CN117464006B - Multi-zone control vacuum sintering furnace and temperature field and atmosphere field control method thereof - Google Patents
Multi-zone control vacuum sintering furnace and temperature field and atmosphere field control method thereof Download PDFInfo
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- CN117464006B CN117464006B CN202311827362.3A CN202311827362A CN117464006B CN 117464006 B CN117464006 B CN 117464006B CN 202311827362 A CN202311827362 A CN 202311827362A CN 117464006 B CN117464006 B CN 117464006B
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- 238000005245 sintering Methods 0.000 title claims abstract description 70
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 80
- 238000002955 isolation Methods 0.000 claims abstract description 33
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000000926 separation method Methods 0.000 claims abstract description 9
- 238000003860 storage Methods 0.000 claims description 19
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000003566 sealing material Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 33
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000004663 powder metallurgy Methods 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004321 preservation Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000006032 tissue transformation Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/003—Apparatus, e.g. furnaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
Abstract
The invention discloses a multi-region control vacuum sintering furnace and a temperature field and atmosphere field control method thereof, which belong to the technical field of powder metallurgy and comprise a material box (4), wherein the material box (4) is divided into a working region (8) and an air pressure adjusting region (9) through a separation plug (45), the separation plug (45) can move in the material box (4), and an auxiliary heating device (452) is arranged on one side of the separation plug (45) located in the working region (8). The position of the isolation plug is regulated by regulating the thrust generated by the air pressure difference of the working area and the air pressure regulating area, so that the size of the space volume of the working area and the air pressure regulating area is regulated, the volume of the working area is reduced as much as possible under the condition of ensuring the working requirement, and the uniformity of a temperature field and an atmosphere field is improved. The heating device is arranged in the feed box and can move, the heating position can be controlled, the temperature distribution in the feed box is accurately controlled, and the utilization rate of energy sources is improved.
Description
Technical Field
The invention belongs to the technical field of powder metallurgy, and particularly relates to a multi-zone control vacuum sintering furnace and a temperature field and atmosphere field control method thereof.
Background
The sintering furnace is a high-temperature heat treatment furnace for obtaining a required structure by sintering powder pressed compact at high temperature, wherein the powder pressed compact is required to undergo dewaxing, reduction, alloying, tissue transformation and other processes in the sintering process, and the factors such as sintering temperature, protective atmosphere, pressed compact conveying mode, heating and cooling speed and the like are required to be precisely controlled in the process. Therefore, the temperature uniformity and sintering atmosphere of a sintering furnace have important influences on the quality of sintered products.
In order to obtain higher productivity, the existing vacuum sintering furnace is generally designed as an integrated large-space sintering furnace, although more products can be processed at the same time. However, due to various factors, in actual production, there is often a situation that the product to be processed is not full of one furnace, and the temperature uniformity inside the sintering furnace is poor due to the excessive space, so that the sintering quality of the product is affected. The temperature in the material box is generally within a difference of +/-10 ℃, and the temperature difference of different areas is larger and even within a difference of +/-20 ℃ due to factors such as heat capacity, heating, heat preservation and the like in the heating process along with the increase of the space of the material box, so that the temperature difference of the material box is not allowed for processed products, and the temperature difference of the material box is generally allowed to be not more than 5 ℃. At the same time, too much space affects the rate of temperature rise in each region, which has a great influence on the sintering process requiring precise control of the sintering temperature and the heating and cooling rate, and also causes a great deal of unnecessary energy consumption. Therefore, how to improve the uniformity of sintering temperature while ensuring productivity is a big problem to be solved in the existing sintering furnace.
Disclosure of Invention
The invention aims to provide a multi-zone control vacuum sintering furnace and a temperature field and atmosphere field control method thereof, which can adjust the size of a working zone space according to the actual production amount so as to solve the problems in the prior art.
The invention provides a multi-zone control vacuum sintering furnace, which comprises a material box 4, wherein the material box 4 is divided into a working area 8 and an air pressure adjusting area 9 by a separation plug 45, the separation plug 45 can move in the material box, and an auxiliary heating device 452 is arranged on one side of the separation plug 45, which is positioned at the working area 8.
As a further scheme of the invention: a plurality of layers of material plates 43 are transversely arranged in the material box 4 to divide the material box 4 into a plurality of storage cavities, each storage cavity is internally provided with a longitudinally arranged isolation plug 45 to divide the storage cavity into a working area 8 and an air pressure adjusting area 9, and the isolation plugs 45 can translate along the material plates 43;
a working area vacuumizing pipe 413, a sintering gas inlet air pipe 41 and a sintering gas outlet air pipe 42 are arranged outside the material box 4 positioned at one side of the working area, and each storage cavity is communicated with the sintering gas inlet air pipe 41, the sintering gas outlet air pipe 42 and the working area vacuumizing pipe 413;
the outside of the feed box 4 at one side of the air pressure adjusting area 9 is provided with an adjusting area vacuumizing pipe 414, an adjusting air inlet air pipe 46 and an adjusting air outlet air pipe 47, and each storage cavity is communicated with the adjusting air inlet air pipe 46, the adjusting air outlet air pipe 47 and the adjusting area vacuumizing pipe 414.
As a further scheme of the invention: the two ends of the upper side surface and the lower side surface of the isolation plug 45 are provided with isolation plug sliding grooves 451, the two ends of the upper side surface and the lower side surface of the material plate 43 are provided with guide rails 431 to be assembled with the isolation plug sliding grooves 451, the two ends of the inner top surface and the inner bottom surface of the material box 4 are respectively provided with a top surface guide rail 411, a bottom surface guide rail 412 to be assembled with the isolation plug sliding grooves 451, and the isolation plug 45 is made of flexible graphite composite sealing materials.
As a further scheme of the invention: the heat preservation layer 3, the inner shell 2 and the outer shell 1 are sequentially arranged outside the material box 4, the sintering gas inlet air pipe 41, the sintering gas outlet air pipe 42, the adjusting gas inlet air pipe 46 and the adjusting gas outlet air pipe 47 extend out of the outer shell 1 respectively, and the mass flowmeter 11 is arranged in the sintering gas inlet air pipe 41 and the adjusting gas inlet air pipe 46.
As a further scheme of the invention: the inner side wall of the bottom of the inner shell 2 is fixedly provided with a discharging table support 71, the discharging table support 71 penetrates through the heat insulation layer, the top of the discharging table support 71 is provided with a discharging table 7, and a material box 4 is arranged on the discharging table 7.
As a further scheme of the invention: the shell 1 is provided with a vent pipe 10, and one end of the vent pipe 10 is communicated with a cavity between the inner shell 2 and the shell 1.
As a further scheme of the invention: one side of the material box 4 is provided with a door opening, a material box door 48 is arranged to be assembled with the door opening in an opening-closing mode, and the outer shell 1, the inner shell 2 and the heat preservation layer 3 which are positioned on the same side of the material box door 48 are all provided with openings, and a box door 5 is arranged to be assembled with the opening of the outer shell 1 in an opening-closing mode.
As a further scheme of the invention: the two side surfaces of the material plate 43 are provided with material plate sliding grooves 432, and the two inner side walls of the material box 4 are provided with a plurality of rows of raised strips which are matched with the material plate sliding grooves 432.
As a further scheme of the invention: a combined pressure and temperature sensor 44 and a silicon nitride heater 415 are provided in the tank 4.
The invention also provides a temperature field and atmosphere field control method of the sintering furnace, which ensures that the air pressure difference occurs in the working area 8 and the air pressure adjusting area 9 by adjusting the air inflow of the air pressure adjusting area 9, and generates the position of the thrust adjusting isolation plug 45, thereby adjusting the volume of the working area 8 and the air pressure adjusting area 9, synchronously adjusting the position of the auxiliary heating device 452, and ensuring that the atmosphere and the temperature in the working area 8 are uniformly distributed.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention can adjust the position of the isolating plug by adjusting the thrust generated by the air pressure difference between the working area and the air pressure adjusting area, thereby adjusting the size of the space volume of the working area and the air pressure adjusting area. The volume of the working area is reduced as much as possible under the condition of ensuring the working requirement, and the uniformity of the temperature field and the atmosphere field is improved.
2. The auxiliary heating device is arranged in the feed box and can move, the heating position can be controlled, and the temperature distribution in the feed box is accurately controlled by matching with the silicon nitride heater arranged in the feed box, so that the utilization rate of energy sources is improved.
3. The loading plate can be installed according to the size of a product to be processed, the space volume of the material box is reasonably divided, the utilization rate of the limited space of the material box is improved, and the yield is improved.
4. And gas is filled between the outer shell and the inner shell, so that heat conduction and convection heat loss are reduced, and the temperature of the outer shell is prevented from being too high.
Drawings
The present invention is further described below with reference to the accompanying drawings for the convenience of understanding by those skilled in the art.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1 with the door removed;
FIG. 3 is a side cross-sectional view of FIG. 1;
FIG. 4 is a schematic diagram of the structure of the bin;
FIG. 5 is a side view of the bin;
FIG. 6 is a sectional view of G-G of FIG. 5;
FIG. 7 is a cross-sectional view H-H of FIG. 6;
FIG. 8 is a sectional view S-S of FIG. 7;
FIG. 9 is an enlarged view of the portion V of FIG. 7;
FIG. 10 is a schematic view of a material plate;
fig. 11 is a schematic structural view of the isolation plug.
In the figure: 1-a shell, 101-a bolt seat; 2-an inner shell; 3-an insulating layer; 4-a material box; 41-sintering gas inlet gas pipe; 42-sintering gas outlet gas pipe; 43-material plate; 431—a flitch rail; 432-a material plate chute; 44-a combined pressure and temperature sensor; 45-isolating plugs; 451-isolation plug runners; 452-auxiliary heating means; 46-a regulated gas inlet gas pipe; 47-regulating the gas outlet gas pipe; 48-bin door; 49-an air inlet branch pipe; 410-an outlet manifold; 411-top rail; 412—a bottom rail; 413-workplace evacuation tube; 414-vacuum tube of adjusting area; 415-silicon nitride heater; 5-a box door; 51-keeper; 6, supporting legs of the box body; 7-a discharging table; 71-a discharging table bracket; 8-working area; 9-an air pressure adjusting area; 10-a breather pipe; 11-mass flowmeter.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the particular embodiments described herein are illustrative only and are not intended to limit the invention, i.e., the embodiments described are merely some, but not all, of the embodiments of the invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
In embodiment 1, referring to fig. 1, the multi-zone controlled vacuum sintering furnace according to the present invention is stably supported by the box leg 6, the outer shape of the outer shell 1 is cylindrical, one end of the outer shell 1 is opened as a material inlet and outlet, a bolt seat 101 is provided on the side wall of the end, and the box door 5 is assembled with the opening in an openable manner, and can be fixed on the bolt seat 101 by the door bolt 51. A sealing gasket is arranged at the contact position of the box door 5 and the shell 1. The sintering gas inlet gas pipe 41, the sintering gas outlet gas pipe 42, the adjustment gas inlet gas pipe 46, the adjustment gas outlet gas pipe 47, the working area evacuation pipe 413, and the adjustment area evacuation pipe 414 pass through the casing 1, respectively.
In this embodiment, referring to fig. 2, the box door 5 is opened, and the inner shell 2, the insulation layer 3, and the material box 4 are sequentially disposed in the outer shell 1, and the material box 4 is disposed on the discharging table 7 and is fixed to the inner shell 2 through the insulation layer 3 by the discharging table bracket 71. The sintering gas inlet gas pipe 41, the sintering gas outlet gas pipe 42, the adjusting gas inlet gas pipe 46, the adjusting gas outlet gas pipe 47, the working area evacuation pipe 413 and the adjusting area evacuation pipe 414 are respectively communicated with the material box 4. The other ends of the sintering gas inlet air pipe 41, the sintering gas outlet air pipe 42, the adjusting gas inlet air pipe 46 and the adjusting gas outlet air pipe 47 are communicated with a gas supply device, and electromagnetic valves are arranged on the pipelines for gas supply and exhaust adjustment. A mass flowmeter 11 is provided in the sintering gas inlet gas pipe 41 and the conditioning gas inlet gas pipe 46. The working area evacuation tube 413 and the adjustment area evacuation tube 414 are respectively connected with a vacuum system.
In this embodiment, one side of the bin 4 is provided with a door opening, and a bin door 48 is provided to be assembled with the door opening in an openable manner, the bin door 48 and the bin door 5 are located at the same end, and the material plate 43 and the product to be processed enter the bin 4 through the door opening. A sealing gasket is arranged at the contact position of the bin door 48 and the bin 4.
In this embodiment, as shown in fig. 3, the ventilation pipe 10 is disposed on the outer shell 1, one end of the ventilation pipe 10 is communicated with the cavity between the inner shell 2 and the outer shell 1, the other end is communicated with the air supply device, and a valve is disposed on the pipeline to perform air supply adjustment, so that the cavity between the outer shell 1 and the inner shell 2 can be filled with air, heat conduction and convection heat loss are reduced, and the overhigh temperature of the outer shell 1 is avoided.
In this embodiment, referring to fig. 4-7, the material box 4 has a square cavity structure, four layers of material plates 43 are transversely disposed in the material box 4 to divide the material box into five material placing cavities, and a longitudinally disposed isolation plug 45 is disposed in each material placing cavity to divide the material placing cavity into a working area 8 and a pneumatic pressure adjusting area 9. The isolation plug (45) is made of flexible graphite composite sealing materials.
Referring to fig. 11, an auxiliary heating device 452 is disposed on the isolating plug 45 at one side of the working area 8, and two isolating plug sliding grooves 451 are disposed at two ends of the upper and lower sides of the isolating plug 45. Referring to fig. 10, two ends of the upper and lower sides of the material plate 43 are provided with guide rails 431 for assembling with the plug chute 451. Referring to fig. 5, a top rail 411 and a bottom rail 412 are respectively disposed at two ends of the inner top and bottom surfaces of the bin 4, and are assembled with the plug chute 451. Thus, the isolation plug 45 is arranged in the uppermost object placing cavity in the material box 4, the isolation plug sliding chute 451 at the upper end is assembled with the top surface guide rail 411, and the isolation plug sliding chute 451 at the lower end is assembled with the guide rail 431; the isolating plug 45 is arranged in the lowest object placing cavity in the material box 4, the isolating plug sliding groove 451 at the upper end is assembled with the guide rail 431, and the isolating plug sliding groove 451 at the lower end is assembled with the bottom surface guide rail 412. Thus, the isolation plug 45 may translate within the storage cavity.
Further, the left side surface and the right side surface of the material plate 43 are provided with material plate sliding grooves 432, a plurality of rows of raised lines are arranged on the two inner side walls of the material box 4 and are matched with the material plate sliding grooves 432 for installation, so that the material plate 43 is convenient to disassemble and assemble, and the installation position of the material plate 43 can be reasonably selected according to the size of a product to be processed.
A working area vacuumizing pipe 413 is arranged outside the material box 4 positioned at one side of the working area 8, and each storage cavity is communicated with the working area vacuumizing pipe 413; an adjusting area vacuumizing pipe 414 is arranged outside the feed box 4 at one side of the air pressure adjusting area 9, and each storage cavity is communicated with the adjusting area vacuumizing pipe 414.
The outside of the material box 4 at one side of the working area 8 is provided with a sintering gas inlet air pipe 41 and a sintering gas outlet air pipe 42, the sintering gas inlet air pipe 41 and the sintering gas outlet air pipe 42 are respectively positioned at two ends of the material box 4, and each storage cavity is communicated with the sintering gas inlet air pipe 41 through an air inlet branch pipe 49 and is communicated with the sintering gas outlet air pipe 42 through an air outlet branch pipe 410. Sintering gas can be injected into the working area 8 through the sintering gas inlet gas pipe 41, and flows out of the sintering gas outlet gas pipe 42 after flowing through the product to be processed.
The outside of the feed box 4 at one side of the air pressure adjusting area 9 is provided with an adjusting air inlet air pipe 46 and an adjusting air outlet air pipe 47, the adjusting air inlet air pipe 46 and the adjusting air outlet air pipe 47 are respectively positioned at two ends of the feed box 4, and each storage cavity is communicated with the adjusting air inlet air pipe 46 through an air inlet branch pipe 49 and is communicated with the adjusting air outlet air pipe 47 through an air outlet branch pipe 410. The regulated gas can be injected into the gas pressure regulating zone 9 through the regulated gas inlet gas pipe 46 and discharged from the regulated gas outlet gas pipe 47.
Referring to fig. 8 and 9, a plurality of pressure and temperature combination sensors 44 and a silicon nitride heater 415 are embedded in the sidewall of the material box 4, i.e. a row of pressure and temperature combination sensors 44 and a silicon nitride heater 415 are arranged on both sides of each protruding strip on the sidewall of the material box 4. The pressure and temperature combination sensor 44 and the silicon nitride heater 415 of each layer of the object placing cavity are arranged in a plurality of groups at intervals, so that no matter where the isolation plug 45 moves, the pressure and temperature combination sensor 44 reads the temperature and pressure information on two sides of the working area 8 of each layer of the object placing cavity, and the silicon nitride heater 415 can heat the working area 8. The temperature and pressure information measured by the pressure and temperature combination sensor 44 is fed back to the control system to control the opening and closing of the solenoid valve and the silicon nitride heater 415 on the pipeline. The invention also provides a temperature field and atmosphere field control method of the sintering furnace, which is characterized in that the air inflow of the air pressure regulating area 9 is regulated, so that the air pressure difference occurs in the working area 8 and the air pressure regulating area 9, and the position of the thrust regulating isolation plug 45 is generated, thereby regulating the volume of the working area 8 and the air pressure regulating area 9, synchronously regulating the position of the auxiliary heating device 452, improving the utilization rate of energy, utilizing the idea of finite elements, reducing the volume of the working area as much as possible under the condition of ensuring the working requirement, and realizing the uniform distribution of atmosphere and temperature in the working area 8.
In summary, the specific production process of the sintering furnace comprises the following steps:
according to the size of the product to be processed, the number of mounting layers of the material plate 43 is reasonably selected, the product to be processed is placed on the material plate 43, then the material plate 43 is manually inserted into the appropriate protruding strips on the inner wall of the material box 4 in a layered manner, and the material box is divided into storage cavities in the vertical direction. It should be noted that a pallet capable of being placed in the bin 4 may be provided, the pallet 43 in which the product to be processed is placed may be inserted into the pallet, and the pallet may be fed into the bin by the skip.
The isolation plug 45 is installed along the guide rail 431 and the top guide rail 411 in the uppermost layer of the storage cavity, the isolation plug 45 is installed along the guide rail 431 and the bottom guide rail 412 in the lowermost layer of the storage cavity, and the upper guide rail 431 and the lower guide rail 431 of the isolation plug 45 are installed in the middle layer of the storage cavity, so that each layer of the storage cavity is divided into a working area 8 and a regulating gas area 9.
The bin door 48 and the bin door 5 are sequentially closed.
The ventilation pipe 10 fills the cavity between the outer shell 1 and the inner shell 2 with gas, thereby reducing heat conduction and convection heat loss and avoiding overhigh temperature of the outer shell 1.
The vacuum system respectively vacuumizes the working area 8 and the air pressure regulating area 9 through the working area vacuumizing pipe 413 and the regulating area vacuumizing pipe 414.
Sintering gas is injected into the working area 8 through a sintering gas inlet gas pipe 41, flows out of a sintering gas outlet gas pipe 42 after flowing through a product to be processed, a mass flowmeter 11 is arranged in the sintering gas inlet gas pipe 41, whether the inlet gas flow reaches a preset working flow or not is measured, and gas supply at the preset working flow is kept. While the auxiliary heating means 452 on the isolating plug 45 are turned on to heat the sintering gas in the working area 8. The position of the isolating plug 45 can be determined by the temperature fed back by each pressure and temperature combination sensor 44, so that the temperature at both sides of the working area 8 can be known, and when the measured temperature of the pressure and temperature combination sensor far from the heat source is lower than the preset temperature allowable deviation, compared with the preset temperature, the uneven distribution of atmosphere and temperature is indicated.
The solenoid valve on the regulating gas outlet air pipe 47 is in a closed state, and regulating gas is injected into the gas pressure regulating area 9 through the regulating gas inlet air pipe 46, so that the gas pressure of the gas pressure regulating area 9 is higher than that of the working area 8, the isolating plug 45 is driven to move towards the working area 8, the space of the working area 8 is reduced, the auxiliary heating device 452 is closer to a product to be processed, the temperature of the working area 8 is increased until the temperature of the working area 8 reaches the working requirement, and the space of the working area 8 is reduced to a proper size. And the working area 8 and the air pressure adjusting area 9 reach new air pressure balance, and the electromagnetic valve on the air inlet pipe 46 is closed to finish the processing of the product to be processed. Under the proper space, the temperature difference and atmosphere difference of each part in the working area 8 are small, the more uniform the temperature field and the atmosphere field are, the utilization rate of energy can be improved, and the energy is saved. The air flow regulating air inlet air pipe 46 of the air pressure regulating area 9 enters and can flow out from the regulating air outlet air pipe 47, the pressure and temperature combination sensor 44 positioned in the working area 8 and the pressure and temperature combination sensor 44 positioned in the air pressure regulating area 9 transmit detected pressure and detected temperature to the control system at any time, when the pressure of the working area 8 is detected to be too high, the electromagnetic valve on the air outlet air pipe 47 is controlled to be opened, the pressure of the air pressure regulating area 9 is reduced, the isolating plug 45 is moved to the air pressure regulating area 9, the ultrahigh pressure is prevented from being formed in the heating process of the working area 8, products to be processed are prevented from being damaged, or safety is prevented from being damaged. When the pressure and temperature of the working area 8 are detected to be low, the electromagnetic valve on the air flow regulating gas inlet pipe 46 is opened, and a proper amount of regulating gas is injected.
The inner side of the material box is provided with a plurality of silicon nitride heaters 415 in a lattice mode, and the working state of the silicon nitride heaters 415 in the corresponding area is controlled according to the real-time temperature information in the material box 4 fed back by the pressure and temperature combination sensor 44 of the area, so that gridding temperature management is realized. When the normal processing temperatures detected by the pressure and temperature combination sensor 44 in different areas have a large difference, for example, a difference of 5-20 ℃, the temperature of the silicon nitride heater 415 in the low temperature area and the position of the auxiliary heater 452 on the isolation plug 45 can be adjusted to achieve the purpose of precisely controlling the temperature distribution in the bin. All of the silicon nitride heaters 415 have position sensing means thereon, and when the silicon nitride heater 415 senses that the isolation plug 45 is moved from the far working area side to the near working area side of the silicon nitride heater 415 and the entire isolation plug 45 is scratched over the silicon nitride heater 415, the silicon nitride heater 415 stops heating. The silicon nitride heater 415 located in the gas pressure adjusting region 9 is stopped, and the energy utilization rate is improved.
The foregoing is merely illustrative of the structures of this invention and various modifications, additions and substitutions for those skilled in the art can be made to the described embodiments without departing from the scope of the invention or from the scope of the invention as defined in the accompanying claims.
Claims (9)
1. The utility model provides a multizone control vacuum sintering furnace which is characterized by comprising a material box (4), wherein the material box (4) is divided into a working area (8) and an air pressure adjusting area (9) through a separation plug (45), the separation plug (45) can move in the material box, and an auxiliary heating device (452) is arranged on one side of the separation plug (45) located in the working area (8);
a plurality of layers of material plates (43) are transversely arranged in the material box (4) to divide the material box (4) into a plurality of storage cavities, a longitudinally arranged isolation plug (45) is arranged in each storage cavity to divide the storage cavity into a working area (8) and an air pressure adjusting area (9), and the isolation plug (45) can translate along the material plates (43);
the work area vacuumizing tube (413), the sintering gas inlet air tube (41) and the sintering gas outlet air tube (42) are arranged outside the work area bin (4) at one side of the work area, and each storage cavity is communicated with the sintering gas inlet air tube (41), the sintering gas outlet air tube (42) and the work area vacuumizing tube (413);
the outer part of the material box (4) positioned at one side of the air pressure adjusting area (9) is provided with an adjusting area vacuumizing pipe (414), an adjusting air inlet air pipe (46) and an adjusting air outlet air pipe (47), and each object placing cavity is communicated with the adjusting air inlet air pipe (46), the adjusting air outlet air pipe (47) and the adjusting area vacuumizing pipe (414).
2. The multi-zone control vacuum sintering furnace according to claim 1, wherein two ends of the upper side surface and the lower side surface of the isolation plug (45) are provided with isolation plug sliding grooves (451), two ends of the upper side surface and the lower side surface of the material plate (43) are provided with guide rails (431) to be assembled with the isolation plug sliding grooves (451), and two ends of the inner top surface and the inner bottom surface of the material box (4) are respectively provided with a top surface guide rail (411), a bottom surface guide rail (412) to be assembled with the isolation plug sliding grooves (451); the isolation plug (45) is made of flexible graphite composite sealing materials.
3. The multi-zone control vacuum sintering furnace according to claim 1, wherein the heat insulation layer (3), the inner shell (2) and the outer shell (1) are sequentially arranged outside the material box (4), and the sintering gas inlet air pipe (41), the sintering gas outlet air pipe (42), the adjusting gas inlet air pipe (46) and the adjusting gas outlet air pipe (47) extend out of the outer shell (1) respectively, and a mass flowmeter (11) is arranged in the sintering gas inlet air pipe (41) and the adjusting gas inlet air pipe (46).
4. A multi-zone controlled vacuum sintering furnace according to claim 3, characterized in that a discharge table support (71) is fixedly arranged on the inner side wall of the bottom of the inner shell (2), the discharge table support (71) penetrates through the heat insulation layer, a discharge table (7) is arranged at the top of the discharge table support (71), and a feed box (4) is arranged on the discharge table (7).
5. A multi-zone controlled vacuum sintering furnace according to claim 3, characterized in that the outer shell (1) is provided with a vent pipe (10), one end of the vent pipe (10) is communicated with the cavity between the inner shell (2) and the outer shell (1).
6. A multi-zone controlled vacuum sintering furnace according to claim 3, characterized in that the bin (4) is provided with a door opening on one side, and is provided with a bin door (48) assembled with the door opening in an open-close manner, and the outer shell (1), the inner shell (2) and the heat insulation layer (3) which are positioned on the same side of the bin door (48) are all provided with openings, and the bin door (5) is assembled with the opening of the outer shell (1) in an open-close manner.
7. The multi-zone control vacuum sintering furnace according to claim 1, wherein two side surfaces of the material plate (43) are provided with material plate sliding grooves (432), and two inner side walls of the material box (4) are provided with a plurality of rows of protruding bars which are matched with the material plate sliding grooves (432).
8. A multi-zone controlled vacuum sintering furnace according to claim 1, characterized in that a combined pressure and temperature sensor (44) and a silicon nitride heater (415) are arranged in the bin (4).
9. A method for controlling a temperature field and an atmosphere field of a sintering furnace according to any one of the preceding claims, characterized in that the air pressure difference is generated in the working area (8) and the air pressure adjusting area (9) by adjusting the air inflow of the air pressure adjusting area (9), so as to generate the position of the thrust adjusting isolation plug (45), thereby adjusting the volume of the working area (8) and the air pressure adjusting area (9), and synchronously adjusting the position of the auxiliary heating device (452), so that the atmosphere and the temperature in the working area (8) are uniformly distributed.
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