CN117466274A - Process for preparing carbonyl fluoride - Google Patents
Process for preparing carbonyl fluoride Download PDFInfo
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- CN117466274A CN117466274A CN202311202954.6A CN202311202954A CN117466274A CN 117466274 A CN117466274 A CN 117466274A CN 202311202954 A CN202311202954 A CN 202311202954A CN 117466274 A CN117466274 A CN 117466274A
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- Prior art keywords
- carbonyl fluoride
- trifluoromethoxide
- reactor
- alkali metal
- reaction
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- SYNPRNNJJLRHTI-UHFFFAOYSA-N 2-(hydroxymethyl)butane-1,4-diol Chemical compound OCCC(CO)CO SYNPRNNJJLRHTI-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 17
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 13
- -1 alkali metal trifluoromethoxide Chemical class 0.000 claims abstract description 10
- 239000002994 raw material Substances 0.000 claims abstract description 6
- 238000005580 one pot reaction Methods 0.000 claims abstract description 5
- 229910001515 alkali metal fluoride Inorganic materials 0.000 claims abstract description 3
- 150000001340 alkali metals Chemical class 0.000 claims abstract description 3
- IUAVXIJYHVNRFH-UHFFFAOYSA-N sodium;trifluoromethanolate Chemical compound [Na+].[O-]C(F)(F)F IUAVXIJYHVNRFH-UHFFFAOYSA-N 0.000 claims description 23
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 claims description 22
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 9
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 claims description 6
- DYDNMDWMMLMWPO-UHFFFAOYSA-N cesium trifluoromethanolate Chemical compound FC([O-])(F)F.[Cs+] DYDNMDWMMLMWPO-UHFFFAOYSA-N 0.000 claims description 4
- DTLXXAOQQYGAHD-UHFFFAOYSA-N potassium;trifluoromethanolate Chemical compound [K+].[O-]C(F)(F)F DTLXXAOQQYGAHD-UHFFFAOYSA-N 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 claims description 3
- 239000000010 aprotic solvent Substances 0.000 claims description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- ONJJBDOZWWJLLE-UHFFFAOYSA-N rubidium(1+);trifluoromethanolate Chemical compound [Rb+].[O-]C(F)(F)F ONJJBDOZWWJLLE-UHFFFAOYSA-N 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 17
- 239000002699 waste material Substances 0.000 abstract description 4
- 230000003321 amplification Effects 0.000 abstract description 3
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 230000036632 reaction speed Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 33
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- 239000007789 gas Substances 0.000 description 16
- 229910000831 Steel Inorganic materials 0.000 description 11
- 230000008014 freezing Effects 0.000 description 11
- 238000007710 freezing Methods 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 238000005070 sampling Methods 0.000 description 11
- 238000000926 separation method Methods 0.000 description 11
- 239000010959 steel Substances 0.000 description 11
- 238000003860 storage Methods 0.000 description 11
- 238000005303 weighing Methods 0.000 description 11
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- BLTXWCKMNMYXEA-UHFFFAOYSA-N 1,1,2-trifluoro-2-(trifluoromethoxy)ethene Chemical compound FC(F)=C(F)OC(F)(F)F BLTXWCKMNMYXEA-UHFFFAOYSA-N 0.000 description 1
- BRWSHOSLZPMKII-UHFFFAOYSA-N 2,3,3,3-tetrafluoro-2-(trifluoromethyl)propanoyl fluoride Chemical compound FC(=O)C(F)(C(F)(F)F)C(F)(F)F BRWSHOSLZPMKII-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- IYRWEQXVUNLMAY-UHFFFAOYSA-N carbonyl fluoride Chemical compound FC(F)=O IYRWEQXVUNLMAY-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- NHGVZTMBVDFPHJ-UHFFFAOYSA-N formyl fluoride Chemical compound FC=O NHGVZTMBVDFPHJ-UHFFFAOYSA-N 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- PGFXOWRDDHCDTE-UHFFFAOYSA-N hexafluoropropylene oxide Chemical compound FC(F)(F)C1(F)OC1(F)F PGFXOWRDDHCDTE-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002085 irritant Substances 0.000 description 1
- 231100000021 irritant Toxicity 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- WZCZNEGTXVXAAS-UHFFFAOYSA-N trifluoromethanol Chemical compound OC(F)(F)F WZCZNEGTXVXAAS-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
The invention belongs to the field of preparation of carbonyl fluoride, and particularly relates to a preparation method of carbonyl fluoride, which adopts the following formula (I):wherein CF is as follows 3 OM is an alkali metal trifluoromethoxide, M is an alkali metal, and MF is an alkali metal fluoride. According to the scheme, the continuous flow reaction operation process is adopted, the trifluoro methanol alkali metal salt is used as a raw material, carbonyl fluoride is obtained through one-step reaction in the continuous flow reactor, the reaction operation is simple, the reaction speed is high, the reaction yield is high, the process is safe, three wastes are hardly generated, and the amplification of the compound is easy to realize.
Description
Technical Field
The invention belongs to the field of preparation of carbonyl fluoride, and particularly relates to a preparation method of carbonyl fluoride.
Background
Carbonyl fluoride (COF) 2 ) The formylfluoride and fluorophosgene are colorless, irritant and toxic gas at normal temperature and pressure, and are decomposed into CF at high temperature 4 And CO, react with water to generate HF and CO 2 。
Carbonyl fluoride is an important fluorine-containing monomer, and the product of the reaction of the carbonyl fluoride and hexafluoropropylene oxide can be used for synthesizing perfluoromethyl vinyl ether, and the perfluoroisobutyryl fluoride can be obtained by the reaction of the carbonyl fluoride and hexafluoropropylene; and meanwhile, the carbonyl fluoride is also an environment-friendly cleaning gas and etching gas, and compared with the traditional nitrogen trifluoride, the carbonyl fluoride has the advantages of cleaning performance and etching performance, so that the carbonyl fluoride has a very strong substitution effect on the nitrogen trifluoride in the semiconductor industry.
At present, the methods for synthesizing carbonyl fluoride mainly comprise the following methods, but the methods all involve the use of dangerous chemicals, the products are not easy to purify, the reaction yield is low, the three-waste treatment pressure is high, the reaction yield is low, and the amplification is inconvenient, so that the carbonyl fluoride has few manufacturers and high price, and the application of the carbonyl fluoride is seriously hindered. The main synthesis method is as follows:
1. electrolytic fluorination of hydrogen fluoride is shown in formula (II):
in the method, hydrogen fluoride electrolyte is added into an electrolytic tank, the temperature of the electrolytic tank is controlled to be 65-110 ℃, and then CO is introduced to obtain carbonyl fluoride. The method has the advantages of complex operation, low product yield, high treatment pressure of three wastes and difficult purification of the product.
2. The fluorine gas is directly fluorinated as shown in formula (III):
the method uses CO or CO 2 Reacts with fluorine gas at 1500-250 ℃. The fluorine gas used in the method is dangerous, side reactions are more in the reaction process, and the product is not easy to purify and cannot be industrially produced.
3. Tetrafluoroethylene oxidation is shown in formula (IV):
the method is to react oxygen with tetrafluoroethylene at 200-400 ℃ to obtain carbonyl fluoride. In the reaction process of the method, carbonyl fluoride is easy to decompose to cause explosion, more impurities exist in the product, and the purification difficulty is high.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a preparation method of carbonyl fluoride.
The invention adopts the following technical scheme to realize the aim:
a preparation method of carbonyl fluoride adopts the following formula (I):
wherein CF is as follows 3 OM is an alkali metal trifluoromethoxide, M is an alkali metal, and MF is an alkali metal fluoride.
The method specifically comprises the following steps: the method is characterized in that trifluoro-methanol alkali metal salt is used as a raw material, and carbonyl fluoride is obtained through one-step reaction in a continuous flow reactor.
The alkali metal trifluoromethoxide is one or a mixture of at least two of potassium trifluoromethoxide, sodium trifluoromethoxide, cesium trifluoromethoxide or rubidium trifluoromethoxide.
The continuous flow reactor is one of a micro-channel reactor, a tubular reactor or a three-dimensional network reactor.
The solvent is an aprotic solvent.
Specifically, the solvent is at least two of acetonitrile, diethylene glycol dimethyl ether, benzonitrile, tetraethylene glycol dimethyl ether and sulfolane.
The reaction temperature is 50-300 ℃; preferably 80-150 ℃.
Compared with the prior art, the invention has the beneficial effects that:
according to the scheme, the continuous flow reaction operation process is adopted, the trifluoro methanol alkali metal salt is used as a raw material, carbonyl fluoride is obtained through one-step reaction in the continuous flow reactor, the reaction operation is simple, the reaction speed is high, the reaction yield is high, the process is safe, three wastes are hardly generated, and the amplification of the compound is easy to realize.
Detailed Description
The present invention will be described in further detail with reference to preferred embodiments, so that those skilled in the art can better understand the technical aspects of the present invention.
Example 1
A preparation method of carbonyl fluoride adopts the following formula (I):
the method specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 95℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 94.2%.
Example 2
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in acetonitrile (25 mL), the inside diameter of the microchannel reactor was heated to 95℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 88.7%.
Example 3
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in sulfolane (25 mL), the inside diameter of the microchannel reactor was heated to 95℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 91.8%.
Example 4
The preparation method of carbonyl fluoride specifically comprises the following steps: potassium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 95℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 95.8%.
Example 5
The preparation method of carbonyl fluoride specifically comprises the following steps: cesium trifluoromethoxide (10.8 g) was dissolved in tetraethyleneglycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 95℃and a gas-liquid separation tube was connected to the back of the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 97.2%.
Example 6
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the spiral tube reactor was heated to 95℃and a gas-liquid separation tube was connected after the spiral tube reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into a spiral tube reactor at a rate of 5ml/min, maintaining the temperature of the spiral tube reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 93.7%.
Example 7
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 120℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 95.1%.
Example 8
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 50℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 78.2%.
Example 9
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 300℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 95.8%.
Example 10
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 80℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. And then introducing a sodium trifluoromethoxide solution into the micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 93.9%.
Example 11
The preparation method of carbonyl fluoride specifically comprises the following steps: sodium trifluoromethoxide (10.8 g) was dissolved in tetraethylene glycol dimethyl ether (25 mL), the inside diameter of the microchannel reactor was heated to 150℃and a gas-liquid separation tube was connected after the microchannel reactor, and the exhaust gas was collected by freezing with liquid nitrogen. Then introducing a sodium trifluoromethoxide solution into a micro-reactor at a rate of 5ml/min, maintaining the temperature of the micro-channel reactor for 30min after the solution is completely introduced, transferring the frozen and collected sample into a steel cylinder storage tank, sampling, weighing and analyzing, wherein the collected liquid is carbonyl fluoride, and the yield is 96.2 percent
In summary, it can be seen that, according to the scheme of the application, a continuous flow reaction operation process is adopted, different alkali metal salts of trifluoromethyl alcohol (such as potassium trifluoromethoxide, sodium trifluoromethoxide and cesium trifluoromethoxide) are used as raw materials, and high-yield carbonyl fluoride can be obtained through one-step reaction in a continuous flow reactor (such as a microchannel reactor and a tubular reactor), and meanwhile, the carbonyl fluoride with the yield of 78.2% -97.2% is obtained through optimizing parameters such as reaction temperature, reaction raw materials and the like.
The foregoing is merely exemplary of the present invention, and those skilled in the art should not be considered as limiting the invention, since modifications may be made in the specific embodiments and application scope of the invention in light of the teachings of the present invention.
Claims (7)
1. A method for preparing carbonyl fluoride, which is characterized by adopting the following formula (I):
wherein CF is as follows 3 OM is an alkali metal trifluoromethoxide, M is an alkali metal, and MF is an alkali metal fluoride.
2. The method for preparing carbonyl fluoride according to claim 1, wherein the following steps are specifically adopted: the method is characterized in that trifluoro-methanol alkali metal salt is used as a raw material, and carbonyl fluoride is obtained through one-step reaction in a continuous flow reactor.
3. The method for producing carbonyl fluoride according to claim 2, wherein the alkali metal trifluoromethoxide is one or a mixture of at least two of potassium trifluoromethoxide, sodium trifluoromethoxide, cesium trifluoromethoxide and rubidium trifluoromethoxide.
4. The method for preparing carbonyl fluoride according to claim 2, wherein the continuous flow reactor is one of a microchannel reactor, a tubular reactor or a three-dimensional network reactor.
5. The method for producing carbonyl fluoride according to claim 1, wherein the solvent is an aprotic solvent.
6. The method for producing carbonyl fluoride according to claim 5, wherein the solvent is at least two of acetonitrile, diethylene glycol dimethyl ether, benzonitrile, tetraethylene glycol dimethyl ether, sulfolane.
7. The method for producing carbonyl fluoride according to claim 1, wherein the reaction temperature is 50-300 ℃; preferably 80-150 ℃.
Priority Applications (1)
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CN202311202954.6A CN117466274A (en) | 2023-09-18 | 2023-09-18 | Process for preparing carbonyl fluoride |
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CN202311202954.6A CN117466274A (en) | 2023-09-18 | 2023-09-18 | Process for preparing carbonyl fluoride |
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2023
- 2023-09-18 CN CN202311202954.6A patent/CN117466274A/en active Pending
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