; 701. a support bracket; 8. a vertical plate; 801. a chute; 9. a third transmission chain; 10. a bevel gear set; 11. a driving wheel; 12. a connecting chain; 1201. a fitting wheel; 13. a follower; 1301. a fitting groove; 14. a slide block; 15. a spray head; 1501. a rotation shaft; 1502. a through groove; 16. an annular connecting member; 17. a deflection lever; 1701. an abutment wheel; 18. a lower trigger; 19. an upper trigger; 20. a locking member; 2001. a stagnation-accommodating groove; 2002. an inclined surface; 21. a pulley; 22. a connecting shaft; 23. a spring; 24. a stagnation-accommodating sleeve; 25. a connecting pipe; 26. an inner collar; 27. an outer collar; 28. an outer top ring; 2801. a first sector abutment; 29. an inner top ring; 2901. a second sector abutment; 30. a push rod; 31. a fourth transmission chain; 32. a follower roller.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In addition, an element in the present disclosure may be referred to as being "fixed" or "disposed" on another element or being directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1 to 11, in an embodiment of the present invention, a nitriding furnace for a silicon nitride ceramic member includes: the nitriding furnace body 1, the shower nozzle 15, the cross drive mechanism, deflection assembly and supporting component, make when shower nozzle 15 moves, its deflection direction can switch to its direction of motion voluntarily, and make nitrogen gas can the slope act on the silicon nitride ceramic spare of waiting to handle, make the silicon nitride ceramic spare of waiting to handle go through pretreatment and nitrogen treatment in proper order, and further improve the nitriding treatment effect, and the slope of nitrogen jet has improved the area of contact between nitrogen gas and the silicon nitride ceramic spare of waiting to handle on the one hand, on the other hand improves the stability of nitrogen gas flow, avoid nitrogen gas to take place the turbulent flow in nitriding furnace body 1, simultaneously in perpendicular jet, the slope jet has avoided nitrogen gas to strike the silicon nitride ceramic spare of waiting to handle and the air current when reversing movement, avoid the load of shower nozzle 15, make simultaneously make follow-up roller 32 follow-up rotating member 5 make on the circular motion, so that outer jack-up ring 28 and inner jack-up ring 29 are gone up alternately, thereby make two sets of ejector pins 30 alternately go up with the contact area between the silicon nitride ceramic spare bottom, when the ceramic spare is lifted up by the application, the silicon nitride is fully because the ceramic spare is not handled to the silicon nitride bottom at the same time, the bottom of the present ceramic is fully, the processing is fully can be avoided when the silicon nitride is fully handled to the bottom the ceramic spare is not has been processed to the application.
The method comprises the following steps: a support bracket 701 for supporting a silicon nitride ceramic piece is arranged in the nitriding furnace body 1;
the spray head 15 is arranged in the nitriding furnace body 1, and the spray head 15 can blow heated nitrogen to the side part of the silicon nitride ceramic piece;
the cross driving mechanism is arranged in the nitriding furnace body 1 and comprises a rotating assembly and a plurality of groups of lifting assemblies, the lifting assemblies are connected with the spray heads 15, and the lifting assemblies are alternately matched with the rotating assembly, so that the spray heads 15 can intermittently rotate along the circumferential direction of the silicon nitride ceramic piece and reciprocate along the length direction of the silicon nitride ceramic piece;
the rotating assembly comprises a rotating piece 5 rotatably installed on the nitriding furnace body 1, a rotating shaft of the rotating piece 5 is of a hollow structure, a rotating sleeve 6 is rotatably installed on the rotating shaft of the rotating piece 5, and the supporting bracket 701 is fixedly connected with the nitriding furnace body 1 through a vertical shaft 7 penetrating through the rotating sleeve 6;
the rotating assembly further comprises a driving device 2 arranged at the bottom of the nitriding furnace body 1, wherein the driving device 2 is connected with the rotating sleeve 6 through a first transmission chain 3 and is connected with the rotating piece 5 through a second transmission chain 4;
the lifting components are connected through a fourth transmission chain 31, each lifting component comprises a vertical plate 8 which is perpendicular to the rotary piece 5, two transmission wheels 11 are rotatably arranged on the vertical plate 8, and a connecting chain 12 is sleeved between the two transmission wheels 11;
the lifting assembly further comprises a follower 13 arranged on the vertical plate 8, the follower 13 is connected with the spray head 15, and the follower 13 is connected with the connecting chain 12 through a jogged structure;
the vertical plate 8 is also provided with a bevel gear set 10, the bevel gear set 10 is connected with one of the driving wheels 11, and the bevel gear set 10 is connected with the rotary sleeve 6 through a third driving chain 9;
the bevel gear set 10 comprises a first bevel gear and a second bevel gear which are rotatably arranged on the vertical plate 8 and meshed with each other, the first bevel gear is connected with the driving wheel 11, and the second bevel gear is connected with the third driving chain 9;
the engaging structure comprises an engaging wheel 1201 rotatably mounted on the connecting chain 12 and an engaging groove 1301 formed on the follower 13, the engaging wheel 1201 can roll in the engaging groove 1301, sliding grooves 801 are formed on two sides of the vertical plate 8 along the length direction of the vertical plate, and a sliding block 14 mounted on the follower 13 can slide in the sliding grooves 801;
the inside of the rotary shaft 1501 is communicated with the spray head 15, a plurality of through grooves 1502 are formed in the rotary shaft 1501, an annular connecting piece 16 covering the through grooves 1502 is installed on the rotary shaft 1501 in a sealing and rotating mode, the annular connecting piece 16 is communicated with an inner collar 26 fixed on the vertical plate 8 through a connecting pipe 25, and the inner collar 26 is connected with an outer collar 27 fixed in the nitriding furnace body 1 in a sealing and rotating mode.
In use, the silicon nitride ceramic piece to be treated is placed on the support bracket 701, meanwhile, the interior of the nitriding furnace body 1 is in a sealed state, the driving device 2 is controlled to work, the driving device 2 sequentially drives the rotating piece 5 and the rotating sleeve 6 to rotate during work, specifically, the rotating piece 5 rotates only by a certain angle, so that the vertical plate 8, the spray head 15 and the like do circular motion along the circumferential direction of the silicon nitride ceramic piece to be treated, the rear rotating piece 5 is in a locking state, meanwhile, the rotating sleeve 6 rotates, at this time, the rotating sleeve 6 drives one of the driving wheels 11 to rotate through the third driving chain 9 and the bevel gear set 10, so that the connecting chain 12 sleeved between the two driving wheels 11 moves, wherein the connecting chain 12 can be regarded as being composed of two circumferential sections and one straight line section, the embedded wheel 1201 and the embedded groove 1301 are in a relatively static state, at this time, the follower 13 moves upwards or downwards along the length direction of the sliding groove 801, and when the embedded wheel 1201 moves at the circumferential section of the connecting chain 12, the embedded wheel 1201 rolls in the embedded groove 1301 to enable the follower 13 to continue to move upwards or downwards and then move reversely, at this time, along with the continuous rotation of the driving wheel 11, the follower 13 can be driven to realize one-time reciprocating motion along the length direction of the sliding groove 801 under the cooperation of the embedded wheel 1201 and the embedded groove 1301, so that nitrogen is directly sprayed on the silicon nitride ceramic piece to be treated through the spray head 15, and meanwhile, the spray head 15 performs circular motion and performs reciprocating motion mutually, so that nitrogen can be uniformly sprayed on the silicon nitride ceramic piece to be treated during nitriding treatment, the nitriding speed is improved, and the nitriding effect is enhanced.
Further, before using, the external nitrogen pump needs to be used for pipeline connection with the outer collar 27, and when using, the external nitrogen pump can heat nitrogen for the device first, after the temperature of nitrogen rises to a preset temperature, the pump is used for forming an annular chamber in the outer collar 27, and the outer collar 27 and the inner collar 26, so that heated nitrogen enters the annular chamber, enters the annular connecting piece 16 through the connecting pipe 25 and enters the spray head 15 through the through groove 1502, so that heated nitrogen can be sprayed on a silicon nitride ceramic piece to be treated, and when the rotating piece 5 rotates at a small angle, the vertical plate 8 can be driven to drive the inner collar 26 to synchronously rotate relative to the outer collar 27, two ends of the connecting pipe 25 are positioned on the same vertical surface, and the phenomenon of torsion and break loose of the connecting pipe 25 when the rotating piece 5 rotates is avoided, thereby ensuring the stability of nitrogen pumping.
Through the arrangement, the nitrogen is directly sprayed to the surface of the silicon nitride ceramic piece to be treated, the nitrogen atmosphere concentration of the silicon nitride ceramic piece to be treated in the nitriding furnace body 1 is improved, nitrogen is directly acted on the surface of the silicon nitride ceramic piece to be treated, the temperature loss of the nitrogen is reduced, the nitriding effect and the nitriding speed are improved, meanwhile, the spray head 15 performs circular motion and performs reciprocating motion, and nitrogen can be uniformly sprayed on the silicon nitride ceramic piece to be treated during nitriding treatment, so that the nitriding effect is further enhanced.
It should be noted that, when the rotating member 5 rotates, the driving device 2 drives the rotating sleeve 6 to rotate at the same speed along with the rotating member 5 so as to offset the rotation of the driving wheel 11 caused by the dislocation motion of the rotating member 5, in detail, if the rotating member 5 rotates, the rotating sleeve 6 is in a locking state, at this time, under the action of the third driving chain 9, the bevel gear will rotate by a certain angle, and the driving wheel 11 is driven by the bevel gear one to rotate by a certain angle, and after the rotating member 5 moves for a plurality of times, the phenomenon that the follower 13 is not at the end of the stroke occurs.
Referring to fig. 3, 4, 6 and 7, the deflection assembly is connected to the lifting assembly and the spray head 15, and the deflection assembly can deflect the spray head 15 in a movement direction when the spray head 15 moves;
the deflection assembly comprises a rotary shaft 1501 rotatably mounted on the follower 13 and connected with the spray head 15, two sides of the rotary shaft 1501 are respectively provided with a deflection rod 17, one end of the deflection rod 17 away from the rotation center of the deflection rod is rotatably provided with an abutting wheel 1701, and an upper trigger piece 19 and a lower trigger piece 18 arranged on the riser 8 can be matched with the abutting wheel 1701 to drive the rotary shaft 1501 to rotate;
the deflection assembly further comprises an energy storage structure which is arranged on the follower 13 and is connected with the rotating shaft 1501, the energy storage structure comprises a stagnation-accommodating sleeve 24 symmetrically arranged on the side wall of the follower 13, a connecting shaft 22 is slidably arranged in the stagnation-accommodating sleeve 24, and a pulley 21 is rotatably arranged at one end, far away from the stagnation-accommodating sleeve 24, of the connecting shaft 22;
a spring 23 is further arranged in the stagnation-accommodating sleeve 24, one end of the spring 23 is connected with the inner wall of the stagnation-accommodating sleeve 24, and the other end of the spring is connected with the connecting shaft 22;
the energy storage structure further comprises a locking piece 20 matched with the pulley 21, the locking piece 20 is fixedly connected with the rotating shaft 1501, two holding grooves 2001 are formed in the locking piece 20, the two holding grooves 2001 are connected through two inclined surfaces 2002, protruding portions are formed at one ends, away from the holding grooves 2001, of the two inclined surfaces 2002, and when the rotating shaft 1501 rotates, the pulley 21 can be switched into the holding groove 2001 from one holding groove 2001 through the two inclined surfaces 2002.
When the follower 13 moves upwards, the spray head 15 is in an inclined upwards state, nitrogen sprayed by the spray head 15 acts on the silicon nitride ceramic piece to be treated in an inclined upwards manner, in detail, when the nitrogen acts on the silicon nitride ceramic piece to be treated in an inclined upwards manner, the nitrogen moves upwards from the impact point of the nitrogen and the silicon nitride ceramic piece to be treated, at the moment, the nitrogen close to the impact point can carry out nitriding treatment on the silicon nitride ceramic piece to be treated, the nitrogen far away from the impact point can carry out pre-nitriding treatment on the silicon nitride ceramic piece to be treated due to temperature loss, and the silicon nitride ceramic piece to be treated sequentially undergoes pre-nitriding treatment and nitrogen treatment along with the rising of the spray head 15, so that the nitriding treatment effect is further improved, and the inclined spraying of the nitrogen improves the contact area between the nitrogen and the silicon nitride ceramic piece to be treated, and the stability of the nitrogen gas flow on the other hand, the nitrogen flow in the nitriding furnace body 1 is avoided, the nitrogen gas flow is also prevented from being equal to the vertical spraying, the nitrogen gas flow when the nitrogen impacts the silicon nitride ceramic piece to be treated and moves reversely is avoided, and the load of an external nitrogen pump to equipment is reduced;
specifically, taking fig. 6 as an example, when the spray head 15 moves upwards, the pulley 21 will be in a jogged state with the stagnation groove 2001 at the upper part, at this time, the connecting line between the center of the stagnation groove 2001 and the axis of the rotating shaft 1501 is located on the extension line of the connecting shaft 22, so that the spray head 15 can keep a stable inclined upward state, and along with the rising of the follower 13, the abutting wheel 1701 will abut against the upper trigger piece 19, at this time, the abutting wheel 1701 will roll along the length direction of the upper trigger piece 19, at the same time, the rotating shaft 1501 is driven to rotate by the deflecting rod 17, at the same time, the locking piece 20 is driven to rotate, so that the pulley 21 is separated from the stagnation groove 2001, and moves to the protruding part along one inclined plane 2002, in this process, the spring 23 will be compressed, and as the rotating shaft 1501 continues to rotate, the pulley 21 will move to the protruding part, at this time, the spring 23 will release elastic potential energy, so that the pulley 21 moves to the other inclined plane, when the pulley 21 moves to the other inclined plane 2001, the upper trigger piece 15 is in order to realize the angle turnover, at this time, the moment, the abutting wheel 15 will roll down, the length direction of the upper trigger piece 19 will, the ceramic 15 can roll down, and the ceramic spray head 15 can be automatically, and the inclined device can be inclined to the upper trigger piece 15, and the apparatus can be automatically turned down, when the spray head 15 is triggered, the apparatus, and the apparatus can be automatically, and the inclination device can be automatically turned down, and the apparatus can be turned down, and the apparatus can be automatically and the apparatus can be turned down, when the apparatus is inclined and the apparatus is turned down.
Through the arrangement, when the spray head 15 moves, the deflection direction can be automatically switched to the movement direction, and nitrogen can be obliquely acted on the silicon nitride ceramic piece to be treated, so that the silicon nitride ceramic piece to be treated is sequentially subjected to pretreatment and nitrogen treatment, the nitriding treatment effect is further improved, the contact area between the nitrogen and the silicon nitride ceramic piece to be treated is improved on the one hand by oblique spraying of the nitrogen, the stability of the nitrogen gas flow is improved on the other hand, the nitrogen gas is prevented from generating turbulence in the nitriding furnace body 1, the nitrogen gas is simultaneously sprayed vertically, the nitrogen gas is prevented from impacting the silicon nitride ceramic piece to be treated by oblique spraying, the air flow during the reverse movement is prevented from being blocked, the air outlet of the spray head 15 is prevented, and the load of an external nitrogen pump to equipment is reduced.
Referring to fig. 5 and 9, the support assembly is connected to the support bracket 701 and the rotating assembly, and two groups of ejector rods 30 are connected to the support assembly, and the two groups of ejector rods 30 can alternatively jack up the silicon nitride ceramic piece when the rotating assembly acts;
the supporting assembly comprises an outer top ring 28 and an inner top ring 29 which are concentric and have different diameters, a first fan-shaped abutting piece 2801 is arranged at the bottom of the outer top ring 28, a second fan-shaped abutting piece 2901 is arranged at the bottom of the inner top ring 29, and the first fan-shaped abutting piece 2801 and the second fan-shaped abutting piece 2901 are arranged in a staggered mode;
the support assembly further includes a follower roller 32 rotatably mounted on the rotary member 5 and adapted to the sector one abutment 2801 and sector two abutment 2901.
In the initial state, the follower roller 32 is in a state of abutting against the first sector abutting piece 2801 and the second sector abutting piece 2901, at the moment, the inner jacking ring 29 and the jacking rod 30 on the outer jacking ring 28 are at the same height, and the stability is better when the silicon nitride ceramic piece to be treated is placed on the jacking rod 30, in the use, as the first sector abutting piece 2801 and the second sector abutting piece 2901 are in a dislocation state, when the rotating piece 5 rotates to drive the follower roller 32 to do circular motion, the follower roller 32 is matched with the first sector abutting piece 2801 (the second sector abutting piece 2901) to jack up the outer jacking ring 28 (the inner jacking ring 29), at the moment, only one group of jacking rods 30 acts on the bottom of the silicon nitride ceramic piece to be treated to jack up, and as the rotating piece 5 rotates, the follower roller 32 is separated from the first sector abutting piece 2801 (the second sector abutting piece 2901), at this time, the outer top ring 28 (inner top ring 29) will move downward and drive the push rods 30 abutting against the bottom of the silicon nitride ceramic piece to be processed to move downward, at the same time, the follower roller 32 will cooperate with the second sector abutment member 2901 (first sector abutment member 2801) to push up the inner top ring 29 (outer top ring 28) and push up the other set of push rods 30, i.e. when the rotating member 5 rotates, it will alternately act on the first sector abutment member 2801 and the second sector abutment member 2901, and the two sets of push rods 30 alternately act on the bottom of the silicon nitride ceramic piece to be processed to push up the silicon nitride ceramic piece to be processed, and because the outer top ring 28 and the inner top ring 29 are concentric and different in diameter, the positions of the two sets of push rods 30 acting on the bottom of the silicon nitride ceramic piece to be processed are different, when the silicon nitride ceramic piece to be processed is subjected to nitriding treatment, the bottom of the silicon nitride ceramic piece can be subjected to nitriding treatment without shielding, and compared with the existing nitriding treatment furnace, the method has the advantages that the treatment range is larger when the silicon nitride ceramic piece is processed, and insufficient nitriding of the bottom of the silicon nitride ceramic piece due to shielding is avoided.
Through the above-mentioned setting for when follower roller 32 follows rotating member 5 and does circular motion, can act on fan-shaped butt spare 2801 and fan-shaped butt spare 2901 No. two in turn, so that outer top ring 28 goes up and down with interior top ring 29 in turn, thereby make two sets of ejector pins 30 go up and down in turn, jack-up position when with the jack-up of silicon nitride ceramic bottom in order to switch, guarantee that silicon nitride ceramic is in the nitridation processing course, its bottom also can be by fine nitridation processing, compare with current nitridation processing stove, this application is when handling the silicon nitride ceramic, the scope of handling is bigger, avoid the silicon nitride ceramic bottom to be insufficient because shelter from.
A method of treating a silicon nitride ceramic part using a nitriding furnace as described, comprising the steps of:
step one: pumping external nitrogen into the equipment and connecting the equipment with the nitriding furnace body 1 through a pipeline;
step two: lifting the upper cover of the nitriding furnace body 1, placing the silicon nitride ceramic piece to be treated on the support bracket 701, aligning the central axis of the silicon nitride ceramic piece to be treated with the key center line of the support bracket 701, resetting the upper cover of the nitriding furnace body 1, and screwing by adopting bolts to seal;
step three: starting an external nitrogen pump for equipment, and simultaneously starting a cross driving mechanism, wherein the cross driving mechanism can sequentially drive the spray head 15 to reciprocate along the vertical direction of the space and to do stepping circular motion along the central axis of the silicon nitride ceramic piece to be processed when in operation, so that nitrogen is uniformly sprayed on the silicon nitride ceramic piece to be processed;
step four: when the spray head 15 moves upwards, the spray head 15 is in an inclined upwards state, and when the spray head 15 moves downwards, the spray head 15 is in an inclined downwards state, and nitrogen is sprayed on the silicon nitride ceramic piece to be treated in an inclined way;
step five: along with the movement of the rotating assembly, two groups of ejector rods 30 on the supporting assembly can be alternatively jacked up to switch the abutting positions of the ejector rods 30 on the silicon nitride ceramic piece to be processed;
step six: repeating the steps three to five, lasting for about 10 to 15 hours, and then taking out the silicon nitride ceramic piece to finish nitriding treatment.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (10)
1. A nitriding furnace for a silicon nitride ceramic member, comprising:
a nitriding furnace body (1), wherein a support bracket (701) for bearing a silicon nitride ceramic piece is arranged in the nitriding furnace body (1);
a nozzle (15) arranged in the nitriding furnace body (1), wherein the nozzle (15) can blow heated nitrogen gas to the side part of the silicon nitride ceramic piece;
the nitriding furnace is characterized by further comprising:
the cross driving mechanism is arranged in the nitriding furnace body (1) and comprises a rotating assembly and a plurality of groups of lifting assemblies, the lifting assemblies are connected with the spray heads (15), and the lifting assemblies are alternately matched with the rotating assembly, so that the spray heads (15) can intermittently rotate along the circumferential direction of the silicon nitride ceramic piece and reciprocate along the length direction of the silicon nitride ceramic piece;
the deflection assembly is connected with the lifting assembly and the spray head (15), and can deflect the spray head (15) in the moving direction when the spray head (15) moves;
the support assembly is connected with the support bracket (701) and the rotating assembly, two groups of ejector rods (30) are connected to the support assembly, and the two groups of ejector rods (30) can jack up the silicon nitride ceramic piece alternately when the rotating assembly acts.
2. A nitriding furnace for silicon nitride ceramic parts according to claim 1, characterized in that the rotating assembly comprises a rotating part (5) rotatably mounted on the nitriding furnace body (1), a rotating shaft of the rotating part (5) is of a hollow structure, a rotating sleeve (6) is rotatably mounted on the rotating shaft of the rotating part (5), and the support bracket (701) is fixedly connected with the nitriding furnace body (1) through a vertical shaft (7) penetrating through the rotating sleeve (6);
the rotary assembly further comprises a driving device (2) arranged at the bottom of the nitriding furnace body, the driving device (2) is connected with the rotary sleeve (6) through a first transmission chain (3), and is connected with the rotary piece (5) through a second transmission chain (4).
3. A nitriding furnace for silicon nitride ceramic parts according to claim 2, characterized in that a plurality of groups of lifting components are connected through a fourth transmission chain (31);
the lifting assembly comprises a vertical plate (8) perpendicular to the rotating piece (5), two driving wheels (11) are rotatably arranged on the vertical plate (8), and a connecting chain (12) is sleeved between the two driving wheels (11);
the lifting assembly further comprises a follower (13) arranged on the vertical plate (8), the follower (13) is connected with the spray head (15), and the follower (13) is connected with the connecting chain (12) through a jogged structure;
the vertical plate (8) is further provided with a bevel gear set (10), the bevel gear set (10) is connected with one of the driving wheels (11), and the bevel gear set (10) is connected with the rotary sleeve (6) through a third driving chain (9).
4. A nitriding treatment furnace for silicon nitride ceramic members according to claim 3, characterized in that said fitting structure comprises a fitting wheel (1201) rotatably mounted on said connecting chain (12) and a fitting groove (1301) formed on said follower (13), said fitting wheel (1201) being capable of rolling within said fitting groove (1301);
sliding grooves (801) are formed in the two sides of the vertical plate (8) along the length direction of the vertical plate, and sliding blocks (14) mounted on the follow-up piece (13) can slide in the sliding grooves (801).
5. A nitriding furnace for silicon nitride ceramic members according to claim 3, characterized in that said deflection assembly comprises a rotary shaft (1501) rotatably mounted on said follower (13) and connected to said shower head (15), a deflection lever (17) is mounted on each side of said rotary shaft (1501), an abutment wheel (1701) is rotatably mounted on an end of said deflection lever (17) remote from the rotation center thereof, and an upper trigger member (19) and a lower trigger member (18) provided on said riser (8) are capable of cooperating with said abutment wheel (1701) to drive said rotary shaft (1501) to rotate;
the deflection assembly further comprises an energy storage structure arranged on the follower (13) and connected to the rotation shaft (1501).
6. A nitriding treatment furnace for silicon nitride ceramic parts according to claim 5, characterized in that the energy storage structure comprises a stagnation-accommodating sleeve (24) symmetrically arranged on the side wall of the follower (13), a connecting shaft (22) is slidably arranged in the stagnation-accommodating sleeve (24), and a pulley (21) is rotatably arranged at one end of the connecting shaft (22) far away from the stagnation-accommodating sleeve (24);
a spring (23) is further arranged in the stagnation-accommodating sleeve (24), one end of the spring (23) is connected with the inner wall of the stagnation-accommodating sleeve (24), and the other end of the spring is connected with the connecting shaft (22);
the energy storage structure further comprises a locking member (20) adapted to the pulley (21).
7. The nitriding furnace for silicon nitride ceramic parts according to claim 6, wherein the locking member (20) is fixedly connected with the rotary shaft (1501), two holding grooves (2001) are formed in the locking member (20), the two holding grooves (2001) are connected through two inclined surfaces (2002), and a protruding portion is formed at one end of the two inclined surfaces (2002) away from the holding grooves (2001);
when the rotary shaft (1501) rotates, the pulley (21) can be switched from one of the holding grooves (2001) to the other holding groove (2001) through the two inclined surfaces (2002).
8. The nitriding furnace for silicon nitride ceramic parts according to claim 7, wherein the inside of said rotary shaft (1501) is communicated with a shower head (15), and a plurality of through grooves (1502) are provided on said rotary shaft (1501);
the rotary shaft (1501) is further provided with an annular connecting piece (16) which covers the through groove (1502) in a sealing and rotating mode, the annular connecting piece (16) is communicated with an inner sleeve ring (26) fixed on the vertical plate (8) through a connecting pipe (25), and the inner sleeve ring (26) is connected with an outer sleeve ring (27) fixed in the nitriding furnace body (1) in a sealing and rotating mode.
9. The nitriding furnace for the silicon nitride ceramic part according to claim 2, wherein the supporting assembly comprises an outer top ring (28) and an inner top ring (29) which are concentric and have different diameters, a first sector-shaped abutting piece (2801) is arranged at the bottom of the outer top ring (28), a second sector-shaped abutting piece (2901) is arranged at the bottom of the inner top ring (29), and the first sector-shaped abutting piece (2801) and the second sector-shaped abutting piece (2901) are arranged in a staggered mode;
the support assembly further comprises a follower roller (32) rotatably mounted on the rotary member (5) and adapted to the sector one abutment (2801) and sector two abutment (2901).
10. A method of treating a silicon nitride ceramic article using the nitriding furnace of claim 1, comprising the steps of:
step one: pumping external nitrogen into the equipment and connecting the equipment with a nitriding furnace body (1) through a pipeline;
step two: lifting an upper cover of the nitriding furnace body (1), placing a silicon nitride ceramic piece to be treated on a support bracket (701), aligning a central axis of the silicon nitride ceramic piece to be treated with a key center line of the support bracket (701), resetting the upper cover of the nitriding furnace body (1), and screwing by adopting bolts to seal;
step three: starting an external nitrogen pump for equipment, and simultaneously starting a cross driving mechanism, wherein the cross driving mechanism can sequentially drive a spray head (15) to reciprocate along the vertical direction of a space and to do stepping circular motion along the central axis of a silicon nitride ceramic piece to be processed when in operation, so that nitrogen is uniformly sprayed on the silicon nitride ceramic piece to be processed;
step four: when the spray head (15) moves upwards, the spray head (15) is in an inclined upwards state, and when the spray head (15) moves downwards, the spray head (15) is in an inclined downwards state, and nitrogen is sprayed on the silicon nitride ceramic piece to be treated in an inclined way;
step five: along with the movement of the rotating assembly, two groups of ejector rods (30) on the supporting assembly can be alternatively jacked up to switch the abutting positions of the ejector rods (30) on the silicon nitride ceramic piece to be processed;
step six: repeating the steps three to five, lasting for about 10 to 15 hours, and then taking out the silicon nitride ceramic piece to finish the nitriding position.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117904574A (en) * | 2024-03-15 | 2024-04-19 | 江苏库纳新能源股份有限公司 | Surface nitriding treatment equipment of die |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117904574A (en) * | 2024-03-15 | 2024-04-19 | 江苏库纳新能源股份有限公司 | Surface nitriding treatment equipment of die |
| CN117904574B (en) * | 2024-03-15 | 2024-05-14 | 江苏库纳新能源股份有限公司 | Surface nitriding treatment equipment of die |
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